JP2016119336A - 半導体部品分離方法 - Google Patents
半導体部品分離方法 Download PDFInfo
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- JP2016119336A JP2016119336A JP2014256594A JP2014256594A JP2016119336A JP 2016119336 A JP2016119336 A JP 2016119336A JP 2014256594 A JP2014256594 A JP 2014256594A JP 2014256594 A JP2014256594 A JP 2014256594A JP 2016119336 A JP2016119336 A JP 2016119336A
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- substrate
- semiconductor component
- resin material
- bga
- wire material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
Description
まず、図1、図2を参照しつつ、本実施形態の半導体部品分離方法に用いられる半導体部品分離装置100について説明する。図1は実施形態の半導体部品分離方法に用いられる半導体部品分離装置100の概略構成を示す斜視図である。図2(A)は実施形態の半導体部品分離方法に用いられる半導体部品分離装置100を模式的に示す平面図である。図2(B)は実施形態の半導体部品分離方法に用いられる半導体部品分離装置100を模式的に示す側面図である。
2 BGA(半導体部品)
3 はんだボール
4 樹脂材
5 ワイヤー材
6 ワイヤー材(小径)
7 ワイヤー材(大径)
8 ピンセット
100 半導体部品分離装置
101 基台
102 加熱ステージ
103 クランプ部
104 ガイド部
104a ハンドル部
104b 軸部
104c ガイド板
105 XYZ方向移動ステージ
106 第1リール
106a リールストッパー
107 第2リール
107a リールストッパー
108 ワイヤーテンショナー
108a 軸部材
108b バネ部材
108c ボビン部
109 ヒータ
110 伝熱キャップ
Claims (5)
- 分離対象となる半導体部品と基板との間隔の50%〜90%の直径を有する線状部材を前記半導体部品と前記基板との間に配置された樹脂材の端部に接触させる工程と、
前記半導体部品と、前記基板との間に配置されたはんだと前記樹脂材とを軟化させる工程と、
前記線状部材を前記樹脂材の端部に接触させた状態で前記基板の表面に沿って移動させる工程と、
を含む半導体部品分離方法。 - 前記線状部材を前記樹脂材の端部に接触させる際に、ガイド部によって前記線状部材を前記基板側へ押し付ける請求項1に記載の半導体部品分離方法。
- 前記樹脂材の端部に接触させた前記線状部材をガイド部によって前記基板側へ押し付けつつ、前記線状部材を前記基板の表面に沿って移動させる請求項1又は2に記載の半導体部品分離方法。
- 前記はんだと前記樹脂材とを軟化させる工程において、前記線状部材は、前記樹脂材の前記端部に接触させる方向に引きつけられている請求項1乃至3のいずれか1項に記載の半導体部品分離方法。
- 前記線状部材は、前記線状部材を前記樹脂材の端部に接触させた状態で前記基板の表面に沿って移動させる工程において、前記基板における前記線状部材の移動方向の端部に押し付けられるように前記基板の下方に引っ張られている請求項1乃至4のいずれか1項に記載の半導体部品分離方法。
Priority Applications (1)
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JP2014256594A JP6455129B2 (ja) | 2014-12-18 | 2014-12-18 | 半導体部品分離方法 |
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JP2014256594A JP6455129B2 (ja) | 2014-12-18 | 2014-12-18 | 半導体部品分離方法 |
Publications (2)
Publication Number | Publication Date |
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JP2016119336A true JP2016119336A (ja) | 2016-06-30 |
JP6455129B2 JP6455129B2 (ja) | 2019-01-23 |
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JP2014256594A Expired - Fee Related JP6455129B2 (ja) | 2014-12-18 | 2014-12-18 | 半導体部品分離方法 |
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JP (1) | JP6455129B2 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03136353A (ja) * | 1989-10-23 | 1991-06-11 | Sharp Corp | 半導体素子の取り外し装置 |
US20060107513A1 (en) * | 2004-11-19 | 2006-05-25 | Fujitsu Limited | Method of removing integrated circuit chip package and detachment jig therefor |
JP2006303266A (ja) * | 2005-04-22 | 2006-11-02 | Nippon Avionics Co Ltd | 半導体装置のリペア方法 |
JP2007095976A (ja) * | 2005-09-29 | 2007-04-12 | Renesas Technology Corp | 半導体装置のリワーク方法 |
-
2014
- 2014-12-18 JP JP2014256594A patent/JP6455129B2/ja not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03136353A (ja) * | 1989-10-23 | 1991-06-11 | Sharp Corp | 半導体素子の取り外し装置 |
US20060107513A1 (en) * | 2004-11-19 | 2006-05-25 | Fujitsu Limited | Method of removing integrated circuit chip package and detachment jig therefor |
JP2006303266A (ja) * | 2005-04-22 | 2006-11-02 | Nippon Avionics Co Ltd | 半導体装置のリペア方法 |
JP2007095976A (ja) * | 2005-09-29 | 2007-04-12 | Renesas Technology Corp | 半導体装置のリワーク方法 |
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JP6455129B2 (ja) | 2019-01-23 |
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