JP2016118928A - Processing method, alignment mark component, and manufacturing method of component - Google Patents

Abstract

PROBLEM TO BE SOLVED: To achieve high processing accuracy by correcting processing data for processing a workpiece during a processing process carried out after a transfer process when an entire processing area is divided into a plurality of processing ranges having the transfer process interposed therebetween.SOLUTION: The processing method includes executing processing in a first processing range enabling processing in the movable range of a moving stage in the loaded (S1) state of a workpiece at a first loading position with respect to the moving stage (S2), then processing a first alignment mark to the workpiece in the loaded state (S3), then transferring the workpiece on the moving stage at a second loading position (S4 to S6), processing a second alignment mark (S7), then measuring the position attitudes of the workpiece corresponding to the first and second alignment marks (S8 and S9), correcting processing data for a second processing range on the basis of a difference between the measured position attitudes of the workpiece(S10), and executing processing in the second processing range by using the processing data (S11).SELECTED DRAWING: Figure 6

Description

  The present invention relates to a processing method for processing a processing region of a workpiece larger than a movable range of a moving stage, an alignment mark component used in the processing method, and a method for manufacturing a component that manufactures a component by the processing method.

  2. Description of the Related Art Conventionally, there is known a processing apparatus that performs workpiece processing, for example, cutting processing, by relatively moving a workpiece mounted on a moving stage and a tool. In this type of processing apparatus, of course, the accuracy of the moving stage that relatively moves the workpiece and the tool affects the processing accuracy. Further, the size of the workpiece to be processed and the size of the processing area to be processed are limited by the movable range of the moving stage. Usually, a high-accuracy moving stage having a movable range larger than the machining area is necessary for the cutting process. However, if the movable range of the moving stage is increased, the apparatus becomes larger, and there is a problem that the increased apparatus is difficult to maintain the accuracy, or the manufacturing cost increases to ensure the required accuracy.

  In view of the above problems, a technique for processing a region exceeding the movable range of the moving stage has been conventionally proposed (for example, Patent Document 1 below). Patent Document 1 proposes a configuration for machining a linear groove that exceeds the movable range of linear feed of a linear axis on which a tool or a workpiece is mounted. In general, in a processing apparatus, the moving directions of a moving stage on which a tool and a work are mounted are often different, but in Patent Document 1, each of a tool and a work is mounted on different moving stages. And in the structure of patent document 1, it has an axis | shaft structure which moves to the direction which moves in parallel with the linear groove | channel which both the tool and the moving stage which mounts a workpiece | work process. As described above, in Patent Document 1, the two movable stages are moved in the same direction, and the movable range of each movable stage is required even if the movable range of each movable stage is less than the length of the straight groove to be processed. The length of the straight groove can be processed.

JP 2010-110861 A

  Using a plurality of moving stages for a tool and a workpiece as in Patent Document 1 is one of the methods for dividing a whole machining area into a plurality of machining ranges. However, it is very difficult to obtain a precise mechanism for driving two different moving stages in the same direction as in Patent Document 1, and the manufacturing cost of the processing apparatus may increase.

  Further, in the configuration using two moving stages as in Patent Document 1, since the influence of the error of each moving stage affects the processing accuracy, the processing accuracy is reduced as compared with the configuration using only one moving stage. there is a possibility. In the configuration of Patent Document 1, an attempt is made to reduce the influence of errors by moving each moving stage little by little at a small distance alternately. However, in the configuration of Patent Document 1, since a combined error such as a straightness error between two moving stages acts on the final shape to be processed, it is difficult to reduce the final processing error. .

  On the other hand, in order to avoid the disadvantages of the configuration using a plurality of moving stages as in Patent Document 1, it is conceivable to limit the number of moving stages to be applied to processing to one, for example. For example, the tool is fixed (or the position is fixed even if it is mounted on the moving stage), and only the workpiece is moved on the moving stage. In this case, if a machining area exceeding the movable range of the moving stage is to be machined, first, machining is performed on the first machining range that can be machined within the movable range of the moving stage in the machining area (first machining step). . Subsequently, the work is moved to a different position on the moving stage (transfer process). Then, processing is performed on the second processing range that can be processed within the movable range of the moving stage (second processing step). A process of performing processing by dividing the entire processing region into a plurality of processing ranges in association with the transfer process in this way is sometimes referred to as “stitching processing”, for example.

  Thus, if the number of moving stages to be applied to processing is limited to one, it is possible to avoid error superposition as in the case of using a plurality of moving stages. Instead, in this method, as described above, a workpiece moving step is always required between the first and second processing steps in order to switch between a plurality of processing ranges. There is.

  For example, when moving, there is a possibility that an installation error of the workpiece with respect to the moving stage occurs. Further, for example, by moving a large and heavy workpiece so as to protrude from the side opposite to the first processing step of the moving stage for the second processing step, the moving stage may be inclined on the support means. is there. Due to the above errors, the straightness when the workpiece is linearly moved by the moving stage may change.

  Specifically, when a continuous straight line (groove, etc.) is processed in the first and second processing steps, a deviation such as a step may occur at the joint of the straight lines due to the influence of the error as described above. There is sex. Further, it is also conceivable that the straight line (groove or the like) to be processed does not continue in a straight line, but appears as a processing error that forms, for example, a “<” shape. Such a shift such as a step is first processed at the first processing step, and then processed data (for example, moving stage control) used when processing the workpiece in the second processing step following the transfer step. Data) will be corrected.

  According to the conventional method, when performing processing through the first processing step, the transfer step, and the second processing step as described above, for example, trial processing and shape measurement are repeated in advance, and processing in the second processing step is performed. There is a high possibility that troublesome work such as correction of data is required.

  In view of the above problems, an object of the present invention is used when machining a workpiece in a machining process performed subsequent to the transfer process when the entire machining area is divided into a plurality of machining ranges across the transfer process. Processing data can be easily corrected so that high processing accuracy can be obtained.

  In order to solve the above-mentioned problem, in the present invention, in a machining method for moving a workpiece mounted on a moving stage with respect to a tool and machining a machining area of a workpiece larger than a movable range of the moving stage, A first process capable of moving the workpiece by the moving stage in a state where the workpiece is mounted at a first mounting position with respect to the moving stage, and processing within the movable range of the moving stage in the processing area of the workpiece. A first machining step for machining a range; and the workpiece is moved by the movable stage while the workpiece is mounted at a first mounting position with respect to the movable stage, and the workpiece is moved to the workpiece by the tool. A first marking step for processing a first alignment mark at a mark site positioned with respect to the moving stage; A relocation step of relocating the work to be mounted at a mounting position of 2, and moving the work with the moving stage in a state where the work is mounted at a second mounting position with respect to the moving stage; A second marking step for processing a second alignment mark at a mark portion positioned with respect to the workpiece; a measuring step for measuring positions and orientations of the first alignment mark and the second alignment mark; and the measuring step Based on the difference between the position and orientation of the first alignment mark and the second alignment mark measured in step 2, the second machining range that can be machined within the movable range of the moving stage in the machining area of the workpiece A correction step of correcting processing data for processing, and the second mounting position with respect to the moving stage; And a second machining step for machining the second machining range by controlling the tool and the moving stage based on the machining data corrected in the correction step. Adopted the configuration.

  According to the above configuration, the second processing data for processing the second processing range based on the difference between the position and orientation of the first and second alignment marks processed before and after the workpiece transfer step. Correct. That is, the second machining data 302 is corrected based on the difference between the position and orientation of the workpiece 16 in the first machining process corresponding to each alignment mark and the position and orientation of the workpiece 16 before the second machining process starts. Thus, the entire machining area can be machined with high accuracy.

It is explanatory drawing which showed an example of schematic structure of the processing apparatus which can implement the processing method along this invention. It is explanatory drawing which showed schematic structure of the control system of the processing apparatus which can implement the processing method according to this invention. It is explanatory drawing which showed the mode in process with respect to a workpiece | work by the processing method according to this invention. (A)-(d) is explanatory drawing which showed in order the processing process in the processing method according to this invention. (A), (b) is explanatory drawing which showed the attitude | position of the workpiece | work shown by the 1st alignment mark and the 1st and 2nd alignment mark in the processing method according to this invention. It is the flowchart figure which showed the flow of the manufacturing process controlled by the control system of FIG. It is explanatory drawing which showed the alignment mark components comprised so that attachment or detachment with respect to the workpiece | work was possible.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention will be described with reference to embodiments shown in the accompanying drawings. The following embodiment is merely an example, and for example, a detailed configuration can be appropriately changed by those skilled in the art without departing from the gist of the present invention. Moreover, the numerical value taken up by this embodiment is a reference numerical value, Comprising: This invention is not limited.

  FIG. 1 shows an example of a schematic configuration of a processing apparatus 100 capable of performing a processing method according to the present invention. The processing apparatus 100 includes moving stages X, Y, and Z that change the relative positional relationship between the tool 17 and the workpiece 16 (relative movement) along X, Y, and Z three-dimensional coordinate axes. In the figure, for example, among the three-dimensional coordinate axes, the X axis corresponds to the left to right direction in the figure, the Y axis corresponds to the front to the back direction in the figure, and the Z axis corresponds to the up to down direction in the figure.

  It is assumed that the origin of the three-dimensional (XYZ) coordinate axis is set to a predetermined part (the position is arbitrary) of the processing apparatus 100. In this case, this three-dimensional coordinate system can be considered as a processing apparatus coordinate system. For machining control, it is conceivable to use three-dimensional (XYZ) coordinate axes having different origin positions for the workpiece 16 and the tool 17. In the present embodiment, for ease of explanation, for example, the position and orientation of the workpiece 16 are expressed using a processing apparatus coordinate system having a predetermined portion of the processing apparatus 100 at the origin position.

  In the example of FIG. 1, the workpiece 16 is mounted on the moving stage X, and the tool 17 is mounted on the moving stage Y disposed above the moving stage X. Further, the moving stage X is disposed on a moving stage Z that forms the lower structure of the processing apparatus 100, and is configured so that the moving stage X can be moved up and down by the moving stage Z.

  In this embodiment, a probe 221 that detects the position of a target portion on the workpiece 16 is used. The probe 221 is, for example, a contact-type shape sensor, and a stylus (probe) is brought into contact with the target portion of the work 16 and the position of the target portion is detected based on the protruding amount.

  In the configuration of FIG. 1, the probe 221 is attached to the moving stage Y together with the tool 17. The mounting position of the probe 221 is precisely adjusted within the accuracy range required for processing control. Further, it is assumed that the relationship between the position control by the moving stage Y and the stylus detection control is calibrated in advance within the same accuracy range. It is assumed that the probe 221 can output, for example, the coordinate value of the target part in the processing apparatus coordinate system by detecting the stylus (probe).

  In this embodiment, an alignment mark is processed on the workpiece 16 as will be described later in order to correct the processing data. The probe 221 is also used to detect this alignment mark.

  FIGS. 4A to 4D show a slightly different configuration that realizes a functionally equivalent configuration to the processing apparatus 100 of FIG. 1 and an operation state during processing. 4A to 4D, for example, among the three-dimensional coordinate axes, the X axis (13) is the left to right direction in the figure, the Y axis (14) is the front to the back direction in the figure, and the Z axis (15). Corresponds to the upper to lower direction in the figure.

  4A to 4D show the positional relationship between the workpiece 16, the moving stage 18 (corresponding to the moving stage X in FIG. 1), and the tool 17 when the workpiece 16 is processed. That is, in FIGS. 4A to 4D, a moving stage (X in FIG. 1) that can move in the X-axis (left and right in the drawing) direction on which the workpiece 16 is mounted is shown as a moving stage 18.

  4A to 4D, the movable stage 18 is supported on a guide rail-like stage guide 19 so as to be slidable in the X-axis (left and right in the drawing) direction. 4A to 4D, the moving stage Y in FIG. 1 is not shown, and the tool 17 is used at a fixed position in the Y-axis direction (front to back in the figure). And The tool 17 is supported by a moving stage 21 corresponding to the moving stage Z in FIG. The moving stage 21 can slide on the stage guide 22 in the Z-axis (up and down in the drawing) direction.

  In the following description, the moving stages 18 and 21 that control movement in the X-axis and Z-axis directions follow the movement in parentheses as necessary, such as the moving stages 18 (X) and 21 (Z). Indicate the coordinate axes. In the following, the processing control will be described along the configurations of FIGS. 4A to 4D. If necessary, for example, by coordinate axis notation written in parentheses such as the moving stages 18 (X) and 21 (Z). The relationship with the moving stages X and Z in FIG. 1 can be read.

  Here, it considers about the process with respect to the workpiece | work 16 in a present Example along Fig.4 (a)-(d). In the following, the workpiece 16 is moved in the left-right direction (X-axis direction) in FIGS. 4A to 4D by the moving stage 18 (X) and moved relative to the tool 17 mounted at the center of the moving stage Y. Then, it is assumed that a straight groove is processed in the workpiece 16. The workpiece 16 shown in FIGS. 4A to 4D has a length (size) corresponding to almost the entire length of the stage guide 19 that supports the moving stage 18 (X) in the X-axis direction.

  The moving stage 18 (X) is slidably supported on the stage guide 19. The length of the moving stage 18 (X) in the X-axis direction occupies at least about half of the total length of the stage guide (19) so that a stable posture on the stage guide 19 can be maintained. Further, it is assumed that the position of the tool 17 can be controlled only in the Z-axis direction by the moving stage 21 (Z) and does not move in the X- and Y-axis directions.

  4 (a) to 4 (d), the moving stage 18 (X) has a length of about ½ of the total length on the stage guide 19 in the X-axis direction. For this reason, the movable range 20 of the moving stage 18 (X) is only about the remaining half of the entire length of the stage guide 19 that supports the moving stage 18 (X). The length of the movable range 20 of the moving stage 18 (X) corresponds to a relative moving range (relative moving amount) in which the workpiece 16 can be moved relative to the tool 17 as it is.

  Here, consider a case where the moving stage 18 (X) is moved and a linear groove is machined (for example, cut) into the workpiece 16 by the tool 17. In this case, if the mounting position of the workpiece 16 with respect to the moving stage 18 (X) is not changed, the total length of the straight groove that can be processed is at most about ½ of the total length of the stage guide 19 that supports the moving stage 18 (X). Become.

  For this reason, as shown in FIGS. 4A to 4D, for example, a linear groove close to the entire length of the workpiece 16 having a length (size) corresponding to almost the entire length of the stage guide 19 in the X-axis direction. In the case of machining, division (stitching) machining as shown in the figure is required. That is, the entire processing region of the straight groove is divided into the first processing range 24 and the second processing range 25 for processing.

  First, as shown in FIGS. 4A to 4B, a first machining step for machining the first machining range 24 is performed by moving the moving stage 18 (X), and subsequently, FIG. 4C. As described above, a moving step of changing the mounting (mounting) position of the workpiece 16 with respect to the moving stage 18 (X) is performed. This relocation process can be performed manually by an operator, or can be performed by a robot apparatus (not shown). Subsequently, as shown in FIGS. 4C to 4D, the moving stage 18 (X) is moved to process the second processing range 25 continuously to the first processing range 24.

  As described above, the first machining range 24 and the first machining range 24 that can be machined within the movable range of the movable stage in the intended machining area, with the transfer process of transferring the workpiece 16 to the movable stage 18 (X). Processing is performed on the processing range 25 of 2. By so-called stitching as described above, it is possible to machine a straight groove substantially close to the entire length of the workpiece 16.

  In this case, as described above, the posture change of the workpiece 16 occurs due to an installation error, the inclination or deformation of the moving stage 18 and the stage guide 19 before and after the moving step of transferring the workpiece 16 to the moving stage 18 (X). there is a possibility.

  Therefore, in this embodiment, as shown in FIG. 3, the first alignment marks 26 a to 26 c are respectively formed on the workpiece 16 before and after the transfer step between the first and second processing steps. The second alignment marks 27 a to 27 c are processed with the tool 17. These first and second alignment marks 26a to 26c and 27a to 27c are each processed by the tool 17 by positioning the workpiece 16 at a predetermined position (mark part) by, for example, the moving stage 18 (X). As the tool for processing the alignment marks 26a to 26c and 27a to 27c, the same tool 17 as that for processing the first and second processing ranges 24 or 25 is used.

  Moreover, the position of the mark site | part which processes the 1st, 2nd alignment mark 26a-26c, 27a-27c on the workpiece | work 16 is arbitrary. However, considering the amount of movement of the moving stage necessary for machining control, which will be described later, for example, the center of the workpiece 16 is suitable as shown in FIG. Further, as a mark part for processing the first and second alignment marks 26a to 26c and 27a to 27c, a non-effective surface that does not affect the function of the workpiece 16 after completion, or a part such as a blank is selected. Good.

  The first and second alignment marks 26a to 26c and 27a to 27c can be used effectively only in the processing steps according to this embodiment. Accordingly, the first and second alignment marks 26a to 26c and 27a to 27c are processed into parts that are removed by, for example, cutting or the like in other processes performed after the processing process according to the present embodiment. May be. Further, the first and second alignment marks 26a to 26c and 27a to 27c are processed in a portion formed so as to protrude from the substantial main body portion of the workpiece 16 on the assumption that the workpiece 16 is removed by cutting or the like in a subsequent process. You may make it do.

  The first alignment marks 26a to 26c are after the first processing step and before the workpiece 16 transfer step, and the second alignment marks 27a to 27c are after the workpiece 16 transfer step. Process.

  That is, in FIGS. 4A to 4D, the first alignment marks 26a to 26c are moved by the tool 17 when the work 16 is mounted on the moving stage 18 (X) shown in FIG. Process. That is, this state is a state immediately after the first machining range 24 is machined on the workpiece 16.

  Further, the second alignment marks 27a to 27c are processed by the tool 17 in a state where the workpiece 16 is mounted on the moving stage 18 (X) shown in FIG. That is, this state is a state before (directly) machining the second machining range 25 for the workpiece 16.

  FIG. 3 corresponds to the mounting state of the workpiece 16 on the moving stage 18 (X) shown in FIG. 4C, and the first alignment marks 26a to 26c and the second alignment marks 27a to 27c have been processed. Shows the state.

  Each of the first alignment marks 26a to 26c and the second alignment marks 27a to 27c, for example, processes a dot-like mark having a hemispherical cross section so as to form three congruent (or similar) right-angled triangular vertices. . Then, the processing positions of the dot-shaped marks are determined so that the two sides sandwiching the right angle of the right triangle are parallel to the X and Y axes. For example, in the example of FIG. 3, the straight line connecting the alignment marks 26b (27b) and 26c (27c) is parallel to the X axis, and the straight line connecting the alignment marks 26a (27a) and 26b (27b) is parallel to the Y axis. The processing position of the mark is defined in

  Specifically, such processing is performed so that the dot-shaped marks constituting the first and second alignment marks 26a to 26c and 27a to 27c can be processed at the positions of the above-described triangular vertices. 18 (X), controlled by moving stage (Y: FIG. 1). That is, the workpiece 16 is moved by the moving stage 18 (X) and the moving stage (Y: FIG. 1) so that the dot-shaped marks constituting the first and second alignment marks can be processed at the positions of the apexes of the triangle. Move relative to the tool 17. On the other hand, the control conditions in the Z-axis direction by the moving stage 21 (Z) are not changed for the marks constituting the first and second alignment marks 26a to 26c and 27a to 27c, and all the same conditions are used.

  By using the above processing conditions, the first and second alignment marks 26a to 26c and 27a to 27c are in a processing state reflecting the position and orientation of the workpiece 16 when these are processed.

  For example, the probe 221 (FIG. 1: FIG. 3 shows only the position of the deepest part of the first alignment marks 26a to 26c processed at three different positions by using the broken lines with the same reference numerals). . The triangle formed by the alignment marks 26a to 26c (the deepest part thereof) at the time of detection by the probe 221 takes a unique position and orientation in the processing apparatus coordinate system. As a matter of course, the combination of the three coordinate values of the alignment marks 26a to 26c (the deepest portion thereof) indicates the position and orientation of the workpiece 16 in the mounted state with respect to the moving stage 18 (X) when processing these marks. It can be used as position and orientation data.

  The same applies to the second alignment marks 27a to 27c. That is, the probe 221 detects the coordinate value of the deepest part of the second alignment marks 27a to 27c processed after the workpiece 16 moving step. The combination of the three coordinate values of the alignment marks 27a to 27c (the deepest part thereof) after the transfer process of the workpiece 16 indicates the position and orientation of the workpiece 16 in the mounting state with respect to the moving stage 18 (X) when processing these marks. It can be used as position and orientation data.

  For example, the coordinates of the reference position (for example, the center of gravity) of the workpiece 16 can be calculated from the coordinate values in the processing apparatus coordinate system of the alignment marks 26a to 26c and 27a to 27c detected by the probe 221. For example, if a predetermined reference axis (for example, the central axis in the longitudinal direction) of the workpiece 16 is defined, the X, Y of the reference axis of the workpiece 16 can be determined from the triangles of the alignment marks 26a to 26c or 27a to 27c. , Z rotation angle (tilt) around each coordinate axis can be calculated.

  Further, if the position / orientation data corresponding to the first alignment marks 26a to 26c and the position / orientation data corresponding to the second alignment marks 27a to 27c are compared, the relative values before and after the moving process of the workpiece 16 are compared. Changes in position and orientation can be obtained.

  That is, based on the difference between the position and orientation of the first and second alignment marks, for example, the second processing range 25 can be processed smoothly and continuously to the processed first processing range 24 (FIG. 3). The processing data for processing the second processing range 25 can be corrected.

  For example, FIGS. 5A and 5B are straight lines in which the machining ranges 24 and 25 are corrected by correcting the inclination (or the rotation amount around the Y axis) of the workpiece 16 with respect to the X axis (moving stage 18 (X)). The example which correct | amends so that it may become a groove | channel is shown.

  FIG. 5A shows a state immediately after processing (first processing step) in the processing range 24, and the first alignment marks 26a to 26c are processed in a mounted state with respect to the moving stage 18 (X). Here, if the first alignment marks 26a to 26c are detected by the probe 221, the posture of the workpiece 16 (particularly, the inclination with respect to the X axis) can be calculated from the position and posture data corresponding to the first alignment marks 26a to 26c. For example, the posture (tilt with respect to the X axis) 28 can be calculated using at least two marks having different positions with respect to the X axis (moving stage 18 (X)).

  On the other hand, FIG. 5B shows a state after the workpiece 16 is moved on the moving stage 18 (X) so that the processing range 25 (FIG. 3) can be processed, and the second alignment marks 27a to 27c are the moving stage. 18 (X) is processed in a mounted state. Similarly, if the probe 221 detects the second alignment marks 27a to 27c, the posture (inclination with respect to the X axis) 29 of the workpiece 16 can be calculated from the position and orientation data corresponding to the second alignment marks 27a to 27c.

  The machining range 25 (FIG. 3) is machined by the tool 17 from the state of FIG. 5B (second machining process). In the present embodiment, the processing data for the second processing step prepared in advance is not used as it is, but is corrected prior to the second processing step. That is, in this embodiment, machining is performed by an amount corresponding to the difference between the first and second alignment mark position / orientation data, particularly in this example, the difference between the position / orientation (tilt with respect to the X axis) 28 and 29 of the workpiece 16. The machining data in the range 25 is corrected.

  In the example of FIGS. 5A and 5B, the workpiece 16 is more greatly inclined to the left in FIG. 5B than in FIG. 5A. For example, in order to ensure as large a movable range 20 as possible on the moving stage 18 (X), the length of the moving stage 18 (X) in the X-axis direction cannot be increased so much. If a large workpiece 16 capable of machining a machining area larger than the movable range 20 is attached to the moving stage 18 (X), in many cases, the workpiece 16 protrudes greatly from the moving stage 18 (X). It will be in the state to mount. At this time, for example, the moving stage 18 (X) is supported as shown in FIGS. 5A and 5B after the work 16 is moved due to imbalance of the load of the work 16 with respect to the moving stage 18 (X). There is a possibility that the straightness of the stage guide 19 changes before and after the relocation.

  If the machining data in the machining range 25 is used as it is in this state, the straight groove in the machining range 25 is machined shallower as it goes to the left. Therefore, in order to avoid this, the machining data for the machining range 25 is corrected. For example, as the moving stage 18 (X) is advanced, the machining range is such that the amount of entry of the tool 17 into the workpiece 16 increases by an amount corresponding to the difference between the position and orientation (tilt with respect to the X axis) 28 and 29 of the workpiece 16. The machining data for 25 is corrected. In order to gradually increase the amount of entry of the tool 17 into the workpiece 16, in the configuration of FIG. 1, control is performed such that the moving stage (Z) is raised as the moving stage (X) is advanced. 4A to 4D, control is performed such that the tool 17 is lowered by the moving stage 21 (Z) as the moving stage (X) is advanced.

  In the above description, the machining control related to the posture of the workpiece 16, for example, the rotation amount around the Y axis (inclination with respect to the X axis) has been described. However, in this embodiment, for example, the three first and second alignment marks 26a to 26c and 27a to 27c are processed before and after the transfer step so as to form a triangle. The positions (coordinates) of the first and second alignment marks 26 a to 26 c and 27 a to 27 c are measured by the probe 221. Each of the first and second alignment marks 26a to 26c and 27a to 27c is processed into a triangular vertex position that defines, for example, one plane.

  For this reason, the position and orientation of the alignment marks 26a to 26c or 27a to 27c in the processing apparatus coordinate system are measured via combinations of the positions (coordinates) of the first and second alignment marks 26a to 26c and 27a to 27c. it can. At the same time, the position and orientation of these alignment marks 26a to 26c or 27a to 27c reflect the position and orientation of the workpiece 16 in the processing apparatus coordinate system when processing these alignment marks. For this reason, the second machining range is also measured through the measurement of the alignment marks 26a to 26c and 27a to 27c with respect to the rotation amount of the work 16 around the X axis and the Z axis before and after the transfer process. The machining data for 25 can be corrected.

  As described above, it is possible to process the workpiece 16 so that the machining range 25 (for example, a straight groove) smoothly continues to the machining range 24 without any step or inclination.

  In the above description, only the difference between the position and orientation (inclination with respect to the X axis) 28 and 29 of the workpiece 16 has been described, but the same control can be performed for the position of the workpiece 16 as a matter of course. For example, if there is a difference in the position and orientation data of the first and second alignment marks 26a to 26c, 27a to 27c, particularly the height of the workpiece 16 detected from the marks, the machining in the machining range 25 is started as it is. There is a possibility that a level difference is generated between the processing range 24 and discontinuity. Therefore, if there is a position / posture data difference between the first and second alignment marks 26a to 26c and 27a to 27c, particularly a position difference, the linear groove in the machining range 25 to be machined is translated by that amount. Processing data for the range 25 may be corrected.

  The above processing control is performed by the control system of the processing apparatus 100 (FIG. 1). The control system of the processing apparatus 100 (FIG. 1) can be configured as shown in FIG. 2, for example.

  The control system in FIG. 2 includes a CPU 201 composed of a general-purpose microprocessor, a ROM 202, a RAM 203, an external storage device 204, interfaces 205, 207, 208, a network interface 206, and the like.

  The ROM 202 can be used, for example, for storing a machining control program described later. In addition, the storage area for that may be comprised by memory | storage devices, such as E (E) PROM, so that the process control program and control data stored in ROM202 can be updated later. The RAM 203 is composed of a DRAM element or the like, and is used as a work area for the CPU 201 to execute various controls and processes.

  The external storage device 204 is configured by, for example, an SSD or HDD disk device. The external storage device 204 can store, for example, a machining control program described later in a file format. The external storage device 204 may be configured by a recording medium such as various removable optical disks, or a removable SSD or HDD disk device, or a removable flash memory. Such various detachable computer-readable recording media are used for, for example, installing or updating the machining control program constituting a part of the present invention in the ROM 202 (E (E) PROM area). Can do. In this case, various detachable computer-readable recording media store the control program constituting the present invention, and the recording medium itself constitutes the present invention. The machining control of the present embodiment is realized by the CPU 201 executing firmware stored in the ROM 202 (or the external storage device 204) and a machining control program described later.

  2 has interfaces 205, 207, and 208. For example, the interfaces 205, 207, and 208 are used for the CPU 201 to communicate with the tool 17, the moving stage (X, Y, Z), and the probe 221, respectively. The CPU 201 controls the entire machining process for the workpiece 16 by controlling a driving source (for example, a motor) that operates the tool 17 and the moving stage (X, Y, Z) via the interfaces 205 and 207. Further, the CPU 201 reads the alignment mark measurement data from the probe 221 via the interface 208. These interfaces 205, 207, 208 are configured by any communication interface as described above (for example, a parallel or serial communication interface).

  A network interface (NIF) 206 is used to communicate with other processing apparatuses, servers on the network (both not shown), and the like. The network interface 206 can use a network communication system by wired or wireless connection, for example, a communication system such as IEEE802.3 for wired connection or IEEE802.11 or 802.15 for wireless connection. Communication with the tool 17, the moving stage (X, Y, Z), and the probe 221 may all be performed via the network interface 206.

  FIG. 6 shows a flow of machining control of this embodiment performed using the control system of FIG. The illustrated control can be stored in, for example, the ROM 202 or the external storage device 204 as a machining control program executed by the CPU 201.

  In FIG. 6, first processing data 301 for processing a first processing range 24 for processing a processing region (for example, a straight groove), and a second for processing a second processing range 25. It is assumed that the processing data 302 is stored in the external storage device 204 in advance.

  In step S1 of FIG. 6, the work 16 is mounted at the first mounting position on the moving stage 18 (X). In step S2, the first processing range 24 is processed using the first processing data 301 (first processing step). In step S <b> 2, the CPU 201 controls a drive source (such as a motor) that operates the tool 17 and the moving stage (X, Y, Z) via the interfaces 205 and 207 based on the first machining data 301.

  In step S3, the tool 17 processes the first alignment marks 26a to 26c into predetermined positions on the workpiece 16 (first marking process). Here, the CPU 201 drives the tool 17 and the moving stage (X, Y, Z) via the interfaces 205 and 207 based on mark processing data prepared in advance in the external storage device 204 or the like (for example, a motor or the like). ) To control.

  Steps S <b> 4 to S <b> 6 correspond to a transfer process of the workpiece 16 before the machining range 25 is machined. This relocation process can be automatically performed by an operator's manual operation or a robot apparatus (not shown). First, in step S4, the workpiece 16 is removed from the moving stage 18 (X). In step S5, the relative positional relationship between the workpiece 16 and the moving stage 18 (X) is changed. For example, here, the moving stage 18 (X) is moved to the movable range side of the other end on the stage guide 19 as necessary. In step S6, the workpiece 16 is reattached (reattached) to the second attachment position on the moving stage 18 (X). The workpiece 16 is mounted on the moving stage 18 (X) so that the required mounting accuracy can be secured by using a predetermined jig or holder or by using an engagement mechanism such as a pin and a hole. Is done.

  In step S7, the tool 17 processes the second alignment marks 27a to 27c into predetermined positions on the workpiece 16 (second marking step). The CPU 201 controls a drive source (for example, a motor) that operates the tool 17 and the moving stage (X, Y, Z) via the interfaces 205 and 207 based on mark processing data prepared in advance in the external storage device 204 or the like. To do.

  Step S8 corresponds to a step of measuring the position and orientation of the first alignment marks 26a to 26c. Here, using the probe 221, the coordinates of the reference point (for example, the deepest part) of each of the first alignment marks 26a to 26c are detected. In step S9, the coordinates of the reference point (for example, the deepest part) of each of the second alignment marks 27a to 27c are detected using the probe 221. The CPU 201 reads the measurement values 303 and 304 detected from the first and second alignment marks 26 a to 26 c and 27 a to 27 c via the interface 208.

  In step S <b> 10, the CPU 201 uses the measurement values 303 and 304 read from the first and second alignment marks 26 a to 26 c and 27 a to 27 c to process the second processing data for processing the second processing range 25. 302 is corrected (correction process). Here, based on the measured difference in position and orientation of the first and second alignment marks 26a to 26c and 27a to 27c, with respect to the second processing range 25 that can be processed within the movable range of the movable stage 18 (X). The second machining data 302 for machining is corrected. For example, as described with reference to FIGS. 5A and 5B, the correction of the second machining data 302 is performed before and after the moving process, and the position and posture of the workpiece 16 (for example, the X, Y, and Z axes). Any rotation amount around each axis) can be performed.

  In step S11, the second processing range 25 is processed using the corrected second processing data 302 corrected in step S10 (second processing step). Here, the CPU 201 controls a drive source (for example, a motor) that operates the tool 17 and the moving stage (X, Y, Z) via the interfaces 205 and 207 based on the corrected second machining data 302.

  As described above, according to the present embodiment, when the entire processing region is divided into the plurality of processing ranges 24 and 25 and processed, the first and second alignment marks 26a before and after the workpiece 16 transfer step. -26c and 27a-27c are respectively processed. Then, based on the difference between the positions and orientations of the first and second alignment marks, the second processing range 25 is processed for the second processing range 25 that can be processed within the movable range of the moving stage 18 (X). The machining data 302 is corrected. For this reason, the 2nd process data used when processing a work in the 2nd processing process performed following a transfer process can be amended easily, and high processing accuracy can be obtained. That is, the entire machining area can be machined so that, for example, the machining range 25 of the linear groove smoothly continues to the machining range 24 without any step or inclination with respect to the workpiece 16.

  In the present embodiment, processing is performed on the second processing range 25 based on the difference between the position and orientation of the first and second alignment marks 26a to 26c and 27a to 27c processed before and after the workpiece 16 moving step. The second machining data 302 to be performed is corrected. That is, the second machining data 302 is corrected based on the difference between the position and orientation of the workpiece 16 in the first machining process corresponding to each alignment mark and the position and orientation of the workpiece 16 before the second machining process starts. Thus, the entire machining area can be machined with high accuracy.

  Note that, for example, in FIG. 5A, the second machining data 302 for the second machining range 25 using only the position and orientation (inclination with respect to the X axis) 28 detected by the first alignment marks 26a to 26c. It is not unthinkable to correct this. However, as described with reference to FIGS. 5A and 5B, when the work 16 is remounted so as to largely protrude from the moving stage 18 (X) in the moving process, the straightness of the stage guide 19 is before and after the moving. May change. For this reason, as described above, the position and orientation of the workpiece 16 may change like 28 and 29 before and after the relocation. In such a situation, even if the second machining data 302 for the second machining range 25 is corrected using only the position and orientation 28 detected by the first alignment marks 26a to 26c, the first and second The processing ranges 24 and 25 cannot be processed accurately and continuously.

  On the other hand, in this embodiment, based on the difference in position and orientation of the first and second alignment marks 26a to 26c and 27a to 27c processed before and after the workpiece 16 moving step, The second processing data 302 is corrected. For this reason, the second machining data 302 can be accurately corrected by reflecting the difference between the position and orientation 28 and 29 of the workpiece 16 affected by the transfer process, and the entire machining area can be machined accurately and continuously. Can do.

  In the above, the procedure for removing the portions where the first and second alignment marks 26a to 26c and 27a to 27c are processed later by a technique such as cutting is mentioned. However, instead of removing the parts where the first and second alignment marks 26a to 26c and 27a to 27c are processed (possibly finally unnecessary), the removable alignment mark component 30 as shown in FIG. It is also possible to use a configuration for processing the material.

  An alignment mark component 30 is attached to the work 16 of FIG. The alignment mark component 30 in FIG. 7 is a rectangular parallelepiped block, for example, and is configured to be detachable from the workpiece 16 by screwing or fitting structure (not shown). The mark portion where the first and second alignment marks 26 a to 26 c and 27 a to 27 c are to be processed is, for example, the upper surface of the alignment mark component 30.

  The alignment mark component 30 is made of a metal, a resin, or the like having physical properties that can secure necessary processing accuracy. In FIG. 7, reference numeral 23 denotes the entire machining area for the workpiece 16 (corresponding to the entire machining area consisting of the machining ranges 24 and 25 described above).

  When such an alignment mark component 30 is used and the first and second alignment marks 26a to 26c and 27a to 27c are processed on the upper surface thereof, the principle of processing control is the same as described above.

  The alignment mark component 30 is mounted on the workpiece 16 before the first processing step, and is mounted on the workpiece 16 at least until the second alignment marks 27a to 27c are processed through the transfer step. Speaking of the control procedure of FIG. 6, prior to step S <b> 1 of FIG. 6, the work 16 is mounted, and steps S <b> 2 to S <b> 7 are similarly executed.

  And when using this detachable alignment mark component 30, the measurement process which measures the 1st and 2nd alignment mark 26a-26c, 27a-27c of step S8, S9, after removing the alignment mark component 30. Can be implemented.

  That is, according to the correction principle of the present embodiment, to correct the second machining data 302, only the difference between the position and orientation 28 and 29 of the workpiece 16 is required, and the first and second alignment marks These marks do not necessarily have to be integrated with the workpiece 16 at the time of measurement.

  Therefore, according to the correction principle of the present embodiment, the alignment mark component 30 can be removed after the second alignment marks 27a to 27c are processed. And the measurement process which measures the 1st and 2nd alignment marks 26a-26c, 27a-27c uses the measurement apparatus similar to the above-mentioned probe 221 prepared separately in the place different from the processing apparatus 100, for example. Can be implemented.

  As described above, by using the detachable alignment mark component 30 as shown in FIG. 7, there is no ineffective surface on which the alignment mark can be processed on the workpiece 16 or it is difficult to secure the workpiece. In addition, the machining control of this embodiment can be performed. In addition, by using the detachable alignment mark component 30 as shown in FIG. 7, it is not necessary to arrange a measuring means for measuring the alignment mark such as the probe 221 on the processing apparatus 100. For this reason, the machining apparatus 100 does not require a special configuration for performing the machining control of the present embodiment, and the machining control of the present embodiment can be performed easily and inexpensively using the general-purpose machining apparatus 100.

  In the above description, the configuration in which the entire machining area to be machined on the workpiece 16 is divided into two machining ranges 24 and 25 that are machined with the transfer process interposed therebetween has been described. However, even when the entire machining area is divided into three or more machining ranges and the stitching process is performed, the same procedure as in the above-described embodiment is repeatedly performed, so that the entire machining area is divided into a number of machining ranges. It can be processed by split processing.

  Further, in the above-described embodiment, the method for machining the first and second machining ranges of the workpiece is to machine a machining area such as a linear groove on a workpiece made of any material such as resin or metal. And it can implement as a manufacturing method which manufactures some components.

  In the present invention, a program that realizes one or more functions of the above-described embodiments is supplied to a system or apparatus via a network or a storage medium, and one or more processors in a computer of the system or apparatus read the program. It can also be realized by executing processing. It can also be realized by a circuit (for example, ASIC) that realizes one or more functions.

  16 ... Workpiece, 17 ... Tool, 18, 21 ... Movement stage (X, Z), 20 ... Moving range, 23 ... Working region, 24,25 ... Working range, 26a, 26b, 26c, 27a, 27b, 27c ... Alignment Mark, 30 ... Alignment mark component, 201 ... CPU, 202 ... ROM, 203 ... RAM, 204 ... External storage device, 221 ... Probe

Claims (5)

In a machining method of moving a workpiece mounted on a moving stage with respect to a tool and machining a machining area of a workpiece larger than the movable range of the moving stage,
A first stage that can be machined within a movable range of the movable stage in the machining area of the workpiece by moving the workpiece by the movable stage in a state where the workpiece is mounted at a first mounting position with respect to the movable stage. A first machining step for machining a machining range;
The workpiece is moved by the moving stage while the workpiece is mounted at the first mounting position with respect to the moving stage, and a first alignment mark is placed on a mark portion positioned with respect to the workpiece by the tool. A first marking step to be processed;
A transfer step of transferring the workpiece to a second mounting position with respect to the moving stage;
The workpiece is moved by the moving stage in a state where the workpiece is mounted at the second mounting position with respect to the moving stage, and a second alignment mark is processed at a mark portion positioned with respect to the workpiece by the tool. A second marking step,
A measurement step of measuring the position and orientation of the first alignment mark and the second alignment mark;
Based on the difference between the position and orientation of the first alignment mark and the second alignment mark measured in the measurement step, a second machining range that can be machined within the movable range of the movable stage in the machining area of the workpiece. A correction process for correcting the machining data for machining the workpiece,
With the workpiece mounted at the second mounting position with respect to the moving stage, the tool and the moving stage are controlled based on the processing data corrected in the correcting step, and the second processing range is controlled. A second processing step for processing;
The processing method characterized by including.   The processing method according to claim 1, wherein the mark portion is configured to be detachable from the workpiece, and at least the first processing step, the first marking step, the transfer step, and the second marking. Until the process, the mark part is mounted at the same position with respect to the work, and then the mark part is removed from the work and the difference between the position and orientation of the first alignment mark and the second alignment mark A processing method characterized by executing the measurement step of measuring the above.   2. The processing method according to claim 1, wherein the position and orientation of the first alignment mark and the second alignment mark in a three-dimensional coordinate system are measured in the measurement step.   An alignment mark component that includes a mark portion where the first alignment mark and the second alignment mark according to claim 2 are to be processed, and is detachable from the workpiece.   4. A method for manufacturing a part, wherein the part is manufactured by processing the first and second processing ranges of the workpiece by the processing method according to claim 1.

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