JP2016104499A - Grinding device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To maintain the high grinding amount with respect to a plate-like workpiece and suppress the load applied to each portion of grinding means that is increased as a result thereof.SOLUTION: In a grinding device 1, grinding means 3 is obtained by mounting respective grinding wheels 32 via a first mount 33 and a second mount 35 to both ends of a revolving shaft 31 whose axial direction (X-axis direction) is horizontal, a holding surface 810 of first holding means 8 and a holding surface 910 of second holding means 9 are oppositely arranged with the grinding means 3 held therebetween, a plate-like workpiece W1 held by the holding surface 810 is fed for grinding to the grinding wheel 32 mounted on the first mount 33 by first grinding feeding means 6, a plate-like workpiece W2 held by the holding surface 910 is fed for grinding to the grinding wheel 32 mounted on the second mount 35 by second grinding feeding means 7, and thereby two inverse grinding loads are applied to the revolving shaft 31 from both ends of the revolving shaft 31.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a grinding apparatus for grinding a plate-like workpiece.

  In a grinding machine that grinds plate-like workpieces such as semiconductor wafers, the plate-like workpiece is attracted and held on the upper surface of the chuck table, and the grinding wheel that rotates relative to the plate-like workpiece is lowered from above the chuck table in the vertical direction for grinding. Grinding is performed by bringing the lower surface of the grindstone into contact with the upper surface of the plate-like workpiece (see, for example, Patent Document 1).

JP 2012-086351 A

  The grinding apparatus as described in the above-mentioned patent document 1 includes a grinding means (a grinding unit 10 in patent document 1) for rotatably mounting a grinding wheel having an annular grinding wheel, and a plate shape on a chuck table. Grinding feed means (rough grinding unit feed mechanism 18 in Patent Document 1) is provided that causes the grinding means to approach the workpiece from above or separates the grinding means upward. And the grinding speed (grinding amount) of the grinding means is adjusted by changing the feed speed of the grinding means by the grinding feed means. That is, by increasing the feed speed of the grinding means, the force to press the grinding wheel against the plate-like workpiece is increased to increase the grinding speed, and by reducing the feed speed of the grinding means, the force to press the grinding stone against the plate-like work is increased. We weaken and reduce grinding speed.

  However, as described above, in order to accelerate the feeding speed of the grinding means and press the grinding wheel more strongly against the plate-like workpiece, it is necessary that the grinding means and the chuck table have a structure that can withstand the load caused by the pressing. Arise. On the other hand, if the structure is too complicated, the cost per grinding apparatus increases.

  The present invention has been proposed in view of the above problems. That is, it aims at suppressing the load concerning each part of the grinding | polishing means which becomes large as a result, maintaining the high grinding speed for maintaining grinding efficiency.

  In order to achieve the above object, the present invention comprises a holding means having a holding surface for holding a plate-like work, and a grinding means for grinding the plate-like work held by the holding means by a grinding wheel provided with a grinding wheel. , Wherein the grinding means rotates the first mount, the second mount, and the rotation shaft that respectively mount the grinding wheels on both ends of the rotation shaft that is horizontal in the axial direction. A first holding means facing the first mount, and a first grinding feed means for grinding and feeding the first holding means in the axial direction of the rotation shaft. And a second holding means facing the second mount, and a second grinding feed means for grinding and feeding the second holding means in the axial direction of the rotating shaft, with the grinding means sandwiched therebetween The holding surfaces of the first holding means and the second holding means A grinding apparatus positioned to face.

  In this grinding apparatus, the same grinding wheel is attached to both ends of the rotating shaft that makes the axial direction of the grinding means horizontal, and the two grinding wheels are sandwiched between the rotating shafts from the axial direction of the rotating shaft. Press against and grind. Therefore, since two opposing grinding loads are applied from both ends of the rotating shaft toward the center of the rotating shaft, the grinding loads from the axial direction relative to the rotating shaft cancel each other, and even if the grinding speed is increased, the thrust bearing portion of the rotating shaft, etc. Therefore, it is possible to save the space of the thrust bearing portion and the like. Further, the holding surface of the holding means faces in a direction perpendicular to the axial direction of the grinding means, so that it is possible to suppress the contamination generated by the grinding process from accumulating on the holding means.

It is a perspective view of a grinding device. It is AA sectional view taken on the line of the grinding apparatus of FIG.

  Below, with reference to FIG.1 and FIG.2, the grinding apparatus 1 which is one Embodiment of this invention is demonstrated. As shown in FIGS. 1 and 2, a grinding means 3 is disposed above the center portion of the base 2 of the grinding apparatus 1, and the grinding means 3 is arranged inside a cylindrical housing 30 and a housing 30. A rotating shaft 31 supported horizontally by the housing 30 with the direction horizontal, a first mount 33 and a second mount 35 mounted on both ends of the rotating shaft 31, and a first mount 33 and a second mount Two grinding wheels 32 respectively attached to 35 and a rotating means 36 for rotating the rotating shaft 31 are provided.

  The first mount 33 has a grinding wheel 32 detachably mounted on one side surface, and the other side surface is coupled to the rotating shaft end portion 31 a of the rotating shaft 31, so that the grinding wheel 32 is attached to one end of the rotating shaft 31. Wear. The grinding wheel 32 includes a cylindrical wheel base 320 and a grinding wheel 321 arranged in an annular shape on the wheel base 320. The second mount 35 has a grinding wheel 32 detachably mounted on one side surface, and the other side surface is coupled to the rotating shaft end portion 31b of the rotating shaft 31 so that the other end of the rotating shaft 31 has a grinding wheel. 32 is mounted. The shape of the grinding wheel 321 may be one in which a plurality of segment-type grinding wheels are arranged in an annular shape, in addition to those continuously formed in an annular shape.

  The housing 30 is disposed on the base 2 via the base 20 installed on the base 2. In the housing 30, there are disposed a rotating means 36 that includes a motor 360 connected to the rotating shaft 31 and rotates the rotating shaft 31, and a rotating shaft 31 in which thrust plates 310 and 311 are integrally formed. Yes. The thrust plates 310 and 311 face the both surfaces of the thrust plates 310 and 311, respectively, and are supported in a non-contact state by thrust bearing portions that eject high-pressure air from the housing 30 in the axial direction of the rotary shaft 31. The rotating shaft 31 is supported in a non-contact state by a radial bearing portion that ejects high-pressure air from the inner peripheral surface of the housing 30 toward the rotation center of the rotating shaft 31. The rotation shaft 31 is such that the axis direction of the rotation shaft 31 is horizontal and parallel to the longitudinal direction (X-axis direction) of the base 2, and the rotation of the rotation shaft 31 causes the first mount 33 and the second mount to rotate. The mount 35 can be rotated. Note that the two thrust plates 310 and 310 may have only one of them.

  As shown in FIGS. 1 and 2, the first holding means 8 and the second holding means 9 that hold the plate-shaped workpiece to be ground are located at positions facing the grinding wheels 321 of the two grinding wheels 32. Are arranged respectively. Further, at both ends in the longitudinal direction (X-axis direction) of the base 2 of the grinding apparatus 1, the first grinding feed means 6 and the second grinding feed means 7 are arranged at positions facing each other with the grinding means 3 interposed therebetween. It is installed. The first grinding feed means 6 grinds and feeds the first holding means 8 to the first mount 33 in the axial direction (X-axis direction) of the rotary shaft 31, and the second grinding feed means 7 The second holding means 9 is ground and fed to the second mount 35 in the axial direction of the rotary shaft 31 (X-axis direction). It is preferable that the first grinding feed means 6 and the second grinding feed means 7 are arranged at positions facing each other in the same straight line across the grinding means 3.

  The first grinding feed means 6 includes a base 6a, a ball screw 60 disposed on the base 6a and having an axis in the X-axis direction, and a pair of guide rails 61 disposed on the base 6a in parallel with the ball screw 60. And a motor 62 for rotating the ball screw 60, a movable plate 63 whose inner nut is screwed into the ball screw 60 and whose bottom is in sliding contact with the guide rail 61, and a pair of fixing means 8 fixed on the movable plate 63 and fixing the holding means 8. The ball screw 60 is rotated by being driven by the motor 62, and the movable plate 63 is guided by the guide rail 61 to reciprocate in the axial direction (X-axis direction) of the rotary shaft 31. It has a configuration.

  On the movable plate 63, the first holding means 8 that holds the plate-like workpiece W <b> 1 by the holding surface 810 is disposed so as to face the first mount 33. The first holding means 8 includes a columnar housing 80 and a chuck table 81 that holds the plate-like workpiece W1 with a holding surface 810, and the side surface of the housing 80 is clamped by the fixing portion 64 so that the first holding means 8 holds. The holding means 8 is fixed on the movable plate 63, and the holding surface 810 of the chuck table 81 is perpendicular to the X-axis direction and parallel to the grinding surface of the grinding wheel 321 of the grinding wheel 32 fixed to the first mount 33. Opposite. The first grinding feed means 6 grindingly feeds the first holding means 8 in the X-axis direction by reciprocating the movable plate 63 in the X-axis direction.

  Inside the housing 80, a rotary joint 82 connected to one side surface of the chuck table 81 and transmitting a suction force for sucking and holding the plate-like workpiece W1 on the chuck table 81 to the holding surface 810, to the holding surface 810; A spindle 83 having an axial direction parallel to the moving direction of the movable plate 63 (X-axis direction) and a motor 84 for rotating the spindle 83 are provided. The spindle 83 passes through the inner peripheral side of the rotary joint 82 and is vertically coupled to one side surface of the chuck table 81, and the chuck table 81 also rotates as the motor 84 rotates the spindle 83.

  The second grinding feed means 7 includes a base 7a, a ball screw 70 disposed on the base 7a and having an axis in the X-axis direction, and a pair of guide rails 71 disposed on the base 7a in parallel with the ball screw 70. A pair of a motor 72 for rotating the ball screw 70, a movable plate 73 whose inner nut is screwed into the ball screw 70 and whose bottom is in sliding contact with the guide rail 71, and a holding means 9 fixed on the movable plate 73. The ball screw 70 is rotated by being driven by a motor 72, and the movable plate 73 is guided by the guide rail 71 to reciprocate in the axial direction (X-axis direction) of the rotary shaft 31. It has a configuration.

  On the movable plate 73, the second holding means 9 having a holding surface 910 that holds the plate-like workpiece W <b> 2 is disposed so as to face the second mount 35. The second holding means 9 includes a columnar housing 90 and a chuck table 91 that holds the plate-like workpiece W2 on the holding surface 910. The side surface of the housing 90 is clamped by the fixing portion 74, whereby the second holding means 9 is provided. The holding means 9 is fixed on the movable plate 73, and the holding surface 910 of the chuck table 91 is perpendicular to the X-axis direction and parallel to the grinding surface of the grinding wheel 321 of the grinding wheel 32 fixed to the second mount 35. It faces the holding surface 810 of the first holding means 8 across the grinding means 3. The second grinding feed means 7 feeds the second holding means 9 in the X-axis direction by reciprocating the movable plate 73 in the X-axis direction. Note that the center point of the holding surface 810 and the center point of the holding surface 910 are preferably collinear.

  Inside the housing 90, a rotary joint 92 connected to one side surface of the chuck table 91 and transmitting a suction force for sucking and holding the plate-like workpiece W2 on the chuck table 91 to the holding surface 910, to the holding surface 910; A spindle 93 having an axial direction parallel to the moving direction of the movable plate 73 (X-axis direction) and a motor 94 for rotating the spindle 93 are provided. The spindle 93 passes through the inner peripheral side of the rotary joint 92 and is coupled to one side surface of the chuck table 91, and the chuck table 91 also rotates as the motor 94 rotates the spindle 93. It is preferable that the first holding means 8 and the second holding means 9 have the same configuration.

  Below, the operation | movement of the grinding apparatus 1 in the case of grinding the plate-shaped workpieces W1 and W2 with the grinding apparatus 1 shown in FIG. 1 and 2 is demonstrated. First, the holding surface 810 holds the plate-like workpiece W <b> 1 by applying a suction force from a suction source (not shown) connected via the rotary joint 82 inside the housing 80 to the holding surface 810 of the chuck table 81. . Further, a suction force from a suction source (not shown) connected via a rotary joint 92 inside the housing 90 is applied to the holding surface 910 of the chuck table 91 so that the holding surface 910 holds the plate-like workpiece W2. In addition, since the one where the difference of each grinding load from the both ends of the rotating shaft 31 is smaller will reduce the burden concerning the grinding means 3, the type and shape of the plate-like workpiece W1 and the plate-like workpiece W2 are the same type or The same shape is preferable, the same kind and the same shape are more preferable.

  Next, the motor 84 rotates the spindle 83 to rotate the chuck table 81, and the motor 94 rotates the spindle 93 to rotate the chuck table 91. Further, the rotating means 36 inside the housing 30 rotates the rotating shaft 31 at a high speed. As the rotating shaft 31 rotates at a high speed, the first mount 33 connected to the rotating shaft end 31a rotates at a high speed, and the grinding wheel 32 attached to the first mount 33 also rotates at a high speed. At the same time, the second mount 35 connected to the rotary shaft end portion 31b rotates at a high speed, and the grinding wheel 32 attached to the second mount 35 also rotates at a high speed.

  Then, the first grinding feed means 6 grindingly feeds the first holding means 8 holding the plate-like workpiece W1 on the holding surface 810 in the X-axis direction that is the axial direction of the rotary shaft 31 at a predetermined speed. Further, the second grinding feed means 7 replaces the second holding means 9 holding the plate-like workpiece W2 with the holding surface 910 in the X-axis direction that is the axial direction of the rotary shaft 31 and the first holding means 8. Is ground and fed at a predetermined speed in a direction opposite to the direction of grinding. The grinding speed of the plate-like workpieces W1 and W2 by the grinding means 3 can be adjusted by the feed speed of the first grinding feed means 6 and the feed speed of the second grinding feed means 7. Here, the smaller the difference between the respective grinding loads from the both ends of the rotating shaft 31, the smaller the burden on the grinding means 3, so the feed speed of the first grinding feed means 6 and the second grinding feed means The difference with the feed speed of 7 is preferably smaller, more preferably no difference.

  When the grinding wheel 32 that rotates at high speed comes into contact with the plate-like workpiece W1 held on the holding surface 810 of the first holding means 8 that is ground and fed in the X-axis direction by the first grinding feed means 6, the plate shape Grinding of the workpiece W1 is started. Further, the grinding wheel 32 rotating at high speed comes into contact with the plate-like workpiece W2 held on the holding surface 910 of the second holding means 9 that is ground and fed in the X-axis direction by the second grinding feed means 7. Grinding of the plate workpiece W2 is started. It is preferable to control the first grinding feed means 6 and the second grinding feed means 7 so that the grinding work of the plate workpiece W1 and the grinding work of the plate work W2 are started simultaneously.

Further, during grinding, the plate-like workpiece W1 held on the holding surface 810 also rotates as the motor 84 of the first holding means 8 rotates the spindle 83, so that the grinding wheel 32 moves to the plate-like workpiece W1. Grind the entire surface. In addition, during grinding, the plate-like workpiece W2 held on the holding surface 910 also rotates as the spindle 94 rotates as the motor 94 of the second holding means 9 is driven. Grinding of the entire processing surface of W2. The difference between the rotation speed of the spindle 83 and the rotation speed of the spindle 93 is preferably smaller, and more preferably no difference.

  In this grinding process, a grinding load is applied by pressing the plate-shaped workpiece W1 against the rotation shaft 31 from the rotation shaft end portion 31a side of the rotation shaft 31, and the plate shape with respect to the rotation shaft 31 from the rotation shaft end portion 31b side. Since a processing load is applied due to the pressing of the workpiece W2, and the directions of the two grinding loads are opposite to each other, the grinding loads are canceled out and the grinding load applied in the axial direction (X-axis direction) of the rotary shaft 31 is reduced. The thrust plate 310 and the thrust plate 311 can be made smaller. If the grinding load by pressing the plate-like workpiece W1 and the grinding load by pressing the plate-like workpiece W2 are the same, the loads can be offset.

The present invention is not limited to the above embodiment.
For example, the first grinding feed means 6 and the second grinding feed means 7 are moved in the Y-axis direction to the bottom of the base 6a of the first grinding feed means 6 and the bottom of the base 7a of the second grinding feed means 7. In addition to the grinding mechanism 3, in addition to the grinding means 3, another grinding means having a rotation axis parallel to the rotation axis 31 of the grinding means 3 may be provided. In this case, a grinding wheel for rough grinding is used as the grinding wheel 321 of the grinding means 3, and a grinding wheel for finishing grinding is used as the grinding wheel for the other grinding means. Then, first, rough grinding is performed on the processing surfaces of the plate-like workpiece W1 and the plate-like workpiece W2, and then the first grinding feed means 6 and the second grinding feed means 7 are moved in the Y-axis direction. If the plate-like workpieces held by the holding means 8 and 9 are made to face the grinding wheel for finish grinding of the other grinding means, the grinding is performed so as to perform finish grinding for improving the flatness of the processed surface. It can be performed.
Further, similarly to the above, a moving mechanism for moving the first grinding feed means 6 and the second grinding feed means 7 in the Y-axis direction is provided, and at least three processing means (for example, two grinding axes) whose rotation axes are parallel are provided. The means and the polishing means) may be arranged in parallel.

1: Grinding equipment
2: Base 20: Base 3: Grinding means
30: Housing 31: Rotating shaft 31a: Rotating shaft end 31b: Rotating shaft end 310: Thrust plate 311: Thrust plate
33: First mount 35: Second mount 36: Rotating means 360: Motor 32: Grinding wheel 320: Wheel base 321: Grinding wheel
6: First grinding feed means
6a: Base 60: Ball screw 61: Guide rail 62: Motor 63: Movable plate 64: Fixed portion 7: Second grinding feed means
7a: Base 70: Ball screw 71: Guide rail 72: Motor 73: Movable plate 74: Fixed portion 8: First holding means
80: Housing 81: Chuck table 810: Holding surface 82: Rotary joint 83: Spindle 84: Motor 9: Second holding means
90: Housing 91: Chuck table 910: Holding surface 92: Rotary joint 93: Spindle 94: Motor W1: Plate workpiece W2: Plate workpiece

Claims (1)

A grinding apparatus comprising: holding means having a holding surface for holding a plate-like workpiece; and grinding means for grinding the plate-like workpiece held by the holding means by a grinding wheel provided with a grinding wheel,
The grinding means includes
A first mount and a second mount for respectively mounting the grinding wheel on both ends of a rotating shaft having an axial direction horizontal; and a rotating means for rotating the rotating shaft,
The holding means is
A first holding means facing the first mount; a first grinding feed means for grinding and feeding the first holding means in the axial direction of the rotary shaft; and a second facing the second mount. Holding means, and second grinding feed means for grinding and feeding the second holding means in the axial direction of the rotating shaft,
A grinding apparatus arranged so that the holding surfaces of the first holding means and the second holding means face each other with the grinding means interposed therebetween.

Images