JP2016075786A5 - - Google Patents

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Publication number
JP2016075786A5
JP2016075786A5 JP2014205871A JP2014205871A JP2016075786A5 JP 2016075786 A5 JP2016075786 A5 JP 2016075786A5 JP 2014205871 A JP2014205871 A JP 2014205871A JP 2014205871 A JP2014205871 A JP 2014205871A JP 2016075786 A5 JP2016075786 A5 JP 2016075786A5
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JP
Japan
Prior art keywords
optical system
laser beam
axicon
cone angle
shaping
Prior art date
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Application number
JP2014205871A
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English (en)
Japanese (ja)
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JP6267620B2 (ja
JP2016075786A (ja
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Priority to JP2014205871A priority Critical patent/JP6267620B2/ja
Priority claimed from JP2014205871A external-priority patent/JP6267620B2/ja
Publication of JP2016075786A publication Critical patent/JP2016075786A/ja
Publication of JP2016075786A5 publication Critical patent/JP2016075786A5/ja
Application granted granted Critical
Publication of JP6267620B2 publication Critical patent/JP6267620B2/ja
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JP2014205871A 2014-10-06 2014-10-06 レーザビーム合成装置 Active JP6267620B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014205871A JP6267620B2 (ja) 2014-10-06 2014-10-06 レーザビーム合成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014205871A JP6267620B2 (ja) 2014-10-06 2014-10-06 レーザビーム合成装置

Publications (3)

Publication Number Publication Date
JP2016075786A JP2016075786A (ja) 2016-05-12
JP2016075786A5 true JP2016075786A5 (https=) 2017-03-02
JP6267620B2 JP6267620B2 (ja) 2018-01-24

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ID=55951274

Family Applications (1)

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JP2014205871A Active JP6267620B2 (ja) 2014-10-06 2014-10-06 レーザビーム合成装置

Country Status (1)

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JP (1) JP6267620B2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6306659B1 (ja) * 2016-10-19 2018-04-04 ファナック株式会社 ビーム分配器
JP6412988B1 (ja) 2017-08-03 2018-10-24 川崎重工業株式会社 レーザビーム合成装置
KR102547657B1 (ko) * 2018-10-01 2023-06-26 삼성디스플레이 주식회사 레이저 가공 장치
CN110908128B (zh) * 2019-11-08 2021-09-07 中国科学院上海光学精密机械研究所 一种多色超快激光产生装置
JP7236371B2 (ja) * 2019-11-26 2023-03-09 株式会社フジクラ ビームシェイパ、加工装置、及びビームシェイピング方法
JP7780862B2 (ja) * 2020-03-09 2025-12-05 株式会社タムロン レーザ加工装置、レーザ加工装置の光学系

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1165499B (it) * 1983-12-20 1987-04-22 Alfa Romeo Auto Spa Sisteam per la composizione flessibile di fasci laser
JPH0943537A (ja) * 1995-07-31 1997-02-14 Nec Corp レーザビーム合成装置
US7049586B2 (en) * 2002-02-21 2006-05-23 Applied Material Israel, Ltd. Multi beam scanning with bright/dark field imaging
JP5658012B2 (ja) * 2010-11-25 2015-01-21 ギガフォトン株式会社 極端紫外光生成装置
JP5603992B1 (ja) * 2013-10-29 2014-10-08 川崎重工業株式会社 レーザビーム合成装置

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