JP6267620B2 - レーザビーム合成装置 - Google Patents

レーザビーム合成装置 Download PDF

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Publication number
JP6267620B2
JP6267620B2 JP2014205871A JP2014205871A JP6267620B2 JP 6267620 B2 JP6267620 B2 JP 6267620B2 JP 2014205871 A JP2014205871 A JP 2014205871A JP 2014205871 A JP2014205871 A JP 2014205871A JP 6267620 B2 JP6267620 B2 JP 6267620B2
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laser beam
optical system
axicon
annular
cone angle
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JP2016075786A (ja
JP2016075786A5 (https=
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亨 永井
亨 永井
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Kawasaki Motors Ltd
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Kawasaki Jukogyo KK
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  • Laser Beam Processing (AREA)
JP2014205871A 2014-10-06 2014-10-06 レーザビーム合成装置 Active JP6267620B2 (ja)

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JP2014205871A JP6267620B2 (ja) 2014-10-06 2014-10-06 レーザビーム合成装置

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JP2014205871A JP6267620B2 (ja) 2014-10-06 2014-10-06 レーザビーム合成装置

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JP2016075786A JP2016075786A (ja) 2016-05-12
JP2016075786A5 JP2016075786A5 (https=) 2017-03-02
JP6267620B2 true JP6267620B2 (ja) 2018-01-24

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6306659B1 (ja) * 2016-10-19 2018-04-04 ファナック株式会社 ビーム分配器
JP6412988B1 (ja) 2017-08-03 2018-10-24 川崎重工業株式会社 レーザビーム合成装置
KR102547657B1 (ko) * 2018-10-01 2023-06-26 삼성디스플레이 주식회사 레이저 가공 장치
CN110908128B (zh) * 2019-11-08 2021-09-07 中国科学院上海光学精密机械研究所 一种多色超快激光产生装置
JP7236371B2 (ja) * 2019-11-26 2023-03-09 株式会社フジクラ ビームシェイパ、加工装置、及びビームシェイピング方法
JP7780862B2 (ja) * 2020-03-09 2025-12-05 株式会社タムロン レーザ加工装置、レーザ加工装置の光学系

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1165499B (it) * 1983-12-20 1987-04-22 Alfa Romeo Auto Spa Sisteam per la composizione flessibile di fasci laser
JPH0943537A (ja) * 1995-07-31 1997-02-14 Nec Corp レーザビーム合成装置
US7049586B2 (en) * 2002-02-21 2006-05-23 Applied Material Israel, Ltd. Multi beam scanning with bright/dark field imaging
JP5658012B2 (ja) * 2010-11-25 2015-01-21 ギガフォトン株式会社 極端紫外光生成装置
JP5603992B1 (ja) * 2013-10-29 2014-10-08 川崎重工業株式会社 レーザビーム合成装置

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