JP2016064641A5 - - Google Patents

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JP2016064641A5
JP2016064641A5 JP2015130967A JP2015130967A JP2016064641A5 JP 2016064641 A5 JP2016064641 A5 JP 2016064641A5 JP 2015130967 A JP2015130967 A JP 2015130967A JP 2015130967 A JP2015130967 A JP 2015130967A JP 2016064641 A5 JP2016064641 A5 JP 2016064641A5
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resin composition
epoxy resin
photosensitive resin
manufacturing
trifunctional
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JP6635692B2 (en
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Priority to US14/828,736 priority Critical patent/US9599893B2/en
Priority to EP15002614.4A priority patent/EP3001248B1/en
Priority to CN201510623132.4A priority patent/CN105467757B/en
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本発明の光造形物の製造方法は、表面に開口する穴が形成された基板上に、穴を塞ぐように感光性樹脂組成物をドライフィルム形態で貼り、パターニングすることで光造形物を製造する光造形物の製造方法において、感光性樹脂組成物が、三官能以上のエポキシ樹脂と、二官能エポキシ樹脂と、を含む樹脂と、光酸発生剤とを含有し、二官能エポキシ樹脂の重量平均分子量(Mw)が5500〜60000であり、樹脂の重量平均分子量(Mw)が4500〜11000となる範囲であり、三官能以上のエポキシ樹脂と二官能エポキシ樹脂の質量混合比が、三官能以上のエポキシ樹脂の質量を(a)とし、二官能エポキシ樹脂の質量を(b)として、(b)/(a)≦1.5であることを特徴とする。 The method for producing an optically shaped article of the present invention produces an optically shaped article by pasting and patterning a photosensitive resin composition in the form of a dry film so as to close the hole on a substrate having holes formed on the surface. In the method for producing an optically shaped article, the photosensitive resin composition contains a resin containing a trifunctional or higher functional epoxy resin and a bifunctional epoxy resin, and a photoacid generator, and the weight of the bifunctional epoxy resin The average molecular weight ( Mw ) is 5500 to 60000, the weight average molecular weight ( Mw ) of the resin is 4500 to 11000, and the mass mixing ratio of the trifunctional or higher functional epoxy resin to the bifunctional epoxy resin is 3 It is characterized in that (b) / (a) ≦ 1.5, where (a) is the mass of a functional or higher epoxy resin and (b) is the mass of a bifunctional epoxy resin.

本発明の液体吐出ヘッドの製造方法は、吐出エネルギー発生素子と液体の供給路とが形成された基板上に、感光性樹脂組成物をドライフィルム形態で貼る液体吐出ヘッドの製造方法において、感光性樹脂組成物が、三官能以上のエポキシ樹脂と、二官能エポキシ樹脂と、を含む樹脂と、光酸発生剤とを含有し、二官能エポキシ樹脂の重量平均分子量(Mw)が5500〜60000であり、樹脂の重量平均分子量(Mw)が4500〜11000となる範囲であり、三官能以上のエポキシ樹脂と二官能エポキシ樹脂の質量混合比が、三官能以上のエポキシ樹脂の質量を(a)とし、二官能エポキシ樹脂の質量を(b)として、(b)/(a)≦1.5であることを特徴とする。 The method for producing a liquid ejection head of the present invention is a method for producing a liquid ejection head in which a photosensitive resin composition is pasted in a dry film form on a substrate on which an ejection energy generating element and a liquid supply path are formed. The resin composition contains a resin containing a trifunctional or higher functional epoxy resin and a bifunctional epoxy resin, and a photoacid generator, and the weight average molecular weight (M w ) of the bifunctional epoxy resin is 5500 to 60000. Yes, the weight average molecular weight (M w ) of the resin is in the range of 4500 to 11000, and the mass mixing ratio of the trifunctional or higher functional epoxy resin and the bifunctional epoxy resin is the mass of the trifunctional or higher functional epoxy resin (a) The mass of the bifunctional epoxy resin is (b), and (b) / (a) ≦ 1.5.

Claims (14)

表面に開口する穴が形成された基板上に、前記穴を塞ぐように感光性樹脂組成物をドライフィルム形態で貼り、パターニングすることで光造形物を製造する光造形物の製造方法において、
前記感光性樹脂組成物が、三官能以上のエポキシ樹脂と、二官能エポキシ樹脂と、を含む樹脂と、光酸発生剤とを含有し、前記二官能エポキシ樹脂の重量平均分子量(Mw)が5500〜60000であり、前記樹脂の重量平均分子量(Mw)が4500〜11000であり、前記三官能以上のエポキシ樹脂と前記二官能エポキシ樹脂の質量混合比が、前記三官能以上のエポキシ樹脂の質量を(a)とし、前記二官能エポキシ樹脂の質量を(b)として、(b)/(a)≦1.5であることを特徴とする、光造形物の製造方法。
In the manufacturing method of the optical modeling object which manufactures the optical modeling object by pasting and patterning the photosensitive resin composition in the form of a dry film so as to block the hole on the substrate in which the hole opening on the surface is formed,
The photosensitive resin composition contains a trifunctional or higher functional epoxy resin and a bifunctional epoxy resin, and a photoacid generator, and the bifunctional epoxy resin has a weight average molecular weight (M w ). 5500 to 60000, the weight average molecular weight (M w ) of the resin is 4500 to 11000, and the mass mixing ratio of the trifunctional or higher functional epoxy resin to the bifunctional epoxy resin is that of the trifunctional or higher functional epoxy resin. A method for producing an optically shaped article, wherein (b) / (a) ≦ 1.5, wherein (a) is the mass, and (b) is the mass of the bifunctional epoxy resin.
前記二官能エポキシ樹脂はビスフェノール骨格のエポキシ樹脂である、請求項1に記載の光造形物の製造方法。   The method for producing an optically shaped article according to claim 1, wherein the bifunctional epoxy resin is an epoxy resin having a bisphenol skeleton. 前記二官能エポキシ樹脂の軟化点が90℃以上である、請求項1または2に記載の光造形物の製造方法。   The method for producing an optically shaped article according to claim 1 or 2, wherein a softening point of the bifunctional epoxy resin is 90 ° C or higher. 前記感光性樹脂組成物を感光性樹脂組成物(1)として、前記感光性樹脂組成物(1)上に、光酸発生剤を含む感光性樹脂組成物(2)をドライフィルム形態で積層する請求項1乃至のいずれか1項に記載の光造形物の製造方法。 Using the photosensitive resin composition as the photosensitive resin composition (1), the photosensitive resin composition (2) containing a photoacid generator is laminated on the photosensitive resin composition (1) in the form of a dry film. The manufacturing method of the optical molded article of any one of Claims 1 thru | or 3 . 前記感光性樹脂組成物(2)が、三官能以上のエポキシ樹脂を含む、請求項に記載の光造形物の製造方法。 The photosensitive resin composition (2) is trifunctional or more epoxy resins and including, in the method for manufacturing an optical molded article according to claim 4. 吐出エネルギー発生素子と液体の供給路とが形成された基板上に、感光性樹脂組成物をドライフィルム形態で貼る液体吐出ヘッドの製造方法において、
前記感光性樹脂組成物が、三官能以上のエポキシ樹脂と、二官能エポキシ樹脂と、を含む樹脂と、光酸発生剤とを含有し、前記二官能エポキシ樹脂の重量平均分子量(Mw)が5500〜60000であり、かつ、前記樹脂の重量平均分子量(Mw)が4500〜11000であり、前記三官能以上のエポキシ樹脂と前記二官能エポキシ樹脂の質量混合比が、前記三官能以上のエポキシ樹脂の質量を(a)とし、前記二官能エポキシ樹脂の質量を(b)として、(b)/(a)≦1.5であることを特徴とする、液体吐出ヘッドの製造方法。
In a method for manufacturing a liquid discharge head, in which a photosensitive resin composition is pasted in a dry film form on a substrate on which a discharge energy generating element and a liquid supply path are formed.
The photosensitive resin composition contains a trifunctional or higher functional epoxy resin and a bifunctional epoxy resin, and a photoacid generator, and the bifunctional epoxy resin has a weight average molecular weight (M w ). 5500 to 60000, the weight average molecular weight (M w ) of the resin is 4500 to 11000, and the mixing ratio of the trifunctional or higher epoxy resin to the bifunctional epoxy resin is the trifunctional or higher epoxy. A method of manufacturing a liquid discharge head, wherein (b) / (a) ≦ 1.5, wherein (b) is the mass of the resin and (b) is the mass of the bifunctional epoxy resin.
前記二官能エポキシ樹脂はビスフェノール骨格のエポキシ樹脂である、請求項に記載の液体吐出ヘッドの製造方法。 The method of manufacturing a liquid ejection head according to claim 6 , wherein the bifunctional epoxy resin is a bisphenol skeleton epoxy resin. 前記二官能エポキシ樹脂の軟化点が90℃以上である、請求項またはに記載の液体吐出ヘッドの製造方法。 The method for manufacturing a liquid ejection head according to claim 6 or 7 , wherein the softening point of the bifunctional epoxy resin is 90 ° C or higher. 前記感光性樹脂組成物を感光性樹脂組成物(1)として、前記感光性樹脂組成物(1)上に、光酸発生剤を含む感光性樹脂組成物(2)をドライフィルム形態で積層する請求項乃至のいずれか1項に記載の液体吐出ヘッドの製造方法。 Using the photosensitive resin composition as the photosensitive resin composition (1), the photosensitive resin composition (2) containing a photoacid generator is laminated on the photosensitive resin composition (1) in the form of a dry film. method for manufacturing a liquid discharge head according to any one of claims 6 to 8. 前記感光性樹脂組成物(1)をパターニングして前記液体の流路を形成する、請求項に記載の液体吐出ヘッドの製造方法。 The method of manufacturing a liquid ejection head according to claim 9 , wherein the liquid flow path is formed by patterning the photosensitive resin composition (1). 前記感光性樹脂組成物(2)が、三官能以上のエポキシ樹脂を含む、請求項または10に記載の液体吐出ヘッドの製造方法。 The photosensitive resin composition (2) is trifunctional or more epoxy resins and including, a manufacturing method of a liquid discharge head according to claim 9 or 10. 前記感光性樹脂組成物(2)をパターニングして前記液体の吐出口を形成する、請求項乃至11のいずれか1項に記載の液体吐出ヘッドの製造方法。 The photosensitive resin composition (2) is patterned to form the discharge port of the liquid, the method of manufacturing a liquid discharge head according to any one of claims 9 to 11. 前記感光性樹脂組成物(1)の未硬化部及び前記感光性樹脂組成物(2)の未硬化部を一括で除去する工程を含む、請求項乃至12のいずれか1項に記載の液体吐出ヘッドの製造方法。 The liquid according to any one of claims 9 to 12 , comprising a step of collectively removing uncured portions of the photosensitive resin composition (1) and uncured portions of the photosensitive resin composition (2). Manufacturing method of the discharge head. 前記感光性樹脂組成物(2)を硬化させるのに必要な露光量が、前記感光性樹脂組成物(1)を硬化させるのに必要な露光量よりも少ない、請求項乃至13のいずれか1項に記載の液体吐出ヘッドの製造方法。 The exposure amount necessary to cure the photosensitive resin composition (2) is, the smaller than the exposure amount required photosensitive resin composition (1) to cure, any one of claims 9 to 13 2. A method for manufacturing a liquid discharge head according to item 1.
JP2015130967A 2014-09-25 2015-06-30 Method for manufacturing stereolithography and method for manufacturing liquid ejection head Active JP6635692B2 (en)

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US14/828,736 US9599893B2 (en) 2014-09-25 2015-08-18 Production process for optically shaped product and production process for liquid discharge head
EP15002614.4A EP3001248B1 (en) 2014-09-25 2015-09-07 Production process for liquid discharge head
CN201510623132.4A CN105467757B (en) 2014-09-25 2015-09-25 The production method of light molding and the production method of liquid discharging head

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US10031415B1 (en) * 2017-08-21 2018-07-24 Funai Electric Co., Ltd. Method to taylor mechanical properties on MEMS devices and nano-devices with multiple layer photoimageable dry film
US20190056659A1 (en) * 2017-08-21 2019-02-21 Funai Electric Co., Ltd. Method for manufacturing mems devices using multiple photoacid generators in a composite photoimageable dry film
JP2019107874A (en) * 2017-12-18 2019-07-04 株式会社エンプラス Lamination molding method
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JP7134825B2 (en) * 2018-10-05 2022-09-12 キヤノン株式会社 Microstructure manufacturing method and liquid ejection head manufacturing method
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