JP2016057142A5 - - Google Patents
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- JP2016057142A5 JP2016057142A5 JP2014183016A JP2014183016A JP2016057142A5 JP 2016057142 A5 JP2016057142 A5 JP 2016057142A5 JP 2014183016 A JP2014183016 A JP 2014183016A JP 2014183016 A JP2014183016 A JP 2014183016A JP 2016057142 A5 JP2016057142 A5 JP 2016057142A5
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014183016A JP6194298B2 (ja) | 2014-09-09 | 2014-09-09 | 温度検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014183016A JP6194298B2 (ja) | 2014-09-09 | 2014-09-09 | 温度検出装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016057142A JP2016057142A (ja) | 2016-04-21 |
| JP2016057142A5 true JP2016057142A5 (de) | 2017-06-15 |
| JP6194298B2 JP6194298B2 (ja) | 2017-09-06 |
Family
ID=55758038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014183016A Active JP6194298B2 (ja) | 2014-09-09 | 2014-09-09 | 温度検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6194298B2 (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6712556B2 (ja) * | 2017-03-08 | 2020-06-24 | 株式会社神戸製鋼所 | 高温高圧炉用の温度計測器 |
| US10502641B2 (en) * | 2017-05-18 | 2019-12-10 | Sensata Technologies, Inc. | Floating conductor housing |
| CN209247188U (zh) * | 2018-07-04 | 2019-08-13 | Wika亚历山大·威甘德欧洲股份两合公司 | 热电偶结构和用于在容器中固定热电偶的结构 |
| JP7117398B2 (ja) * | 2019-01-07 | 2022-08-12 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法およびヒータユニット |
| CN110954230B (zh) * | 2019-11-27 | 2021-07-20 | 东华大学 | 一种柔性热电偶温度传感器及其制备方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04131735U (ja) * | 1991-05-24 | 1992-12-04 | 神鋼電機株式会社 | 測温センサ |
| JP3370416B2 (ja) * | 1994-01-20 | 2003-01-27 | 東京エレクトロン株式会社 | 温度計 |
| JP3687240B2 (ja) * | 1996-12-11 | 2005-08-24 | 山里産業株式会社 | 熱電対の導線被覆構造 |
| JP2006234734A (ja) * | 2005-02-28 | 2006-09-07 | Fenwall Controls Of Japan Ltd | 温度センサ配置部材およびこれを備えた温度計 |
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2014
- 2014-09-09 JP JP2014183016A patent/JP6194298B2/ja active Active
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