JP2016057054A - Temperature control device, temperature control method and charged-particle beam device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a temperature control device capable of improving temperature stability.SOLUTION: A temperature control device 100 comprises: a plurality of heat source devices 10, 20 and 30 which heat or cool fluid; a temperature sensor 8 which measures a temperature of the fluid; and a control section 50 which controls the plurality of heat source devices 10, 20 and 30. The control section 50 performs: a first process to activate a first heat source device 10 among the plurality of heat source devices and to maintain output of a second heat source device 20 among the plurality of heat source devices on the basis of a measurement result of the temperature sensor 8; and a second process, when output of the first heat source device 10 reaches a first output value, to change the output of the second heat source device 20 and to activate the first heat source device 10 in a manner that offsets a change in heat quantity of the fluid due to the change in the output of the second heat source 20. The first heat source device 10 has higher temperature control resolution than the second heat source device 20.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a temperature control device, a temperature control method, and a charged particle beam device.

  In charged particle beam apparatuses such as electron microscopes and charged particle beam drawing apparatuses, high-precision temperature management is required. For example, an electron lens used in an electron microscope or a charged particle beam drawing apparatus needs to be cooled because it generates heat due to a current flowing in a coil. At this time, the temperature fluctuation range allowed for the cooling water for cooling the electron lens is extremely small. Therefore, a cooling water circulation device (a temperature control device that controls the temperature of the cooling water) used in an electron microscope or a charged particle beam device is required to have high temperature stability with respect to the cooling water.

  For example, Patent Literature 1 includes a water tank that stores circulating water (cooling water), a refrigerator that cools the circulating water, and an electric heater that heats the circulating water, and the circulating water cools an external device by circulating water. A first operation mode in which the heater is turned off and the refrigerator is turned on / off to control the temperature of the circulating water; and the refrigerator is turned on and the first operation mode is performed using the heater. A cooling water circulation device that appropriately controls the temperature fluctuation width of the circulating water by providing a second operation mode in which the temperature of the circulating water is controlled with a narrower temperature fluctuation width is disclosed.

JP 2007-40631 A

  As described above, since the cooling water circulation device (temperature control device) used for the charged particle beam device or the like requires high temperature stability with respect to the cooling water, a temperature control device with excellent temperature stability is desired. It is rare.

  The present invention has been made in view of the above problems, and one of the objects according to some aspects of the present invention is a temperature control device capable of improving temperature stability, and temperature control. It is to provide a method. Another object of some aspects of the present invention is to provide a charged particle beam device including the temperature control device.

(1) A temperature control device according to the present invention includes:
A temperature control device for controlling the temperature of a fluid,
A plurality of heat source devices for heating or cooling the fluid;
A temperature sensor for measuring the temperature of the fluid;
A control unit for controlling the plurality of heat source devices;
Including
The controller is
A first process of operating a first heat source device of the plurality of heat source devices based on a measurement result of the temperature sensor and holding an output of a second heat source device of the plurality of heat sources;
When the output of the first heat source device reaches the first output value, the output of the second heat source device is changed, and the first heat source device cancels the change in the amount of heat due to the change of the output of the second heat source device. A second process that operates in a direction to
And
The first heat source device has a higher temperature control resolution than the second heat source device.

  In such a temperature control device, as will be described later, hunting with respect to the fluid temperature can be prevented, and temperature control with faster response can be performed. Furthermore, since a transient response of the fluid temperature can be suppressed, for example, it is possible to suppress deterioration in temperature accuracy when the second heat source device having a low temperature control resolution is operated. Therefore, such a temperature control device can improve temperature stability.

(2) In the temperature control device according to the present invention,
The controller changes the output of the third heat source device among the plurality of heat sources when the output of the second heat source device reaches a second output value, and changes the second heat source device to the third heat source device. Performing a third process for operating in a direction to cancel out a change in heat quantity due to a change in output of the heat source device
The second heat source device may have a higher temperature control resolution than the third heat source device.

  In such a temperature control device, as will be described later, hunting with respect to the fluid temperature can be prevented, and temperature control with faster response can be performed. Furthermore, since the transient response of the fluid temperature can be suppressed, for example, it is possible to suppress the deterioration of the temperature accuracy when the third heat source device having a low temperature control resolution is operated. Therefore, such a temperature control device can improve temperature stability.

(3) In the temperature control device according to the present invention,
In the second process, the first heat source device may be operated so as to cancel a change in the heat amount of the fluid due to a change in the output of the second heat source device.

  In such a temperature control device, as will be described later, the transient response of the fluid temperature can be further suppressed, and the deterioration of temperature accuracy when the second heat source device having a low temperature control resolution is operated is further suppressed. be able to.

(4) The temperature control device according to the present invention includes:
A temperature control device for controlling the temperature of a fluid,
A first heat source device for heating or cooling the fluid;
A second heat source device that heats or cools the fluid and has an output capability equal to or greater than the output capability of the first heat source device;
A temperature sensor for measuring the temperature of the fluid;
A first heat source device controller that controls the first heat source device based on the measurement result of the temperature sensor;
A second heat source device controller that controls the second heat source device so that the output of the first heat source device has a given value based on the information of the output of the first heat source device;
including.

  In such a temperature control device, the second heat source device control unit controls the second heat source device so that the output of the first heat source device becomes a given value. For example, even if the command temperature changes, the first heat source device The output of the apparatus can be maintained at a given value, and the influence of the temperature dependence of the electrical resistance of the first heat source apparatus can be suppressed.

(5) In the temperature control device according to the present invention,
The first heat source device may have a higher temperature control resolution than the second heat source device, and may have a narrower temperature control range than the second heat source device.

In such a temperature control device, the second heat source device control unit controls the second heat source device so that the output of the first heat source device becomes a given value. Therefore, with the high temperature control resolution of the first heat source device, The fluid temperature can be controlled in a wide temperature control range that is the sum of the temperature control range of the first heat source device and the temperature control range of the second heat source device.

(6) In the temperature control device according to the present invention,
The given value may be a median value of an output range of the first heat source device.

  In such a temperature control device, the first heat source device has a controllable temperature range in both positive and negative directions (both in the direction of increasing the temperature and in the direction of decreasing the temperature) when the fluid fluctuates in temperature. Can be kept wide.

(7) In the temperature control device according to the present invention,
The second heat source device control unit may acquire a control signal for controlling the first heat source device output from the first heat source device control unit, and obtain information on an output of the first heat source device. .

(8) In the temperature control device according to the present invention,
The first heat source device control unit controls the first heat source device in combination with proportional control and differential control,
The second heat source device control unit may perform integral control of the second heat source device.

  In such a temperature control device, when the output of the first heat source device is controlled to a given value by the integral control of the second heat source device control unit, the deviation between the command temperature and the fluid temperature is also zero. Can do.

(9) The temperature control method according to the present invention includes:
A temperature control method for controlling the temperature of a fluid using a temperature control device including a plurality of heat source devices,
Operating the first heat source device of the plurality of heat source devices based on the measurement result of the temperature of the fluid, and maintaining the output of the second heat source device of the plurality of heat source devices;
When the output of the first heat source device reaches the first output value, the output of the second heat source device is changed, and the amount of heat of the fluid due to the change of the output of the second heat source device is changed. Operating in a direction to offset the change;
Including
The first heat source device has a higher temperature control resolution than the second heat source device.

  In such a temperature control method, as will be described later, hunting with respect to the fluid temperature can be prevented, and temperature control with faster response can be performed. Furthermore, since a transient response of the fluid temperature can be suppressed, for example, it is possible to suppress deterioration in temperature accuracy when the second heat source device having a low temperature control resolution is operated. Therefore, such temperature control method can improve temperature stability.

(10) In the temperature control method according to the present invention,
When the output of the second heat source device reaches a second output value, the output of the third heat source device among the plurality of heat sources is changed, and the second heat source device is changed to the output of the third heat source device. Operating in a direction to counteract the fluid heat change due to the change,
The second heat source device may have a higher temperature control resolution than the third heat source device.

In such a temperature control method, as will be described later, hunting with respect to the fluid temperature can be prevented, and temperature control with faster response can be performed. Furthermore, since the transient response of the fluid temperature can be suppressed, for example, it is possible to suppress the deterioration of the temperature accuracy when the third heat source device having a low temperature control resolution is operated. Therefore, such temperature control method can improve temperature stability.

(11) In the temperature control method according to the present invention,
In the step of operating the first heat source device in a direction to cancel the change in the heat amount of the fluid, the first heat source device is operated to cancel the change in the heat amount of the fluid due to a change in the output of the second heat source device. May be.

  In such a temperature control method, as will be described later, a transient response of the fluid temperature can be further suppressed, and deterioration of temperature accuracy when the second heat source device having a low temperature control resolution is operated is further suppressed. be able to.

(12) The temperature control method according to the present invention includes:
A temperature control method for controlling the temperature of a fluid using a temperature control device including a first heat source device and a second heat source device,
Controlling the first heat source device based on the measurement result of the temperature sensor;
Controlling the second heat source device based on the information of the output of the first heat source device so that the output of the first heat source device has a given value;
Including
The output capability of the second heat source device is greater than or equal to the output capability of the first heat source device.

  Since such a temperature control method controls the second heat source device so that the output of the first heat source device becomes a given value, for example, even if the command temperature changes, the output of the first heat source device is given to a given value. The value can be maintained, and the influence of the temperature dependence of the electrical resistance of the first heat source device can be suppressed.

(13) In the temperature control method according to the present invention,
The first heat source device may have a higher temperature control resolution than the second heat source device, and may have a narrower temperature control range than the second heat source device.

  In such a temperature control method, since the second heat source device is controlled so that the output of the first heat source device becomes a given value, the temperature control of the first heat source device can be performed with high temperature control resolution of the first heat source device. The fluid temperature can be controlled in a wide temperature control range that is the sum of the range and the temperature control range of the second heat source device.

(14) In the temperature control method according to the present invention,
The given value may be a median value of an output range of the first heat source device.

  In such a temperature control method, when the fluid fluctuates in temperature, the first heat source device has a controllable temperature range in both the plus and minus directions (both the temperature increasing direction and the temperature decreasing direction). Can be kept wide.

(15) In the temperature control method according to the present invention,
In the step of controlling the second heat source device, a control signal for controlling the first heat source device may be taken in and information on the output of the first heat source device may be acquired.

(16) In the temperature control method according to the present invention,
In the step of controlling the first heat source device, the first heat source device is controlled by combining proportional control and differential control,
In the step of controlling the second heat source device, the second heat source device may be integrated and controlled.

  In such a temperature control method, when the output of the first heat source device is controlled to a given value by the integral control of the second heat source device control unit, the deviation between the command temperature and the fluid temperature may be zero. it can.

(17) A charged particle beam device according to the present invention comprises:
A temperature control device according to the present invention is included.

  Such a charged particle beam device can include a temperature control device capable of improving temperature stability.

(18) A temperature control device according to the present invention includes:
A temperature control device for controlling the temperature of a fluid,
A first heat source device for heating or cooling the fluid;
A second heat source device that heats or cools the fluid and has an output capability equal to or greater than the output capability of the first heat source device;
A temperature sensor for measuring the temperature of the fluid;
A first heat source device controller that controls the first heat source device based on the measurement result of the temperature sensor;
A second heat source device control unit that controls the second heat source device so that the output of the first heat source device becomes a first value based on the information of the output of the first heat source device;
A third heat source device controller that controls the first heat source device so that the output of the first heat source device has a second value;
A fourth heat source device control unit for controlling the second heat source device based on the measurement result of the temperature sensor;
The first heat source device is controlled by the first heat source device control unit, the second heat source device is controlled by the second heat source device control unit, and the first heat source device is controlled by the third heat source device. A switching unit that switches between the second control that is controlled by the unit and that controls the second heat source device by the fourth heat source device control unit,
Including
The switching unit determines whether or not a deviation between the temperature of the fluid measured by the temperature sensor and a command temperature is larger than a predetermined value, and when it is determined that the deviation is larger than the predetermined value. , Switching from the first control to the second control.

  In such a temperature control device, the switching unit determines whether or not the deviation between the temperature of the fluid measured by the temperature sensor and the command temperature is larger than a predetermined value, and it is determined that the deviation is larger than the predetermined value. In the case of the failure, the first control is switched to the second control. That is, in such a temperature control device, when it is determined that the deviation between the fluid temperature and the command temperature is greater than a predetermined value, the temperature control resolution of the first heat source device that mainly controls the temperature of the fluid. From the high state (first control), the second heat source device can be switched to a state capable of high-speed response (second control) in which mainly the temperature control of the fluid is performed. Therefore, such a temperature control device can achieve both high-precision control and high-speed response control.

(19) In the temperature control device according to the present invention,
The switching unit continuously increases a ratio of an operation amount with respect to the second heat source device by the fourth heat source device control unit with respect to a ratio of an operation amount with respect to the second heat source device by the second heat source device control unit. Then, the first control may be switched to the second control.

In such a temperature control device, when switching from the first control to the second control, a rapid change in the operation amount of the second heat source device can be suppressed, and a transient response of temperature can be suppressed. .

(20) In the temperature control device according to the present invention,
The switching unit may switch from the second control to the first control when the deviation is determined to be equal to or less than the predetermined value.

  In such a temperature control device, when the deviation between the fluid temperature and the command temperature is determined to be equal to or less than a predetermined value, the second heat source device is capable of a high-speed response that mainly controls the fluid temperature (the first temperature control device). 2 control), the first heat source device can be switched to a state with high temperature control resolution (first control) for mainly controlling the temperature of the fluid. Therefore, such a temperature control device can achieve both high-precision control and high-speed response control.

(21) In the temperature control device according to the present invention,
The switching unit continuously increases a ratio of an operation amount with respect to the second heat source device by the second heat source device control unit with respect to a ratio of an operation amount with respect to the second heat source device by the fourth heat source device control unit. Then, the second control may be switched to the first control.

  In such a temperature control device, when switching from the second control to the first control, a rapid change in the operation amount of the second heat source device can be suppressed, and a transient response of temperature can be suppressed. .

(22) In the temperature control device according to the present invention,
The first value and the second value may be a median value of an output range of the first heat source device.

  In such a temperature control device, the first heat source device can keep a controllable temperature range wide in both plus and minus directions (both the direction of increasing the temperature and the direction of decreasing the temperature). In addition, since the first value and the second value are equal, the operation amount of the first heat source device is changed when switching from the first control to the second control and when switching from the second control to the first control. A sudden change can be prevented.

(23) The temperature control method according to the present invention includes:
A temperature control method for controlling the temperature of a fluid using a first heat source device and a temperature control device including a second heat source device whose output capability is equal to or higher than the output capability of the first heat source device,
Determining whether the deviation between the measured temperature of the fluid and the command temperature is greater than a predetermined value;
A step of switching from the first control to the second control when it is determined that the deviation is larger than the predetermined value;
Including
In the first control, the first heat source device is controlled based on the measurement result of the temperature of the fluid, and the output of the first heat source device is set to a first value based on information on the output of the first heat source device. Controlling the second heat source device so that
In the second control, the first heat source device is controlled so that the output of the first heat source device becomes a second value, and the second heat source device is controlled based on the measurement result of the temperature of the fluid.

In such a temperature control method, when it is determined that the deviation between the measured temperature of the fluid and the command temperature is larger than a predetermined value, and the deviation is larger than the predetermined value, Switching from the first control to the second control. That is, when it is determined that the deviation between the temperature of the fluid and the command temperature is greater than a predetermined value, the first heat source device is controlled from a high temperature control resolution (first control) for mainly controlling the temperature of the fluid. The second heat source device can be switched to a state capable of high-speed response (second control) in which mainly the fluid temperature is controlled. Therefore, such a temperature control method can achieve both high-precision control and high-speed response control.

(24) In the temperature control method according to the present invention,
In the step of switching from the first control to the second control, the ratio of the operation amount with respect to the second heat source device by the second control is continuously set with respect to the ratio of the operation amount with respect to the second heat source device by the first control. May be increased.

  In such a temperature control method, when switching from the first control to the second control, a rapid change in the operation amount of the second heat source device can be suppressed, and a transient response of temperature can be suppressed. .

(25) In the temperature control method according to the present invention,
A step of switching from the second control to the first control when the deviation is determined to be equal to or less than the predetermined value may be included.

  In such a temperature control method, when the deviation between the fluid temperature and the command temperature is determined to be equal to or less than a predetermined value, the second heat source device is capable of high-speed response that mainly controls the fluid temperature (first 2 control), the first heat source device can be switched to a state with high temperature control resolution (first control) for mainly controlling the temperature of the fluid. Therefore, such a temperature control method can achieve both high-precision control and high-speed response control.

(26) In the temperature control method according to the present invention,
In the step of switching from the second control to the first control, the ratio of the operation amount with respect to the second heat source device by the first control is continuously set with respect to the ratio of the operation amount with respect to the second heat source device by the second control. It may be increased.

  In such a temperature control method, when switching from the second control to the first control, a rapid change in the operation amount of the second heat source device can be suppressed, and a transient response of temperature can be suppressed. .

(27) In the temperature control method according to the present invention,
The first value and the second value may be a median value of an output range of the first heat source device.

  In such a temperature control method, the first heat source device can keep a controllable temperature range wide in both the plus and minus directions (both the direction of increasing the temperature and the direction of decreasing the temperature). In addition, since the first value and the second value are equal, the operation amount of the first heat source device is changed when switching from the first control to the second control and when switching from the second control to the first control. A sudden change can be prevented.

(28) In the temperature control device according to the present invention,
A phase control type AC power regulator for regulating the power supplied to the heat source device;
The control unit converts the operation amount so that a relationship between an operation amount for the heat source device obtained based on a deviation between a temperature of the fluid and a command temperature and a heat amount generated in the heat source device is linear. And a non-linear compensator that outputs to the AC power regulator.

  In such a temperature control device, for example, controllability can be improved as compared with a case where there is no nonlinear compensator.

(29) In the temperature control device according to the present invention,
A phase control type AC power regulator for regulating power supplied to the first heat source device;
The control unit is configured so that a relationship between an operation amount for the first heat source device obtained based on a deviation between a temperature of the fluid and a command temperature and a heat amount generated in the first heat source device is linear. You may have the nonlinear compensator which converts the operation amount and outputs it to the said alternating current power regulator.

  In such a temperature control device, for example, controllability can be improved as compared with a case where there is no nonlinear compensator.

(30) A charged particle beam device according to the present invention comprises:
A temperature control device according to the present invention is included.

  Such a charged particle beam device can include a temperature control device capable of improving temperature stability.

The figure which shows typically the structure of the charged particle beam apparatus containing the temperature control apparatus which concerns on 1st Embodiment. The operation image figure of the heater in the 1st processing, a hot gas valve, and a cool gas valve. The operation | movement image figure of the heater in the 2nd process, a hot gas valve, and a cool gas valve. The operation | movement image figure of the heater in the 3rd process, a hot gas valve, and a cool gas valve. The flowchart which shows an example of the temperature control method using the temperature control apparatus which concerns on 1st Embodiment. The figure which shows typically the structure of the temperature control apparatus which concerns on 2nd Embodiment. The flowchart which shows an example of the temperature control method using the temperature control apparatus which concerns on 2nd Embodiment. The figure which shows an example of the temperature control waveform by a 1st heater, and the temperature control waveform by a 2nd heater. The figure which shows typically the structure of the temperature control apparatus which concerns on 3rd Embodiment. The figure for demonstrating the state of the 1st control of the temperature control apparatus which concerns on 3rd Embodiment. The figure for demonstrating the state of the 2nd control of the temperature control apparatus which concerns on 3rd Embodiment. The figure for demonstrating operation | movement of a switch. The flowchart which shows an example of the temperature control method using the temperature control apparatus which concerns on 3rd Embodiment. The figure which shows typically the structure of the charged particle beam apparatus containing the temperature control apparatus which concerns on 4th Embodiment. The figure which shows an example of the output waveform of the alternating current power regulator of a phase control system. The graph which shows the relationship between the operation amount MV and the heat generation amount Q of a heater.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below do not unduly limit the contents of the present invention described in the claims. In addition, not all of the configurations described below are essential constituent requirements of the present invention.

1. 1. First embodiment 1.1. Configuration of Temperature Control Device First, the configuration of the temperature control device according to the first embodiment will be described with reference to the drawings. FIG. 1 is a diagram schematically illustrating a configuration of a charged particle beam apparatus 1000 including a temperature control apparatus 100 according to the first embodiment. In FIG. 1, arrows shown in the flow paths 2 a, 2 b, 42, and 48 indicate the direction of the flow of fluid flowing through the flow paths 2 a, 2 b, 42, and 48.

  The temperature control device 100 is a device for controlling the temperature of the fluid. The temperature control device 100 controls the temperature of the circulating water. The temperature control device 100 is incorporated in the charged particle beam device 1000. The charged particle beam apparatus 1000 is an electron microscope, for example. The electron microscope is, for example, a transmission electron microscope (TEM), a scanning transmission electron microscope (STEM), a scanning electron microscope (SEM), or the like. The temperature control device 100 controls the temperature of the circulating water and supplies it to the cooling target 1010. The cooling target 1010 is, for example, an electron lens of an electron microscope, a power source of the electron lens, an oil diffusion pump, or the like. Although the charged particle beam apparatus 1000 has one cooling target 1010 in the illustrated example, the number of cooling targets 1010 may be plural.

  As shown in FIG. 1, the temperature control device 100 includes a water supply channel 2a, a return water channel 2b, a pump 4, a first heat exchanger 6a, a second heat exchanger 6b, a temperature sensor 8, A refrigerant circulator 40 including a first heat source device (heater) 10, a second heat source device (hot gas valve) 20 and a third heat source device (cool gas valve, electronic expansion valve) 30, and a controller (controller) 50. Including.

  The water supply channel 2 a is a channel for sending the circulating water to the cooling target 1010. Circulating water whose temperature has been adjusted by the first heat exchanger 6a and the second heat exchanger 6b flows through the water supply passage 2a. The water supply channel 2 a is connected to a channel 1002 for circulating the circulating water to the cooling target 1010. The circulating water supplied from the water supply channel 2 a to the cooling target 1010 through the channel 1002 returns to the temperature control device 100.

  The return water flow path 2b is a flow path for guiding the circulating water supplied to the cooling target 1010 and returned to the temperature control device 100 to the heat exchangers 6a and 6b. The return water flow path 2 b guides the circulating water that has circulated through the cooling target 1010 to the heat exchangers 6 a and 6 b via the pump 4.

  In the charged particle beam apparatus 1000, the water supply channel 2a, the channel 1002, and the return water channel 2b constitute a circulation channel for circulating the circulating water. The circulation channel is a channel for circulating the circulating water between the temperature control device 100 and the cooling target 1010.

  The pump 4 is a water pump for sending circulating water. In the charged particle beam apparatus 1000, the pump 4 can circulate the circulating water in the circulation channel including the water supply channel 2a, the channel 1002, and the return water channel 2b.

  The first heat exchanger 6a cools the circulating water by heat exchange between the refrigerant gas cooled by the refrigerant circulator 40 and the circulating water. In the first heat exchanger 6a, the refrigerant flow path 42 and the return water flow path 2b of the refrigerant circulator 40 pass, and between the refrigerant gas passing through the refrigerant flow path 42 and the circulating water passing through the return water flow path 2b. Heat exchange takes place. The circulating water cooled by the first heat exchanger 6a is sent to the second heat exchanger 6b.

  The second heat exchanger 6b heats the circulating water by heat exchange between the heater 10 and the circulating water cooled by the first heat exchanger 6a. A heater 10 is built in the second heat exchanger 6b, and heat exchange is performed between the heater 10 and circulating water passing through the return water flow path 2b. The circulating water heated and adjusted in temperature by the second heat exchanger 6b is sent to the cooling target 1010.

  Thus, in the temperature control device 100, the temperature of the circulating water is adjusted by the two heat exchangers 6a and 6b.

  The temperature sensor 8 is provided in the water supply channel 2a. The temperature sensor 8 measures the temperature of the circulating water whose temperature is adjusted by the heat exchangers 6a and 6b and sent to the cooling target. The temperature sensor 8 is, for example, a sensor that utilizes the fact that the electrical resistance value of metal varies with temperature changes. The temperature sensor 8 sends information on the measured temperature of the circulating water to the controller 50.

  The heater 10 is, for example, a heating element that generates Joule heat by supplying current. The heater 10 is made of, for example, a nichrome wire. In the second heat exchanger 6b, heat exchange is performed between the heat generated by the heater 10 and the circulating water, and the circulating water is heated. The amount of heat generated by the heater 10 is controlled by controlling the heater power supply 12 with the controller 50.

  The refrigerant circulator 40 is a circulation type cooling device, and cools the liquefied refrigerant by evaporating and expanding. In the first heat exchanger 6a, heat exchange is performed between the refrigerant gas cooled by the refrigerant circulator 40 and the circulating water, thereby cooling the circulating water. The refrigerant circulator 40 includes a refrigerant flow path 42, a compressor 44, a condenser 46, a hot gas valve 20, and a cool gas valve 30.

  The compressor 44 compresses the refrigerant gas whose temperature has increased due to heat exchange with the circulating water in the first heat exchanger 6a, and increases the temperature of the refrigerant gas (adiabatic compression). At least a part of the refrigerant gas compressed to high temperature by the compressor 44 is sent to the condenser 46.

  The condenser 46 cools and liquefies the refrigerant gas that has become high temperature in the compressor 44. The condenser 46 cools and liquefies the refrigerant gas by heat exchange with the cooling water flowing through the cooling water supply channel 48. The cooling water flowing through the cooling water supply channel 48 is supplied from the outside of the temperature control device 100, for example. The refrigerant liquefied by the condenser 46 is sent to the cool gas valve 30.

  The cool gas valve (electronic expansion valve) 30 depressurizes the liquefied refrigerant into a low-temperature gas (adiabatic expansion). As the cool gas valve 30 is opened, the supply amount of the low-temperature refrigerant gas increases. The opening degree of the cool gas valve 30 is controlled by the controller 50. The refrigerant gas that has become a low-temperature gas by the cool gas valve 30 is mixed with the refrigerant gas that has been compressed by the compressor 44 and has a high temperature via the hot gas valve 20.

  The hot gas valve 20 is a valve for adjusting a mixing ratio between a part of the refrigerant gas compressed by the compressor 44 and having a high temperature and a refrigerant gas having a low temperature by the cool gas valve 30. As the hot gas valve 20 is opened, the supply amount of the high-temperature refrigerant gas increases. The hot gas valve 20 is controlled by the controller 50. The mixed refrigerant gas is sent to the first heat exchanger 6a.

  Here, the heater 10 has higher temperature control resolution (resolution for temperature control of fluid) than the hot gas valve 20. Further, the hot gas valve 20 has higher temperature control resolution than the cool gas valve 30. Here, the temperature control resolution can be rephrased as a minimum control amount with respect to a change in heat quantity. That is, the temperature of the heater 10 can be controlled with higher accuracy than the hot gas valve 20, and the temperature of the hot gas valve 20 can be controlled with higher accuracy than the cool gas valve 30. For example, the temperature change of the circulating water when the hot gas valve 20 is changed by the smallest variable unit of opening is smaller than the temperature change of the circulating water when the cool gas valve 30 is changed by the smallest variable unit of opening.

The controller 50 controls the heater 10, the hot gas valve 20, and the cool gas valve 30. A control example of the controller 50 will be described later. The controller 50 may be configured to be realized by a dedicated circuit and to perform control described later. In addition, the controller 50 has a CPU (Central Processing Unit), a ROM (Read Only Memory), and a RAM (Random Access).
It may be configured to function as a computer by executing a control program stored in a storage device such as Memory, and to perform control described later.

1.2. Operation of Temperature Control Device Next, the operation of the temperature control device 100 will be described.

  The temperature control device 100 sends the temperature-controlled circulating water to the cooling target 1010 with the pump 4 and controls the temperature of the cooling target 1010. The heat exchange of the circulating water is performed in the first heat exchanger 6a and the second heat exchanger 6b.

  The relatively low-temperature refrigerant gas flowing through the refrigerant flow path 42 in the first heat exchanger 6a rises in temperature due to heat exchange with circulating water in the first heat exchanger 6a, and is then compressed by the compressor 44. It becomes a higher temperature gas. This high-temperature gas is cooled and liquefied by heat exchange with the cooling water supplied from the outside flowing through the cooling water supply passage 48 in the condenser 46. The liquefied refrigerant is depressurized in the cool gas valve 30 to become a low temperature gas. As the cool gas valve 30 is opened, the supply amount of the low-temperature refrigerant gas increases.

  On the other hand, a part of the refrigerant gas which has been compressed by the compressor 44 and has a high temperature is mixed with the refrigerant gas having a low temperature by the cool gas valve 30 via the hot gas valve 20. As the hot gas valve 20 is opened, the supply amount of the high-temperature refrigerant gas increases. By controlling the opening of the cool gas valve 30 and the opening of the hot gas valve 20, the temperature and flow rate of the refrigerant gas flowing through the first heat exchanger 6a can be adjusted.

  A heater 10 is built in the second heat exchanger 6b following the first heat exchanger 6a, and heat is exchanged between the circulating water flowing in the return water flow path 2b and the heater 10. The controller 50 feedback-controls the output of the heater power supply 12 based on the deviation between the circulating water temperature measured by the temperature sensor 8 and the command temperature. At this time, if the amount of heat generated by the heater 10 is insufficient to compensate for the temperature deviation, the heat exchange of the circulating water in the first heat exchanger 6a is controlled. The heat exchange in the first heat exchanger 6a is performed by the controller 50 adjusting the opening degree of the cool gas valve 30 and the opening degree of the hot gas valve 20. A method of controlling the heater 10, the hot gas valve 20, and the cool gas valve 30 of the controller 50 will be described in "1.3. Controller control example" below.

1.3. Controller Control Example Next, a control example of the controller 50 will be described.

(1) First Process The controller 50 operates the heater 10 based on the measurement result of the temperature sensor 8 and performs a process (first process) for holding the outputs of the hot gas valve 20 and the cool gas valve 30.

The controller 50 feedback-controls the output of the heater power supply 12 based on the deviation between the temperature of the circulating water measured by the temperature sensor 8 and the command temperature (set temperature, target value of the circulating water temperature). For example, a PID compensator is used as the compensator. At this time, the controller 50 holds the output of the hot gas valve 20 and the output of the cool gas valve 30.
Information on the command temperature is stored in, for example, a storage device (not shown), and the controller 50 reads out the information on the command temperature stored in the storage device and obtains a deviation from the temperature of the circulating water.

  FIG. 2 is an operation image diagram of the heater 10, the hot gas valve 20, and the cool gas valve 30 for explaining an example of the first process of the controller 50. FIG. 2 shows the case where the command temperature of the circulating water is increased and the change in the command temperature of the circulating water is relatively small (in the temperature control range of the heater 10).

As shown in FIG. 2, in the initial state, the output of the heater 10 is 50%, the opening degree of the hot gas valve 20 is 50%, and the opening degree of the cool gas valve 30 is 50%. The initial value is stable. When the command temperature is changed to a temperature higher than the initial value, the controller 50 performs PID control (Proportional-Integral-Derivative) based on the deviation between the temperature of the circulating water measured by the temperature sensor 8 and the command temperature.
The output of the heater 10 to be controlled is increased. At this time, the controller 50 holds the opening degree of the hot gas valve 20 and the opening degree of the cool gas valve 30 at 50%. Thereby, the temperature of circulating water rises and the temperature of circulating water can be stabilized at command temperature.

(2) Second processing When the output of the heater 10 reaches a given output value (first output value), the controller 50 changes the output (opening degree) of the hot gas valve 20 and hots the heater 10 A process (second process) is performed to operate in a direction that cancels out a change in the heat amount due to a change in the output of the gas valve 20.

  Here, operating in the direction to cancel the change in the amount of heat due to the change in the output of the hot gas valve 20 specifically means that when the temperature of the circulating water is lowered by changing the opening of the hot gas valve 20, the heater 10 Is operated to increase the temperature of the circulating water. For example, when the temperature of circulating water rises by changing the opening degree of the hot gas valve 20, it means operating the heater 10 so that the temperature of circulating water falls.

  For example, the controller 50 performs the second process when the output of the heater 10 reaches 100% (upper limit) or reaches 0% (lower limit). In the second process, the output (opening degree) of the cool gas valve 30 is maintained. For example, the controller 50 acquires information on the output of the heater 10 from a control signal for controlling the heater 10.

  Specifically, when the output of the heater 10 reaches 100%, the controller 50 performs a process of opening the hot gas valve 20 by a predetermined amount at predetermined time intervals. When the controller 50 opens the hot gas valve 20 by a certain amount, the controller 50 decreases the output of the heater 10 so as to offset the heat amount of the temperature rise of the circulating water caused by opening the hot gas valve 20 by a certain amount. For example, the controller 50 cancels the amount of heat by reducing the integral operation amount among the operation amounts of the PID.

  On the other hand, when the output of the heater 10 reaches 0%, the controller 50 performs a process of closing the hot gas valve 20 by a predetermined amount at predetermined time intervals. When the controller 50 closes the hot gas valve 20 by a certain amount, the controller 50 increases the output of the heater 10 so as to offset the amount of heat corresponding to the temperature drop of the circulating water caused by closing the hot gas valve 20 by a certain amount. For example, the controller 50 cancels the amount of heat by increasing the integral operation amount among the operation amounts of the PID.

  Note that the first output value is not limited to 100% or 0%. For example, the controller 50 may perform the second process when the output of the heater 10 reaches 80% (upper limit) or reaches 20% (lower limit).

  Here, since the opening degree of the hot gas valve 20 and the amount of heat given to the circulating water are not linear, the relationship between the absolute opening degree value of the hot gas valve 20 and the change in the amount of heat when opening and closing the unit opening degree is investigated. Then, a table or the like is recorded in advance in a storage device (not shown) or the like. The controller 50 performs the second process described above with reference to the table recorded in the storage device.

  In the above-described example, the case where the controller 50 operates the heater 10 so as to cancel the change in the amount of heat due to the change in the output of the hot gas valve 20 in the second process has been described. However, the operating condition of the hot gas valve 20 is eliminated. For this purpose, if the heater 10 is operated in a direction that cancels the change in the amount of heat due to the change in the output of the hot gas valve 20, the amount of cancellation is not particularly limited.

  That is, the amount of offset of the heat amount change by the heater 10 may not be an amount that completely cancels the amount of heat change due to the change in the output of the hot gas valve 20, and the amount of offset is not particularly limited. For example, the amount of change in the amount of heat by the heater 10 may be less than twice the amount of change in the amount of heat by the hot gas valve 20 by changing the sign. Even in such a case, transient temperature fluctuations can be suppressed.

  FIG. 3 is an operation image diagram of the heater 10, the hot gas valve 20, and the cool gas valve 30 for explaining an example of the second process of the controller 50. FIG. 3 shows a case where the command temperature of the circulating water is increased, and the case where the change in the command temperature of the circulating water is larger than that in the example of FIG. 2 (in the temperature control range of the hot gas valve 20). Represents.

  When the command temperature is changed to a temperature higher than the initial value, the controller 50 operates the heater 10 based on the measurement result of the temperature sensor 8 and holds the outputs of the hot gas valve 20 and the cool gas valve 30. Process. Thereby, as shown in FIG. 3, the output of the heater 10 increases and the temperature of circulating water rises.

  Then, when the output of the heater 10 reaches 100%, the controller 50 opens the hot gas valve 20 by a certain amount, and cancels the amount of heat corresponding to the temperature rise of the circulating water due to opening the hot gas valve 20 by a certain amount. The second process is performed to reduce the output of. Since the output of the heater 10 is reduced by the second process, the controller 50 performs the first process again. At this time, since the controller 50 maintains the opening degrees of the hot gas valve 20 and the cool gas valve 30, the hot gas valve 20 is held in a state in which a certain amount is opened. With the above operation, the temperature of the circulating water rises, and the temperature of the circulating water can be stabilized at the command temperature.

(3) Third process The controller 50 changes the output (opening) of the cool gas valve 30 when the output of the hot gas valve 20 reaches a given output value (second output value, second opening). At the same time, a process (third process) is performed in which the hot gas valve 20 is operated in a direction that cancels the change in the heat amount due to the change in the opening degree of the cool gas valve 30.

Note that the second output value is not limited to 100% or 0%. For example, the controller 50 may perform the third process when the output of the hot gas valve 20 reaches 80% (upper limit) or reaches 20% (lower limit). For example, the controller 50 acquires information about the opening degree of the hot gas valve 20 from a control signal for controlling the hot gas valve 20.

  Specifically, when the opening degree of the hot gas valve 20 reaches 100%, the controller 50 performs a process of closing the cool gas valve 30 by a predetermined amount at predetermined time intervals. When the controller 50 closes the cool gas valve 30 by a certain amount, the controller 50 decreases the opening degree of the hot gas valve 20 so as to offset the heat amount of the temperature rise of the circulating water caused by closing the cool gas valve 30 by the certain amount.

  On the other hand, when the opening degree of the hot gas valve 20 becomes 0%, the controller 50 performs a process of opening the cool gas valve 30 by a predetermined amount at predetermined time intervals. When the controller 50 opens the cool gas valve 30 by a certain amount, the controller 50 increases the opening degree of the hot gas valve so as to offset the amount of heat corresponding to the temperature drop of the circulating water caused by opening the cool gas valve 30 by a certain amount.

  Here, since the opening degree of the cool gas valve 30 and the amount of heat given to the circulating water are not linear, the relationship between the absolute opening degree value of the cool gas valve 30 and the change in the amount of heat when opening / closing the unit opening degree is investigated. Then, a table or the like is recorded in advance in a storage device (not shown) or the like. The controller 50 performs the third process described above with reference to the table recorded in the storage device.

  In the above-described example, the case where the controller 50 operates the hot gas valve 20 so as to cancel the heat amount change due to the change in the output of the cool gas valve 30 in the third process has been described. If the hot gas valve 20 is operated in a direction to cancel the change in the heat amount due to the change in the output of the cool gas valve 30 for the purpose of eliminating it, the amount of cancellation is not particularly limited.

  That is, the amount of offset of the heat amount change by the hot gas valve 20 may not be an amount that completely cancels the amount of heat change due to the change of the output of the cool gas valve 30, and the amount of offset is not particularly limited. For example, the amount of change in the amount of heat by the hot gas valve 20 may be less than twice the amount of change in the amount of heat by the cool gas valve 30 by changing the sign. Even in such a case, transient temperature fluctuations can be suppressed.

  FIG. 4 is an operation image diagram of the heater 10, the hot gas valve 20, and the cool gas valve 30 for explaining an example of the third process of the controller 50. FIG. 4 shows a case where the command temperature of the circulating water is increased, and the change of the command temperature of the circulating water is larger than the example of FIGS. 2 and 3 (within the temperature control range of the cool gas valve 30). Case).

  When the command temperature is changed to a temperature higher than the initial value, the controller 50 performs the first process. Thereby, the output of the heater 10 increases. Then, the controller 50 performs the second process when the output of the heater 10 reaches 100%. By this second process, the output of the heater 10 decreases, and the controller 50 performs the first process again.

  Here, when the change in the temperature control value of the circulating water is large, the controller 50 repeats the first process and the second process as shown in FIG.

By repeating the first process and the second process, the opening degree of the hot gas valve 20 gradually increases, and when the opening degree reaches 100%, the controller 50 moves the cool gas valve 30 to a predetermined time interval. And a third process for reducing the opening degree of the hot gas valve 20 so as to offset the amount of heat corresponding to the temperature rise of the circulating water caused by closing the cool gas valve 30 by a certain amount. Thereby, the opening degree of the hot gas valve 20 decreases, and the controller 50 performs the first process again. With the above operation, the temperature of the circulating water rises, and the temperature of the circulating water can be stabilized at the command temperature.

1.4. Temperature Control Method FIG. 5 is a flowchart illustrating an example of a temperature control method using the temperature control device 100 according to the first embodiment.

  First, the controller 50 operates the heater 10 based on the measurement result of the temperature sensor 8 and performs a first process for holding the outputs of the hot gas valve 20 and the cool gas valve 30 (step S10). And the controller 50 returns to step S10, and the 1st process is continued, when the output of the heater 10 has not reached the upper / lower limit value (first output value) (NO in step S12).

  When the output of the heater 10 reaches the upper and lower limit values (in the case of YES in step S12), the controller 50 changes the opening degree of the hot gas valve 20 and changes the amount of heat due to the change in the opening degree of the hot gas valve 20. Are operated in a direction to cancel (step S14). Then, when the opening degree of the hot gas valve 20 has not reached the upper and lower limit values (second output value) (NO in Step S16), the controller 50 returns to Step S10, and Steps S10, S12, and S14. The process of step S16 is performed.

  The controller 50 changes the amount of heat caused by the change in the opening degree of the cool gas valve 30 while changing the opening degree of the cool gas valve 30 when the hot gas valve 20 is the upper and lower limit values (in the case of YES in step S16). (Step S18). And the controller 50 returns to step S10, and repeats the process of step S10-step S18, and stabilizes the temperature of circulating water with instruction | command temperature.

  The temperature control device 100 has the following features, for example.

  In the temperature control apparatus 100, the controller 50 operates the heater 10 based on the measurement result of the temperature sensor 8, the first process for holding the output of the hot gas valve 20, and the output of the heater 10 reaches the first output value. In this case, the second process is performed in which the output of the hot gas valve 20 is changed and the heater 10 is operated in a direction that cancels out the change in the heat amount due to the change in the output of the hot gas valve 20. Thereby, hunting with respect to the temperature of circulating water can be prevented, and temperature control with faster response can be performed. Furthermore, since a transient response of the water temperature can be suppressed, for example, deterioration of temperature accuracy when the hot gas valve 20 with low temperature control resolution is operated can be suppressed. Therefore, the temperature control apparatus 100 can improve the temperature stability.

  In the temperature control device 100, the controller 50 changes the output of the cool gas valve 30 and changes the output of the cool gas valve 30 when the opening degree of the hot gas valve 20 reaches the second output value. A third process is performed to operate in a direction that cancels out the change in the amount of heat due to. Thereby, hunting with respect to the temperature of circulating water can be prevented, and temperature control with faster response can be performed. Furthermore, since a transient response of the water temperature can be suppressed, for example, deterioration of temperature accuracy when the cool gas valve 30 having a low temperature control resolution is operated can be suppressed. Therefore, the temperature control apparatus 100 can improve the temperature stability.

In the temperature control apparatus 100, the heater 10 is connected to the hot gas valve 2 in the second process.
The operation is performed so as to cancel out the change in the heat amount due to the change in the output of zero. Therefore, a transient response of the water temperature can be further suppressed, and deterioration of temperature accuracy when the hot gas valve 20 having a low temperature control resolution is operated can be further suppressed.

  Similarly, in the temperature control apparatus 100, in the third process, the hot gas valve 20 is operated so as to cancel the change in the heat amount due to the change in the output of the cool gas valve 30. Therefore, a transient response of the water temperature can be suppressed, and deterioration of temperature accuracy when the cool gas valve 30 with low temperature control resolution operates can be suppressed.

  Hereinafter, the effects described above will be described in more detail.

  For example, if the heater output is saturated without performing the above-described process of canceling the heat amount, the opening degree of the hot gas valve changes, and the opening degree of the cool gas valve when the opening degree of the hot gas valve reaches the upper and lower limits. Let us consider a case where a linked operation is performed (hereinafter also referred to as “reference example”). In the reference example, the configuration of the apparatus is the same as that of the temperature control apparatus 100 except that the controller performs the above processing.

  Here, a case where the command temperature is changed to a high value with a relatively large width from a state where the temperature of the circulating water is stable is considered. At this time, the amount of heat of the heater is saturated to 100% due to temperature deviation. This saturation state is used as the operating condition of the hot gas valve, and the hot gas valve is gradually opened by a certain amount per certain time. When the opening of the hot gas reaches the upper limit, the cool gas valve is gradually closed by a certain amount for a certain amount at a certain time using this as an operating condition.

  The effect of the change in the circulating water temperature is that the opening of the hot gas valve is larger than the opening of the heater, and the opening of the cool gas valve is larger than the opening of the hot gas valve. To rise. As a result, when the circulating water temperature exceeds the command value, a temperature deviation greatly occurs on the opposite side, and the heater changes from a 100% saturated state to a 0% saturated state. Only when the heater reaches 0%, the hot gas valve operates in the opposite direction and starts to close from the upper limit opening, and at the same time, the operation of the cool gas valve in the closing direction stops. However, if the water temperature deviation still remains, the hot gas valve keeps closing and reaches the lower limit. Then, the cool gas valve starts to open again, and the water temperature rapidly decreases. When this operation is repeated, hunting of a water temperature having a relatively long cycle occurs, and the water temperature may not be stabilized.

  Next, a problem regarding water temperature stability will be described, assuming that the temperature around the temperature control device and the cooling target gradually decreases from the state where the circulating water temperature is stable, such as from evening to night. The output of the heater, the opening of the hot gas valve, and the opening of the cool gas valve are in a stable state if the amount of generated heat to be cooled and the ambient temperature are stable. When the ambient temperature gradually decreases from this state, the temperature around the circulating water flow path becomes lower, so the circulating water is further cooled, and the amount of heat that the temperature control device should give to the circulating water gradually increases. To go. Therefore, first, the output of the heater is increased to compensate for the increase in the required amount of heat.

However, when the output of the heater reaches the upper limit, the circulating water temperature can no longer be increased. Therefore, the hot gas valve operates in the opening direction. When the temperature further decreases, the hot gas valve reaches the upper limit of the opening, and thereby the cool gas valve is operated in the closing direction. However, in high-accuracy temperature control, even if the temperature control resolution of the heater is set to a sufficiently small value, even if the hot gas valve is operated with the minimum variable amount of opening, the change in the amount of heat is relatively small. large. Therefore, a transient temperature fluctuation is given to circulating water temperature at the time of hot gas valve operation, and this may deteriorate temperature accuracy. When the cool gas valve is operated by the minimum variable amount, a larger amount of heat is generated than when the hot gas valve is operated by the minimum variable amount, so that the influence on the circulating water temperature accuracy is greater.

  Here, the temperature control apparatus 100 according to the present embodiment is considered. In the temperature control device 100, when the heater 10, the hot gas valve 20, and the cool gas valve 30 are called in order from the upper to the lower in the order of higher temperature control resolution, the conditions under which the lower heat source operates are: The upper heat source is saturated to the upper and lower limits at which it can operate. By performing the above-described process of canceling out the amount of heat, the saturated state of the upper heat source, that is, the condition for further operation of the lower heat source can be solved once every set time.

  Once the operating condition is canceled, the operating condition of the lower heat source is satisfied again if the subsequent temperature deviation is large. Then, after the next fixed time, the operating condition of the lower heat source is canceled again, and this is repeated (for example, see FIG. 4). As this repetition proceeds, the temperature deviation gradually decreases, and the operation of the lower heat source stops. With this function, the temperature control apparatus 100 can prevent the hunting operation that has been a problem of the above-described reference example.

  For example, in the above-described reference example, the operating condition of the hot gas valve is canceled only when the sign of the deviation of the water temperature changes according to the operation of the cool gas valve or the hot gas valve. This is a characteristic of overshooting as a temperature response. When this overshoot amount exceeds 100% of the heater output, the heater output saturates to 0%, and then the hot gas valve is released from the maximum opening state and the operating condition of the cool gas valve is eliminated. .

  However, since the cool gas valve continues to be closed for a certain amount every time until this time, the circulating water temperature continues to rise. The water temperature begins to decrease only when the cool gas valve opens. The operation when the water temperature falls is the reverse of the above, resulting in long-period hunting. In order to prevent this hunting phenomenon without performing the above-described process of canceling out the amount of heat, for example, the hot gas valve has a longer cycle time of operation, and the amount of change in the opening per operation is increased. It must be small, and it takes a long time to settle the water temperature change, that is, the response becomes slow.

  On the other hand, in the temperature control device 100, when the ambient air temperature decreases from a state where the circulating water temperature is stable, the heat quantity canceling operation is effective even for the occurrence of a transient water temperature fluctuation due to the lower heat source operation. Thus, deterioration of temperature accuracy can be suppressed.

  In the temperature control method according to the first embodiment, the heater 10 is operated based on the measurement result of the temperature of the circulating water, the opening degree of the hot gas valve 20 is maintained (step S10), and the output of the heater 10 is A step of changing the output of the hot gas valve 20 when the first output value is reached, and operating the heater 10 in a direction to cancel out the change in the heat amount due to the change in the output of the hot gas valve 20 (step S14). In addition, the temperature control method according to the first embodiment changes the output of the cool gas valve 30 and changes the output of the cool gas valve 30 when the output of the hot gas valve 20 reaches the second output value. The process (step S18) of making it operate | move in the direction which cancels out the calorie | heat amount change by this is included.

Therefore, as described above, hunting with respect to the temperature of the circulating water can be prevented, and temperature control with faster response can be performed. Furthermore, since a transient response of the water temperature can be suppressed, for example, deterioration of temperature accuracy when the hot gas valve 20 or the cool gas valve 30 with low temperature control resolution is operated can be suppressed. Therefore, the temperature control method according to the first embodiment can improve temperature stability.

  In addition, although embodiment mentioned above demonstrated the example in which the temperature control apparatus 100 controls the temperature of water, the temperature control apparatus 100 may control the temperature of fluids, such as liquids other than water, and gas.

2. Second Embodiment 2.1. Configuration of Temperature Control Device Next, the configuration of the temperature control device according to the second embodiment will be described with reference to the drawings. FIG. 6 is a diagram schematically showing the configuration of the temperature control device 200 according to the second embodiment. In FIG. 6, an arrow shown in the flow path 202 indicates the direction of the flow of fluid flowing in the flow path 202.

  The temperature control device 200 controls the temperature of the fluid flowing through the flow path 202. The target fluid is not particularly limited, and may be a liquid such as water or a gas such as a refrigerant gas used as a refrigerant.

  As shown in FIG. 6, the temperature control device 200 includes a flow path 202, a heat exchanger 204, a temperature sensor 208, a first heater (first heat source device) 210, and a first controller (first heat source device control). Unit) 212, a second heater (second heat source device) 220, and a second controller (second heat source device controller) 222.

  The channel 202 is a channel for circulating fluid. The flow path 202 adjusts the temperature of the target object by flowing a fluid through the target object (not shown), for example. The flow path 202 may be a circulation flow path for circulating a fluid between the object and the heat exchanger 204. The channel 202 may be provided with a pump (not shown) for sending fluid.

  The heat exchanger 204 heats the fluid by heat exchange between the first heater 210 and the fluid and heat exchange between the second heater 220 and the fluid. A first heater 210 and a second heater 220 are built in the heat exchanger 204, and heat exchange is performed between the first heater 210 and the second heater 220 and the circulating water passing through the flow path 202.

  Although not shown, the flow path 202 may be provided with a heat exchanger in which the first heater 210 is incorporated and a heat exchanger in which the second heater 220 is incorporated. That is, the first heater 210 and the second heater 220 may be incorporated in separate heat exchangers.

  The temperature sensor 208 is provided in the flow path 202. The temperature sensor 208 is provided at the rear stage of the heat exchanger 204 (downstream side of the fluid flow). The temperature sensor 208 measures the temperature of the fluid whose temperature has been adjusted by the heat exchanger 204. The temperature sensor 208 is, for example, a sensor that utilizes the fact that the electrical resistance value of metal varies with temperature changes. The temperature sensor 208 sends the measured fluid temperature information to the first controller 212.

  The first heater 210 is built in the heat exchanger 204. In the heat exchanger 204, heat exchange is performed between the first heater 210 and the fluid passing through the flow path 202, and the fluid is heated. The amount of heat generated by the first heater 210 is controlled by the first controller 212.

The second heater 220 is built in the heat exchanger 204. In the illustrated example, the second heater 220 is provided in the heat exchanger 204, upstream of the first heater 210 (upstream side of the fluid flow). In the heat exchanger 204, heat exchange is performed between the second heater 220 and the fluid passing through the flow path 202, and the fluid is heated. The amount of heat generated by the second heater 220 is controlled by the second controller 222.

  The output capability of the second heater 220 is higher than the output capability of the first heater 210. That is, the second heater 220 is a higher output heater than the first heater 210. The output capability of the first heater 210 and the output capability of the second heater 220 may be equal.

  The first heater 210 and the second heater 220 are heating elements that generate Joule heat by supplying an electric current, for example. The first heater 210 and the second heater 220 are made of, for example, nichrome wire.

  The first controller 212 controls the first heater 210 based on the measurement result of the temperature sensor 208. The first controller 212 is, for example, a digital controller, which captures fluid temperature information from the temperature sensor 208 by an A / D converter (not shown) and supplies the current value or the first heater 210 A voltage value is determined, and a current or voltage is supplied to the first heater 210 via a D / A converter (not shown).

  The temperature rise amount of the fluid is not proportional to the current value or voltage value of the first heater 210 but is proportional to the power, that is, the square of the current value or voltage value. Therefore, the first controller 212 controls the power supplied to the first heater 210 according to the deviation between the measured temperature of the fluid and the command temperature. The command temperature information is stored in, for example, a storage device (not shown), and the first controller 212 reads the command temperature information stored in the storage device, and measures the measured fluid temperature and the command temperature. Find the deviation from.

  In the first controller 212, for example, a PID compensator is used. Note that other types of compensators may be used as the compensator. The first controller 212 controls the first heater 210 by combining proportional control (P control) and differential control (D control) (PD control).

  The second controller 222 controls the second heater 220 based on the output information of the first heater 210 so that the output of the first heater 210 becomes a given value (target output value). The target output value of the first heater 210 is, for example, the median value of the output range of the first heater 210, in other words, the median value of the generated heat amount of the first heater 210 (half the maximum generated heat amount). That is, the second controller 222 controls the second heater 220 so that the output of the first heater 210 is 50%.

  Note that the target output value of the first heater 210 is not limited to 50% and can take any value. That is, the target output value of the first heater 210 may be 40% or 60%. The information on the target output value of the first heater 210 is stored in, for example, a storage device (not shown), and the second controller 222 reads out the information on the target output value stored in the storage device and reads the second heater. 220 is controlled.

  The second controller 222 is, for example, a digital controller, takes in an output command (control signal for controlling the first heater 210) of the first heater 210 from the first controller 212, and is supplied to the second heater 220. Current value or voltage value is determined, and current or voltage is supplied to the second heater 220 via a D / A converter (not shown). The second controller 222 controls the power supplied to the second heater 220 according to the deviation between the output of the first heater 210 and the 50% output of the first heater 210.

In the second controller 222, for example, a PID compensator is used. Note that other types of compensators may be used as the compensator. The second controller 222 controls the second heater 220 by integral control (I control).

  In the above description, the first controller 212 performs proportional / derivative control without performing integral control, and the second controller 222 performs integral control without performing proportional control and differential control. The controller 212 may slightly add integral control to proportional control and derivative control, or the second controller 222 may add proportional control and derivative control to integral control. For example, the heat generation amount of the heater by the proportional gain and the heat generation amount of the heater by the differential gain in the proportional control and the differential control in the first controller 212 are the heat generation amount of the heater by the proportional gain in the proportional control and the differential control in the second controller 222, respectively. It is larger than the amount of heat generated by the heater due to the differential gain. Further, the amount of heat generated by the heater due to the integral gain in the integral control by the second controller 222 is larger than the amount of heat generated by the heater by the integral gain in the integral control by the first controller 212.

  The resolution of the D / A converter mounted on the first controller 212 and the resolution of the D / A converter mounted on the second controller 222 are, for example, equal. Accordingly, the first heater 210 has a higher temperature control resolution than the second heater 220. The resolution of the temperature control of the fluid depends on the magnitude of the heater output (size of output capability) and the resolution (number of bits) of the D / A converter with respect to the heater supply power stored in the controller. In the temperature control apparatus 100, as described above, the first heater 210 has a lower output capability than the second heater 220, and the resolution of the D / A converter mounted on the first controller 212 and the second controller 222 are mounted. Since the resolution of the D / A converter is equal, the first heater 210 has a higher temperature control resolution than the second heater 220 as described above.

  Note that the resolution of the D / A converter mounted on the first controller 212 may be higher than the resolution of the D / A converter mounted on the second controller 222. Thereby, the temperature control resolution of the first heater 210 can be further increased.

  Further, the first controller 212 and the second controller 222 may be integrated so that the processing of the first controller 212 and the processing of the second controller 222 can be performed in parallel by one controller.

2.2. Temperature Control Method Next, a temperature control method using the temperature control device 200 will be described. FIG. 7 is a flowchart illustrating an example of a temperature control method using the temperature control device 200 according to the second embodiment.

  First, the first controller 212 controls the first heater 210 based on the measurement result of the temperature sensor 208 (step S20).

  In order to control the temperature of the fluid to a desired temperature (command temperature), the first controller 212 takes in the information on the temperature of the fluid output from the temperature sensor 208 and uses the information on the temperature of the fluid as a command. The first heater 210 is controlled so as to eliminate the deviation from the temperature.

  The second controller 222 controls the second heater 220 based on the information on the output of the first heater 210 so that the output of the first heater 210 becomes a given value (step S22).

For example, the second controller 222 controls the second heater 220 so that the output of the first heater 210 is 50%. Specifically, the second controller 222 takes in a control signal for controlling the first heater 210 output from the first controller 212, and outputs the first heater 210 (current output) and the first heater 210. The second heater 220 is controlled so that the deviation from the 50% output becomes zero.

  In the temperature control device 200, the temperature of the fluid can be maintained at the command temperature by repeating the processes of step S20 and step S22 described above.

  FIG. 8 is a diagram illustrating an example of a temperature control waveform by the first heater 210 and a temperature control waveform by the second heater 220.

  Here, although the first heater 210 has a high temperature control resolution, the temperature control range is small. However, as described above, since the second heater 220 is controlled so that the output of the first heater 210 becomes the median value (50%), the first heater 210 has a plus or minus value when the fluid changes in temperature. The controllable temperature range can be kept wide with respect to both directions (both the temperature increasing direction and the temperature decreasing direction).

  The first controller 212 controls the first heater 210 in combination with proportional control and differential control (PD control). Therefore, as shown in FIG. 8, relatively fast temperature fluctuations are controlled with high resolution. The first controller 212 does not perform integration control. On the other hand, the second controller 222 only needs to set the output of the first heater 210 to 50% relatively slowly, and therefore controls the second heater 220 by integral control (I control). Note that the second controller 222 does not necessarily require proportional control and differential control.

  When there is a temperature deviation between the command temperature and the fluid, the output of the first heater 210 is always biased from 50% if the first controller 212 is performing proportional control. Therefore, when the output of the first heater 210 is controlled to 50% by the integral control of the second controller 222, the temperature deviation becomes zero.

  The temperature control device 200 has the following features, for example.

  In the temperature control device 200, the first controller 212 controls the first heater 210 based on the measurement result of the temperature sensor 208, and the second controller 222 determines that the output of the first heater 210 is a given value (target output value). The second heater 220 is controlled so that Thereby, even if the command temperature or the temperature of the fluid changes, for example, the output value of the first heater 210 can be kept at a given value (for example, can be kept constant). It is possible to suppress the influence of the temperature dependence. The reason will be described below.

The first heater 210 is a heating element composed of a nichrome wire or the like that generates Joule heat by supplying current. The electric resistance value of such a heating element has temperature dependence. For typical metals, the temperature is electrical resistance R as higher increase, if keeping the current I supplied to the heating element constant, Joule heat IR ² is increased. Further, when the voltage V supplied to the heating element is kept constant, the Joule heat V ² / R becomes small. Here, when the temperature of the fluid is increased, the equilibrium temperature of the heating element is increased. Therefore, there arises a problem that the optimum control gain setting value of the temperature control system changes due to the temperature dependence of the electrical resistance.

On the other hand, in the temperature control device 200, as described above, the output value of the first heater 210 is maintained at a given value, so that the influence of the temperature dependence of the electrical resistance of the first heater 210 is suppressed. be able to. Therefore, in the temperature control apparatus 200, the above problems do not occur, and the temperature stability can be improved.

  In the temperature control device 200, the first heater 210 has a higher temperature control resolution than the second heater 220 and has a narrower temperature control range than the second heater 220. Therefore, in the temperature control apparatus 200, as described above, since the second controller 222 controls the second heater 220 so that the output of the first heater 210 becomes a given value, high temperature control of the first heater 210 is performed. The fluid temperature can be controlled in a wide temperature control range which is the sum of the temperature control range of the first heater 210 and the temperature control range of the second heater 220 with resolution.

  In the temperature control device 200, the target output value of the first heater 210 is the median value of the output range of the first heater 210. Therefore, the first heater 210 can keep a controllable temperature range wide in both positive and negative directions (both in the direction of increasing the temperature and in the direction of decreasing the temperature) when the fluid fluctuates in temperature.

  In the temperature control device 200, the first controller 212 controls the first heater 210 in combination with proportional control and differential control, and the second controller 222 performs integral control of the second heater 220. Therefore, in the temperature control device 200, when the output of the first heater 210 is controlled to the target output value by the integral control of the second controller 222, the deviation between the command temperature and the fluid temperature can be made zero.

  In the temperature control method according to the second embodiment, the output of the first heater 210 is controlled based on the process of controlling the first heater 210 based on the measurement result of the temperature sensor 208 and the output information of the first heater 210. Controlling the second heater 220 to be a given value. Therefore, as described above, for example, even if the command temperature changes, the output value of the first heater 210 can be kept at a given value (can be kept constant), so that the electric resistance of the first heater 210 can be kept constant. The influence of temperature dependency can be suppressed. Therefore, the temperature control method according to the second embodiment can improve the temperature stability.

3. Modifications The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the gist of the present invention.

  In the temperature control device 100 according to the first embodiment described above, the controller 50 controls the heat source device (heater 10) that heats the circulating water and the heat source device (hot gas valve 20, cool gas valve 30) that cools the circulating water. Although the example of controlling the temperature of the circulating water has been described, the controller 50 may control only the plurality of heat source devices that cool the circulating water to control the temperature of the circulating water. The controller 50 may control the temperature of the circulating water by controlling only a plurality of heat source devices that heat the circulating water. Even in such a case, the same effects as those of the temperature control device 100 described above can be obtained. Therefore, the temperature control apparatus 100 can be applied also when controlling the temperature of circulating water to the desired temperature above room temperature, and is applicable also when controlling the temperature of circulating water to the desired temperature lower than room temperature. is there.

In the temperature control device 200 according to the second embodiment described above, the first controller 212 controls the heat source device (first heater 210) that heats the circulating water, and the second controller 222 heats the circulating water. Although the temperature of the fluid was controlled by controlling the (second heater 220), the heat source device controlled by the first controller 212 and the heat source device controlled by the second controller 222 are heat source devices that heat the fluid. Alternatively, it may be a heat source device that cools the fluid. Even in such a case, the same effects as those of the temperature control device 200 described above can be achieved. Therefore, the temperature control device 200 can be applied, for example, when controlling the temperature of the circulating water to a desired temperature below room temperature.

  Further, for example, in the temperature control device 100 according to the first embodiment described above, the example applied to the charged particle beam device has been described, but the temperature control device 100 can also be applied to other charged particle beam devices. . An example of such a charged particle beam apparatus is a charged particle beam drawing apparatus. Further, the temperature control apparatus 200 according to the second embodiment described above can be applied to an electron microscope, a charged particle beam drawing apparatus, and the like, similarly to the temperature control apparatus 100.

  For example, the temperature control device 200 according to the second embodiment may be applied to the second heat exchanger 6b of the temperature control device 100 according to the first embodiment described above. That is, the first heater 210 and the second heater 220 of the temperature control device 200 are used as the heater built in the second heat exchanger 6b of the temperature control device 100, and the first heater 210 and the second heater 220 are described above. You may control using the temperature control method which concerns on 2nd Embodiment. Thereby, it is possible to realize a temperature control device that is more excellent in temperature stability.

4). Third Embodiment 4.1. Configuration of Temperature Control Device Next, the configuration of the temperature control device according to the third embodiment will be described with reference to the drawings. FIG. 9 is a diagram schematically illustrating a configuration of a temperature control device 300 according to the third embodiment. In FIG. 9, an arrow shown in the flow path 202 indicates the direction of the flow of the fluid flowing in the flow path 202.

  Hereinafter, in the temperature control apparatus 300 according to the third embodiment, members having the same functions as those of the constituent members of the temperature control apparatus 200 according to the second embodiment described above are denoted by the same reference numerals, and description thereof is omitted. .

  In the temperature control apparatus 200 described above, as shown in FIG. 6, the first heater 210 is controlled by the first controller 212, and the second heater 220 is controlled by the second controller 222 (first control).

  On the other hand, in the temperature control device 300, as shown in FIG. 9, the first control in which the first heater 210 is controlled by the first controller 212 and the second heater 220 is controlled by the second controller 222; The second control in which the heater 210 is controlled by the third controller 312 and the second heater 220 is controlled by the fourth controller 322 can be switched.

  As shown in FIG. 9, the temperature control device 300 includes a flow path 202, a heat exchanger 204, a temperature sensor 208, a first heater (first heat source device) 210, and a first controller (first heat source device control). Part) 212, a second heater (second heat source device) 220, a second controller (second heat source device controller) 222, a third controller (third heat source device controller) 312 and a fourth controller (first 4 heat source device control unit) 322 and switching unit 330.

  The third controller 312 controls the first heater 210 so that the output of the first heater 210 becomes the target output value (second value). The target output value of the first heater 210 is, for example, the median value of heat generated by the first heater 210 (half of the maximum heat generated). That is, the third controller 312 controls the first heater 210 so that the output of the first heater 210 is 50%.

Note that the target output value of the first heater 210 is not limited to 50% and can be any value. Information on the target output value of the first heater 210 is stored in, for example, a storage device (not shown), and the third controller 312 reads out the information on the target output value stored in the storage device and reads the first heater 210. To control.

  The fourth controller 322 controls the second heater 220 based on the measurement result of the temperature sensor 208. The fourth controller 322 is, for example, a digital controller, takes in the fluid temperature information from the temperature sensor 208 by an A / D converter (not shown), and supplies the current value or the second heater 220 supplied. A voltage value is determined, and current or voltage is supplied to the second heater 220 via a D / A converter (not shown).

  The amount of fluid temperature rise is not proportional to the current value or voltage value of the second heater 220, but is proportional to the power, that is, the square of the current value or voltage value. The fourth controller 322 controls the power supplied to the second heater 220 according to the deviation between the measured fluid temperature and the command temperature. The command temperature information is stored in, for example, a storage device (not shown), and the fourth controller 322 reads the command temperature information stored in the storage device and measures the measured fluid temperature and the command temperature. Find the deviation from.

  In the fourth controller 322, for example, a PID compensator is used. Note that other types of compensators may be used as the compensator. For example, the fourth controller 322 performs PID control of the second heater 210 based on the deviation between the fluid temperature and the command temperature.

  The resolutions of the D / A converters mounted on the first to fourth controllers 322 are equal to each other, for example. Further, the first to fourth controllers 212, 222, 312, and 322 may be configured to be processed in parallel by one controller, and the first to fourth controllers 212, 222, 312, and 322 may be integrated. .

  The switching unit 330 determines whether or not the deviation between the temperature of the fluid measured by the temperature sensor 208 and the command temperature is greater than a predetermined value. If it is determined that the deviation is greater than the predetermined value, the switching unit 330 switches from the first control to the second control. On the other hand, when it is determined that the deviation is equal to or less than the predetermined value, the switching unit 330 switches from the second control to the first control.

  Here, the first control and the second control will be described. First, the first control will be described. In the first control, the first heater 210 is controlled by the first controller 212, and the second heater 220 is controlled by the second controller 222. The first control is the same as the control shown in FIG. 7 described above (the control described in the second embodiment).

  FIG. 10 is a diagram for explaining a state of the first control of the temperature control device 300.

  In the first control, as shown in FIG. 10, the first controller 212 fetches information on the fluid temperature PV from the temperature sensor 208, and based on the fluid temperature PV information, the fluid temperature PV and the command temperature SV. The first heater 210 is controlled using the PID compensator 212a so as to eliminate the deviation from the above. Further, the second controller 222 takes in the control signal output from the first controller 212 so that the deviation between the output of the first heater 210 and the 50% output (command temperature SV) of the first heater 210 becomes zero. The second heater 220 is controlled using the PID compensator 222a.

  In the first control, as described in the second embodiment, since the output value of the first heater 210 can be maintained at a given value even if the command temperature or the temperature of the fluid changes, the first heater The influence of the temperature dependency of the electric resistance of 210 can be suppressed, and the temperature stability can be improved.

  Next, the second control will be described. FIG. 11 is a diagram for explaining a state of the second control of the temperature control device 300.

  In the second control, as shown in FIG. 11, the third controller 312 controls the output of the first heater 210 to be a target output value (50% output, command temperature SV). That is, in the second control, the output of the first heater 210 is constant (50% output) regardless of the temperature of the fluid. The fourth controller 322 takes in information on the temperature PV of the fluid and uses the PID compensator 322a so as to eliminate the deviation between the temperature PV of the fluid and the command temperature SV based on the information on the temperature PV of the fluid. The second heater 220 is controlled.

  In the first control, since the first heater 210 is controlled based on the deviation between the fluid temperature PV and the command temperature SV, the second heater 220 is controlled based on the deviation between the fluid temperature PV and the command temperature SV. Compared to, it is possible to realize a higher temperature control resolution. On the other hand, in the second control, since the second heater 220 is controlled based on the deviation between the fluid temperature PV and the command temperature SV, the first heater 210 is controlled based on the deviation between the fluid temperature PV and the command temperature SV. High-speed response is possible compared to the first control to be controlled.

  As a threshold value (predetermined value) serving as a reference for control switching, for example, a deviation value between the fluid temperature and the command temperature when the output of the first heater 210 is switched from 50% to 100% is performed. Can be used. That is, the switching unit 330 performs the first control when the deviation between the fluid temperature and the command temperature is greater than the deviation when the control of switching the output of the first heater 210 from 50% to 100% is performed. To the second control. The threshold value (predetermined value) is not limited to this, and can be set as appropriate according to the required temperature control responsiveness.

  As shown in FIG. 9, the switching unit 330 includes a switch 332 for switching control over the first heater 210 and a switch 334 for switching control over the second heater 220.

  When switching from the first control to the second control, the switch 332 switches the control for the first heater 210 from the control by the first controller 212 to the control by the third controller 312. Further, when switching from the second control to the first control, the switch 332 switches the control for the first heater 210 from the control by the third controller 312 to the control by the first controller 212.

  When switching from the first control to the second control, the switch 334 switches the control for the second heater 220 from the control by the second controller 222 to the control by the fourth controller 322. Further, when switching from the second control to the first control, the switch 334 switches the control for the second heater 220 from the control by the fourth controller 322 to the control by the second controller 222.

  The switch 334 performs switching so that the operation amount of the second heater 220 is continuous before and after switching.

  FIG. 12 is a diagram for explaining the operation of the switch 334.

The switch 334 includes a first-order low-pass filter (LPF) 334a and two multipliers 334b and 334c. The low-pass filter 334a is represented by 1 / (T _SW s + 1). T _SW is a time constant and s is a Laplace operator. The switching signal “1” is input to the low-pass filter 334a when switching is performed. The multiplier 334b multiplies the controller output (operation amount MV1) before switching and the output of the low-pass filter 334a. In the multiplier 334c, the controller output (operation amount MV2) after switching is multiplied by the value obtained by subtracting the output of the low-pass filter 334a from “1”. Then, the sum of the multiplier 334 b and the multiplier 334 c is output to the second heater 220 as the operation amount MV ′.

  Hereinafter, the operation of the switch 334 when switching from the first control to the second control will be described with reference to FIGS. 9 and 12.

  In the switch 334, when the switching signal “1” is input to the low-pass filter 334a, the output (operation amount MV1) of the fourth controller 322 is gradually changed from “0” to “1” by the multiplier 334b. Multiply by a factor. On the other hand, the output (operation amount MV2) of the second controller 222 is multiplied by a coefficient that gradually becomes “0” from “1” by the multiplier 334c. These values are added and output to the second heater 220 as an operation amount MV ′.

  As described above, the switch 334 continuously increases the ratio of the operation amount MV1 to the second heater 220 by the fourth controller 322 with respect to the ratio of the operation amount MV2 to the second heater 220 by the second controller 222. That is, the switch 334 continuously increases the ratio of the operation amount with respect to the second heater 220 by the second control with respect to the ratio of the operation amount with respect to the second heater 220 by the first control. Thereby, when switching from 1st control to 2nd control, the operation amount of the 2nd heater 220 before and behind switching can be made continuous.

  The operation of the switch 334 when switching from the second control to the first control is the same except that the operation amount MV1 is an output of the second controller 222 and the operation amount MV2 is an output of the fourth controller 322. . That is, when switching from the second control to the first control, the switch 334 sets the ratio of the operation amount MV1 to the second heater 220 by the second controller 222 to the ratio of the operation amount MV2 to the second heater 220 by the fourth controller 322. Increase continuously. That is, the switch 334 continuously increases the ratio of the operation amount with respect to the second heater 220 by the first control to the ratio of the operation amount with respect to the second heater 220 by the second control. Thereby, when switching from 2nd control to 1st control, the operation amount of the 2nd heater 220 before and behind switching can be made continuous.

  The switch 334 can be realized by, for example, a soft switch (a switch realized by software operating on a computer system). In the above description, the switch 334 uses a primary low-pass filter. However, for example, a function that changes from “0” to “1” at a constant speed, or between “0” and “1”. A function or the like for drawing an S-shaped curve may be used.

When the switch 332 switches from the first control to the second control, for example, the control for the first heater 210 is immediately (instantly) switched from the control by the first controller 212 to the control by the third controller 312. Similarly, when switching from the second control to the first control, the switch 332 immediately switches the control for the first heater 210 from the control by the third controller 312 to the control by the first controller 212. This is because, unlike the second heater 220, the first heater 210 is controlled to 50% output in both the first control and the second control, and therefore, an abrupt change in the operation amount hardly occurs at the time of switching. . Note that the switch 332 may have the same configuration as the switch 334 described above. That is, the switch 332 may perform switching so that the operation amount of the first heater 210 is continuous before and after switching.

4.2. Temperature Control Method Next, a temperature control method using the temperature control device 300 will be described. FIG. 13 is a flowchart illustrating an example of a temperature control method using the temperature control device 300 according to the third embodiment.

  First, the first control is performed (step S30). The switching unit 330 outputs the output of the first controller 212 to the first heater 210 and outputs the output of the second controller 222 to the second heater 220. Thus, the first heater 210 is controlled based on the measurement result of the temperature sensor 208 (deviation between the fluid temperature and the command temperature), and the output of the first heater 210 is targeted based on the output information of the first heater 210. The second heater 220 is controlled so as to have an output value (50% output).

  Next, the switching unit 330 determines whether or not the deviation between the temperature of the fluid measured by the temperature sensor 208 and the command temperature is greater than a predetermined value (step S32).

  If it is determined that the deviation between the fluid temperature and the command temperature is equal to or less than the predetermined value (“NO” in step S32), the process returns to step S30 and the first control is continued.

  On the other hand, when it is determined that the deviation between the fluid temperature and the command temperature is larger than the predetermined value (“YES” in step S32), the switching unit 330 switches from the first control to the second control (step S34). ). At this time, the switch 334 of the switching unit 330 continuously increases the ratio of the operation amount with respect to the second heater 220 by the second control with respect to the ratio of the operation amount with respect to the second heater 220 by the first control. Thus, the operation amount of the second heater 220 can be made continuous.

  Then, the second control is performed (step S36). The switching unit 330 outputs the output of the third controller 312 to the first heater 210 and outputs the output of the fourth controller 322 to the second heater 220.

  Next, the switching unit 330 determines whether or not the deviation between the temperature of the fluid measured by the temperature sensor 208 and the command temperature is greater than a predetermined value (step S38).

  When it is determined that the deviation between the fluid temperature and the command temperature is greater than the predetermined value (“YES” in step S38), the process returns to step S36 and the second control is continued.

  On the other hand, when it is determined that the deviation between the fluid temperature and the command temperature is equal to or less than the predetermined value (“NO” in step S38), the switching unit 330 switches from the second control to the first control (step S39). At this time, the switch 334 of the switching unit 330 continuously increases the ratio of the operation amount with respect to the second heater 220 by the first control to the ratio of the operation amount with respect to the second heater 220 by the second control. Thus, the operation amount of the second heater 220 can be made continuous. And it returns to step S30 and performs 1st control.

  In the temperature control device 300, the temperature of the fluid can be maintained at the command temperature by repeating the processing from step S30 to step S39 described above.

  The temperature control device 300 has the following features, for example.

In the temperature control device 300, the switching unit 330 determines whether or not the deviation between the temperature of the fluid measured by the temperature sensor 208 and the command temperature is larger than a predetermined value, and determines that the deviation is larger than the predetermined value. If it is, the first control is switched to the second control. That is, in the temperature control device 300, when it is determined that the deviation between the fluid temperature and the command temperature is larger than a predetermined value, the temperature control resolution is high in which the temperature of the first heater 210 is mainly controlled by the fluid. From (first control), the second heater 220 can be switched to a state capable of high-speed response (second control) in which mainly temperature control of the fluid is performed.

  For example, when controlling the temperature only by the first control, the control target of the second heater is not the fluid temperature itself but the target output value (50% output) of the first heater. Originally, when the deviation from the command temperature is large, it is desirable that the operation amount of the control system be large accordingly. However, since the control target of the second heater is the 50% output of the first heater, for example, the temperature deviation is relatively small and the amount of heat for raising the temperature of the fluid is equal to the 50% output of the first heater. The deviation for changing the output of the second heater is 50% (100% -50%) of the first heater which is the maximum value. However, even when the deviation between the fluid temperature and the command temperature is much larger than this, the deviation for controlling the operation amount of the second heater is an amount corresponding to 50% of the first heater, which is the maximum value. Cannot be exceeded. Accordingly, even when the deviation between the fluid temperature and the command temperature becomes large, the response of the second heater does not become fast. Therefore, the temperature control response becomes slow when the deviation between the fluid temperature and the command temperature increases.

  In contrast, in the temperature control device 300, as described above, it is determined whether or not the deviation between the temperature of the fluid and the command temperature is larger than a predetermined value, and it is determined that the deviation is larger than the predetermined value. In this case, since the first control is switched to the second control, the response of the second heater 220 can be accelerated as compared with the case of only the first control. As described above, in the temperature control device 300, according to the magnitude of the deviation between the temperature of the fluid and the command temperature, a state (first control) with a high temperature control resolution for mainly controlling the temperature of the first heater 210, It is possible to switch between a state in which the second heater 220 is mainly temperature-controlled and capable of high-speed response (second control). Therefore, the temperature control device 300 can achieve both high-accuracy control and high-speed response control.

  Further, in the temperature control device 300, similarly to the temperature control device 200 described above, the output value of the first heater 210 is maintained at a given value, so that the influence of the temperature dependence of the electrical resistance of the first heater 210 is reduced. Therefore, temperature stability can be improved.

  In the temperature control device 300, the switching unit 330 continuously increases the operation amount ratio of the fourth controller 322 to the second heater 220 relative to the operation amount ratio of the second controller 222 to the second heater 220, Switch from the first control to the second control. Thereby, when switching from 1st control to 2nd control, the rapid change of the operation amount of the 2nd heater 220 can be suppressed, and the transient response of temperature can be suppressed.

  When switching from the first control to the second control, the control target of the second heater 220 is switched from the target output value (50% output) of the first heater 210 to the fluid temperature. Therefore, when not performing the said process, when switching from 1st control to 2nd control, the operation amount of a 2nd heater becomes discontinuous and, thereby, a transient temperature response will generate | occur | produce. On the other hand, in the temperature control device 300, the switching unit 330 continuously sets the operation amount ratio of the fourth controller 322 to the second heater 220 with respect to the operation amount ratio of the second controller 222 to the second heater 220. In order to switch from the first control to the second control, the operation amount of the second heater 220 can be continuously changed. Therefore, in the temperature control apparatus 300, the above problems do not occur, and a transient response of temperature can be suppressed.

  In the temperature control device 300, the switching unit 330 switches from the second control to the first control when it is determined that the deviation between the fluid temperature and the command temperature is equal to or less than a predetermined value. That is, in the temperature control device 300, when the deviation between the fluid temperature and the command temperature is determined to be equal to or less than the predetermined value, the second heater 220 is capable of high-speed response that mainly controls the fluid temperature (first 2 control), the first heater 210 can be switched to a state with high temperature control resolution (first control) for mainly controlling the temperature of the fluid. Therefore, the temperature control device 300 can achieve both high-accuracy control and high-speed response control.

  In the temperature control device 300, the switching unit 330 continuously increases the ratio of the operation amount with respect to the second heater 220 by the second controller 222 to the ratio of the operation amount with respect to the second heater 220 by the fourth controller 322. Thus, the second control is switched to the first control. Therefore, also when switching from the second control to the first control, as in the case of switching from the first control to the second control described above, a rapid change in the operation amount of the second heater 220 can be suppressed, and the temperature The transient response can be suppressed.

  In the temperature control device 300, the second controller 222 controls the second heater 220 so that the output of the first heater 210 becomes the first value, and the third controller 312 has the output of the first heater 210 the second value. The first heater 210 is controlled so that the first value and the second value are the median value (50% output) of the output range of the first heater 210. Therefore, the first heater 210 can keep a controllable temperature range wide in both the plus and minus directions (both the temperature increasing direction and the temperature decreasing direction). In addition, since the first value is equal to the second value, the operation amount of the first heater 210 is changed at the time of switching from the first control to the second control and from the second control to the first control. A sudden change can be prevented.

  In the temperature control method according to the third embodiment, a step of determining whether or not the deviation between the temperature of the fluid measured by the temperature sensor 208 and the command temperature is larger than a predetermined value (step S32), and the deviation is predetermined. A step of switching from the first control to the second control (step S34) when it is determined that the value is greater than the value (in the case of “YES” in step S32). Therefore, as described above, both high-precision control and high-speed response control can be achieved.

  In the above description, the control is switched when it is determined that the deviation between the fluid temperature and the command temperature is larger than the predetermined value. For example, the deviation between the fluid temperature and the command temperature is a predetermined value. Control may be switched when a state satisfying the condition of greater than is continued for a certain time (for example, 30 seconds). Thereby, it is possible to prevent a hunting phenomenon in which switching of control is repeated due to transient temperature fluctuations.

5. Fourth Embodiment Next, a configuration of a temperature control device according to a fourth embodiment will be described with reference to the drawings. FIG. 14 is a diagram schematically illustrating a configuration of a charged particle beam apparatus 1000 including a temperature control apparatus 400 according to the fourth embodiment. In FIG. 14, arrows shown in the flow paths 2 a, 2 b, 42, 48 indicate the direction of the flow of the fluid flowing through the flow paths 2 a, 2 b, 42, 48.

  Hereinafter, in the temperature control apparatus 400 according to the fourth embodiment, members having the same functions as those of the constituent members of the temperature control apparatus 100 according to the first embodiment described above are denoted by the same reference numerals, and description thereof is omitted. .

In the temperature control device 300, the controller 50 includes a PID compensator 52 and a nonlinear compensator 54. Further, the temperature control device 300 includes an AC power regulator 60 that regulates the power supplied to the heater 10. The AC power regulator 60 is a phase control type AC power regulator (APR).

  Here, a phase control type AC power regulator will be described. FIG. 15 is a diagram illustrating an example of an output waveform of a phase control type AC power regulator.

  As shown in FIG. 15, a phase control type AC power regulator (hereinafter also referred to as “APR”) applies a gate to an AC voltage waveform and changes a section in which a current flows in one cycle of a sine wave. Thus, the electric power is controlled steplessly. Here, the output of the APR is the ratio of the section through which this current flows. At this time, when the output of the APR is 50%, half the current of the sine wave waveform flows, so the effective current value is half that when the output of the APR is 100%.

  However, as shown in FIG. 15, when the APR output is 75% or 25%, the APR output is not proportional to the effective current value. Further, since the amount of heat generated by the heater is proportional to the square of the current value, the relationship between the output of the APR and the amount of heat generated by the heater is more non-linear than the relationship with the effective current. Although the controlled object is the temperature of the circulating water, the amount of heat necessary to increase the water temperature is the product of the temperature deviation amount and the value obtained by multiplying the circulating water flow rate per unit time by the specific heat. Therefore, if the output (%) of the APR is controlled so as to be proportional to the temperature deviation in spite of the proportional increase in the temperature of the circulating water and the power supplied to the heater, the influence of this non-linearity Will be greatly affected.

  Therefore, in the temperature control device 300, the controller 50 includes the nonlinear compensator 54. The nonlinear compensator 54 converts the operation amount obtained by the PID compensator 52 so that the relationship between the operation amount for the heater 10 obtained by the PID compensator 52 and the amount of heat generated by the heater 10 is linear. And output to the AC power regulator 60.

  Hereinafter, the principle of the nonlinear compensator 54 will be described.

  When the current is expressed as a sine wave, the power is proportional to the square. If this is integrated over a fixed interval between phase 0 and π, a value proportional to the effective power can be obtained. When this is expressed and transformed, the phase x is expressed as the following equation (1).

  When the operation amount obtained by the PID compensator 52 (that is, the operation amount before passing through the nonlinear compensator 54) is MV (%), the integration interval of the equation (1) is expressed by 0 to (MV / 100) × π. Is done.

  When the heat generation amount of the heater 10 is Q (%), the heat generation amount Q (%) of the heater 10 with respect to the operation amount MV (%) is expressed by the following equation (2).

Here, the manipulated variable MV (%) obtained by the PID compensator 52 is converted into MV ′ by the nonlinear compensator 54.
(%) At this time, it is desirable for the control system that the output (operation amount MV (%)) of the PID compensator 52 and the generated heat amount Q of the heater 10 are equal. Therefore, the nonlinear compensator 54 only needs to satisfy the following expression (3).

  FIG. 16 is a graph showing the relationship between the manipulated variable MV (%) obtained by the PID compensator 52 and the generated heat quantity Q (%) of the heater. The generated heat quantity Q is indicated by a solid line in FIG.

  When the manipulated variable MV is around 50%, the manipulated variable MV and the amount of generated heat Q can be regarded as linear, but the nonlinearity increases as the manipulated variable MV approaches 0% or 100%. In this region close to 0% or 100%, the amount of generated heat Q of the heater hardly changes even if the operation amount MV is changed with a small inclination. Therefore, the temperature of circulating water cannot be changed.

  If the control gain of the compensator is adjusted in the vicinity of the operation amount MV = 50%, the control gain becomes insufficient as the operation amount MV moves away from 50%, and the controllability deteriorates. When the control is performed only with the proportional gain, the response becomes slow and the temperature deviation becomes large. In addition, when control is performed by adding integral gain, the integral operation amount is accumulated for the time that the response is delayed. Therefore, the target value is exceeded and the sign of the deviation is reversed. That is, oscillation due to the integral operation amount is likely to occur. Therefore, the integral gain cannot be increased, and it takes time to compensate for the deviation, resulting in a slow response.

  Therefore, in order to linearize the relationship between the manipulated variable MV and the generated heat quantity Q and improve controllability, the manipulated variable MV may be multiplied by an inverse function of the generated heat quantity Q. Thereby, the relationship between the manipulated variable MV and the generated heat quantity Q can be linearized. In addition, the inverse function (operation amount MV ′) of the generated heat quantity Q is indicated by a wavy line in FIG. 16, and the linearized generated heat quantity Q is indicated by a one-dot chain line.

  Here, in order to obtain the inverse function of the generated heat quantity Q, the inverse function of y = x−sin (x) must be obtained, but the inverse function of y = x−sin (x) is a known function. In this case, y = x + sin (x + sin (x + sin (x + sin (x + sin (x + sin (x + sin (x + sin (x + ...))))))))))))))))))).

  Therefore, for example, the operation amount MV can be converted into the operation amount MV ′ by using a conversion table that represents a coefficient for converting the operation amount MV into the operation amount MV ′. In this conversion table, the operation amount MV ′ is prepared as a discrete value with respect to the operation amount MV. When the operation amount MV is between these discrete values, a coefficient for linearization is obtained by linear interpolation. Can be sought. The interpolation method is not particularly limited, and other interpolation methods such as Newton interpolation may be used. For example, the conversion table is stored in the storage device of the controller 50 and is read and used.

  Next, the operation of the controller 50 will be described.

In the controller 50, the PID compensator 52 obtains the operation amount MV of the heater 10 that is PID controlled based on the deviation between the temperature of the circulating water measured by the temperature sensor 8 and the command temperature. P
The manipulated variable MV obtained by the ID compensator 52 is sent to the nonlinear compensator 54. The nonlinear compensator 54 converts the manipulated variable MV into an manipulated variable MV ′ so that the relationship between the manipulated variable MV and the generated heat quantity Q of the heater 10 is linear. Then, the nonlinear compensator 54 sends the manipulated variable MV ′ to the AC power regulator 60. The AC power adjuster 60 adjusts the power supplied from the heater power supply 12 to the heater 10 based on the operation amount MV ′.

  The temperature control device 400 has the following features, for example.

  The temperature control device 400 includes a phase control type AC power regulator 60 that regulates the power supplied to the heater 10. In the controller 50, the nonlinear compensator 54 is based on the deviation between the temperature of the circulating water and the command temperature. The operation amount MV is converted so that the obtained operation amount MV with respect to the heater 10 and the amount of heat Q generated in the heater 10 are linear and output to the AC power regulator 60. Therefore, for example, even when the manipulated variable MV is in a state close to 0% or 100%, the controllability of the water temperature is not impaired, and the control gain can be set appropriately. Therefore, for example, controllability can be improved compared to the case where the nonlinear compensator 54 is not provided.

  In addition, the temperature control device 400 is relatively inexpensive and can compensate for nonlinearity occurring in the power output of the AC power regulator of the phase control method capable of continuously controlling the power. The temperature control device can be realized.

  In the above description, the case where nonlinear compensation is performed by the compensation table for converting the operation amount MV into the operation amount MV ′ and the interpolation between discrete values has been described. For example, y = x + sin (x + sin (x + sin (x + sin (x + sin (x + sin (X + sin (x + sin (x + sin (x +...)))))))))))))))))))))))))))))))))))))))))))). You may go.

  In the above description, an example in which the phase control type AC power regulator 60 and the nonlinear compensator 54 are used to control the heater 10 of the temperature control device 400 has been described. However, the temperature control device illustrated in FIG. A phase control AC power regulator and a nonlinear compensator may be applied to the 200 heaters 210 and 220. Further, a phase control type AC power regulator and a nonlinear compensator may be applied to the heaters 210 and 220 of the temperature control device 300 shown in FIG.

  In addition, embodiment mentioned above and a modification are examples, Comprising: It is not necessarily limited to these. For example, each embodiment and each modification can be combined as appropriate.

  The present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same objects and effects). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that exhibits the same operational effects as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

2a ... Water supply flow path, 2b ... Return water flow path, 4 ... Pump, 6a ... First heat exchanger, 6b ... Second heat exchanger, 8 ... Temperature sensor, 10 ... Heater, 12 ... Heater power supply, 20 ... Hot gas valve , 30 ... Cool gas valve, 40 ... Refrigerant circulator, 42 ... Refrigerant flow path, 44 ... Compressor, 46 ... Condenser, 48 ... Cooling water supply flow path, 50 ... Controller, 52 ... PID compensator, 54 ... Nonlinear compensator , 60 ... AC power regulator, 100, 200 ... Temperature controller, 202 ... Flow path, 204 ... Heat exchanger, 208 ... Temperature sensor, 210 ... First heater, 212 ... First
Controller, 212a ... PID compensator, 220 ... second heater, 222 ... second controller, 222a ... PID compensator, 300 ... temperature controller, 312 ... third controller, 322 ... fourth controller, 322a ... PID compensator, 330 ... switching unit, 332 ... switch, 334 ... switch, 334a ... low pass filter, 334b ... multiplier, 334c ... multiplier, 1000 ... charged particle beam device, 1002 ... flow path, 1010 ... cooling target

Claims (30)

A temperature control device for controlling the temperature of a fluid,
A plurality of heat source devices for heating or cooling the fluid;
A temperature sensor for measuring the temperature of the fluid;
A control unit for controlling the plurality of heat source devices;
Including
The controller is
A first process of operating a first heat source device of the plurality of heat source devices based on a measurement result of the temperature sensor and holding an output of a second heat source device of the plurality of heat sources;
When the output of the first heat source device reaches the first output value, the output of the second heat source device is changed, and the first heat source device cancels the change in the amount of heat due to the change of the output of the second heat source device. A second process that operates in a direction to
And
The first heat source device has a higher temperature control resolution than the second heat source device. In claim 1,
The controller changes the output of the third heat source device among the plurality of heat sources when the output of the second heat source device reaches a second output value, and changes the second heat source device to the third heat source device. Performing a third process for operating in a direction to cancel out a change in heat quantity due to a change in output of the heat source device;
The second heat source device is a temperature control device having a higher temperature control resolution than the third heat source device. In claim 1 or 2,
In the second process, the temperature control device is configured to operate the first heat source device so as to cancel the change in the heat amount of the fluid due to the change in the output of the second heat source device. A temperature control device for controlling the temperature of a fluid,
A first heat source device for heating or cooling the fluid;
A second heat source device that heats or cools the fluid and has an output capability equal to or greater than the output capability of the first heat source device;
A temperature sensor for measuring the temperature of the fluid;
A first heat source device controller that controls the first heat source device based on the measurement result of the temperature sensor;
A second heat source device controller that controls the second heat source device so that the output of the first heat source device has a given value based on the information of the output of the first heat source device;
Including a temperature control device. In claim 4,
The first heat source device has a temperature control resolution higher than that of the second heat source device and has a temperature control range narrower than that of the second heat source device. In claim 4 or 5,
The temperature control device, wherein the given value is a median value of an output range of the first heat source device. In any one of Claims 4 thru | or 6,
The second heat source device control unit takes in a control signal for controlling the first heat source device output from the first heat source device control unit, and acquires information on an output of the first heat source device. apparatus. In any one of Claims 4 thru | or 7,
The first heat source device control unit controls the first heat source device in combination with proportional control and differential control,
The second heat source device control unit is a temperature control device that integrates and controls the second heat source device. A temperature control method for controlling the temperature of a fluid using a temperature control device including a plurality of heat source devices,
Operating the first heat source device of the plurality of heat source devices based on the measurement result of the temperature of the fluid, and maintaining the output of the second heat source device of the plurality of heat source devices;
When the output of the first heat source device reaches the first output value, the output of the second heat source device is changed, and the first heat source device cancels the change in the amount of heat due to the change of the output of the second heat source device. A step of operating in a direction to
Including
The temperature control method, wherein the first heat source device has a higher temperature control resolution than the second heat source device. In claim 9,
When the output of the second heat source device reaches a second output value, the output of the third heat source device among the plurality of heat sources is changed, and the second heat source device is changed to the output of the third heat source device. Including a step of operating in a direction to cancel the change in heat quantity due to change,
The temperature control method in which the second heat source device has a higher temperature control resolution than the third heat source device. In claim 9 or 10,
In the step of operating the first heat source device in a direction to cancel the heat amount change of the fluid, the first heat source device is operated to cancel the heat amount change of the fluid due to a change in the output of the second heat source device. Temperature control method. A temperature control method for controlling the temperature of a fluid using a temperature control device including a first heat source device and a second heat source device,
Controlling the first heat source device based on the measurement result of the temperature sensor;
Controlling the second heat source device based on the information of the output of the first heat source device so that the output of the first heat source device has a given value;
Including
The temperature control method, wherein the output capability of the second heat source device is equal to or higher than the output capability of the first heat source device. In claim 12,
The first heat source device has a temperature control resolution higher than that of the second heat source device and has a temperature control range narrower than that of the second heat source device. In claim 12 or 13,
The temperature control method, wherein the given value is a median value of an output range of the first heat source device. In any one of Claims 12 thru | or 14,
In the step of controlling the second heat source device, a temperature control method that takes in a control signal for controlling the first heat source device and acquires information on an output of the first heat source device. In any one of claims 12 to 15,
In the step of controlling the first heat source device, the first heat source device is controlled by combining proportional control and differential control,
In the step of controlling the second heat source device, a temperature control method in which the second heat source device is integrated and controlled.   A charged particle beam apparatus comprising the temperature control apparatus according to claim 1. A temperature control device for controlling the temperature of a fluid,
A first heat source device for heating or cooling the fluid;
A second heat source device that heats or cools the fluid and has an output capability equal to or greater than the output capability of the first heat source device;
A temperature sensor for measuring the temperature of the fluid;
A first heat source device controller that controls the first heat source device based on the measurement result of the temperature sensor;
A second heat source device control unit that controls the second heat source device so that the output of the first heat source device becomes a first value based on the information of the output of the first heat source device;
A third heat source device controller that controls the first heat source device so that the output of the first heat source device has a second value;
A fourth heat source device control unit for controlling the second heat source device based on the measurement result of the temperature sensor;
The first heat source device is controlled by the first heat source device control unit, the second heat source device is controlled by the second heat source device control unit, and the first heat source device is controlled by the third heat source device. A switching unit that switches between the second control that is controlled by the unit and that controls the second heat source device by the fourth heat source device control unit,
Including
The switching unit determines whether or not a deviation between the temperature of the fluid measured by the temperature sensor and a command temperature is larger than a predetermined value, and when it is determined that the deviation is larger than the predetermined value. A temperature control device that switches from the first control to the second control. In claim 18,
The switching unit continuously increases a ratio of an operation amount with respect to the second heat source device by the fourth heat source device control unit with respect to a ratio of an operation amount with respect to the second heat source device by the second heat source device control unit. A temperature control device that switches from the first control to the second control. In claim 18 or 19,
The switching unit is a temperature control device that switches from the second control to the first control when the deviation is determined to be equal to or less than the predetermined value. In claim 20,
The switching unit continuously increases a ratio of an operation amount with respect to the second heat source device by the second heat source device control unit with respect to a ratio of an operation amount with respect to the second heat source device by the fourth heat source device control unit. A temperature control device that switches from the second control to the first control. A device according to any one of claims 18 to 21.
The temperature control device, wherein the first value and the second value are median values of an output range of the first heat source device. A temperature control method for controlling the temperature of a fluid using a first heat source device and a temperature control device including a second heat source device whose output capability is equal to or higher than the output capability of the first heat source device,
Determining whether the deviation between the measured temperature of the fluid and the command temperature is greater than a predetermined value;
A step of switching from the first control to the second control when it is determined that the deviation is larger than the predetermined value;
Including
In the first control, the first heat source device is controlled based on the measurement result of the temperature of the fluid, and the output of the first heat source device is set to a first value based on information on the output of the first heat source device. Controlling the second heat source device so that
In the second control, the first heat source device is controlled so that the output of the first heat source device becomes a second value, and the second heat source device is controlled based on the measurement result of the temperature of the fluid. Temperature control method. In claim 23,
In the step of switching from the first control to the second control, the ratio of the operation amount with respect to the second heat source device by the second control is continuously set with respect to the ratio of the operation amount with respect to the second heat source device by the first control. Temperature control method. In claim 23 or 24,
A temperature control method including a step of switching from the second control to the first control when the deviation is determined to be equal to or less than the predetermined value. In claim 25,
In the step of switching from the second control to the first control, the ratio of the operation amount with respect to the second heat source device by the first control is continuously set with respect to the ratio of the operation amount with respect to the second heat source device by the second control. To increase the temperature control method. In any one of claims 23 to 26,
The temperature control method, wherein the first value and the second value are median values of an output range of the first heat source device. In any one of Claims 1 thru | or 3,
A phase control type AC power regulator for regulating the power supplied to the heat source device;
The control unit converts the operation amount so that a relationship between an operation amount for the heat source device obtained based on a deviation between a temperature of the fluid and a command temperature and a heat amount generated in the heat source device is linear. And a non-linear compensator that outputs to the AC power regulator. Any one of claims 4 to 8, 18 to 22,
A phase control type AC power regulator for regulating power supplied to the first heat source device;
The first heat source device control unit has a linear relationship between an operation amount for the first heat source device obtained based on a deviation between a temperature of the fluid and a command temperature and a heat amount generated in the first heat source device. A temperature control apparatus comprising a non-linear compensator that converts the manipulated variable so as to be output to the AC power regulator.   A charged particle beam apparatus comprising the temperature control apparatus according to any one of claims 18 to 22, 28, and 29.