JP6518470B2 - Temperature control device, temperature control method, and charged particle beam device - Google Patents

Description

  The present invention relates to a temperature control device, a temperature control method, and a charged particle beam device.

  In charged particle beam apparatuses such as electron microscopes and charged particle beam drawing apparatuses, high-precision temperature control is required. For example, an electron lens used in an electron microscope or a charged particle beam drawing apparatus needs to be cooled because it is accompanied by heat generation by current flowing in a coil. At this time, the temperature fluctuation range allowed for cooling water for cooling the electron lens is extremely small. Therefore, high temperature stability is required for the cooling water in the cooling water circulating apparatus (temperature control apparatus for controlling the temperature of the cooling water) used for the electron microscope and the charged particle beam apparatus.

  For example, Patent Document 1 includes a water tank that stores circulating water (cooling water), a refrigerator that cools the circulating water, and an electric heater that heats the circulating water, and the circulating water cools the external device. The apparatus is a first operation mode in which the heater is turned off and the refrigerator is controlled to turn on / off to control the temperature of the circulating water, and the refrigerator is turned on in the first operation mode using the heater The cooling water circulation system which controls the temperature fluctuation range of circulating water appropriately is provided by providing the 2nd operation mode which temperature-controls circulating water with a narrower temperature fluctuation range.

Japanese Patent Application Publication No. 2007-40631

  As described above, the cooling water circulating apparatus (temperature control apparatus) used for the charged particle beam apparatus etc. is required to have high temperature stability with respect to the cooling water, so a temperature control apparatus excellent in temperature stability is desired. It is rare.

  The present invention has been made in view of the above problems, and one of the objects according to some aspects of the present invention is a temperature control device capable of improving the temperature stability, and a temperature control To provide a way. Another object of some aspects of the present invention is to provide a charged particle beam device including the above temperature control device.

(1) The temperature control device according to the present invention
A temperature control device for controlling the temperature of the fluid,
A plurality of heat source devices for heating or cooling the fluid;
A temperature sensor that measures the temperature of the fluid;
A control unit that controls the plurality of heat source devices such that the fluid has a command temperature ;
Including
The control unit
The first heat source device of the plurality of heat source devices is operated based on the deviation between the temperature of the fluid measured by the temperature sensor and the commanded temperature, and the second heat source device of the plurality of heat sources is and processing that holds the output,
When the output of the first heat source device reaches the upper limit value , the output of the second heat source device is increased, and the first heat source device is offset so as to offset the heat quantity change due to the change of the output of the second heat source device. Processing to reduce the output of
When the output of the first heat source device reaches the lower limit value, the output of the second heat source device is reduced, and the heat source change due to the change of the output of the second heat source device is offset to cancel out the first heat source device Processing to raise the output of the
Do,
The first heat source apparatus has higher temperature control resolution than the second heat source apparatus.

  In such a temperature control device, as described later, hunting to the fluid temperature can be prevented, and temperature control with faster response can be performed. Furthermore, since the transient response of the fluid temperature can be suppressed, for example, it is possible to suppress the deterioration of the temperature accuracy when the second heat source device having a low temperature control resolution operates. Therefore, in such a temperature control device, temperature stability can be improved.

(2) In the temperature control device according to the present invention,
The control unit
If the output of the second heat source unit has reached the upper limit, along with increasing the output of the third heat source unit of the plurality of heat sources, so as to offset the amount of heat change due to the change in the output of the third heat source device Reducing the output of the second heat source apparatus;
When the output of the second heat source device reaches the lower limit value, the second heat source device is configured to reduce the output of the third heat source device and to offset the heat quantity change due to the change of the output of the third heat source device. Processing to raise the output of the
Do,
The second heat source apparatus may have a temperature control resolution higher than that of the third heat source apparatus.

  In such a temperature control device, as described later, hunting to the fluid temperature can be prevented, and temperature control with faster response can be performed. Furthermore, since the transient response of the fluid temperature can be suppressed, it is possible to suppress, for example, the deterioration of the temperature accuracy when the third heat source apparatus having a low temperature control resolution operates. Therefore, in such a temperature control device, temperature stability can be improved.

( 3 ) The temperature control device according to the present invention is
A temperature control device for controlling the temperature of the fluid,
A first heat source device that heats or cools the fluid;
A second heat source apparatus which heats or cools the fluid and whose output capacity is equal to or higher than the output capacity of the first heat source apparatus;
A temperature sensor that measures the temperature of the fluid;
A first heat source device control unit that controls the first heat source device such that the fluid has the command temperature based on a deviation between the temperature of the fluid measured by the temperature sensor and the command temperature ;
The second heat source device is controlled such that the output of the first heat source device becomes the median value based on the deviation between the output of the first heat source device and the central value of the output range of the first heat source device 2 heat source device control unit,
Only including,
The temperature control resolution of the first heat source device is higher than that of the second heat source device, and the temperature control range is narrower than that of the second heat source device .

  In such a temperature control device, the second heat source device control unit controls the second heat source device so that the output of the first heat source device becomes a given value, so that, for example, even if the command temperature changes, the first heat source The output of the device can be kept at a given value, and the influence of the temperature dependence of the electrical resistance of the first heat source device can be suppressed.

( 4 ) In the temperature control device according to the present invention,
The second heat source device control unit may take in a control signal for controlling the first heat source device output from the first heat source device control unit, and may acquire information of an output of the first heat source device. .

( 5 ) In the temperature control device according to the present invention,
The first heat source device control unit controls the first heat source device by combining proportional control and differential control,
The second heat source device control unit may perform integral control of the second heat source device.

  In such a temperature control device, when the output of the first heat source device is controlled to a given value by the integral control of the second heat source device control unit, the deviation between the command temperature and the fluid temperature is also made zero. Can.

( 6 ) The temperature control method according to the present invention is
A temperature control method for controlling the temperature of a fluid using a temperature control device provided with a plurality of heat source devices, comprising:
The first heat source device of the plurality of heat source devices is operated so that the fluid has the command temperature based on the deviation between the measured temperature of the fluid and the command temperature, and the heat source device is operated among the plurality of heat sources Holding the output of the second heat source apparatus of
When the output of the first heat source device reaches the upper limit value , the output of the second heat source device is increased, and the first heat source device is offset so as to offset the heat quantity change due to the change of the output of the second heat source device. Reducing the output of the
When the output of the first heat source device reaches the lower limit value, the output of the second heat source device is reduced, and the heat source change due to the change of the output of the second heat source device is offset to cancel out the first heat source device Increasing the output of the
Including
The first heat source apparatus has higher temperature control resolution than the second heat source apparatus.

  In such a temperature control method, as described later, hunting to the fluid temperature can be prevented, and temperature control with faster response can be performed. Furthermore, since the transient response of the fluid temperature can be suppressed, for example, it is possible to suppress the deterioration of the temperature accuracy when the second heat source device having a low temperature control resolution operates. Therefore, such temperature control method can improve the temperature stability.

( 7 ) In the temperature control method according to the present invention,
If the output of the second heat source unit has reached the upper limit, along with increasing the output of the third heat source unit of the plurality of heat sources, so as to offset the amount of heat change due to the change in the output of the third heat source device Reducing the output of the second heat source apparatus,
When the output of the second heat source device reaches the lower limit value, the second heat source device is configured to reduce the output of the third heat source device and to offset the heat quantity change due to the change of the output of the third heat source device. Increasing the output of the
Including
The second heat source apparatus may have a temperature control resolution higher than that of the third heat source apparatus.

In such a temperature control method, as described later, hunting to the fluid temperature can be prevented, and temperature control with faster response can be performed. Furthermore, since the transient response of the fluid temperature can be suppressed, it is possible to suppress, for example, the deterioration of the temperature accuracy when the third heat source apparatus having a low temperature control resolution operates. Therefore, such temperature control method can improve the temperature stability.

( 8 ) The temperature control method according to the present invention is
A temperature control method for controlling the temperature of a fluid using a temperature control device comprising a first heat source device and a second heat source device, the temperature control method comprising:
Controlling the first heat source device such that the fluid has the commanded temperature based on a deviation between the measured temperature of the fluid and the commanded temperature ;
Controlling the second heat source device such that the output of the first heat source device becomes the median value based on the deviation between the output of the first heat source device and the central value of the output range of the first heat source device And, and
The output capacity of the second heat source device state, and are output capability than the first heat source unit,
The temperature control resolution of the first heat source device is higher than that of the second heat source device, and the temperature control range is narrower than that of the second heat source device .

  Such a temperature control method controls the second heat source device so that the output of the first heat source device has a given value, so that the output of the first heat source device is given even if, for example, the command temperature changes. The value can be maintained, and the influence of the temperature dependency of the electrical resistance of the first heat source device can be suppressed.

( 9 ) In the temperature control method according to the present invention,
In the step of controlling the second heat source apparatus, a control signal for controlling the first heat source apparatus may be taken in to obtain information of an output of the first heat source apparatus.

( 10 ) In the temperature control method according to the present invention,
In the step of controlling the first heat source device, the first heat source device is controlled by combining proportional control and differential control,
In the step of controlling the second heat source device, the second heat source device may be integrated.

  In such a temperature control method, when the output of the first heat source device is controlled to a given value by the integral control of the second heat source device control unit, the deviation between the command temperature and the fluid temperature may also be zero. it can.

( 11 ) The charged particle beam device according to the present invention is
It includes a temperature control device according to the present invention.

  Such a charged particle beam device can include a temperature control device capable of improving the temperature stability.

( 12 ) The temperature control device according to the present invention is
A temperature control device for controlling the temperature of the fluid,
A first heat source device that heats or cools the fluid;
A second heat source apparatus which heats or cools the fluid and whose output capacity is equal to or higher than the output capacity of the first heat source apparatus;
A temperature sensor that measures the temperature of the fluid;
A first heat source device control unit that controls the first heat source device such that the fluid has the command temperature based on a deviation between the temperature of the fluid measured by the temperature sensor and the command temperature ;
The second heat source device is controlled such that the output of the first heat source device becomes the median value based on the deviation between the output of the first heat source device and the central value of the output range of the first heat source device 2 heat source device control unit,
A third heat source control unit that controls the first heat source device such that an output of the first heat source device becomes the median value ;
A fourth heat source device control unit configured to control the second heat source device so that the fluid has the command temperature based on a deviation between the temperature of the fluid measured by the temperature sensor and the command temperature ;
The first heat source device is controlled by the first heat source device control unit, and the second heat source device is controlled by the second heat source device control unit. The first heat source device is controlled by the third heat source device control A second control unit that controls the second heat source device with the fourth heat source device control unit;
Including
The switching unit determines whether a deviation between the temperature of the fluid measured by the temperature sensor and the command temperature is larger than a predetermined value, and the deviation between the temperature of the fluid and the command temperature is the predetermined Switching from the first control to the second control when it is determined that the value is larger than the value;
The temperature control resolution of the first heat source device is higher than that of the second heat source device, and the temperature control range is narrower than that of the second heat source device .

  In such a temperature control device, the switching unit determines whether the deviation between the temperature of the fluid measured by the temperature sensor and the command temperature is larger than a predetermined value, and the deviation is determined to be larger than the predetermined value. If it is, the first control is switched to the second control. That is, in such a temperature control device, when it is determined that the deviation between the temperature of the fluid and the command temperature is larger than a predetermined value, the temperature control resolution of mainly performing the temperature control of the fluid in the first heat source device From the high state (first control), the second heat source device can be switched to a state (second control) capable of high-speed response that mainly controls the temperature of the fluid. Therefore, in such a temperature control device, both high precision control and high speed response control can be achieved.

( 13 ) In the temperature control device according to the present invention,
The switching unit continuously increases the ratio of the operation amount of the fourth heat source device control unit to the second heat source device with respect to the ratio of the operation amount of the second heat source device control unit to the second heat source device. The first control may be switched to the second control.

In such a temperature control device, when switching from the first control to the second control, it is possible to suppress a rapid change in the operation amount of the second heat source device, and to suppress a transient response of temperature. .

( 14 ) In the temperature control device according to the present invention,
The switching unit may switch from the second control to the first control when it is determined that the deviation between the temperature of the fluid and the command temperature is equal to or less than the predetermined value.

  In such a temperature control device, when it is determined that the deviation between the temperature of the fluid and the command temperature is equal to or less than a predetermined value, the second heat source device can perform high-speed response mainly to control the temperature of the fluid (No. From the 2) control), it is possible to switch the first heat source device to a state of high temperature control resolution (first control) in which temperature control of the fluid is mainly performed. Therefore, in such a temperature control device, both high precision control and high speed response control can be achieved.

( 15 ) In the temperature control device according to the present invention,
The switching unit continuously increases the ratio of the operation amount of the second heat source device control unit to the second heat source device with respect to the ratio of the operation amount of the second heat source device control unit to the second heat source device. The second control may be switched to the first control.

  In such a temperature control device, when switching from the second control to the first control, it is possible to suppress a rapid change in the operation amount of the second heat source device, and it is possible to suppress a transient response of temperature. .

( 16 ) The temperature control method according to the present invention is
A temperature control method for controlling the temperature of a fluid using a temperature control device comprising a first heat source device and a second heat source device having an output capacity equal to or higher than the output capacity of the first heat source device,
Determining whether the deviation between the measured temperature of the fluid and the commanded temperature is greater than a predetermined value;
Switching from the first control to the second control when it is determined that the deviation between the measured temperature of the fluid and the commanded temperature is greater than the predetermined value;
Including
In the first control,
The first heat source device is controlled based on the difference between the measured temperature of the fluid and the commanded temperature so that the fluid has the commanded temperature .
The second heat source device is controlled such that the output of the first heat source device becomes the median value based on the deviation between the output of the first heat source device and the central value of the output range of the first heat source device,
In the second control,
Controlling the first heat source device so that the output of the first heat source device becomes the median value ,
The second heat source device is controlled based on the deviation between the measured temperature of the fluid and the commanded temperature so that the fluid has the commanded temperature .

In such a temperature control method, a step of determining whether the deviation between the measured temperature of the fluid and the command temperature is larger than a predetermined value, and when it is determined that the deviation is larger than the predetermined value, Switching from the first control to the second control. That is, when it is determined that the deviation between the fluid temperature and the command temperature is larger than the predetermined value, the first heat source device mainly performs temperature control of the fluid from a state of high temperature control resolution (first control) The second heat source device can be switched to a state (second control) in which high-speed response can be performed mainly to control the temperature of the fluid. Therefore, in such a temperature control method, both high precision control and high speed response control can be achieved.

( 17 ) In the temperature control method according to the present invention,
In the step of switching from the first control to the second control, the ratio of the operation amount to the second heat source device by the second control is continuous to the ratio of the operation amount to the second heat source device by the first control. May be increased.

  In such a temperature control method, when switching from the first control to the second control, it is possible to suppress a rapid change in the operation amount of the second heat source device, and to suppress a transient response of temperature. .

( 18 ) In the temperature control method according to the present invention,
The method may include the step of switching from the second control to the first control when it is determined that the deviation between the measured temperature of the fluid and the command temperature is equal to or less than the predetermined value.

  In such a temperature control method, when the deviation between the temperature of the fluid and the command temperature is determined to be equal to or less than a predetermined value, the second heat source apparatus can perform high-speed response mainly to control the temperature of the fluid (No. From the 2) control), it is possible to switch the first heat source device to a state of high temperature control resolution (first control) in which temperature control of the fluid is mainly performed. Therefore, in such a temperature control method, both high precision control and high speed response control can be achieved.

( 19 ) In the temperature control method according to the present invention,
In the step of switching from the second control to the first control, the ratio of the operation amount to the second heat source device by the first control is continuous with the ratio of the operation amount to the second heat source device by the second control. May be increased.

  In such a temperature control method, when switching from the second control to the first control, it is possible to suppress a rapid change in the operation amount of the second heat source device, and to suppress a transient response of temperature. .

( 20 ) In the temperature control device according to the present invention,
The power supply apparatus further includes a phase control type AC power regulator for adjusting power supplied to the heat source apparatus,
The control unit performs the operation amount so that the relationship between the operation amount for the heat source device and the heat amount generated by the heat source device determined based on the deviation between the temperature of the fluid and the commanded temperature is linear. You may have a non-linear compensator which converts and outputs to said alternating current power regulator.

  In such a temperature control device, controllability can be enhanced, for example, as compared to the case without a non-linear compensator.

( 21 ) In the temperature control device according to the present invention,
The system further includes a phase control type AC power regulator for adjusting power supplied to the first heat source device,
The control unit is configured such that a relationship between an operation amount for the first heat source device and a heat amount generated by the first heat source device determined based on a deviation between a temperature of the fluid and a command temperature is linear. You may have a non-linear compensator which converts the amount of operation and outputs it to the said AC power regulator.

  In such a temperature control device, controllability can be enhanced, for example, as compared to the case without a non-linear compensator.

( 22 ) The charged particle beam device according to the present invention is
It includes a temperature control device according to the present invention.

  Such a charged particle beam device can include a temperature control device capable of improving the temperature stability.

BRIEF DESCRIPTION OF THE DRAWINGS The figure which shows typically the structure of the charged particle beam apparatus containing the temperature control apparatus which concerns on 1st Embodiment. Operation | movement image figure of the heater in a 1st process, a hot gas valve, and a cool gas valve. Operation | movement image figure of the heater in the 2nd process, a hot gas valve, and a cool gas valve. Operation | movement image figure of the heater in the 3rd process, a hot gas valve, and a cool gas valve. 3 is a flowchart showing an example of a temperature control method using the temperature control device according to the first embodiment. The figure which shows typically the structure of the temperature control apparatus which concerns on 2nd Embodiment. The flowchart which shows an example of the temperature control method using the temperature control apparatus which concerns on 2nd Embodiment. The figure which shows an example of the temperature control waveform by a 1st heater, and the temperature control waveform by a 2nd heater. The figure which shows typically the structure of the temperature control apparatus which concerns on 3rd Embodiment. The figure for demonstrating the state of the 1st control of the temperature control apparatus which concerns on 3rd Embodiment. The figure for demonstrating the state of 2nd control of the temperature control apparatus which concerns on 3rd Embodiment. The figure for demonstrating the operation | movement of a switch. The flowchart which shows an example of the temperature control method using the temperature control apparatus which concerns on 3rd Embodiment. The figure which shows typically the structure of the charged particle beam apparatus containing the temperature control apparatus which concerns on 4th Embodiment. The figure which shows an example of the output waveform of the alternating current power regulator of a phase control system. The graph which shows the relationship between the operation amount MV and the calorific value Q of a heater.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. Note that the embodiments described below do not unduly limit the contents of the present invention described in the claims. Further, not all of the configurations described below are necessarily essential configuration requirements of the present invention.

1. First Embodiment 1.1. Configuration of Temperature Control Device First, the configuration of the temperature control device according to the first embodiment will be described with reference to the drawings. FIG. 1 is a view schematically showing a configuration of a charged particle beam device 1000 including a temperature control device 100 according to the first embodiment. In FIG. 1, the arrows shown in the flow paths 2a, 2b, 42, 48 indicate the directions of flow of the fluid flowing in the flow paths 2a, 2b, 42, 48.

  The temperature control device 100 is a device for controlling the temperature of the fluid. The temperature control device 100 controls the temperature of the circulating water. The temperature control device 100 is incorporated in the charged particle beam device 1000. The charged particle beam device 1000 is, for example, an electron microscope. The said electron microscope is a transmission electron microscope (TEM), a scanning transmission electron microscope (STEM), a scanning electron microscope (SEM) etc., for example. The temperature control device 100 controls the temperature of the circulating water and supplies it to the object to be cooled 1010. The cooling target 1010 is, for example, an electron lens of an electron microscope, a power supply of the electron lens, an oil diffusion pump, or the like. The charged particle beam device 1000 has one cooling target 1010 in the illustrated example, but the number of cooling targets 1010 may be more than one.

  As shown in FIG. 1, the temperature control device 100 includes a water flow passage 2a, a return water flow passage 2b, a pump 4, a first heat exchanger 6a, a second heat exchanger 6b, and a temperature sensor 8. A refrigerant circulator 40 including a first heat source apparatus (heater) 10, a second heat source apparatus (hot gas valve) 20 and a third heat source apparatus (cool gas valve, electronic expansion valve) 30, and a control unit (controller) 50 Including.

  The water supply flow path 2 a is a flow path for sending the circulating water to the cooling target 1010. Circulating water whose temperature has been adjusted by the first heat exchanger 6a and the second heat exchanger 6b flows through the water flow path 2a. The water supply flow path 2 a is connected to a flow path 1002 for circulating circulating water to the object to be cooled 1010. The circulating water supplied from the water supply flow path 2 a to the object to be cooled 1010 through the flow path 1002 returns to the temperature control device 100.

  The return water flow path 2b is a flow path for guiding the circulating water supplied to the object to be cooled 1010 and returned to the temperature control device 100 to the heat exchangers 6a and 6b. The return water flow path 2 b guides the circulating water flowing through the object to be cooled 1010 to the heat exchangers 6 a and 6 b via the pump 4.

  In the charged particle beam device 1000, the water flow path 2a, the flow path 1002, and the return water flow path 2b form a circulation flow path for circulating the circulating water. The circulation flow path is a flow path for circulating the circulating water between the temperature control device 100 and the object to be cooled 1010.

  The pump 4 is a water pump for sending circulating water. In the charged particle beam device 1000, circulating water can be circulated by the pump 4 in the circulation flow path including the water flow path 2a, the flow path 1002, and the return water flow path 2b.

  The first heat exchanger 6 a cools the circulating water by heat exchange between the refrigerant gas cooled by the refrigerant circulator 40 and the circulating water. In the first heat exchanger 6a, the refrigerant flow path 42 of the refrigerant circulator 40 and the return water flow path 2b pass, and between the refrigerant gas passing through the refrigerant flow path 42 and the circulating water passing through the return water flow path 2b Heat exchange takes place. The circulating water cooled by the first heat exchanger 6a is sent to the second heat exchanger 6b.

  The second heat exchanger 6b heats the circulating water by heat exchange between the heater 10 and the circulating water cooled by the first heat exchanger 6a. A heater 10 is incorporated in the second heat exchanger 6b, and heat exchange is performed between the heater 10 and circulating water passing through the return water flow path 2b. The circulating water heated and temperature-regulated by the second heat exchanger 6 b is sent to the object to be cooled 1010.

  As described above, in the temperature control device 100, temperature control of circulating water is performed by the two heat exchangers 6a and 6b.

  The temperature sensor 8 is provided in the water supply flow path 2a. The temperature sensor 8 measures the temperature of circulating water which is temperature-controlled by the heat exchangers 6a and 6b and sent to the object to be cooled. The temperature sensor 8 is, for example, a sensor that utilizes the fact that the electrical resistance value of metal fluctuates due to a temperature change. The temperature sensor 8 sends information on the measured circulating water temperature to the controller 50.

  The heater 10 is, for example, a heating element that generates Joule heat by supplying an electric current. The heater 10 is made of, for example, a nichrome wire or the like. In the second heat exchanger 6b, heat exchange is performed between the heat generated by the heater 10 and the circulating water to heat the circulating water. The calorific value of the heater 10 is controlled by controlling the heater power supply 12 by the controller 50.

  The refrigerant circulator 40 is a circulation type cooling device, and cools the liquefied refrigerant by vaporizing and expanding it. In the first heat exchanger 6a, heat exchange is performed between the refrigerant gas cooled by the refrigerant circulator 40 and the circulating water, whereby the circulating water is cooled. The refrigerant circulator 40 is configured to include a refrigerant flow path 42, a compressor 44, a condenser 46, a hot gas valve 20, and a cool gas valve 30.

  The compressor 44 compresses the refrigerant gas whose temperature has risen by heat exchange with the circulating water in the first heat exchanger 6a, and raises the temperature of the refrigerant gas (adiabatic compression). At least a portion of the refrigerant gas compressed to a high temperature by the compressor 44 is sent to the condenser 46.

  The condenser 46 cools and liquefies the refrigerant gas that has become hot in the compressor 44. The condenser 46 cools and liquefies the refrigerant gas by heat exchange with the cooling water flowing through the cooling water supply flow path 48. The cooling water flowing through the cooling water supply flow path 48 is supplied from the outside of the temperature control device 100, for example. The refrigerant liquefied in the condenser 46 is sent to the cool gas valve 30.

  The cool gas valve (electronic expansion valve) 30 decompresses the liquefied refrigerant to a low temperature gas (adiabatic expansion). As the cool gas valve 30 is opened, the amount of low temperature refrigerant gas supplied increases. The opening degree of the cool gas valve 30 is controlled by the controller 50. The refrigerant gas that has become a low temperature gas by the cool gas valve 30 is compressed by the compressor 44 via the hot gas valve 20 and mixed with the refrigerant gas that has become high temperature.

  The hot gas valve 20 is a valve for adjusting the mixing ratio of a part of the refrigerant gas compressed to a high temperature by the compressor 44 and the refrigerant gas converted to a low temperature gas by the cool gas valve 30. As the hot gas valve 20 is opened, the amount of high temperature refrigerant gas supplied increases. The hot gas valve 20 is controlled by a controller 50. The mixed refrigerant gas is sent to the first heat exchanger 6a.

  Here, the heater 10 has higher temperature control resolution (resolution for temperature control of fluid) than the hot gas valve 20. Also, the hot gas valve 20 has higher temperature control resolution than the cool gas valve 30. Here, the temperature control resolution can be reworded as the minimum control amount with respect to the heat quantity change. That is, the temperature control of the heater 10 can be performed with higher accuracy than the hot gas valve 20, and the temperature control of the hot gas valve 20 can be performed with higher accuracy than the cool gas valve 30. For example, the temperature change of the circulating water when changing the hot gas valve 20 by the minimum variable unit of opening is smaller than the temperature change of the circulating water when changing the cool gas valve 30 by the minimum variable unit of opening.

The controller 50 controls the heater 10, the hot gas valve 20, and the cool gas valve 30. An example of control of the controller 50 will be described later. The controller 50 may be configured to be realized by a dedicated circuit to perform control described later. Further, in the controller 50, a central processing unit (CPU) is a read only memory (ROM) or a random access memory (RAM).
The computer may function as a computer by executing a control program stored in a storage device such as a memory, and may be configured to perform control described later.

1.2. Operation of Temperature Control Device Next, the operation of the temperature control device 100 will be described.

  The temperature control device 100 sends circulating water whose temperature is controlled to the object to be cooled 1010 by the pump 4 to control the temperature of the object to be cooled 1010. Heat exchange of circulating water is performed in the first heat exchanger 6a and the second heat exchanger 6b.

  The relatively low temperature refrigerant gas flowing through the refrigerant flow path 42 in the first heat exchanger 6a is heated by heat exchange with the circulating water in the first heat exchanger 6a, and then compressed by the compressor 44 It becomes a hotter gas. The high temperature gas is cooled and liquefied by heat exchange with the externally supplied cooling water flowing through the cooling water supply flow path 48 in the condenser 46. The liquefied refrigerant is depressurized by the cool gas valve 30 to be a low temperature gas. As the cool gas valve 30 is opened, the supply amount of the low temperature refrigerant gas increases.

  On the other hand, a part of the refrigerant gas compressed by the compressor 44 and brought to a high temperature is mixed with the refrigerant gas brought to a low temperature by the cool gas valve 30 via the hot gas valve 20. As the hot gas valve 20 is opened, the amount of high temperature refrigerant gas supplied increases. By controlling the opening degree of the cool gas valve 30 and the opening degree of the hot gas valve 20, it is possible to adjust the temperature and the flow rate of the refrigerant gas flowing through the first heat exchanger 6a.

  A heater 10 is built in the second heat exchanger 6b at the rear stage of the first heat exchanger 6a, and heat exchange is performed between the circulating water flowing through the return water flow path 2b and the heater 10. The controller 50 performs feedback control of the output of the heater power supply 12 based on the deviation between the temperature of circulating water measured by the temperature sensor 8 and the commanded temperature. At this time, if the amount of heat generated by the heater 10 is insufficient to compensate for the temperature deviation, control of heat exchange of circulating water in the first heat exchanger 6a is performed. The heat exchange in the first heat exchanger 6 a is performed by the controller 50 adjusting the opening of the cool gas valve 30 and the opening of the hot gas valve 20. The control method of the heater 10, the hot gas valve 20, and the cool gas valve 30 of the controller 50 will be described in "1.3. Example of controller control" below.

1.3. Control Example of Controller Next, a control example of the controller 50 will be described.

(1) First Process The controller 50 operates the heater 10 based on the measurement result of the temperature sensor 8 and performs a process (first process) of holding the outputs of the hot gas valve 20 and the cool gas valve 30.

The controller 50 performs feedback control of the output of the heater power supply 12 based on the deviation between the temperature of circulating water measured by the temperature sensor 8 and the commanded temperature (set temperature, target value of temperature of circulating water). For example, a PID compensator is used as the compensator. At this time, the controller 50 holds the output of the hot gas valve 20 and the output of the cool gas valve 30.
The information of the command temperature is stored, for example, in a storage device (not shown), and the controller 50 reads the information of the command temperature stored in the storage device to obtain a deviation from the temperature of the circulating water.

  FIG. 2 is an operation image diagram of the heater 10, the hot gas valve 20, and the cool gas valve 30 for describing an example of the first process of the controller 50. FIG. 2 shows the case where the commanded temperature of the circulating water is raised and the change in the commanded temperature of the circulating water is relatively small (in the temperature control range of the heater 10).

As shown in FIG. 2, in the initial state, the temperature of the circulating water is the commanded temperature (the output of the heater 10 is 50%, the opening degree of the hot gas valve 20 is 50%, and the opening degree of the cool gas valve 30 is 50%). It is stable at the initial value). When the command temperature is changed to a temperature higher than the initial value, the controller 50 performs PID control (Proportional-Integral-Derivative) based on the deviation between the temperature of circulating water measured by the temperature sensor 8 and the command temperature.
Controller) Increases the output of the heater 10. At this time, the controller 50 holds the opening degree of the hot gas valve 20 and the opening degree of the cool gas valve 30 at 50%. Thereby, the temperature of circulating water can rise and the temperature of circulating water can be stabilized at command temperature.

(2) Second Process The controller 50 changes the output (opening degree) of the hot gas valve 20 and hots the heater 10 when the output of the heater 10 reaches a given output value (first output value). A process (second process) of operating in a direction to offset a change in heat quantity due to a change in the output of the gas valve 20 is performed.

  Here, to operate in the direction of offsetting the heat quantity change due to the change of the output of the hot gas valve 20, specifically, when the temperature of the circulating water is lowered by changing the opening degree of the hot gas valve 20, the heater 10 Operating the circulating water to raise its temperature. Further, for example, when the temperature of the circulating water is increased by changing the opening degree of the hot gas valve 20, the heater 10 is operated to lower the temperature of the circulating water.

  The controller 50 performs the second process, for example, when the output of the heater 10 reaches 100% (upper limit) or 0% (lower limit). In the second process, the output (opening degree) of the cool gas valve 30 is maintained. The controller 50 obtains information on the output of the heater 10 from, for example, a control signal for controlling the heater 10.

  Specifically, when the output of the heater 10 reaches 100%, the controller 50 performs processing of opening the hot gas valve 20 by a constant amount at predetermined time intervals set in advance. The controller 50 reduces the output of the heater 10 so as to offset the amount of heat increase of the circulating water by opening the hot gas valve 20 by a fixed amount when the hot gas valve 20 is opened by a fixed amount. The controller 50 offsets the heat amount by, for example, reducing the integral manipulated variable among the manipulated variables of the PID.

  On the other hand, when the output of the heater 10 reaches 0%, the controller 50 performs processing for closing the hot gas valve 20 by a constant amount at predetermined time intervals set in advance. The controller 50 increases the output of the heater 10 so as to offset the amount of heat reduction of the circulating water by closing the hot gas valve 20 by a fixed amount when closing the hot gas valve 20 by a fixed amount. The controller 50 offsets the heat amount by, for example, increasing the integral manipulated variable among the manipulated variables of the PID.

  The first output value is not limited to 100% or 0%. For example, the controller 50 may perform the second process when the output of the heater 10 reaches 80% (upper limit) or 20% (lower limit).

  Here, since the opening degree of the hot gas valve 20 and the amount of heat given to the circulating water are not linear, the relationship between the value of the absolute opening degree of the hot gas valve 20 and the change in the amount of heat when opening and closing by the unit opening degree is investigated. Then, the table and the like are recorded in advance in a storage device (not shown) and the like. The controller 50 performs the second process described above with reference to the table recorded in the storage device.

  In the example described above, the controller 50 operates the heater 10 so as to offset the change in the amount of heat due to the change in the output of the hot gas valve 20 in the second process, but the operating condition of the hot gas valve 20 is eliminated If the heater 10 is operated in such a direction as to offset the change in the amount of heat due to the change in the output of the hot gas valve 20 for the purpose, the offset amount is not particularly limited.

  That is, the offset amount of the heat amount change by the heater 10 may not be the amount that completely offsets the heat amount change due to the change of the output of the hot gas valve 20, and the offset amount is not particularly limited. For example, the amount of change in the amount of heat by the heater 10 may be twice or less the amount of change in the amount of heat by the hot gas valve 20 by changing the sign. Even in such a case, transient temperature fluctuations can be suppressed.

  FIG. 3 is an operation image diagram of the heater 10, the hot gas valve 20, and the cool gas valve 30 for describing an example of the second process of the controller 50. Note that FIG. 3 shows the case where the commanded temperature of circulating water is raised, and the change of the commanded temperature of circulating water is larger than that in the example of FIG. 2 (case in the temperature control range of hot gas valve 20). It represents.

  When the commanded temperature is changed to a temperature higher than the initial value, the controller 50 operates the heater 10 based on the measurement result of the temperature sensor 8 and holds the outputs of the hot gas valve 20 and the cool gas valve 30 first Do the processing. Thereby, as shown in FIG. 3, the output of the heater 10 increases and the temperature of circulating water rises.

  Then, when the output of the heater 10 reaches 100%, the controller 50 opens the hot gas valve 20 by a fixed amount, and also cancels the heat amount of the temperature rise of the circulating water by opening the hot gas valve 20 by a fixed amount. Perform a second process to reduce the output of Since the output of the heater 10 is reduced by the second process, the controller 50 performs the first process again. At this time, the controller 50 holds the open degree of the hot gas valve 20 and the cool gas valve 30 so that the hot gas valve 20 is held in an open state by a predetermined amount. By the above operation, the temperature of the circulating water rises, and the temperature of the circulating water can be stabilized at the commanded temperature.

(3) Third Process The controller 50 changes the output (opening degree) of the cool gas valve 30 when the output of the hot gas valve 20 reaches a given output value (second output value, second opening degree) At the same time, a process (third process) is performed to operate the hot gas valve 20 in the direction to offset the change in the amount of heat due to the change in the degree of opening of the cool gas valve 30.

The second output value is not limited to 100% or 0%. For example, the controller 50 may perform the third process when the output of the hot gas valve 20 reaches 80% (upper limit) or 20% (lower limit). The controller 50 acquires, for example, information on the degree of opening of the hot gas valve 20 from a control signal for controlling the hot gas valve 20.

  Specifically, when the opening degree of the hot gas valve 20 reaches 100%, the controller 50 performs a process of closing the cool gas valve 30 by a constant amount at predetermined time intervals set in advance. The controller 50 reduces the opening degree of the hot gas valve 20 so as to offset the heat amount of the temperature rise of the circulating water by closing the cool gas valve 30 when closing the cool gas valve 30 by a fixed amount.

  On the other hand, when the opening degree of the hot gas valve 20 becomes 0%, the controller 50 performs processing of opening the cool gas valve 30 by a constant amount at predetermined time intervals set in advance. When the cool gas valve 30 is opened by a predetermined amount, the controller 50 increases the opening degree of the hot gas valve so as to offset the heat amount of the temperature decrease of the circulating water by opening the cool gas valve 30 by a predetermined amount.

  Here, since the opening degree of the cool gas valve 30 and the amount of heat given to the circulating water are not linear, the relationship between the value of the absolute opening degree of the cool gas valve 30 and the change in the amount of heat when opened and closed by the unit opening degree is investigated. Then, the table and the like are recorded in advance in a storage device (not shown) and the like. The controller 50 performs the third process described above with reference to the table recorded in the storage device.

  In the example described above, the case where the controller 50 operates the hot gas valve 20 so as to offset the change in heat amount due to the change in the output of the cool gas valve 30 in the third process has been described. If the hot gas valve 20 is operated in the direction to offset the change in heat amount due to the change in the output of the cool gas valve 30 for the purpose of eliminating the problem, the offset amount is not particularly limited.

  That is, the offset amount of the heat amount change by the hot gas valve 20 may not be the amount that completely offsets the heat amount change due to the change of the output of the cool gas valve 30, and the offset amount is not particularly limited. For example, the amount of change in the amount of heat generated by the hot gas valve 20 may be twice or less of the amount of change in the amount of heat generated by the cool gas valve 30 while changing the sign. Even in such a case, transient temperature fluctuations can be suppressed.

  FIG. 4 is an operation image diagram of the heater 10, the hot gas valve 20, and the cool gas valve 30 for explaining an example of the third process of the controller 50. FIG. 4 shows the case where the commanded temperature of circulating water is increased, and the change of the commanded temperature of circulating water is larger than in the examples of FIG. 2 and FIG. 3 (within the temperature control range of cool gas valve 30). Case).

  When the commanded temperature is changed to a temperature higher than the initial value, the controller 50 performs the first process. Thereby, the output of the heater 10 is increased. Then, when the output of the heater 10 reaches 100%, the controller 50 performs the second process. By the second process, the output of the heater 10 is reduced, and the controller 50 performs the first process again.

  Here, when the change of the temperature control value of the circulating water is large, as shown in FIG. 4, in the controller 50, the first process and the second process are repeated.

By repeating the first process and the second process, when the opening degree of the hot gas valve 20 gradually increases and reaches 100%, the controller 50 sets the cool gas valve 30 at a predetermined time interval set in advance. In the third process, the opening degree of the hot gas valve 20 is decreased so as to offset the heat amount of the temperature rise of the circulating water by closing the cool gas valve 30 by a predetermined amount. Thereby, the opening degree of the hot gas valve 20 is reduced, and the controller 50 performs the first process again. By the above operation, the temperature of the circulating water rises, and the temperature of the circulating water can be stabilized at the commanded temperature.

1.4. Temperature Control Method FIG. 5 is a flowchart showing an example of a temperature control method using the temperature control device 100 according to the first embodiment.

  First, the controller 50 operates the heater 10 based on the measurement result of the temperature sensor 8 and performs a first process of holding the outputs of the hot gas valve 20 and the cool gas valve 30 (step S10). Then, when the output of the heater 10 has not reached the upper and lower limit value (first output value) (in the case of NO at step S12), the controller 50 returns to step S10 and continues the first process.

  The controller 50 changes the opening degree of the hot gas valve 20 when the output of the heater 10 reaches the upper and lower limit values (in the case of YES in step S12), and changes the heat quantity due to the change of the opening degree of the hot gas valve 20 In the direction to cancel out (step S14). Then, when the opening degree of the hot gas valve 20 does not reach the upper and lower limit value (second output value) (in the case of NO at step S16), the controller 50 returns to step S10 and performs steps S10, S12, and S14. , The process of step S16.

  The controller 50 changes the opening degree of the cool gas valve 30 while changing the opening degree of the cool gas valve 30 when the hot gas valve 20 has upper and lower limit values (in the case of YES in step S16) (Step S18). Then, the controller 50 returns to step S10, and stabilizes the temperature of the circulating water at the command temperature by repeating the processing of step S10 to step S18.

  The temperature control device 100 has, for example, the following features.

  In the temperature control device 100, the controller 50 operates the heater 10 based on the measurement result of the temperature sensor 8 and performs the first process for holding the output of the hot gas valve 20, and the output of the heater 10 reaches the first output value. In this case, a second process is performed in which the output of the hot gas valve 20 is changed and the heater 10 is operated in the direction to offset the change in the amount of heat due to the change in the output of the hot gas valve 20. This makes it possible to prevent hunting against the temperature of the circulating water and to perform temperature control with faster response. Furthermore, since the transient response of the water temperature can be suppressed, it is possible to suppress the deterioration of the temperature accuracy, for example, when the hot gas valve 20 having a low temperature control resolution operates. Thus, the temperature control device 100 can improve the temperature stability.

  In the temperature control device 100, the controller 50 changes the output of the cool gas valve 30 and changes the output of the cool gas valve 30 when the opening of the hot gas valve 20 reaches the second output value. A third process is performed to operate in the direction to offset the change in the amount of heat due to This makes it possible to prevent hunting against the temperature of the circulating water and to perform temperature control with faster response. Furthermore, since the transient response of the water temperature can be suppressed, it is possible to suppress the deterioration of the temperature accuracy, for example, when the cool gas valve 30 having a low temperature control resolution operates. Thus, the temperature control device 100 can improve the temperature stability.

Further, in the temperature control device 100, in the second process, the heater 10 is connected to the hot gas valve 2
It operates so as to offset the change in the amount of heat due to the change in output of zero. Therefore, the transient response of the water temperature can be further suppressed, and the deterioration of the temperature accuracy when the hot gas valve 20 having a low temperature control resolution operates can be further suppressed.

  Similarly, in the third process, in the temperature control device 100, the hot gas valve 20 is operated to offset the change in the amount of heat due to the change in the output of the cool gas valve 30. Therefore, the transient response of the water temperature can be suppressed, and the deterioration of the temperature accuracy when the cool gas valve 30 having a low temperature control resolution operates can be suppressed.

  Hereinafter, the effects described above will be described in more detail.

  For example, the opening degree of the hot gas valve changes when the heater output is saturated, and the opening degree of the cool gas valve when the opening degree of the hot gas valve reaches the upper and lower limits, without performing the process of offsetting the heat amount described above. Let's consider the case of performing interlocking operation (hereinafter also referred to as “reference example”) to change In the reference example, the configuration of the device is the same as that of the temperature control device 100 except that the controller performs the above processing.

  Here, it is assumed that the commanded temperature is changed to a relatively large and high value from the state where the temperature of the circulating water is stabilized. At this time, the heat quantity of the heater is saturated to 100% due to the temperature deviation. This saturation state is the operating condition of the hot gas valve, and the hot gas valve is gradually opened by a fixed amount per fixed time. Then, when the open degree of the hot gas reaches the upper limit, the cool gas valve is gradually closed by a fixed amount per fixed amount for a fixed time under the operation condition.

  The effect on the change in circulating water temperature is that the opening of the hot gas valve is larger than the opening of the hot gas valve than the heater, and the opening of the cool gas valve is larger than the opening of the hot gas valve. To rise. As a result, when the circulating water temperature exceeds the command value, a temperature deviation largely occurs on the opposite side, and the heater changes from the 100% saturation state to the 0% saturation state. Only when the heater reaches 0%, the hot gas valve operates in the opposite direction and starts closing from the upper limit opening, and at the same time, the operation of the cool gas valve in the closing direction stops. However, if the deviation of the water temperature still does not clear, the hot gas valve keeps closing and reaches the lower limit. Then, the cool gas valve starts to open again, and the water temperature drops rapidly. When this operation is repeated, hunting of the relatively long cycle water temperature may occur, and the water temperature may not be settled.

  Next, from the state where the circulating water temperature is stable, the temperature control device and the ambient temperature around the object to be cooled gradually decrease, for example, from the evening to the night, and problems with the water temperature stability will be described. The output of the heater, the degree of opening of the hot gas valve, and the degree of opening of the cool gas valve are each in a stable state as long as the amount of heat generated for cooling and the ambient temperature are stable. When the ambient temperature gradually decreases from this state, the temperature around the flow path of the circulating water decreases, so the circulating water is cooled further, and the amount of heat that the temperature control device should provide to the circulating water gradually increases To go. Therefore, the output of the heater first increases to compensate for the increase in the amount of heat required.

However, when the output of the heater reaches the upper limit, the circulating water temperature can not be increased further. Therefore, the hot gas valve operates in the opening direction. When the temperature further drops, the hot gas valve reaches the upper limit of the opening, which causes the cool gas valve to close. However, in high-precision temperature control, even if the temperature control resolution of the heater is set sufficiently small, even if the hot gas valve is operated with the minimum variable amount of opening, the change in the amount of heat due to it is relatively large. Therefore, a transient temperature fluctuation may be given to the circulating water temperature when the hot gas valve operates, which may deteriorate the temperature accuracy. When the cool gas valve is operated by the minimum variable amount, the heat quantity change occurs more than when the hot gas valve is operated by the minimum variable amount, so the influence on the circulating water temperature accuracy is greater.

  Here, the temperature control device 100 according to the present embodiment will be considered. Assuming that the heater 10, the hot gas valve 20, and the cool gas valve 30 are called in order of high temperature control resolution in the temperature control device 100, that is, the heat source of lower order operates under the condition of higher heat control. The upper heat source is saturated to the operable upper and lower limit values. By performing the process of offsetting the heat amount described above, it is possible to temporarily cancel the saturation state of the upper heat source, that is, the condition in which the lower heat source further operates, at every set constant time.

  Once the operating conditions are resolved, the operating conditions of the lower heat source are satisfied again if the temperature deviation thereafter is large. Then, after the next predetermined time, the operating condition of the lower heat source is canceled again, and this is repeated (see, for example, FIG. 4). As this repetition progresses, the temperature deviation becomes smaller, and the operation of the lower heat source is stopped. By this operation, the temperature control device 100 can prevent the hunting operation which is the problem of the above-described reference example.

  For example, in the reference example described above, the operating condition of the hot gas valve is canceled only when the sign of the deviation of the water temperature changes according to the operation of the cool gas valve or the hot gas valve. This is a characteristic of overshooting as a temperature response. If this overshoot amount exceeds 100% of the heater output, the heater output saturates to 0%, and then the hot gas valve is released from the maximum opening state, thereby eliminating the operating condition of the cool gas valve. .

  However, since the cool gas valve continues to close by a constant amount every constant time until this time, the circulating water temperature continues to rise. Only when the cool gas valve operates in the opening direction does the water temperature begin to fall. The operation when the water temperature drops is the reverse of the above, resulting in long-period hunting. In order to prevent this hunting phenomenon without performing the above-described process of offsetting the heat quantity, for example, the cycle time of the operation of the hot gas valve is longer, and the amount of change in the opening degree per one operation is It must be made smaller, and settling of the water temperature change takes a long time, that is, the response is delayed.

  On the other hand, in the temperature control device 100, the heat offset operation is effective also for the occurrence of the transient water temperature fluctuation due to the lower heat source operation when the ambient temperature drops from the above-mentioned state where the circulating water temperature is stable. Thus, the deterioration of the temperature accuracy can be suppressed.

  The temperature control method according to the first embodiment operates the heater 10 based on the measurement result of the temperature of the circulating water and holds the opening degree of the hot gas valve 20 (step S10), and the output of the heater 10 And changing the output of the hot gas valve 20 and operating the heater 10 in a direction to offset the change in the amount of heat due to the change in the output of the hot gas valve 20 when the first output value is reached (step S14). In the temperature control method according to the first embodiment, when the output of the hot gas valve 20 reaches the second output value, the output of the cool gas valve 30 is changed and the change of the output of the cool gas valve 30 is changed. Operating in a direction to offset the change in the amount of heat due to (step S18).

Therefore, as described above, hunting against the temperature of the circulating water can be prevented, and temperature control with faster response can be performed. Furthermore, since the transient response of the water temperature can be suppressed, it is possible to suppress the deterioration of the temperature accuracy when, for example, the hot gas valve 20 or the cool gas valve 30 having a low temperature control resolution operates. Therefore, in the temperature control method according to the first embodiment, temperature stability can be improved.

  In addition, although the temperature control apparatus 100 demonstrated the example which controls the temperature of water in embodiment mentioned above, the temperature control apparatus 100 may control the temperature of fluids, such as liquids other than water, and gas.

2. Second Embodiment 2.1. Configuration of Temperature Control Device Next, the configuration of the temperature control device according to the second embodiment will be described with reference to the drawings. FIG. 6 is a view schematically showing the configuration of the temperature control device 200 according to the second embodiment. In FIG. 6, the arrow shown in the flow path 202 indicates the direction of the flow of the fluid flowing in the flow path 202.

  The temperature control device 200 controls the temperature of the fluid flowing through the flow path 202. The target fluid is not particularly limited, and may be a liquid such as water or a gas such as a refrigerant gas used as a refrigerant.

  As shown in FIG. 6, the temperature control device 200 includes a flow path 202, a heat exchanger 204, a temperature sensor 208, a first heater (first heat source device) 210, and a first controller (first heat source device control). Unit) 212, a second heater (second heat source device) 220, and a second controller (second heat source device controller) 222.

  The flow path 202 is a flow path for circulating a fluid. The flow path 202 allows fluid to flow through an object (not shown), for example, to adjust the temperature of the object. The flow path 202 may be a circulation flow path that circulates a fluid between the object and the heat exchanger 204. The flow channel 202 may be provided with a pump (not shown) for sending a fluid.

  The heat exchanger 204 heats the fluid by heat exchange between the first heater 210 and the fluid and heat exchange between the second heater 220 and the fluid. A first heater 210 and a second heater 220 are built in the heat exchanger 204, and heat exchange is performed between the first heater 210 and the second heater 220 and circulating water passing through the flow path 202.

  Although not shown, the flow path 202 may be provided with a heat exchanger in which the first heater 210 is incorporated and a heat exchanger in which the second heater 220 is incorporated. That is, the first heater 210 and the second heater 220 may be incorporated in separate heat exchangers.

  The temperature sensor 208 is provided in the flow path 202. The temperature sensor 208 is provided downstream of the heat exchanger 204 (downstream of the flow of fluid). The temperature sensor 208 measures the temperature of the temperature-controlled fluid in the heat exchanger 204. The temperature sensor 208 is, for example, a sensor that utilizes the fact that the electrical resistance value of metal fluctuates due to a temperature change. The temperature sensor 208 sends information on the measured fluid temperature to the first controller 212.

  The first heater 210 is incorporated in the heat exchanger 204. In the heat exchanger 204, heat exchange is performed between the first heater 210 and the fluid passing through the flow passage 202 to heat the fluid. The calorific value of the first heater 210 is controlled by the first controller 212.

The second heater 220 is incorporated in the heat exchanger 204. In the illustrated example, the second heater 220 is provided upstream of the first heater 210 (upstream of the fluid flow) in the heat exchanger 204. In the heat exchanger 204, heat exchange is performed between the second heater 220 and the fluid passing through the flow passage 202 to heat the fluid. The calorific value of the second heater 220 is controlled by the second controller 222.

  The output capability of the second heater 220 is higher than the output capability of the first heater 210. That is, the second heater 220 is a heater having a higher output than the first heater 210. The output capacity of the first heater 210 and the output capacity of the second heater 220 may be equal.

  The first heater 210 and the second heater 220 are heating elements that generate Joule heat by supplying an electric current, for example. The first heater 210 and the second heater 220 are made of, for example, a nichrome wire or the like.

  The first controller 212 controls the first heater 210 based on the measurement result of the temperature sensor 208. The first controller 212 is, for example, a digital controller, and information on the temperature of the fluid from the temperature sensor 208 is taken in by an A / D converter (not shown), and the current value supplied to the first heater 210 or The voltage value is determined, and a current or voltage is supplied to the first heater 210 via a D / A converter (not shown).

  The amount of temperature rise of the fluid is not proportional to the current value or the voltage value of the first heater 210, but to the power, that is, the square of the current value or the voltage value. Therefore, the first controller 212 controls the power supplied to the first heater 210 in accordance with the deviation between the measured temperature of the fluid and the commanded temperature. The information of the command temperature is stored, for example, in a storage device (not shown), and the first controller 212 reads out the information of the command temperature stored in the storage device, and the temperature and the command temperature of the measured fluid Find the deviation between

  For example, a PID compensator is used in the first controller 212. In addition, you may use the compensator of another system as a compensator. The first controller 212 controls the first heater 210 by combining proportional control (P control) and differential control (D control) (PD control).

  The second controller 222 controls the second heater 220 so that the output of the first heater 210 becomes a given value (target output value) based on the information of the output of the first heater 210. The target output value of the first heater 210 is, for example, the median value of the output range of the first heater 210, in other words, the median value of the heat generation amount of the first heater 210 (half the maximum heat generation amount). That is, the second controller 222 controls the second heater 220 such that the output of the first heater 210 is 50%.

  The target output value of the first heater 210 is not limited to 50%, and can be any value. That is, the target output value of the first heater 210 may be 40% or 60%. The information of the target output value of the first heater 210 is stored, for example, in a storage device (not shown), and the second controller 222 reads the information of the target output value stored in the storage device to obtain the second heater Control 220;

  The second controller 222 is, for example, a digital controller, receives an output command (a control signal for controlling the first heater 210) of the first heater 210 from the first controller 212, and is supplied to the second heater 220 The current or voltage value is determined, and the current or voltage is supplied to the second heater 220 through a D / A converter (not shown). The second controller 222 controls the power supplied to the second heater 220 in accordance with the deviation between the output of the first heater 210 and the 50% output of the first heater 210.

In the second controller 222, for example, a PID compensator is used. In addition, you may use the compensator of another system as a compensator. The second controller 222 controls the second heater 220 by integral control (I control).

  In the above description, the first controller 212 performs proportional / differential control without performing integral control, and the second controller 222 performs integral control without performing proportional control and differential control. The integral control may be slightly added to the proportional control and the derivative control in the controller 212, and the proportional control and the derivative control may be added to the integral control in the second controller 222. For example, the amount of heat generated by the heater due to proportional gain and proportional heat in the first controller 212 and the amount of heat generated by the heater due to the differential gain are the same as the amount of heat generated by the proportional controller in the second controller 222 and proportional gain in the differential control And the heat generated by the heater due to the differential gain is larger. Further, the heat generation amount of the heater due to the integral gain in the integral control in the second controller 222 is larger than the heat generation amount due to the integral gain in the integral control in the first controller 212.

  The resolution of the D / A converter mounted on the first controller 212 and the resolution of the D / A converter mounted on the second controller 222 are, for example, equal. Therefore, the first heater 210 has higher temperature control resolution than the second heater 220. The resolution of the temperature control of the fluid depends on the size of the heater output (the size of the output capacity) and the resolution (the number of bits) of the D / A converter with respect to the heater supply power stored in the controller. In the temperature control device 100, as described above, the first heater 210 has a lower output capability than the second heater 220, and is mounted on the second controller 222 and the resolution of the D / A converter mounted on the first controller 212. Since the resolution of the D / A converter is equal, the first heater 210 has higher temperature control resolution than the second heater 220 as described above.

  The resolution of the D / A converter mounted on the first controller 212 may be higher than the resolution of the D / A converter mounted on the second controller 222. Thereby, the temperature control resolution of the 1st heater 210 can be made higher.

  Also, the processing of the first controller 212 and the processing of the second controller 222 may be configured to be processed in parallel by one controller, and the first controller 212 and the second controller 222 may be integrated.

2.2. Temperature Control Method Next, a temperature control method using the temperature control device 200 will be described. FIG. 7 is a flowchart showing an example of a temperature control method using the temperature control device 200 according to the second embodiment.

  First, the first controller 212 controls the first heater 210 based on the measurement result of the temperature sensor 208 (step S20).

  In order to control the temperature of the fluid to a desired temperature (command temperature), the first controller 212 takes in the information of the temperature of the fluid output from the temperature sensor 208, and issues a command based on the information of the temperature of the fluid The first heater 210 is controlled to eliminate the deviation from the temperature.

  The second controller 222 controls the second heater 220 based on the information of the output of the first heater 210 such that the output of the first heater 210 has a given value (step S22).

The second controller 222 controls the second heater 220 so that, for example, the output of the first heater 210 is 50%. Specifically, the second controller 222 takes in a control signal for controlling the first heater 210 output from the first controller 212, and outputs the output of the first heater 210 (current output) and the output of the first heater 210. The second heater 220 is controlled so that the deviation from the 50% output is zero.

  The temperature control device 200 can maintain the temperature of the fluid at the commanded temperature by repeating the processes of step S20 and step S22 described above.

  FIG. 8 is a diagram showing an example of a temperature control waveform by the first heater 210 and a temperature control waveform by the second heater 220. As shown in FIG.

  Here, although the temperature control resolution of the first heater 210 is high, the temperature control range is small. However, as described above, since the second heater 220 is controlled such that the output of the first heater 210 is at the median value (50%), the first heater 210 is plus or minus when the fluid undergoes temperature fluctuation. The controllable temperature range can be kept wide in both directions (both in the direction of raising the temperature and in the direction of decreasing the temperature).

  Further, the first controller 212 controls the first heater 210 by combining proportional control and differential control (PD control). Therefore, as shown in FIG. 8, relatively fast temperature fluctuation is controlled with high resolution. The first controller 212 does not perform integral control. On the other hand, the second controller 222 controls the second heater 220 by integral control (I control) because the output of the first heater 210 may be set to 50% relatively slowly. In the second controller 222, proportional control and differential control are not necessarily required.

  If a temperature deviation exists between the command temperature and the fluid, the output of the first heater 210 necessarily deviates from 50% if proportional control is performed in the first controller 212. Therefore, when the output of the first heater 210 is controlled to 50% by the integral control of the second controller 222, the temperature deviation also becomes zero.

  The temperature control device 200 has, for example, the following features.

  In the temperature control device 200, the first controller 212 controls the first heater 210 based on the measurement result of the temperature sensor 208, and the second controller 222 controls the output of the first heater 210 to a given value (target output value). The second heater 220 is controlled to be Thereby, even if, for example, the command temperature or the temperature of the fluid changes, the output value of the first heater 210 can be maintained at a given value (for example, it can be kept constant), the electric resistance of the first heater 210 Influence of the temperature dependence of The reason will be described below.

The first heater 210 is a heating element made of a nichrome wire or the like that generates Joule heat by supplying an electric current. The electrical resistance of such a heating element has temperature dependency. For typical metals, the temperature is electrical resistance R as higher increase, if keeping the current I supplied to the heating element constant, Joule heat IR ² is increased. In addition, when the voltage V supplied to the heating element is kept constant, the Joule heat V ² / R becomes small. Here, when the temperature of the fluid is increased, the equilibrium temperature of the heating element is increased. Therefore, the temperature dependency of the electric resistance described above causes a problem that the setting value of the optimum control gain of the temperature control system is changed.

On the other hand, in the temperature control device 200, as described above, the output value of the first heater 210 is maintained at a given value, so that the influence of the temperature dependence of the electrical resistance of the first heater 210 is suppressed. be able to. Therefore, the temperature control device 200 can improve the temperature stability without causing the problems as described above.

  In the temperature control device 200, the first heater 210 has a temperature control resolution higher than that of the second heater 220 and a temperature control range narrower than that of the second heater 220. Therefore, in the temperature control device 200, as described above, since the second controller 222 controls the second heater 220 so that the output of the first heater 210 becomes a given value, the high temperature control of the first heater 210 is performed. The temperature control of the fluid can be performed over a wide temperature control range which is the sum of the temperature control range of the first heater 210 and the temperature control range of the second heater 220 with the resolution.

  In the temperature control device 200, the target output value of the first heater 210 is the center value of the output range of the first heater 210. Therefore, the first heater 210 can maintain a wide controllable temperature range in both plus and minus directions (both the direction of increasing the temperature and the direction of decreasing the temperature) when the fluid undergoes temperature fluctuation.

  In the temperature control device 200, the first controller 212 controls the first heater 210 by combining proportional control and differential control, and the second controller 222 performs integral control of the second heater 220. Therefore, in the temperature control device 200, when the output of the first heater 210 is controlled to the target output value by the integral control of the second controller 222, the deviation between the command temperature and the temperature of the fluid can also be made zero.

  In the temperature control method according to the second embodiment, the process of controlling the first heater 210 based on the measurement result of the temperature sensor 208 and the output of the first heater 210 based on the information of the output of the first heater 210 Controlling the second heater 220 to have a given value. Therefore, as described above, even if, for example, the command temperature changes, the output value of the first heater 210 can be maintained at a given value (can be kept constant), the electric resistance of the first heater 210 can be reduced. The influence of temperature dependency can be suppressed. Therefore, the temperature control method according to the second embodiment can improve the temperature stability.

3. Modifications The present invention is not limited to the above-described embodiment, and various modifications can be made within the scope of the present invention.

  In the temperature control device 100 according to the first embodiment described above, the controller 50 controls a heat source device (heater 10) for heating circulating water and a heat source device (hot gas valve 20, cool gas valve 30) for cooling the circulating water. And although the example which controls the temperature of circulating water was demonstrated, the controller 50 may control only the several heat-source apparatus which cools circulating water, and may control the temperature of circulating water. Moreover, the controller 50 may control only the plurality of heat source devices that heat circulating water to control the temperature of the circulating water. Even in such a case, the same operation and effect as the above-described temperature control device 100 can be obtained. Therefore, temperature control device 100 is applicable also when controlling the temperature of circulating water to a desired temperature above room temperature, and is also applicable when controlling the temperature of circulating water to a desired temperature lower than room temperature is there.

In the temperature control device 200 according to the second embodiment described above, the first controller 212 controls the heat source device (first heater 210) that heats circulating water, and the second controller 222 heats the circulating water. Although the temperature of the fluid was controlled by controlling (the second heater 220), the heat source device controlled by the first controller 212 and the heat source device controlled by the second controller 222 are heat source devices that heat the fluid. It may be a heat source device that cools the fluid. Also in such a case, the same operation and effect as the temperature control device 200 described above can be achieved. Therefore, the temperature control device 200 can also be applied, for example, to control the temperature of the circulating water to a desired temperature below room temperature.

  Further, for example, in the temperature control device 100 according to the first embodiment described above, the example applied to the charged particle beam device has been described, but the temperature control device 100 can be applied to other charged particle beam devices . As such a charged particle beam apparatus, a charged particle beam drawing apparatus etc. are mentioned, for example. Further, the temperature control device 200 according to the above-described second embodiment can be applied to an electron microscope, a charged particle beam drawing device, etc., as the temperature control device 100.

  Furthermore, for example, the temperature control device 200 according to the second embodiment may be applied to the second heat exchanger 6b of the temperature control device 100 according to the first embodiment described above. That is, the first heater 210 and the second heater 220 of the temperature control device 200 are used as the heaters incorporated in the second heat exchanger 6b of the temperature control device 100, and the first heater 210 and the second heater 220 are described above. Control may be performed using the temperature control method according to the second embodiment. Thereby, a temperature control device having more excellent temperature stability can be realized.

4. Third embodiment 4.1. Configuration of Temperature Control Device Next, the configuration of the temperature control device according to the third embodiment will be described with reference to the drawings. FIG. 9 is a view schematically showing a configuration of a temperature control device 300 according to the third embodiment. In FIG. 9, the arrow shown in the flow path 202 indicates the direction of the flow of fluid flowing in the flow path 202.

  Hereinafter, in the temperature control device 300 according to the third embodiment, members having the same functions as the constituent members of the temperature control device 200 according to the second embodiment described above are given the same reference numerals, and the description thereof is omitted. .

  In the temperature control device 200 described above, as shown in FIG. 6, the first heater 210 is controlled by the first controller 212, and the second heater 220 is controlled by the second controller 222 (first control).

  On the other hand, in the temperature control device 300, as shown in FIG. 9, a first control in which the first heater 210 is controlled by the first controller 212 and a second heater 220 is controlled by the second controller 222; The heater 210 can be controlled by the third controller 312, and the second control in which the second heater 220 is controlled by the fourth controller 322 can be switched.

  As shown in FIG. 9, the temperature control device 300 includes a flow path 202, a heat exchanger 204, a temperature sensor 208, a first heater (first heat source device) 210, and a first controller (first heat source device control). Section) 212, second heater (second heat source apparatus) 220, second controller (second heat source apparatus control section) 222, third controller (third heat source apparatus control section) 312, fourth controller (third heat source apparatus control section) 4 heat source device control unit) 322, and a switching unit 330.

  The third controller 312 controls the first heater 210 such that the output of the first heater 210 becomes a target output value (second value). The target output value of the first heater 210 is, for example, the median of the heat generation amount of the first heater 210 (half of the maximum heat generation amount). That is, the third controller 312 controls the first heater 210 such that the output of the first heater 210 is 50% output.

Note that the target output value of the first heater 210 is not limited to 50%, and can take an arbitrary value. The information of the target output value of the first heater 210 is stored, for example, in a storage device (not shown), and the third controller 312 reads out the information of the target output value stored in the storage device, and the first heater 210 Control.

  The fourth controller 322 controls the second heater 220 based on the measurement result of the temperature sensor 208. The fourth controller 322 is, for example, a digital controller, and the information on the temperature of the fluid from the temperature sensor 208 is captured by an A / D converter (not shown), and the current value supplied to the second heater 220 or The voltage value is determined, and a current or voltage is supplied to the second heater 220 via a D / A converter (not shown).

  The amount of temperature rise of the fluid is not proportional to the current value or the voltage value of the second heater 220 but to the power, that is, the square of the current value or the voltage value. The fourth controller 322 controls the power supplied to the second heater 220 in accordance with the deviation between the measured temperature of the fluid and the command temperature. The information of the command temperature is stored, for example, in a storage device (not shown), and the fourth controller 322 reads out the information of the command temperature stored in the storage device, and measures the temperature and the command temperature of the measured fluid. Find the deviation between

  In the fourth controller 322, for example, a PID compensator is used. In addition, you may use the compensator of another system as a compensator. The fourth controller 322 performs, for example, PID control of the second heater 210 based on the deviation between the temperature of the fluid and the command temperature.

  The resolutions of the D / A converters mounted on the first to fourth controllers 322 are, for example, equal to one another. Also, the processing of the first to fourth controllers 212, 222, 312, 322 may be configured to be parallel-processed by one controller, and the first to fourth controllers 212, 222, 312, 322 may be integrated. .

  The switching unit 330 determines whether the deviation between the temperature of the fluid measured by the temperature sensor 208 and the command temperature is larger than a predetermined value. Then, when it is determined that the deviation is larger than the predetermined value, the switching unit 330 switches from the first control to the second control. On the other hand, when it is determined that the deviation is equal to or less than the predetermined value, the switching unit 330 switches from the second control to the first control.

  Here, the first control and the second control will be described. First, the first control will be described. In the first control, the first heater 210 is controlled by the first controller 212, and the second heater 220 is controlled by the second controller 222. The first control is the same as the control shown in FIG. 7 described above (the control described in the second embodiment).

  FIG. 10 is a diagram for explaining the state of the first control of the temperature control device 300. As shown in FIG.

  In the first control, as shown in FIG. 10, the first controller 212 takes in information of the temperature PV of the fluid from the temperature sensor 208, and based on the information of the temperature PV of the fluid, the temperature PV of the fluid and the command temperature SV The first heater 210 is controlled using the PID compensator 212a so as to eliminate the deviation from the above. Further, the second controller 222 takes in the control signal output from the first controller 212 so that the deviation between the output of the first heater 210 and the 50% output (command temperature SV) of the first heater 210 becomes zero. The second heater 220 is controlled using the PID compensator 222a.

  In the first control, as described in the second embodiment described above, the output value of the first heater 210 can be maintained at a given value even when the command temperature or the fluid temperature changes. The influence of the temperature dependency of the electrical resistance of 210 can be suppressed, and the temperature stability can be improved.

  Next, the second control will be described. FIG. 11 is a diagram for describing the state of the second control of the temperature control device 300.

  In the second control, as shown in FIG. 11, the third controller 312 controls the output of the first heater 210 to be a target output value (50% output, command temperature SV). That is, in the second control, the output of the first heater 210 is constant (50% output) regardless of the temperature of the fluid. Also, the fourth controller 322 takes in information of the temperature PV of the fluid, and uses the PID compensator 322a to eliminate the deviation between the temperature PV of the fluid and the command temperature SV based on the information of the temperature PV of the fluid The second heater 220 is controlled.

  In the first control, in order to control the first heater 210 based on the deviation between the temperature PV of the fluid and the command temperature SV, a second control is performed to control the second heater 220 based on the deviation between the temperature PV of the fluid and the command temperature SV Compared to the above, high temperature control resolution can be realized. On the other hand, in the second control, in order to control the second heater 220 based on the deviation between the temperature PV of the fluid and the command temperature SV, the first heater 210 is based on the deviation between the temperature PV of the fluid and the command temperature SV Fast response is possible compared to the first control to be controlled.

  As a threshold (predetermined value) serving as a reference for switching control, for example, the value of the deviation between the temperature of the fluid and the command temperature when control is performed in which the output of the first heater 210 switches from 50% to 100%. Can be used. That is, the switching unit 330 performs the first control when the deviation between the temperature of the fluid and the command temperature is larger than the deviation when the control of switching the output of the first heater 210 from 50% to 100% is performed. Switch to the second control. Note that the threshold (predetermined value) is not limited to this, and can be appropriately set according to the required responsiveness of temperature control.

  As shown in FIG. 9, the switching unit 330 has a switch 332 for switching control on the first heater 210 and a switch 334 for switching control on the second heater 220.

  When switching from the first control to the second control, the switch 332 switches the control on the first heater 210 from the control by the first controller 212 to the control by the third controller 312. Also, when switching from the second control to the first control, the switch 332 switches the control on the first heater 210 from the control by the third controller 312 to the control by the first controller 212.

  When switching from the first control to the second control, the switch 334 switches the control on the second heater 220 from the control by the second controller 222 to the control by the fourth controller 322. When switching from the second control to the first control, the switch 334 switches the control on the second heater 220 from the control by the fourth controller 322 to the control by the second controller 222.

  The switch 334 performs switching so that the operation amount of the second heater 220 is continuous before and after switching.

  FIG. 12 is a diagram for explaining the operation of the switch 334.

The switch 334 is configured to include a first-order low-pass filter (LPF) 334 a and two multipliers 334 b and 334 c. The low pass filter 334a is represented by 1 / (T _SW s + 1). Here, T _SW is a time constant, and s is a Laplace operator. The switching signal “1” is input to the low pass filter 334 a when switching is performed. The multiplier 334b multiplies the output of the controller (operation amount MV1) before switching with the output of the low pass filter 334a. The multiplier 334c performs multiplication of the output (operation amount MV2) of the controller after switching and a value obtained by subtracting the output of the low pass filter 334a from “1”. Then, the sum of the multiplier 334 b and the multiplier 334 c is output to the second heater 220 as the operation amount MV ′.

  Hereinafter, the operation of the switch 334 at the time of switching from the first control to the second control will be described with reference to FIGS. 9 and 12.

  In the switch 334, when the switching signal “1” is input to the low pass filter 334a, the output of the fourth controller 322 (operation amount MV1) is gradually changed from “0” to “1” by the multiplier 334b. It is multiplied by a factor. On the other hand, the output (operation amount MV2) of the second controller 222 is multiplied by the multiplier 334c by a coefficient that gradually changes from "1" to "0". These values are added and output to the second heater 220 as an operation amount MV ′.

  Thus, the switch 334 continuously increases the ratio of the operation amount MV1 for the second heater 220 by the fourth controller 322 to the ratio of the operation amount MV2 for the second heater 220 by the second controller 222. That is, the switch 334 continuously increases the ratio of the amount of operation of the second heater 220 by the second control to the ratio of the amount of operation of the second heater 220 by the first control. Thereby, when switching from the first control to the second control, the operation amount of the second heater 220 before and after switching can be made continuous.

  The operation of the switch 334 at the time of switching from the second control to the first control is the same except that the operation amount MV1 is the output of the second controller 222 and the operation amount MV2 is the output of the fourth controller 322. . That is, when switching from the second control to the first control, the switch 334 sets the ratio of the operation amount MV1 for the second heater 220 by the second controller 222 to the ratio of the operation amount MV2 for the second heater 220 by the fourth controller 322. Increase continuously. That is, the switch 334 continuously increases the ratio of the amount of operation of the second heater 220 by the first control with respect to the ratio of the amount of operation of the second heater 220 by the second control. Thus, when switching from the second control to the first control, the operation amount of the second heater 220 before and after switching can be made continuous.

  The switch 334 can be realized by, for example, a soft switch (a software realized switch operating on a computer system). In the above, the switch 334 uses a first-order low-pass filter, but for example, a function that changes from “0” to “1” at a constant speed, or between “0” and “1” A function or the like that draws an S-curve may be used.

When the switch 332 switches from the first control to the second control, for example, the control for the first heater 210 is immediately (instantly) switched from the control by the first controller 212 to the control by the third controller 312. Similarly, when switching from the second control to the first control, the switch 332 immediately switches the control on the first heater 210 from the control by the third controller 312 to the control by the first controller 212. This is because, unlike the second heater 220, the first heater 210 is controlled to 50% output in both of the first control and the second control, so that it is difficult for a sudden change in the operation amount to occur at the time of switching. . The switch 332 may have a configuration similar to that of the switch 334 described above. That is, the switch 332 may switch so that the operation amount of the first heater 210 continues before and after the switching.

4.2. Temperature Control Method Next, a temperature control method using the temperature control device 300 will be described. FIG. 13 is a flowchart showing an example of a temperature control method using the temperature control device 300 according to the third embodiment.

  First, the first control is performed (step S30). The switching unit 330 outputs the output of the first controller 212 to the first heater 210 and outputs the output of the second controller 222 to the second heater 220. Thus, the first heater 210 is controlled based on the measurement result of the temperature sensor 208 (the difference between the temperature of the fluid and the command temperature), and the output of the first heater 210 is targeted based on the information of the output of the first heater 210. The second heater 220 is controlled to have an output value (50% output).

  Next, the switching unit 330 determines whether the deviation between the temperature of the fluid measured by the temperature sensor 208 and the command temperature is larger than a predetermined value (step S32).

  If it is determined that the deviation between the fluid temperature and the command temperature is equal to or less than the predetermined value (in the case of “NO” in step S32), the process returns to step S30 and the first control is continuously performed.

  On the other hand, when it is determined that the deviation between the fluid temperature and the command temperature is larger than the predetermined value (in the case of “YES” in step S32), the switching unit 330 switches from the first control to the second control (step S34). ). At this time, the ratio of the operation amount for the second heater 220 in the second control is continuously increased with respect to the ratio of the operation amount for the second heater 220 in the first control by the switch 334 of the switching unit 330, The operation amount of the second heater 220 can be made continuous.

  Then, the second control is performed (step S36). The switching unit 330 outputs the output of the third controller 312 to the first heater 210 and outputs the output of the fourth controller 322 to the second heater 220.

  Next, the switching unit 330 determines whether the deviation between the temperature of the fluid measured by the temperature sensor 208 and the command temperature is larger than a predetermined value (step S38).

  If it is determined that the deviation between the fluid temperature and the command temperature is larger than the predetermined value (in the case of “YES” in step S38), the process returns to step S36 to continue the second control.

  On the other hand, when it is determined that the deviation between the fluid temperature and the command temperature is equal to or less than the predetermined value (in the case of “NO” in step S38), the switching unit 330 switches from the second control to the first control (step S39). At this time, the ratio of the operation amount for the second heater 220 in the first control is continuously increased with respect to the ratio of the operation amount for the second heater 220 in the second control by the switch 334 of the switching unit 330, The operation amount of the second heater 220 can be made continuous. And it returns to step S30 and performs 1st control.

  The temperature control device 300 can maintain the temperature of the fluid at the commanded temperature by repeating the above-described processing from step S30 to step S39.

  The temperature control device 300 has, for example, the following features.

In the temperature control device 300, the switching unit 330 determines whether the deviation between the temperature of the fluid measured by the temperature sensor 208 and the command temperature is larger than a predetermined value, and determines that the deviation is larger than the predetermined value. If it is, the first control is switched to the second control. That is, in the temperature control device 300, when it is determined that the deviation between the temperature of the fluid and the command temperature is larger than a predetermined value, the state of high temperature control resolution that mainly controls the temperature of the first heater 210. From the (first control), the second heater 220 can be switched to a state (second control) in which high-speed response can be mainly performed to control the temperature of the fluid.

  For example, when temperature control is performed only by the first control, the control target of the second heater is not the temperature of the fluid itself but the target output value (50% output) of the first heater. Essentially, when the deviation from the command temperature is large, it is desirable that the operation amount of the control system be correspondingly large. However, since the control target of the second heater is the 50% output of the first heater, for example, the temperature deviation is relatively small, and the amount of heat for raising the temperature of the fluid becomes equal to the 50% output of the first heater. When this happens, the deviation for changing the output of the second heater is 50% (100% -50%) of the first heater which is the maximum value. However, even if the deviation between the fluid temperature and the commanded temperature becomes much larger than this, the deviation for controlling the operation amount of the second heater corresponds to 50% of the maximum value of the first heater. Can not exceed. Therefore, the response of the second heater is not quick even when the deviation between the fluid temperature and the command temperature becomes large. Therefore, the response of temperature control becomes slow when the deviation between the fluid temperature and the command temperature becomes large.

  On the other hand, in the temperature control device 300, as described above, it is determined whether the deviation between the fluid temperature and the command temperature is larger than a predetermined value, and it is determined that the deviation is larger than the predetermined value. In this case, since the first control is switched to the second control, the response of the second heater 220 can be quickened as compared with the case of only the first control described above. As described above, in the temperature control device 300, a state (first control) with high temperature control resolution in which the first heater 210 mainly performs temperature control according to the magnitude of the deviation between the fluid temperature and the command temperature. The second heater 220 can be switched to a state (second control) capable of high-speed response, which mainly performs temperature control. Therefore, in the temperature control device 300, both high accuracy control and high speed response control can be achieved.

  Further, in the temperature control device 300, as in the above-described temperature control device 200, the output value of the first heater 210 is maintained at a given value, so the temperature dependency of the electrical resistance of the first heater 210 is The temperature stability can be improved.

  In the temperature control device 300, the switching unit 330 continuously increases the ratio of the operation amount of the fourth controller 322 to the second heater 220 with respect to the ratio of the operation amount of the second controller 222 to the second heater 220, The first control is switched to the second control. Thereby, when switching from the first control to the second control, it is possible to suppress a rapid change in the operation amount of the second heater 220, and to suppress a transient response of temperature.

  When switching from the first control to the second control, the control target of the second heater 220 switches from the target output value (50% output) of the first heater 210 to the temperature of the fluid. Therefore, when the above process is not performed, when switching from the first control to the second control, the operation amount of the second heater becomes discontinuous, which generates a transient temperature response. On the other hand, in the temperature control device 300, the switching unit 330 continuously sets the ratio of the operation amount of the fourth controller 322 to the second heater 220 to the ratio of the operation amount of the second controller 222 to the second heater 220. In order to switch from the first control to the second control, the operation amount of the second heater 220 can be changed continuously. Therefore, in the temperature control device 300, the above problem does not occur, and it is possible to suppress a transient response of temperature.

  In the temperature control device 300, the switching unit 330 switches from the second control to the first control when it is determined that the deviation between the fluid temperature and the command temperature is equal to or less than a predetermined value. That is, in the temperature control device 300, when it is determined that the deviation between the temperature of the fluid and the command temperature is equal to or less than the predetermined value, the second heater 220 can perform high-speed response mainly to control the temperature of the fluid. From (2) control, it is possible to switch the first heater 210 to a state of high temperature control resolution (first control) in which temperature control of the fluid is mainly performed. Therefore, in the temperature control device 300, both high accuracy control and high speed response control can be achieved.

  Further, in the temperature control device 300, the switching unit 330 continuously increases the ratio of the operation amount of the second controller 222 to the second heater 220 with respect to the ratio of the operation amount of the fourth controller 322 to the second heater 220. Switch from the second control to the first control. Therefore, also when switching from the second control to the first control, it is possible to suppress a rapid change in the operation amount of the second heater 220, as in the case of switching from the first control to the second control described above. Transient response can be suppressed.

  In the temperature control device 300, the second controller 222 controls the second heater 220 so that the output of the first heater 210 has a first value, and the third controller 312 controls the output of the first heater 210 at a second value. The first heater 210 is controlled such that the first value and the second value are the median (50% output) of the output range of the first heater 210. Therefore, the first heater 210 can maintain a wide controllable temperature range in both positive and negative directions (both the direction of increasing the temperature and the direction of decreasing the temperature). In addition, since the first value is equal to the second value, when the switching from the first control to the second control and the switching from the second control to the first control, Abrupt changes can not occur.

  In the temperature control method according to the third embodiment, the step of determining whether the deviation between the temperature of the fluid measured by the temperature sensor 208 and the command temperature is larger than a predetermined value (step S32); And (step S34) of switching from the first control to the second control when it is determined that the value is larger than the value (in the case of “YES” in step S32). Therefore, as described above, both high precision control and high speed response control can be achieved.

  In the above, the control is switched when it is determined that the deviation between the fluid temperature and the command temperature is larger than a predetermined value, but for example, the deviation between the fluid temperature and the command temperature is a predetermined value The control may be switched when a state of satisfying the condition of being larger than the predetermined time (for example, 30 seconds) continues. Thereby, it is possible to prevent a hunting phenomenon in which switching of control is repeated due to a transient temperature fluctuation.

5. Fourth Embodiment Next, the configuration of a temperature control device according to a fourth embodiment will be described with reference to the drawings. FIG. 14 is a view schematically showing a configuration of a charged particle beam device 1000 including a temperature control device 400 according to the fourth embodiment. In FIG. 14, the arrows shown in the flow paths 2a, 2b, 42, 48 indicate the flow directions of the fluid flowing in the respective flow paths 2a, 2b, 42, 48.

  Hereinafter, in the temperature control device 400 according to the fourth embodiment, members having the same functions as the constituent members of the temperature control device 100 according to the first embodiment described above are given the same reference numerals, and descriptions thereof will be omitted. .

In the temperature control device 300, the controller 50 is configured to include a PID compensator 52 and a non-linear compensator 54. In addition, the temperature control device 300 is configured to include an AC power regulator 60 that regulates the power supplied to the heater 10. The AC power regulator 60 is a phase control type AC power regulator (APR).

  Here, a phase control type AC power regulator will be described. FIG. 15 is a diagram showing an example of the output waveform of the phase control type AC power regulator.

  As shown in FIG. 15, a phase control type AC power regulator (hereinafter also referred to as “APR”) is to gate an AC voltage waveform and change a section in which current flows in one period of a sine wave. Control the power steplessly. Here, the output of APR is a ratio of the section in which this current flows. At this time, when the output of the APR is 50%, a half current of the sine wave waveform flows, so the effective current value is half that when the output of the APR is 100%.

  However, as shown in FIG. 15, when the output of APR is 75% or 25%, the output of APR is not proportional to the effective current value. Furthermore, since the amount of heat generated by the heater is proportional to the square of the current value, the relationship between the output of the APR and the amount of heat generated by the heater is more nonlinear than the relationship with the effective current. The control target is the temperature of the circulating water, but the amount of heat required to raise the water temperature is the product of the temperature deviation amount and the value of the circulating water flow rate per unit time multiplied by the specific heat. Therefore, the effect of this non-linearity is when the output (%) of the APR is controlled to be proportional to the temperature deviation even though the temperature rise of the circulating water and the power supplied to the heater are proportional. Will be greatly received.

  Therefore, in the temperature control device 300, the controller 50 includes the non-linear compensator 54. The non-linear compensator 54 converts the manipulated variable determined by the PID compensator 52 so that the relationship between the manipulated variable for the heater 10 determined by the PID compensator 52 and the heat quantity generated by the heater 10 becomes linear. Output to the AC power regulator 60.

  The principle of the nonlinear compensator 54 will be described below.

  When the current is represented by a sin wave, the power is proportional to its square. If this is integrated in a fixed interval between phases 0 and π, a value proportional to the effective power can be obtained. When this is expressed by an equation, the phase x is expressed by the following equation (1).

  Assuming that the manipulated variable obtained by the PID compensator 52 (that is, the manipulated variable before passing through the non-linear compensator 54) is MV (%), the integration interval of equation (1) is represented by 0 to (MV / 100) × π Be done.

  Assuming that the amount of heat generated by the heater 10 is Q (%), the amount of heat generated Q (%) of the heater 10 with respect to the operation amount MV (%) is expressed by the following equation (2).

Here, the manipulated variable MV (%) determined by the PID compensator 52 is MV ′ by the non-linear compensator 54.
Suppose that it is converted to (%). At this time, what is desirable as a control system is that the output of the PID compensator 52 (operation amount MV (%)) and the amount of heat generation Q of the heater 10 become equal. Therefore, the nonlinear compensator 54 may satisfy the following expression (3).

  FIG. 16 is a graph showing the relationship between the manipulated variable MV (%) determined by the PID compensator 52 and the heat generation amount Q (%) of the heater. The amount of heat generation Q is indicated by a solid line in FIG.

  When the manipulated variable MV is around 50%, the manipulated variable MV and the heat generation amount Q can be regarded as linear, but the nonlinearity becomes larger as the manipulated variable MV approaches 0% or 100%. In the region close to 0% or 100%, the heat generation amount Q of the heater hardly changes even if the inclination is small and the operation amount MV is changed. Therefore, the temperature of circulating water can not be changed.

  If the control gain of the compensator is adjusted around the manipulated variable MV = 50%, the control gain will be insufficient as the manipulated variable MV deviates from 50%, and the controllability will deteriorate. In the case of controlling only by the proportional gain, the response becomes slow and the temperature deviation becomes large. When the integral gain is added and control is performed, the integral operation amount is accumulated for the time when the response is delayed, and when the water temperature starts moving in the direction of the command value with the accumulated operation amount, the response amount suddenly Becomes larger than the target value and the sign of the deviation becomes opposite. That is, it becomes easy to cause oscillation by the integral operation amount. Therefore, the integral gain can not be increased, and it takes time to compensate for the deviation and the response becomes slow.

  Therefore, in order to linearize the relationship between the manipulated variable MV and the generated heat amount Q to improve the controllability, the manipulated variable MV may be multiplied by the inverse function of the generated heat amount Q. Thereby, the relationship between the operation amount MV and the heat generation amount Q can be linearized. The inverse function (operation amount MV ′) of the heat generation amount Q is indicated by a broken line in FIG. 16, and the linearized generated heat amount Q is indicated by an alternate long and short dash line.

  Here, in order to obtain the inverse function of the heat generation amount Q, it is necessary to find the inverse function of y = x-sin (x), but the inverse function of y = x-sin (x) is a known function Can not be expressed in the equation, and becomes a function of infinite cycle y = x + sin (x + sin (x + sin (x + sin (x + sin (x + sin (x + sin (x + sin (x + sin (x))))))))).

  Therefore, for example, the manipulation amount MV can be converted into the manipulation amount MV 'by using a conversion table that represents a coefficient for converting the manipulation amount MV into the manipulation amount MV'. In this conversion table, the manipulated variable MV 'is prepared as a discrete value for the manipulated variable MV, and when there is the manipulated variable MV between these discrete values, coefficients for linearization are calculated by linear interpolation. It can be asked. The interpolation method is not particularly limited, and another interpolation method such as Newton interpolation may be used. The conversion table is stored, for example, in a storage device of the controller 50 and read and used.

  Next, the operation of the controller 50 will be described.

In the controller 50, the PID compensator 52 obtains the operation amount MV of the heater 10 under PID control based on the deviation between the temperature of circulating water measured by the temperature sensor 8 and the command temperature. P
The manipulated variable MV obtained by the ID compensator 52 is sent to the non-linear compensator 54. The non-linear compensator 54 converts the operation amount MV into the operation amount MV ′ such that the relationship between the operation amount MV and the heat generation amount Q of the heater 10 is linear. Then, the nonlinear compensator 54 sends the manipulated variable MV ′ to the AC power regulator 60. The AC power regulator 60 regulates the power supplied from the heater power supply 12 to the heater 10 based on the operation amount MV ′.

  The temperature control device 400 has, for example, the following features.

  The temperature control device 400 includes a phase control type AC power regulator 60 for adjusting the power supplied to the heater 10. In the controller 50, the nonlinear compensator 54 is based on the deviation between the temperature of circulating water and the commanded temperature. The operation amount MV is converted so that the obtained operation amount MV for the heater 10 and the heat quantity Q generated by the heater 10 become linear, and is output to the AC power regulator 60. Therefore, for example, even when the manipulated variable MV becomes close to 0% or 100%, the controllability of the water temperature is not impaired, and the control gain can be set appropriately. Therefore, the controllability can be enhanced as compared with, for example, the case without the non-linear compensator 54.

  Further, the temperature control device 400 can compensate for non-linearity occurring in the power output of the AC power regulator of the phase control system that is relatively inexpensive and capable of continuously controlling power, so that high controllability can be achieved at low cost. Temperature control device can be realized.

  In the above description, nonlinear compensation is performed by using a compensation table for converting the manipulated variable MV to the manipulated variable MV 'and interpolation between discrete values. For example, y = x + sin (x + sin (x + sin (x + sin (x + sin (x + sin) Non-linear compensation is performed by a method of performing approximation calculation with a finite number of circulation numbers, for example, about 5 times, among the functions of the infinite circulation of (x + sin (x + sin (x + sin (x +...)))))))) You may go.

  Moreover, although the example using the alternating current power regulator 60 of a phase control system and the non-linear compensator 54 was demonstrated above, in order to control the heater 10 of the temperature control apparatus 400, the temperature control apparatus shown in FIG. A phase control AC power regulator and a non-linear compensator may be applied to the heaters 210 and 220 of 200. Further, an AC power regulator of a phase control system and a non-linear compensator may be applied to the heaters 210 and 220 of the temperature control device 300 shown in FIG. 9.

  In addition, the embodiment and modification which were mentioned above are an example, and are not necessarily limited to these. For example, each embodiment and each modification can be combined suitably.

  The present invention includes configurations substantially the same as the configurations described in the embodiments (for example, configurations having the same function, method and result, or configurations having the same purpose and effect). Further, the present invention includes a configuration in which a nonessential part of the configuration described in the embodiment is replaced. The present invention also includes configurations that can achieve the same effects as the configurations described in the embodiments or that can achieve the same purpose. Further, the present invention includes a configuration in which a known technology is added to the configuration described in the embodiment.

2a: water supply flow passage, 2b: return water flow passage, 4: pump, 6a: first heat exchanger, 6b: second heat exchanger, 8: temperature sensor, 10: heater, 12: heater power supply, 20: hot gas valve , 30: Cool gas valve, 40: Refrigerant circulator, 42: Refrigerant flow path, 44: Compressor, 46: Condenser, 48: Cooling water supply flow path, 50: Controller, 52: PID compensator, 54: Nonlinear compensator , 60: AC power regulator, 100, 200: temperature control device, 202: flow passage, 204: heat exchanger, 208: temperature sensor, 210: first heater, 212: first
Controller, 212a: PID compensator, 220: second heater, 222: second controller, 222a: PID compensator, 300: temperature control device, 312: third controller, 322: fourth controller, 322a: PID compensator, 330: switching unit, 332: switch, 334: switch, 334a: low pass filter, 334b: multiplier, 334c: multiplier, 1000: charged particle beam device, 1002: flow path, 1010: cooling target

Claims (22)

A temperature control device for controlling the temperature of the fluid,
A plurality of heat source devices for heating or cooling the fluid;
A temperature sensor that measures the temperature of the fluid;
A control unit that controls the plurality of heat source devices such that the fluid has a command temperature ;
Including
The control unit
The first heat source device of the plurality of heat source devices is operated based on the deviation between the temperature of the fluid measured by the temperature sensor and the commanded temperature, and the second heat source device of the plurality of heat sources is and processing that holds the output,
When the output of the first heat source device reaches the upper limit value , the output of the second heat source device is increased, and the first heat source device is offset so as to offset the heat quantity change due to the change of the output of the second heat source device. Processing to reduce the output of
When the output of the first heat source device reaches the lower limit value, the output of the second heat source device is reduced, and the heat source change due to the change of the output of the second heat source device is offset to cancel out the first heat source device Processing to raise the output of the
Do,
The temperature control device, wherein the first heat source device has a temperature control resolution higher than that of the second heat source device. In claim 1,
The control unit
If the output of the second heat source unit has reached the upper limit, along with increasing the output of the third heat source unit of the plurality of heat sources, so as to offset the amount of heat change due to the change in the output of the third heat source device Reducing the output of the second heat source apparatus;
When the output of the second heat source device reaches the lower limit value, the second heat source device is configured to reduce the output of the third heat source device and to offset the heat quantity change due to the change of the output of the third heat source device. Processing to raise the output of the
Do,
The second heat source apparatus has a temperature control resolution higher than that of the third heat source apparatus. A temperature control device for controlling the temperature of the fluid,
A first heat source device that heats or cools the fluid;
A second heat source apparatus which heats or cools the fluid and whose output capacity is equal to or higher than the output capacity of the first heat source apparatus;
A temperature sensor that measures the temperature of the fluid;
A first heat source device control unit that controls the first heat source device such that the fluid has the command temperature based on a deviation between the temperature of the fluid measured by the temperature sensor and the command temperature ;
The second heat source device is controlled such that the output of the first heat source device becomes the median value based on the deviation between the output of the first heat source device and the central value of the output range of the first heat source device 2 heat source device control unit,
Only including,
The temperature control device, wherein the first heat source device has a temperature control resolution higher than that of the second heat source device and a temperature control range narrower than that of the second heat source device. In claim 3,
The second heat source device control unit takes in a control signal for controlling the first heat source device output from the first heat source device control unit, and acquires information of an output of the first heat source device. apparatus. In claim 3 or 4 ,
The first heat source device control unit controls the first heat source device by combining proportional control and differential control,
The temperature control device, wherein the second heat source device control unit performs integral control of the second heat source device. A temperature control method for controlling the temperature of a fluid using a temperature control device provided with a plurality of heat source devices, comprising:
The first heat source device of the plurality of heat source devices is operated so that the fluid has the command temperature based on the deviation between the measured temperature of the fluid and the command temperature, and the heat source device is operated among the plurality of heat sources Holding the output of the second heat source apparatus of
When the output of the first heat source device reaches the upper limit value , the output of the second heat source device is increased, and the first heat source device is offset so as to offset the heat quantity change due to the change of the output of the second heat source device. Reducing the output of the
When the output of the first heat source device reaches the lower limit value, the output of the second heat source device is reduced, and the heat source change due to the change of the output of the second heat source device is offset to cancel out the first heat source device Increasing the output of the
Including
The temperature control method, wherein the first heat source device has a higher temperature control resolution than the second heat source device. In claim 6 ,
If the output of the second heat source unit has reached the upper limit, along with increasing the output of the third heat source unit of the plurality of heat sources, so as to offset the amount of heat change due to the change in the output of the third heat source device Reducing the output of the second heat source apparatus,
When the output of the second heat source device reaches the lower limit value, the second heat source device is configured to reduce the output of the third heat source device and to offset the heat quantity change due to the change of the output of the third heat source device. Increasing the output of the
Including
The temperature control method, wherein the second heat source apparatus has a temperature control resolution higher than that of the third heat source apparatus. A temperature control method for controlling the temperature of a fluid using a temperature control device comprising a first heat source device and a second heat source device, the temperature control method comprising:
Controlling the first heat source device such that the fluid has the commanded temperature based on a deviation between the measured temperature of the fluid and the commanded temperature ;
Controlling the second heat source device such that the output of the first heat source device becomes the median value based on the deviation between the output of the first heat source device and the central value of the output range of the first heat source device And, and
The output capacity of the second heat source device state, and are output capability than the first heat source unit,
The temperature control method , wherein the first heat source apparatus has a temperature control resolution higher than that of the second heat source apparatus and a temperature control range narrower than that of the second heat source apparatus . In claim 8 ,
The temperature control method, wherein in the step of controlling the second heat source device, a control signal for controlling the first heat source device is taken, and information of an output of the first heat source device is acquired. In claim 8 or 9 ,
In the step of controlling the first heat source device, the first heat source device is controlled by combining proportional control and differential control,
The temperature control method which carries out integral control of said 2nd heat source device at the process of controlling said 2nd heat source device. A charged particle beam device comprising the temperature control device according to any one of claims 1 to 5 . A temperature control device for controlling the temperature of the fluid,
A first heat source device that heats or cools the fluid;
A second heat source apparatus which heats or cools the fluid and whose output capacity is equal to or higher than the output capacity of the first heat source apparatus;
A temperature sensor that measures the temperature of the fluid;
A first heat source device control unit that controls the first heat source device such that the fluid has the command temperature based on a deviation between the temperature of the fluid measured by the temperature sensor and the command temperature ;
The second heat source device is controlled such that the output of the first heat source device becomes the median value based on the deviation between the output of the first heat source device and the central value of the output range of the first heat source device 2 heat source device control unit,
A third heat source control unit that controls the first heat source device such that an output of the first heat source device becomes the median value ;
A fourth heat source device control unit configured to control the second heat source device so that the fluid has the command temperature based on a deviation between the temperature of the fluid measured by the temperature sensor and the command temperature ;
The first heat source device is controlled by the first heat source device control unit, and the second heat source device is controlled by the second heat source device control unit. The first heat source device is controlled by the third heat source device control A second control unit that controls the second heat source device with the fourth heat source device control unit;
Including
The switching unit determines whether a deviation between the temperature of the fluid measured by the temperature sensor and the command temperature is larger than a predetermined value, and the deviation between the temperature of the fluid and the command temperature is the predetermined Switching from the first control to the second control when it is determined that the value is larger than the value;
The temperature control device, wherein the first heat source device has a temperature control resolution higher than that of the second heat source device and a temperature control range narrower than that of the second heat source device. In claim 12 ,
The switching unit continuously increases the ratio of the operation amount of the fourth heat source device control unit to the second heat source device with respect to the ratio of the operation amount of the second heat source device control unit to the second heat source device. Temperature control device for switching from the first control to the second control. In claim 12 or 13 ,
The temperature control device, wherein the switching unit switches from the second control to the first control when it is determined that the deviation between the temperature of the fluid and the command temperature is equal to or less than the predetermined value. In claim 14 ,
The switching unit continuously increases the ratio of the operation amount of the second heat source device control unit to the second heat source device with respect to the ratio of the operation amount of the second heat source device control unit to the second heat source device. The temperature control device switches from the second control to the first control. A temperature control method for controlling the temperature of a fluid using a temperature control device comprising a first heat source device and a second heat source device having an output capacity equal to or higher than the output capacity of the first heat source device,
Determining whether the deviation between the measured temperature of the fluid and the commanded temperature is greater than a predetermined value;
Switching from the first control to the second control when it is determined that the deviation between the measured temperature of the fluid and the commanded temperature is greater than the predetermined value;
Including
In the first control,
The first heat source device is controlled based on the difference between the measured temperature of the fluid and the commanded temperature so that the fluid has the commanded temperature .
The second heat source device is controlled such that the output of the first heat source device becomes the median value based on the deviation between the output of the first heat source device and the central value of the output range of the first heat source device,
In the second control,
Controlling the first heat source device so that the output of the first heat source device becomes the median value ,
A temperature control method , comprising: controlling the second heat source device such that the fluid has the commanded temperature based on a deviation between the measured temperature of the fluid and the commanded temperature . In claim 16 ,
In the step of switching from the first control to the second control, the ratio of the operation amount to the second heat source device by the second control is continuous to the ratio of the operation amount to the second heat source device by the first control. Temperature control method to increase In claim 16 or 17 ,
A temperature control method comprising the step of switching from the second control to the first control when it is determined that the deviation between the measured temperature of the fluid and the commanded temperature is equal to or less than the predetermined value. In claim 18 ,
In the step of switching from the second control to the first control, the ratio of the operation amount to the second heat source device by the first control is continuous with the ratio of the operation amount to the second heat source device by the second control. Temperature control method to increase. In claim 1 or 2 ,
The power supply apparatus further includes a phase control type AC power regulator for adjusting power supplied to the heat source apparatus,
The control unit performs the operation amount so that the relationship between the operation amount for the heat source device and the heat amount generated by the heat source device determined based on the deviation between the temperature of the fluid and the commanded temperature is linear. A temperature control device comprising a non-linear compensator which converts and outputs to the AC power regulator. In any one of claims 3 to 5 , 12 to 15 ,
The system further includes a phase control type AC power regulator for adjusting power supplied to the first heat source device,
The first heat source device control unit is configured such that the relationship between the operation amount for the first heat source device and the amount of heat generated by the first heat source device determined based on the deviation between the temperature of the fluid and the command temperature A temperature control device, comprising: a non-linear compensator that converts the manipulated variable so as to be output to the AC power regulator. A charged particle beam device comprising the temperature control device according to any one of claims 12 to 15 , 20 , 21 .