JP2016055275A - Cleaning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cleaning device which effectively dries a cleaned object in a draining manner.SOLUTION: A cleaning device cleans a cleaned object and includes: a cylindrical cleaning room; a rotary table disposed in the cleaning room and configured to hold the cleaned object; a rotary mechanism which rotates the rotary table; a rotary shaft disposed between the rotary table and the rotary mechanism; a suction port for sending air into the cleaning room; an exhaust port for exhausting air; a blower connected with the exhaust port; nozzles; and a drain port for draining a cleaning liquid.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a cleaning apparatus for draining and drying an object to be cleaned by rotating the object to be cleaned and sucking air.

  A cleaning device for processing parts or the like is for cleaning an object to be cleaned by placing the object to be cleaned on a turntable in a casing of the cleaning apparatus and spraying a cleaning liquid or air from a plurality of nozzles arranged around the object. . Further, in a cleaning apparatus having a drying function, an air nozzle is added to the cleaning apparatus, and the object to be cleaned is generally dried by air blow injected through a compressor and rotation of the object to be cleaned.

  In addition, for example, there are the following cleaning devices. The cleaning device of Patent Document 1 includes a capsule-type cleaning chamber, a nozzle provided in one of the cleaning chambers, a suction unit provided in the other, and a rotatable work support provided in the cleaning chamber. 1 is a capsule-type cleaning device that swirls cleaning liquid, cleaning water, or air sprayed from a nozzle and that can be guided to a suction portion (see FIG. 1 of Patent Document 1).

  Moreover, although it is not a washing | cleaning apparatus for process parts, there exists the following as a washing | cleaning apparatus for substrates. The cleaning device for a substrate of Patent Document 2 includes a cup, a rotary table that holds the substrate, a drive shaft that rotates the cup, a discharge pipe that discharges an air flow generated by the rotation of the rotary table, and a rectification of the air flow. And a plurality of wind tunnels in which introduction ports for introducing an air flow are formed (see FIG. 1 of Patent Document 2).

  Further, the cleaning device of Patent Document 3 is also a cleaning device for a substrate, and an exhaust duct is arranged in the circumferential direction on the upper cup, the lower cup, a rotary table for holding the substrate, and a bottom wall of the lower cup. The cleaning device is provided with two places so as to have a positional relationship of 180 ° and includes an air intake device with a filter at the upper end of the upper cup (see FIG. 1 of Patent Document 3).

JP 2012-76025 A Japanese Patent Laid-Open No. 11-283902 JP 2003-163147 A

  Since the conventional cleaning device equipped with an air blow and the cleaning device disclosed in Patent Document 1 send air into the cleaning chamber by air blow, a compressor and the like are indispensable components, and device costs and operating costs are incurred. Further, since compressed air is used for air blow, treatment with drain water or the like is indispensable and time-consuming. Moreover, since the washing | cleaning apparatus of patent document 1 is a capsule type | mold, if the components to wash | clean become large, the whole apparatus will also become large and there exists a possibility that the inside of a capsule may become high humidity.

  Further, since the cleaning devices of Patent Document 2 and Patent Document 3 are cleaning devices for substrates, the main purpose is to have a structure in which moisture does not adhere to the substrate, unlike cleaning devices for component cleaning. For this reason, air outlets are provided at the outer edge of the bottom so that moisture and mist do not adhere to the back side of the substrate, and it is difficult for air to reach the lower surface of the substrate and drying cannot be performed sufficiently.

  The present invention has been made in view of the above-described points, and an object of the present invention is to provide a cleaning apparatus that effectively drains and cleans the object to be cleaned by rotation of the object to be cleaned and air.

  In order to solve the above problems, a cleaning apparatus according to the present invention is a cleaning apparatus that cleans an object to be cleaned, and includes a cylindrical cleaning chamber and a turntable that is disposed in the cleaning chamber and holds the object to be cleaned. A rotating mechanism for rotating the rotating table, a rotating shaft disposed between the rotating table and the rotating mechanism, an intake port for sending air into the cleaning chamber, an exhaust port for discharging air, A blower connected to the exhaust port, a plurality of nozzles, and a drain port for discharging the cleaning liquid are provided. According to this configuration, the object to be cleaned is effectively drained and dried by the rotation of the object to be cleaned and air.

  Preferably, in the cleaning device, the cleaning chamber includes a bottom portion and a bottomed cylindrical tube portion covered with an upper portion, and the bottom portion is disposed below the turntable and has an open center. Then, there is a predetermined gap between the opening and the rotating shaft, and it is inclined from the periphery toward the opening, the intake port is disposed above the cylindrical portion, and the exhaust port is Arranged below the bottom, air in the cleaning chamber passes through the opening in the bottom and is exhausted from the exhaust port.

  Here, the predetermined gap is a gap that allows air to pass therethrough so that the air flow does not stagnate. That is, it is preferable to configure so that the peripheral portion of the bottom forming the opening and the rotating shaft do not come close to each other.

  According to this configuration, the high-humidity air in the cleaning chamber is discharged by the blower, and the object to be cleaned is dried in the process in which the air flowing in from above the cleaning chamber passes through the cleaning chamber and is discharged from below. The air flow from the cleaning chamber passes through the gap between the opening at the center of the bottom and the rotating shaft. At this time, the air passes through the lower surface of the object to be cleaned, and the entire object to be cleaned is efficiently dry. In addition, rotation of the object to be cleaned creates an air vortex around the object to be cleaned, and the object to be cleaned is drained and dried synergistically.

  Preferably, in the cleaning device, the object to be cleaned is held on the turntable via a jig, and a space is formed between the object to be cleaned and the turntable, and penetrates the turntable vertically. A notch is provided.

  Here, the jig refers to, for example, a columnar jig, a plate-shaped jig, a frame-shaped jig, or a columnar jig that holds the object to be cleaned from the lower surface. Any object may be used as long as a space is formed between the object to be cleaned without contacting the turntable. According to this configuration, since the space is provided between the object to be cleaned and the turntable, and the notch is provided in the turntable, air passes through this space, and the lower surface of the object to be cleaned is covered. It can be dried efficiently.

  Preferably, the cleaning device includes a gate that can open and close the drain port. According to this configuration, when the object to be cleaned is dried with air, the gate of the drain port is closed to prevent leakage of air from the drain port, and the air flow rate in the cleaning chamber is increased, and the degree of dryness is increased. Can be increased.

  Preferably, in the cleaning device, the cylindrical portion includes a first cylindrical portion that is divided and fixed in parallel with the rotation shaft, and a second cylindrical portion that is movable up and down.

  According to this configuration, the second cylinder part moves up and down, and attachment / detachment of the object to be cleaned to the cleaning chamber becomes easy. In addition, by dividing the cylindrical portion in parallel with the rotation axis without dividing it vertically, the vertical movement stroke can be shortened compared to the case where it is divided vertically, which contributes to the compactness of the entire cleaning apparatus.

  In the cleaning apparatus, the plurality of nozzles include a first nozzle group and a second nozzle group, the first nozzle group is attached to the first tube portion, and the second nozzle group is , Attached to the bottom. According to this configuration, the first nozzle group cleans the upper surface and side surface of the object to be cleaned from above, and the second nozzle group cleans the lower surface and side surface of the object to be cleaned from below. At this time, since the notch is provided in the turntable, the lower surface of the object to be cleaned can be efficiently cleaned. Moreover, since both the first nozzle group and the second nozzle group are attached to the fixed first tube portion and the bottom portion, attachment and wiring are easy.

  Preferably, in the cleaning apparatus, the first nozzle group and the second nozzle group are arranged substantially opposite to each other with the object to be cleaned interposed therebetween. According to this configuration, the object to be cleaned rotates, so that the entire object to be cleaned can be efficiently cleaned.

  In the cleaning apparatus, the plurality of nozzles include a first nozzle group, a second nozzle group, and a third nozzle group, and the first nozzle group, the second nozzle group, and the third nozzle. The group is attached to the first tube portion.

  Here, for example, the first nozzle group is attached to the upper side of the cylindrical portion and aimed at the upper surface of the object to be cleaned, the second nozzle group is attached to the center of the side surface and aimed at the side of the object to be cleaned, and the third nozzle group is the side surface. It is set as the structure which aims at the lower surface of a to-be-cleaned object attached below. If it does in this way, the whole to-be-cleaned object can be washed uniformly by these nozzle groups. Moreover, since these nozzle groups are all attached to the fixed first tube portion, attachment and wiring are easy.

  Preferably, in the cleaning device, the exhaust port and the blower are connected via a duct, and further include a gas-liquid separation filter that separates air and liquid between the exhaust port and the blower. According to this structure, when the mist contained in the air which comes out from an exhaust port or the liquid is discharged | emitted from an exhaust port, it can isolate | separate into air and a liquid with a gas-liquid separation filter.

  In the cleaning device, the blower and the air inlet may be connected, and air discharged from the blower may be circulated into the cleaning chamber. According to this configuration, the air discharged from the blower can be reused, a compressor is not essential, and the object to be cleaned using air can be dried, contributing to energy saving.

  As described above, according to the cleaning device of the present invention, the object to be cleaned can be drained and dried effectively by the rotation of the object and air.

It is a figure which shows schematic structure of the washing | cleaning apparatus which concerns on one Embodiment of this invention. FIG. 2 is a view in the vicinity of a cleaning chamber in FIG. 1. It is the figure which looked at the washing room vicinity in FIG. 1 from the upper surface. It is explanatory drawing 1 which shows arrangement | positioning of a nozzle. It is explanatory drawing 2 which shows arrangement | positioning of a nozzle. It is a figure which shows schematic structure of the modification of the washing | cleaning apparatus. It is a schematic diagram 1 of the washing | cleaning apparatus which concerns on one Embodiment of this invention. It is the schematic diagram 2 of the washing | cleaning apparatus which concerns on one Embodiment of this invention. It is a figure which shows schematic structure of the washing | cleaning apparatus which concerns on one Embodiment of this invention. It is explanatory drawing 1 which shows arrangement | positioning of a nozzle. It is explanatory drawing 2 which shows arrangement | positioning of a nozzle (arrow view A). It is explanatory drawing 2 which shows arrangement | positioning of a nozzle (arrow view B). It is explanatory drawing 2 which shows arrangement | positioning of a nozzle (arrow C figure).

  Hereinafter, although the embodiment concerning the present invention is described based on a drawing, the present invention is not limited to the following embodiment. In particular, the number and arrangement of nozzles in the following embodiment, the shape of each member, and the like are examples, and the present invention is not limited to the following.

<First Embodiment>
(1. Structure of the cleaning device)
FIG. 1 is a diagram showing a schematic configuration of a cleaning apparatus according to an embodiment of the present invention. As shown in FIG. 1, the cleaning apparatus 1 includes a frame 2, a control panel 3, a vessel filter 4, a cleaning liquid pump 5, an oil skimmer 6, a cleaning liquid heater 7, a cleaning liquid tank 8, an operation panel 9, and a cleaning chamber 10. Is attached.

  FIG. 2 is an enlarged view of the vicinity of the cleaning chamber. FIG. 3 is a view of the vicinity of the cleaning chamber as viewed from above. As shown in FIGS. 2 and 3, the cleaning chamber 10 includes a lower bottom portion 11 and a bottomed cylindrical tube portion 12 whose upper portion is covered. The bottom portion 11 is circular in plan view, has a circular opening 11a at the center, and is inclined downward from the periphery toward the opening 11a. The cylindrical portion 12 includes a cylindrical side surface portion 12a and a conical ceiling portion 12b on the upper side, and the lower side is open.

  Moreover, the cylinder part 12 is vertically divided in the circumferential direction, and includes a first cylinder part 12A and a second cylinder part 12B. The second cylinder portion 12B moves up and down by the cylinder 13. When attaching / detaching the workpiece W to / from the cleaning chamber, the second cylinder portion 12B is raised, and when the article W to be cleaned is washed or drained, the second cylinder portion 12B is lowered. In addition, the 2nd cylinder part 12B has a resin-like transparent part, and the mode in a washing room can be seen from there.

  The first cylinder portion 12A is fixed, and an air inlet 14 is provided above the first cylinder portion 12A. An intake filter 16 is connected to the intake port 14 via an intake duct 15 and takes in outside air.

  A plurality of nozzles 17 are attached to the first cylinder portion 12A at predetermined intervals (see FIG. 4). As an example, the plurality of nozzles 17 of the present embodiment uses nozzles that eject cleaning liquid, but two-fluid nozzles that inject cleaning liquid and air may be used. Moreover, you may add the air nozzle which injects air. In the present embodiment, the plurality of nozzles 17 are collectively referred to as a first nozzle group 17A.

  A plurality of nozzles 18 are attached to the bottom portion 11 with a predetermined interval (see FIG. 5). As an example, the plurality of nozzles 18 of the present embodiment uses nozzles that eject cleaning liquid, but two-fluid nozzles that inject cleaning liquid and air may also be used. Moreover, you may add the air nozzle which injects air. In the present embodiment, the plurality of nozzles 18 are collectively referred to as a second nozzle group 18A.

  Further, the first nozzle group 17A and the second nozzle group 18A are disposed so as to be substantially opposed to each other via the object to be cleaned W (see FIGS. 2 and 3). As a result, the cleaning liquid is sprayed obliquely above and below the object to be cleaned W, so that if the object to be cleaned W rotates, the entire object to be cleaned W is efficiently cleaned.

  On the other hand, below the cleaning chamber 10, a base 19, and a cylindrical side wall 20 having substantially the same diameter as the cylindrical portion 12, to which the base 19 and the periphery of the bottom portion 11 are fixed, are provided. An exhaust port 21 for discharging air and a drain port 22 for discharging a liquid such as a cleaning liquid are attached to the side wall 20. The drain port 22 is provided below the exhaust port 21, and the drain port 22 is provided with an open / close gate 23. Drainage from the drainage port 22 passes through a filter that removes foreign matter (not shown) and is stored in the tank 8.

  The exhaust port 21 is connected to a blower 26 via an exhaust duct 24 and a cyclone filter 25. The blower 26 sucks and exhausts the air in the cleaning chamber.

  The cyclone filter 25 is a gas-liquid separation filter, and separates into air and liquid when mist contained in the air discharged from the exhaust port 21 or liquid is discharged from the exhaust port 21. The exhaust port of the cyclone filter 25 and the blower 26 are connected, and the waste water from the drain port of the cyclone filter 25 is stored in the tank 8.

  Further, the exhaust from the blower 26 may be discharged to the outside as it is, or may be circulated into the cleaning chamber by connecting the blower 26 and the intake port 14 via the intake duct 15 (see FIG. 6). .

  On the other hand, a circular opening is formed in the center of the base 19, and the rotating shaft 27 is inserted through this opening. The rotary shaft 27 has a lower portion connected to a motor 28 that rotates the rotary shaft 27, and an upper portion inserted through the opening 11 a of the bottom portion 11 and connected to a turntable 29 in the cleaning chamber. The turntable 29 is rotated by the rotation of the motor 28.

  The turntable 29 is a substantially circular table, and has four notches 29a penetrating vertically. The cleaning liquid can be applied to the lower surface of the object to be cleaned W when the cleaning liquid is ejected from the nozzle 18 by the notch 29a.

  Further, four columnar jigs 30 are erected on the upper surface of the turntable 29. The four jigs 30 are arranged at intervals in the circumferential direction and hold the article W to be cleaned. The jig 30 has a columnar rectangular parallelepiped shape, and a part of the jig 30 is notched and is stepped. Due to the step, a space is formed between the object to be cleaned W and the turntable 29 when the object to be cleaned W is held by the jig 30. With this space, the cleaning liquid hits the lower surface of the object to be cleaned W, and air passes through to efficiently dry the object to be cleaned W.

  Note that the shape of the jig 30 is an example, and may be, for example, a single column standing from the center of the turntable 29. If a space is formed between the workpiece W and the turntable 29, the other The shape may be acceptable.

(2. About washing and drying process)
Next, the cleaning / drying process of the article to be cleaned W using the cleaning apparatus 1 will be described. As an example, a case where the article to be cleaned W has a rectangular parallelepiped shape will be described.

(2-1. Cleaning step)
The object to be cleaned W is set in the cleaning device 1. The second cylindrical portion 12B is moved upward, and the object to be cleaned W is attached to the jig 30 of the turntable 29 with the cleaning chamber exposed. Then, the second cylinder portion 12B is moved downward to close the cleaning chamber.

  The motor 28 is operated to rotate the turntable 29 and the cleaning liquid is ejected from the nozzles 17 and 18. As a result, the entire apparatus to be cleaned W is cleaned with the cleaning liquid while rotating together with the turntable 29. At this time, the open / close gate 23 of the drain port 22 is kept open. The sprayed cleaning liquid passes through the opening 11 a of the bottom 11 and is drained from the drain port 22. FIG. 7 shows the flow of the cleaning liquid.

  When the object to be cleaned W is cleaned for a predetermined time, the nozzle 17 and the nozzle 18 are stopped from spraying and the rotation of the turntable 29 is stopped.

(2-2. Drying step)
After confirming that the cleaning liquid has been drained, the open / close gate 23 is closed. This is to increase the speed of air passing through the cleaning chamber. Next, the motor 28 is operated again to rotate the turntable 29 at a high speed, and the blower 26 is operated. Then, the highly humid air in the cleaning chamber after cleaning passes through the exhaust port 21, the exhaust duct 24 and the cyclone filter 25 and is exhausted from the blower 26. In the cyclone filter 25, moisture is discharged to the tank 8.

  When the air in the cleaning chamber is exhausted, the outside air continuously flows into the cleaning chamber from the intake port 14 through the intake filter 16 and the intake duct 15. In the process of flowing from the upper side to the lower side of the cleaning chamber 10, the air dries the object W, passes through the opening 11 a of the bottom 11, and is exhausted from the exhaust port 21.

  With reference to FIG. 8, the flow of this air will be specifically described. A part of the air that flows in from the intake port 14 above the cleaning chamber 10 hits the upper surface of the object to be cleaned W, and a part of the air flows around the object to be cleaned W. At this time, since the article to be cleaned W rotates at a high speed together with the turntable 29, a circumferential flow can be generated around the article to be cleaned W. Thereby, a large amount of air flowing at high speed on the side surface of the article W to be cleaned hits, and drying is promoted.

  In addition, since there is a space between the rotating table 29 under the object to be cleaned W, air enters the space and the lower surface of the object to be cleaned W is also dried.

  And the air which passed the to-be-cleaned object W and the circumference | surroundings of the turntable 29 hits the bottom part 11, and flows to the center along the slope of the bottom part 11 toward the opening 11a. At this time, air vortices are formed below the turntable 29, which further promotes drying of the lower surface of the object W to be cleaned.

  And it goes out of the cleaning chamber 10 from the opening 11a. At this time, since the air passes through the gap between the opening 11a and the rotating shaft 27, the flow velocity is high, and the flow velocity of the air flowing through the cleaning chamber is also faster than when the bottom portion 11 having the opening 11a is not provided. Thereby, the dryness of the to-be-cleaned object W becomes high.

  The air leaving the opening 11 a passes through the exhaust port 21, the exhaust duct 24, and the cyclone filter 25 and is exhausted from the blower 26.

  After the object to be cleaned W is drained and dried for a predetermined time, the rotation of the blower 26 and the turntable 29 is stopped. And the 2nd cylinder part 12B is moved upwards, the washing chamber is exposed, and the to-be-cleaned object W is removed. Thus, the cleaning and drying of the workpiece W is completed.

(2-3. Modifications)
Moreover, when using the washing | cleaning apparatus which added the air nozzle which injects air to the some nozzle 17 and the nozzle 18 in a drying process, air is injected from an air nozzle and the drying of the to-be-cleaned object W is accelerated | stimulated.

  Further, when the cleaning device 40 having the configuration in which the blower 26 and the intake port 14 are connected via the intake duct 15 shown in FIG. 6, in the drying process, the air exhausted from the blower 26 is circulated in the cleaning chamber, This air is reused for drying.

(3. Effects of the present embodiment)
According to the cleaning apparatus 1 having the above structure, the object to be cleaned W can be cleaned and dried with a single cleaning apparatus. Further, the plurality of nozzles 17 and the plurality of nozzles 18 for injecting the cleaning liquid are disposed so as to be substantially opposed to the object to be cleaned W so as to aim the object to be cleaned W from diagonally above and diagonally below, and Since the object to be cleaned W is cleaned while being rotated horizontally, the entire object to be cleaned W can be efficiently cleaned.

  In addition, since the outside air is taken into the cleaning chamber by the blower 26 and the rotating table 29 is rotated to rotate the object to be cleaned W, an air flow is generated around the object to be cleaned W, and the upper surface of the object to be cleaned W is And the side is drained and dried efficiently. Further, since the object to be cleaned W is held on the turntable 29 via the jig 30, a space is formed between the object to be cleaned W and the turntable 29, and air flows into the space below the object to be cleaned W. Then, the lower surface of the workpiece W is dried. As a result, the entire object to be cleaned W is efficiently drained and dried.

  Further, since the opening 11a is provided at the center of the bottom 11 of the cleaning chamber 10, the air in the cleaning chamber is guided from the periphery of the side surface of the object to be cleaned W to the center below, and the air vortex flows on the lower surface of the object to be cleaned W. Moreover, since the notch 29a is formed in the turntable 29, the lower surface of the article W to be cleaned is dried with air.

  In addition, a gap is formed between the opening 11a of the bottom 11 and the rotating shaft 27 so that they are not close to each other and air can pass therethrough and the flow is not delayed. The flow rate of the air becomes faster, and the dryness of the object W to be cleaned is improved. In addition, since the open / close gate 23 is provided at the drain port 22, closing the open / close gate 23 in the drying process increases the sealing degree in the cleaning chamber, thereby increasing the air flow rate and improving the dryness of the object W to be cleaned. To do.

Second Embodiment
Next, a cleaning device according to a second embodiment having a different configuration from the cleaning device according to the first embodiment will be described. In addition, the same code | symbol is attached | subjected about the structure same as 1st Embodiment, or the corresponding structure, and the overlapping description is abbreviate | omitted. The main differences between the cleaning device 100 of the second embodiment and the cleaning device 1 of the first embodiment are the shape of the cylindrical portion of the cleaning device, the arrangement of the nozzles, the arrangement of the intake ports, and the presence or absence of a cyclone filter.

  FIG. 9 is a diagram illustrating a schematic configuration of the cleaning apparatus 100 according to the second embodiment. FIG. 10 is an explanatory view showing the nozzle arrangement of the cleaning apparatus 100. 11A to 11C are arrow views showing the nozzle arrangement of the cleaning device 100, and correspond to the arrow symbols in FIG.

  As shown in FIG. 9, the cleaning apparatus 100 includes a cleaning chamber 110. The cleaning chamber 100 includes a lower bottom portion 111 and a bottomed cylindrical tube portion 112 covered on the upper side. The bottom 111 is circular in plan view, has a circular opening 111a at the center, and is inclined downward from the periphery toward the opening 111a. The cylindrical portion 112 includes a cylindrical side surface portion and a flat plate-shaped ceiling portion above, and the lower portion is open.

  Moreover, the cylinder part 112 is divided | segmented vertically in the circumferential direction, and is provided with the 1st cylinder part 112A and the 2nd cylinder part 112B. Here, the side surface portion of the first tube portion 112A is referred to as a side surface portion 112Aa, and the ceiling portion is referred to as a ceiling portion 112Ab. The side surface portion of the second tube portion 112B is a side surface portion 112Ba, and the ceiling portion is a ceiling portion 112Bb.

  The second cylinder portion 112 </ b> B moves up and down by the cylinder 13. The first cylinder portion 112A is fixed, and the air inlet 14 is provided in the ceiling portion 112Ab above the first cylinder portion 112A. An intake filter 16 is connected to the intake port 14 via an intake duct 15 and takes in outside air.

  A plurality of nozzles 117 are attached to the side surface portion 112Aa of the first cylinder portion 112A, and a plurality of nozzles 118 are attached to the lower side and the upper side (see FIGS. 9 and 10). In the present embodiment, the plurality of nozzles 117 are collectively referred to as a first nozzle group 117A, the plurality of lower nozzles 118 are collectively referred to as a second nozzle group 118A, and the plurality of upper nozzles 118 are collectively referred to as a third nozzle group 118B.

  The injection port of each nozzle 117 of the nozzle group 117A is disposed so as to be directed toward the center in the radial direction (see FIGS. 9 and 11B). Each nozzle 118 of the lower nozzle group 118A extends laterally toward the substantial center in the radial direction, and is inclined downward so that the nozzle at the tip is directed toward the substantial center of the turntable 29 (see FIGS. 9 and 11A). ). Further, each nozzle 118 of the upper nozzle group 118B extends toward the approximate center in the radial direction, and is inclined upward so that the nozzle at the tip is directed toward the approximate center of the turntable 29 (see FIGS. 9 and 11C). ).

  Each nozzle 117 in the nozzle group 117A cleans the side surface of the object W to be cleaned, each nozzle 118 in the nozzle group 118A cleans the lower surface of the object to be cleaned W, and each nozzle 118 in the nozzle group 118B cleans the upper surface of the object to be cleaned. Wash. Thereby, if the article to be cleaned W rotates, the entire article to be cleaned W is efficiently cleaned.

  On the other hand, below the cleaning chamber 110, there are provided a base 19 and a cylindrical side wall 20 having the same diameter as the cylindrical portion 112, to which the base 19 and the periphery of the bottom 111 are fixed. An exhaust port 21 for discharging air and a drain port 22 for discharging a liquid such as a cleaning liquid are attached to the side wall 20. The exhaust port 21 is connected to the blower 26 via the exhaust duct 24. The blower 26 sucks and exhausts the air in the cleaning chamber.

  Thus, the blower 26 takes in outside air from above in the cleaning chamber and discharges air from the lower exhaust port 21, and rotates the rotating table 29 to rotate the object W to be cleaned. An air flow is created around the surface, and the top and side surfaces of the object to be cleaned W are efficiently drained and dried.

<Other embodiments>
As described above, the preferred embodiments of the present invention have been described with reference to the drawings, but various additions, modifications, or deletions can be made without departing from the spirit of the present invention. For example, the cleaning chamber is not limited to a cylindrical shape, and may be a cylindrical shape. The nozzle is not limited to the nozzle that ejects the cleaning liquid, and may be a two-fluid nozzle that ejects the cleaning liquid and air. Moreover, you may add the air nozzle which injects air. Therefore, such a thing is also included in the scope of the present invention.

DESCRIPTION OF SYMBOLS 1 Cleaning apparatus 2 Frame 3 Control panel 4 Vessel filter 5 Pump 6 Oil skimmer 7 Heater 8 Tank 9 Operation panel 10 Cleaning room 11 Bottom part 11a Opening 12 Cylinder part 12a Side face part 12b Ceiling part 12A 1st cylinder part 12B 2nd cylinder part 13 Cylinder 14 Intake port 15 Intake duct 16 Intake filter 17 Nozzle 17A First nozzle group 18 Nozzle 18A Second nozzle group 19 Base 20 Side wall 21 Exhaust port 22 Drain port 23 Open / close gate 24 Exhaust duct 25 Cyclone filter 26 Blower 27 Rotating shaft 28 Motor 29 Turntable 29a Notch 30 Jig 40 Cleaning device 100 Cleaning device 110 Cleaning chamber 111 Bottom portion 111a Opening 112 Tube portion 112A First tube portion 112Aa Side surface portion 112Ab Ceiling portion 112B Second tube portion 112Ba Side surface portion 112Bb Ceiling portion 117 Nozzle 117A 1st Nozzle group 118 Nozzle 118A Second nozzle group 118B Third nozzle group W Object to be cleaned

Claims (10)

A cleaning device for cleaning an object to be cleaned,
A cylindrical cleaning chamber;
A turntable disposed in the cleaning chamber and holding an object to be cleaned;
A rotation mechanism for rotating the turntable;
A rotating shaft disposed between the rotating table and the rotating mechanism;
An air inlet for sending air into the cleaning chamber;
An exhaust vent for exhausting air;
A blower connected to the exhaust port;
Multiple nozzles,
A drain outlet for discharging the cleaning liquid;
Comprising
Cleaning device. The cleaning chamber includes a bottom portion, and a bottomed cylindrical tube portion whose upper portion is covered,
The bottom is arranged below the turntable, the center is open and has a predetermined gap between the opening and the rotation shaft, and is inclined from the periphery toward the opening.
The intake port is disposed above the cylindrical portion,
The exhaust port is disposed below the bottom,
The air in the cleaning chamber passes through the opening in the bottom and is exhausted from the exhaust port.
The cleaning apparatus according to claim 1. The object to be cleaned is held on the turntable via a jig,
A space is formed between the object to be cleaned and the turntable,
The turntable is provided with a notch penetrating vertically.
The cleaning apparatus according to claim 2. The drain has a gate that can be opened and closed,
The cleaning apparatus according to claim 2 or 3. The cylindrical portion includes a first cylindrical portion that is divided and fixed in parallel with the rotation shaft, and a second cylindrical portion that is movable up and down.
The cleaning apparatus according to any one of claims 2 to 4. The plurality of nozzles includes a first nozzle group and a second nozzle group,
The first nozzle group is attached to the first tube portion,
The second nozzle group is attached to the bottom.
The cleaning apparatus according to claim 5. The first nozzle group and the second nozzle group are disposed substantially opposite to each other via the object to be cleaned.
The cleaning apparatus according to claim 6. The plurality of nozzles includes a first nozzle group, a second nozzle group, and a third nozzle group,
The first nozzle group, the second nozzle group, and the third nozzle group are attached to the first tube portion,
The cleaning apparatus according to claim 5. The exhaust port and the blower are connected via a duct,
A gas-liquid separation filter that separates air and liquid between the exhaust port and the blower;
The cleaning apparatus according to any one of claims 2 to 8. The blower and the intake port are connected,
The air discharged from the blower is circulated in the cleaning chamber.
The cleaning apparatus according to any one of claims 2 to 9.

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