JP2012020250A - Washing apparatus - Google Patents

Washing apparatus Download PDF

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JP2012020250A
JP2012020250A JP2010161229A JP2010161229A JP2012020250A JP 2012020250 A JP2012020250 A JP 2012020250A JP 2010161229 A JP2010161229 A JP 2010161229A JP 2010161229 A JP2010161229 A JP 2010161229A JP 2012020250 A JP2012020250 A JP 2012020250A
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cleaning
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cylindrical container
nozzle
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JP5744428B2 (en
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Chikara Moriai
主税 森合
Shigehiro Matsumura
繁廣 松村
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MORIAI SEIKI KK
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Abstract

PROBLEM TO BE SOLVED: To provide a washing apparatus which can obtain sufficient washing effect and perform in-liquid washing and in-gas washing even when the number of washing nozzles is less.SOLUTION: The washing apparatus 1 includes a base 3 which holds an object 10 to be cleaned and is rotatable in a horizontal face by a rotating drive apparatus, a cup 4 which has a size surrounded the base 3 and the object 10 to be cleaned from above and being movable up and down by an elevating drive apparatus, and washing nozzles 5 which are fixed to a side face of the cup 4. At least one of the rotational speed of the base 3 and the elevating speed of the cup 4 is adjustable.

Description

本発明は、被洗浄物、たとえば機械加工部品や機械加工製品(金属製、樹脂製など)、の表面に付着する金属屑片や樹脂屑片、ガラス粉、有機性油脂分などの残留付着物(以下、残留異物ともいう)を、洗浄ノズルから流体を噴射して洗い流すための洗浄装置に関し、特に、複雑な内部構造を有する被洗浄物の洗浄に適した洗浄装置に関する。   The present invention relates to residual deposits such as metal scraps and resin scraps, glass powder, organic oils and fats adhering to the surface of an object to be cleaned, such as machined parts and machined products (made of metal, resin, etc.) More particularly, the present invention relates to a cleaning device suitable for cleaning an object to be cleaned having a complicated internal structure.

従来、たとえば穴が回路状に形成されているような、複雑な内部構造を有する被洗浄物を洗浄する場合、その内部の残留異物を確実に除去するために、穴の入口に向けて洗浄ノズルの位置や角度等を調整して、洗浄液を被洗浄物の奥まで送り込めるようにして洗浄を行っていた。そのような、洗浄ノズルを自由に移動できる洗浄装置として特許文献1に開示のものがある。   Conventionally, when cleaning an object to be cleaned having a complicated internal structure, for example, a hole is formed in a circuit shape, a cleaning nozzle is directed toward the inlet of the hole in order to reliably remove the residual foreign matter inside the object. Cleaning was performed by adjusting the position, angle, etc., so that the cleaning liquid could be fed deep into the object to be cleaned. As such a cleaning apparatus that can freely move the cleaning nozzle, there is one disclosed in Patent Document 1.

一方、特許文献2のように、被洗浄物を載せる基台の上に筒体を被せ、多数の洗浄ノズルが配置された洗浄ノズル部材を筒体の内部で回転させながら洗浄液を噴射する洗浄装置もある。   On the other hand, as in Patent Document 2, a cleaning device that covers a cylindrical body on a base on which an object to be cleaned is placed and injects a cleaning liquid while rotating a cleaning nozzle member in which a large number of cleaning nozzles are arranged inside the cylindrical body There is also.

特開2009−275265号公報JP 2009-275265 A 特開2006−122811号公報JP 2006-122811 A

構造が複雑な被洗浄物の場合、従来の洗浄装置においては、洗浄ノズルが20〜30本必要になることがある。また、特許文献1の洗浄装置のように、自由にノズルの位置を変えて洗浄する場合、被洗浄物の形状(穴の位置)に応じて、20〜30本もの洗浄ノズルの1本1本について位置と角度を調整しなければならない。被洗浄物の構造が異なれば、それぞれの被洗浄物ごとに、この作業を行うことになる。したがって、洗浄ノズルの位置や角度の調整は、作業者の熟練が必要であるばかりでなく、非効率的で、しかも一定の洗浄効果があげられないという課題があった。   In the case of an object to be cleaned having a complicated structure, 20 to 30 cleaning nozzles may be required in a conventional cleaning apparatus. Further, when cleaning is performed by freely changing the position of the nozzle as in the cleaning device of Patent Document 1, each of as many as 20 to 30 cleaning nozzles depending on the shape of the object to be cleaned (the position of the hole). About the position and angle must be adjusted. If the structures of the objects to be cleaned are different, this operation is performed for each object to be cleaned. Therefore, adjustment of the position and angle of the cleaning nozzle not only requires the skill of the operator, but is also inefficient, and there is a problem that a certain cleaning effect cannot be achieved.

また、特許文献2の洗浄装置では、筒体内部で回転する洗浄ノズル部材に配置された多数の洗浄ノズルは、位置や角度の調整が不要であるが、1つの洗浄ノズルから噴射される洗浄液は、何回転しても被洗浄物上の同一線上にしか当たらない。したがって、被洗浄物の構造によっては、必要な箇所に洗浄液が十分に噴射されない可能性がある。一方で、それを避けるために洗浄ノズルの本数を増やせば、洗浄液の圧力が低下するか、圧力を維持するために大型ポンプが導入されることになり、設備コストや運転コストの高騰を招きかねない。   Further, in the cleaning device of Patent Document 2, it is not necessary to adjust the position and angle of a large number of cleaning nozzles arranged on the cleaning nozzle member rotating inside the cylinder, but the cleaning liquid ejected from one cleaning nozzle is No matter how many rotations it hits the same line on the object to be cleaned. Therefore, depending on the structure of the object to be cleaned, there is a possibility that the cleaning liquid is not sufficiently jetted to a necessary portion. On the other hand, if the number of cleaning nozzles is increased to avoid this, the pressure of the cleaning liquid will decrease, or a large pump will be introduced to maintain the pressure, which may lead to a rise in equipment costs and operating costs. Absent.

本発明は上述の点に鑑みてなされたもので、位置や角度調整の不要な、わずかな本数の洗浄ノズルで、さまざまな内部構造の被洗浄物を効果的に洗浄できる洗浄装置を提供することを目的とする。   The present invention has been made in view of the above points, and provides a cleaning apparatus that can effectively clean an object to be cleaned with various internal structures with a small number of cleaning nozzles that do not require position and angle adjustment. With the goal.

上記の課題を解決するために本発明に係る洗浄装置は、被洗浄物を、洗浄ノズルから噴射した洗浄流体により洗浄するための洗浄装置であって、
被洗浄物を保持し、回転駆動装置により水平面内で回転可能な基台と、前記基台と前記被洗浄物とを上方から囲む大きさを有し、昇降駆動装置により昇降可能な筒体または筒状容器と、前記筒体または筒状容器の側面に、その内部に向けて固定された洗浄ノズルとを備え、前記基台の周縁部と前記筒体または筒状容器の側面内壁との間に隙間を有し、前記筒体または筒状容器が所定の振幅で昇降運動可能であるとともに、前記基台の回転速度と前記筒体または筒状容器の昇降速度のうち少なくともいずれか一方が、調整可能であることを特徴とする。
In order to solve the above problems, a cleaning apparatus according to the present invention is a cleaning apparatus for cleaning an object to be cleaned with a cleaning fluid ejected from a cleaning nozzle,
A cylinder that holds an object to be cleaned and has a size that surrounds the base and the object to be cleaned from above, and a cylinder that can be moved up and down by an elevating drive, A cylindrical container, and a cleaning nozzle fixed toward the inside of the cylindrical body or the side surface of the cylindrical container, and between the peripheral portion of the base and the side wall of the cylindrical body or the cylindrical container And the cylinder or the cylindrical container can move up and down with a predetermined amplitude, and at least one of the rotational speed of the base and the vertical speed of the cylinder or cylindrical container is: It is adjustable.

ここで、「筒体または筒状容器」とは、「筒状容器」が筒の両端部のうち基台部側(下方)が開口し、上方が開口していないものをいい、「筒体」が筒の両端部がともに開口しているものをいう。   Here, the “cylindrical container or cylindrical container” refers to a “cylindrical container” in which both ends of the cylinder are open on the base side (lower side) and not open on the upper side. "" Means that both ends of the cylinder are open.

この構成によれば、基台の回転と、洗浄ノズルが固定された筒体または筒状容器の昇降運動とを同時に行うことができる。その結果、被洗浄物が洗浄ノズルから受ける洗浄流体(水などの洗浄液体やエア、もしくはこれらの混合流体など)の噴射は、上下に所定の振幅Wで振動する波状のノズル噴射パターンを描くことになる(例えば、図4及び図5参照)。   According to this configuration, it is possible to simultaneously perform the rotation of the base and the up-and-down movement of the cylindrical body or cylindrical container to which the cleaning nozzle is fixed. As a result, the cleaning fluid (cleaning liquid such as water, air, or a mixed fluid thereof) received by the object to be cleaned from the cleaning nozzle draws a wavy nozzle injection pattern that vibrates with a predetermined amplitude W up and down. (See, for example, FIGS. 4 and 5).

したがって、わずかな数の洗浄ノズルであっても、被洗浄物の全体を洗浄することが可能となる。基台が回転して2周目に入ったときに、ノズル噴射パターンが1周目のものと重ならないように基台の回転速度と筒状容器の昇降速度のうち少なくともいずれかの設定を調整すれば、基台が回転を繰り返すうちに洗浄流体の当たる位置が少しずつずれていくので、1周目に洗浄流体が当たらなかった部分があったとしても、最終的には被洗浄物の全表面に洗浄流体の噴射が当たることになる。そのため、本発明の洗浄装置は、被洗浄物ごとに構造が異なっていても、洗浄ノズルの位置や角度の厳密な調整が不要で、少ない洗浄ノズルで効率的な洗浄が行える。また、速度(基台の回転速度、筒状容器の昇降速度)という数値でノズル噴射パターンを確定できるため、洗浄ノズルからの洗浄流体の当たり方に関して再現性があり、作業者が熟練したスキルを身につけていなくても安定して高精度の洗浄効果を得ることができる。   Therefore, the entire object to be cleaned can be cleaned even with a small number of cleaning nozzles. Adjust the setting of at least one of the rotation speed of the base and the lifting speed of the cylindrical container so that the nozzle injection pattern does not overlap with that of the first round when the base rotates and enters the second round Then, as the base repeats rotating, the position where the cleaning fluid hits gradually shifts, so even if there is a part where the cleaning fluid did not hit on the first round, the whole object to be cleaned The cleaning fluid is sprayed on the surface. Therefore, the cleaning apparatus of the present invention does not require strict adjustment of the position and angle of the cleaning nozzle even if the structure is different for each object to be cleaned, and can perform efficient cleaning with a small number of cleaning nozzles. In addition, since the nozzle injection pattern can be determined by numerical values such as speed (rotation speed of the base, lifting speed of the cylindrical container), it is reproducible with respect to how the cleaning fluid hits the cleaning nozzle, and the skill of the operator Even if it is not worn, it is possible to stably obtain a highly accurate cleaning effect.

さらに、本発明の洗浄装置は、筒体または筒状容器が基台を被いながら昇降運動するように構成されているので、洗浄ノズルから噴射される洗浄液体の量に対して、筒体または筒状容器と基台との隙間が流出する洗浄液体の量よりも大きくなる設定とすれば、表面がなめらかな被洗浄物の洗浄に適した気中洗浄となり、
反対に、洗浄ノズルから噴射される洗浄液体の量に対して、筒体または筒状容器と基台との隙間が流出する洗浄液体の量より小さくなる設定とすれば、次第に洗浄液体が筒体または筒状容器内に溜まり、複雑な内部構造を有する被洗浄物の洗浄に適した液中(浸漬)洗浄が行える。
Furthermore, the cleaning device of the present invention is configured to move up and down while the cylindrical body or cylindrical container covers the base, so that the cylindrical body or the amount of cleaning liquid ejected from the cleaning nozzle can be reduced. If the setting is such that the gap between the cylindrical container and the base is larger than the amount of the cleaning liquid that flows out, it will be an air cleaning suitable for cleaning the object to be cleaned with a smooth surface.
On the other hand, if the amount of the cleaning liquid ejected from the cleaning nozzle is set to be smaller than the amount of the cleaning liquid flowing out of the gap between the cylindrical body or the cylindrical container and the base, the cleaning liquid gradually becomes cylindrical. Alternatively, it is possible to perform cleaning (immersion) in a liquid suitable for cleaning an object to be cleaned that has accumulated in a cylindrical container and has a complicated internal structure.

以上述べたように、この洗浄装置は、多様な被洗浄物に対して、高いレベルで一定の効果を示す洗浄を効率的に行える利点がある。   As described above, this cleaning apparatus has an advantage that various types of objects to be cleaned can be efficiently cleaned at a high level and exhibit a certain effect.

請求項2に係る洗浄装置においては、前記洗浄ノズルが少なくとも2個であり、高さ方向に等間隔に配置されている。   In the cleaning apparatus according to a second aspect of the present invention, at least two cleaning nozzles are disposed at equal intervals in the height direction.

この構成によれば、被洗浄物を、それぞれの洗浄ノズルがその高さに応じて分担するように洗浄することになるため、洗浄ノズルの本数が1個の場合に比べて、筒体または筒状容器の上下往復運動の振幅を小さくすることができ、洗浄時間が短縮される。   According to this configuration, since the object to be cleaned is cleaned so that each cleaning nozzle is assigned according to its height, the cylindrical body or the cylinder is compared with the case where the number of cleaning nozzles is one. The amplitude of the vertical reciprocating motion of the container can be reduced, and the cleaning time is shortened.

一例として、図5(a)の洗浄装置のように2個の洗浄ノズルを、80mmずつ高さを変えて配置し、高さ150mm、直径200mmの円柱状の被洗浄物に向けて、上下の振幅Wを85mmとして筒状容器を昇降運動させながら洗浄流体を噴射した場合、被洗浄物に当たる洗浄流体の位置は、例えば、図5(b)の展開図において2本の線が描くノズル噴射パターンになる。この時、洗浄ノズル151は、90°における高さ0mmの1箇所、270°における高さ80mmに1箇所にそれぞれ設けている(図中の破線の丸印)。また、ノズル噴射パターンの実線部分は、各洗浄ノズルからの流体が1周目に当たる位置を示し、破線部分は、2周目に当たる位置を示している。なお、図5(b)においては、基台の回転速度を7.5rpm、筒状容器の昇降速度を145.9mm/sec、上下の振幅Wを85mmとして筒状容器を昇降運動させながら洗浄流体を噴射した場合のノズル噴射パターンである。   As an example, two cleaning nozzles are arranged with a height of 80 mm each, as in the cleaning apparatus of FIG. 5A, and the top and bottom are directed toward a cylindrical object to be cleaned having a height of 150 mm and a diameter of 200 mm. When the cleaning fluid is ejected while moving the cylindrical container up and down with an amplitude W of 85 mm, the position of the cleaning fluid that hits the object to be cleaned is, for example, a nozzle ejection pattern drawn by two lines in the developed view of FIG. become. At this time, the cleaning nozzle 151 is provided at one place at a height of 0 mm at 90 ° and at one place at a height of 80 mm at 270 ° (dotted circles in the figure). The solid line portion of the nozzle ejection pattern indicates the position where the fluid from each cleaning nozzle hits the first round, and the broken line portion shows the position where the fluid hits the second round. In FIG. 5B, the cleaning fluid is moved while the cylindrical container is moved up and down while the rotational speed of the base is 7.5 rpm, the vertical speed of the cylindrical container is 145.9 mm / sec, and the vertical amplitude W is 85 mm. It is a nozzle injection pattern when.

さらに一例として、図1に示すように、3個の洗浄ノズルを50mmずつ高さを変えて配置し、上下の振幅Wを68mmとして筒状容器を昇降運動させながら洗浄流体を噴射した場合の被洗浄物に当たる洗浄流体の位置を図4(a)〜(c)に示す。これら各展開図における3本の線が、ノズル噴射パターンである。   Further, as an example, as shown in FIG. 1, three cleaning nozzles are arranged with a height of 50 mm each, and when the cleaning fluid is ejected while moving the cylindrical container up and down with an upper and lower amplitude W of 68 mm, 4A to 4C show the position of the cleaning fluid that hits the cleaning object. The three lines in each development view are nozzle ejection patterns.

なお、この時の基台の回転速度と筒状容器の昇降速度との値は、(基台の回転速度、筒状容器の昇降速度)=((a):4.5rpm,145.9mm/sec)、((b)7.5rpm,145.9mm/sec)、((c):4.5rpm,38.9mm/sec)と設定している。洗浄ノズルは、90°における高さ0mmと100mmの2箇所、270°における高さ50mmに1箇所、それぞれ設けている(図中の破線の丸印)。また、ノズル噴射パターンの実線部分は、各洗浄ノズルからの流体が1周目に当たる位置を示し、破線部分は2周目に当たる位置を示している。   At this time, the values of the rotational speed of the base and the lifting speed of the cylindrical container are (rotating speed of the base, lifting speed of the cylindrical container) = ((a): 4.5 rpm, 145.9 mm / sec), ((b) 7.5 rpm, 145.9 mm / sec), ((c): 4.5 rpm, 38.9 mm / sec). The cleaning nozzle is provided at two locations of 0 mm and 100 mm in height at 90 ° and one location at 50 mm in height at 270 ° (dotted circles in the figure). The solid line portion of the nozzle ejection pattern indicates the position where the fluid from each cleaning nozzle hits the first round, and the broken line portion shows the position where the fluid hits the second round.

このように、洗浄ノズルの本数を4個、5個、6個、7個、8個というように増加していけば、被洗浄物を洗浄する洗浄ノズルの分担量が少なくなり、筒体または筒状容器の上下往復運動の振幅を小さくでき、洗浄時間を短縮できる。   Thus, if the number of cleaning nozzles is increased to 4, 5, 6, 7, or 8, the amount of the cleaning nozzle for cleaning the object to be cleaned decreases, and the cylinder or The amplitude of the vertical reciprocation of the cylindrical container can be reduced, and the cleaning time can be shortened.

ただし、洗浄ノズル本数を増加すればするほど、洗浄レベルを高めることは可能であるが、洗浄装置重量やコストが大きくなる。したがって、一定の洗浄レベルを維持したまま洗浄装置重量及びコストを抑えるために、洗浄ノズル本数は2本〜24本程度が好ましく、より好適には2本〜12本である。   However, as the number of cleaning nozzles increases, the cleaning level can be increased, but the weight and cost of the cleaning device increase. Therefore, in order to reduce the weight and cost of the cleaning apparatus while maintaining a constant cleaning level, the number of cleaning nozzles is preferably about 2 to 24, more preferably 2 to 12.

請求項3に係る洗浄装置においては、前記洗浄ノズルが少なくとも2個であり、前記洗浄ノズルが円周方向に等間隔に配置されている。   In the cleaning apparatus according to a third aspect, there are at least two cleaning nozzles, and the cleaning nozzles are arranged at equal intervals in the circumferential direction.

ここで、「円周方向に等間隔」とは、例えば2個の洗浄ノズルを180度対向する位置に配置したり、4個の洗浄ノズルを90度毎に配置したり、6個の洗浄ノズルを60度毎に配置することをいう。また、4個の洗浄ノズルを180度毎に2個ずつ設置するなど、円周方向に等間隔に複数個ずつの洗浄ノズルを配置してもよい。   Here, “equally spaced in the circumferential direction” means, for example, that two cleaning nozzles are arranged at positions facing each other by 180 degrees, four cleaning nozzles are arranged every 90 degrees, or six cleaning nozzles Is arranged every 60 degrees. Alternatively, a plurality of cleaning nozzles may be arranged at equal intervals in the circumferential direction, for example, two cleaning nozzles are installed at every 180 degrees.

この構成によれば、被洗浄物に対し効率的に洗浄液を噴射することができるし、洗浄ノズルの細かな設定が可能となり、さまざまな被洗浄物に対応可能となる。   According to this configuration, the cleaning liquid can be efficiently ejected onto the object to be cleaned, the fine setting of the cleaning nozzle can be performed, and various objects to be cleaned can be handled.

請求項4に係る洗浄装置においては、前記筒体または筒状容器の上部に、その内部に向けて液体の供給が可能な給水口が設けられている。   In the cleaning apparatus according to a fourth aspect, a water supply port capable of supplying a liquid toward the inside thereof is provided at an upper portion of the cylindrical body or the cylindrical container.

ここで、「液体」には、前記洗浄液体を用いてもよいし、別途浸漬用液体(たとえば水等)を用いてもよい。   Here, as the “liquid”, the cleaning liquid may be used, or a dipping liquid (for example, water) may be used separately.

この構成によれば、洗浄ノズルから噴射される洗浄液体のほかに、給水口からも液体(洗浄液体若しくは浸漬用液体)を筒体または筒状容器内に供給できるため、液中洗浄を行う場合に、被洗浄物を速やかに液体中に浸漬させることができ、効率的な液中洗浄が行える。したがって、給水口からの液体給水の有無を操作者が適宜設定することで、液中洗浄と気中洗浄とを、簡単に切り替えることができる。   According to this configuration, in addition to the cleaning liquid sprayed from the cleaning nozzle, liquid (cleaning liquid or immersion liquid) can be supplied from the water supply port into the cylinder or the cylindrical container. In addition, the object to be cleaned can be quickly immersed in the liquid, so that efficient cleaning in the liquid can be performed. Therefore, the operator can easily switch between liquid cleaning and air cleaning by appropriately setting the presence or absence of liquid water supply from the water supply port.

請求項5に係る洗浄装置においては、前記基台の周縁部に、弾性部材が設けられている。   In the cleaning apparatus according to claim 5, an elastic member is provided on a peripheral edge portion of the base.

この構成によれば、基台と筒体または筒状容器との隙間が広くても、ゴムシール等の弾性部材により隙間を小さくすることができ、隙間からの洗浄液体の流出を少なくできる。したがって、被洗浄物をより速やかに液体中に浸漬させることができ、液中洗浄が効率的に行える。   According to this configuration, even if the gap between the base and the cylinder or the cylindrical container is wide, the gap can be reduced by the elastic member such as a rubber seal, and the outflow of the cleaning liquid from the gap can be reduced. Accordingly, the object to be cleaned can be immersed in the liquid more quickly, and cleaning in the liquid can be performed efficiently.

なお、基台外縁部の弾性部材と筒体または筒状容器内壁とを当接させる構成としてもよく、その場合、ゴムシールの外縁に一定の間隔で切り込みを入れることで、ゴムシール外縁と筒体または筒状容器の内壁との摩擦によるゴムシールの破損を緩和することができる。   In addition, it is good also as a structure which contact | abuts the elastic member of a base outer edge part, and a cylinder or a cylindrical container inner wall, and in that case, a rubber seal outer edge and a cylinder or by making a notch in the outer edge of a rubber seal at a fixed space | interval Damage to the rubber seal due to friction with the inner wall of the cylindrical container can be mitigated.

請求項6に係る洗浄装置においては、前記筒体または筒状容器の側面上部に、上部排水口が設けられている。   In the cleaning apparatus according to a sixth aspect, an upper drainage port is provided at an upper side surface of the cylindrical body or the cylindrical container.

この構成によれば、液中洗浄を行う場合、液中の表面に浮いた軽い残留異物を、上部排水口からオーバーフローする洗浄液体とともに除去することができる。逆に、底に沈むような重い残留異物は、基台と筒体の隙間から洗浄液体と共に流出させることができる。その結果、容器内の洗浄液の置換率が向上され、被洗浄物への残留異物の再付着を防止でき、効果的な洗浄を行える。   According to this configuration, when cleaning in liquid, light residual foreign matter floating on the surface in the liquid can be removed together with the cleaning liquid overflowing from the upper drainage port. Conversely, heavy residual foreign matter that sinks to the bottom can flow out together with the cleaning liquid from the gap between the base and the cylinder. As a result, the replacement rate of the cleaning liquid in the container is improved, re-adhesion of residual foreign matters to the object to be cleaned can be prevented, and effective cleaning can be performed.

請求項7に係る洗浄装置においては、前記基台に排水孔が設けられている。   In the cleaning apparatus according to claim 7, a drainage hole is provided in the base.

この構成によれば、底に沈むような重い残留異物が、基台と筒体の隙間に加えて、排水孔からも洗浄液体と共に流出させることができ、容器内の洗浄液の置換率がより向上され、被洗浄物への残留異物の再付着をさらに効率よく防止できる。   According to this configuration, the heavy residual foreign matter that sinks to the bottom can be discharged together with the cleaning liquid from the drain hole in addition to the gap between the base and the cylinder, and the replacement rate of the cleaning liquid in the container is further improved. Thus, the reattachment of the remaining foreign matter to the object to be cleaned can be prevented more efficiently.

請求項8に係る洗浄装置においては、前記洗浄ノズルが、2流体ノズルである。   In the cleaning apparatus according to claim 8, the cleaning nozzle is a two-fluid nozzle.

この構成によれば、洗浄ノズルから、同心円状に異なる流体を噴射可能であり、洗浄ノズルの中心部から洗浄液体を、その周囲からエアを噴射することができる。その結果、とくに液中洗浄において、洗浄液体のみを洗浄ノズルから噴射する場合と比較して、より確実に被洗浄物の内部まで、たとえば穴の奥まで、流体が届くため、洗浄効果が高まる。   According to this configuration, it is possible to eject different fluids concentrically from the cleaning nozzle, and it is possible to eject the cleaning liquid from the central portion of the cleaning nozzle and air from the periphery thereof. As a result, particularly in liquid cleaning, compared with the case where only the cleaning liquid is ejected from the cleaning nozzle, the fluid reaches the interior of the object to be cleaned more securely, for example, to the back of the hole, so that the cleaning effect is enhanced.

なお、前記2流体ノズルから噴射される洗浄流体は、直進性を持って噴射された洗浄液体と気体とで構成される多相流体であることが好ましく、多相流体を構成する洗浄液体と気体とを直進性を持って噴射するようにしていると、これら洗浄液体と気体とが噴射直後に混じり合うことにより、多相流体の速度低下が著しく低下する不具合は生じず、多相流体を被洗浄物に効率的に送給することができる。これにより、とりわけ液中洗浄において、被洗浄物に対する洗浄流体の噴射打力の向上を図ることができるので、洗浄効率および洗浄能力を向上できる。   The cleaning fluid ejected from the two-fluid nozzle is preferably a multiphase fluid composed of cleaning liquid and gas ejected with straightness, and the cleaning liquid and gas constituting the multiphase fluid. If the cleaning liquid and the gas are mixed immediately after the injection, there is no problem that the speed reduction of the multiphase fluid is remarkably reduced, and the multiphase fluid is covered. It can be efficiently fed to the washed product. Thereby, especially in the submerged cleaning, since it is possible to improve the jetting force of the cleaning fluid to the object to be cleaned, the cleaning efficiency and the cleaning ability can be improved.

以上のように、本発明に係る洗浄装置によれば、回路状の穴などの複雑な内部構造を有する被洗浄物であっても、洗浄ノズルの位置や角度の厳密な調整なしに効率的・効果的に洗浄できる。また、洗浄ノズルの本数が少なくてすむのでコンパクトに構成できるうえ、1台の洗浄装置で気中洗浄と液中洗浄とを適宜行えるので、設備コストおよび運転コストの削減につながる。   As described above, according to the cleaning device of the present invention, even a cleaning object having a complicated internal structure such as a circuit-shaped hole can be efficiently and efficiently adjusted without strict adjustment of the position and angle of the cleaning nozzle. It can be cleaned effectively. In addition, since the number of cleaning nozzles can be reduced, a compact configuration can be achieved, and air cleaning and liquid cleaning can be appropriately performed with a single cleaning apparatus, leading to reduction in equipment cost and operation cost.

本発明の一実施形態に係る洗浄装置を示す模式図である(洗浄ノズル3本)。It is a schematic diagram which shows the washing | cleaning apparatus which concerns on one Embodiment of this invention (3 washing nozzles). 図1の洗浄装置の、カップの側面図である。It is a side view of a cup of the washing | cleaning apparatus of FIG. 図1の洗浄装置のカップが洗浄中に昇降運動する状態を説明する模式図で、(a)は、カップが最下限位置にある状態、(b)は、カップが最上限位置にある状態を示す。It is a schematic diagram explaining the state which the cup of the washing | cleaning apparatus of FIG. 1 raises / lowers during washing | cleaning, (a) is a state in which a cup is in a lowest limit position, (b) is a state in which a cup is in a maximum upper limit position. Show. 図1の洗浄装置の洗浄ノズルから噴射された洗浄流体が、被洗浄物に当たる位置を示す展開図で、基台の回転速度と筒状容器の昇降速度について、(a)は4.5rpm、145.9mm/secであり、(b)は7.5rpm、145.9mm/secであり、(c)は4.5rpm、38.9mm/secである。1 is a development view showing a position where the cleaning fluid sprayed from the cleaning nozzle of the cleaning apparatus of FIG. 1 hits an object to be cleaned. FIG. 4A shows the rotational speed of the base and the vertical speed of the cylindrical container. .9 mm / sec, (b) is 7.5 rpm, 145.9 mm / sec, and (c) is 4.5 rpm, 38.9 mm / sec. (a)は、本発明の一実施形態に係る洗浄装置の模式図である(洗浄ノズル2本)。(b)は、(a)の洗浄装置の洗浄ノズルから噴射された洗浄流体が、被洗浄物に当たる位置を示す展開図である。(A) is a schematic diagram of a cleaning device according to an embodiment of the present invention (two cleaning nozzles). (B) is a development view showing a position where the cleaning fluid ejected from the cleaning nozzle of the cleaning apparatus of (a) hits the object to be cleaned.

以下、本発明に係る実施形態を図面に基づき説明するが、本発明はこの実施形態に限定されるものではない。   DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments according to the present invention will be described with reference to the drawings, but the present invention is not limited to the embodiments.

洗浄装置1は、図1および図2に示すように、本体2内部に、被洗浄物10を載せるための円板状の基台3と、基台3と被洗浄物10とを囲む大きさを有し、本体2内部で昇降可能な円筒形のカップ4と、カップ4の側面に固定された3個の洗浄ノズル5(51・52・53)とを備えている。図示しないが、洗浄ポンプを本体2の外側に設け、カップ4への洗浄液体の給水を行っている。また、カップ4からの排水は、フィルター(図示せず)で濾過して残留異物を除去したのち洗浄ポンプに戻し、循環させている。さらに、本体2の外側に、後述するエアシリンダ6の駆動手段としてのエア供給ポンプ(図示せず)を設け、洗浄ノズル5へのエア供給も行っている。   As shown in FIG. 1 and FIG. 2, the cleaning device 1 has a disk-shaped base 3 for placing the object to be cleaned 10 inside the main body 2, and a size surrounding the base 3 and the object to be cleaned 10. And a cylindrical cup 4 that can be moved up and down inside the main body 2, and three cleaning nozzles 5 (51, 52, 53) fixed to the side surface of the cup 4. Although not shown, a cleaning pump is provided outside the main body 2 to supply cleaning liquid to the cup 4. The drainage from the cup 4 is filtered through a filter (not shown) to remove residual foreign matter, and then returned to the cleaning pump for circulation. Further, an air supply pump (not shown) is provided outside the main body 2 as a driving means for an air cylinder 6 described later, and air is supplied to the cleaning nozzle 5.

基台3は、直径390mmの円板で、モータ(図示せず)により回転駆動されるターンテーブル31に、支持部材32を介して固定されている。したがって、基台3は、ターンテーブル31とともに回転可能で、モータの制御により回転速度が調整できる。被洗浄物10は、基台3の上に固定した治具又は金属製バスケット33により、保持される。また、ターンテーブル31は、被洗浄物10を載せた基台3とともに、本体2の前面扉(図示せず)から引き出せる構成にしている。   The base 3 is a disc having a diameter of 390 mm, and is fixed to a turntable 31 that is rotationally driven by a motor (not shown) via a support member 32. Therefore, the base 3 can be rotated together with the turntable 31, and the rotation speed can be adjusted by controlling the motor. The object to be cleaned 10 is held by a jig or metal basket 33 fixed on the base 3. Further, the turntable 31 is configured to be able to be pulled out from the front door (not shown) of the main body 2 together with the base 3 on which the article to be cleaned 10 is placed.

カップ4は、基台3よりやや大きい400mmの内径と、360mmの高さを有する筒状容器で、基台3と被洗浄物10に上から被さるよう、開口部を下に向けて配置している。基台3の周縁部とカップ4の内周面との隙間を塞ぐための円盤状のゴムシール34を、基台3に設けている。なお、ゴムシール34の外縁には略45°ごとに径に沿って切り込みをつけている。   The cup 4 is a cylindrical container having a slightly larger inner diameter of 400 mm than that of the base 3 and a height of 360 mm. The cup 4 is arranged with the opening facing downward so as to cover the base 3 and the object to be cleaned 10 from above. Yes. A disk-shaped rubber seal 34 for closing a gap between the peripheral edge of the base 3 and the inner peripheral surface of the cup 4 is provided on the base 3. The outer edge of the rubber seal 34 is cut along the diameter at approximately 45 ° intervals.

3個の洗浄ノズル5(51・52・53)を、高さ方向に等しい間隔Dをあけて配置し、カップ4の側面に貫通して固定している。そのうち2個の洗浄ノズル51・53は、カップ4の円周方向の同じ位置に100mmの間隔をあけて固定し、残りの1個の洗浄ノズル52は、それらと円周方向に対向する位置(180度間隔をあけた位置)であって、その中間の高さに固定している(図2、図3参照)。なお、洗浄ノズル5の配置はこれ以外の配置とすることも可能であり、例えば3個の洗浄ノズル5を120度ずつ円周方向に間隔をあけて設置してもよいし、洗浄ノズル5を4個とし90度ずつ円周方向に間隔をあけて設置してもよい。   Three cleaning nozzles 5 (51, 52, 53) are arranged at equal intervals D in the height direction, and are fixed to penetrate the side surface of the cup 4. Two of the cleaning nozzles 51 and 53 are fixed to the same position in the circumferential direction of the cup 4 with an interval of 100 mm, and the remaining one cleaning nozzle 52 is positioned so as to oppose them in the circumferential direction ( It is fixed at an intermediate height (positions spaced by 180 degrees) (see FIGS. 2 and 3). The arrangement of the cleaning nozzles 5 may be other than that. For example, three cleaning nozzles 5 may be installed at intervals of 120 degrees in the circumferential direction. The number may be four and 90 degrees apart from each other in the circumferential direction.

洗浄ノズル5は、いずれも2流体ノズルである。これは公知のものでよく、たとえば図2に示すように、中心に洗浄液用の噴射口5aを備え、その周囲にエアを噴射する噴射口5bを備えている。なお、液中洗浄を行わない場合には、一般的な1流体ノズルを用いても良い。   The cleaning nozzle 5 is a two-fluid nozzle. This may be a known one, for example, as shown in FIG. 2, provided with an injection port 5a for the cleaning liquid at the center and an injection port 5b for injecting air around it. In addition, when not performing in-liquid washing | cleaning, you may use a common 1 fluid nozzle.

本体2の上面部21中央には、エアシリンダ6を垂直に設けている。エアシリンダ6は、図示しないエア供給ポンプから送られる空気圧により昇降可能なロッド62を内蔵している。ロッド62は、本体2の上面部21を貫通して下方に延び、その先端はカップ4の上面部41中央に固定されている。したがって、カップ4は、本体2内でロッド62から吊下げられた状態となり、空気圧によりロッド62とともに昇降運動が可能である。カップ4に固定された3個の洗浄ノズル5も、同様の昇降運動を行うことになる。   An air cylinder 6 is provided vertically in the center of the upper surface portion 21 of the main body 2. The air cylinder 6 incorporates a rod 62 that can be raised and lowered by air pressure sent from an air supply pump (not shown). The rod 62 penetrates the upper surface portion 21 of the main body 2 and extends downward, and its tip is fixed to the center of the upper surface portion 41 of the cup 4. Accordingly, the cup 4 is suspended from the rod 62 in the main body 2 and can be moved up and down together with the rod 62 by air pressure. The three cleaning nozzles 5 fixed to the cup 4 also perform the same up-and-down movement.

エアシリンダ6は、最大300mmのストロークがあり、カップ4は、その下端部が基台3下部より60mm下がる位置まで降りる。最上部までカップ4を引き上げれば、被洗浄物10を基台3に載せたまま、ターンテーブル31を本体2から引き出したり、本体2に収納したりできるよう、本体2の高さを設定している。なお、エアシリンダ6は、電動シリンダやロボットシリンダ等を用いてもよい。   The air cylinder 6 has a stroke of a maximum of 300 mm, and the cup 4 descends to a position where the lower end of the cup 4 is lowered by 60 mm from the bottom of the base 3. If the cup 4 is pulled up to the top, the height of the main body 2 is set so that the turntable 31 can be pulled out of the main body 2 and stored in the main body 2 while the object to be cleaned 10 is placed on the base 3. ing. The air cylinder 6 may be an electric cylinder or a robot cylinder.

カップ4の上面部41には、洗浄液を注入して被洗浄物10を浸漬するための大流量の給水口42を設けている。また、カップ4の側面の上部に上部排水口43を設け、重量の軽い残留異物を含む洗浄液体を、カップ4からオーバーフローさせる。さらに、ターンテーブル31の下方に、防水パン22と下部排水口23とを設け、上部排水口43からオーバーフローした洗浄液体と、カップ4と基台3との隙間から排出される重い残留異物を含む洗浄液体とを、下部排水口23から排出する。   The upper surface portion 41 of the cup 4 is provided with a large flow rate water supply port 42 for injecting a cleaning liquid and immersing the object 10 to be cleaned. In addition, an upper drainage port 43 is provided at the upper part of the side surface of the cup 4, and the cleaning liquid containing the remaining heavy foreign matter overflows from the cup 4. Further, a waterproof pan 22 and a lower drainage port 23 are provided below the turntable 31, and the cleaning liquid overflowed from the upper drainage port 43 and heavy residual foreign matter discharged from the gap between the cup 4 and the base 3 are included. The cleaning liquid is discharged from the lower drainage port 23.

洗浄ノズル5と給水口42への洗浄液体の供給は、上述したように、本体2の外部に接続した洗浄液ポンプにより行う。また、下部排水口23から排出された、残留異物を含む洗浄液体は、フィルターで残留異物を除去したのち、洗浄液ポンプに送り、循環させる。なお、給水口からの給水を洗浄液体に代えて、別途浸漬用の水を供給する場合には、洗浄液ポンプに加えて浸漬用水のための専用ポンプを別途配置するとよい。   The supply of the cleaning liquid to the cleaning nozzle 5 and the water supply port 42 is performed by the cleaning liquid pump connected to the outside of the main body 2 as described above. Further, the cleaning liquid containing residual foreign matter discharged from the lower drainage port 23 is sent to a cleaning liquid pump and circulated after the residual foreign matter is removed by a filter. In addition, when supplying the water for immersion separately from the water supply port instead of the cleaning liquid, a dedicated pump for the immersion water may be separately provided in addition to the cleaning liquid pump.

上記のように構成された洗浄装置1で、直径200mm、高さ150mmの円柱状の被洗浄物10を洗浄したときの、カップ4と被洗浄物10の位置関係を、図3(a)・(b)に示す。ここで、カップ4の昇降運動の振幅Wは、68mmに設定している。このとき、各洗浄ノズル51・52・53からの流体(洗浄液とエア)が、被洗浄物10の表面に当たる位置は、基台3の回転速度と、カップ4の昇降速度とで決定される。なお、図4(a)〜(c)は、下表の回転速度と昇降速度との組み合わせにおける、それぞれのノズル噴射パターンである。   The positional relationship between the cup 4 and the object to be cleaned 10 when the cylindrical object 10 having a diameter of 200 mm and a height of 150 mm is cleaned with the cleaning device 1 configured as described above is shown in FIG. Shown in (b). Here, the amplitude W of the elevating motion of the cup 4 is set to 68 mm. At this time, the position where the fluid (cleaning liquid and air) from each cleaning nozzle 51, 52, 53 hits the surface of the object to be cleaned 10 is determined by the rotational speed of the base 3 and the ascending / descending speed of the cup 4. 4A to 4C show the respective nozzle ejection patterns in the combinations of the rotation speed and the elevation speed shown in the table below.

基台の回転速度 筒状容器の昇降速度
(a) 4.5rpm 145.9mm/sec
(b) 7.5rpm 145.9mm/sec
(c) 4.5rpm 38.9mm/sec
Rotational speed of the base Lifting speed of the cylindrical container (a) 4.5rpm 145.9mm / sec
(B) 7.5 rpm 145.9 mm / sec
(C) 4.5 rpm 38.9 mm / sec

図4の横軸は、被洗浄物10の表面の、円周方向に展開した位置(角度)を表し、縦軸は、高さ方向の位置を表す。図中の破線の丸印は、カップ4の側面に固定した各洗浄ノズル51・52・53の位置とノズルの噴射径を、被洗浄物10の表面に投影したものである。2つの洗浄ノズル51・53は、円周方向の同じ位置(90°)にあり、被洗浄物10に対する高さはそれぞれ、100mm、0mmである。もう一つの洗浄ノズル52は、それらと対向する位置(270°)にあり、同様の高さは50mmである。なお、図4中の上・中・下3本の折れ線は、それぞれ洗浄ノズル51,52,53に対応し、実線が1周目、長破線が2周目を表す。   The horizontal axis in FIG. 4 represents the position (angle) developed in the circumferential direction on the surface of the article 10 to be cleaned, and the vertical axis represents the position in the height direction. Broken circles in the figure are the projections of the positions of the respective cleaning nozzles 51, 52, 53 fixed to the side surface of the cup 4 and the spray diameters of the nozzles on the surface of the object to be cleaned 10. The two cleaning nozzles 51 and 53 are at the same position (90 °) in the circumferential direction, and the heights with respect to the object to be cleaned 10 are 100 mm and 0 mm, respectively. Another cleaning nozzle 52 is in a position (270 °) opposite to them, and the same height is 50 mm. Note that the upper, middle, and lower broken lines in FIG. 4 correspond to the cleaning nozzles 51, 52, and 53, respectively, and the solid line represents the first turn and the long broken line represents the second turn.

図4の各図における上・中・下3本の折れ線は、互いに重なり合っているうえ、2周目にはいると前周の位置よりずれているのがわかる。このように基台3の回転速度とカップ4の昇降速度とを調整したうえで、回転を繰り返すことにより、被洗浄物10の表面全体を洗浄できる。   It can be seen that the upper, middle, and lower three broken lines in each figure of FIG. 4 overlap each other and shift from the position of the previous circumference when entering the second round. Thus, the entire surface of the object to be cleaned 10 can be cleaned by repeating the rotation after adjusting the rotation speed of the base 3 and the elevation speed of the cup 4.

上記の洗浄装置1を用いて、被洗浄物10としての残留異物が付着したウォーターポンプの洗浄を行い、洗浄の精度をテストした。以下、その洗浄条件と結果とを説明する。   Using the cleaning apparatus 1 described above, the water pump with the remaining foreign matter adhered as the object to be cleaned 10 was cleaned, and the cleaning accuracy was tested. Hereinafter, the cleaning conditions and results will be described.

<条件>
被洗浄物:ウォーターポンプ
洗浄圧力:1.6MPa(液圧)、0.3MPa(エア圧)
カップ昇降速度:119.1mm/sec
テーブル回転数:4.5RPM
液温度:59℃
洗浄時間:75秒
<Conditions>
Object to be cleaned: Water pump Cleaning pressure: 1.6 MPa (hydraulic pressure), 0.3 MPa (air pressure)
Cup lifting speed: 119.1 mm / sec
Table rotation speed: 4.5 RPM
Liquid temperature: 59 ° C
Cleaning time: 75 seconds

<結果>
上記の条件での洗浄後、残留異物の重量計測を行った結果、0.6mgであった。これは、5mg以下という規格を十分満たすものである。
<Result>
After washing under the above conditions, the residual foreign matter was weighed and found to be 0.6 mg. This sufficiently satisfies the standard of 5 mg or less.

以上のとおり、図面を参照しながら本発明の好適な実施形態を説明したが、本発明の趣旨を逸脱しない範囲内で、種々の追加、変更または削除が可能である。とくに、カップ4の代わりに上面部のない筒体を用いることも可能である。また洗浄ノズルの数も、被洗浄物の大きさに応じて1個や2個、もしくは4個以上設けることも可能である。したがって、そのようなものも本発明の範囲内に含まれる。   As described above, the preferred embodiments of the present invention have been described with reference to the drawings, but various additions, modifications, or deletions can be made without departing from the spirit of the present invention. In particular, instead of the cup 4, it is possible to use a cylinder having no upper surface portion. Further, the number of cleaning nozzles may be one, two, or four or more depending on the size of the object to be cleaned. Therefore, such a thing is also included in the scope of the present invention.

1 洗浄装置
2 本体
21 上面部
22 防水パン
23 下部排水口
3 基台
31 ターンテーブル
32 支持部材
33 金属製バスケット
34 ゴムシール(シール部材)
4 カップ
41 上面部
42 給水口
43 上部排水口
5(51,52,53) 洗浄ノズル
5a 噴射口(洗浄液)
5b 噴射口(エア)
6 エアシリンダ
62 ロッド
10 被洗浄物
DESCRIPTION OF SYMBOLS 1 Cleaning apparatus 2 Main body 21 Upper surface part 22 Waterproofing pan 23 Lower drainage port 3 Base 31 Turntable 32 Support member 33 Metal basket 34 Rubber seal (seal member)
4 Cup 41 Upper surface part 42 Water supply port 43 Upper drainage port 5 (51, 52, 53) Cleaning nozzle 5a Injection port (cleaning liquid)
5b Injection port (air)
6 Air cylinder 62 Rod 10 Object to be cleaned

Claims (8)

被洗浄物を、洗浄ノズルから噴射した洗浄流体により洗浄するための洗浄装置であって、
被洗浄物を保持し、回転駆動装置により水平面内で回転可能な基台と、
前記基台と前記被洗浄物とを上方から囲む大きさを有し、昇降駆動装置により昇降可能な筒体または筒状容器と、
前記筒体または筒状容器の側面に、その内部に向けて固定された洗浄ノズルとを備え、
前記基台の周縁部と前記筒体または筒状容器の側面内壁との間に隙間を有し、前記筒体または筒状容器が所定の振幅で昇降運動可能であるとともに、前記基台の回転速度と前記筒体または筒状容器の昇降速度のうち少なくともいずれか一方が、調整可能である洗浄装置。
A cleaning device for cleaning an object to be cleaned with a cleaning fluid sprayed from a cleaning nozzle,
A base that holds an object to be cleaned and can be rotated in a horizontal plane by a rotation drive device;
A cylinder or a cylindrical container having a size surrounding the base and the object to be cleaned from above, and being movable up and down by a lifting drive;
A cleaning nozzle fixed to the inside of the cylindrical body or the cylindrical container toward the inside thereof,
There is a gap between the peripheral edge of the base and the inner wall of the cylindrical body or cylindrical container, and the cylindrical body or cylindrical container can move up and down with a predetermined amplitude, and the rotation of the base A cleaning apparatus in which at least one of a speed and an ascending / descending speed of the cylindrical body or the cylindrical container is adjustable.
請求項1において、前記洗浄ノズルが少なくとも2個であり、高さ方向に等間隔に配置されている洗浄装置。   The cleaning apparatus according to claim 1, wherein at least two cleaning nozzles are disposed at equal intervals in the height direction. 請求項1または2において、前記洗浄ノズルが少なくとも2個であり、前記洗浄ノズルが円周方向に等間隔に配置されている洗浄装置。   The cleaning apparatus according to claim 1 or 2, wherein at least two cleaning nozzles are provided, and the cleaning nozzles are arranged at equal intervals in a circumferential direction. 請求項1〜3のいずれか1項において、前記筒体または筒状容器の上部に、その内部に向けて液体の供給が可能な給水口が設けられている洗浄装置。   The cleaning apparatus according to any one of claims 1 to 3, wherein a water supply port capable of supplying a liquid toward an inside thereof is provided at an upper portion of the cylindrical body or the cylindrical container. 請求項1〜4のいずれか1項において、前記基台の周縁部に、弾性部材が設けられている洗浄装置。   The cleaning apparatus according to claim 1, wherein an elastic member is provided on a peripheral edge of the base. 請求項1〜5のいずれか1項において、前記筒体または筒状容器の側面上部に、上部排水口が設けられている洗浄装置。   The cleaning apparatus according to any one of claims 1 to 5, wherein an upper drainage port is provided on an upper side surface of the cylindrical body or the cylindrical container. 請求項1〜6のいずれか1項において、前記基台に排水孔が設けられている洗浄装置。   The cleaning device according to claim 1, wherein a drainage hole is provided in the base. 請求項1〜7のいずれか1項において、前記洗浄ノズルが、2流体ノズルである洗浄装置。   The cleaning apparatus according to any one of claims 1 to 7, wherein the cleaning nozzle is a two-fluid nozzle.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016055275A (en) * 2014-09-12 2016-04-21 森合精機株式会社 Cleaning device
CN110548722A (en) * 2019-10-11 2019-12-10 高李娜 ear-nose-throat instrument disinfection nursing cleaning device

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JPH06190348A (en) * 1992-12-26 1994-07-12 Nippon Avionics Co Ltd Cleaning device using jet method in liquid
JPH07171522A (en) * 1993-12-16 1995-07-11 Keihin Seiki Mfg Co Ltd Work washing method
JPH07241537A (en) * 1994-03-08 1995-09-19 Maruyama Mfg Co Ltd Cleaning apparatus and method
JP2006122811A (en) * 2004-10-28 2006-05-18 Nic Autotec Inc Washing device
JP2006314947A (en) * 2005-05-13 2006-11-24 Toyota Motor Corp Container cleaning device
JP2008087983A (en) * 2006-09-29 2008-04-17 Covalent Materials Corp Washing device for ceramic member
JP2009129857A (en) * 2007-11-27 2009-06-11 Chugoku Electric Power Co Inc:The Polymer bushing cleaning device
JP2009231628A (en) * 2008-03-24 2009-10-08 Dainippon Screen Mfg Co Ltd Substrate processing apparatus

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016055275A (en) * 2014-09-12 2016-04-21 森合精機株式会社 Cleaning device
CN110548722A (en) * 2019-10-11 2019-12-10 高李娜 ear-nose-throat instrument disinfection nursing cleaning device

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