JP2016053529A - Support structure of plate-like body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a support structure of a plate-like body that constitutes a probe card capable of preventing warpage of a plate-like body such as a guide plate without using fixation means such as a screw, even in a probe card with a narrow pitch.SOLUTION: A support structure of a plate-like body constituting a probe card selects at least a first plate-like body and a second plate-like body among a plurality of plate-like bodies arranged in parallel, and fixes the second plate-like body to the first plate-like body with a wire rope at least one end of which is fixed.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a support structure for a plate-like body installed on a probe card.

  Probe cards used for semiconductor inspection are various types of plate-like bodies, that is, main circuit boards connected to external devices, probe boards on which probes are provided, and guide plates that improve the positional accuracy of the probes. A relay circuit board between the main circuit board and the probe board, a reinforcing plate as a reinforcing member, and the like are selectively installed. These plate-like bodies are required to maintain flatness during the inspection in order to perform an accurate inspection.

  However, various forces act on these plate-like bodies depending on the inspection environment, and it becomes difficult to maintain flatness. For example, the elastic force of the vertical probe or the weight of the guide plate itself acts on the guide plate installed in the vertical probe card, causing the probe substrate to warp. Further, the probe substrate in the cantilever type probe card is subjected to the elastic force of the relay member connecting the main circuit substrate and the probe substrate or the weight of the probe substrate itself, which causes the probe substrate to be warped.

  Such displacement due to the warpage of the plate-like body is noticeable in the vicinity of the center of the plate-like body, and the warpage of the plate-like body is a cause of shifting the positional relationship of the constituent members of the probe card, or the electrical It becomes a cause of damaging the contact and an obstacle to the inspection by the probe card.

  In order to eliminate such a problem caused by the warpage of the plate-like body, for example, as a conventional technique for preventing the warpage of the guide plate, as shown in FIG. The method of fixing to the reinforcing plate 63 of the probe card 61 is used. Moreover, the method (refer patent document 1) of adjusting the parallelism of a guide plate using a screw is also used.

JP 2004-77153 A

  A probe card used for inspection of an inspection element in which a large number of electrodes are arranged at high density requires probes arranged at a narrow pitch and a circuit board wired at a narrow interval. In the card, it is difficult to secure a space for arranging a fixing means such as a screw as in the prior art.

  Therefore, in order to solve the conventional problems, the present invention can prevent warping of a plate-like body such as a guide plate without using a fixing means such as a screw even in a narrow-pitch probe card. An object of the present invention is to provide a support structure for a plate-like body that constitutes a probe card.

  The support structure for a plate-shaped body of the present invention is a support structure for a plate-shaped body installed on a probe card, and is a first structure as at least two plate-shaped bodies from among a plurality of plate-shaped bodies arranged in parallel. A plate-shaped body and a second plate-shaped body are selected, and the second plate-shaped body is supported using a wire rope having at least one end fixed to the first plate-shaped body.

  A first through hole is provided in the first plate-like body, a second through-hole is provided in the second plate-like body, and the wire rope is inserted into the first through hole and the second through hole. The second plate-like body is supported.

  The wire rope is inserted into one of the first through holes and one of the second through holes and arranged in a substantially I shape, or the wire rope is arranged in two of the first through holes and two of the second through holes. The second plate-like body is supported by being inserted into the through hole and arranged in a substantially U shape.

  At least one third plate-like body formed with a third through hole is disposed between the first plate-like body and the second plate-like body, and the wire rope is inserted into the third through-hole. insert.

  At least one end of the wire rope is fixed by at least one adjusting means provided on the surface of the first plate opposite to the second plate, and the tension of the wire rope can be adjusted. It is.

  The adjustment means includes a base fixed to the surface of the first plate-like body, an adjustment screw that is screw-engaged with the base, a cap that is attached to an upper end of the adjustment screw, and for rotating the adjustment screw It is composed of a lever, and the tension of the wire rope can be adjusted by rotating the adjusting screw using the lever.

  The wire rope has a diameter of 30 to 200 μm.

  The support structure for a plate-like body according to the present invention is a support structure for a plate-like body installed on a probe card, and includes a first plate-like body and a first plate-like body as at least two plate-like bodies out of a plurality of plate-like bodies. 2 is selected, and the second plate is fixed to the first plate using a wire rope having at least one end fixed thereto, so that the wire rope has a smaller diameter than a screw, a bolt, or the like. Therefore, it is possible to reduce the area occupied by the wire rope in the plate-like body, and it is possible to greatly reduce the restrictions on the installation of the probe or circuit.

  At least one end of the wire rope is fixed by at least one adjusting means provided on the surface of the first plate opposite to the second plate, and the tension of the wire rope can be adjusted. Therefore, the plate-like body can be supported in an appropriate state.

It is sectional drawing of the probe card using the support structure of the plate-shaped body of the 1st Embodiment of this invention. It is a partial enlarged view of the support structure of the plate-shaped body of 1st Embodiment. It is an enlarged view of a reinforcement board and an adjustment means. It is a partially expanded view of the bottom surface of the probe card. It is sectional drawing of the probe card using the support structure of the plate-shaped body of the 2nd Embodiment of this invention. It is sectional drawing of the probe card using the support structure of the plate-shaped body of the 3rd Embodiment of this invention. It is sectional drawing of the conventional probe card which used the screw as a fixing means.

  The support structure for a plate-shaped body of the present invention will be described in detail with reference to the drawings. First, a support structure for a plate-like body according to the first embodiment of the present invention will be described. FIG. 1 is a cross-sectional view of the probe card 1 using the plate-like support structure of the first embodiment, and FIGS. 2 to 4 use the plate-like support structure of the first embodiment. 2 is an enlarged view of a part of the probe card 1.

  As shown in FIG. 1, a probe card 1 using a plate-like support structure according to a first embodiment of the present invention includes a main circuit board 2, a reinforcing plate 3, and the main circuit board as a plurality of plate-like bodies. 2 is spaced from the lower surface of the relay circuit board 4, the first guide plate 5 is spaced from the lower surface of the relay circuit board 4, and the lower surface of the first guide plate 5 is spaced from the lower surface. A second guide plate 6 disposed at a distance is used. The probe card 1 includes a vertical probe 7 held by the first guide plate 5 and the second guide plate 6 as a member other than the plate-like body.

  In the probe card 1, the support structure of the plate-like body uses a structure in which the second guide plate 6, which is a plate-like body, is supported using the wire rope 9. The second guide plate 6 is mechanically connected to the reinforcing plate 3 using a wire rope 9 as a support structure for the plate-like body, and a tension in the direction of the reinforcing plate 3 is applied to the second guide plate 6. By doing so, the second guide plate 6 is supported.

  A plate-like support structure using the wire rope 9 will be described in detail. Both ends of the wire rope 9 are fixed by adjusting means 10 provided on the upper surface of the reinforcing plate 3 which is a plate-like body. The wire rope 9 is inserted into two through-holes 15 provided in the reinforcing plate 3 and two through-holes 19 provided in the second guide plate 6 and arranged in a substantially U shape. Yes.

  A plurality of plate-like bodies are arranged between the reinforcing plate 3 and the second guide plate 6, and the probe card 1 including these plate-like bodies will be described in more detail. The main circuit board 2 which is one of the plate-like bodies is a board for connecting the probe card 1 to a test apparatus, and an electrode 12 used for connection is provided on the upper surface. The reinforcing plate 3 for reinforcing the main circuit board 2 is attached to the upper surface of the main circuit board 2. The relay circuit board 4 is electrically connected to the main circuit board 2 using electrodes, bumps, and the like, and is electrically connected to the probe 7 via electrodes provided on the lower surface. Has a conversion function.

  The first guide plate 5 and the second guide plate 6 are plate-like bodies used for holding the probe 7 and, as shown in FIG. 2, the first guide plate 5 and the second guide plate 6 are provided on the first guide plate 5. The probe 7 is inserted into the first guide hole 13 and the second guide hole 14 provided in the second guide plate 6, the upper portion of the probe 7 protrudes upward from the first guide hole 13, and the upper end is different. It is connected to the electrode of the relay circuit board 4 which is a plate-like body.

  The probe 7 is composed of a barrel and a plunger protruding downward from the barrel, and an elastic force is applied by a spring inside the barrel. This elastic force acts downward on the second guide plate 6 to cause deformation of the second guide plate 6. As shown in FIG. 2, since the diameter of the barrel of the probe 7 is larger than that of the second guide hole 14, it is held on the upper surface of the second guide plate 6, and only the plunger of the probe 7 is used for the second guide. The tip of the plunger is inserted into the hole 14 and protrudes downward from the lower surface of the second guide plate 6.

  The relay circuit board 4, the first guide plate 5 and the second guide plate 6 are held by the main circuit board 2 by a holder 8, and the holder 8, the main circuit board 2 and the reinforcing plate 3 are bolts or the like. Are fixed to each other.

  As shown in FIG. 1, the wire rope 9 is arranged in a substantially U shape on the probe card 1, and both ends thereof are fixed by adjusting means 10 provided on the upper surface of the reinforcing plate 3. The reinforcing plate 3, the main circuit board 2, the relay circuit board 4, the first guide plate 5, and the second guide plate 6 each have two through holes 15, 16, 17, and 18 that are parallel to each other. , 19 are provided on a straight line. The wire rope 9 is inserted into one row of the through holes 15, 16, 17, 18, 19 and passes through the lower surface of the second guide plate 6, and another row of the through holes 15, 16, 17, The both ends of the wire rope 9 inserted into 18 and 19 and projecting above the reinforcing plate 3 are fixed by the adjusting means 10, so that they are arranged in a substantially U shape.

  At this time, the wire rope 9 is disposed from one through hole 19 of the second guide plate 6 through the lower surface of the second guide plate 6 to the other through hole 19. It will be bent at a right angle where it protrudes downward. In order to buffer this bending, as shown in FIG. 2, two spacers 11 are provided on the lower surface of the second guide plate 6 where the wire rope 9 passes, and the wire rope 9 serves as the second guide. The lower surface of the plate 6 is not contacted.

  The wire rope 9 is made of a flexible material, and for example, a wire having a diameter of 30 to 200 μm can be used for the probe card 1 having a narrow pitch. This can be greatly reduced as compared with the diameter (1 mm, 0.3 mm, etc.) of a screw which is a conventional fixing member. As a result, the degree of freedom of arrangement increases as compared with a fixing member such as a screw, and the wire rope 9 can be arranged at an appropriate position even in the case of the probe card 1 having a narrow pitch.

  As the wire rope 9, it is possible to use, for example, an ultrafine metal wire (SUS304 or the like) or an ultrafine fiber made of an aromatic polyamide resin. When a SUS304 metal wire is used as the wire rope 9, the tensile strength is 209 to 245 kgf / mm 2 (2000 to 2500 MPa). The tensile strength of is 6-7 kgf. When 20 such wire ropes 9 are used in the probe card 1 of FIG. 1, when all the wire ropes 9 are combined, it is possible to cope with a pressing force of about 180 kgf. The reaction force generated when the probe card 1 is pressed and contacted with 10,000 probes 7 that generate a reaction force of 10 gf per one is 100 kgf, but the wire rope 9 can handle up to 180 kgf as a whole. It can be fully supported.

  When the wire rope 9 passes through the lower surface of the second guide plate 6, the position of the through hole 19 is determined so as to pass through the gap between the probes 7 arranged at a narrow pitch. An example thereof is shown in FIG. 4, which is a view of the second guide plate 6 as viewed from below. As shown in the drawing, at this time, since the wire rope 9 has a small diameter as described above, it can be passed between the probes 7, and the through hole 19 is formed in the second guide hole 14. Since it can arrange | position between, it is also possible to arrange | position, without changing the arrangement | positioning of the conventional probe 7 so much.

  Two adjusting means 10 for fixing both ends of the wire rope 9 and adjusting the tension by the wire rope 9 are provided on the upper surface of the reinforcing plate 3. As shown in FIG. 3, the adjusting means 10 is attached to a base 20 fixed to the upper surface of the reinforcing plate 3 with screws 21, an adjusting screw 22 to be screw-engaged with the base 20, and an upper end of the adjusting screw 22. It comprises a cap 23 and a lever 24 for rotating the adjusting screw 22.

  At the center of the base 20, there are provided a first through hole 25 into which the wire rope 9 is inserted and a screw hole 26 that is located above the first through hole 25 and connected to the first through hole 25. . The adjustment screw 22 is provided with a second through hole 27 for inserting the wire rope 9 at the center, a lower portion where the first screw portion 28 is formed, and a lever insertion hole 32 for inserting the lever 24 formed in the horizontal direction. The intermediate portion is formed from an upper portion formed with a second screw portion 29 for winding the wire rope 9 around the screw groove, and a thrust bearing 30 is provided between the intermediate portion and the upper portion. .

  The cap 23 has a substantially cylindrical shape having an opening on the upper side, and has a shape in which an upper end is inclined toward the central direction. A plurality of injection holes 31 are provided on the side surface. The lever 24 is inserted into the lever insertion hole 32 and becomes a handle when the adjusting screw 22 is rotated. The lever 24 is detachable and may be inserted into the lever insertion hole 32 only when used.

  A method for fixing the wire rope 9 by the adjusting means 10 and a method for adjusting the tension will be described. The adjusting screw 22 is screw-engaged with the base 20. At this time, the first screw portion 28 of the adjusting screw is not completely engaged with the screw hole 26 of the base 20, but the screw engagement is made halfway. When the adjustment screw 22 is engaged with the base 20 in this way, the first through hole 25 of the base 20 and the second through hole 27 of the adjustment screw 22 are arranged in a straight line, and the wire rope 9 is The first through hole 25 and the second through hole 27 are inserted.

  The wire rope 9 protruding from above the second through hole 27 is wound along the screw groove of the second screw portion 29, and then the cap 23 is put on the second screw portion 29. At this time, the remaining portion of the wire rope 9 is cut. After covering the cap 23, an adhesive is injected from the injection hole 31 between the inner surface of the cap 23 and the second screw portion 29, and the cap 23, the second screw portion 29, and the gap therebetween. A certain wire rope 9 is fixed. When the adhesive is cured, the end portion of the wire rope 9 is fixed by the adjusting means 10 as shown in FIG.

  Similarly, the other end of the wire rope 9 is fixed using another adjusting means 10. In this manner, when both ends of the wire rope 9 are fixed by the two adjusting means 10 and the tension by the wire rope 9 is adjusted, the lever 24 is inserted into the lever insertion hole 32 and the first The screw part 28 is rotated. When the lever 24 is rotated in the direction to tighten the first screw portion 28, the tension by the wire rope 9 is reduced, and when the lever 24 is rotated in the direction to loosen the first screw portion 28, the tension by the wire rope 9 is reduced. Is increased. Thus, when the first screw portion 28 is rotated, the thrust bearing 30 is provided, so that the end state of the wire rope 9 is maintained without rotating the second screw portion 29. ing. The tension adjustment by the wire rope 9 can be adjusted by one adjusting means 10 as described above, but can also be adjusted by using two adjusting means 10.

  The adjustment of the tension by the wire rope 9 by the adjusting means 10 is performed while checking the flatness of the probe card 1, particularly the flatness of the second guide plate 6. A downward force is applied to the second guide plate 6 by the elastic force of the probe 7. Thus, the second guide plate 6 whose periphery is held by the guide means 8 is deformed such that the center is bent downward. On the other hand, the wire rope 9 applies a tension to the vicinity of the center of the second guide plate 6 upward (in the direction of the reinforcing plate 3) to deform the center of the second guide plate 6 downward. Suppress. The force acting on the second guide plate 6 can be adjusted to an appropriate state by adjusting the tension of the wire rope 9 by the adjusting means 10.

  As another form of the adjusting means 10, it is possible to adopt a form in which two adjusting means are combined into one. It is good also as a structure where two foundations are made into an integral structure and two adjustment screws are engaged with one foundation. Although the means using the adjusting screw 22 has been described as the adjusting means 10, other forms of adjusting means can be used.

  As described above, the plate-like support structure according to the present invention allows the second guide plate 6 to be applied with a force in a direction opposite to the elastic force of the probe 7 by using the wire rope 9. The deformation of the guide plate 6 can be suppressed and the flatness can be ensured, and the assembly of a narrow pitch probe card can be realized with a predetermined accuracy. Further, by suppressing the deformation of the second guide plate 6, the contact pressure of the portion where the probe 7 and the relay circuit board 4 are pressed and connected is ensured, and the stable electrical connection is maintained. It becomes possible to improve the reliability of the probe card 1 using the plate-like support structure of the invention.

  Next, the probe card 41 using the plate-like support structure of the second embodiment will be described. The same members as those in the first embodiment will be described using the same reference numerals. As shown in FIG. 5, the probe card 41 includes a main circuit board 2, a reinforcing plate 3, a relay circuit board 4 disposed at a distance from the lower surface of the main circuit board 2, and the relay as a plate-like body. A first guide plate 5 disposed at a distance from the lower surface of the circuit board 4 and a second guide plate 6 disposed at a distance from the lower surface of the first guide plate 5 are used.

  The probe card 41 includes a vertical probe 7 held by the first guide plate 5 and the second guide plate 6 as a member other than a plate-like body. Further, in the probe card 41, for the electrical connection between the main circuit board 2 and the relay circuit board 3, connection pins 42 incorporating springs are used. For this purpose, the probe card 41 is provided with a connection pin guide plate 43 provided with a guide hole 44 for holding the connection pin 42 between the main circuit board 2 and the relay circuit board 4. . The connection pin guide plate 43 is fixed to the holder using screws or the like.

  Since the probe card 41 uses the connection pin 42 with a built-in spring, a downward elastic force also acts on the relay circuit board 4. The relay circuit board 4 whose periphery is held by the holder 8 is deformed such that the center is bent downward by an elastic force. The deformation of the relay circuit board 4 also affects the second guide plate 6 that receives an elastic force via the probe 7 and causes deformation. Therefore, in the present embodiment, a structure in which the relay circuit board 4 is supported by the wire rope 49 is used as the support structure for the plate-like body. Such a plate-like support structure suppresses deformation of the relay circuit board 4 and further reduces the influence on the second guide plate 6.

  The wire rope 49 is arranged in a substantially U shape on the probe card 41, and both ends thereof are fixed by adjusting means 10 provided on the upper surface of the reinforcing plate 3. The reinforcing plate 3, the main circuit board 2, the connection pin guide plate 43, and the relay circuit board 4 are provided with two through holes 45, 46, 47, and 48 that are parallel to each other. The wire rope 49 is inserted into one through hole 45, 46, 47, 48, passes through the lower surface of the relay circuit board 4, and is inserted into the other through hole 45, 46, 47, 48. Both ends of the wire rope 49 protruding above the reinforcing plate 3 are fixed by the adjusting means 10, so that they are arranged in a substantially U shape.

  Since the distance between the two through holes 45 and 46 is wider than the distance between the two through holes 47 and 48, the wire rope 49 is connected to the main circuit board 2 and the connection pin guide plate 43. It is slanted between. This is because the positions where the two adjusting means 10 can be arranged and the positions where the through holes 47 and 48 can be arranged are limited by various conditions (for example, the probe 7 and the connection pin 42). As described above, the positions of the through holes 45, 46, 47, and 48 are appropriately determined according to various conditions. However, in some cases, the through holes 45, 46, 47, and 48 cannot be arranged on a straight line. However, since the wire rope 49 has flexibility, the support structure of the plate-like body of the second embodiment using the wire rope 49 is not necessarily a straight line, unlike a fixing means such as a bolt. It is not necessary to arrange so that it can be changed, and can be changed as appropriate, and it is possible to deal with probe cards having various structures.

  The wire rope 49 is disposed from one through hole 48 of the relay circuit board 4 through the lower surface of the relay circuit board 4 to the other through hole 48, but protrudes downward from the through hole 48. By the way, it bends at a right angle. In order to buffer this bending, a spacer 50 is provided on the lower surface of the relay circuit board 4 where the wire rope 49 passes so that the wire rope 49 does not contact the lower surface of the relay circuit board 4. ing.

  Both ends of the wire rope 49 are fixed using the adjusting means 10, but the structure of the adjusting means 10 for fixing and adjusting both ends of the wire rope 49 is the same as that of the first embodiment. Detailed description is omitted. In the probe card 41 using the plate-like support structure according to the present embodiment, the tension of the wire rope 49 is adjusted by rotating the adjusting screw 22 using the lever 24, thereby flattening the relay circuit board 4. The contact pressure of the pressing connection portion between the relay circuit board 4 and the main circuit board 2 by the connection pin 42 and the pressing connection portion between the relay circuit board 4 and the probe 7 are thereby secured. By ensuring the contact pressure, a stable electrical connection can be maintained and a highly reliable probe card can be realized. In addition, by assuring the flatness of the probe card 41 by the plate-like support structure of the present embodiment, it is possible to assemble a probe card with a narrow pitch with high accuracy.

  In the probe card 41, the support structure of the first embodiment using the wire rope 9 can be used simultaneously with the support structure of the plate-like body of the second embodiment. Accordingly, the second guide plate 6 and the relay circuit board 4 can be simultaneously supported by the two wire ropes 9 and 49, and the tension can be adjusted respectively.

  Next, a probe card 51 using the plate-like support structure of the third embodiment will be described. The probe card 51 is electrically connected to the relay circuit board 4 and the main circuit board 2 using the connection pins 42 incorporating springs, which is the same as the probe card 41 using the plate-like support structure of the second embodiment. It is a structure to connect to. Therefore, all members other than the wire rope and the through hole will be described using the members (including the reference numerals) of the probe card 41 of the second embodiment as they are.

  As shown in FIG. 6, the probe card 51 using the plate-like support structure of the third embodiment includes a main circuit board 2, a reinforcing plate 3, a connection pin guide plate 43, and a relay circuit as plate-like bodies. A substrate 4, a first guide plate 5, and a second guide plate 6 are used. The probe card 51 is a vertical type held by the connection pin 42 held by the connection pin guide plate 43, the first guide plate 5 and the second guide plate 6 as a member other than a plate-like body. The probe 7 is provided.

  In the probe card 51, an elastic force is applied downward to the relay circuit board 4 by the connection pins 42, and at the same time, an elastic force is applied downward to the second guide plate 6 by the probe 7. Therefore, the relay circuit board 4 and the second guide plate 6 are deformed by these elastic forces. Therefore, in the present embodiment, a structure for supporting the relay circuit board 4 and the second guide plate 6 in combination with two wire ropes 52 and 53 having different lengths is used as a support structure for the plate-like body. With such a plate-like support structure, the tension in the direction of the reinforcing plate 3 is applied, and the tension by the wire ropes 52 and 53 is adjusted using the adjusting means 10 to suppress the tension.

  The wire rope 52 is used to mechanically connect the relay circuit board 4 to the reinforcing plate 3 and apply tension. One through hole 54, 55, 56, 57 for inserting the wire rope 52 is provided in the reinforcing plate 3, the main circuit board 2, the connection pin guide plate 43, and the relay circuit board 4, respectively. The wire rope 52 is inserted into the through holes 54, 55, 56, and 57 and protrudes downward from the relay circuit board 4. The lower end of the wire rope 52 is fixed to the lower surface of the relay circuit board 4. The fixing method is not particularly limited. For example, the lower end of the wire rope 52 may be expanded in advance so that the wire rope 52 cannot be inserted into the through-hole 57, or using solder, adhesive, or the like. It may be fixed.

  The upper end of the wire rope 52 inserted into the through holes 54, 55, 56, 57 is fixed by the adjusting means 10 provided on the upper surface of the reinforcing plate 3. Thus, by adjusting the tension to the relay circuit board 4 by the wire rope 52 by the adjusting means 10, tension is applied upward (in the direction of the reinforcing plate 3) with respect to the relay circuit board 4, and The deformation of the relay circuit board 4 is suppressed.

  The wire rope 53 is used to mechanically connect the second guide plate 6 to the reinforcing plate 3 and apply tension. The through holes 54, 55, 56, 57, 58, 59 for inserting the wire rope 53 are provided in the reinforcing plate 3, the main circuit board 2, the connection pin guide plate 43, the relay circuit board 4, and the first circuit board. One guide plate 5 and one second guide plate 6 are provided. The wire rope 53 is inserted into the through holes 54, 55, 56, 57, 58, 59 and protrudes downward from the second guide plate 6. The lower end of the wire rope 53 is fixed to the lower surface of the second guide plate 6. As the fixing method, the same method as the wire rope 52 is used.

  The upper end of the wire rope 53 inserted into the through holes 54, 55, 56, 57, 58, 59 is fixed by the adjusting means 10 provided on the upper surface of the reinforcing plate 3. As a result, the tension applied to the second guide plate 6 by the wire rope 53 is adjusted by the adjusting means 10 to apply a tension upward (toward the reinforcing plate 3) with respect to the second guide plate 6. The deformation of the second guide plate 6 is suppressed.

  In the support structure for the plate-like body of the present embodiment, the relay circuit board 4 and the second guide plate 6 can be used even when only a narrow space can be secured by using a combination of the two wire ropes 52 and 53 arranged in a straight line. Both of these deformations are suppressed, and the flatness of the relay circuit board 4 and the second guide plate 6 is secured at the same time, whereby the relay circuit board 4 and the main circuit board 2 by the connection pins 42 are secured. By ensuring the contact pressure of the pressing connection part and the contact pressure of the pressing connection part of the relay circuit board 4 and the probe 7 at the same time, a stable electrical connection is maintained and a highly reliable probe card is realized. it can. Further, by assuring the flatness of the probe card 51 by using the plate-like support structure of the present embodiment, the assembly of a narrow pitch probe card can be realized with a predetermined accuracy.

  In the description of the plate-like support structure of the present invention, a vertical probe card is used, but the plate-like support structure of the present invention can also be used for a cantilever type probe card. Moreover, the support structure of the plate-shaped body of this invention can also be used in order to support plate-shaped bodies other than the plate-shaped body demonstrated in 1st-3rd embodiment. Furthermore, it is possible to use the support structure of the plate-like body of this embodiment in addition to the probe card.

1, 41, 51 Probe card 2 Main circuit board 3 Reinforcement plate 4 Relay circuit board 5 First guide plate 6 Second guide plate 7 Probe 8 Holder 9, 49, 52, 53 Wire rope 10 Adjusting means 12 Electrode 13 First guide Hole 14 Second guide hole 20 Base 22 Adjustment screw 23 Cap 24 Lever 42 Connection pin 43 Guide plate for connection pin 44 Guide hole

Claims (8)

It is a support structure of a plate-like body constituting the probe card,
Selecting a first plate-like body and a second plate-like body, which are at least two plate-like bodies, from a plurality of plate-like bodies arranged in parallel;
A support structure for a plate-like body, wherein the second plate-like body is supported using a wire rope having at least one end fixed to the first plate-like body.   A first through hole is provided in the first plate-like body, a second through-hole is provided in the second plate-like body, and the wire rope is inserted into the first through hole and the second through hole. The plate-like body support structure according to claim 1, wherein the second plate-like body is supported.   The wire rope is inserted into one of the first through holes and one of the second through holes, and is arranged in a substantially I shape to support the second plate-like body. The support structure of the plate-shaped body as described in 2.   3. The wire rope is inserted into two of the first through holes and two of the second through holes, and is arranged in a substantially U shape to support the second plate-like body. The support structure of the plate-shaped body as described in 2.   At least one third plate-like body formed with a third through hole is disposed between the first plate-like body and the second plate-like body, and the wire rope is inserted into the third through-hole. It inserts, The support structure of the plate-shaped object of any one of Claims 2-4 characterized by the above-mentioned.   At least one end of the wire rope is fixed by at least one adjusting means provided on the surface of the first plate opposite to the second plate, and the tension of the wire rope can be adjusted. The plate-like support structure according to any one of claims 2 to 4, wherein the support structure is a plate-like body.   The adjustment means includes a base fixed to the surface of the first plate-like body, an adjustment screw that is screw-engaged with the base, a cap that is attached to an upper end of the adjustment screw, and for rotating the adjustment screw The plate-like body support structure according to claim 6, wherein the plate-like body support structure is configured by a lever, and the tension of the wire rope can be adjusted by rotating the adjusting screw using the lever.   The diameter of the said wire rope is 30-200 micrometers, The support structure of the plate-shaped body of any one of Claims 1-7 characterized by the above-mentioned.