JP2016048110A - Manifold valve and fluid control device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manifold valve which can eliminate a manifold block joint by a small change, and a fluid control device having the manifold valve.SOLUTION: A manifold valve comprises: a plurality of first gateway passages 31, as a plurality of fluid passages 31, 32, 33, 34 and 35 of a passage block 30, whose upper ends communicate with first ports 14a, respectively, and whose lower ends are located in the passage block 30; a plurality of first external communication passages 32 whose upper ends communicate with the lower ends of the first gateway passages 31, respectively, and whose lower ends are opened at a lower face of the passage block 30; second external communication passages 33 whose upper ends communicate with the lower ends of the first gateway passages 31, respectively, and whose other ends are opened at the lower face of the passage block 30 in positions different from those of the first external communication passages 32; a plurality of second gateway passages 34 whose upper ends communicate with second ports 14b, respectively, and whose lower ends are located in the passage block 30; and internal communication passages 35 which make the lower ends of the second gateway passages 34 communicate with each other.SELECTED DRAWING: Figure 5

Description

  The present invention relates to a manifold valve and a fluid control device, and more particularly to a manifold valve suitable for use in a fluid control device called an integrated fluid control device and a fluid control device including the manifold valve.

  In a fluid control device used in a semiconductor manufacturing apparatus or the like, a single line includes a plurality of fluid control devices (upper layer) arranged in the upper stage and a plurality of block-shaped joint members (lower layer) arranged in the lower stage. As the plurality of lines are arranged in parallel with their inlets and outlets facing in the same direction, the integration of configuring the fluid control device without going through pipes and pipe joints has progressed. Yes.

In such a fluid control device, a bypass line (N ₂ purge line) is provided to purge the process gas line. Conventionally, the bypass line is configured to perform bypass on the lower layer side using a three-way valve, and a manifold block joint is used for this purpose.

  Patent Document 1 discloses a manifold valve composed of a plurality of on-off valves and a passage book as an alternative to the fluid control device (shown in FIG. 12 of the same document) in which a manifold block joint is disposed in the lower layer. It is proposed to obtain a fluid control device (shown in FIG. 1 of the same patent document) that does not use a manifold block joint.

  On the other hand, Patent Document 2 discloses a fluid control device in which a rail that supports a joint member is provided for each line, and the joint member is fixed to a sliding member that slides along the rail with a bolt. ing.

  According to the fluid control device of Patent Document 2, necessary fluid control devices and joint members can be assembled in advance in a rail to create one line, and each line can be attached to the base member. It has the advantage of being easy to do.

JP2013-231460A JP 2002-206700 A

  According to the fluid control device of Patent Document 1, the manifold block joint can be omitted by using the manifold valve, but the manifold valve is not supported by the joint. There is a problem that the change when changing from the one shown in FIG. 12 to the one shown in FIG.

  Moreover, according to the rail-type fluid control device of Patent Document 2, it is necessary to fix the joint member to the sliding member sliding along the rail with a bolt, and the number of parts constituting each line increases. There was a problem that it took time and labor to assemble each line.

  An object of the present invention is to provide a manifold valve that can omit a manifold block joint and a fluid control device including the manifold valve with few modifications.

  Another object of the present invention is a rail-type fluid control apparatus that can be attached to a base member line by line, and that does not require time and effort to assemble each line by reducing the number of parts constituting each line. And a fluid control apparatus including the manifold valve.

  A manifold valve according to the present invention includes a plurality of on-off valves each having a first port and a second port, and a passage block in which a plurality of fluid passages are formed to support the plurality of on-off valves. , One end communicates with each first port, the other end communicates with the first entrance / exit passage in the passage block, and one end communicates with the other end of the first entrance / exit passage, and the other end opens on one surface of the passage block. A first external communication path, a second external communication path having one end communicating with the other end of the first entrance / exit path, and the other end opening on either surface of the path block at a position different from the first external communication path, and one end Are connected to each second port, and a plurality of second entrance / exit passages having the other end in the passage block and an internal communication passage communicating the other ends of each second entrance / exit passage are provided. Do Than is.

  The on-off valve has a valve body (for example, a diaphragm) disposed between a first port that is an opening of the first entrance / exit passage and a second port that is an opening of the second entrance / exit passage, and moves the valve body to the first An actuator that opens and closes (opens or closes) communication between the port and the second port is provided.

  One of the first external communication path and the second external communication path is a fluid inflow path from the outside of the manifold valve, and the other is a fluid outflow path to the outside of the manifold valve.

  Since the first external communication path and the second external communication path are always in communication, the fluid flowing from the outside of the manifold valve (upstream side) regardless of whether the on-off valve is open or closed is outside the manifold valve (downstream). To the side).

  When the required on-off valve is opened, the fluid that flows in from the first external communication path or the second external communication path and reaches the first entrance / exit path enters the second entrance / exit path corresponding to the first entrance / exit path. Inflow. The fluid flowing into the second entrance / exit passage flows into another second entrance / exit passage through the internal communication passage. When the other on-off valve is also opened, the fluid in the second inlet / outlet passage flows into the first inlet / outlet passage corresponding to the second inlet / outlet passage, and is manifolded from the first external communication passage and the second external communication passage. It flows out of the valve (downstream).

  Thus, the fluid flowing in from the first external communication path (or the second external communication path) of the predetermined one line not only flows out from the corresponding second external communication path (or the first external communication path). Also, it flows out from the other first external communication path and the second external communication path. That is, according to the manifold valve of the present invention, a bypass function can be obtained.

  The manifold valve of the present invention is suitably used, for example, in the fluid control device shown below, but can be used in various other applications.

  The fluid control device according to the present invention is a fluid control device having a plurality of lines including a fluid control device arranged in the upper stage, a joint member arranged in the lower stage, and a line support member supporting the joint member. The arranged fluid control device has a manifold valve arranged over a plurality of lines. The manifold valve is a manifold valve according to claim 1 and is arranged across the joint member of each line. One external communication path is connected to a path provided on one side of the joint member, and a second external communication path is connected to a path provided on the other side of the joint member.

  If the above manifold valve is used as a fluid control device in the upper layer of the fluid control device, piping for the bypass function is not required separately, which increases the number of welding points and the internal volume (increase in purge time). Generation | occurrence | production can be prevented and a bypass function can be obtained without using the manifold block as a coupling member of a lower layer, and a fluid control apparatus can be simplified.

  In the fluid control device according to the present invention, a rail is used as the line support member, an engagement portion extending in the longitudinal direction is provided on the rail, and a joint member extends in the rail longitudinal direction engaging with the engagement portion. It is preferable that the engaged member is provided and the joint member is supported by the rail by the engaged portion of the joint member engaging the corresponding engaging portion.

  According to this fluid control device, since the rail-type sliding member that has been conventionally used can be eliminated, the number of parts constituting each line can be reduced, and the labor for assembling each line can be reduced. .

  In order for the engaged part of the joint member to engage with the engaging part of the corresponding rail, the joint member must be provided for each line, and the manifold block joint used over multiple lines should be used. I can't. By using this manifold valve, it is possible to omit the manifold block joint while leaving the joint provided for each line among the joint members arranged in the lower stage. The engaged portion of the rail can be engaged with the engaging portion of the corresponding rail, which is preferable for use in a rail-type fluid control device that uses a rail as a line support member.

  In the rail-type fluid control device described above, the engaged portion of the joint member may be a groove, the rail engaging portion may be a convex portion, and the engaged portion of the joint member may be a convex portion. The engaging portion of the rail may be a groove.

  In each line, a fluid control device arranged across adjacent joint members among a plurality of joint members fitted to the rail is attached to the joint member by a male screw member from above.

  The rail has a pair of side walls extending in parallel to each other, a positioning portion for positioning the joint member, and an attachment portion fixed to the base member that supports the rail, and the engaging portion is provided on each side wall. As a convex portion. The rail has a pair of side walls extending in parallel to each other, a positioning portion for positioning the joint member, and an attachment portion fixed to the base member that supports the rail, and the engagement with each side wall. A groove as a part may be provided.

  In the case where the engaged portion of the joint member is a groove and the engaging portion of the rail is a convex portion, for example, the rail has a pair of side walls extending in parallel to each other and from the upper end of each side wall to the other side wall. A pair of upper walls that extend vertically and face each other at a predetermined interval, and a lower wall that joins the lower ends of the pair of side walls, and the inner edge of the upper wall is used as the convex portion. The upper wall is provided with a protruding portion as a positioning portion for positioning the joint member at one end portion of each upper wall, and is protruded to one end side from the upper wall at one end portion of the lower wall to support the rail. Although the attachment part fixed to a base member shall be provided, it is not limited to this.

  When the engaged portion of the joint member is a convex portion and the engaging portion of the rail is a groove, for example, the rail couples a pair of side walls extending in parallel with each other and lower ends of the pair of side walls. Each of the side walls is provided with a groove as the engaged portion, and one end portion of each side wall is provided with a protruding portion as a positioning portion for positioning the joint member. Further, it is assumed that there is provided an attachment portion that is projected to one end side from the upper wall and fixed to the base member that supports the rail.

  The plurality of joint members are sequentially fitted to the rail from the other end of the rail (the end opposite to the end provided with the mounting portion), and the joint member to be fitted first is the positioning portion (end Wall or protrusion). By sliding a joint member along a rail, the space | interval of adjacent joint members is adjusted, a fluid control apparatus is mounted on a joint member, and it fixes with a volt | bolt. Thus, a plurality of joint members and a plurality of fluid control devices are supported by the rail in an integrated state, and one line is formed. Each joint member is not directly fixed to the base member, but the engaged member is engaged with the corresponding engaging portion, so that the joint member is prevented from coming off from the rail.

  The line support member is further fixed to the base member in contact with the joint member disposed at the end of the rail, and further includes a stopper that prevents the disposed joint member from falling off the rail in the longitudinal direction. It is preferable.

  The stopper is a separate member from the rail, and is attached to the base member after all the fluid control devices are fixed to the corresponding joint members with bolts. As a result, the plurality of integrated joint members and the plurality of fluid control devices are sandwiched between the rail positioning portion and the stopper, and are prevented from moving in the longitudinal direction.

  Since the length of each line changes depending on the number of fluid control devices used, it is of course possible to change the length of the rail corresponding to this, but the length of the rail is kept constant ( You may make it respond | correspond to the length difference of a line only by changing the attachment position to the base member of a stopper according to the thing with a short length of a line.

  In this specification, the upper and lower sides are the fluid control device side on the upper side and the joint member side on the lower side. However, the upper and lower sides are for convenience, and the upper and lower sides are reversed or the upper and lower sides are left and right. Sometimes used.

  According to the present invention, as the plurality of fluid passages of the passage block, one end is in communication with each first port, the other end is in the passage block, and one end is the other end of each first entrance passage. A plurality of first external communication passages whose other ends are open on either side of the passage block, one end communicates with the other end of each first entrance / exit passage, and the other end is the first external communication passage. Second external communication passages that open to either surface of the passage block at different positions, a plurality of second entrance / exit passages with one end communicating with each second port and the other end within the passage block, and each second entrance / exit Since there is an internal communication passage that communicates the other ends of the passage, for example, if this is used as a fluid control device in the upper layer of the fluid control device, piping for a bypass function is not required separately. Increase in weld locations To prevent the problem of increase in internal volume (increase in purge time) and to obtain a bypass function without using a manifold block as a lower layer joint member, and simplify the fluid control device Can do.

FIG. 1 is a perspective view showing an embodiment of a fluid control apparatus including a manifold valve according to the present invention. FIG. 2 is a perspective view showing an embodiment of a manifold valve according to the present invention. FIG. 3 is a schematic view showing a passage along line III-III in FIG. FIG. 4 is a schematic view showing a passage along line IV-IV in FIG. FIG. 5 is a schematic view showing a passage along the line VV in FIG. FIG. 6 is a perspective view showing a line support member of the fluid control device. FIG. 7 is a perspective view showing an example of a joint member of the fluid control device. FIG. 8 is a perspective view showing another example of the joint member of the fluid control device.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 shows an embodiment of a fluid control apparatus having a manifold valve according to the present invention.

  The fluid control device (1) shown in FIG. 1 includes a plurality (three in the drawing) of process gas lines (2) and one purge gas line (3).

  Each line (2) (3) includes an upper layer composed of fluid control devices (10) (11) (12) (13) (15) (16) (17) (18), and fluid control devices (10) ( 11) (12) (13) (15) (16) (17) (18) Rails as line support members, separated from the lower layer consisting of joint members (21) (22) that connect the passages (4) Supported by (5).

  Each process gas line (2) includes, as a fluid control device, a flow rate controller (11), an inlet side first on-off valve (12) disposed on the inlet side of the flow rate controller (11), and a pressure regulator (13). A manifold valve (10) having an inlet-side second on-off valve (14), an inlet-side third on-off valve (15), and an outlet-side on-off valve (16) disposed on the outlet side of the flow rate controller (11) It has.

  The purge gas line (3) does not have a flow controller as a fluid control device, and has an inlet side first on-off valve (12), a pressure regulator (13), a pressure sensor (17), A manifold valve (10) having a filter (18) and a second opening / closing valve (14) on the inlet side is shared with the process gas line (2).

  Each inlet-side second on-off valve (14) is not provided for each line (2) (3), but as four inlet-side second on-off valves (14), four lines (2) ( A manifold valve (10) arranged across 3) is used. All fluid control devices (11) (12) (13) (15) (16) (17) (18) other than this manifold valve (10) are used for each line (2) (3). It is a member.

  Intermediate joints arranged to connect adjacent fluid control devices (10) (11) (12) (13) (15) (16) (17) (18) as joint members (21) (22) Used by the member (21) and the end joint member (22) with pipe joint (22a) arranged at each end of each process gas line (2) and at the inlet end of the purge gas line (3) Has been.

  As shown in FIG. 7, the intermediate joint member (21) has a V-shaped or U-shaped communication path (52) whose both ends open upward, and the end joint member (22) As shown in FIG. 8, it has an L-shaped communication path having one end opened upward and the other end opened in a direction orthogonal thereto. These joint members (21) and (22) are used for each line (2) and (3), and manifold block joints arranged across multiple lines (2) and (3). Is not used.

  Each fluid control device (10), (11), (12), (13), (15), (16), (17), and (18) has a corresponding joint member (21) (22) by a bolt (20) that is tightened from above. It is attached so that it can be taken out upward.

  The flow rate controller (11) is supported by passage blocks (11a) and (11b) provided on the inlet side and outlet side of the lower surface of the flow rate controller (11). The inlet-side third on-off valve (15), the outlet-side on-off valve (16), the pressure sensor (17), and the filter (18) are respectively provided with passage blocks (12a), (13a), (15a) ( 16a) (17a) (18a).

  As shown in detail in FIGS. 2 to 5, the manifold valve (10) includes a plurality of inlet-side second on-off valves (hereinafter simply referred to as “on-off valves”) (14) corresponding to each line, The passage block (30) has fluid passages (31), (32), (33), (34), and (35) and supports a plurality of on-off valves (14).

  Passage block (11a) (11b) (12a) (13a) (15a) (16a) (16a) of each fluid control device (10) (11) (12) (13) (15) (16) (17) (18) Sealing members (not shown) for sealing the communicating portions are provided on the abutting surfaces of the joint members (21), (22) and 17a) (18a) (30). There is no communicating portion between the adjacent joint members (21) and (22), and no seal member is used.

  Each on-off valve (14) is, for example, a diaphragm valve, and is pressed against the first port (14a) and the second port (14b) serving as the opening of the fluid passage, and the seat provided at the periphery of the first port (14a). Alternatively, a diaphragm (valve element) that opens and closes the fluid passage by being separated and an actuator that moves the diaphragm are provided. The on-off valve (14) may be a needle valve, a lift valve or the like. 3 to 5, only the ports (14a) and (14b) are shown for the on-off valve (14), and diaphragms, actuators, and the like are omitted.

  The passage block (30) has a rectangular parallelepiped shape that is long in a direction perpendicular to the lines (2) and (3), and a plurality of sets of upstream sides (inlets) arranged at the lower stage for each line (2) and (3) End joint member (22a) with pipe fitting (22a) arranged at the side end and end fitting member (22a) with pipe fitting (22a) arranged at the inlet end (22) ) And the intermediate joint member (21) on the far side).

  The passage block (30) has a plurality of fluid passages (31), (32) and (33) whose upper ends communicate with the first ports (14a) of the respective on-off valves (14), and which extend downward and the lower ends are passage blocks. (30) a plurality of first entrance / exit passages (31) and upper ends thereof respectively communicate with the lower ends of the respective first entrance / exit passages (31), and the lower ends extend obliquely downward to the upstream side and the lower end is the lower surface of the passage block (30). A plurality of first external communication passages (32) that open to the lower end of each first entrance / exit passage (31), the lower ends extend obliquely downstream, and the lower ends of the first external communication passages (31) And a second external communication passage (33) opened on the lower surface of the passage block (30) at a position different from 32).

  The first external communication path (32) and the second external communication path (33) are always in communication regardless of whether each on-off valve (14) is open or closed. The first external communication path (32) is connected to the downstream opening of the V-shaped communication path (52) provided in the intermediate joint member (21) arranged on the upstream side, and the second external communication path (33) is connected to the upstream opening of the V-shaped communication path (52) of the intermediate joint member (21) disposed on the downstream side.

  The passage block (30) further includes a plurality of fluid passages (34) and (35) whose upper ends communicate with the second ports (14b) of the respective on-off valves (14) and extend downward to form the passage blocks ( 30) Internal communication passages (35) extending in a direction perpendicular to the respective lines (2) and (3) by connecting the plurality of second entrance / exit passages (34) and the lower ends of the second entrance / exit passages (34) to each other. ) And are provided.

  The fluid flowing into any one of the second entrance / exit passages (34) reaches the other second entrance / exit passage (34) through the internal communication passage (35). When the communication between the first port (14a) and the second port (14b) is closed, the further flow of the fluid is stopped and the first port (14a) and the second port (14b) are stopped. When communication with the fluid is opened, the fluid flows from the second entrance / exit passage (34) to the first entrance / exit passage (31).

  In each process gas line (2), with the on-off valve (14) of the manifold valve (10) being closed, it flows from the end joint member (22) with the pipe joint (22a) and flows into the manifold valve (10 The fluid that has reached the first external communication passage (32) reaches the inlet-side third on-off valve (15) through the second external communication passage (33) and the intermediate joint member (21). And since the inlet side 3rd on-off valve (15) is opened, it flows in into the flow controller (11).

  In the purge gas line (3), pressurize with purge gas with all the manifold valves (10) open / close valves (14) closed, and then open the required manifold valve (10) open / close valves (14). As a result, the purge gas flowing from the end joint member (22) with the pipe joint (22a) and reaching the first external communication passage (32) of the manifold valve (10) flows into the on-off valve (14 ) Is opened, it flows into the second entrance / exit passage (34) through the first entrance / exit passage (31). Here, since the first external communication path (32) and the second external communication path (33) are always in communication, the purge gas flows from the first external communication path (32) to the second external communication path (33). Also flows into the downstream intermediate joint member (21) and is closed by the closing plug. The purge gas flowing into the second inlet / outlet passage (34) flows into the other second inlet / outlet passage (34) through the communication passage (35). The required opening / closing valve of the manifold valve (10) (the opening / closing valve of the purge gas line (3) and the opening / closing valve of the purged process gas line (2)) (14) is opened. The purge gas that has flowed into 34) reaches the corresponding first inlet / outlet passage (31), passes through the second external communication passage (33), flows into the downstream intermediate joint member (21), and is closed by the stopper plug. .

  Each line (2) (3) is attached to a base member (not shown) via rails (4) and (5) as follows.

  As shown in FIG. 6, the rail (5) (the rail (4) has the same shape) is composed of a pair of side walls (41) extending parallel to each other perpendicular to the surface of the base member, and upper ends of the side walls (41). A pair of upper walls (42) and a lower end portion of the pair of side walls (41) extending vertically from one side to the other side wall (41) (parallel to the surface of the base member) and facing each other at a predetermined interval A lower wall (43) connecting the two. The side wall (41), the upper wall (42), and the lower wall (43) have the same thickness.

  A protruding portion (positioning portion) (44) for positioning the outlet side end face of the end joint member (22) disposed on the outlet side is provided at the outlet side end portion of each upper wall (42). Further, the outlet side end portion of the lower wall (43) protrudes outward in the length direction from the upper wall (42), and this portion serves as a mounting portion (45) fixed to the base member. Yes.

  The mounting portion (45) is provided with a through hole (45a) .By aligning the through hole (45a) with the screw hole provided in the base member and screwing the bolt into the screw hole, the rail ( 4) (5) can be fixed to the base member.

  As shown in FIG. 7, the intermediate joint member (21) has a rectangular parallelepiped block-shaped main body (51) and a fluid control device (10) (11) (12) (13) (15) (16) (17) (18 ) Fluid passages (52) for communicating the fluid passages, and the main body (51) is further opened to the upper surface to provide fluid control devices (10) (11) ( 12) (13) (15) (16) (17) (18) Screw holes (53) used for mounting are provided, but no through holes used as bolt insertion holes are provided It is said that.

  Grooves (engaged parts) (54) extending in the longitudinal direction of the rail that engage with the inner edge of the upper wall (42) of the rail (4) (5) are formed on both sides of the main body (51). Yes. The groove (54) is used to slidably engage the intermediate joint member (21) with the rail (4) (5), and the groove (54) corresponds to the rail (4) (5 The intermediate joint member (21) is supported by the rails (4) and (5) by engaging with the inner edge of the upper wall (42).

  As shown in FIG. 8, the end joint member (22) is connected to the fluid control device (10) (11) (12) (13) (15) (16) (17) ( 18) is formed with an L-shaped communication passage (57) for communicating the fluid passages with each other. The main body (56) is further opened at the upper surface to provide fluid control equipment (10) (11) (12) (13) (15) (16) (17) (18) is provided with a screw hole (58) that is used for mounting, and there is no through hole used as a bolt insertion hole It is supposed to be.

  Grooves (engaged parts) (59) extending in the longitudinal direction of the rail that engage with the inner edge of the upper wall (42) of the rail (4) (5) are formed on both sides of the main body (56). Yes. The groove (59) is used to slidably engage the end joint member (22) with the rail (4) (5), and the groove (59) corresponds to the rail (4) ( 5) The end joint member (22) is supported by the rails (4) and (5) by engaging the inner edge of the upper wall (42).

  The joint members (21) and (22) are slidably fitted to the rails (4) and (5), and are arranged at predetermined positions. A stopper (6) for preventing the end joint member (22) from falling off the rails (4) (5) is provided at the inlet side end of the rails (4) (5).

  The stopper (6) is formed in an inverted U shape when viewed from the front (rail longitudinal direction) and an L shape when viewed from the side (direction perpendicular to the rail longitudinal direction). As shown in FIG. (4) A contact portion (46) that faces the end face of (5) parallel to the end face of the inlet side end joint member (22), and a contact portion (46) that is perpendicular to the contact portion (46). And an attachment portion (47) fixed to the base member. The mounting portion (47) is provided with a through hole (47a) .By aligning the through hole (47a) with the screw hole provided in the base member and screwing the bolt into the screw hole, a stopper ( 6) can be fixed to the base member.

  The inner edge of the upper wall (42) of the rail (4) (5) forms a convex portion as an engaging portion, and each joint member (21) (22) has a groove (54) (59) Engagement between the inner edge of the upper wall (42) and the grooves (54) (59) with the lower part being accommodated between the pair of side walls (41) of the rail (4) (5) Thus, the arrangement height can be moved to an appropriate position in the rail longitudinal direction without changing.

  Each line (2) (3) is bolted to the joint member (21) (22) to which the fluid control device (10) (11) (12) (13) (15) (16) (17) (18) corresponds. The end joint member (22), which is integrated by being fixed at (20) and arranged at the outlet side end and the inlet side end, has a protrusion (44) and a stopper (44) of the rail (4) (5). The joint member to which the fluid control device (10) (11) (12) (13) (15) (16) (17) (18) is fixed by being sandwiched between the abutting part (46) of 6) (21) Movement in the rail longitudinal direction of (22) is prevented. Each joint member (21) (22) has a groove (54) (59) on both side surfaces engaged with the inner edge of the upper wall (42) of the rail (4) (5). 4) It is prevented from coming off from (5). Therefore, the lines (1) and (2) can be installed without directly fixing the joint members (21) and (22) to the base member. In this way, it is possible to save time and effort for assembling the lines (2) and (3) without increasing the number of parts.

  In the embodiment shown in FIGS. 6 to 8, the rails (4) and (5) are provided with an upper wall (42), and the inner edge thereof is a convex portion as an engaging portion. The joint members (21) and (22) are formed with grooves (54) and (59) as engaged portions that engage with the convex portions. Any joint member (21) (22) may be used as long as it is slidably supported by the rail (4), and can be changed as appropriate.

  According to the manifold valve (10), it is possible to obtain a bypass function for supplying fluid from a predetermined line (3) to one or more other lines (2).

  Conventionally, in order to obtain a bypass function, for example, a three-way valve is arranged in the upper layer and a manifold block joint is used as a joint member in the lower layer.

  Here, like the combination of the rails (4) and (5) and the joint members (21) and (22), the grooves (54) and (59) are formed on the side surfaces of the block-shaped joint members (21) and (22). When the grooves (54) (59) and the rails (4) (5) are engaged with each other, there is a problem that the manifold block joint cannot be used. In this case, it is possible to bypass by installing the piping in the upper layer, but since a separate piping is required, there arises a problem of an increase in welding locations and an increase in internal volume (increase in purge time).

  According to the fluid control device (1), since the manifold valve (10) is used, a three-way valve function for flowing two fluids in the upper layer and a fluid flow from a predetermined line to another line Therefore, the rail type fluid control device (1) using the rails (4) and (5) can be simplified.

  The manifold valve (10) can also be used in a fluid control device (1) that does not use rails (4) and (5). Further, the configuration of the manifold valve (10) and the configurations of the lines (2) and (3) can be variously changed according to the use and specifications of the fluid control device (1).

(1): Fluid control device, (4) (5): Rail, (10): Manifold valve, (11) (12) (13) (15) (16) (17) (18): Fluid control equipment, (14): Inlet-side second on-off valve (on-off valve), (14a): First port, (14b): Second port, (21) (22): Joint member, (30): Passage block, (31 ): First entrance / exit passage, (32): First external communication passage, (33): Second external communication passage, (34): Second entrance / exit passage, (35): Internal communication passage, (42): Upper wall (Engagement part), (54) (59): groove (engaged part)

Claims (3)

In a manifold valve comprising a plurality of on-off valves each having a first port and a second port, and a passage block in which a plurality of fluid passages are formed to support the plurality of on-off valves,
One end communicates with each first port, the other end communicates with the first entrance / exit passage in the passage block, and one end communicates with the other end of the first entrance / exit passage, and the other end opens on one surface of the passage block. A first external communication path, one end communicating with the other end of the first entrance / exit path, and the other end opening on one surface of the path block at a position different from the first external communication path; A plurality of second entrance / exit passages communicating with each second port and having the other end in the passage block, and an internal communication passage communicating the other end of each second entrance / exit passage are provided. Manifold valve. In the fluid control apparatus having a plurality of lines including a fluid control device arranged in the upper stage, a joint member arranged in the lower stage, and a line support member supporting the joint member,
As a fluid control device arranged in the upper stage, it has a manifold valve arranged over multiple lines,
The manifold valve is a manifold valve according to claim 1 and is disposed across the joint member of each line. The first external communication path is provided in one of the joint members, and the second external communication path is provided in the joint. A fluid control device, wherein the fluid control device is connected to a passage provided on the other side of the member.   A rail is used as the line support member, the rail is provided with an engaging portion extending in the longitudinal direction, and the joint member is provided with an engaged portion extending in the rail longitudinal direction that engages with the engaging portion. The fluid control device according to claim 2, wherein the joint member is supported by the rail when the engaged portion of the joint member is engaged with the corresponding engagement portion.

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