JP2016038300A5 - - Google Patents

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Publication number
JP2016038300A5
JP2016038300A5 JP2014161973A JP2014161973A JP2016038300A5 JP 2016038300 A5 JP2016038300 A5 JP 2016038300A5 JP 2014161973 A JP2014161973 A JP 2014161973A JP 2014161973 A JP2014161973 A JP 2014161973A JP 2016038300 A5 JP2016038300 A5 JP 2016038300A5
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JP
Japan
Prior art keywords
light spot
microlens
center
gravity
target region
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JP2014161973A
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English (en)
Japanese (ja)
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JP6508896B2 (ja
JP2016038300A (ja
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Priority to JP2014161973A priority Critical patent/JP6508896B2/ja
Priority claimed from JP2014161973A external-priority patent/JP6508896B2/ja
Priority to US14/818,703 priority patent/US20160041063A1/en
Priority to EP15002338.0A priority patent/EP2982946A1/en
Publication of JP2016038300A publication Critical patent/JP2016038300A/ja
Publication of JP2016038300A5 publication Critical patent/JP2016038300A5/ja
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Publication of JP6508896B2 publication Critical patent/JP6508896B2/ja
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JP2014161973A 2014-08-08 2014-08-08 光波面センサにおける光スポット重心位置取得方法、光波面計測方法およびプログラム Active JP6508896B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014161973A JP6508896B2 (ja) 2014-08-08 2014-08-08 光波面センサにおける光スポット重心位置取得方法、光波面計測方法およびプログラム
US14/818,703 US20160041063A1 (en) 2014-08-08 2015-08-05 Light spot centroid position acquisition method for wavefront sensor, wavefront measurement method, wavefront measurement apparatus and storage medium storing light spot centroid position acquisition program
EP15002338.0A EP2982946A1 (en) 2014-08-08 2015-08-05 Light spot centroid position acquisition method for wavefront sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014161973A JP6508896B2 (ja) 2014-08-08 2014-08-08 光波面センサにおける光スポット重心位置取得方法、光波面計測方法およびプログラム

Publications (3)

Publication Number Publication Date
JP2016038300A JP2016038300A (ja) 2016-03-22
JP2016038300A5 true JP2016038300A5 (enExample) 2017-09-21
JP6508896B2 JP6508896B2 (ja) 2019-05-08

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ID=53783554

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JP2014161973A Active JP6508896B2 (ja) 2014-08-08 2014-08-08 光波面センサにおける光スポット重心位置取得方法、光波面計測方法およびプログラム

Country Status (3)

Country Link
US (1) US20160041063A1 (enExample)
EP (1) EP2982946A1 (enExample)
JP (1) JP6508896B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL251636B (en) * 2017-04-06 2018-02-28 Yoav Berlatzky Coherence camera system and method thereof
CN108181007B (zh) * 2017-12-19 2019-07-26 中国科学院长春光学精密机械与物理研究所 哈特曼波前探测器弱信号的光斑质心计算方法
CN111238664B (zh) * 2020-02-24 2021-03-30 中国科学院云南天文台 基于区域探测和重构的夏克哈特曼波前探测方法
CN113155755B (zh) * 2021-03-31 2022-05-24 中国科学院长春光学精密机械与物理研究所 微透镜阵列型成像光谱仪在线标定方法
CN116296288A (zh) * 2023-03-21 2023-06-23 深圳市都乐精密制造有限公司 一种快速应对多重结构功能光学系统的检测结构及方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2788597B1 (fr) * 1999-01-15 2001-02-23 Imagine Optic Sarl Procede et dispositif d'analyse de front d'onde a grande dynamique
JP2007069283A (ja) * 2005-09-05 2007-03-22 Nikon Corp 加工装置および加工装置を用いた製造方法
JP5452032B2 (ja) 2009-02-13 2014-03-26 株式会社日立製作所 波面収差測定方法及びその装置
US8622546B2 (en) * 2011-06-08 2014-01-07 Amo Wavefront Sciences, Llc Method of locating valid light spots for optical measurement and optical measurement instrument employing method of locating valid light spots
JP5896792B2 (ja) * 2012-03-09 2016-03-30 キヤノン株式会社 非球面計測方法、非球面計測装置および光学素子加工装置
JP6000577B2 (ja) * 2012-03-09 2016-09-28 キヤノン株式会社 非球面計測方法、非球面計測装置、光学素子加工装置および光学素子の製造方法
JP6494205B2 (ja) * 2013-07-31 2019-04-03 キヤノン株式会社 波面計測方法、形状計測方法、光学素子の製造方法、光学機器の製造方法、プログラム、波面計測装置

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