JP2016030280A - Method and apparatus for laser welding of metal foil - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and an apparatus for laser welding of a metal foil, which can suppress occurrence of a spatter and blow hole.SOLUTION: An apparatus for laser welding of a metal foil includes: a foil welding jig which presses and fixes plural sheets of laminated metal foils; laser welding means which applies laser beam to welding portions of the metal foils to perform welding; and gas supply means which supplies an inert gas to the welding portions of the metal foils when welding those metal foils. The foil welding jig is equipped with a pressing side jig member and a receiving side jig member. The pressing side jig member has at least one through-hole which is provided correspondingly to the welding portion and through which laser beam passes. The receiving side jig member has a projection part which can fit into a lower side opening of the through-hole of the pressing side jig member.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a laser welding method and apparatus for welding a plurality of laminated metal foils using laser light.

  In recent years, there have been a series of accidents in which private passenger aircraft batteries generate heat and catch fire. This battery is a lithium ion battery, and it has been reported that an electrical short circuit occurred in one of a plurality of battery cells to cause a thermal runaway, and the fire broke out when it spread to other battery cells.

  In the conventional laminated lithium ion battery including the lithium ion battery which caused this accident, an ultrasonic bonding method is used for joining the many electrode current collector foils and between the electrode current collector foil and the electrode tab. Yes.

  The ultrasonic bonding method has a limit to the number of foils that can be laminated (about 40 sheets). Moreover, when the number of foils increases, the upper layer part is compressed abnormally by the pressure at the time of joining, and the edge part is further affected by vibration. It becomes easy to peel off and easily cut. When the edge is cut, an overcurrent flows through the electrode current collector foil and high heat is generated, causing an accident.

  There has been proposed a method of welding a laminated foil and a current collector foil by laser welding without using an ultrasonic bonding method (for example, Patent Document 1 and Patent Document 2).

  In Patent Document 1, an electrode group in which a positive electrode plate and a negative electrode plate are laminated or wound via a separator is prepared, and one end of a lead is connected to one electrode plate of the electrode group. It is housed in a battery case, the other end of the lead is brought into contact with the sealing plate, and fiber laser light having a spot diameter smaller than the thickness of the lead is irradiated from the lead side while continuously scanning. A method for manufacturing a sealed secondary battery in which the other end is laser-welded to a sealing plate and the opening of the front pond case is sealed with the sealing plate is disclosed.

  In Patent Document 2, as a metal foil welding method in which a plurality of metal foils arranged on a welding table are welded to each other with laser light, a pressure gas is applied onto the plurality of metal foils arranged in a stack. The portion compressed by the pressure gas is relatively moved in one direction by relatively moving in one direction while locally injecting, and toward the portion compressed by the injection of pressure gas on a plurality of metal foils. A metal foil welding method is disclosed in which a plurality of metal foils are welded to each other by moving the irradiation position of the laser light in one direction while irradiating the laser light.

Japanese Patent No. 4647707 Japanese Patent No. 4874214

  However, when the electrode current collector foil and the electrode tab are welded by laser welding of the prior art as described in Patent Documents 1 and 2, so-called spatter is generated in which molten metal scatters and solidifies, or small air holes. Some blow holes could occur inside the foil. In battery cell production, spatter and blow holes are not allowed in the foil.

  Further, when the electrode current collector foil and the electrode tab are welded by laser welding according to the prior art, the close contact between the electrode current collector foil and the electrode tab tends to be unstable, and a hole is formed in the foil, so that reliable bonding is difficult.

  Accordingly, an object of the present invention is to provide a metal foil laser welding method and apparatus capable of suppressing the occurrence of spatter and blow holes.

  Another object of the present invention is to provide a method and an apparatus for laser welding metal foils that can join multi-layer electrode current collector foils and can stably and reliably bond these electrode current collector foils and electrode tabs. .

  Still another object of the present invention is to provide a metal foil laser welding method and apparatus capable of easily mass-producing laminated battery cells that are free of spatter and blowholes in the foil and have no holes in the foil. There is to do.

  According to the present invention, a foil welding jig for pressurizing and fixing a plurality of laminated metal foils, laser welding means for applying a laser beam to a welded portion of the metal foil and welding, and metal during welding There is provided a metal foil laser welding apparatus comprising gas supply means for supplying an inert gas to a welded portion of a foil. The foil welding jig includes a pressing side jig member and a receiving side jig member. The holding side jig member has at least one through hole which is provided corresponding to the welding location and through which the laser beam passes. The receiving-side jig member has a protrusion that can be fitted into the opening below the through hole of the holding-side jig member.

  The laminated metal foil to be welded is sandwiched between the lower opening of the holding side jig member and the protrusion of the receiving side jig member, and the pressing side jig member and the receiving side jig member are fixed by fixing. In a pressed state, welding is performed by irradiating the laminated metal foil with laser light through the through hole. Laser welding is performed in a state where the laminated metal foils are pressed and fixed by a foil welding jig without any gaps, so that no spatters or blow holes are generated in the foil, and no holes are generated. Therefore, it is possible to perform highly reliable welding on the plurality of laminated metal foils. Further, since a very large number of 100 metal foils can be reliably and quickly joined, mass production can be easily performed.

  The receiving-side jig member preferably has a hole that passes through the central portion of the protrusion and extends in the thickness direction of the receiving-side jig member, and a gas supply passage that communicates with the hole. Thereby, an inert gas can be supplied from the lower part of the welding part of metal foil.

  The gas supply means is configured to incline a predetermined angle from above the welded portion and blow out the inert gas toward the welded portion and supply the inert gas from below the welded portion through the gas supply passage. It is preferable. Thus, since the inert gas is in contact with the front side and the back side of the welded portion of the laminated metal foil, oxidation of the front side and the back side of the welded portion can be prevented, and the generated soot is reliably removed by the inert gas flow. .

  The laser welding means includes a semiconductor laser light source, a laser light source other than the semiconductor laser, and a superimposing unit that generates a hybrid laser light by superimposing the laser light from the semiconductor laser light source and the laser light from the laser light source other than the semiconductor laser. It is preferable that the hybrid laser beam is configured to be applied to the welded portion of the metal foil. Thereby, temperature management of a to-be-welded body becomes easy.

  According to the present invention, there is further provided a metal foil laser welding method for welding a plurality of laminated metal foils. In this method, there are provided a pressing side jig member provided with at least one through hole corresponding to the welded portion, and a protrusion that can be fitted to the opening below the through hole of the pressing side jig member. A foil welding jig provided with a receiving jig member provided is used, and is laminated between the lower opening of the holding jig member and the protrusion of the receiving jig member. A plurality of metal foils are sandwiched and fixed, an inert gas is supplied to the welded portion, and welding is performed by irradiating the welded portion with laser light through a through hole.

  When supplying the inert gas to the welded portion, the inert gas is blown toward the welded portion at a predetermined angle from above the welded portion, and the inert gas is supplied to the welded portion from below the welded portion. preferable.

  It is also preferable to superimpose a laser beam from a semiconductor laser light source and a laser beam from a solid-state laser light source, and irradiate the welded portion with a hybrid laser beam obtained by the superimposition. Thereby, temperature management of a to-be-welded body becomes easy.

  According to the present invention, no spatter or blow hole is generated in the foil, and no hole is generated. Therefore, it is possible to perform highly reliable welding on the laminated metal foils. In addition, since a large number of metal foils, such as 100, can be reliably and quickly joined, it is easy to create a stacked battery cell that does not have any spatter or blowholes in the foil and has no holes in the foil. Can be mass-produced.

  Furthermore, since the flow path of the inert gas is provided on the inner back side of the jig for foil welding, and the inert gas hits the back side of the welded portion of the welded body, the welded portion of the welded body The backside oxidation can be prevented and the generated soot is reliably removed by the inert gas flow.

It is a figure which shows schematically the structure of the laser welding apparatus of the metal foil in one Embodiment of this invention. It is a perspective view which shows roughly the structure of the jig for foil welding of the laser welding apparatus of the metal foil shown in FIG. It is the (a) side view and (b) top view which show schematically the state which the foil welding jig | tool of the laser welding apparatus of the metal foil shown in FIG. 1 overlapped. It is the (a) side view and (b) elevation which show roughly the composition of the receiving side jig member of the foil welding jig of the laser welding apparatus of metal foil shown in FIG. It is a figure which shows the form which uses the jig for foil welding. It is sectional drawing explaining the form of the welding part welded using the laser welding apparatus of the metal foil of this invention. It is a figure explaining the irradiation form of a laser beam, and the supply form of an inert gas, when welding using the laser welding apparatus of the metal foil of this invention. It is a perspective view of the lamination type lithium ion battery cell welded using the laser welding apparatus of the metal foil of this invention.

  Embodiments of a metal foil laser welding apparatus according to the present invention will be described below with reference to the drawings.

  FIG. 1 shows the configuration of a metal foil laser welding apparatus 100 according to an embodiment of the present invention, FIG. 2 shows the configuration of a foil welding jig 10, and FIG. 3 shows the configuration of the foil welding jig 10. FIG. 4 shows a state where the holding-side jig member 10a and the receiving-side jig member 10b are overlapped, and FIG. 4 shows the configuration of the receiving-side jig member 10b.

  As shown in FIG. 1, a metal foil laser welding apparatus 100 includes a foil welding jig 10 for pressurizing and fixing a plurality of laminated metal foils (objects A to be welded), and welding a laser beam to the metal foil. Laser welding means for applying and welding to a location and gas supply means for supplying an inert gas to the weld location are provided. The to-be-welded body A in FIG. 1 is a laminated body of a number of metal foils constituting, for example, a positive electrode and a negative electrode of a lithium ion battery and an electrode tab.

  The laser welding means includes a composite laser light source 20, optical fibers 21 and 22 having one end optically coupled to the composite laser light source 20, and an output unit optically coupled to the other ends of the optical fibers 21 and 22. 23. The composite laser light source 20 includes a semiconductor laser light source and a YAG laser light source. The optical fiber 21 guides the laser light from the semiconductor laser light source to the emission unit 23, and the optical fiber 22 is configured to guide the laser light from the YAG laser light source to the emission unit 23. The emission unit 23 is a superimposing unit that optically superimposes these semiconductor laser light and YAG laser light to generate hybrid laser light. The superimposed semiconductor laser beam 24 and YAG laser beam 25 are simultaneously applied to the welded object A. Irradiated.

  In the present embodiment, hybrid laser welding is performed using semiconductor laser light and YAG laser light. The semiconductor laser beam 24 has a low output and a relatively wide beam width, and is used to heat the workpiece A to be maintained at a constant temperature. The YAG laser beam 25 has a high output and a narrow beam width, and is used for actually welding by melting a necessary portion of the welded object A. By performing such hybrid laser welding, the temperature management of the welded object A can be easily performed.

  As shown in FIG. 2, the foil welding jig 10 includes a pressing side jig member 10a and a receiving side jig member 10b.

  The holding side jig member 10a is formed in a shape in which a horizontal portion and a vertical portion are connected so as to have an L-shaped cross section. A plurality of oval through holes 11 penetrating in the vertical direction are provided in a plurality of portions to be subjected to laser welding of the horizontal portion. The lower opening of each through hole 11 is narrowed so as to be narrower than the upper opening. The holding side jig member 10a is further provided with a plurality of (two in the illustrated example) bolt through holes 12 for fixing the holding side jig member 10a to the receiving side jig member 10b. Jig member fixing bolts 18 are inserted into these bolt through holes 12 and screwed into the bolt holes 12a of the receiving side jig member 10b. By holding the jig A to be welded A between the holding side jig member 10a and the receiving side jig member 10b and screwing it into the bolt hole 12a of the receiving side jig member 10b, the holding side jig is secured. The member 10a and the receiving jig member 10b can be fixed to each other, and the welded body A can be fixed and pressurized.

  The receiving-side jig member 10b protrudes upward from the upper surface thereof and has a plurality of oval-shaped protrusions that can be fitted into the lower openings of the plurality of through holes 11 of the holding-side jig member 10a. 13 and a plurality of oval holes 14 extending through the center of the plurality of protrusions 13 in the vertical direction (thickness direction) of the receiving jig member 10b, and the length direction of the receiving jig member 10b. A gas supply passage 15 communicating with the plurality of oval holes 14, and a through hole 16 for a mounting bolt 17 for attaching the receiving jig member 10b to the work table 1 (see FIG. 5). The bolt hole 12a described above is provided. The protrusion height h of the protrusion 13 is preferably about 15 to 25% of the thickness of the welded body A. Specifically, when welding 100 pieces of aluminum foil having a thickness of 20 μm, the height of the protruding portion 13 is 0.5 mm, and when welding 100 pieces of copper foil having a thickness of 10 μm, the height of the protruding portion 13 is 0. .25 mm is desirable. The gas supply passage 15 is formed so as to penetrate in the length direction of the receiving side jig member 10b, and provided with female screw portions for attaching pipes to both ends. The gas supply passage 15 is a round pipe in the illustrated example, but may be a pipe having another shape such as a square pipe. Further, as shown in FIG. 3, the outer peripheral shape of each protrusion 13 is formed slightly smaller than the inner diameter of the through hole 11, and can be fitted and locked in the through hole 11.

  FIG. 5 shows a form in which the foil welding jig 10 is actually used. As shown in the figure, when welding a plurality of metal foils, the laminated metal foils are placed between the pressing jig member 10a and the receiving jig member 10b of the foil welding jig 10. Then, the jig member fixing bolt 18 is tightened and fixed by pressure.

  The gas supply means includes a gas supply source 30 and an upper supply path for supplying an inert gas, one end of which is connected to the gas supply source 30 and the other end is connected to a gas nozzle 31 for blowing out the inert gas. 32 and a lower supply path 33 for supplying an inert gas, one end of which is connected to the gas supply source 30 and the other end of which is connected to the receiving side jig member 10b. This gas supply means blows out an inert gas from above the welded portion toward the welded portion at a predetermined angle θ2 (for example, θ2 = 60 degrees) and performs welding of the welded portion via the gas supply passage 15. An inert gas is supplied from below.

  As the welded body A, a stacked lithium ion battery is conceivable. In general, a laminated lithium ion battery includes a positive electrode in which a positive electrode active material layer is laminated on a positive electrode current collector foil, and a negative electrode in which a negative electrode active material layer is laminated on a negative electrode current collector foil with a separator made of an electrolyte layer interposed therebetween. It has a stacked structure in which a large number of layers are stacked on each other. As the positive electrode current collector foil and the negative electrode current collector foil, a metal foil having a thickness of about 10 to 20 μm such as an aluminum foil, a copper foil, or a nickel foil is used. As the positive electrode active material layer, for example, lithium oxide such as lithium manganate and other positive electrode active materials are used. As the negative electrode active material layer, lithium ions are inserted and removed at a high potential such as graphite and lithium titanate. A separable material is used.

  One end of the positive electrode thus laminated is joined and electrically connected to a positive electrode tab which is a positive electrode terminal, and one end of the same negative electrode is joined to a negative electrode tab which is a negative electrode terminal. Electrically connected. The metal foil laser welding apparatus 100 shown in FIG. 1 is used for these joinings. As the positive electrode tab and the negative electrode tab, an aluminum plate having a thickness of about 0.2 mm or a copper plate plated with nickel is used.

  In the present embodiment, when a plurality of positive electrode current collector foils (positive electrode side aggregates) and positive electrode tabs laminated by the metal foil laser welding apparatus 100 are joined, and a plurality of laminated negative electrode current collector foils (negative electrode side) When joining the assembly) and the negative electrode tab, a metal foil welding jig 10 as shown in FIGS. 2 to 4 is used.

  When actual welding is performed, a plurality of stacked positive electrode current collector foils and positive electrode tabs that are welded bodies A are stacked on the plurality of protrusions 13 of the receiving jig member 10b of the foil welding jig 10. A plurality of negative electrode current collector foils and negative electrode tabs are placed, the holding side jig member 10a is placed thereon, and the plurality of protrusions 13 of the receiving side jig member 10b are below the plurality of through holes 11 of the holding side jig member 10a. Align and superimpose to engage with the side openings. Next, the holding-side jig member 10a and the receiving-side jig member 10b are pressure-fixed by fastening the jig member fixing bolt 18 as shown in FIG. Note that the receiving side jig member 10 b is fixed to the work table 1 in advance by the mounting bolts 17. In this state, welding is performed by irradiating the workpiece A with a hybrid laser beam of a semiconductor laser beam and a YAG laser beam through the through hole 11 of the holding jig member 10a. When performing this welding, as described later, an inert gas is blown onto the welded portion.

  FIG. 6 shows a cross section of a welded portion to be welded using the metal foil laser welding apparatus 100. As shown in the figure, a positive electrode or negative electrode tab is stacked on the upper and lower ends of one end of a laminate of a positive electrode or negative electrode and separator of a battery cell as an object to be welded A, and these are pressed by a foil welding jig 10. In the fixed state, the laser irradiation part is melted and bonded by irradiating a hybrid laser beam of a semiconductor laser beam and a YAG laser beam.

  FIG. 7 shows the form of laser beam irradiation and inert gas supply during welding. However, only a part of the foil welding jig 10 is shown in FIG. When supplying an inert gas to the welded portion, the inert gas is blown toward the welded portion by inclining a predetermined angle from above the welded portion, and welded from below the welded portion through the gas supply passage of the receiving jig member. An inert gas is supplied to the section.

  The hybrid laser beam is irradiated at an angle θ1 (θ1 = about 0 to 15 degrees) with respect to the normal line perpendicular to the upper surface of the foil welding jig 10 by tilting the irradiation unit 23, while, for example, nitrogen In this example, an inert gas such as gas or argon gas is sprayed by inclining the gas nozzle 31 having an inner diameter of 4 mm with respect to the upper surface of the foil welding jig 10 by an angle θ2 (θ2 = about 60 degrees). In this case, it is desirable that the tip of the gas nozzle 31 be 3 to 10 mm away from the tip of the laser beam so that the inert gas does not entrain air over the entire surface of the welded portion of the foil welding jig 10. However, the separation distance d depends on the nozzle inner diameter of the gas nozzle 31 and the gas flow rate.

  This inert gas is further flowed to the back side of the welded portion of the welded body A through the gas supply passage 15 inside the foil welding jig 10. By flowing an inert gas also to the back side of the welded part of the welded body A, the solution melted by laser in the welded part does not directly touch the air, so the melting trace on the back of the welded part of the welded body A is smooth. And does not oxidize. Moreover, it does not adhere to the back side of the weld due to the components dissolved during melting and the inert gas through which the spatter flows.

  For example, using a metal foil laser welding apparatus 100 with 600 W hybrid laser light, 100 pieces of 20 μm thick aluminum foil as electrodes and two pieces of 0.2 mm thick aluminum plates as electrode tabs were welded. In this case, the above-described foil welding jig 10 is used, and pressure is fixed between the receiving side jig member 10b and the holding side jig member 10a by tightening an M8 screw with a torque of 4 N / M, and an inert gas. As a result, nitrogen gas was flowed in two branches at a flow rate of 10 liters / minute. As a result, 100 electrodes and 2 electrode tabs could be stably and reliably welded. Moreover, no spatters or blowholes were generated in the aluminum foil. The same was true when 100 sheets of 100 μm-thick copper foil as electrodes and two 0.2 mm-thick nickel-plated copper plates as electrode tabs were welded.

  FIG. 8 shows a stacked lithium ion battery cell as a welded body A formed by welding electrode portions using a metal foil laser welding apparatus 100. As shown in the figure, a plurality of welds are formed on the positive electrode side and the negative electrode side. In this case, electrode tabs are welded to both the upper and lower sides of the positive and negative foil assemblies.

  Although not shown, the temperature of the welded portion of the welded body A is controlled by measuring the temperature of the welded portion of the welded body A and feedback-controlling the output of the laser welding apparatus 100 for the metal foil. Such a configuration is also desirable. For example, quality can be ensured by performing control such as reducing the laser output immediately before the temperature rises to a temperature at which spattering may occur.

  As described above, the metal foil laser welding apparatus 100 according to the present embodiment includes a foil welding jig 10 that pressurizes and fixes a plurality of stacked metal foils (objects A to be welded), and laser light from the metal foil. Laser welding means for applying and welding to the plurality of welds, and gas supply means for supplying an inert gas to the plurality of welds. When welding, a plurality of laminated metal foils that are welded bodies A are provided between a plurality of openings on the lower side of the holding jig member 10a and a plurality of protrusions 13 of the receiving jig member 10b. While sandwiching and fixing, supplying an inert gas to the welded portion, the laser beam from the semiconductor laser and the laser beam from the YAG laser are simultaneously applied to each welded portion through each through hole 11 of the holding side jig member 10a. Irradiate and weld.

  Since laser welding is performed with the foils of the laminated metal foils being pressed and fixed by the foil welding jig 10 without gaps, no spatters or blow holes are generated in the foils, and no holes are generated. Therefore, it is possible to perform highly reliable welding on the plurality of laminated metal foils. Further, since a very large number of metal foils, such as 100, can be bonded reliably and quickly, for example, multilayer lithium ion battery cells can be easily mass-produced.

  The receiving-side jig member 10 b communicates with the plurality of oval holes 14 passing through the central portions of the plurality of protrusions 13 and extending in the thickness direction of the receiving-side jig member 10 b, and the plurality of oval holes 14. By having the gas supply passage 15 that performs this, an inert gas can be supplied from the lower part of the welded portion of the metal foil.

  The laser welding means includes a semiconductor laser light source, a laser light source other than the semiconductor laser, and a superimposing unit that generates a hybrid laser light by superimposing the laser light from the semiconductor laser light source and the laser light from the laser light source other than the semiconductor laser. It is provided and the hybrid laser beam is configured to be applied to the welded portion of the metal foil, so that the temperature management of the welded body can be easily performed.

  The gas supply means inclines a predetermined angle from above the welded portion through the gas nozzle 31 and blows out the inert gas toward the welded portion, and supplies the inert gas from below the welded portion through the gas supply passage 15. By being comprised in this way, the oxidation of the front side and back side of a welding part can be prevented, and the generated soot is reliably removed by the inert gas flow.

  In addition, in embodiment mentioned above, although the holding | suppressing side jig member 10a was made into the shape which has an L-shaped cross section, this invention is not limited to this. For example, the holding-side jig member 10a may be formed from a plate-like member.

  Moreover, in embodiment mentioned above, although the example which laminates | stacks and welds a metal tab to the positive electrode and negative electrode of a laminated | stacked lithium ion battery as the to-be-welded body A was demonstrated, this invention is not limited to this. . For example, the welded body A may be an electrode laminated body without a metal tab, or may be an arbitrarily laminated metal foil.

  In the embodiment described above, the pressing side jig member 10a is pressed against the workpiece A via the jig member fixing bolt 18 and fixed to the receiving side jig member 10b. However, the present invention is not limited to this. Other pressing and fixing methods may be used.

  In the embodiment described above, the hybrid laser light of the semiconductor laser light and the YAG laser light is used, but other solid laser light, liquid laser light, or gas laser light may be used instead of the YAG laser light. It is clear that it is good.

  In the embodiment described above, the holding jig 10a is provided with five oval holes 11 penetrating in the vertical direction, and the holding jig 10b has a holding jig. The example in which the five oval ring-shaped protrusions 13 that can be fitted in the respective openings below the five through holes 11 of the tool member 10a have been described, but the number of the through holes 11 and the protrusions 13 is described. Is not limited to this.

  All the embodiments described above are illustrative of the present invention and are not intended to be limiting, and the present invention can be implemented in other various modifications and changes. Therefore, the scope of the present invention is defined only by the claims and their equivalents.

  The present invention can be applied to welding of laminated metal foils, in particular, bonding between a large number of electrode current collector foils and bonding between electrode current collector foils and electrode tabs, as in a stacked lithium ion battery cell.

DESCRIPTION OF SYMBOLS 1 Worktable 10 Foil welding jig 10a Holding side jig member 10b Receiving side jig member 11, 12, 16 Through hole 12a Bolt hole 13 Projection part 14 Oval hole 15 Gas supply passage 17 Mounting bolt 18 Jig member Fixing bolt 20 Composite laser light source 21, 22 Optical fiber 23 Output unit 24 Semiconductor laser beam 25 YAG laser beam 30 Gas supply source 31 Gas nozzle 32 Upper supply path 33 Lower supply path 100 Metal foil laser welding apparatus A Workpiece

Claims (7)

A foil welding jig that pressurizes and fixes a plurality of laminated metal foils;
Laser welding means for applying and welding a laser beam to the welded portion of the metal foil;
Gas supply means for supplying an inert gas to the welded portion of the metal foil when welding,
The foil welding jig includes a holding-side jig member and a receiving-side jig member, and the pressing-side jig member is provided corresponding to the welding location and passes at least one laser beam. A metal foil having a through-hole, wherein the receiving-side jig member has a protrusion that can be fitted into an opening below the through-hole of the holding-side jig member. Laser welding equipment.   The receiving-side jig member includes a hole extending through a central portion of the protrusion and extending in the thickness direction of the receiving-side jig member, and a gas supply passage communicating with the hole. The metal foil laser welding apparatus according to 1.   The gas supply means inclines at a predetermined angle from above the welded portion and blows out an inert gas toward the welded portion, and supplies the inert gas from below the welded portion through the gas supply passage. The metal foil laser welding apparatus according to claim 2, wherein the apparatus is configured as follows.   The laser welding unit superimposes a semiconductor laser light source, a laser light source other than a semiconductor laser, a laser beam from the semiconductor laser light source, and a laser beam from a laser light source other than the semiconductor laser to generate a hybrid laser beam. The metal foil laser according to any one of claims 1 to 3, wherein the hybrid laser light is applied to a welded portion of the metal foil. Welding equipment. A metal foil laser welding method for welding a plurality of laminated metal foils,
A holding-side jig member provided with at least one through-hole corresponding to the welded portion, and a protrusion that can be fitted to the opening below the through-hole of the holding-side jig member. A foil welding jig provided with a receiving side jig member, and is laminated to be welded between the lower opening of the holding side jig member and the protrusion of the receiving side jig member. Sandwiched and fixed multiple metal foils,
A metal foil laser welding method comprising performing welding by supplying an inert gas to the weld and irradiating the weld with laser light through the through hole.   6. The inert gas is supplied to the welded portion from below the welded portion, and the inert gas is blown out toward the welded portion at a predetermined angle from above the welded portion. Laser welding method for metal foil.   7. The metal according to claim 5, wherein a laser beam from a semiconductor laser light source and a laser beam from a solid-state laser light source are superposed, and the welded portion is irradiated with a hybrid laser light obtained by the superposition. Foil laser welding method.

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