JP2016022603A - Molding die and molding method of microstructure - Google Patents

Molding die and molding method of microstructure Download PDF

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JP2016022603A
JP2016022603A JP2014146347A JP2014146347A JP2016022603A JP 2016022603 A JP2016022603 A JP 2016022603A JP 2014146347 A JP2014146347 A JP 2014146347A JP 2014146347 A JP2014146347 A JP 2014146347A JP 2016022603 A JP2016022603 A JP 2016022603A
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microstructure
stamper
fine structure
molding
mold
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JP6198339B2 (en
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伊東 宏
Hiroshi Ito
伊東  宏
昭太 越智
Shota Ochi
昭太 越智
政樹 原
Masaki Hara
政樹 原
章弘 内藤
Akihiro Naito
章弘 内藤
焼本 数利
Kazutoshi Yakimoto
数利 焼本
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Japan Steel Works Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a molding die and a molding method which apply a molten resin to a microstructure provided on a lower mold, then press and cool the applied resin with an upper mold and the lower die, and transfer and mold the microstructure, and which are suitably used for molding a microstructure having a large area and a high aspect ratio.SOLUTION: A molding die is a molding die that makes a lower die 10 on which a stamper 15 having a microstructure 16 is provided and an upper die 20 facing the lower die 10 press and cool a molten resin applied onto the stamper 15, and molds a microstructure having a microstructure transferred and molded thereon. The upper mold 20 has a groove 23 provided thereon so as to surround the outer edge of the microstructure.SELECTED DRAWING: Figure 1

Description

本発明は、下金型に設けた微細構造に溶融樹脂を塗布した後、これを上金型と下金型により押圧・冷却して転写成形された微細構造体を成形する成形金型及び成形方法に係り、特に面積が大きく高アスペクト比を有する微細構造体の成形に好適に使用される成形金型及び成形方法に関する。   The present invention relates to a molding die and a molding method in which a molten resin is applied to a fine structure provided in a lower die and then pressed and cooled by an upper die and a lower die to form a transferred microstructure. More particularly, the present invention relates to a molding die and a molding method that are preferably used for molding a microstructure having a large area and a high aspect ratio.

熱可塑性樹脂からなる微細構造体が電子デバイス、光デバイス、バイオデバイス等に広く使用されるようになり、より微細で、かつ面積の大きい微細構造体や高アスペクト比を有する微細構造体が求められている。このような微細構造体は、下金型に設けた微細構造に溶融樹脂を塗布した後、これを上金型と下金型により押圧・冷却して転写成形する方法により好適に成形することができる。そして、この方法を使用することにより、微細で、かつ面積の大きい微細構造体や高アスペクト比を有する微細構造体を成形する方法が提案されている。   Microstructures made of thermoplastic resin are widely used in electronic devices, optical devices, biodevices, etc., and there is a demand for finer structures with a larger area and higher aspect ratio. ing. Such a fine structure can be suitably formed by a method in which a molten resin is applied to the fine structure provided in the lower mold, and then this is pressed and cooled by an upper mold and a lower mold to perform transfer molding. it can. And the method of shape | molding the fine structure with a large area and the fine structure which has a high aspect ratio by using this method is proposed.

例えば、特許文献1に、下金型に設けた微細構造に溶融樹脂を塗布し、これを下金型と凹部が鏡面になった上金型とにより押圧・冷却して微細構造体を転写成形する製造方法であって、ガラス転移温度近辺の金型の冷却において、上金型を下金型よりも5℃以上高く維持して冷却する製造方法が提案されている。上金型の鏡面部分は、Raが2.0μm以下が好ましいとされ、この製造方法によれば、転写成形体を微細構造部分に対して垂直方向に離型することができるので、微細構造を良好に維持しながら、金型から迅速に、容易に、かつ確実に離型することができるとされる。   For example, in Patent Document 1, a molten resin is applied to a fine structure provided in a lower mold, and this is pressed and cooled by a lower mold and an upper mold having a concave portion as a mirror surface to transfer and form the fine structure. There is proposed a manufacturing method for cooling a mold near the glass transition temperature by cooling the upper mold at 5 ° C. or more higher than the lower mold. The mirror surface portion of the upper mold preferably has a Ra of 2.0 μm or less. According to this manufacturing method, the transfer molded body can be released in a direction perpendicular to the fine structure portion, so that the fine structure is good. The mold can be released from the mold quickly, easily and reliably.

特許文献2に、二つ以上の部分を組み合せることにより構成される金型を用いて樹脂成形体を製造する方法において、少なくとも一つの金型部分の樹脂接触面の一部または全体にあらかじめ樹脂との付着性を高める処理を行い、当該処理を行った金型面に樹脂成形体を付着させたまま金型を開放することで、当該処理を行っていない金型面から前記樹脂成形体を選択的に離型する工程を含む樹脂成形体の製造方法が提案されている。付着性を高める処理とは、放電照射処理、光オゾン法処理などとされる。   In Patent Document 2, in a method for producing a resin molded body using a mold constituted by combining two or more parts, a resin is previously applied to a part or the whole of a resin contact surface of at least one mold part. The resin molded body is removed from the mold surface not subjected to the treatment by opening the mold while the resin molded body is attached to the mold surface subjected to the treatment. A method for producing a resin molded body including a step of selectively releasing is proposed. The treatment for improving adhesion is a discharge irradiation treatment, a photo-ozone method treatment, or the like.

特許文献3に、所定温度に加熱溶融した樹脂を所定温度の下金型に塗布し、下金型と上金型により所定の押圧力で保持した後、所定の温度まで冷却して成形された成形品を金型から取り出す成形方法であって、上金型又は下金型の何れかに微細構造部分が設けられ、他の下金型又は上金型に、成形品を金型より取り出す時に成形品を保持する加工がされた金型を用いる成形品の成形方法が提案されている。成形品を保持する加工とは、シボ加工や凹加工であるとされ、この成形方法によると、アスペクト比が0.5以上20.0以下であり、その長さが50μm以上1000μm以下の微細構造体を成形することができるとされる。   In Patent Document 3, a resin heated and melted at a predetermined temperature is applied to a lower mold at a predetermined temperature, held at a predetermined pressing force by a lower mold and an upper mold, and then cooled to a predetermined temperature to be molded. A molding method for removing a molded product from a mold, wherein a fine structure is provided in either the upper mold or the lower mold, and the molded product is removed from the mold in another lower mold or upper mold. There has been proposed a molding method of a molded product using a mold that has been processed to hold the molded product. Processing to hold a molded product is said to be embossing or concave processing, and according to this molding method, a microstructure with an aspect ratio of 0.5 to 20.0 and a length of 50 μm to 1000 μm is molded. It is said that you can.

特開2007-181961号公報JP 2007-181961 A 特開2007-283714号公報JP 2007-283714 A 特開2013-28150号公報JP 2013-28150 A

転写成形された微細で高アスペクト比の微細構造を有する微細構造体は、離型時に損傷されやすく、離型も容易ではない。また、微細構造を設けた高価なスタンパ又は金型も損傷されやすい。このため、スタンパ又は金型の微細構造に対して転写成形された微細構造体を垂直方向に剥離することが求められ、その微細構造体は微細構造が設けられていない金型(上金型)に付着させて、微細構造部分を設けたスタンパ又は金型(下金型)からそれらに対して垂直方向に剥離することが求められる。特許文献1に提案する製造方法は、樹脂の粘着力の温度依存性を利用して転写成形体を上金型に付着させる方法であるため、使用可能な樹脂に制限がある。特許文献2又は3に提案する製造方法は、収縮率の大きな樹脂に対して上記目的を達成することが容易ではないという問題がある。そして、特許文献1〜3に提案する製造方法においては、収縮率の大きな樹脂の場合は、転写成形された微細構造に変形やヒケが発生するおそれがあり、要求される高精度の微細構造体を製造するのが容易でないという問題がある。   A fine structure having a fine structure with a high aspect ratio that has been transferred and molded is easily damaged at the time of release, and release is not easy. Further, an expensive stamper or mold provided with a fine structure is easily damaged. For this reason, it is required to peel off the microstructure formed by transfer molding with respect to the microstructure of the stamper or the mold in the vertical direction, and the microstructure is a mold having no microstructure (upper mold). It is required to peel from a stamper or a mold (lower mold) provided with a fine structure portion in a direction perpendicular to them. Since the manufacturing method proposed in Patent Document 1 is a method in which the transfer molded body is attached to the upper mold using the temperature dependency of the adhesive force of the resin, there are limitations on the resins that can be used. The manufacturing method proposed in Patent Document 2 or 3 has a problem that it is not easy to achieve the above object for a resin having a large shrinkage rate. In the manufacturing methods proposed in Patent Documents 1 to 3, in the case of a resin having a large shrinkage rate, there is a risk that deformation and sink marks may occur in the transferred microstructure, and the required highly accurate microstructure. There is a problem that it is not easy to manufacture.

本発明は、このような従来の問題点に鑑み、下金型に設けた微細構造に溶融樹脂を塗布した後、これを上金型と下金型により押圧・冷却して微細構造体を転写成形する成形金型及び成形方法であって、面積が大きく高アスペクト比を有する微細構造体の成形に好適に使用される成形金型及び成形方法を提供することを目的とする。   In view of such conventional problems, the present invention applies a molten resin to a fine structure provided in a lower mold, and then presses and cools the molten resin with an upper mold and a lower mold to transfer the fine structure. An object of the present invention is to provide a molding die and a molding method that are suitably used for molding a microstructure having a large area and a high aspect ratio.

本発明に係る成形金型は、微細構造を有するスタンパが設けられた下金型と、その下金型に対向する上金型とにより、前記スタンパ上に塗布された溶融樹脂を押圧・冷却し、前記微細構造が転写成形された微細構造体を成形する成形金型であって、前記上金型は、前記微細構造体の外縁を囲むように溝が設けられてなる。   The molding die according to the present invention presses and cools the molten resin applied on the stamper by a lower die provided with a microstructured stamper and an upper die facing the lower die. A molding die for molding a microstructure having the microstructure transferred and molded, wherein the upper mold is provided with a groove so as to surround an outer edge of the microstructure.

上記発明において、溝は、微細構造体の微細構造部分から5mm以上離れた位置に設けることができる。また、溝と微細構造体との境界を形成する上金型の土手部は、その溝の外縁を形成する前記上金型の外枠部の高さ以下にすることができる。   In the above invention, the groove can be provided at a position 5 mm or more away from the fine structure portion of the fine structure. Further, the bank portion of the upper mold that forms the boundary between the groove and the fine structure can be made equal to or less than the height of the outer frame portion of the upper mold that forms the outer edge of the groove.

本発明に係る成形方法は、微細構造を有するスタンパが設けられた下金型と、その下金型に対向する上金型とにより、前記スタンパ上に塗布された溶融樹脂を押圧・冷却し、前記微細構造が転写成形された微細構造体を成形する成形方法であって、前記微細構造体がその外縁を画定する薄肉の切込部を介して枠体に保持され、額縁付き形態に成形されるように行われる。   The molding method according to the present invention presses and cools the molten resin applied on the stamper by a lower mold provided with a stamper having a fine structure and an upper mold facing the lower mold, A molding method for molding a microstructure in which the microstructure is transferred and molded, wherein the microstructure is held by a frame body through a thin notch that defines an outer edge of the microstructure, and is molded into a framed form. To be done.

また、本発明に係る成形方法は、微細構造を有するスタンパが設けられた下金型と、その下金型に対向する上金型とにより、Tダイから供給されて前記スタンパ上に塗布された溶融樹脂を押圧・冷却し、前記微細構造が転写成形された微細構造体を成形する成形方法であって、先ず、Tダイから溶融樹脂を前記スタンパ上に供給しつつ、前記Tダイを前記スタンパに対して相対移動させて前記スタンパ上に溶融樹脂を塗布し、次に、前記スタンパ上の溶融樹脂を押圧・冷却することにより、前記微細構造体がその外縁を画定する薄肉の切込部を介して枠体に保持され、額縁付き形態に成形されるように行われる。   Further, the molding method according to the present invention is supplied from a T die and applied onto the stamper by a lower mold provided with a stamper having a fine structure and an upper mold facing the lower mold. A molding method in which a molten resin is pressed and cooled to form a microstructure in which the microstructure is transferred and molded. First, a molten resin is supplied from a T die onto the stamper, and the T die is moved to the stamper. Is applied to the stamper, and then the molten resin on the stamper is pressed and cooled to form a thin cut portion that defines the outer edge of the microstructure. It is carried out so that it may be held in a frame and formed into a framed form.

そして、上記成形方法において、さらに、枠体の外縁を画定する薄肉の切込部を介して凸条部が形成されるように行われるのがよい。   And in the said shaping | molding method, it is good to carry out so that a protruding item | line part may be further formed through the thin notch part which demarcates the outer edge of a frame.

上記成形方法により、取り扱いが容易な微細構造体を成形することができる。すなわち、微細構造を有するスタンパが設けられた下金型と、その下金型に対向する上金型とにより、前記スタンパ上に塗布された溶融樹脂を押圧・冷却し、前記微細構造が転写成形された微細構造体であって、前記微細構造体がその外縁を画定する薄肉の切込部を介して枠体に保持され、額縁付き形態に成形された微細構造体を成形することができる。   A fine structure that is easy to handle can be formed by the above forming method. That is, a molten metal applied on the stamper is pressed and cooled by a lower mold provided with a stamper having a fine structure and an upper mold facing the lower mold, and the fine structure is transferred and molded. It is possible to form a fine structure that is held in a frame body through a thin cut portion that defines the outer edge of the fine structure and is formed into a framed form.

本発明によれば、面積が大きく高アスペクト比を有する微細構造体を成形することができ、精度、耐久性に優れた微細構造を有するスタンパ又は金型を提供することができる。   According to the present invention, a fine structure having a large area and a high aspect ratio can be formed, and a stamper or a mold having a fine structure excellent in accuracy and durability can be provided.

本発明に係る成形金型の説明図である。It is explanatory drawing of the shaping die based on this invention. 本発明の異なる実施形態の成形金型を示す説明図であるIt is explanatory drawing which shows the shaping die of different embodiment of this invention. 本発明に係る成形金型による微細構造体の成形方法の説明図である。It is explanatory drawing of the shaping | molding method of the fine structure by the shaping die based on this invention. 実施例に記載する成形試験に使用したスタンパの形状を示す図面である。It is drawing which shows the shape of the stamper used for the shaping | molding test described in an Example. 実施例に記載する成形試験の結果を示す図面である。It is drawing which shows the result of the shaping | molding test described in an Example.

以下、本発明を実施するための形態について図面を基に説明する。本発明に係る成形金型は、図1に示すように、微細構造16を有するスタンパ15が設けられた下金型10と、その下金型10に対向する上金型20とにより、スタンパ15の上に塗布された溶融樹脂を押圧・冷却し、微細構造16が転写成形された微細構造体31を成形する成形金型である。そして、上金型20は、微細構造体31の外縁を囲むように溝23が設けられている成形金型である。すなわち、本発明に係る成形金型は、微細構造体31の外縁を囲むように上金型20に溝23が設けられているのが特徴である。なお、スタンパとは、いわゆる原盤を型取って作製するので原盤の逆凹凸を有する反転形のものであり、広義に解されるものを意味する。   Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. As shown in FIG. 1, the molding die according to the present invention includes a lower die 10 provided with a stamper 15 having a fine structure 16 and an upper die 20 facing the lower die 10. This is a molding die that presses and cools the molten resin applied thereon and molds the microstructure 31 on which the microstructure 16 is transfer molded. The upper mold 20 is a molding mold in which a groove 23 is provided so as to surround the outer edge of the fine structure 31. That is, the molding die according to the present invention is characterized in that the upper die 20 is provided with the groove 23 so as to surround the outer edge of the fine structure 31. Note that the stamper is a reversed type having reverse irregularities of the master since it is manufactured by taking a so-called master, and means a broad sense.

本発明において、上金型20の溝23と転写成形される微細構造体31との形態的な関係は種々ある。例えば、図1に示すように、微細構造体31が、上金型20に設けられた空間部分で主として形成されるようになっているものであってもよく、図2に示すように、下金型10に設けられた空間部分で主として形成されるようになっているものであってもよい。図1に示す形態のものは、溶融樹脂の塗布が容易であり、転写成形に伴うバリ発生問題がないという利点がある。図2の形態のものは、スタンパと下金型との境界部分でバリ発生のおそれがあるので、例えばスタンパ15が下金型10と一体に成形され、微細構造16が下金型10に一体に成形されたものとするなどの対策が必要である。   In the present invention, there are various morphological relationships between the groove 23 of the upper mold 20 and the microstructure 31 to be transferred and molded. For example, as shown in FIG. 1, the fine structure 31 may be formed mainly in a space provided in the upper mold 20, and as shown in FIG. It may be formed mainly in the space provided in the mold 10. The embodiment shown in FIG. 1 has the advantage that the molten resin can be easily applied and there is no problem of burrs caused by transfer molding. 2 may cause burrs at the boundary between the stamper and the lower mold. For example, the stamper 15 is formed integrally with the lower mold 10 and the microstructure 16 is integrated with the lower mold 10. It is necessary to take measures such as forming it into a molded product.

本発明に係る成形金型によれば、図1又は図2に示す転写成形体30が成形される。この転写成形体30は、図1(b)に示すように、微細構造体31が残膜状の薄肉の切込部35を介して枠体33に保持された形態をしている。すなわち、外縁が切込部35に画定された微細構造体31が額縁付き形態に保持され、微細構造体31は額に納まったような形態をしている。かかる形態により微細構造体31は、その損傷や変形を防ぐことができる。また、枠体33が強度部材になっているので、微細構造体31の微細構造16が転写成形された微細構造部分は、微細構造体31の外縁に近い部分、例えば、微細構造体31の端面から5〜6mmの位置に配設することができる   According to the molding die according to the present invention, the transfer molded body 30 shown in FIG. 1 or 2 is molded. As shown in FIG. 1B, the transfer molded body 30 has a form in which a fine structure 31 is held by a frame body 33 through a thin cut portion 35 having a residual film shape. That is, the fine structure 31 whose outer edge is defined by the notch 35 is held in a framed form, and the fine structure 31 is shaped to fit in the forehead. With this configuration, the microstructure 31 can be prevented from being damaged or deformed. Further, since the frame 33 is a strength member, the fine structure portion on which the fine structure 16 of the fine structure 31 is transfer-molded is a portion close to the outer edge of the fine structure 31, for example, the end surface of the fine structure 31. Can be placed 5 to 6mm from

この転写成形体30は、さらに、枠体33の外縁を画定する薄肉の切込部36を介して凸条部37及び凸条部38に保持された形態のものとすることができる。凸条部37は、溶融樹脂の塗布開始辺側に形成される。凸条部38は、溶融樹脂の塗布方向に対し左右側辺側と、溶融樹脂の塗布終了辺側に形成される。以下に説明するように、通常は凸条部37が凸条部38より大きい。   The transfer molded body 30 can be further configured to be held by the protruding ridges 37 and the protruding ridges 38 through thin cut portions 36 that define the outer edges of the frame 33. The ridge portion 37 is formed on the application start side of the molten resin. The ridges 38 are formed on the left and right sides of the molten resin application direction and on the molten resin application end side. As will be described below, the ridges 37 are usually larger than the ridges 38.

枠体33は、スタンパ15に塗布された溶融樹脂を押圧して転写成形するときに、上金型20の溝23に溶融樹脂が流入することにより形成される。溝23の形状は、転写成形される樹脂の種類、特性、転写成形体のサイズ等により最適な形状が選択されるが、例えば厚さが1mmの低密度ポリエチレン(LDPE)樹脂からなる転写成形体の成形においては、幅1.0mm×深さ1.5mmとすることができる。溝23は、微細構造体31の周囲に設けるのがよい。しかしながら、凸条部37と塗布終了側の凸条部37との二辺に設けたものとすることができる。   The frame 33 is formed by the molten resin flowing into the groove 23 of the upper mold 20 when the molten resin applied to the stamper 15 is pressed and transfer molded. The shape of the groove 23 is selected in accordance with the type of resin to be transferred and molded, the characteristics, the size of the transfer molded body, and the like. In this molding, the width can be 1.0 mm × the depth is 1.5 mm. The groove 23 is preferably provided around the microstructure 31. However, it can be provided on two sides of the ridge portion 37 and the ridge portion 37 on the application end side.

本発明に係る成形金型による微細構造体の成形は、図3に示すように行われる。すなわち、先ず、溶融樹脂が微細構造16を有するスタンパ15上に塗布される(図3(a))。溶融樹脂の塗布はTダイ40を利用するのがよい。これにより、溶融樹脂の塗布量及び塗布厚さを調整するのが容易になる。溶融樹脂の塗布は、Tダイ40から溶融樹脂をスタンパ15上に供給しつつ、Tダイ40をスタンパ15に対して相対移動させることにより行われるが、Tダイ40の相対移動を行わないで溶融樹脂をスタンパ15上に供給する塗布開始時処理を行うのがよい。この塗布開始時処理を行うと、塗布開始端に樹脂溜り39が形成される。   Molding of the fine structure by the molding die according to the present invention is performed as shown in FIG. That is, first, molten resin is applied on the stamper 15 having the fine structure 16 (FIG. 3A). A T-die 40 is preferably used for applying the molten resin. Thereby, it becomes easy to adjust the application amount and application thickness of the molten resin. The application of the molten resin is performed by moving the T die 40 relative to the stamper 15 while supplying the molten resin from the T die 40 onto the stamper 15, but without melting the T die 40 relative to the stamper 15. A treatment at the start of application for supplying the resin onto the stamper 15 is preferably performed. When this application start process is performed, a resin reservoir 39 is formed at the application start end.

次に、溝23を設けた上金型20を下降させて溶融樹脂を所定の押圧力で押圧する(図3(b))。溶融樹脂は、上金型20の下降に伴って流動拡散し、溝23に流入するとともに上金型20の外縁にまで至る。スタンパ15に塗布する溶融樹脂は、微細構造体31を形成する微細構造16の周囲を満たすとともに溝23を満たす容量以上の容量が供給される。   Next, the upper mold 20 provided with the grooves 23 is lowered to press the molten resin with a predetermined pressing force (FIG. 3B). The molten resin flows and diffuses as the upper mold 20 descends, flows into the groove 23 and reaches the outer edge of the upper mold 20. The molten resin applied to the stamper 15 is supplied with a capacity equal to or greater than the capacity satisfying the periphery of the microstructure 16 forming the microstructure 31 and the groove 23.

上金型に設けた溝23は、その内縁が図1又は図2に示す土手部22で画定され、外縁が外枠部24で画定されている。上金型20を下降させて溶融樹脂を押圧し、溶融樹脂の流動拡散を生じさせる場合、土手部22の高さが外枠部24の高さ以下になっているならば、溶融樹脂の溝23への流入が促進され、枠体33の成形が促進される。この枠体33の成形をもって高精度の転写成形が行われる。   The groove 23 provided in the upper die has an inner edge defined by the bank portion 22 shown in FIG. 1 or 2 and an outer edge defined by the outer frame portion 24. When lowering the upper mold 20 and pressing the molten resin to cause flow diffusion of the molten resin, if the height of the bank portion 22 is equal to or less than the height of the outer frame portion 24, the groove of the molten resin Inflow to 23 is promoted, and molding of the frame 33 is promoted. High precision transfer molding is performed by forming the frame body 33.

塗布された溶融樹脂は、所定の押圧力が保持されて転写成形が行われる(図3(c))。押圧力は、1〜10MPaとされ、適切な押圧力が選択される。所定の押圧力が所定時間保持されて転写成形された転写成形体30は、上記塗布開始端に形成された樹脂溜り39が溶融樹脂の押圧により流動拡散する樹脂と一体になって塗布開始辺側に形成された凸条部37を有する。また、転写成形体30は、溶融樹脂の塗布方向に対し左右側辺側と、溶融樹脂の塗布終了辺側に形成された凸条部38を有する。凸条部37は、凸条部38よりも大きくなっている。これらの溝23に充填され枠体33を形成した溶融樹脂、凸条部37及び凸条部38を形成した溶融樹脂は、微細構造体31を形成する溶融樹脂が微細構造16から外方へ流動するのを阻止する作用を発揮するので均質で精度の高い転写成形が行われる。   The applied molten resin is subjected to transfer molding while maintaining a predetermined pressing force (FIG. 3C). The pressing force is 1 to 10 MPa, and an appropriate pressing force is selected. The transfer molded body 30 which is transferred and molded with a predetermined pressing force being held for a predetermined time is formed by integrating the resin reservoir 39 formed at the application start end with the resin that flows and diffuses by the pressure of the molten resin. Has a ridge portion 37 formed on the surface. In addition, the transfer molded body 30 includes a ridge portion 38 formed on the left and right side sides with respect to the application direction of the molten resin and on the end side of the application side of the molten resin. The ridge portion 37 is larger than the ridge portion 38. The molten resin that fills the grooves 23 to form the frame 33, and the molten resin that forms the ridge 37 and the ridge 38, the molten resin that forms the microstructure 31 flows outward from the microstructure 16. As a result, it is possible to perform transfer molding that is homogeneous and highly accurate.

転写成形された転写成形体30は、上金型10及びスタンパ15により冷却され、その形状が固定される。所定温度にまで冷却された後、上金型20を上昇させることにより転写成形体30はスタンパ15から剥離される(図3(d))。転写成形体30は、枠体33、凸条部37及び凸条部38により上金型20に確実に保持されているので、スタンパ15に対して転写成形体30を垂直方向に剥離することは容易である。これにより、スタンパ15の微細構造16、微細構造体31の転写成形された微細構造部分の損傷を防止することができる。また、転写成形体30は、冷却により収縮しようとするが、その収縮が枠体33により阻止され微細構造体31の収縮が阻止される。このため、微細構造体31の変形・歪みの発生を防止することができる。   The transfer molded body 30 that has been transfer molded is cooled by the upper mold 10 and the stamper 15, and the shape thereof is fixed. After being cooled to a predetermined temperature, the transfer mold 30 is peeled from the stamper 15 by raising the upper mold 20 (FIG. 3D). Since the transfer molded body 30 is securely held in the upper mold 20 by the frame 33, the ridges 37, and the ridges 38, it is not possible to peel the transfer molded body 30 from the stamper 15 in the vertical direction. Easy. As a result, damage to the fine structure portion of the stamper 15 and the fine structure portion formed by transfer molding of the fine structure 31 can be prevented. Further, the transfer molded body 30 tends to contract by cooling, but the contraction is blocked by the frame body 33 and the contraction of the fine structure 31 is blocked. For this reason, the deformation / distortion of the fine structure 31 can be prevented.

転写成形体30は、スタンパ15から剥離された後、上金型20から剥離される。微細構造体31は枠体33及び凸条部37と凸条部38に保護された形態であるので、転写成形体30は安全、かつ迅速に上金型20から剥離することができる。転写成形体30のスタンパからの剥離、上金型からの剥離により、転写成形体30の離型が完了する。   The transfer molded body 30 is peeled off from the stamper 15 and then peeled off from the upper mold 20. Since the microstructure 31 is in a form protected by the frame 33 and the ridges 37 and the ridges 38, the transfer molded body 30 can be peeled from the upper mold 20 safely and quickly. By releasing the transfer molded body 30 from the stamper and from the upper mold, the release of the transfer molded body 30 is completed.

本発明においては、転写成形体30のスタンパ15又は上金型20からの剥離は、転写成形される転写成形体30の形態的な特徴を利用している。このため、転写成形体30の剥離温度や上金型に施す特殊加工(上金型に設ける凹部やシボ加工、放電照射処理)を考慮する必要がない。従って、本発明は、従来方法以上の高い生産サイクルで微細構造体を成形することが可能である。また、本発明は、その使用において微細構造体の形状的な制限を受けることもない。   In the present invention, the separation of the transfer molded body 30 from the stamper 15 or the upper mold 20 utilizes the morphological characteristics of the transfer molded body 30 to be transfer molded. For this reason, it is not necessary to consider the peeling temperature of the transfer molded body 30 or special processing applied to the upper die (recesses or embossing provided on the upper die, discharge irradiation treatment). Therefore, according to the present invention, it is possible to form a microstructure with a higher production cycle than the conventional method. In addition, the present invention is not subject to the limitation of the shape of the microstructure in its use.

上記転写成形体30の成形において、転写成形体30は、材質的な均質性を確保する観点から凸条部37及び凸条部38を有するものがよい。しかしながら、転写成形体30は、凸条部37及び凸条部38を有しないものであってもよい。転写成形体30は、切込部35、切込部36の厚さが30〜500μmであるので、これらを切断することにより、製品としての微細構造体31を得ることができる。なお、微細構造体31が枠体33に保持された形態にすることにより、搬送、保管の便宜を図ることができる。   In forming the transfer molded body 30, the transfer molded body 30 preferably has a ridge portion 37 and a ridge portion 38 from the viewpoint of ensuring material homogeneity. However, the transfer molded body 30 may not have the ridges 37 and the ridges 38. In the transfer molded body 30, since the thicknesses of the cut portion 35 and the cut portion 36 are 30 to 500 μm, the fine structure 31 as a product can be obtained by cutting them. In addition, by adopting a form in which the fine structure 31 is held by the frame 33, it is possible to facilitate transportation and storage.

以上、本発明について説明した。本発明は、使用される樹脂の種類、グレード等の制限を受けず、市場に流通する熱可塑性樹脂に広く適用することができる。例えば、成形収縮率が大きくかつ金型やスタンパ表面から剥離しやすいポリメチルペンテン樹脂、ポリエチレン樹脂、ポリプロピレン樹脂などのポリオレフイン系樹脂、フッ化ビニリデン、四フッ化エチレン・六フッ化プロピレン重合体などのフッ素系樹脂に好適に使用することができる。   The present invention has been described above. The present invention can be widely applied to thermoplastic resins distributed in the market without being restricted by the type and grade of resin used. For example, polymethylpentene resin, polyethylene resin, polypropylene resin and other polyolefin resins, vinylidene fluoride, tetrafluoroethylene / hexafluoropropylene polymer, etc. that have a high mold shrinkage rate and are easily peeled off from the mold or stamper surface. It can be suitably used for a fluorine resin.

特に、ポリメチルペンテン樹脂においては、上記本発明の利点が発揮される。すなわち、上下の金型温度を調整して転写成形体の剥離を行うような従来の方法においては、付着力を高めるために剥離時の上金型の温度を下金型の温度よりも高くすると、転写成形体は上金型に付着して下金型から剥離されるが、当該温度では樹脂の剛性が不足して剥離時に転写した微細構造が変形する場合が多々ある。逆に、微細構造の変形を防ぐために上金型の温度を低くし下金型との温度差を小さくすると、上金型への十分な付着力が得られず転写成形体の下金型からの剥離が困難な場合がある。このためポリメチルペンテン樹脂においては、上下の金型温度の調整が難しく、転写成形体を金型から剥離することと転写された微細構造の変形を防止することを両立させるのが容易ではなかった。これに対し、本発明においては、上述のように形成された枠体は、温度が低くなって転写成形体の収縮量が増大するとより強固に上型に抱きつく。このため、転写成形体はより安定して上金型に付着するとともに、温度を低くすることにより樹脂の剛性が増大するので、剥離時の微細構造の変形や歪みが生じ難くなる。本発明は、転写成形体の安定した上金型への付着とその微細構造の変形防止とを容易に両立させることができる。また、本発明は、上及び下金型の温度調整を容易に行うことができる。   Particularly in the case of polymethylpentene resin, the advantages of the present invention are exhibited. That is, in the conventional method in which the upper and lower mold temperatures are adjusted and the transfer molded body is peeled off, the temperature of the upper mold at the time of peeling is set higher than the temperature of the lower mold in order to increase adhesion. The transfer molded body adheres to the upper mold and is peeled off from the lower mold. However, at this temperature, the rigidity of the resin is insufficient, and the transferred microstructure is often deformed at the time of peeling. Conversely, if the temperature of the upper mold is lowered and the temperature difference from the lower mold is reduced in order to prevent the deformation of the fine structure, sufficient adhesion to the upper mold cannot be obtained, and the transfer mold cannot be removed from the lower mold. It may be difficult to peel off. For this reason, in the polymethylpentene resin, it is difficult to adjust the upper and lower mold temperatures, and it is not easy to achieve both the separation of the transfer molding from the mold and the prevention of deformation of the transferred microstructure. . In contrast, in the present invention, the frame formed as described above is more firmly held on the upper mold when the temperature is lowered and the shrinkage amount of the transfer molded body is increased. For this reason, the transfer molded body adheres to the upper mold more stably, and the rigidity of the resin increases by lowering the temperature, so that deformation and distortion of the fine structure at the time of peeling hardly occur. According to the present invention, it is possible to easily achieve both stable adhesion of the transfer molded body to the upper mold and prevention of deformation of the microstructure. Further, the present invention can easily adjust the temperature of the upper and lower molds.

図4に示すスタンパを使用してLDPE樹脂からなる微細構造体の成形試験を行った。スタンパは、横100mm×縦70mmの四辺形内に、高さ0.7mm×根元直径0.3mmの5本の円錐突起状の微細構造を有する。一点鎖線で示すものは、上金型に設けた溝の位置を示す。溝は、幅1.0mm×深さ1.5mmである。220℃に溶融したLDPE樹脂を140℃に加熱したスタンパに塗布した。そして、溶融樹脂を塗布した後、これを2MPaの押圧力で60sの間押圧しながら、金型の温度を40℃まで冷却した後に金型を開いた。   Using the stamper shown in FIG. 4, a molding test of a fine structure made of LDPE resin was performed. The stamper has a fine structure of five conical projections having a height of 0.7 mm and a root diameter of 0.3 mm in a quadrilateral of 100 mm wide × 70 mm long. What is shown with a dashed-dotted line shows the position of the groove | channel provided in the upper metal mold | die. The groove is 1.0 mm wide × 1.5 mm deep. LDPE resin melted at 220 ° C was applied to a stamper heated to 140 ° C. And after apply | coating molten resin, pressing the mold for 60 seconds with the pressing force of 2 MPa, cooling the temperature of a metal mold | die to 40 degreeC, Then, the metal mold | die was opened.

転写成形された微細構造部分を図5に示す。図5に示すように鋭い先端部を有する円錐形状が正確に転写成形されており、その先端部に変形等の不具合は見られない。本発明によれば、スタンパの微細構造を高精度に転写成形した微細構造体を成形できることが分かる。   FIG. 5 shows the fine structure portion formed by transfer molding. As shown in FIG. 5, a conical shape having a sharp tip is accurately transferred and molded, and there is no defect such as deformation at the tip. According to the present invention, it can be seen that a fine structure in which a fine structure of a stamper is transferred and formed with high accuracy can be formed.

10 下金型
15 スタンパ
16 微細構造
20 上金型
22 土手部
23 溝
24 外枠部
30 転写成形体
31 微細構造体
33 枠体
35 切込部
36 切込部
37 凸条部
38 凸条部
39 樹脂溜り
40 Tダイ
10 Lower mold
15 Stamper
16 Microstructure
20 Upper mold
22 Bank
23 groove
24 Outer frame
30 Transfer molding
31 Microstructure
33 Frame
35 notch
36 notch
37 Projection
38 Projections
39 Resin pool
40 T die

Claims (7)

微細構造を有するスタンパが設けられた下金型と、その下金型に対向する上金型とにより、前記スタンパ上に塗布された溶融樹脂を押圧・冷却し、前記微細構造が転写成形された微細構造体を成形する成形金型であって、
前記上金型は、前記微細構造体の外縁を囲むように溝が設けられている微細構造体の成形金型。
The molten resin applied on the stamper was pressed and cooled by a lower mold provided with a stamper having a microstructure and an upper mold facing the lower mold, and the microstructure was transferred and molded. A molding die for molding a microstructure,
The upper mold is a mold for a fine structure in which a groove is provided so as to surround an outer edge of the fine structure.
溝は、微細構造体の微細構造部分から5mm以上離れた位置に設けられていることを特徴とする請求項1に記載の微細構造体の成形金型。   2. The microstructure mold according to claim 1, wherein the groove is provided at a position 5 mm or more away from the microstructure portion of the microstructure. 溝と微細構造体との境界を形成する上金型の土手部は、その溝の外縁を形成する前記上金型の外枠部の高さ以下になっていることを特徴とする請求項1又は2に記載の微細構造体の成形金型。   2. The bank portion of the upper mold that forms the boundary between the groove and the fine structure is less than the height of the outer frame portion of the upper mold that forms the outer edge of the groove. Or a molding die for a fine structure according to 2. 微細構造を有するスタンパが設けられた下金型と、その下金型に対向する上金型とにより、前記スタンパ上に塗布された溶融樹脂を押圧・冷却し、前記微細構造が転写成形された微細構造体を成形する成形方法であって、
前記微細構造体がその外縁を画定する薄肉の切込部を介して枠体に保持され、額縁付き形態に成形される微細構造体の成形方法。
The molten resin applied on the stamper was pressed and cooled by a lower mold provided with a stamper having a microstructure and an upper mold facing the lower mold, and the microstructure was transferred and molded. A molding method for molding a microstructure,
A method for forming a fine structure, wherein the fine structure is held by a frame body through a thin cut portion that defines an outer edge of the fine structure and is formed into a framed form.
微細構造を有するスタンパが設けられた下金型と、その下金型に対向する上金型とにより、Tダイから供給されて前記スタンパ上に塗布された溶融樹脂を押圧・冷却し、前記微細構造が転写成形された微細構造体を成形する成形方法であって、
先ず、Tダイから溶融樹脂を前記スタンパ上に供給しつつ、前記Tダイを前記スタンパに対して相対移動させて前記スタンパ上に溶融樹脂を塗布し、
次に、前記スタンパ上の溶融樹脂を押圧・冷却することにより、前記微細構造体がその外縁を画定する薄肉の切込部を介して枠体に保持され、額縁付き形態に成形される微細構造体の成形方法。
The lower mold provided with a stamper having a fine structure and the upper mold facing the lower mold are used to press and cool the molten resin supplied from the T die and applied onto the stamper. A molding method for molding a microstructure whose structure is transfer molded,
First, while supplying the molten resin from the T die onto the stamper, the T die is moved relative to the stamper to apply the molten resin onto the stamper,
Next, by pressing and cooling the molten resin on the stamper, the fine structure is held by the frame body through a thin notch that defines the outer edge thereof, and is formed into a framed form. Body molding method.
さらに、枠体の外縁を画定する薄肉の切込部を介して凸条部が形成されるように行われる請求項5に記載の微細構造体の成形方法。   Furthermore, the shaping | molding method of the microstructure of Claim 5 performed so that a protruding item | line part may be formed through the thin notch part which demarcates the outer edge of a frame. 微細構造を有するスタンパが設けられた下金型と、その下金型に対向する上金型とにより、前記スタンパ上に塗布された溶融樹脂を押圧・冷却し、前記微細構造が転写成形された微細構造体であって、
前記微細構造体がその外縁を画定する薄肉の切込部を介して枠体に保持され、額縁付き形態に成形された微細構造体。
The molten resin applied on the stamper was pressed and cooled by a lower mold provided with a stamper having a microstructure and an upper mold facing the lower mold, and the microstructure was transferred and molded. A microstructure,
A fine structure in which the fine structure is held in a frame body through a thin cut portion that defines an outer edge of the fine structure, and is formed into a framed form.
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