JP2016021480A - Tape sticking device and tape sticking jig - Google Patents

Abstract

PROBLEM TO BE SOLVED: To stably stick a tape having a planar shape smaller than a substrate without damaging the substrate.SOLUTION: A tape sticking device includes: a container 10 including an air-tight space inside; an elastic sheet 11 which partitions the air-tight space into a first air-tight space 12A positioned higher and a second air-tight space 12B positioned lower and places a diced tape 6 at the side of the first air-tight space 12A; and a tape sticking jig 20 which is placed on the elastic sheet 11 within the first air-tight space 12A, supports a substrate 1 having a planar shape larger than that of the diced tape separately from the diced tape for a predetermined distance and includes an opening for opening an area of the substrate to stick the diced tape therein. After the first and second air-tight spaces are brought into a vacuum state, the second air-tight space is brought into atmospheric pressure, and the elastic sheet is elastically deformed closer to the first air-tight space. The diced tape and the tape sticking jig are then pushed up and in the opening, the diced tape is abutted and stuck to the substrate.SELECTED DRAWING: Figure 4C

Description

  The present invention relates to a tape sticking device and a tape sticking jig.

  As shown in FIGS. 1A to 1C, in the step of attaching the tape 2 to the substrate 1 such as a wafer or glass, after the tape 2 larger than the substrate 1 is attached to the substrate 1, the cutter 3 is moved along the outer periphery of the substrate 1. Thus, the excess portion of the tape is cut (for example, Patent Document 1). At this time, there is a variation in the outer dimension tolerance of the substrate and the variation of the cutting position accuracy, and there is a risk of damaging the outer peripheral portion of the substrate when cutting the tape. Therefore, a certain gap is formed from the outer shape of the substrate to perform the tape cutting.

  Patent Document 1 discloses a method in which after a sheet larger than the substrate is attached to the substrate, the sheet is cut in a state in which a sheet protruding amount of 0.1 mm to 1 mm is secured from the outer peripheral edge of the substrate.

  Further, in Patent Documents 2 and 3, in the process of feeding out a strip-shaped material in which a film for forming a dicing tape is stuck on one surface of a base sheet, a dicing tape is formed by providing a cut in advance on the film surface of the strip-shaped material. A method of peeling the dicing tape from the base sheet and sticking the dicing tape to the ring frame and the semiconductor substrate is disclosed.

  In Patent Documents 4 and 5, the vacuum chamber is partitioned into two airtight spaces by a rubber sheet, a differential pressure is generated in the two airtight spaces, and the rubber sheet is inflated toward the decompressed airtight space, thereby reducing the pressure. A method is described in which a tape larger than the size of the substrate is attached to the substrate disposed on the airtight space side.

JP 2006-140251 A Japanese Patent No. 4444419 Japanese Patent No. 4568374 Japanese Patent No. 4143488 Japanese Patent Laid-Open No. 2003-7808

  In recent years, with the thinning of the substrate, grinding in the order of several tens of μm is performed in the grinding process. When the tape protrudes from the substrate, the substrate may be damaged by the intrusion of grinding water between the protrusion and the substrate and the tape. In the plating process, the plating solution may enter between the substrate and the tape from the protruding portion. Further, there is a case where the substrate is damaged due to the winding of the protruding portion of the tape on the outer periphery of the substrate. These problems have not been solved even by the amount of protrusion described in Patent Document 1.

  Further, in Patent Document 1, in order to bring the tape cutting position closer to the outer periphery of the substrate, the tape is cut along the outer periphery of the substrate. When tape cutting is performed with the tape protruding amount of 0.1 mm, there is a possibility of scratching the outer periphery of the board due to variations in the tolerances of the board's outer dimensions, which may cause damage to the board and damage the board. There is.

  Further, in Patent Documents 2 and 3, the belt-shaped material is fed out while producing an appropriate tension on the above-described belt-shaped material, and the dicing tape is peeled from the base sheet in the feeding direction, and the semiconductor substrate is attached to the ring frame by the sticking roller. Is pasted. In this case, since tension in a certain direction (tape supply direction) is applied to the tape, the circular tape may be attached in an elliptical shape, and it is difficult to stabilize the amount of protrusion of the tape to the outer periphery of the substrate. As described above, when a label-like tape having a substrate size or less formed in advance on the film surface is attached to the substrate, there is a problem that the tape application cannot be stably performed.

  The tape applicators described in Patent Documents 4 and 5 apply a tape larger than the substrate size, and do not consider attaching a tape smaller than the substrate size to the substrate.

  The present invention was devised by paying attention to such problems in sticking a tape to a substrate, and the object of the present invention is to stabilize a tape having a planar shape smaller than the substrate without damaging the substrate. Providing a tape applying apparatus, a tape applying jig and a tape applying method.

  A tape applicator according to a first aspect includes a container having an airtight space therein, a first airtight space positioned above and a second airtight space positioned below, and the first airtight space side An elastic sheet on which the piece tape is placed, and a substrate placed on the elastic sheet and having a planar shape larger than the piece tape in the first hermetic space from the piece tape by a predetermined distance. A tape application jig that includes an opening that opens an area where the individual tape of the substrate is applied, and an atmospheric pressure switching unit that switches the first and second airtight spaces to atmospheric pressure or reduced pressure. The first and second airtight spaces are evacuated by the atmospheric pressure switching unit, and the elastic sheet is elastically deformed to the first airtight space side with the second airtight space as an atmospheric pressure. tape Pushes up the fine the tape application jig, in which paste is brought into contact with the pieces tape to said substrate at said opening.

  A tape sticking jig according to a second aspect includes a container having an airtight space therein, a first airtight space positioned above and a second airtight space positioned below, and the first airtight space. An elastic sheet for placing the piece tape on the side, and an atmospheric pressure switching unit that switches the first and second airtight spaces to atmospheric pressure or reduced pressure, and the first and second airtight spaces are changed by the atmospheric pressure switching unit. After the vacuum state, the elastic sheet is elastically deformed toward the first hermetic space with the second hermetic space as atmospheric pressure, and the individual tape is brought into contact with a substrate having a larger planar shape than the individual tape. A tape sticking jig used in a tape sticking apparatus for sticking and sticking, comprising an opening for opening an area for sticking the piece tape of the substrate, and mounted on the elastic sheet in the first airtight space. The substrate is supported at a predetermined distance from the piece tape, and is pushed up together with the piece tape when the elastic sheet is elastically deformed, and the piece tape is attached to the substrate at the opening. It is made to contact.

  According to the present invention, a tape having a planar shape smaller than the substrate can be stably applied without damaging the substrate.

It is a figure explaining the conventional tape sticking method. It is a figure explaining the conventional tape sticking method. It is a figure which shows the sticking state of the tape by the conventional tape sticking method. It is a figure which shows the structure of the general tape sticking apparatus of a vacuum differential pressure sticking system. It is a figure explaining operation | movement of the tape sticking apparatus of FIG. 2A. It is a top view which shows the structure of the tape sticking jig | tool concerning Embodiment 1. FIG. It is sectional drawing which shows the state which has arrange | positioned the board | substrate and the tape to the tape sticking jig | tool concerning Embodiment 1. FIG. It is a figure which shows the structure of the tape sticking apparatus concerning Embodiment 1. FIG. It is the figure which expanded a part of FIG. 4A. It is a figure explaining the tape sticking method concerning Embodiment 1. FIG. It is a figure which shows the sticking state of the tape by the tape sticking method concerning Embodiment 1. FIG. It is sectional drawing which shows the state which has arrange | positioned the board | substrate and the tape to the tape sticking jig concerning Embodiment 2. FIG. It is a figure which shows the structure of the tape sticking apparatus concerning Embodiment 2. FIG. It is the figure which expanded a part of FIG. 5B. It is a top view explaining the tape sticking method concerning Embodiment 3. FIG. It is sectional drawing explaining the tape sticking method concerning Embodiment 3. FIG. It is a top view which shows the structure of the tape sticking jig concerning Embodiment 4. FIG. It is sectional drawing in the VIIB-VIIB line | wire of FIG. 7A. It is a top view which shows the structure of the tape sticking jig | tool concerning Embodiment 5. FIG. It is sectional drawing in the VIIIB-VIIIB line | wire of FIG. 8A. It is a figure which shows the structure of the tape sticking apparatus concerning Embodiment 6. FIG. It is the figure which expanded a part of FIG. 9A. It is a figure which shows the structure of the tape sticking apparatus concerning Embodiment 7. FIG. It is the figure which expanded a part of FIG. 10A.

  The tape sticking apparatus according to the embodiment sticks a tape to a substrate by a vacuum differential pressure sticking method. First, an outline of the configuration and operation of a general vacuum differential pressure application type tape application device will be described with reference to FIGS. 2A and 2B. FIG. 2A is a diagram illustrating a configuration of a general tape applying device. FIG. 2B is a diagram for explaining the operation of the tape applicator of FIG. 2A.

  As illustrated in FIG. 2A, the tape applying device 100 includes a container 10 and an elastic sheet 11. The container 10 has an airtight space 12 inside. As shown in FIG. 2B, the elastic sheet 11 partitions the airtight space 12 into a first airtight space 12A located above and a second airtight space 12B located below. On the elastic sheet 11, the substrate 1 which is an object to be pasted is placed. The substrate 1 is arranged on the first airtight space 12 </ b> A side of the elastic sheet 11.

  A planar tape 2 larger than the substrate 1 is disposed on the substrate 1 at a predetermined interval. The tape 2 is attached to the frame 4 so as not to be distorted or wrinkled. The frame 4 to which the tape 2 is attached is placed on the frame base 5, and the distance between the substrate 1 and the tape 2 is maintained. Although not shown here, the tape applicator 100 is provided with an air pressure switching unit that switches the first airtight space 12A and the second airtight space 12B to atmospheric pressure or reduced pressure. Note that the surrounding space surrounded by the elastic sheet 11, the tape 2, and the frame base 5 in the first hermetic space 12 </ b> A in FIG. 2A can be ventilated with spaces other than the surrounding space in the first hermetic space 12 </ b> A.

  In the vacuum differential pressure method, after the first hermetic space 12A and the second hermetic space 12B are brought into a vacuum state, the second hermetic space 12B is set to atmospheric pressure by natural leakage, and the first hermetic space 12A and the second hermetic space 12B are separated. Create differential pressure. As a result, as shown in FIG. 2B, the elastic sheet 11 expands toward the first airtight space 12A and pushes up the substrate 1 so that the central portion of the substrate 1 comes into contact with the tape 2 so that the tape 2 is attached to the substrate 1. It is pasted.

  In this method, unlike the tape application by a roller, the tape application can be performed on the substrate 1 by surface pressure, so that the stress due to the local pressure applied to the substrate 1 can be reduced. For this reason, it is possible to prevent the substrate from being damaged by a local load when the tape is attached to a fragile substrate, an extremely thin substrate, or the like. In the embodiment, a tape sticking device for sticking a piece of tape smaller than the size of the substrate is provided using the vacuum differential pressure sticking method as described above.

Embodiment 1 FIG.
The tape sticking jig according to the first embodiment will be described with reference to the drawings. FIG. 3A is a plan view illustrating a configuration of the tape sticking jig 20 according to the first embodiment. FIG. 3B is a cross-sectional view illustrating a state in which the substrate 1 and the piece tape 6 are arranged on the tape sticking jig 20 according to the first embodiment. For explanation, in FIG. 3A, the substrate 1 placed on the tape applying jig 20 is indicated by a broken line.

  The tape sticking jig 20 is a jig for sticking the piece tape 6 that is smaller than the size of the substrate 1 to the substrate 1 such as a wafer or glass by a vacuum differential pressure sticking method. Here, a circular wafer will be described as an example of the substrate 1. As shown in FIGS. 3A and 3B, the tape applying jig 20 is provided with an opening 21. The opening 21 opens a tape application region where the individual tape 6 of the substrate 1 is attached. Here, a circular opening 21 is provided in accordance with the shape of the tape application region of the substrate 1. That is, the tape sticking jig 20 is an annular jig.

  The shape of the opening is not limited to a circular shape, and various shapes such as a rectangular shape can be adopted according to the shape of the tape application region of the substrate 1. Moreover, the tape sticking jig | tool 20 can be made into rectangular frame shape etc. other than cyclic | annular form.

  In the opening 21, the piece tape 6 to be attached is arranged with the adhesive surface facing up. The outer peripheral edge of the piece tape 6 contacts the inner surface of the tape sticking jig 20. The substrate 1 is placed on the upper surface of the tape sticking jig 20. As shown in FIG. 3B, the tape applying jig 20 supports the peripheral edge of the substrate 1 so that the substrate 1 is separated from the individual tape 6 by a predetermined distance. The planar shape of the substrate 1 is larger than the planar shape of the piece tape 6.

  Four positioning pins 22 are provided on the upper surface of the tape applying jig 20. The positioning pins 22 are board positioning portions that fix the position of the board 1. The substrate 1 is positioned in the vertical and horizontal directions by positioning pins 11. Note that at least three positioning pins 11 may be provided, and four or more positioning pins 11 may be provided.

  Here, with reference to FIG. 4A and 4B, the structure of the tape sticking apparatus 200 using the tape sticking jig | tool 20 is demonstrated. FIG. 4A is a diagram showing a configuration of a tape applicator using the tape applicator 20. FIG. 4B is an enlarged view of a part of FIG. 4A.

  As shown in FIG. 4A, the tape sticking apparatus 200 includes a tape sticking jig 20 in addition to the container 10 and the elastic sheet 11 described above. The container 10 has an airtight space 12 inside. The elastic sheet 11 is fixed to the container 10. The elastic sheet 11 partitions the airtight space 12 into a first airtight space 12A located above and a second airtight space 12B located below.

  A tape sticking jig 20 is placed on the elastic sheet 11. In the opening of the tape sticking jig 20, the piece tape 6, which is a sticking object, is placed on the elastic sheet 11. The tape sticking jig 20 and the piece tape 6 are disposed on the first airtight space 12 </ b> A side of the elastic sheet 11. The substrate 1 is placed on the tape sticking jig 20. The distance between the substrate 1 and the piece tape 6 is maintained by the tape applying jig 20.

  Although not shown here, the tape applicator 200 is provided with an air pressure switching unit that switches the first airtight space 12A and the second airtight space 12B to atmospheric pressure or reduced pressure. As shown in FIG. 4B, the surrounding space surrounded by the tape applying jig 20, the elastic sheet 11, and the substrate 1 in the first airtight space 12A and the space other than the surrounding space in the first airtight space 12A can be ventilated. Thus, a groove 23 is provided in the tape sticking jig 20. Therefore, the enclosed space in the first airtight space 12A and the space other than the enclosed space have the same pressure.

  Here, with reference to FIG. 4C further, the tape sticking method concerning Embodiment 1 is demonstrated. FIG. 4C is a diagram illustrating the tape applying method according to the first embodiment. First, as shown in FIG. 4A, the piece tape 6 is supplied into the opening 21 of the tape applying jig 20 with the adhesive surface facing upward. Then, the board | substrate 1 is supplied on the tape sticking jig | tool 20 in the state which made the surface which affixes the piece tape 6 face down.

  After the supply operation is completed, the container 10 is closed, and the first airtight space 12A and the second airtight space 12B are brought into a vacuum state by the atmospheric pressure switching unit. Thereafter, air is introduced into the second hermetic space 12B to obtain atmospheric pressure, and a differential pressure is generated between the first hermetic space 12A and the second hermetic space 12B. As a result, as shown in FIG. 4C, the elastic sheet 11 is elastically deformed toward the first airtight space 12A, and the piece tape 6 and the tape applying jig 20 arranged on the elastic sheet 11 are pushed up by the elastic sheet 11. It is done.

  The piece tape 6 is guided by the inner surface of the opening 21 of the tape sticking jig 20 and moves to the substrate 1 side arranged above. That is, the tape sticking jig 20 serves as a guide mechanism for guiding the piece tape 6 to the sticking area of the substrate 1. First, the central portion of the piece tape 6 comes into contact with the substrate 1 in the opening 21. Thereafter, the elastic deformation of the elastic sheet 11 is advanced until the contact area between the substrate 1 and the piece tape 6 reaches a predetermined amount. The piece tape 6 is pressed against the inner surface of the substrate 1 with a pressing pressure that does not damage the substrate 1. As a result, the entire piece tape 6 is affixed to the substrate 1.

  FIG. 4D is a diagram illustrating a tape application state according to the tape application method according to the first embodiment. As shown in FIG. 4D, the piece tape 6 is attached to a predetermined position of the substrate 1 without protruding from the outer peripheral portion of the substrate 1.

  Thus, according to the first embodiment, the piece tape 6 smaller than the size of the substrate 1 can be accurately attached to the substrate 1 using the tape attaching jig 20. By applying the protective tape for the wafer grinding process using the tape applying method according to the first embodiment, it is not necessary to cut the protective tape after applying the protective tape, thereby reducing the number of processes. Is possible. Further, it is possible to prevent breakage and damage of the outer peripheral portion of the substrate that occurred when the protective tape was cut.

  Furthermore, since a protective tape smaller than the size of the wafer can be attached to the wafer, the protective tape does not protrude from the outer periphery of the wafer. This makes it possible to prevent breakage and damage due to the intrusion of grinding water from between the protruding portion of the wafer and the protective tape during grinding and the entrainment of the protruding portion of the protective tape.

  In addition, by applying the protective tape for the plating process using the tape applying method according to the first embodiment, the substrate outer peripheral portion, which was generated when the protective tape was cut, was similarly damaged. Can be prevented. Since it is possible to paste a protective tape smaller than the board size, it is possible to prevent substrate contamination and damage due to intrusion of plating solution, cleaning water, etc. from between the protruding part of the board and the protective tape during plating Become.

  Furthermore, in the tape applying method according to the first embodiment, since the tape can be applied to the substrate 1 by surface pressure, the stress due to local pressing on the substrate 1 can be reduced. For this reason, even when a tape smaller than the substrate size is attached to a fragile substrate, an extremely thin substrate, or the like, it is possible to prevent the substrate from being damaged by a local load.

Embodiment 2. FIG.
The structure of the tape sticking jig concerning Embodiment 2 and the tape sticking apparatus using the same is demonstrated with reference to FIG. FIG. 5A is a cross-sectional view illustrating a state in which a substrate and a tape are arranged on the tape applying jig according to the second embodiment. FIG. 5B is a diagram illustrating a configuration of the tape attaching device according to the second embodiment. FIG. 5C is an enlarged view of a part of FIG. 5B. 5A to 5C, the same components as those described above are denoted by the same reference numerals.

  The second embodiment is different from the tape sticking jig 20 of the first embodiment in that a porous resin plate 24 is provided instead of the groove 23. As shown in FIGS. 5A to 5C, the porous resin plate 24 is provided on the upper surface of the tape sticking jig 20. The porous resin plate 24 can ventilate the surrounding space surrounded by the tape applying jig 20, the elastic sheet 11, and the substrate 1 in the first hermetic space 12A, and the space other than the surrounding space in the first hermetic space 12A. It is provided to do. As the porous resin plate 24, for example, a fluororesin porous plate or the like can be used.

  The groove 23 and the porous resin plate 24 may be provided at any location of the tape sticking jig 20 as long as the surrounding space of the first airtight space 12A and the space other than the surrounding space can be vented. . Ventilation means other than the grooves 23 and the porous resin plate 24 may be employed. In addition, if the surrounding space and the space other than the surrounding space of the first airtight space 12A are originally ventilated, it is not necessary to provide the groove 23 and the porous resin plate 24 separately.

Embodiment 3 FIG.
A tape application method according to the third embodiment will be described with reference to FIGS. 6A and 6B. 6A and 6B are diagrams for explaining a tape sticking method according to the third embodiment. In the tape attaching method according to the third embodiment, a plurality of individual tapes 6 are simultaneously attached to predetermined positions on the substrate 1.

  The tape plate 30 holds a plurality of individual tapes 6 with the adhesive surface facing up. For example, the tape plate 30 is provided with a plurality of accommodating portions 31 made of depressions of the same size as the individual tape 6. The accommodating portion 31 is provided corresponding to the tape application position of the substrate 1. The tape plate 30 can hold the plurality of individual tapes 6 by accommodating the individual tapes 6 in the plurality of accommodating portions 31, respectively. In the example shown in FIGS. 6A and 6B, four accommodating portions 31 are provided in the tape plate 30, and the individual tape 6 is accommodated in each accommodating portion 31.

  In the third embodiment, the same tape application jig 20 described in the first or second embodiment can be used. A tape plate 30 holding a plurality of individual tapes 6 is disposed in the opening 21. The tape plate 30 is placed on the elastic sheet 11 so that the adhesive surface of the piece tape 6 held on the tape plate 30 faces the substrate 1. The outer peripheral edge of the tape plate 30 contacts the inner surface of the opening 21 of the tape sticking jig 20.

  The substrate 1 is placed on the upper surface of the tape sticking jig 20. As shown in FIG. 6B, the tape applying jig 20 supports the peripheral edge of the substrate 1 so that the substrate 1 is separated from the individual tape 6 by a predetermined distance. The planar shape of the substrate 1 is larger than the planar shape of the piece tape 6.

  The tape sticking method concerning Embodiment 3 is demonstrated. As in the first embodiment, first, a tape plate 30 that holds a plurality of individual tapes 6 with the adhesive surface facing upward is supplied into the opening 21 of the tape applying jig 20. Then, the board | substrate 1 is supplied on the tape sticking jig | tool 20 in the state which made the surface which affixes the piece tape 6 face down.

  After the supply operation is completed, the container 10 is closed, and the first airtight space 12A and the second airtight space 12B are brought into a vacuum state by the atmospheric pressure switching unit. Thereafter, air is introduced into the second hermetic space 12B to obtain atmospheric pressure, and a differential pressure is generated between the first hermetic space 12A and the second hermetic space 12B. Thereby, the elastic sheet 11 is elastically deformed toward the first airtight space 12 </ b> A, and pushes up the tape plate 30 and the tape applying jig 20.

  The tape plate 30 is guided by the inner surface of the opening 21 of the tape sticking jig 20 and moves to the substrate 1 side disposed above. First, the central portion of the tape plate 30 contacts the substrate 1 at the opening 21. Thereafter, as the elastic deformation of the elastic sheet 11 proceeds, the area where the tape plate 30 abuts on the substrate 1 increases, the individual tape 6 abuts on the substrate 1, and a plurality of individual tapes 6 are simultaneously attached to the substrate 1. It is done. The piece tape 6 is pressed against the inner surface of the substrate 1 with a pressing pressure that does not damage the substrate 1. As described above, in the third embodiment, in addition to the effect described in the first embodiment, there is an effect that a plurality of individual tapes can be simultaneously attached to arbitrary positions of the substrate 1.

Embodiment 4 FIG.
The tape sticking jig according to the fourth embodiment will be described with reference to FIGS. 7A and 7B. FIG. 7A is a plan view illustrating a configuration of a tape attaching jig according to the fourth embodiment. 7B is a cross-sectional view taken along line VIIB-VIIB in FIG. 7A.

  As shown in FIG. 7A, the tape sticking jig 20A according to the fourth embodiment includes a rotation stop surface 25 in addition to the configuration described in the first embodiment. The rotation stop surface 25 is an example of a tape positioning unit that fixes the position of the piece tape 6. The substantially circular piece tape 6 is provided with a notch surface 6A for positioning. When the rotation stop surface 25 and the notch surface 6A of the piece tape 6 come into contact with each other, the piece tape 6 can be prevented from rotating in the opening 21.

  When the elastic sheet 11 is elastically deformed by the differential pressure between the first airtight space 12 </ b> A and the second airtight space 12 </ b> B, the piece tape 6 is guided to the rotation stop surface 25 and the inner surface of the opening 21. Thereby, it becomes possible to affix the piece tape 6 on the substrate 1 in a predetermined direction.

Embodiment 5 FIG.
The tape sticking jig according to the fifth embodiment will be described with reference to FIGS. 8A and 8B. FIG. 8A is a plan view illustrating a configuration of a tape attaching jig according to the fifth embodiment. 8B is a cross-sectional view taken along line VIIIB-VIIIB in FIG. 8A.

  As shown in FIG. 8A, the tape sticking jig 20 </ b> B according to the fifth embodiment includes a detachable rotation stop pin 26 in addition to the configuration described in the first embodiment. The rotation stop pin 26 is another example of a tape positioning portion that fixes the position of the piece tape 6.

  The substantially circular piece tape 6 is provided with a notch surface 6A for positioning. It is possible to prevent the piece tape 6 from rotating in the opening 21 by the contact between the cut surface 6 </ b> A and the rotation stop pin 26.

  When the elastic sheet 11 is elastically deformed by the differential pressure between the first airtight space 12 </ b> A and the second airtight space 12 </ b> B, the piece tape 6 is guided to the inner surfaces of the rotation stop pin 26 and the opening 21. Thereby, it becomes possible to affix the piece tape 6 on the substrate 1 in a predetermined direction. Moreover, the tape sticking jig 20B can be used also when sticking the circular piece tape 6 not provided with the notch surface 6A by removing the rotation stop pin 26.

  In the fourth and fifth embodiments, the notch surface 6A is provided on the piece tape 6, but the present invention is not limited to this. The tape plate 30 described in the third embodiment is provided with a notch surface, and the notch surface and the rotation stop surface 25 are brought into contact with each other, thereby preventing the tape plate 30 holding the plurality of individual tapes 6 from rotating. It is also possible.

Embodiment 6 FIG.
A tape applicator according to the sixth embodiment will be described with reference to FIGS. 9A and 9B. FIG. 9A is a diagram illustrating a configuration of a tape applying apparatus according to the sixth embodiment. FIG. 9B is an enlarged view of a part of FIG. 9A.

  As shown in FIG. 9A, the tape attaching device 200 according to the sixth embodiment includes a push-up plate 40 in addition to the configuration described in the first embodiment. The push-up plate 40 is disposed between the elastic sheet 11 and the piece tape 6 in the opening 21. As shown in FIG. 9A, the push-up plate 40 is a flat plate member having high rigidity that pushes up toward the individual tape 6 substrate 1 without substantially deforming when the elastic sheet 11 is elastically deformed. The push-up plate 40 is substantially the same as the size of the piece tape 6.

  As shown in FIG. 9B, when the elastic sheet 11 is elastically deformed using the differential pressure between the first airtight space 12A and the second airtight space 12B, the push-up plate 40 and the individual pieces placed on the push-up plate 40 The piece tape 6 is guided by the inner surface of the tape applying jig 20 and moves to the substrate 1 side. Then, the piece tape 6 is abutted against the substrate 1 and attached. The end portion of the piece tape 6 is pressed toward the substrate 1 by the push-up plate 40 and attached to the substrate 1.

  Thus, in the sixth embodiment, even when the elastic sheet 11 does not follow the shape of the opening 21 of the tape applying jig 20 and the end of the piece tape 6 is not pressed by the elastic sheet 11, the push-up plate 40. It becomes possible to affix to the board | substrate 1 to the edge part of the piece tape 6 by using.

Embodiment 7 FIG.
A tape applicator according to the seventh embodiment will be described with reference to FIGS. 10A and 10B. FIG. 10A is a diagram illustrating a configuration of a tape applying apparatus according to the seventh embodiment. FIG. 10B is an enlarged view of a part of FIG. 10A.

  As shown in FIG. 10A, the tape applying apparatus 200 according to the seventh embodiment includes a push-up plate 40A in addition to the configuration described in the first embodiment. Similarly to the push-up plate 40, the push-up plate 40 </ b> A is disposed between the elastic sheet 11 and the piece tape 6 in the opening 21. A plate-side notch 41 is provided on the end surface of the push-up plate 40A. The plate-side notch 41 is formed on the surface of the push-up plate 40 that faces the tape applying jig 20.

  A jig-side notch 27 is provided on the surface of the tape applying jig 20 that faces the push-up plate 40. That is, the jig-side notch 27 is provided on the inner surface of the opening 21. The push-up plate 40A is a flat plate member having high rigidity that pushes up toward the individual tape 6 substrate 1 side without being substantially deformed when the elastic sheet 11 is elastically deformed. The upper surface excluding the plate-side notch 41 of the push-up plate 40A is substantially the same as the size of the piece tape 6.

  As shown in FIG. 10B, when the elastic sheet 11 is elastically deformed using the differential pressure between the first airtight space 12A and the second airtight space 12B, the push-up plate 40A and the pieces placed on the push-up plate 40A The piece tape 6 is guided by the inner surface of the tape applying jig 20 and moves to the substrate 1 side. Then, the piece tape 6 is abutted against the substrate 1 and attached. As the elastic deformation of the elastic sheet 11 proceeds, the plate-side notch 41 fits into the jig-side notch 27. Then, the end portion of the piece tape 6 is pressed toward the substrate 1 by the upper surface of the push-up plate 40 and is attached to the substrate 1.

  Thus, in the seventh embodiment, even when the elastic sheet 11 does not follow the shape of the opening 21 of the tape applying jig 20 and the end of the piece tape 6 is not pressed by the elastic sheet 11, the push-up plate 40. It becomes possible to affix to the board | substrate 1 to the edge part of the piece tape 6 by using.

  According to the above-described embodiment, it is possible to stably affix a piece tape smaller than the substrate size without damaging or damaging the substrate. Moreover, the sticking precision of label-like piece tapes, such as a pre-cut tape, can be improved.

As described above, the configuration and operation according to the embodiment have been described with specific examples, but the present invention is not limited to this. Without departing from the scope of the technical idea and the object of the present invention, those skilled in the art can make various modifications to the above-described embodiments regarding the shape, position, arrangement, etc. as necessary. is there. For example, it is possible to provide a plurality of openings 21 in the tape application jig 20 in accordance with the application positions of the plurality of individual tapes 6 to limit the contact area where the elastic sheet 11 contacts the substrate 1.
(Appendix 1)
A container having an airtight space inside;
An elastic sheet for partitioning the airtight space into a first airtight space located above and a second airtight space located below, and placing a piece of tape on the first airtight space side;
In the first hermetic space, a substrate placed on the elastic sheet and having a planar shape larger than the planar shape of the piece tape is supported at a predetermined distance from the piece tape, and the substrate A tape application jig comprising an opening for opening an area to which the individual tape is applied;
An atmospheric pressure switching unit for switching the first and second hermetic spaces to atmospheric pressure or reduced pressure;
With
After the first and second airtight spaces are evacuated by the atmospheric pressure switching unit, the second airtight space is pressurized to elastically deform the elastic sheet toward the first airtight space, and the piece tape and the A tape applicator that pushes up a tape applicator and attaches the individual tape in contact with the substrate at the opening.
(Appendix 2)
A tape plate disposed in the opening and holding a plurality of the piece tapes;
The tape plate is placed on the elastic sheet such that a plurality of the piece tapes face the substrate.
The tape applicator according to appendix 1.
(Appendix 3)
The tape plate is provided with an accommodating portion for accommodating the piece tape.
The tape applicator according to appendix 2.
(Appendix 4)
In the opening, further comprising a push-up plate disposed between the elastic sheet and the piece tape,
The push-up plate pushes up the piece tape without substantially deforming when the elastic sheet is elastically deformed,
The tape applicator according to any one of appendices 1 to 3.
(Appendix 5)
The tape sticking jig has a jig-side notch on the surface facing the push-up plate,
The push-up plate has a plate-side notch provided on a surface facing the tape sticking jig,
The jig-side notch and the plate-side notch are fitted when the elastic sheet is elastically deformed,
The tape applicator according to appendix 4.
(Appendix 6)
The tape sticking jig further includes a substrate positioning part for fixing the position of the substrate.
The tape applicator according to any one of appendices 1 to 5.
(Appendix 7)
The tape sticking jig further includes a tape positioning portion that fixes the position of the piece tape.
The tape applicator according to any one of appendices 1 to 6.
(Appendix 8)
The tape sticking jig ventilates the surrounding space surrounded by the tape sticking jig, the elastic sheet, and the substrate in the first airtight space, and the space other than the surrounding space in the first airtight space. With ventilation,
The tape applicator according to any one of appendices 1 to 7.
(Appendix 9)
The tape affixing device according to appendix 8, wherein the ventilation portion is a groove or a porous member provided in the tape affixing jig.
(Appendix 10)
A container having an airtight space inside;
An elastic sheet for partitioning the airtight space into a first airtight space located above and a second airtight space located below, and placing a piece of tape on the first airtight space side;
An atmospheric pressure switching unit for switching the first and second hermetic spaces to atmospheric pressure or reduced pressure;
Have
After the first and second airtight spaces are evacuated by the atmospheric pressure switching unit, the elastic sheet is elastically deformed to the first airtight space side with the second airtight space as atmospheric pressure, and the piece tape is A tape applicator used in a tape applicator for abutting and adhering to a substrate having a planar shape larger than the planar shape of an individual tape,
An opening for opening a region to which the piece tape of the substrate is attached;
Placed on the elastic sheet in the first hermetic space,
Supporting the substrate at a predetermined distance from the piece tape,
When the elastic sheet is elastically deformed, it is pushed up together with the piece tape, and the piece tape is brought into contact with the substrate in the opening,
Tape application jig.
(Appendix 11)
The tape applicator is
A push-up plate that is disposed between the elastic sheet and the piece tape in the opening, and pushes up the piece tape without substantially deforming when the elastic sheet is elastically deformed;
The tape sticking jig is
Provided on the surface facing the push-up plate, and when the elastic sheet is elastically deformed, it has a jig-side cut-out portion that mates with a plate-side cut-out portion provided in the push-up plate.
The tape sticking jig according to appendix 10.
(Appendix 12)
A substrate positioning unit for fixing the position of the substrate;
The tape sticking jig according to appendix 10 or 11.
(Appendix 13)
A tape positioning part for fixing the position of the piece tape;
The tape sticking jig according to any one of appendices 10 to 12.
(Appendix 14)
A ventilation portion for ventilating the enclosed space surrounded by the tape sticking jig, the elastic sheet, and the substrate in the first hermetic space; and a space other than the enclosed space in the first hermetic space;
The tape sticking jig according to any one of appendices 10 to 13.
(Appendix 15)
The tape affixing jig according to appendix 14, wherein the ventilation portion is a groove or a porous member.
(Appendix 16)
A container having an airtight space inside;
An elastic sheet for partitioning the airtight space into a first airtight space located above and a second airtight space located below, and placing a piece of tape on the first airtight space side;
In the first hermetic space, a substrate placed on the elastic sheet and having a planar shape larger than the planar shape of the piece tape is supported at a predetermined distance from the piece tape, and the substrate A tape application jig comprising an opening for opening an area to which the individual tape is applied;
An atmospheric pressure switching unit for switching the first and second hermetic spaces to atmospheric pressure or reduced pressure;
In a tape applicator comprising:
After the first and second airtight spaces are evacuated by the atmospheric pressure switching unit, the elastic sheet is elastically deformed to the first airtight space side with the second airtight space as atmospheric pressure, and the piece tape and the A tape sticking method in which a tape sticking jig is pushed up, and the piece tape is brought into contact with the substrate and stuck in the opening.
(Appendix 17)
The tape applicator further includes a tape plate disposed in the opening and holding a plurality of the piece tapes,
The tape plate is placed on the elastic sheet so that a plurality of the piece tapes are opposed to the substrate, and the plurality of piece tapes are simultaneously attached to the substrate.
The tape application method according to appendix 16.
(Appendix 18)
The tape sticking device further includes a push-up plate disposed between the elastic sheet and the piece tape in the opening,
When the elastic sheet is elastically deformed, the individual tape is pushed up by the push-up plate that does not substantially deform,
18. The tape application method according to appendix 16 or 17.
(Appendix 19)
The tape sticking jig has a jig-side notch on the surface facing the push-up plate,
The push-up plate has a plate-side notch provided on a surface facing the tape sticking jig,
When the elastic sheet is elastically deformed, the jig-side notch and the plate-side notch are fitted together.
The tape application method according to appendix 18.
(Appendix 20)
Fixing the position of the piece tape by a tape positioning portion provided in the tape application jig;
The tape applicator according to any one of appendices 16 to 19.

DESCRIPTION OF SYMBOLS 1 Board | substrate 2 Tape 3 Cutter 4 Frame 5 Frame stand 6 Piece tape 6A Notch surface 10 Container 11 Elastic sheet 12 Airtight space 12A 1st airtight space 12B 2nd airtight space 20 Tape sticking jig 20A Tape sticking jig 20B Tape sticking Jig 21 Opening portion 22 Positioning pin 23 Groove 24 Porous resin plate 25 Anti-rotation surface 26 Anti-rotation pin 27 Jig-side notch 30 Tape plate 31 Receiving portion 40 Push-up plate 40A Push-up plate 41 Plate-side notch 100 Tape Sticking device 200 Tape sticking device

Claims (10)

A container having an airtight space inside;
An elastic sheet for partitioning the airtight space into a first airtight space located above and a second airtight space located below, and placing a piece of tape on the first airtight space side;
In the first hermetic space, a substrate placed on the elastic sheet and having a planar shape larger than the planar shape of the piece tape is supported at a predetermined distance from the piece tape, and the substrate A tape application jig comprising an opening for opening an area to which the individual tape is applied;
An atmospheric pressure switching unit for switching the first and second hermetic spaces to atmospheric pressure or reduced pressure;
With
After the first and second airtight spaces are evacuated by the atmospheric pressure switching unit, the second airtight space is pressurized to elastically deform the elastic sheet toward the first airtight space, and the piece tape and the A tape applicator that pushes up a tape applicator and attaches the individual tape in contact with the substrate at the opening. A tape plate disposed in the opening and holding a plurality of the piece tapes;
The tape plate is placed on the elastic sheet such that a plurality of the piece tapes face the substrate.
The tape sticking device according to claim 1. The tape plate is provided with an accommodating portion for accommodating the piece tape.
The tape sticking apparatus according to claim 2. In the opening, further comprising a push-up plate disposed between the elastic sheet and the piece tape,
The push-up plate pushes up the piece tape without substantially deforming when the elastic sheet is elastically deformed,
The tape sticking apparatus of any one of Claims 1-3. The tape sticking jig has a jig-side notch on the surface facing the push-up plate,
The push-up plate has a plate-side notch provided on a surface facing the tape sticking jig,
The jig-side notch and the plate-side notch are fitted when the elastic sheet is elastically deformed,
The tape sticking apparatus according to claim 4. The tape sticking jig further includes a substrate positioning part for fixing the position of the substrate.
The tape sticking apparatus of any one of Claims 1-5. The tape sticking jig further includes a tape positioning portion that fixes the position of the piece tape.
The tape sticking apparatus of any one of Claims 1-6. The tape sticking jig ventilates the surrounding space surrounded by the tape sticking jig, the elastic sheet, and the substrate in the first airtight space, and the space other than the surrounding space in the first airtight space. With ventilation,
The tape sticking apparatus of any one of Claims 1-7.   The tape affixing device according to claim 8, wherein the ventilation portion is a groove or a porous member provided in the tape affixing jig. A container having an airtight space inside;
An elastic sheet for partitioning the airtight space into a first airtight space located above and a second airtight space located below, and placing a piece of tape on the first airtight space side;
An atmospheric pressure switching unit for switching the first and second hermetic spaces to atmospheric pressure or reduced pressure;
Have
After the first and second airtight spaces are evacuated by the atmospheric pressure switching unit, the elastic sheet is elastically deformed to the first airtight space side with the second airtight space as atmospheric pressure, and the piece tape is A tape applicator used in a tape applicator for abutting and adhering to a substrate having a planar shape larger than the planar shape of an individual tape,
An opening for opening a region to which the piece tape of the substrate is attached;
Placed on the elastic sheet in the first hermetic space,
Supporting the substrate at a predetermined distance from the piece tape,
When the elastic sheet is elastically deformed, it is pushed up together with the piece tape, and the piece tape is brought into contact with the substrate in the opening,
Tape application jig.

Images