JP2016013029A - Direct drive motor, carrier device, inspection device, machine tool, and semiconductor manufacturing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a direct drive motor which inhibits enlargement.SOLUTION: A direct drive motor includes: a motor part having a stator and a rotor which may rotate relative to the stator; a rotation detector which detects rotation of the motor part; a housing which holds the motor part and the rotation detector; a cable which is at least partially disposed in a hole provided on an outer surface of the housing; and a fixing mechanism which is disposed at the inner side of the hole and fixes the cable.

Description

  The present invention relates to a direct drive motor, a transfer device, an inspection device, a machine tool, and a semiconductor manufacturing device.

  The direct drive motor directly transmits generated power to an object without using a speed reduction mechanism. The direct drive motor includes a motor unit that generates power, a rotation detector that detects rotation of the motor unit, and a housing that holds the motor unit and the rotation detector. The motor unit is connected to a cable that supplies power. The rotation detector is connected to a cable that outputs a detection signal.

  As disclosed in Patent Document 1, Patent Document 2, and Patent Document 3, the cable is fixed using a fixing member such as a clamp. Patent document 1 discloses the structure which fixes the power cable connected to a coil using the clamp which protrudes from the outer surface of a cover. Patent Documents 2 and 3 disclose a structure in which a detector cable connected to a rotation detector is fixed using a clamp protruding from the outer surface of the detector cover.

Japanese Utility Model Publication No. 01-105356 JP 2003-274597 A JP 2003-274598 A

  If the fixing member for fixing the cable protrudes from the outer surface of the housing (cover), the space occupied by the direct drive motor may be increased. When a direct drive motor with a large occupation space is used in a transfer device, an inspection device, a machine tool, and a semiconductor manufacturing device, it is difficult to downsize the transfer device, the inspection device, the machine tool, and the semiconductor manufacturing device. There is a possibility.

  An object of an aspect of the present invention is to provide a direct drive motor that can suppress an increase in size. Another object of the present invention is to provide a transport device, an inspection device, a machine tool, and a semiconductor manufacturing device that can suppress an increase in size.

  According to a first aspect of the present invention, there is provided a motor unit having a stator and a rotor rotatable with respect to the stator, a rotation detector for detecting rotation of the motor unit, the motor unit, and the rotation detector. A direct drive motor comprising: a housing that holds the cable; a cable that is at least partially disposed in a hole provided on an outer surface of the housing; and a fixing mechanism that is disposed inside the hole and fixes the cable. To do.

  According to the first aspect of the present invention, since the fixing mechanism is provided inside the hole of the housing in which the cable is disposed, the fixing mechanism is prevented from protruding from the outer surface of the housing. Therefore, an increase in the area occupied by the direct drive motor is suppressed.

  In the first aspect of the present invention, the fixing mechanism includes a clamp member fixed to the outer surface of the cable and an inner side of the hole, and the clamp member does not protrude from the end of the hole to the outside of the housing. And a support portion for supporting the clamp member.

  Thereby, the fixing mechanism can sufficiently fix the cable while being prevented from protruding from the outer surface of the housing.

  In the first aspect of the present invention, the clamp member includes a first end portion, a second end portion, and an intermediate portion between the first end portion and the second end portion, and the cable. The first end is fixed to a first part of the outer surface of the cable, and the second end is fixed to a second part of the outer surface of the cable different from the first part in a direction parallel to the central axis of the cable. As described above, the intermediate portion of the clamp member may be bent.

  Thereby, the cable is sufficiently fixed between the first end and the second end of the clamp member.

  In the first aspect of the present invention, the cable includes a lead wire and a protective member disposed around the lead wire and softer than the lead wire, and the clamp member bites into the protective member. It may be bent.

  Thus, the cable is sufficiently fixed while damage to the lead wire is suppressed.

  1st aspect of this invention WHEREIN: The said support part is provided in the inner surface of the said hole, and includes the projection part which can be plastically deformed, and the said projection part supports the lower part of the said clamp member arrange | positioned inside the said hole. It may be modified so as to.

  This sufficiently suppresses the clamp member from coming out of the hole.

  In the first aspect of the present invention, the clamp member is a cylindrical member, and may have a slit portion provided on the outer surface of the clamp member and parallel to the central axis of the clamp member.

  Thereby, a clamp member becomes easy to change and can hold a cable stably.

  According to a second aspect of the present invention, there is provided a transport apparatus including the direct drive motor according to the first aspect and a transport unit that transports an object by the operation of the direct drive motor.

  According to the 2nd aspect of this invention, the enlargement of a conveying apparatus is suppressed.

  According to a third aspect of the present invention, there is provided an inspection apparatus including the direct drive motor according to the first aspect and an inspection unit that inspects an object moving by the operation of the direct drive motor.

  According to the 3rd aspect of this invention, the enlargement of a test | inspection apparatus is suppressed.

  According to a fourth aspect of the present invention, there is provided a machine tool including the direct drive motor according to the first aspect and a processing unit that processes an object that moves by the operation of the direct drive motor.

  According to the 4th aspect of this invention, the enlargement of a machine tool is suppressed.

  According to a fifth aspect of the present invention, there is provided a semiconductor manufacturing apparatus comprising: the direct drive motor according to the first aspect; and a processing unit that processes an object that is moved by the operation of the direct drive motor.

  According to the 5th aspect of this invention, the enlargement of a semiconductor manufacturing apparatus is suppressed.

  According to the aspect of the present invention, a direct drive motor capable of suppressing an increase in size is provided. Moreover, according to the aspect of this invention, the conveying apparatus which can suppress enlargement, an inspection apparatus, a machine tool, and a semiconductor manufacturing apparatus are provided.

FIG. 1 is a cross-sectional view showing an example of a direct drive motor according to the present embodiment. FIG. 2 is a cross-sectional view showing an example of a fixing mechanism according to the present embodiment. FIG. 3 is a view of FIG. 2 as viewed from below. FIG. 4 is a perspective view showing an example of a clamp member before deformation. FIG. 5 is a perspective view showing an example of the clamp member after deformation. FIG. 6 is a schematic diagram illustrating an example of a process of deforming the clamp member. FIG. 7 is a flowchart showing an example of a method for fixing the cable according to the present embodiment to the hole. FIG. 8 is a schematic diagram for explaining an example of a method for fixing the cable according to the present embodiment to the hole. FIG. 9 is a schematic diagram for explaining an example of a method for fixing the cable according to the present embodiment to the hole. FIG. 10 is a perspective view illustrating an example of a clamp member. FIG. 11 is a diagram illustrating an example of an inspection apparatus including the direct drive motor according to the present embodiment. FIG. 12 is a diagram illustrating an example of a machine tool including the direct drive motor according to the present embodiment. FIG. 13 is a diagram illustrating an example of a semiconductor manufacturing apparatus including the direct drive motor according to the present embodiment.

  Hereinafter, embodiments according to the present invention will be described with reference to the drawings, but the present invention is not limited thereto. The components of each embodiment described below can be combined as appropriate. Some components may not be used.

<First Embodiment>
A first embodiment will be described. FIG. 1 is a cross-sectional view showing an example of a direct drive motor 1 according to the present embodiment. The direct drive motor 1 directly transmits generated power to an object without using a speed reduction mechanism.

  As shown in FIG. 1, a direct drive motor 1 includes a motor unit 2 that generates power for rotating an object, a rotation detector 3 that detects rotation of the motor unit 2, a motor unit 2, and a rotation detector. 3, a cable 10 </ b> A connected to the motor unit 2, a cable 10 </ b> B connected to the rotation detector 3, and a control device 9 that controls the direct drive motor 1.

  The motor unit 2 includes a stator 21 and a rotor 22 that can rotate with respect to the stator 21. The rotor 22 rotates about the rotation axis AX.

  In the present embodiment, the direct drive motor 1 is an outer rotor type. The rotor 22 is disposed around the stator 21. The rotor 22 is disposed outside the stator 21 with respect to the rotation axis AX.

  The stator 21 has a stator core 21A and a coil 21B supported by the stator core 21A. The stator core 21A has a plurality of teeth arranged at equal intervals around the rotation axis AX. A plurality of coils 21B are provided. Coil 21B is supported by each of a plurality of teeth of stator core 21A.

  The rotor 22 includes a plurality of permanent magnets arranged at equal intervals around the rotation axis AX. The stator 21 and the rotor 22 are opposed to each other through a gap.

  The rotation detector 3 detects the rotation of the motor unit 2. The rotation detector 3 includes a resolver and detects at least one of the rotation speed, the rotation direction, and the rotation angle of the rotor 22 of the motor unit 2. In the present embodiment, the rotation detector 3 includes two types of resolvers, an absolute resolver and an incremental resolver.

  The housing 4 includes a first housing 41 and a second housing 42 disposed outside the first housing 41 with respect to the rotation axis AX. The first housing 41 is an annular member. The second housing 42 is an annular member. In the present embodiment, each of the first housing 41 and the second housing 42 is a cylindrical member. The central axis of the first housing 41, the central axis of the second housing 42, and the rotation axis AX coincide with each other.

  In the present embodiment, the first housing 41 includes two cylindrical members arranged in parallel with the rotation axis AX. The second housing 42 includes two cylindrical members arranged in parallel with the rotation axis AX. Note that the first housing 41 may be one cylindrical member, or may be three or more cylindrical members. The same applies to the second housing 42.

  The motor unit 2 including the stator 21 and the rotor 22 is disposed between the first housing 41 and the second housing 42. The stator 21 is connected to the first housing 41. The stator 21 is fixed to the outer surface of the first housing 41. The rotor 22 is connected to the second housing 42. The rotor 22 is fixed to the inner surface of the second housing 42.

  The bearing 5 is disposed between the first housing 41 and the second housing 42. The bearing 5 includes an inner ring 5A, an outer ring 5B, and a rolling element 5C disposed between the inner ring 5A and the outer ring 5B. The inner ring 5 </ b> A is connected to the first housing 41. The outer ring 5 </ b> B is connected to the second housing 42. The second housing 42 is supported by the bearing 5 so as to be rotatable about the rotation axis AX with respect to the first housing 41.

  In the present embodiment, the motor unit 2, the bearing 5, and the rotation detector 3 are arranged in a direction parallel to the rotation axis AX. Thereby, the increase in the dimension of the direct drive motor 1 regarding the radial direction with respect to the rotating shaft AX is suppressed, and the increase in the installation area (footprint) of the housing 4 is suppressed.

  When the rotor 22 rotates with respect to the stator 21, the second housing 42 rotates with respect to the first housing 41 around the rotation axis AX.

  In the following description, the first housing 41 is appropriately referred to as a housing inner 41, and the second housing 42 is appropriately referred to as a rotor flange 42.

  The direct drive motor 1 includes a first cover member 6 disposed at one end (lower end) of the housing 4 in a direction parallel to the rotation axis AX, and the other end (upper end) of the housing 4 in a direction parallel to the rotation axis AX. Part) and a second cover member 8 arranged in the part).

  The motor unit 2 is disposed between the housing 4 and the first cover member 6. The rotation detector 3 is disposed between the housing 4 and the second cover member 8. The first cover member 6 protects the motor unit 2. The second cover member 8 protects the rotation detector 3.

  Stator 21 is connected to cable 10A. Electric power is supplied to the coil 21B of the stator 21 via the cable 10A. When electric power is supplied to the coil 21B, the rotor 22 and the rotor flange 42 connected to the rotor 22 rotate according to Fleming's left-hand rule.

  The rotation detector 3 is connected to the cable 10B. The detection signal of the rotation detector 3 is output to the control device 9 via the cable 10B.

  In the following description, the cable 10A and the cable 10B are collectively referred to as the cable 10 as appropriate. The cable 10 is connected to the device of the direct drive motor 1 held in the housing 4. In the present embodiment, the device of the direct drive motor 1 includes at least one of the motor unit 2 and the rotation detector 3.

  A workpiece (not shown) is connected to the rotor flange 42. When the rotor flange 42 is rotated by the operation of the motor unit 2, the work is rotated together with the rotor flange 42. The rotor flange 42 functions as an output shaft that rotates about the rotation axis AX by the operation of the motor unit 2.

  The control device 9 adjusts the power supplied to the coil 21 </ b> B of the stator 21. The detection signal of the rotation detector 3 is output to the control device 9 via the cable 10 (10B). The control device 9 adjusts the power supplied to the coil 21 </ b> B based on the detection signal of the rotation detector 3. The power adjusted by the control device 9 is supplied to the coil 21B of the motor unit 2 through the cable 10 (10A). As a result, the workpiece connected to the rotor flange 42 can rotate at the target angle and is positioned at the target position.

  The housing 4 has a hole 11. The end of the hole 11 is provided on the outer surface of the housing 4. At least a part of the cable 10 is disposed in the hole 11. In the present embodiment, the end (lower end) of the hole 11 is provided on the outer surface (lower surface) 12 of the housing inner 41 of the housing 4.

  The hole 11 is provided in the housing 4 (housing inner 41) so as to connect the internal space of the housing 4 and the external space of the housing 4. In the internal space of the housing 4, the motor unit 2 and the rotation detector 3 are arranged. The internal space of the housing 4 includes a space between the housing 4 and the first cover member 6. The internal space of the housing 4 includes a space between the housing 4 and the second cover member 8. The motor unit 2 is disposed in a space between the housing 4 and the first cover member 6. The rotation detector 3 is disposed in a space between the housing 4 and the second cover member 8.

  A part of the cable 10 is disposed in the internal space of the housing 4. A part of the cable 10 is disposed in the external space of the housing 4. A part of the cable 10 protrudes outward from the lower surface 12 of the housing inner 41.

  The direct drive motor 1 includes a fixing mechanism 50 that fixes the cable 10. At least a part of the fixing mechanism 50 is disposed inside the hole 11.

  FIG. 2 is an enlarged view of the vicinity of the fixing mechanism 50 of FIG. FIG. 3 is a view of FIG. 2 viewed from the lower surface 12 side. As shown in FIGS. 1, 2, and 3, the fixing mechanism 50 includes a clamp member 51 that is fixed to the outer surface of the cable 10, and a support portion 52 that is disposed inside the hole 11 and supports the clamp member 51. Have

  As shown in FIG. 2, the cable 10 includes a lead wire 101 and a protection member 102 disposed around the lead wire 101. The lead wire 101 is a conductor and can transmit an electric signal and electric energy. Electric power is supplied to the coil 21B via the lead wire 101 of the cable 10A. A detection signal of the rotation detector 3 is output via the lead wire 101 of the cable 10B.

  The protection member 102 protects the lead wire 101. The protection member 102 is a tubular member and is disposed around the lead wire 101. The protection member 102 may be referred to as a protection tube 102. The protective member 102 is softer than the lead wire 101. In the present embodiment, the lead wire 101 is made of metal. The protection member 102 is made of a synthetic resin that is softer than the metal of the lead wire 101.

  The clamp member 51 is disposed around the cable 10. The clamp member 51 is a cylindrical (sleeve-shaped) member. The clamp member 51 can be plastically deformed. The clamp member 51 may be made of a synthetic resin or a soft light metal such as aluminum. The clamp member 51 can be bent by the action of an external force.

  The clamp member 51 is bent. The clamp member 51 includes an upper end (first end) 51A, a lower end (second end) 51B, and an intermediate portion 51C between the upper end 51A and the lower end 51B. The intermediate part 51C of the clamp member 51 is bent. With the clamp member 51 disposed around the cable 10, the intermediate portion 51 </ b> C is bent, so that at least a part of the clamp member 51 and the cable 10 come into contact with each other. Thereby, the clamp member 51 is fixed to the outer surface of the cable 10.

  In the present embodiment, the clamp member 51 is fixed to the outer surface of the protection member 102 of the cable 10. In a state where the clamp member 51 is disposed around the protective member 102, the intermediate portion 51C is bent, so that at least a part of the clamp member 51 and the protective member 102 come into contact with each other. Thereby, the clamp member 51 is fixed to the outer surface of the protection member 102.

  As described above, the protection member 102 is made of a synthetic resin and is soft. The clamp member 51 can bite into the protection member 102. In the present embodiment, the clamp member 51 is bent so as to bite into the protection member 102.

  In the present embodiment, the upper end portion 51A of the clamp member 51 is fixed to the first portion 102A on the outer surface of the protective member 102 of the cable 10, and the cable is different from the first portion 102A in the direction parallel to the central axis BX of the cable 10. The intermediate portion 51C of the clamp member 51 is bent so that the lower end portion 51B of the clamp member 51 is fixed to the second portion 102B on the outer surface of the ten protective members 102.

  That is, in the present embodiment, the upper end portion 51 </ b> A and the lower end portion 51 </ b> B of the clamp member 51 bite into the protection member 102. In the present embodiment, although the clamp member 51 bites into the protection member 102, the upper end portion 51 </ b> A is used to suppress damage to the protection member 102 and to suppress damage to the lead wire 101 disposed inside the protection member 102. The lower end 51B is chamfered (C chamfered). The upper end 51A and the lower end 51B may be rounded (R chamfered).

  The support part 52 supports the lower part of the clamp member 51. The support portion 52 is provided on the inner surface of the hole 11 at the lower end portion of the hole 11. The support portion 52 includes a protrusion that protrudes from the inner surface of the hole 11 toward the center of the hole 11. In the present embodiment, the support portion 52 is a cylindrical member surrounding the central axis of the hole 11.

  The support portion 52 supports the clamp member 51 so that the clamp member 51 does not protrude from the lower end portion of the hole 11 to the outside of the housing 4. In other words, the support portion 52 holds the clamp member 51 so that the clamp member 51 is not disposed below the lower surface 12 of the housing inner 41.

  In the present embodiment, the support portion 52 includes a protrusion that is provided on the inner surface of the hole 11 and can be plastically deformed. The support portion (projection portion) 52 is plastically deformed so as to support the lower portion of the clamp member 51 disposed inside the hole 11. The support portion 52 is disposed below the clamp member 51 by bending the support portion 52 and plastically deforming it.

  FIG. 4 is a perspective view showing an example of the clamp member 51 according to the present embodiment. FIG. 4 shows the clamp member 51 before deformation. As shown in FIG. 4, the clamp member 51 is a cylindrical member. Each of the upper end 51A and the lower end 51B of the clamp member 51 is chamfered.

  The inner diameter of the clamp member 51 is larger than the outer diameter of the cable 10 (protective member 102). The protection member 102 can be smoothly arranged inside the clamp member 51 before deformation. In a state where the protection member 102 is disposed inside the clamp member 51 before deformation, the protection member 102 and the clamp member 51 are relatively movable.

  FIG. 5 is a perspective view showing an example of the clamp member 51 according to the present embodiment. FIG. 5 shows the clamp member 51 after deformation. As shown in FIG. 5, the protection member 102 is deformed so that the intermediate portion 51C of the clamp member 51 is bent in a state where the protection member 102 is disposed inside the clamp member 51 before the deformation. The upper end portion 51A of the clamp member 51 is fixed to the first portion 102A on the outer surface of the 102, and the lower end portion 51B of the clamp member 51 is fixed to the second portion 102B on the outer surface of the protection member 102. The upper end portion 51 </ b> A of the clamp member 51 bites into the protection member 102. The lower end portion 51 </ b> B of the clamp member 51 bites into the protection member 102. When the clamp member 51 is bent, the clamp member 51 is fixed to the protection member 102, and the protection member 102 and the clamp member 51 cannot be moved relative to each other.

  FIG. 6 is a diagram illustrating an example of a process of deforming the clamp member 51 using the tool 14. The tool 14 can bend the clamp member 51. The bending process of the clamp member 51 includes a caulking process. The tool 14 may be referred to as a caulking tool 14. The clamp member 51 is bent and deformed by the tool 14.

  The clamp member 51 is a cylindrical member. As described with reference to FIG. 4, the protection member 102 can be smoothly arranged inside the clamp member 51 before deformation. In a state where the protection member 102 is disposed inside the clamp member 51 before deformation, the protection member 102 and the clamp member 51 are relatively movable. In the caulking process of the clamp member 51, the clamp member 51 before deformation is disposed around the protective member 102.

  The tool 14 is a cylindrical member. The tool 14 is arranged around the clamp member 51 in a state where the clamp member 51 before deformation is arranged around the protection member 102. By inserting the protective member 102 and the undeformed clamp member 51 inside the tool 14, the tool 14 is disposed around the clamp member 51.

  With the clamp member 51 disposed around the protection member 102, the clamp member 51 is disposed between the tool 14 and the clamp screw member 15. When an external force acts on the clamp member 51 via the tool 14, the clamp member 51 is bent and fixed to the protection member 102.

  The tool 14 is made of a material that is harder and higher in strength than the clamp member 51. The inner surface of the tool 14 that comes into contact with the clamp member 51 includes a slope, and the inner diameter of the tool 14 is a tapered shape that gradually decreases. Thereby, the tool 14 can deform | transform the clamp member 51 into an expected shape. Further, a cross-shaped or single-shaped groove is provided on the inner surface of the tool 14. Thereby, the tool 14 can screw the clamp member 51 smoothly.

  Next, an example of a method for fixing the cable 10 to the hole 11 will be described with reference to the flowchart of FIG. 7 and schematic diagrams of FIGS.

  The clamp member 51 is fixed to the protection member 102 of the cable 10 (step S1). As described with reference to FIGS. 5 and 6, the bending of the clamp member 51 is performed in a state where the clamp member 51 is disposed around the protection member 102, so that the protection member 102 of the cable 10. The clamp member 51 is fixed to the head.

  Next, as shown in FIG. 8, the cable 10 and the clamp member 51 are disposed in the hole 11 (step S2). That is, the cable 10 to which the clamp member 51 is fixed is inserted into the hole 11. The cable 10 and the clamp member 51 may be press-fitted into the hole 11. A gap may be provided between the cable 10 and the clamp member 51 and the hole 11.

  In the process of arranging the cable 10 and the clamp member 51 in the hole 11, the support portion 52 has not been deformed yet. Before the support portion 52 is deformed, the inner diameter of the hole 11 is larger than the outer diameter of the clamp member 51. Therefore, the cable 10 and the clamp member 51 can be disposed inside the hole 11.

  As shown in FIG. 8, the hole 11 has a surface 16 that can come into contact with the clamp member 51. The surface 16 faces downward. When the surface 16 and the clamp member 51 come into contact with each other, the clamp member 51 and the protective member 102 fixed to the clamp member 51 are positioned.

  After the cable 10 and the clamp member 51 are arranged in the hole 11, the support portion 52 is bent as shown in FIG. 9 (step S3). In the present embodiment, the caulking process of the support portion 52 is performed by the caulking tool. The caulking process of the support portion 52 is performed so that the tip end portion (lower end portion) of the support portion 52 faces the inside of the hole 11 and the inner surface of the support portion 52 faces upward. Thereby, the support part 52 is deformed (plastically deformed). The clamp member 51 is fixed by the support portion 52. The cable 10 is fixed to the hole 11 by the above processing.

  As described above, according to the present embodiment, since the fixing mechanism 50 is provided inside the hole 11 of the housing 4 in which the cable 10 is disposed, the fixing mechanism 50 is removed from the lower surface 12 of the housing 4 (housing inner 41). Protruding is suppressed. Therefore, an increase in the area occupied by the direct drive motor 1 is suppressed. In particular, an increase in the size of the direct drive motor 1 in the direction parallel to the rotation axis AX is suppressed.

  In many cases, the lower surface 12 of the direct drive motor 1 is supported by a support surface of a structure. That is, the lower surface 12 often functions as an attachment surface that is attached to the support surface of the structure. When the fixing member for fixing the cable 10 protrudes from the lower surface 12, it is necessary to provide a space for arranging the fixing member in the structure, which complicates complicated processing on the structure. According to the present embodiment, since the fixing mechanism 50 is suppressed from protruding from the lower surface 12, the processing performed on the structure can be performed with a minimum amount of processing.

  Further, according to the present embodiment, the fixing mechanism 50 includes the clamp member 51 that is fixed to the outer surface of the cable 10, and the clamp member 51 that is disposed inside the hole 11 and that protrudes from the lower end portion of the hole 11 to the outside of the housing 4. And a support portion 52 that supports the clamp member 51 so as not to exist.

  Accordingly, the fixing mechanism 50 can sufficiently fix the cable 11 while being prevented from protruding from the lower surface 12 of the housing 4. The clamp member 51 and the cable 10 can be implemented by simple processing using the tool 14.

  Further, according to the present embodiment, the clamp member 51 includes the upper end portion 51A, the lower end portion 51B, and the intermediate portion 51C. The upper end portion 51A is fixed to the first portion 102A on the outer surface of the cable 10, and the cable The intermediate portion 51C is bent so that the lower end portion 51B is fixed to the second portion 102B on the outer surface of the tenth surface.

  Thereby, the cable 10 and the clamp member 10 are fully fixed by the upper end part 51A and the lower end part 51B.

  Further, according to the present embodiment, the cable 10 includes the lead wire 101 and the protective member 102 that is disposed around the lead wire 101 and is softer than the lead wire 101, and the clamp member 51 bites into the protective member 102. It is deformed as follows.

  Thereby, the cable 10 and the clamp member 51 are sufficiently fixed while damage to the lead wire 101 is suppressed.

  In addition, according to the present embodiment, the support portion 52 includes a protruding portion that is provided on the inner surface of the hole 11 and can be plastically deformed, and the supporting portion (protruding portion) 52 is disposed inside the hole 11. It is deformed so as to support the lower part.

  As a result, the clamp member 51 projecting outward from the outer surface of the cable 10 is supported by the support portion 52, and the clamp member 51 is sufficiently suppressed from coming out of the hole 11.

  FIG. 10 is a modified example of the clamp member 51. As shown in FIG. 10, the slit portion 13 may be provided on the outer surface of the clamp member 51. The slit portion 13 is provided in parallel with the central axis of the clamp member 51. A plurality of slit portions 13 are provided around the central axis of the clamp member 51. By providing the slit portion 13, the clamp member 51 is easily deformed and is sufficiently fixed to the protection member 102. The slit portion 13 may be referred to as a slit portion 13.

Second Embodiment
A second embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 11 is a diagram illustrating an example of an inspection apparatus 300 including the direct drive motor 1 described in the above embodiment. The inspection apparatus 300 includes a transport apparatus 200 that conveys an object W1 to be inspected, and an inspection unit 301 that inspects the object W1. The transport apparatus 200 includes a direct drive motor 1 and a transport unit 201 that transports the object W1 by the operation of the direct drive motor 1. The lower surface 12 of the direct drive motor 1 is connected to the base member 302 of the inspection apparatus 300.

  The conveyance unit 201 includes a table connected to the rotor flange 42 of the direct drive motor 1. The table 201 supports the object W1 to be inspected. The table 201 is rotated by the operation of the direct drive motor 1. As the table 201 rotates, the object W1 supported by the table 201 moves.

  The inspection unit 301 inspects the object W <b> 1 that moves due to the operation of the direct drive motor 1. In the present embodiment, the inspection unit 301 includes a camera that acquires an image of the object W1 supported by the table 201. Based on the image of the object W1 captured by the camera 301, the inspection of the object W1 is performed.

  The transport apparatus 200 moves the object W1 to the field of view of the camera 301. The camera 301 acquires an image of the object W1 arranged in the visual field area by the transport device 200.

  According to the present embodiment, the transport apparatus 200 can move the object W1 to the visual field region of the camera 301 with high positioning accuracy. Therefore, a decrease in inspection accuracy of the inspection apparatus 300 is suppressed. Further, the inspection apparatus 300 can be reduced in size. Further, since the fixing mechanism 50 does not protrude from the lower surface 12, it is not necessary to perform complicated processing on the base member 302 that supports the lower surface 12.

<Third Embodiment>
A third embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 12 is a diagram illustrating an example of a machine tool 400 including the direct drive motor 1 described in the above embodiment. The machine tool 400 includes a transport device 200 that transports an object W2 to be processed, and a processing unit 401 that processes the object W2. The transport apparatus 200 includes a direct drive motor 1 and a transport unit (table) 201 that transports the object W2 by the operation of the direct drive motor 1. The lower surface 12 of the direct drive motor 1 is connected to the base member 402 of the machine tool 400.

  The table 201 is connected to the rotor flange 42 of the direct drive motor 1. The object W2 is supported by the table 201. The table 201 is rotated by the operation of the direct drive motor 1. As the table 201 rotates, the object W2 supported by the table 201 moves.

  The processing unit 401 processes the moving object W2 by the operation of the direct drive motor 1. In the present embodiment, the processing unit 401 includes a robot arm that mounts the component B on the object W <b> 2 supported by the table 201.

  The transport apparatus 200 moves the object W <b> 2 to the movable range of the robot arm 401. The robot arm 401 mounts the component B on the object W2 arranged in the movable range by the transfer device 200.

  According to this embodiment, the transport apparatus 200 can move the object W <b> 2 to the movable range of the robot arm 401 with high positioning accuracy. Therefore, a decrease in the processing accuracy of the machine tool 400 is suppressed. Further, the machine tool 400 can be reduced in size. Further, it is not necessary to perform complicated processing on the base member 402 that supports the lower surface 12.

<Fourth embodiment>
A fourth embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 13 is a diagram illustrating an example of a semiconductor manufacturing apparatus 500 including the direct drive motor 1 described in the above embodiment. The semiconductor manufacturing apparatus 500 includes a transport apparatus 200 that transports an object W3 to be processed, and a processing unit 501 that processes the object W3. The transport apparatus 200 includes a direct drive motor 1 and a transport unit (table) 201 that transports the object W3. The lower surface 12 of the direct drive motor 1 is connected to the base member 502 of the semiconductor manufacturing apparatus 500.

  The semiconductor manufacturing apparatus 500 is a semiconductor device manufacturing apparatus capable of manufacturing semiconductor devices. The semiconductor manufacturing apparatus 500 is used in at least a part of a semiconductor device manufacturing process. The object W3 is an object for manufacturing a semiconductor device.

  In the present embodiment, the object W3 is a substrate for manufacturing a semiconductor device. A semiconductor device is manufactured from the object W3. The object W3 may include a semiconductor wafer or a glass plate. A semiconductor device is manufactured by forming a device pattern (wiring pattern) on the object W3.

  The semiconductor manufacturing apparatus 500 performs a process for forming a device pattern on the object W <b> 3 arranged at the processing position by the transport apparatus 200 using the processing unit 501.

  For example, when the semiconductor manufacturing apparatus 500 includes an exposure apparatus that projects an image of a device pattern onto the object W3 via the projection optical system, the processing unit 501 includes the projection optical system, and the processing position is from the projection optical system 501. It includes the irradiation position of the emitted exposure light.

  According to the present embodiment, the transport apparatus 200 can move the object W3 to the processing position of the processing unit 501 with high positioning accuracy. Therefore, a reduction in processing accuracy of the semiconductor manufacturing apparatus 500 is suppressed. Further, the semiconductor manufacturing apparatus 500 can be reduced in size. Further, it is not necessary to perform complicated processing on the base member 502 that supports the lower surface 12.

  In each of the above-described embodiments, the clamp member 51 is a cylindrical member. A plurality of clamp members 51 may be arranged around the cable 10. By deforming the plurality of clamp members 51, the clamp members 51 and the cable 10 are fixed.

  In each of the above-described embodiments, the support portion 52 protrudes from the inner surface of the hole 11 and is deformed to support the lower portion of the clamp member 51. The support portion 52 is a member different from the housing 4 and may be inserted into the hole 11 and fixed to the inner surface of the hole 11 to support the lower portion of the clamp member 51.

  In each of the embodiments described above, the cable 10 has the protection member 102. The cable 10 may not have the protection member 102. The clamp member 51 may be fixed to the lead wire 101.

  In each of the above-described embodiments, the direct drive motor 1 is an outer rotor type. The direct drive motor 1 may be an inner rotor type.

DESCRIPTION OF SYMBOLS 1 Direct drive motor 2 Motor part 3 Rotation detector 4 Housing 5 Bearing 5A Inner ring 5B Outer ring 5C Rolling element 6 First cover member 8 Second cover member 9 Controller 10 Cable 11 Hole 12 Lower surface (outer surface)
13 Slit 14 Tool 21 Stator 21A Stator Core 21B Coil 22 Rotor 41 First Housing (Housing Inner)
42 Second housing (rotor flange)
50 fixing mechanism 51 clamp member 51A upper end 51B lower end 51C intermediate 52 support part 101 lead wire 102 protective member (protective tube)
200 Conveying device 300 Inspection device 301 Inspection unit 400 Machine tool 401 Processing unit 500 Semiconductor manufacturing device 501 Processing unit AX Rotating shaft

Claims (10)

A motor unit having a stator and a rotor rotatable with respect to the stator;
A rotation detector for detecting rotation of the motor unit;
A housing for holding the motor unit and the rotation detector;
A cable at least partially disposed in a hole provided in the outer surface of the housing;
A fixing mechanism disposed inside the hole and fixing the cable;
Direct drive motor with The fixing mechanism is
A clamp member fixed to the outer surface of the cable;
A support portion that is disposed inside the hole and supports the clamp member so that the clamp member does not protrude from the end of the hole to the outside of the housing;
The direct drive motor according to claim 1, comprising: The clamp member includes a first end, a second end, and an intermediate portion between the first end and the second end,
The first end is fixed to a first part of the outer surface of the cable, and the second end is located at a second part of the outer surface of the cable different from the first part with respect to a direction parallel to the central axis of the cable. The direct drive motor according to claim 2, wherein the intermediate portion of the clamp member is bent so as to be fixed. The cable includes a lead wire, and a protective member disposed around the lead wire and softer than the lead wire,
The direct drive motor according to claim 2, wherein the clamp member is bent so as to bite into the protection member. The support portion includes a protrusion that is provided on the inner surface of the hole and is plastically deformable,
The direct drive motor according to any one of claims 2 to 4, wherein the protrusion is deformed so as to support a lower portion of the clamp member disposed inside the hole. The clamp member is a tubular member,
The direct drive motor according to claim 2, further comprising a slit portion provided on an outer surface of the clamp member and parallel to a central axis of the clamp member. The direct drive motor according to any one of claims 1 to 6,
A transport unit for transporting an object by operation of the direct drive motor;
A transport apparatus comprising: The direct drive motor according to any one of claims 1 to 6,
An inspection unit for inspecting an object moving by the operation of the direct drive motor;
An inspection apparatus comprising: The direct drive motor according to any one of claims 1 to 6,
A machining section for machining an object that moves by the operation of the direct drive motor;
Machine tool equipped with. The direct drive motor according to any one of claims 1 to 6,
A processing unit for processing an object moving by the operation of the direct drive motor;
A semiconductor manufacturing apparatus comprising:

Images