JP2015525830A - 高出力インパルスコーティング方法 - Google Patents
高出力インパルスコーティング方法 Download PDFInfo
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- JP2015525830A JP2015525830A JP2015520843A JP2015520843A JP2015525830A JP 2015525830 A JP2015525830 A JP 2015525830A JP 2015520843 A JP2015520843 A JP 2015520843A JP 2015520843 A JP2015520843 A JP 2015520843A JP 2015525830 A JP2015525830 A JP 2015525830A
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- 238000000576 coating method Methods 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 claims abstract description 35
- 239000011248 coating agent Substances 0.000 claims abstract description 34
- 230000007704 transition Effects 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 9
- 239000007789 gas Substances 0.000 abstract description 32
- 239000012495 reaction gas Substances 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 44
- 229910052757 nitrogen Inorganic materials 0.000 description 22
- 239000000463 material Substances 0.000 description 13
- 238000004544 sputter deposition Methods 0.000 description 13
- 239000013078 crystal Substances 0.000 description 9
- 231100000572 poisoning Toxicity 0.000 description 7
- 230000000607 poisoning effect Effects 0.000 description 7
- 239000013077 target material Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000002052 molecular layer Substances 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000000541 cathodic arc deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000004663 powder metallurgy Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3485—Sputtering using pulsed power to the target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3435—Applying energy to the substrate during sputtering
- C23C14/345—Applying energy to the substrate during sputtering using substrate bias
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3464—Operating strategies
- H01J37/3467—Pulsed operation, e.g. HIPIMS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating By Spraying Or Casting (AREA)
- Measuring Fluid Pressure (AREA)
- Plasma Technology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Spray Control Apparatus (AREA)
Abstract
Description
a)コーティング室に反応性ガスが取り込まれ、相応の反応性ガス流が測定されると同時に、プラズマを点火することなく、コーティング室内で生じている分圧が測定され、
b)コーティング室に反応性ガスが取り込まれ、相応の反応性ガス流が測定されると同時に、コーティング室内で生じている分圧が測定され、その際にはプラズマが点火される、そのような方法において、
−ステップa)およびb)が複数の異なる反応性ガス流で実施され、そのようにして反応性ガス流・分圧依存性をプラズマがあるときでもプラズマがないときでも判定することができ、
−所与の分圧で、プラズマがないときに判定された反応性ガス流値が、プラズマがあるときに判定された反応性ガス流値から差し引かれ、その差異が反応性ガス消費量と同一視されることを特徴とする。
Claims (3)
- プラズマによるコーティングプロセスで反応性ガス消費量を判定する方法であって、次の各ステップを有しており、すなわち、
a)コーティング室に反応性ガスが取り込まれ、相応の反応性ガス流が測定されると同時に、プラズマを点火することなく、コーティング室内で生じている分圧が測定され、
b)コーティング室に反応性ガスが取り込まれ、相応の反応性ガス流が測定されると同時に、コーティング室内で生じている分圧が測定され、その際にはプラズマが点火される、そのような方法において、
前記ステップa)およびb)が複数の異なる反応性ガス流で実施され、そのようにして反応性ガス流・分圧依存性をプラズマがあるときでもプラズマがないときでも判定することができ、
所与の分圧で、プラズマがないときに判定された反応性ガス流値が、プラズマがあるときに判定された反応性ガス流値から差し引かれ、その差異が反応性ガス消費量と同一視されることを特徴とする方法。 - 反応性のプラズマ支援式のHiPIMSスパッタプロセスによって基板をコーティングする方法において、まず反応性ガス消費量が1つまたは複数のコーティングパラメータに依存して判定され、コーティングのために、遷移モードでコーティングが実施されるように、コーティングパラメータが選択されることを特徴とする方法。
- 反応性ガス消費量を判定するために請求項1に記載の方法が適用されることを特徴とする、請求項2に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102012013577.7 | 2012-07-10 | ||
DE201210013577 DE102012013577A1 (de) | 2012-07-10 | 2012-07-10 | Hochleistungsimpulsbeschichtungsmethode |
PCT/EP2013/001914 WO2014008989A1 (de) | 2012-07-10 | 2013-06-29 | Hochleistungsimpulsbeschichtungsverfahren |
Related Child Applications (1)
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JP2019001339A Division JP2019090113A (ja) | 2012-07-10 | 2019-01-08 | 高出力インパルスコーティング方法 |
Publications (2)
Publication Number | Publication Date |
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JP2015525830A true JP2015525830A (ja) | 2015-09-07 |
JP6669496B2 JP6669496B2 (ja) | 2020-03-18 |
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JP2015520840A Active JP6271533B2 (ja) | 2012-07-10 | 2013-06-24 | 高出力インパルスコーティング方法 |
JP2015520843A Active JP6669496B2 (ja) | 2012-07-10 | 2013-06-29 | 高出力インパルスコーティング方法 |
JP2019001339A Withdrawn JP2019090113A (ja) | 2012-07-10 | 2019-01-08 | 高出力インパルスコーティング方法 |
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JP2015520840A Active JP6271533B2 (ja) | 2012-07-10 | 2013-06-24 | 高出力インパルスコーティング方法 |
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Country Status (16)
Country | Link |
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US (2) | US10060026B2 (ja) |
EP (2) | EP2872665B1 (ja) |
JP (3) | JP6271533B2 (ja) |
KR (3) | KR20150030729A (ja) |
CN (2) | CN104428442B (ja) |
AR (1) | AR091708A1 (ja) |
BR (2) | BR112015000253B1 (ja) |
CA (2) | CA2878324C (ja) |
DE (1) | DE102012013577A1 (ja) |
IN (1) | IN2015DN00119A (ja) |
MX (2) | MX2015000441A (ja) |
MY (2) | MY171167A (ja) |
PH (2) | PH12015500056B1 (ja) |
RU (2) | RU2015104267A (ja) |
SG (2) | SG11201500131PA (ja) |
WO (2) | WO2014008984A1 (ja) |
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US20180334739A1 (en) * | 2015-11-10 | 2018-11-22 | Sandvik Intellectual Property Ab | Method for pre-treating a surface for coating |
US11008650B2 (en) * | 2016-11-03 | 2021-05-18 | Starfire Industries Llc | Compact system for coupling RF power directly into RF linacs |
US11021788B2 (en) | 2017-12-05 | 2021-06-01 | Panasonic Intellectual Property Management Co., Ltd. | Sputtering method |
CN110184571A (zh) * | 2019-05-07 | 2019-08-30 | 天津君盛天成科技发展有限公司 | 高功率脉冲涂装方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050115502A1 (en) * | 2003-10-08 | 2005-06-02 | Mark George | System and method for feedforward control in thin film coating processes |
JP2006509102A (ja) * | 2002-12-04 | 2006-03-16 | ライボルト オプティクス ゲゼルシャフト ミット ベシュレンクテル ハフツング | 多層膜を製造する方法および前記方法を実施するための装置 |
JP2011506759A (ja) * | 2007-12-07 | 2011-03-03 | オーツェー・エリコン・バルザース・アーゲー | Hipimsによる反応性スパッタリング |
Family Cites Families (12)
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JP2000353343A (ja) * | 1999-06-11 | 2000-12-19 | Matsushita Electric Ind Co Ltd | 光記録媒体と光記録媒体の製造方法および製造装置 |
DE10039478A1 (de) | 2000-08-08 | 2002-02-28 | Cemecon Ceramic Metal Coatings | Zerstäubungs-Bauteil |
DE102006017382A1 (de) * | 2005-11-14 | 2007-05-16 | Itg Induktionsanlagen Gmbh | Verfahren und Vorrichtung zum Beschichten und/oder zur Behandlung von Oberflächen |
WO2007121954A1 (de) * | 2006-04-21 | 2007-11-01 | Cemecon Ag | Beschichteter körper |
DE102006061324B4 (de) * | 2006-06-20 | 2008-07-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Regelung eines reaktiven Hochleistungs-Puls-Magnetronsputterprozesses und Vorrichtung hierzu |
SE533395C2 (sv) * | 2007-06-08 | 2010-09-14 | Sandvik Intellectual Property | Sätt att göra PVD-beläggningar |
US7966909B2 (en) * | 2007-07-25 | 2011-06-28 | The Gillette Company | Process of forming a razor blade |
WO2009132822A2 (de) | 2008-04-28 | 2009-11-05 | Cemecon Ag | Vorrichtung und verfahren zum vorbehandeln und beschichten von körpern |
DE102008021912C5 (de) * | 2008-05-01 | 2018-01-11 | Cemecon Ag | Beschichtungsverfahren |
US8202820B2 (en) * | 2008-08-26 | 2012-06-19 | Northwestern University | Non-stoichiometric mixed-phase titania photocatalyst |
EP2366488A1 (de) | 2010-03-19 | 2011-09-21 | Siemens Aktiengesellschaft | Verfahren zum Wiederaufarbeiten einer Turbinenschaufel mit wenigstens einer Plattform |
DE102010028558A1 (de) | 2010-05-04 | 2011-11-10 | Walter Ag | PVD-Hybridverfahren zum Abscheiden von Mischkristallschichten |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006509102A (ja) * | 2002-12-04 | 2006-03-16 | ライボルト オプティクス ゲゼルシャフト ミット ベシュレンクテル ハフツング | 多層膜を製造する方法および前記方法を実施するための装置 |
US20050115502A1 (en) * | 2003-10-08 | 2005-06-02 | Mark George | System and method for feedforward control in thin film coating processes |
JP2011506759A (ja) * | 2007-12-07 | 2011-03-03 | オーツェー・エリコン・バルザース・アーゲー | Hipimsによる反応性スパッタリング |
Non-Patent Citations (2)
Title |
---|
W.D.SPROUL, 47TH SVC ANNUAL TECHNICAL CONFERENCE PROCEEDINGS, JPN5009008345, 24 April 2004 (2004-04-24), pages 96 - 100, ISSN: 0003552855 * |
W.D.SPROUL: "Control of reactive sputtering processes", THIN SOLD FILMS, vol. 491, JPN6017015962, 2005, pages 1 - 17, XP005082937, ISSN: 0003552854, DOI: 10.1016/j.tsf.2005.05.022 * |
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