JP2015524156A - 基板上に材料を堆積させる材料堆積システムおよび方法 - Google Patents

基板上に材料を堆積させる材料堆積システムおよび方法 Download PDF

Info

Publication number
JP2015524156A
JP2015524156A JP2015507098A JP2015507098A JP2015524156A JP 2015524156 A JP2015524156 A JP 2015524156A JP 2015507098 A JP2015507098 A JP 2015507098A JP 2015507098 A JP2015507098 A JP 2015507098A JP 2015524156 A JP2015524156 A JP 2015524156A
Authority
JP
Japan
Prior art keywords
needle
deposition
orifice
air
desired volume
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2015507098A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015524156A5 (https=
Inventor
シー．クラウチ ケネス
シー．クラウチ ケネス
ダブリュ．トレイシー ロバート
ダブリュ．トレイシー ロバート
ジェイ．カーリンスキ トーマス
ジェイ．カーリンスキ トーマス
エー．レイド スコット
エー．レイド スコット
Original Assignee
イリノイ トゥール ワークス インコーポレイティド
イリノイ トゥール ワークス インコーポレイティド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by イリノイ トゥール ワークス インコーポレイティド, イリノイ トゥール ワークス インコーポレイティド filed Critical イリノイ トゥール ワークス インコーポレイティド
Publication of JP2015524156A publication Critical patent/JP2015524156A/ja
Publication of JP2015524156A5 publication Critical patent/JP2015524156A5/ja
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517—Cleaning of print head nozzles
    • B41J2/16552—Cleaning of print head nozzles using cleaning fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
    • B05B15/555—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids discharged by cleaning nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0091—Apparatus for coating printed circuits using liquid non-metallic coating compositions
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1216—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing
    • H05K3/1225—Screens or stencils; Holders therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517—Cleaning of print head nozzles
    • B41J2/16552—Cleaning of print head nozzles using cleaning fluids
    • B41J2002/16555—Air or gas for cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/02—Air-assisted ejection
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01—Tools for processing; Objects used during processing
    • H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
    • H05K2203/0126—Dispenser, e.g. for solder paste, for supplying conductive paste for screen printing or for filling holes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01—Tools for processing; Objects used during processing
    • H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
    • H05K2203/013—Inkjet printing, e.g. for printing insulating material or resist
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/08—Treatments involving gases
    • H05K2203/081—Blowing of gas, e.g. for cooling or for providing heat during solder reflowing
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3465—Application of solder
    • H05K3/3485—Application of solder paste, slurry or powder

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2015507098A 2012-04-17 2013-04-16 基板上に材料を堆積させる材料堆積システムおよび方法 Withdrawn JP2015524156A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/448,724 US9089863B2 (en) 2012-04-17 2012-04-17 Method for cleaning a nozzle of a material deposition system
US13/448,724 2012-04-17
PCT/US2013/036695 WO2013158588A2 (en) 2012-04-17 2013-04-16 Material deposition system and method for depositing materials on a substrate

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018047028A Division JP6538913B2 (ja) 2012-04-17 2018-03-14 基板上に材料を堆積させる材料堆積システムおよび方法

Publications (2)

Publication Number Publication Date
JP2015524156A true JP2015524156A (ja) 2015-08-20
JP2015524156A5 JP2015524156A5 (https=) 2016-06-16

Family

ID=48485428

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2015507098A Withdrawn JP2015524156A (ja) 2012-04-17 2013-04-16 基板上に材料を堆積させる材料堆積システムおよび方法
JP2018047028A Active JP6538913B2 (ja) 2012-04-17 2018-03-14 基板上に材料を堆積させる材料堆積システムおよび方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2018047028A Active JP6538913B2 (ja) 2012-04-17 2018-03-14 基板上に材料を堆積させる材料堆積システムおよび方法

Country Status (10)

Country Link
US (1) US9089863B2 (https=)
EP (1) EP2838730B1 (https=)
JP (2) JP2015524156A (https=)
KR (1) KR101977434B1 (https=)
IN (1) IN2014DN08515A (https=)
MY (1) MY195025A (https=)
PH (1) PH12014502276A1 (https=)
SG (1) SG11201406535UA (https=)
TW (1) TWI606764B (https=)
WO (1) WO2013158588A2 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025078080A (ja) * 2023-11-07 2025-05-19 イリノイ トゥール ワークス インコーポレイティド 材料容器内の静的体積を測定するためのシステム及び測定する方法
JP2025102903A (ja) * 2019-04-09 2025-07-08 アルケミー・テクノロジー・リミテッド 流体用インクジェット印刷ヘッド
US12613122B2 (en) 2023-11-07 2026-04-28 Illinois Tool Works Inc. System and method for measuring static volume in a material container

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10029415B2 (en) * 2012-08-16 2018-07-24 Stratasys, Inc. Print head nozzle for use with additive manufacturing system
US9636868B2 (en) 2012-08-16 2017-05-02 Stratasys, Inc. Additive manufacturing system with extended printing volume, and methods of use thereof
US11020899B2 (en) 2012-08-16 2021-06-01 Stratasys, Inc. Additive manufacturing system with extended printing volume, and methods of use thereof
US9327350B2 (en) 2012-08-16 2016-05-03 Stratasys, Inc. Additive manufacturing technique for printing three-dimensional parts with printed receiving surfaces
US9475078B2 (en) 2012-10-29 2016-10-25 Illinois Tool Works Inc. Automated multiple head cleaner for a dispensing system and related method
US11266344B2 (en) 2016-09-21 2022-03-08 Samsung Electronics Co., Ltd. Method for measuring skin condition and electronic device therefor
JP6849909B2 (ja) * 2017-02-07 2021-03-31 富士通株式会社 はんだ付け方法、はんだ付け装置、及び噴流ノズルのはんだ濡れの保持方法
USD888115S1 (en) 2017-03-16 2020-06-23 Stratasys, Inc. Nozzle
US11247387B2 (en) 2018-08-30 2022-02-15 Stratasys, Inc. Additive manufacturing system with platen having vacuum and air bearing
CN111014089B (zh) * 2018-10-09 2024-05-31 深圳市腾盛精密装备股份有限公司 针头的清洁装置和点胶设备
US20210301943A1 (en) * 2020-03-27 2021-09-30 Illinois Tool Works Inc. Dispensing unit having fixed flexible diaphragm seal
US11246249B2 (en) 2020-04-15 2022-02-08 Illinois Tool Works Inc. Tilt and rotate dispenser having strain wave gear system
US11904337B2 (en) 2021-08-03 2024-02-20 Illinois Tool Works Inc. Tilt and rotate dispenser having material flow rate control
US11805634B2 (en) * 2021-08-03 2023-10-31 Illinois Tool Works Inc. Tilt and rotate dispenser having motion control

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07155666A (ja) * 1993-11-30 1995-06-20 Three Bond Co Ltd ノズル硬化防止装置
JP2004066165A (ja) * 2002-08-08 2004-03-04 Dainippon Printing Co Ltd 塗工ヘッドのクリーニング装置及びクリーニング方法
US20070195144A1 (en) * 2004-03-19 2007-08-23 Mcnestry Martin Liquid Supply System
JP2010088965A (ja) * 2008-10-03 2010-04-22 Riso Kagaku Corp 液剤吐出装置
JP2010104863A (ja) * 2008-10-28 2010-05-13 Seiko Epson Corp 液滴吐出装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4106032A (en) 1974-09-26 1978-08-08 Matsushita Electric Industrial Co., Limited Apparatus for applying liquid droplets to a surface by using a high speed laminar air flow to accelerate the same
US4598303A (en) 1984-11-28 1986-07-01 Tektronix, Inc. Method and apparatus for operating an ink jet head of an ink jet printer
US4613875A (en) 1985-04-08 1986-09-23 Tektronix, Inc. Air assisted ink jet head with projecting internal ink drop-forming orifice outlet
US4728969A (en) 1986-07-11 1988-03-01 Tektronix, Inc. Air assisted ink jet head with single compartment ink chamber
US5819983A (en) 1995-11-22 1998-10-13 Camelot Sysems, Inc. Liquid dispensing system with sealing augering screw and method for dispensing
US6514569B1 (en) 2000-01-14 2003-02-04 Kenneth Crouch Variable volume positive displacement dispensing system and method
US7294309B1 (en) 2003-05-15 2007-11-13 Takeda San Diego, Inc. Small volume liquid handling apparatus and method
US7569406B2 (en) 2006-01-09 2009-08-04 Cree, Inc. Method for coating semiconductor device using droplet deposition
US7980197B2 (en) 2006-11-03 2011-07-19 Illinois Tool Works, Inc. Method and apparatus for dispensing a viscous material on a substrate
TWI332440B (en) 2007-11-01 2010-11-01 Ind Tech Res Inst A dropplet ejection device for a highly viscous fluid
KR101665051B1 (ko) * 2009-12-17 2016-10-12 주식회사 탑 엔지니어링 액정 무게 측정 어셈블리 및 이를 포함한 액정 디스펜서
US8714716B2 (en) 2010-08-25 2014-05-06 Illinois Tool Works Inc. Pulsed air-actuated micro-droplet on demand ink jet

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07155666A (ja) * 1993-11-30 1995-06-20 Three Bond Co Ltd ノズル硬化防止装置
JP2004066165A (ja) * 2002-08-08 2004-03-04 Dainippon Printing Co Ltd 塗工ヘッドのクリーニング装置及びクリーニング方法
US20070195144A1 (en) * 2004-03-19 2007-08-23 Mcnestry Martin Liquid Supply System
JP2010088965A (ja) * 2008-10-03 2010-04-22 Riso Kagaku Corp 液剤吐出装置
JP2010104863A (ja) * 2008-10-28 2010-05-13 Seiko Epson Corp 液滴吐出装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025102903A (ja) * 2019-04-09 2025-07-08 アルケミー・テクノロジー・リミテッド 流体用インクジェット印刷ヘッド
JP2025078080A (ja) * 2023-11-07 2025-05-19 イリノイ トゥール ワークス インコーポレイティド 材料容器内の静的体積を測定するためのシステム及び測定する方法
US12613122B2 (en) 2023-11-07 2026-04-28 Illinois Tool Works Inc. System and method for measuring static volume in a material container

Also Published As

Publication number Publication date
JP2018110266A (ja) 2018-07-12
TW201345349A (zh) 2013-11-01
MY195025A (en) 2023-01-03
TWI606764B (zh) 2017-11-21
PH12014502276B1 (en) 2014-12-10
CN104395085A (zh) 2015-03-04
US20130269731A1 (en) 2013-10-17
PH12014502276A1 (en) 2014-12-10
WO2013158588A3 (en) 2013-12-12
WO2013158588A2 (en) 2013-10-24
SG11201406535UA (en) 2014-11-27
EP2838730A2 (en) 2015-02-25
US9089863B2 (en) 2015-07-28
IN2014DN08515A (https=) 2015-05-15
EP2838730B1 (en) 2020-01-22
KR101977434B1 (ko) 2019-05-10
JP6538913B2 (ja) 2019-07-03
KR20150010744A (ko) 2015-01-28

Similar Documents

Publication Publication Date Title
JP6538913B2 (ja) 基板上に材料を堆積させる材料堆積システムおよび方法
US9010910B2 (en) Material deposition system and method for depositing materials on a substrate
TWI657938B (zh) 液體材料之吐出方法及裝置
KR100666409B1 (ko) 처리장치
TWI332440B (en) A dropplet ejection device for a highly viscous fluid
US7380690B2 (en) Solution jet type fabrication apparatus, method, solution containing fine particles, wiring pattern substrate, device substrate
WO2013008799A1 (ja) 液滴吐出装置および方法
JP2010194399A (ja) 液滴吐出ヘッド及び液滴吐出装置
US20040241008A1 (en) Fluid ejector apparatus and methods
EP3416828B1 (en) Fluid ejector
JP2009538225A (ja) 液滴吐出のためのシステムと方法
KR20220010395A (ko) 홀의 내측면 또는 기판의 외측면을 프린팅하는 프린팅 장치
CN104395085B (zh) 用于将材料沉积于基板上的材料沉积系统和方法
JP2004174401A (ja) 液状体の吐出装置と液状体の吐出方法、及び電子機器
KR20230021554A (ko) 프린팅 장치
JP2023532470A (ja) 通路状の開口を少なくとも部分的に閉じる方法
TWI448391B (zh) 產生微微射流（Ｐｉｃｏ-Ｆｌｕｉｄｉｃ）噴墨之系統與方法
JP5544462B2 (ja) 吐出装置
KR20190046000A (ko) 잉크 토출장치
HK1230541B (zh) 涂布装置及涂布方法
HK1065980A (en) Fluid ejector apparatus and methods
HK1138534B (en) Method and apparatus for discharging liquid material

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160418

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20160418

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20170321

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170328

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20170627

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170928

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20171114

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180314

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20180323

A912 Re-examination (zenchi) completed and case transferred to appeal board

Free format text: JAPANESE INTERMEDIATE CODE: A912

Effective date: 20180406

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20180510