JP2015519611A - 単軸光ホモジナイザーを組み込む光画像形成システム - Google Patents
単軸光ホモジナイザーを組み込む光画像形成システム Download PDFInfo
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- JP2015519611A JP2015519611A JP2015515134A JP2015515134A JP2015519611A JP 2015519611 A JP2015519611 A JP 2015519611A JP 2015515134 A JP2015515134 A JP 2015515134A JP 2015515134 A JP2015515134 A JP 2015515134A JP 2015519611 A JP2015519611 A JP 2015519611A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 66
- 238000012634 optical imaging Methods 0.000 title claims abstract description 35
- 201000009310 astigmatism Diseases 0.000 claims abstract description 50
- 238000003384 imaging method Methods 0.000 claims abstract description 20
- 230000008859 change Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000000701 chemical imaging Methods 0.000 abstract description 21
- 230000015572 biosynthetic process Effects 0.000 abstract description 4
- 238000005286 illumination Methods 0.000 description 17
- 238000000265 homogenisation Methods 0.000 description 10
- 230000003595 spectral effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0411—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using focussing or collimating elements, i.e. lenses or mirrors; Aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0474—Diffusers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0911—Anamorphotic systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0961—Lens arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0994—Fibers, light pipes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
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- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Spectrometry And Color Measurement (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
Description
Claims (5)
- オブジェクト光源の光画像を提供する光画像形成システムにおいて、前記光画像形成システムは、
前記オブジェクト光源に関連する光を受光するための画像形成光学系と;
単軸ホモジナイザーであって、
前記画像形成光学系から前記オブジェクト光源に関連する前記光を受光するように位置されると共に入口端、本体及び出口端を有するように構成される矩形横断面光パイプであり、前記入口端がX軸方向に前記受光光を均質化するための寸法とされる幅を有し、前記入口端がY軸方向に前記受光光における空間的且つ角度的な画像変化を保持するための寸法とされる高さを有し、前記本体がZ軸方向に所定の長さを有する、矩形横断面光パイプ;および
前記矩形横断面光パイプから前記オブジェクト光源に関連する前記光を受光するように位置される非点収差近軸光学系;
を含むホモジナイザーと;
前記光画像形成システムは、前記非点収差近軸光学系から前記オブジェクト光源に関連する前記光を受光するように位置されると共に前記オブジェクト光源の前記光画像を出力するように構成される検出器と;
を備える光画像形成システム。 - 前記非点収差近軸光学系は、前記矩形横断面光パイプの前記入口端と一致するYZオブジェクト平面、前記矩形横断面光パイプの前記出口端と一致するXZオブジェクト平面、及び前記検出器でともに一致するXZ画像平面とYZ画像平面を有するように構成される請求項1に記載の光画像形成システム。
- 前記矩形横断面光パイプは、
前記入口端が前記検出器で望ましい視野と整合する寸法とされたY軸方向の前記高さを有することと;
前記入口端で受光された前記光の角度が前記矩形横断面光パイプの前記本体内においてYZ平面内で変化しないままであるような寸法とされたY軸方向の高さを前記出口端が有することと;
前記入口端が前記オブジェクト光源の望ましい画像スライスを提供するための寸法とされたX軸方向の幅を有することと;
を備える請求項1に記載の光画像形成システム。 - 前記矩形横断面光パイプの前記入口端の高さ、前記出口端の高さ、及び前記本体の長さが、
Yh(出口) ≧ Yh(入口)+Z(光パイプ)/f/#を満たし、
式中、Z(光パイプ)が前記光パイプの長さであり、
Yh(出口)が出口端の高さであり、
Yh(入口)が入口端の高さであり、
1/f/#が前記矩形横断面光パイプ内で移動する前記光の最大角度の傾きの2倍である請求項3に記載の光画像形成システム。 - オブジェクト光源の光画像を提供する光画像形成システムを製造する方法において、前記方法は、
前記オブジェクト光源に関連する光を受光するように構成される画像形成光学系を提供する工程と;
単軸ホモジナイザーであって、
前記画像形成光学系から前記オブジェクト光源に関連する前記光を受光するように位置されると共に入口端、本体及び出口端を有するように構成される矩形横断面光パイプであり、前記入口端がX軸方向に前記受光光を均質化するための寸法とされる幅を有し、前記入口端がY軸方向に前記受光光における空間的且つ角度的な画像変化を保持するための寸法とされる高さを有し、前記本体がZ軸方向に所定の長さを有する、矩形横断面光パイプ;および
前記矩形横断面光パイプから前記オブジェクト光源に関連する前記光を受光するように位置される非点収差近軸光学系;
を含む単軸ホモジナイザーを提供する工程と;
前記非点収差近軸光学系から前記オブジェクト光源に関連する前記光を受光するように位置されると共に前記オブジェクト光源の前記光画像を出力するように構成される検出器を提供する工程と;
を備える方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US201261653668P | 2012-05-31 | 2012-05-31 | |
US61/653,668 | 2012-05-31 | ||
PCT/US2013/043018 WO2013181203A1 (en) | 2012-05-31 | 2013-05-29 | Optical imaging system that incorporates an uni-axial optical homogenizer |
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JP2015519611A true JP2015519611A (ja) | 2015-07-09 |
JP6291483B2 JP6291483B2 (ja) | 2018-03-14 |
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JP2015515134A Expired - Fee Related JP6291483B2 (ja) | 2012-05-31 | 2013-05-29 | 単軸光ホモジナイザーを組み込む光画像形成システム |
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US (1) | US9583524B2 (ja) |
EP (1) | EP2856094B1 (ja) |
JP (1) | JP6291483B2 (ja) |
WO (1) | WO2013181203A1 (ja) |
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JP6251073B2 (ja) * | 2014-02-05 | 2017-12-20 | 浜松ホトニクス株式会社 | 分光器、及び分光器の製造方法 |
US20160209330A1 (en) * | 2015-01-21 | 2016-07-21 | Protrustech Co., Ltd | Integrated raman spectrometer and modularized laser module |
US10897585B2 (en) * | 2017-12-07 | 2021-01-19 | Corning Incorporated | Hyperspectral imaging system and method for providing a hyperspectral image of an area of a remote object |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008520004A (ja) * | 2004-11-12 | 2008-06-12 | アプライド マテリアルズ インコーポレイテッド | 高電力レーザダイオードベースアニーリングシステム用のオートフォーカス |
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US3624421A (en) * | 1970-06-11 | 1971-11-30 | Research Corp | Tunable raman laser |
US5026160A (en) * | 1989-10-04 | 1991-06-25 | The United States Of America As Represented By The Secretary Of The Navy | Monolithic optical programmable spectrograph (MOPS) |
US5257085A (en) * | 1991-04-24 | 1993-10-26 | Kaman Aerospace Corporation | Spectrally dispersive imaging lidar system |
US20020036234A1 (en) * | 2000-03-31 | 2002-03-28 | Hong Tang | Spectral data collector which includes a lambertian reflector |
US6969177B2 (en) * | 2001-03-23 | 2005-11-29 | Wavien, Inc. | Polarization recovery system using redirection |
US7327916B2 (en) * | 2003-03-11 | 2008-02-05 | Semiconductor Energy Laboratory Co., Ltd. | Beam Homogenizer, laser irradiation apparatus, and method of manufacturing a semiconductor device |
US7210820B2 (en) | 2003-05-07 | 2007-05-01 | Resonetics, Inc. | Methods and apparatuses for homogenizing light |
WO2004106983A2 (en) * | 2003-05-22 | 2004-12-09 | Optical Research Associates | Illumination in optical systems |
CA2581668A1 (en) * | 2003-09-26 | 2005-04-07 | Tidal Photonics, Inc | Apparatus and methods relating to expanded dynamic range imaging endoscope systems |
US7245373B2 (en) * | 2004-04-26 | 2007-07-17 | University Of Massachusetts | Spectrometer system for optical reflectance measurements |
US7355800B2 (en) * | 2005-02-07 | 2008-04-08 | Coherent, Inc. | Apparatus for projecting a line of light from a diode-laser array |
US20120212737A1 (en) * | 2011-02-23 | 2012-08-23 | Comstock Ii Lovell E | Optical homogenizing elements to reduce spectral noise in hyperspectral imaging system |
-
2013
- 2013-05-29 EP EP13728613.4A patent/EP2856094B1/en not_active Not-in-force
- 2013-05-29 WO PCT/US2013/043018 patent/WO2013181203A1/en active Application Filing
- 2013-05-29 JP JP2015515134A patent/JP6291483B2/ja not_active Expired - Fee Related
- 2013-05-30 US US13/905,402 patent/US9583524B2/en active Active
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JP2008520004A (ja) * | 2004-11-12 | 2008-06-12 | アプライド マテリアルズ インコーポレイテッド | 高電力レーザダイオードベースアニーリングシステム用のオートフォーカス |
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Publication number | Publication date |
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EP2856094B1 (en) | 2018-03-07 |
WO2013181203A1 (en) | 2013-12-05 |
JP6291483B2 (ja) | 2018-03-14 |
EP2856094A1 (en) | 2015-04-08 |
US20130321808A1 (en) | 2013-12-05 |
US9583524B2 (en) | 2017-02-28 |
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