JP2015229163A - Adhesion method of water or water-soluble liquid, adhesion device of water or water-soluble liquid, film deposition device, leak prevention method of water or water-soluble liquid, and leak prevention device of water or water-soluble liquid - Google Patents

Adhesion method of water or water-soluble liquid, adhesion device of water or water-soluble liquid, film deposition device, leak prevention method of water or water-soluble liquid, and leak prevention device of water or water-soluble liquid Download PDF

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JP2015229163A
JP2015229163A JP2014117971A JP2014117971A JP2015229163A JP 2015229163 A JP2015229163 A JP 2015229163A JP 2014117971 A JP2014117971 A JP 2014117971A JP 2014117971 A JP2014117971 A JP 2014117971A JP 2015229163 A JP2015229163 A JP 2015229163A
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liquid
water
spray nozzle
wetting
particles
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寧 森園
Yasushi Morisono
寧 森園
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Toshiba Mitsubishi Electric Industrial Systems Corp
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Abstract

PROBLEM TO BE SOLVED: To obtain a leak prevention device of water or a water-soluble liquid.SOLUTION: A spray device having a spray nozzle spraying water or a water-soluble liquid is a tangible object existing at the tip part of the spray nozzle or in the vicinity of the spray device and is provided with means where the surface of a portion requiring the prevention of wetting by a sprayed liquid from the spray nozzle is charged with negative potential. A liquid wetting prevention device where the maintaining of the wetting of the liquid is prevented by that particles charged with negative potential are attracted by Coulomb force to the surface of the portion requiring the prevention of the wetting by the liquid so that the particles charged with negative potential by Lennard effect in sprayed liquid particles do not come close by the repulsion of the Coulomb force is provided.

Description

本発明の実施形態は、水もしくは水溶性液体付着方法、水もしくは水溶性液体付着装置、成膜装置、水もしくは水溶性液体漏れ防止方法、水もしくは水溶性液体漏れ防止装置に関する。   Embodiments described herein relate generally to a water or water-soluble liquid adhesion method, a water or water-soluble liquid adhesion device, a film forming apparatus, a water or water-soluble liquid leakage prevention method, and a water or water-soluble liquid leakage prevention device.

従来から水を噴霧する噴霧装置は、種々の分野で使用されている。   Conventionally, a spraying device for spraying water is used in various fields.

特許第３８６６１８２号公報Japanese Patent No. 3866182 特許第４２３０７１１号公報Japanese Patent No. 4230711 特許第３９９１０９１号公報Japanese Patent No. 3999101

前述の噴霧装置において、意図しない箇所、例えば噴霧ノズル本体、噴霧ノズル本体に水を供給する水供給用金属配管、若しくは空気を供給する空気供給用金属配管、ノズル本体を固定する器具や周囲の柱等が、その噴霧装置の設置条件によって極端に水で濡れることが有った。   In the above-described spraying device, unintended locations, for example, a spray nozzle body, a water supply metal pipe for supplying water to the spray nozzle body, or an air supply metal pipe for supplying air, an appliance for fixing the nozzle body, and a surrounding column May become extremely wet with water depending on the installation conditions of the spraying device.

本実施形態は以上の様な事情に基づいてなされたもので、第１の目的は噴霧ノズルにより噴霧した液体で濡らしたくない個所で液体濡れが防止できる水もしくは水溶性液体漏れ防止方法、水もしくは水溶性液体漏れ防止装置を提供することである。   The present embodiment has been made based on the circumstances as described above, and the first object is water or a water-soluble liquid leakage prevention method that can prevent liquid wetting at a place where it is not desired to wet with the liquid sprayed by the spray nozzle, water or A water-soluble liquid leakage prevention device is provided.

本実施形態の第２の目的は、噴霧ノズルにより噴霧した液体で濡らしたい個所で液体濡れを生成できる水もしくは水溶性液体付着方法、水もしくは水溶性液体付着装置、成膜装置を提供することである。   The second object of the present embodiment is to provide a water or water-soluble liquid deposition method, water or water-soluble liquid deposition apparatus, and a film forming apparatus that can generate liquid wetting at a location where we want to wet with the liquid sprayed by the spray nozzle. is there.

第１の実施形態は、水もしくは水溶性液体を噴霧する噴霧ノズルを有する噴霧装置において、前記噴霧ノズルの先端部又は前記噴霧装置の近傍に存在する有体物であって、前記噴霧ノズルから噴霧した前記液体による濡れを生成するカ所の表面を、０電位もしくは正電位又は相対的に正電位に帯電させる手段を備え、前記噴霧した液体粒子の内、レナード効果により負に帯電した粒子を、前記液体で濡らしたい箇所に、付着させる液体濡れ生成装置である。   The first embodiment is a spray device having a spray nozzle for spraying water or a water-soluble liquid, and is a tangible object existing near the tip of the spray nozzle or the spray device, and sprayed from the spray nozzle Means for charging the surface of the portion that generates liquid wetting to 0 potential, positive potential, or relatively positive potential. Among the sprayed liquid particles, particles that are negatively charged by the Leonard effect are It is a liquid wetting generator that adheres to the location where we want to get wet.

第２の実施形態は、水もしくは水溶性液体を噴霧する噴霧ノズル本体を有する噴霧装置において、前記噴霧ノズル本体の先端部又は前記噴霧装置の近傍に存在する有体物であって、前記噴霧ノズル本体から噴霧した前記液体による濡れを防止したいカ所の表面を、負電位に帯電させる手段を備え、前記噴霧した液体粒子の内、レナード効果により負に帯電した粒子がクーロン力で反発して近づけないように、前記液体による濡れを防止したいカ所の表面に、負に帯電した粒子が前記クーロン力で引き寄せられて、前記液体の濡れが維持されることを防止することを特徴とする液体濡れ防止装置である。   A second embodiment is a spray apparatus having a spray nozzle body that sprays water or a water-soluble liquid, and is a tangible object that exists at the tip of the spray nozzle body or in the vicinity of the spray apparatus, from the spray nozzle body There is a means for charging the surface of the place where we want to prevent wetting by the sprayed liquid to a negative potential, and among the sprayed liquid particles, the negatively charged particles due to the Leonard effect are repelled by Coulomb force and do not approach. The liquid wetting prevention device is characterized in that negatively charged particles are attracted by the Coulomb force to the surface of a place where wetting of the liquid is desired to be prevented to maintain the wetting of the liquid. .

実施形態を説明するための概略構成図。The schematic block diagram for demonstrating embodiment. 図１の概略構成を詳細に説明するための図。The figure for demonstrating in detail the schematic structure of FIG. 図１の実施形態とは異なる実施形態を説明するための概略構成図。The schematic block diagram for demonstrating embodiment different from embodiment of FIG. 図３の実施形態を詳細に説明するための概略構成図。The schematic block diagram for demonstrating in detail the embodiment of FIG.

［実施形態１］
以下、実施形態について図１〜図４を参照して説明する。 [Embodiment 1]
Hereinafter, embodiments will be described with reference to FIGS.

（請求項５に対応）
始めに、実施形態１について説明する。実施形態１は、図１に示す水もしくは水溶性液体を噴霧する噴霧ノズル本体１を有する噴霧装置において、噴霧ノズル本体１の先端部１ａ又は噴霧装置の近傍に存在する有体物であって、噴霧ノズル本体から噴霧した水もしくは水溶性液体による濡れを防止したいカ所の表面を、負電位に帯電させることで、噴霧した水もしくは水溶性液体粒子の内、レナード効果により負に帯電した粒子がクーロン力で反発して近づけないようにし、負に帯電した粒子が付着するのを防止するようにした水もしくは水溶性液体濡れ防止方法である。 (Corresponding to claim 5)
First, the first embodiment will be described. Embodiment 1 is a spray device having a spray nozzle body 1 for spraying water or a water-soluble liquid shown in FIG. 1, and is a tangible object existing near the tip 1a of the spray nozzle body 1 or the spray device. By charging the surface of the area where we want to prevent wetting with water or water-soluble liquid sprayed from the main body to a negative potential, particles that are negatively charged due to the Leonard effect among the sprayed water or water-soluble liquid particles It is a water or water-soluble liquid wetting prevention method that prevents repelling and getting close and prevents adhesion of negatively charged particles.

（請求項６に対応）
実施形態１は、具体的には図１に示す水もしくは水溶性液体を噴霧する噴霧ノズル本体１を有する噴霧装置において、次のように構成した噴霧ノズル本体１の先端部１ａ又は噴霧装置の近傍に存在する有体物例えば気体供給用金属母管１０を固定する柱４、または気体供給用金属母管１０を固定する固定具５であって、噴霧ノズル本体１から噴霧した水もしくは水溶性液体による濡れを防止したいカ所の表面を、負電位に帯電させる手段（濡れ防止手段）を備え、噴霧した液体粒子の内、レナード効果により負に帯電した粒子がクーロン力で反発して近づけないように、液体による濡れを防止したいカ所の表面に、負に帯電した粒子が前記クーロン力で引き寄せられて、水もしくは水溶性液体の濡れが維持されることを防止する水もしくは水溶性液体濡れ防止装置である。 (Corresponding to claim 6)
In the spray device having the spray nozzle body 1 for spraying water or a water-soluble liquid shown in FIG. 1 specifically, the first embodiment is in the vicinity of the tip portion 1a of the spray nozzle body 1 configured as follows or the spray device. Tangible material, for example, a column 4 for fixing the gas supply metal mother pipe 10 or a fixture 5 for fixing the gas supply metal mother pipe 10, which is wetted by water or water-soluble liquid sprayed from the spray nozzle body 1. It is equipped with a means for charging the surface of the area where it is desired to prevent the liquid to a negative potential (wetting prevention means). Among the sprayed liquid particles, the liquid that is negatively charged due to the Leonard effect is repelled by Coulomb force and does not approach Water or water that prevents the negatively charged particles from being attracted by the Coulomb force to the surface of the place where we want to prevent wetting due to water, so that wetting of water or water-soluble liquid is not maintained. A sexual liquid anti-wetting device.

（請求項７に対応）
前述の負電位に帯電させる手段の第１の例は、負の電位に帯電した状態の材質で、噴霧ノズル本体の先端部の周囲を囲うものであり、これにより継続的にノズルの噴出部の周囲に負に帯電した粒子がクーロン力で引き寄せられて、液体濡れが維持されることを防止するものである。 (Corresponding to claim 7)
The first example of the means for charging to the negative potential described above is a material charged to a negative potential and surrounds the periphery of the tip of the spray nozzle main body, and thus the nozzle ejection portion is continuously provided. This prevents the negatively charged particles from being attracted by the Coulomb force to maintain liquid wetting.

（請求項８に対応）
前述の負電位に帯電させる手段の第２の例は、負電位に帯電させる手段は、噴霧ノズル本体の先端部以外を負の電位に帯電した状態の材質で構成したものであり、噴霧ノズル本体の先端部は加工性の高い材質で構成したものである。 (Corresponding to claim 8)
In the second example of the means for charging to the negative potential described above, the means for charging to the negative potential is made of a material charged to a negative potential except for the tip of the spray nozzle body. The tip of is made of a highly workable material.

このようにすることにより、噴霧ノズル本体の先端部は、先端部の材質に加工性の高い樹脂や、耐久性の高い例えばステンレスを自由に適用することができる。   By doing in this way, the tip part of the spray nozzle body can freely apply resin having high processability or stainless steel having high durability to the material of the tip part.

（請求項９に対応）
前述の負電位に帯電させる手段の第３の例は、負の電位に帯電した状態の材質であって、噴霧ノズル本体の全体を囲うようにしたものである。 (Corresponding to claim 9)
The third example of the means for charging to the negative potential described above is a material charged to a negative potential and surrounds the entire spray nozzle body.

実施例１によれば、ノズルより水もしくは水溶性液体を噴霧する噴霧システムにおいて、水もしくは水溶性液体で濡らしたくない箇所を、帯電列が負傾向且つ、高い耐電圧を有する材質で覆うことで、その箇所を高い負電圧に帯電した状態とすることで、水もしくは水溶性液体を噴霧した際にレナード効果で負に帯電した小さい粒子が、水もしくは水溶性液体で濡らしたくない箇所にクーロン力で反発して近づけない様にすることにより濡れの発生を防止することができる。   According to the first embodiment, in a spray system that sprays water or a water-soluble liquid from a nozzle, a portion that is not desired to be wetted with water or a water-soluble liquid is covered with a material that tends to have a negative charge train and high withstand voltage. By making the part charged at a high negative voltage, small particles that are negatively charged due to the Leonard effect when water or water-soluble liquid is sprayed can be applied to places where you do not want to wet with water or water-soluble liquid. The occurrence of wetting can be prevented by repelling and keeping it away.

［実施形態２］
（請求項１０に対応）
実施形態２は、図１及び図２（ｃ）に示すように、水もしくは水溶性液体を噴霧する噴霧ノズル本体１と、噴霧ノズル本体１に接続され水もしくは水溶性液体を供給する例えば合成樹脂からなる液体供給用チューブ配管３又は噴霧ノズル本体１に接続され気体例えば空気を供給するための気体供給用金属枝配管２と、噴霧ノズル本体１に接続され気体供給用金属母管１０等を固定する固定用柱４又は固定用柱４に取り付けられ気体供給用金属母管１０を固定する固定具５のいずれかを備えた噴霧装置において、噴霧ノズル本体１と接続されている気体供給用金属枝配管２、液体供給用チューブ配管３、気体供給用金属母管１０もしくは気体供給用金属枝配管２及び又は固定具５、もしくは噴霧ノズル本体１の近傍にある導電性を有する物体、例えば金属製の配管１４のすくなくとも一部に、帯電列が負傾向且つ絶縁性の高い材質を設けたものである。 [Embodiment 2]
(Corresponding to claim 10)
As shown in FIGS. 1 and 2 (c), Embodiment 2 is a spray nozzle body 1 that sprays water or a water-soluble liquid, and a synthetic resin that is connected to the spray nozzle body 1 and supplies water or a water-soluble liquid, for example. A gas supply metal branch pipe 2 connected to the liquid supply tube pipe 3 or the spray nozzle main body 1 for supplying gas, for example, air, and a gas supply metal mother pipe 10 connected to the spray nozzle main body 1 are fixed. A gas supply metal branch connected to the spray nozzle body 1 in a spraying apparatus provided with either the fixing pillar 4 to be fixed or the fixture 5 attached to the fixing pillar 4 to fix the gas supply metal mother pipe 10 A pipe 2, a liquid supply tube pipe 3, a gas supply metal mother pipe 10 or a gas supply metal branch pipe 2 and / or a fixture 5, or a conductive object in the vicinity of the spray nozzle body 1, To at least a portion of the metal pipe 14 eg to one in which the charging column is provided with a negative tendency and highly insulating material.

具体的には、図３に示すように金属製の配管１４の外周面であって、風下側にポリプロピレン性熱収縮チューブ１１で囲ったものである。また、図４（ａ）に示すように金属製の配管１４の外周面を、ポリプロピレンフィルム１２で囲い、この外周面をインシュロック１３で拘束したものである。   Specifically, as shown in FIG. 3, the outer peripheral surface of the metal pipe 14 is surrounded by the polypropylene heat shrinkable tube 11 on the leeward side. Further, as shown in FIG. 4A, the outer peripheral surface of the metal pipe 14 is surrounded by a polypropylene film 12, and this outer peripheral surface is restrained by an insulation lock 13.

実施例２によれば、ノズルより水もしくは水溶性液体を噴霧する噴霧システムにおいて、水もしくは水溶性液体で濡らしたくない箇所を、帯電列が負傾向且つ、高い耐電圧を有する材質で覆うことで、その箇所を高い負電圧に帯電した状態とすることで、水もしくは水溶性液体を噴霧した際にレナード効果で負に帯電した小さい粒子が、水もしくは水溶性液体で濡らしたくない箇所にクーロン力で反発して近づけない様にすることにより濡れの発生を防止することができる。   According to the second embodiment, in a spray system that sprays water or a water-soluble liquid from a nozzle, a portion that is not desired to be wetted with water or a water-soluble liquid is covered with a material that has a negative tendency to be charged and has a high withstand voltage. By making the part charged at a high negative voltage, small particles that are negatively charged due to the Leonard effect when water or water-soluble liquid is sprayed can be applied to places where you do not want to wet with water or water-soluble liquid. The occurrence of wetting can be prevented by repelling and keeping it away.

［実施形態３］
（請求項１１に対応）
実施形態３は、図１の経路３、４に示すように、水もしくは水溶性液体を噴霧する噴霧ノズル本体１を有する噴霧装置において、噴霧ノズル本体１の霧の噴出部の近傍にある有体物の表面を、負電位に帯電した状態に保持することで、有体物からアースに電荷が放出されることにより、継続的に負に帯電した粒子が引き寄せられ、液体濡れの発生するのを防止する水もしくは水溶性液体濡れ防止方法である。 [Embodiment 3]
(Corresponding to claim 11)
Embodiment 3 is a spray apparatus having a spray nozzle body 1 that sprays water or a water-soluble liquid as shown in paths 3 and 4 of FIG. By holding the surface in a negatively charged state, the charge is released from the tangible object to the ground, so that the negatively charged particles are continuously attracted and water or liquid wetting is prevented from occurring. This is a water-soluble liquid wetting prevention method.

（請求項１２に対応）
前述の負電位に帯電した状態に保持する方法として、帯電列が負傾向で、尚且つ高い耐電圧を有する材質、具体的には前述した図３、図４に示すように覆うことにより、負電位に帯電した状態に保持する水もしくは水溶性液体濡れ防止方法である。 (Corresponding to claim 12)
As a method of maintaining the negatively charged state as described above, a negative charge can be obtained by covering a material having a negative charge tendency and a high withstand voltage, specifically, as shown in FIGS. 3 and 4 described above. This is a method of preventing wetting of water or a water-soluble liquid that is kept charged to a potential.

（請求項１３に対応）
前述の負電位に帯電させる手段は、帯電列が負傾向で、尚且つ高い耐電圧を有する材質で覆うことである。 (Corresponding to claim 13)
The above-described means for charging to a negative potential is to cover the charging train with a material having a negative tendency and a high withstand voltage.

（請求項１４に対応）
前述の前記帯電列が負傾向で且つ高い耐電圧を有する材質として、ポリプロピレン、フッ素コーティング剤、フッ素樹脂のいずれか又はこれらの組み合わせであることである。 (Corresponding to claim 14)
As the material having the above-mentioned charged series having a negative tendency and a high withstand voltage, any of polypropylene, a fluorine coating agent, a fluororesin, or a combination thereof is used.

噴霧システムとして前述の実施形態１〜３のいずれか一つを活用するように構成してもよい。   You may comprise so that any one of above-mentioned Embodiment 1-3 may be utilized as a spraying system.

ここで、レナード効果について簡単に説明する。水滴は偏極しており、表面には正電荷が揃って分布し、内部には負電荷が分布している。水滴が機械的に激しく衝突した力で分裂して表面がはぎ取られた結果、小さい水粒子は負に、大きい水粒子は正に帯電し、それぞれ大気イオンの負イオン、正イオンとなる。しかし正イオンは重力の作用で早く接地するため、結果として周りの空気は負イオンが優勢となる。   Here, the Leonard effect will be briefly described. Water droplets are polarized, and positive charges are uniformly distributed on the surface, and negative charges are distributed inside. As a result of the water droplets splitting with the force of intense mechanical collision and the surface being peeled off, the small water particles become negative and the large water particles become positively charged, becoming negative ions and positive ions of atmospheric ions, respectively. However, since positive ions are grounded early due to the action of gravity, negative ions are dominant in the surrounding air.

水の粒子は噴霧した際に、レナード効果により小さい粒子は負に、大きい粒子は正に帯電する。ここで、霧を噴霧する噴霧システムに於いて、噴霧された粒子は帯電しており、周囲にアースされ、導電性の有る物体が有ると、避雷針に引き寄せられる様な形でその物体に集まる。特に、小さい粒子は運動エネルギーと重力の作用が小さく、例え霧の噴射方向と逆方向でも、クーロン力により周囲にある導電性の有る物体に向かって自由に引き寄せられる。   When water particles are sprayed, the smaller particles are negatively charged due to the Leonard effect, and the larger particles are positively charged. Here, in the spray system for spraying mist, the sprayed particles are charged, and if there is an object that is grounded and conductive, it collects on the object in a form that is attracted to the lightning rod. In particular, small particles have small effects of kinetic energy and gravity, and are attracted freely toward the surrounding conductive object by Coulomb force even in the direction opposite to the direction of mist injection.

この様な物体は、前記の小さい水もしくは水溶性液体粒子が集中的に継続して衝突するため、その箇所が濡れに発展し、結果的にはその箇所からの液だれや、表面の濡れによる腐食が発生する。   In such an object, since the small water or water-soluble liquid particles collide intensively, the portion develops to wet, and as a result, liquid dripping from the portion or surface wetness Corrosion occurs.

また、正に帯電した粒子は、運動エネルギーと重力の作用が大きく、クーロン力だけでは自由な方向に飛びにくいことと、数が少ないため、同じ場所への集中度が低い傾向があることから、負に帯電した粒子の様な濡れの発展への影響は小さい。   In addition, positively charged particles have a large effect of kinetic energy and gravity, and it is difficult to fly in a free direction only with Coulomb force, and because the number is small, there is a tendency for concentration to the same place to be low, The impact on the development of wetting such as negatively charged particles is small.

［実施形態４］
（請求項１に対応）
水もしくは水溶性液体を噴霧する噴霧ノズル本体を有する噴霧装置において、
噴霧ノズルの先端部又は前記噴霧装置の近傍に存在する有体物であって、噴霧ノズルから噴霧した液体による濡れを生成するカ所の表面を、０電位もしくは正電位又は相対的に正電位に帯電させることにより、噴霧した液体粒子の内、レナード効果により負に帯電した粒子が、液体による濡れを生成するカ所の表面に付着させるようにした液体付着方法である。 [Embodiment 4]
(Corresponding to claim 1)
In a spraying device having a spray nozzle body for spraying water or a water-soluble liquid,
Charging the surface of a tangible object existing at the tip of the spray nozzle or in the vicinity of the spraying device, which generates wetting by the liquid sprayed from the spray nozzle, to zero potential, positive potential, or relatively positive potential. Thus, among the sprayed liquid particles, the negatively charged particles due to the Leonard effect are attached to the surface of the place where wetting by the liquid is generated.

（請求項２に対応）
また、水もしくは水溶性液体を噴霧する噴霧ノズルを有する噴霧装置において、噴霧ノズルの先端部又は噴霧装置の近傍に存在する有体物であって、噴霧ノズルから噴霧した液体による濡れを生成するカ所の表面を、０電位もしくは正電位又は相対的に正電位に帯電させる手段を備え、噴霧した液体粒子の内、レナード効果により負に帯電した粒子を、液体で濡らしたい箇所に、付着させる液体付着装置である。 (Corresponding to claim 2)
Further, in a spraying device having a spray nozzle for spraying water or a water-soluble liquid, the surface of the body which is a tangible object existing near the tip of the spray nozzle or in the vicinity of the spraying device and generates wetting by the liquid sprayed from the spray nozzle A liquid adhering device for adhering negatively charged particles due to the Leonard effect to the location to be wetted with the liquid among the sprayed liquid particles. is there.

（請求項３に対応）
さらに、水もしくは水溶性液体を噴霧するノズルを有する成膜装置において、ノズルの先端部又は前記成膜装置の近傍に存在する有体物であって、ノズルから液体による濡れを生成するカ所の表面を、０電位もしくは正電位又は相対的に正電位に帯電させることにより、帯電した粒子の内、レナード効果により負に帯電した粒子が、液体の濡れを生成するカ所の表面に付着させるようにした成膜装置である。 (Corresponding to claim 3)
Further, in a film forming apparatus having a nozzle for spraying water or a water-soluble liquid, a surface of a tangible object existing at the tip of the nozzle or in the vicinity of the film forming apparatus, which generates wetting by the liquid from the nozzle, Film formation in which negatively charged particles due to the Leonard effect adhere to the surface where liquid wetting occurs by charging to 0 potential, positive potential or relatively positive potential. Device.

（請求項４に対応）
さらにまた、水もしくは水溶性液体を噴霧するノズルを有する成膜装置において、ノズルの先端部又は成膜装置の近傍に存在する有体物であって、ノズルから噴霧した液体による濡れを生成するカ所の表面を、０電位もしくは正電位又は相対的に正電位に帯電させる手段を備え、噴霧した液体粒子の内、レナード効果により負に帯電した粒子を、液体で濡らしたい箇所に、付着させる成膜装置である。 (Corresponding to claim 4)
Furthermore, in a film forming apparatus having a nozzle for spraying water or a water-soluble liquid, a surface of a tangible object existing near the tip of the nozzle or in the vicinity of the film forming apparatus that generates wetting by the liquid sprayed from the nozzle Is a film forming apparatus that has a means for charging the liquid to 0 potential, positive potential, or relatively positive potential, and adheres particles that are negatively charged due to the Leonard effect among the sprayed liquid particles to a location where the liquid is to be wetted. is there.

１…ノズル本体、２…気体供給用金属枝配管、３…液体供給用チューブ配管、４…気体供給用金属枝配管等を固定する柱、５…気体供給用金属枝配管等を固定する固定具、７…ノズル本体１と液体供給用チューブ配管３との接続部に設けたポリプロピレン又はフッ素樹脂コーティング、８…気体供給用金属枝配管２の外周面及びノズル本体１の外周面全体に設けたポリプロピレン又はフッ素樹脂コーティング、９…液体供給用金属配管２の外周面に設けたポリプロピレン又はフッ素樹脂チューブ、１０…気体供給用金属母管、１１…ポリプロピレン製熱収縮チューブ、１２…ポリプロピレンフィルム、１３…インシュロック、１４…金属製の配管   DESCRIPTION OF SYMBOLS 1 ... Nozzle body, 2 ... Metal branch pipe for gas supply, 3 ... Tube pipe for liquid supply, 4 ... Column which fixes metal branch pipe for gas supply, etc. 5 ... Fixing tool which fixes metal branch pipe for gas supply, etc. , 7... Polypropylene or fluororesin coating provided at the connection between the nozzle body 1 and the liquid supply tube pipe 3. 8. Polypropylene provided on the outer peripheral surface of the gas supply metal branch pipe 2 and the entire outer peripheral surface of the nozzle body 1. Or fluorine resin coating, 9 ... polypropylene or fluorine resin tube provided on the outer peripheral surface of the liquid supply metal pipe 2, 10 ... metal supply pipe for gas supply, 11 ... heat shrinkable tube made of polypropylene, 12 ... polypropylene film, 13 ... Insulok , 14 ... Metal piping

Claims (16)

水もしくは水溶性液体を噴霧する噴霧ノズルを有する噴霧装置において、
前記噴霧ノズルの先端部又は前記噴霧装置の近傍に存在する有体物であって、前記噴霧ノズルから噴霧した前記液体による濡れを生成するカ所の表面を、０電位もしくは正電位又は相対的に正電位に帯電させることにより、前記噴霧した液体粒子の内、負に帯電した粒子が、前記液体による濡れを生成するカ所の表面に付着させるようにしたことを特徴とする液体付着方法。 In a spraying device having a spray nozzle for spraying water or a water-soluble liquid,
A tangible object existing near the tip of the spray nozzle or in the vicinity of the spraying device, and the surface of the portion that generates wetting by the liquid sprayed from the spray nozzle is set to 0 potential, positive potential, or relatively positive potential. A method of adhering liquid, wherein negatively charged particles out of the sprayed liquid particles are adhered to a surface of a place where wetting by the liquid is generated by charging. 水もしくは水溶性液体を噴霧する噴霧ノズルを有する噴霧装置において、
前記噴霧ノズルの先端部又は前記噴霧装置の近傍に存在する有体物であって、前記噴霧ノズルから噴霧した前記液体による濡れを生成するカ所の表面を、０電位もしくは正電位又は相対的に正電位に帯電させる手段を備え、前記噴霧した液体粒子の内、負に帯電した粒子を、前記液体を濡らしたい箇所に、付着させる液体付着装置。 In a spraying device having a spray nozzle for spraying water or a water-soluble liquid,
A tangible object existing near the tip of the spray nozzle or in the vicinity of the spraying device, and the surface of the portion that generates wetting by the liquid sprayed from the spray nozzle is set to 0 potential, positive potential, or relatively positive potential. A liquid deposition apparatus comprising a means for charging, and depositing negatively charged particles out of the sprayed liquid particles on a location where the liquid is to be wetted. 水もしくは水溶性液体を噴霧するノズルを有する成膜装置において、
前記ノズルの先端部又は前記成膜装置の近傍に存在する有体物であって、前記液体による濡れを生成するカ所の表面を、０電位もしくは正電位又は相対的に正電位に帯電させることにより、前記帯電した粒子の内、負に帯電した粒子が、前記液体濡れを生成するカ所の表面に付着させるようにしたことを特徴とする成膜装置。 In a film forming apparatus having a nozzle for spraying water or a water-soluble liquid,
By charging the surface of the tangible object existing near the tip of the nozzle or in the vicinity of the film-forming apparatus and generating wetness by the liquid to 0 potential, positive potential, or relatively positive potential, A film forming apparatus, wherein negatively charged particles among the charged particles are attached to the surface of the place where the liquid wetting is generated. 水もしくは水溶性液体を噴霧するノズルを有する成膜装置において、
前記ノズルの先端部又は前記成膜装置の近傍に存在する有体物であって、前記ノズルから噴霧した前記液体による濡れを生成するカ所の表面を、０電位もしくは正電位又は相対的に正電位に帯電させる手段を備え、前記噴霧した液体粒子の内、負に帯電した粒子を、前記液体で濡らしたい箇所に、付着させる成膜装置。 In a film forming apparatus having a nozzle for spraying water or a water-soluble liquid,
A tangible object existing near the tip of the nozzle or in the vicinity of the film forming apparatus, and the surface of the portion that generates wetting by the liquid sprayed from the nozzle is charged to zero potential, positive potential, or relatively positive potential. A film forming apparatus for attaching negatively charged particles among the sprayed liquid particles to a location where the liquid is desired to be wetted. 水もしくは水溶性液体を噴霧する噴霧ノズルを有する噴霧装置において、
前記噴霧ノズルの先端部又は前記噴霧装置の近傍に存在する有体物であって、前記噴霧ノズルから噴霧した前記液体による濡れを防止したいカ所の表面を、負電位に帯電させることで、前記噴霧した液体粒子の内、負に帯電した粒子がクーロン力で反発して近づけないようにし、前記負に帯電した粒子が付着するのを防止するようにしたことを特徴とする液体濡れ防止方法。 In a spraying device having a spray nozzle for spraying water or a water-soluble liquid,
The sprayed liquid is a tangible object present near the tip of the spray nozzle or in the vicinity of the spraying device, and the surface of the place where we want to prevent wetting by the liquid sprayed from the spray nozzle is charged to a negative potential. A liquid wetting prevention method characterized in that, among particles, negatively charged particles are repelled by Coulomb force so as not to approach each other, and the negatively charged particles are prevented from adhering. 水もしくは水溶性液体を噴霧する噴霧ノズルを有する噴霧装置において、
前記噴霧ノズルの先端部又は前記噴霧装置の近傍に存在する有体物であって、前記噴霧ノズルから噴霧した前記液体による濡れを防止したいカ所の表面を、負電位に帯電させる手段を備え、前記噴霧した液体粒子の内、負に帯電した粒子がクーロン力で反発して近づけないように、前記液体による濡れを防止したいカ所の表面に、負に帯電した粒子が前記クーロン力で引き寄せられて、前記液体の濡れが維持されることを防止することを特徴とする液体濡れ防止装置。 In a spraying device having a spray nozzle for spraying water or a water-soluble liquid,
A tangible object existing near the tip of the spray nozzle or in the vicinity of the spraying device, the surface of a place where we want to prevent wetting by the liquid sprayed from the spray nozzle is provided with means for charging to a negative potential, the spraying Among the liquid particles, the negatively charged particles are attracted by the Coulomb force to the surface of the place where it is desired to prevent wetting by the liquid so that the negatively charged particles are not repelled and approached by the Coulomb force. A liquid wetting prevention device characterized in that wetting of the liquid is prevented from being maintained. 前記負電位に帯電させる手段は、負の電位に帯電した状態の材質で、前記噴霧ノズルの先端部の周囲を囲うものであり、継続的に前記ノズルの噴出部の周囲に負に帯電した粒子がクーロン力で引き寄せられて、液体濡れが維持されることを防止することを特徴とする請求項６に記載の水もしくは水溶性液体濡れ防止装置。   The means for charging to the negative potential is a material charged to a negative potential and surrounds the periphery of the tip portion of the spray nozzle, and continuously negatively charged particles around the ejection portion of the nozzle. The water or water-soluble liquid wetting prevention device according to claim 6, wherein the water or water-soluble liquid wetting prevention device prevents the liquid wetting from being attracted by Coulomb force. 前記負電位に帯電させる手段は、前記噴霧ノズルの先端部以外を負の電位に帯電した状態の材質で構成したものであり、前記噴霧ノズルの先端部は加工性の高い材質で構成したことを特徴とする請求項６に記載の液体濡れ防止装置。   The means for charging to the negative potential is made of a material charged to a negative potential except for the tip of the spray nozzle, and the tip of the spray nozzle is made of a material having high workability. The liquid wetting prevention device according to claim 6. 前記負電位に帯電させる手段は、負の電位に帯電した状態の材質であって、前記ノズルの全体を囲うようにしたことを特徴とする請求項６に記載の液体濡れ防止装置。   7. The liquid wetting prevention device according to claim 6, wherein the means for charging to the negative potential is made of a material charged to a negative potential and surrounds the entire nozzle. 水もしくは水溶性液体を噴霧する噴霧ノズルと、前記噴霧ノズルに接続され液体又は気体を供給するための液体供給用金属配管又は気体供給用金属配管と、前記噴霧ノズルに接続され前記液体供給用金属配管又は気体供給用金属配管等を固定する固定用部材のいずれかを備えた噴霧装置において、
前記噴霧ノズルと接続されている前記液体供給用金属配管、前記気体供給用金属配管及び又は前記固定用部材の少なくとも一部に、絶縁性の高い材質を設けた噴霧装置。 Spray nozzle for spraying water or water-soluble liquid, metal pipe for liquid supply or gas supply metal pipe connected to the spray nozzle for supplying liquid or gas, and metal for liquid supply connected to the spray nozzle In a spraying device provided with either a fixing member for fixing a pipe or a metal pipe for gas supply,
The spraying apparatus which provided the material with high insulation in at least one part of the said metal pipe for liquid supply connected with the said spray nozzle, the said metal pipe for gas supply, or the said fixing member. 水もしくは水溶性液体を噴霧する噴霧ノズルを有する噴霧装置において、
前記噴霧ノズルの霧の噴出部の近傍にある有体物の表面を、負電位に帯電した状態に保持することで、前記有体物からアースに電荷が放出されることにより、継続的に負に帯電した粒子が引き寄せられ、前記液体濡れの発生するのを防止する液体濡れ防止方法。 In a spraying device having a spray nozzle for spraying water or a water-soluble liquid,
By maintaining the surface of the tangible object in the vicinity of the mist jetting part of the spray nozzle in a negatively charged state, the particles are continuously negatively charged by discharging electric charges from the tangible object to the ground. A liquid wetting prevention method for preventing the liquid wetting from being drawn. 前記負電位に帯電した状態に保持する方法として、帯電列が負傾向で、尚且つ高い耐電圧を有する材質で覆うことにより、負電位に帯電した状態に保持する請求項５〜１１のいずれか一つに記載の液体濡れ防止方法。   The method of maintaining the negatively charged state as a method of maintaining the negatively charged state by covering the charging train with a material having a negative tendency and having a high withstand voltage. The liquid wetting prevention method as described in one. 前記負電位に帯電させる手段は、帯電列が負傾向で且つ高い耐電圧を有する材質で構成したことを特徴とする請求項５〜１１のいずれか一つに記載の噴霧装置、液体漏れ防止方法。   12. The spray apparatus and the liquid leakage prevention method according to claim 5, wherein the means for charging to the negative potential is made of a material having a negative charge tendency and a high withstand voltage. . 前記帯電列が負傾向で且つ高い耐電圧を有する材質として、ポリプロピレン、フッ素コーティング剤、フッ素樹脂のいずれか又はこれらの組み合わせであることを特徴とする請求項５〜１１のいずれか一つに記載の噴霧装置、液体漏れ防止方法。   12. The material according to claim 5, wherein the material having a negative tendency and a high withstand voltage is one of polypropylene, a fluorine coating agent, a fluororesin, or a combination thereof. Spraying device, liquid leakage prevention method. 請求項５〜１１のいずれか一つを活用していることを特徴とする噴霧システム。   A spray system using any one of claims 5 to 11. 前記粒子を負に帯電させる手法としてレナード効果を利用したことを特徴とする請求項１、請求項２、請求項３、４、請求項５、請求項６〜７のいずれかに記載の液体付着方法、液体付着装置、成膜装置、液体濡れ防止方法、液体濡れ防止装置。   The liquid adhesion according to any one of claims 1, 2, 3, 4, 5, and 6 to 7, wherein a Leonard effect is used as a method of negatively charging the particles. Method, liquid adhesion apparatus, film forming apparatus, liquid wetting prevention method, liquid wetting prevention apparatus.
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JP2018089550A (en) * 2016-11-30 2018-06-14 東芝三菱電機産業システム株式会社 Spray nozzle
KR20190070965A (en) * 2016-11-30 2019-06-21 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 Spray nozzle
KR102241560B1 (en) 2016-11-30 2021-04-16 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 Spray nozzle

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