JP2015219176A - Chip recovery device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To be sure to check if a chip supposed to have been recovered from a sheet is left behind on the sheet.SOLUTION: A chip recovery device 1 recovering a specific chip from a chip array 7 made up of a plurality of rectangular chips having a light transmissive property and regularly arrayed at an interval in a two-dimensional way is provided that comprises: a retaining part 3 that retains a sheet 2 supporting the chip array 7 on one surface of the chip array 7 on a prescribed plane surface 3a; an illumination unit 5 that obliquely irradiates the sheet 2 on the prescribed plane surface 3a retained by the retaining part 3 with illumination light L1; and an observation unit 6 that observes the chip array 7 on the sheet 2 retained to the retaining part 3, in which the illumination unit 5 is configured to irradiate the sheet with the illumination light L1 from an irradiation direction where a lateral surface of at least adjacent two sides of the chip is irradiated with the illumination light L1 and at an irradiation angle at which the illumination light L1 incident in the chip 2 from the lateral surface of the two sides emerges from a lateral surface of other two sides.

Description

  The present invention relates to a chip collection apparatus.

  Conventionally, a glass substrate is divided into small chips together with a section of living tissue affixed on the glass substrate, and a part of the chip is collected to collect a fragment containing specific cells in the section. A technique is known (for example, refer to Patent Document 1). In Patent Document 1, a glass substrate is cut into a square on a sheet having adhesiveness and extensibility such as a dicing sheet, and the adjacent chips are separated by extending the sheet, and the adhesive surface of the chip with the sheet is formed. Chips are collected one by one from the sheet by piercing with a needle and peeling and dropping from the sheet. Chips that fall from the sheet are collected in a container that is arranged in advance below the sheet.

  On the other hand, in the observation of a transparent object, oblique illumination in which light is irradiated from an oblique direction to the observation surface of the transparent object is used (for example, see Patent Documents 2 to 5).

International Publication No. 2011/149909 JP 7-280530 A JP 2010-281772 A JP 2007-286048 A Japanese Patent No. 2867247

  Since each chip of Patent Document 1 is transparent and minute, it is difficult to confirm the chip in the container with the naked eye. Therefore, by observing the chip arrangement on the sheet and confirming that the collected chip does not exist on the sheet, it is confirmed that the chip has been collected in the container. However, there is a problem that it is difficult to find a trace of a specific chip at a glance by simply using the illumination method as in Patent Documents 2 to 5. Furthermore, when the chip remains on the sheet without being peeled off from the sheet, there is a problem that it may be overlooked because it is difficult to find the chip that has not been recovered.

  The present invention has been made in view of the above-described circumstances, and an object of the present invention is to provide a chip recovery apparatus that can reliably check whether chips that should have been recovered from a sheet remain on the sheet. And

In order to achieve the above object, the present invention provides the following means.
The present invention relates to a chip recovery apparatus for recovering a specific chip from a chip array composed of a plurality of rectangular chips that are translucent and regularly arranged in a two-dimensional manner with a gap therebetween, A holding unit that holds a sheet supported on the surface of the sheet on a predetermined plane, an illumination unit that irradiates illumination light obliquely to the sheet on the predetermined plane held by the holding unit, and the holding An observation unit for observing the chip arrangement on the sheet held by the unit, the illumination unit from an irradiation direction in which the illumination light is irradiated to at least two side surfaces adjacent to the chip, and Provided is a chip collection device that irradiates the illumination light at an irradiation angle at which the illumination light enters the chip from the two side surfaces and exits from the other two side surfaces.

  According to the present invention, after collecting a desired chip from within the chip array, the chip array irradiated with illumination light from the illumination unit is subsequently observed by the observation unit. Illumination light irradiated obliquely with respect to the chip array on the sheet enters the individual chip from the side surfaces of the two adjacent sides, proceeds in the chip while being reflected by both end surfaces of the chip, and other adjacent two By emitting from the side surface of the side, the side surfaces of the other two adjacent sides shine brightly. Therefore, in the image observed by the observation unit, a regular arrangement of a set of two bright straight lines (hereinafter also referred to as “light emitting lines”) corresponding to two adjacent sides of each chip is observed.

  Here, when the desired chip is recovered from the sheet, since the light emission line does not exist only at the position where the recovered chip is attached, the user can easily find the trace of the recovered chip. it can. If a chip is still left on the sheet due to failure to collect, there is only one set of light emission lines that differ from the surroundings in the layout, angle, etc., and at what angle the chip that has failed to be recovered is on the sheet. Even if it remains, a clear light emission line is generated on at least one of the two adjacent sides. Therefore, the user can easily notice the chip that has not been collected on the sheet. In this way, it can be reliably confirmed whether or not the chip that should have been collected from the sheet remains on the sheet.

In the above invention, the chip array is composed of rectangular chips squarely arranged along two axis directions orthogonal to each other, and the illumination unit is a single illumination light from a direction of 45 ° with respect to the two axis directions. May be irradiated.
In this way, a set of two light emission lines can be generated using a single illumination light.

Moreover, in the said invention, the said chip arrangement | sequence consists of a rectangular chip | tip square-arranged along the biaxial direction orthogonal to each other, and the said illumination part irradiates two said illumination lights from the said biaxial direction. Good.
By doing in this way, since separate illumination light is irradiated with respect to the side surfaces of two adjacent sides, the brightness of each of the two light emitting lines can be adjusted independently of each other.

Moreover, in the said invention, the said illumination part may irradiate monochromatic light as said illumination light.
By doing in this way, the visibility of a light emission line can be improved.

Moreover, in the said invention, the said illumination part may be equipped with LED.
By doing in this way, the light of LED hardly gives influence of a heat | fever with respect to a chip | tip or an observation part. Therefore, illumination light can be irradiated from a position close to the chip.

  According to the present invention, there is an effect that it can be surely confirmed whether or not chips that should have been collected from the sheet remain on the sheet.

It is a whole block diagram of the chip | tip collection | recovery apparatus which concerns on one Embodiment of this invention. It is a top view which shows the sheet | seat with which the chip | tip arrangement | sequence was formed used for the cell sorting apparatus of FIG. It is a figure explaining the mounting method of the sheet | seat on the stage. It is a figure explaining the (a) irradiation direction and (b) irradiation angle of the illumination light with respect to a chip | tip. It is a whole block diagram of the modification of the chip | tip collection | recovery apparatus of FIG. It is the image of a chip arrangement | sequence when the illumination light acquired by the chip | tip collection | recovery apparatus of FIG. 1 is (a) not irradiated and (b) irradiated. It is another image of a chip arrangement | sequence when the illumination light acquired by the chip | tip collection | recovery apparatus of FIG. 1 is (a) not irradiated and (b) irradiated. It is another image of a chip arrangement | sequence when the illumination light acquired by the chip | tip collection | recovery apparatus of FIG. 1 is (a) not irradiated and (b) irradiated. It is another image of a chip arrangement | sequence when the illumination light acquired by the chip | tip collection | recovery apparatus of FIG. 1 is (a) not irradiated and (b) irradiated.

Below, chip recovery device 1 concerning one embodiment of the present invention is explained with reference to drawings.
The chip recovery apparatus 1 according to the present embodiment is a cell sorting apparatus that recovers a fragment A ′ containing a desired cell from a section A of a biological tissue. As shown in FIG. A stage (holding unit) 3 held on the stage 3, a punching unit 4 and an illumination unit 5 disposed above the stage 3, and an observation unit 6 disposed below the stage 3.

FIG. 2 shows the sheet 2 and the chip array 7 formed on the sheet 2.
The sheet 2 has an adhesive surface to which an adhesive is applied, and a chip array 7 is formed on the adhesive surface. The chip array 7 is composed of a large number of minute substantially square chips 8, and the chips 8 are regularly and two-dimensionally arranged with a gap therebetween in the row direction and the column direction parallel to the sides. Each chip 8 has a front surface 8a and a back surface 8b facing each other, and is adhered to the adhesive surface of the sheet 2 on the back surface 8b. The side dimension of each chip 8 is, for example, about 0.5 mm. Each chip 8 is made of a colorless or colored transparent material, such as glass or resin, and has translucency to transmit illumination light L1 described later. The sheet 2 also has translucency that transmits the illumination light L1.

  A part A ′ of the slice A is attached to the front surface 8 a of each chip 8. Such a chip array 7 is created by the following method as an example. First, a single substrate such as a cover glass is attached on the adhesive surface of the sheet 2 having extensibility, and the substrate is cut into a lattice shape on the sheet 2 to form cuts in the substrate. Next, the slice A is pasted on this substrate, and the sheet 2 is extended in the surface direction. Thereby, the substrate is divided into a plurality of chips 8 along the cut line, and at this time, the section A on the substrate is also divided into a plurality of pieces A ′ along the cut line of the substrate. Thereafter, the sheet 2 is held in an extended state by the grip ring 12 in order to maintain a gap between the chips 8. The grip ring 12 has an outer ring 12a and an inner ring 12b fitted to the inner peripheral surface of the outer ring 12a, and the seat 2 is interposed between the inner peripheral surface of the outer ring 12a and the outer peripheral surface of the inner ring 12b. The sheet 2 is fixed in the extended state by gripping the sheet.

  The stage 3 has a rectangular mounting surface (predetermined flat surface) 3a disposed substantially horizontally on the upper side. A window 3b penetrating in the vertical direction is formed in a substantially central portion of the mounting surface 3a. As shown in FIG. 3, the sheet 2 is placed on the placement surface 3a so that the chip array 7 is positioned in the window 3b and the adhesive surface on which the chip array 7 is formed faces downward. Placed. Thereby, the chip array 7 can be observed from the lower side of the stage 3 by the observation unit 6.

  The punching portion 4 includes a needle 41 and a holder 42 that holds the needle 41 with the needle tip 41a facing downward and is movable in the horizontal direction and the vertical direction. By moving the holder 42 in the horizontal direction, the needle tip 41a can be aligned in the horizontal direction with respect to the tip 8 on the placement surface 3a. Further, when the holder 42 is lowered in the vertical direction, the back surface 8b of the chip 8 is pushed by the needle tip 41a, and the chip 8 can be peeled off and dropped from the sheet 2.

  The illumination unit 5 includes a light source (not shown) that emits illumination light L1, and emits illumination light L1 obliquely from above toward the window 3b of the placement surface 3a. The light source is a xenon lamp, a mercury lamp, an incandescent lamp, a fluorescent lamp, an LED or a laser. Among these, the LED light is particularly preferable because it is difficult for the LED light to cause the object to be heated to generate heat and the size and illumination range of the LED are suitable. The illumination light L1 may be directly applied to the sheet 2 and the chip array 7 positioned in the window 3b, and through an arbitrary illumination optical system (not shown) including optical elements such as a fiber, a prism, a mirror, a diaphragm, and a lens. May be irradiated. The illumination optical system is configured according to design conditions such as heat generation and dimensions of the light source.

  The color of the illumination light L1 may be white, but is more preferably a single color. As will be described later, since the white light L2 is used for the observation of the chip array 7 by the observation unit 6, it is easier to visually recognize the illumination light L1 in the image acquired by the observation unit 6 when the illumination light L1 is monochromatic light. Thus, the visibility of the light emitting line B (described later) can be improved. In addition, when the section A is stained with a pigment, the color of the illumination light L1 is preferably different from the color of the section A in order to ensure the visibility of the illumination light L1. For example, when the section A is HE-stained, the color of the illumination light L1 is preferably red, blue, or green.

  Here, a method for irradiating the chip array 7 with the illumination light L1 by the illumination unit 5 will be described in detail with reference to FIGS. FIG. 4A is a front view of the chip 8 for explaining the irradiation direction of the illumination light L1, and FIG. 4B is a side view of the chip 8 for explaining the irradiation angle of the illumination light L1. is there. In the following description, an orthogonal coordinate system is used in which two horizontal directions orthogonal to each other are an X direction and a Y direction, and a vertical direction is a Z direction. In particular, the horizontal direction of the mounting surface 3a of the stage 3 is the X direction, and the vertical direction is the Y direction.

  The illumination unit 5 is disposed obliquely above the stage 3 and irradiates the window 3b with illumination light L1 from a direction of 45 ° on the XY plane, as shown in FIG. 4A. As shown in FIG. 3, the sheet 2 is placed on the placement surface 3a so that the row direction R and the column direction C of the chip array 7 are substantially parallel to the vertical direction and the horizontal direction of the stage 3, respectively. In this case, the illumination light L1 is applied to the adjacent side surfaces 8c and 8d of each chip 8.

  Here, the irradiation angle θ formed by the mounting surface 3a and the optical axis of the illumination light L1 in the Z plane including the optical axis of the illumination light L1 is the same as that of the chip 8 as shown in FIG. 4B. The angle is set such that the light is incident inward from the side surfaces 8c and 8d and at least a part of the illumination light L1 is reflected on the front surface 8a and the back surface 8b of the chip 8. As a result, the illumination light L1 that has entered the chip 8 from the side surfaces 8c and 8d advances in the chip 8 in a substantially diagonal direction while repeating reflection on the front surface 8a and the back surface 8b, and the other two adjacent sides. The light is emitted from the side surfaces 8e and 8f. Similarly, part of the illumination light L1 incident on the chip 8 from the back surface 8b proceeds in a substantially diagonal direction in the chip 8 while repeating reflection on the front surface 8a and the back surface 8b. The light is emitted from 8f. As shown in FIG. 1, the illumination light L1 irradiated obliquely from above passes through the sheet 2, but the irradiation angle of the irradiation light L1 does not change at this time.

  The two side surfaces 8e and 8f from which the illumination light L1 is emitted shine. When the chip array 7 is viewed in the Z direction as shown in FIG. 4A, the illumination light is irradiated on two adjacent sides corresponding to the side surfaces 8e and 8f. A bright line (light emission line) B of L1 appears. Such an irradiation angle θ can be calculated from the so-called Snell's law using the refractive index of air and the refractive index of the chip 8.

  The observation unit 6 takes an image of the chip array 7 at the position of the window 3b with an imaging device (not shown) and sends the acquired image to a display unit (not shown). The observation unit 6 is held on the movable table 11 together with the collection container 10 for collecting the chips 8, and the observation unit 6 and the collection container 10 are selected by moving the movable table 11 in the horizontal direction. Thus, it can be arranged directly below the window 3b.

  Reference numeral 9 denotes an illuminator provided in the observation unit 6. The illuminator 9 includes, for example, a plurality of LEDs arranged in an annular shape, and uniformly irradiates the chip array 7 with the white light L2. The observation unit 6 is disposed at a position where the illumination light L1 that has passed through the sheet 2 and the chip 8 does not directly hit. When the illumination light L1 directly hits the observation unit 6, the strong illumination light L1 is incident on the image sensor, and there is a possibility that disturbance such as halation or smear occurs in the image.

Next, the operation of the chip recovery apparatus 1 configured as described above will be described.
In order to collect the chip 8 to which a desired fragment A ′ is adhered from the chip array 7 on the sheet 2 using the chip collection apparatus 1 according to the present embodiment, first, the sheet is brought into the state shown in FIG. 2 is placed on the placement surface 3 a of the stage 3. In order to stabilize the position of the sheet 2 on the placement surface 3a, the end of the sheet 2 may be fixed to the placement surface 3a by using a clip or the like not shown.

  Next, the tip array 7 is observed by the observation unit 6, and the needle 41 is arranged directly above the desired tip 8 by moving the holder 42 in the horizontal direction. Next, instead of the observation unit 6, the collection container 10 is disposed directly below the window 3b, and then the holder 42 is lowered so that the desired back surface 8b of the chip 8 is pushed by the needle tip 41a, and the chip 8b is moved to the sheet. Remove from 2 and drop. Thereby, the desired chip 8 is recovered in the recovery container 10.

  Since the chip 8 collected in the collection container 10 is minute and transparent, it is difficult to confirm with the naked eye. Further, even when the desired chip 8 remains on the sheet 2, it is difficult to confirm the presence or absence of the desired chip 8 on the sheet 2 with the naked eye. It is also difficult to confirm. This is because the observation unit 6 uses epi-illumination that does not cause shadows of the subject in the image, and the white light L2 passes through the chip 8 with almost no reflection on the surface of the transparent chip 8. is there.

  Therefore, in the present embodiment, the observation unit 6 is again arranged directly below the window 3b, the illumination unit 5 is turned on, and the illumination light L1 is irradiated onto the chip array 7 by the above-described illumination method. Thereby, substantially L-shaped light emission lines B are generated at positions corresponding to two adjacent sides of each chip 8, and a large number of light emission lines B arranged regularly are observed by the observation unit 6. The white light L2 of the observation unit 6 may be turned off so that the light emission line B can be visually recognized more clearly in the image acquired by the observation unit 6.

  When the desired chip 8 is completely peeled off from the sheet 2 and dropped, the light emitting line B is missing at the place where the chip 8 is attached, so that the user can easily trace the trace of the chip 8. Can be found.

  On the other hand, if the desired chip 8 remains on the sheet 2 without completely peeling from the sheet 2, the desired chip 8 is only one of many regularly arranged chips 8. Arrangement is irregular or the direction and inclination are different. At this time, even if the desired chip 8 remains on the sheet 2 in any direction and inclination, the illumination light L1 is incident on at least one of the four side surfaces, and at least one light emitting line B Will occur. That is, only one light emission line B or a set of light emission lines B having different orientations and intensities are present among a number of light emission lines B regularly arranged. Therefore, the user can easily notice the desired chip 8 that remains on the sheet 2 and has not been recovered.

  As described above, according to the present embodiment, the user easily and surely checks whether or not the desired chip 8 that should have been collected remains on the sheet 2, and based on this, the desired chip 8 is There is an advantage that it can be surely confirmed whether or not it has been collected in the collection container 10.

  In the present embodiment, the illumination light L1 is irradiated from the direction of 45 ° in the XY plane so that the irradiation amount of the illumination light L1 to each of the two adjacent side surfaces of the chip 8 becomes equal. However, the irradiation direction of the illumination light L1 is not limited to this, and the illumination light L1 may be irradiated from other directions as long as it is from a direction intersecting both two adjacent sides of the chip 8.

In the present embodiment, only one illumination unit 5 is used, but the number of illumination units 5 is not limited to this. For example, two illumination units 5 may be used to irradiate the illumination light L1 in the X direction and the Y direction on the two adjacent sides 8c and 8d of the chip 8, respectively. Even in this way, the same light emission line B as in FIG. 4A is obtained.
Further, the light emission line B may be obtained on all the four side surfaces 8c, 8d, 8c, and 8d of the chip 8. For example, two illumination units 5 may be used to irradiate the illumination light L1 on the four side surfaces 8c, 8d, 8c, and 8d of the chip 8 from the 45 ° direction and the 225 ° direction on the XY plane.

Further, when two or more illumination units 5 are used, the colors of the illumination light L1 emitted from each illumination unit 5 may be different from each other. The amount of each illumination light L1 incident on the chip 8, that is, the ratio of the two colors, differs depending on the direction and angle of the chip 8 remaining in the sheet 2 that has failed to be collected. Changes. Therefore, it is possible to more easily find the chip 8 on the sheet 2 that has not been collected.
Moreover, the illumination part 5 may blink the illumination light L1. By doing in this way, the visibility of the light emission line B can further be improved.

In the present embodiment, the illumination unit 5 and the observation unit 6 are arranged on the opposite sides of the stage 3, but instead, as shown in FIG. May be arranged on the same side.
In this case, the illumination unit 5 is arranged outside the field of view of the observation unit 6. Alternatively, an illuminator 9 provided in the observation unit 6 may be used as the illumination unit 5. For example, the illuminator 9 may include an LED that emits light at an appropriate irradiation angle θ, and may be configured to be able to switch the LED to be lit between normal observation and confirmation of the chip 8 after punching. .

Moreover, in this embodiment, the illumination part 5 and the observation part 6 may operate | move synchronously. For example, the observation unit 6 may acquire a still image at the same time when the illumination unit 5 emits the illumination light L1. Furthermore, the emission of the illumination light L1 from the illumination unit 5 may be performed by a user operation.
By doing in this way, when the illumination light L1 is irradiated to the chip | tip arrangement | sequence 7, and the image when it is not irradiated are acquired, the light emission line B is compared by comparing the acquired two images. It can be evaluated more accurately.

  Further, image processing may be appropriately performed on the acquired image. For example, a difference image between two acquired images may be generated. Since the difference image is an image obtained by extracting the light emission line B from the image acquired when the illumination light L1 is irradiated, the light emission line B can be visually recognized more clearly. Further, an area where the chip 8 is missing or an area where the chip 8 is irregularly arranged may be automatically determined based on the arrangement pattern of the light emitting lines B in the difference image.

Next, an embodiment of the above-described chip collection apparatus 1 will be described below with reference to FIGS.
In this example, as the sheet 2, a transparent vinyl chloride dicing sheet (UE-111AJ, manufactured by Nitto Denko Corporation) having a thickness of 0.13 mm to 0.17 mm was used. The sheet was held in an extended state by a grip ring having a diameter of 40 mm. A 0.42 mm square glass substrate was used as the chip 8. As section A, a tissue section of a rat liver having a thickness of 20 μm was used.

  As the illumination unit 5, LEDs that emit green light (HLV-24GR-1220-3W, manufactured by CCS) and LEDs that emit red light (HLV-24RD-1220, manufactured by CCS) are used, and these LEDs are used. As a power source, a controller (PJ-1505-3CA, manufactured by CCS) was used. The green light and red light, which are the illumination light L1, were applied to the sheet at an irradiation angle of 30 ° obliquely from above. However, the irradiation directions of the green light and the red light were parallel to the X direction and the Y direction, respectively, one of the side surfaces of two adjacent sides of the chip was irradiated with green light, and the other was irradiated with red light. In this example, the irradiation angle θ at which a clear light emission line B was observed was 15 ° to 70 °.

  A digital microscope (Dino-Lite AD413T, manufactured by AnMo Electronics) was used as the observation unit 6. This digital microscope includes an objective lens, a 1 / 4-inch CMOS image sensor that captures light collected by the objective lens, and eight white LEDs arranged in a ring so as to surround the tip of the objective lens. The white light from the white LED is scattered by the resin diffusion plate.

  FIGS. 6A and 6B are examples of an image of the chip arrangement obtained by the chip collecting apparatus of the present embodiment. 6A shows a state in which only white light is irradiated, and FIG. 6B shows a state in which illumination light is also irradiated together with white light. In FIG. 6B, the illumination light irradiation direction is a direction from left to right and from bottom to top. In FIGS. 6A and 6B, three white arrows indicate traces of the collected chips. In FIG. 6A, the outline of the chip is unclear and it is difficult to visually recognize the trace of the chip. On the other hand, in FIG. 6B, two sides of each chip (right side and upper side in the figure) shine brightly, so that each chip can be clearly seen and the trace of the chip is also clear. Can be confirmed.

7 to 9 are other examples of the chip array image obtained by the chip collecting apparatus of this embodiment. 7 to 9, (a) shows a state where only white light is irradiated, and (b) shows a state where illumination light is also irradiated together with white light.
7A and 7B are observations of traces of three chips (see white arrows). In FIG. 7B, the individual chips can be clearly seen and the traces of the chips can be clearly confirmed as compared with FIG. 7A.

  FIGS. 8A and 8B are obtained by observing one chip (see the white arrow) remaining on the sheet that was struck by the needle. In FIG. 8B, it is possible to clearly observe the chip that has failed to be collected, compared to FIG. 8A. In particular, in FIG. 8B, the upper side surface of the chip that was not collected is very bright. As described above, when the chip is rotated or tilted with respect to the sheet, the irradiation direction and the irradiation angle of the illumination light with respect to the chip are also changed, and thus it is understood that the thickness and brightness of the light emitting line are clearly changed. .

  FIGS. 9A and 9B are obtained by observing a chip (see white arrow) that overlaps another chip. Also in such a case, the chip can be clearly seen in FIG. 9B than in FIG. 9A, and the chip can be easily found.

1 chip collection device 2 sheet 3 stage (holding part)
3a Placement surface (predetermined plane)
3b Window 4 Punching part 41 Needle 41a Needle tip 42 Holder 5 Illumination part 6 Observation part 7 Chip arrangement 8 Chip 8a Front face (end face)
8b Back side (end face)
8c, 8d, 8e, 8f Side surface 9 Illuminator 10 Collection container 11 Movable base 12 Grip ring 12a Outer ring 12b Inner ring L1 Illumination light L2 White light A Section A 'Fragment B Light emission line

Claims (5)

A chip collecting device that collects a specific chip from a chip array composed of a plurality of rectangular chips that are translucent and regularly arranged two-dimensionally with a gap,
A holding unit for holding a sheet for supporting the chip arrangement on one surface thereof on a predetermined plane;
An illumination unit that irradiates illumination light obliquely to the sheet on the predetermined plane held by the holding unit;
An observation unit for observing the chip arrangement on the sheet held by the holding unit,
The illuminating unit has an illumination direction in which the illumination light is irradiated onto at least two adjacent side surfaces of the chip, and the other two sides when the illumination light enters the chip from the two side surfaces. The chip collection | recovery apparatus which irradiates the said illumination light with the irradiation angle radiate | emitted from the side surface. The chip array is composed of rectangular chips squarely arranged along two axial directions orthogonal to each other,
The chip collection device according to claim 1, wherein the illumination unit irradiates a single illumination light from a direction of 45 ° with respect to the biaxial direction. The chip array is composed of rectangular chips squarely arranged along two axial directions orthogonal to each other,
The chip collection device according to claim 1, wherein the illumination unit irradiates two illumination lights from the biaxial direction.   The chip collection device according to claim 1, wherein the illumination unit emits monochromatic light as the illumination light.   The chip collection device according to claim 1, wherein the illumination unit includes an LED.