JP2015203700A5 - - Google Patents

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Publication number
JP2015203700A5
JP2015203700A5 JP2015080148A JP2015080148A JP2015203700A5 JP 2015203700 A5 JP2015203700 A5 JP 2015203700A5 JP 2015080148 A JP2015080148 A JP 2015080148A JP 2015080148 A JP2015080148 A JP 2015080148A JP 2015203700 A5 JP2015203700 A5 JP 2015203700A5
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JP
Japan
Prior art keywords
order diffraction
objective lens
grating
light
transmissive
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JP2015080148A
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English (en)
Japanese (ja)
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JP2015203700A (ja
JP6313259B2 (ja
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Publication of JP2015203700A5 publication Critical patent/JP2015203700A5/ja
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JP2015080148A 2014-04-10 2015-04-09 光子放出のスペクトルマッピング Active JP6313259B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201461978173P 2014-04-10 2014-04-10
US61/978,173 2014-04-10

Publications (3)

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JP2015203700A JP2015203700A (ja) 2015-11-16
JP2015203700A5 true JP2015203700A5 (https=) 2018-04-05
JP6313259B2 JP6313259B2 (ja) 2018-04-18

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Family Applications (1)

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JP2015080148A Active JP6313259B2 (ja) 2014-04-10 2015-04-09 光子放出のスペクトルマッピング

Country Status (4)

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US (1) US9903824B2 (https=)
JP (1) JP6313259B2 (https=)
SG (1) SG10201502809YA (https=)
TW (1) TWI551856B (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG10201501966TA (en) 2014-03-13 2015-10-29 Dcg Systems Inc System and method for fault isolation by emission spectra analysis
US9903824B2 (en) 2014-04-10 2018-02-27 Fei Efa, Inc. Spectral mapping of photo emission
US10712667B2 (en) * 2016-12-14 2020-07-14 Asml Netherlands B.V. Optical device and associated system
US11294165B2 (en) * 2017-03-30 2022-04-05 The Board Of Trustees Of The Leland Stanford Junior University Modular, electro-optical device for increasing the imaging field of view using time-sequential capture
JP6954775B2 (ja) * 2017-06-29 2021-10-27 浜松ホトニクス株式会社 デバイス解析装置及びデバイス解析方法
CN112422796B (zh) * 2020-11-17 2023-04-07 维沃移动通信有限公司 摄像头结构、摄像控制方法、装置及电子设备
US12578383B2 (en) * 2021-12-20 2026-03-17 Battelle Memorial Institute Technologies for verifying and validating electronic devices using electroluminescence
US12536079B2 (en) * 2022-12-30 2026-01-27 Keysight Technologies, Inc. System for testing device under test using remote data center
EP4711747A1 (en) 2023-05-19 2026-03-18 Hamamatsu Photonics K.K. Inspection device and inspection method

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5208648A (en) 1991-03-11 1993-05-04 International Business Machines Corporation Apparatus and a method for high numerical aperture microscopic examination of materials
US5220403A (en) 1991-03-11 1993-06-15 International Business Machines Corporation Apparatus and a method for high numerical aperture microscopic examination of materials
US5940545A (en) 1996-07-18 1999-08-17 International Business Machines Corporation Noninvasive optical method for measuring internal switching and other dynamic parameters of CMOS circuits
US6621275B2 (en) 2001-11-28 2003-09-16 Optonics Inc. Time resolved non-invasive diagnostics system
US6891363B2 (en) * 2002-09-03 2005-05-10 Credence Systems Corporation Apparatus and method for detecting photon emissions from transistors
US6943572B2 (en) 2002-09-03 2005-09-13 Credence Systems Corporation Apparatus and method for detecting photon emissions from transistors
US7012537B2 (en) 2004-02-10 2006-03-14 Credence Systems Corporation Apparatus and method for determining voltage using optical observation
US7110172B2 (en) * 2004-02-27 2006-09-19 Hamamatsu Photonics K.K. Microscope and sample observation method
US7327452B2 (en) * 2004-08-09 2008-02-05 Credence Systems Corporation Light beam apparatus and method for orthogonal alignment of specimen
US20090002656A1 (en) 2007-06-29 2009-01-01 Asml Netherlands B.V. Device and method for transmission image detection, lithographic apparatus and mask for use in a lithographic apparatus
US20090147255A1 (en) 2007-12-07 2009-06-11 Erington Kent B Method for testing a semiconductor device and a semiconductor device testing system
JP5187843B2 (ja) * 2008-09-01 2013-04-24 浜松ホトニクス株式会社 半導体検査装置及び検査方法
SG10201401887YA (en) * 2009-05-01 2014-06-27 Dcg Systems Inc Systems and method for laser voltage imaging state mapping
US8988653B2 (en) 2009-08-20 2015-03-24 Asml Netherlands B.V. Lithographic apparatus, distortion determining method, and patterning device
JP2012037310A (ja) * 2010-08-05 2012-02-23 Renesas Electronics Corp 半導体集積回路の故障解析装置及び故障解析方法
SG10201501966TA (en) 2014-03-13 2015-10-29 Dcg Systems Inc System and method for fault isolation by emission spectra analysis
US9903824B2 (en) 2014-04-10 2018-02-27 Fei Efa, Inc. Spectral mapping of photo emission

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