JP2015201391A - 分析用電池 - Google Patents
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- JP2015201391A JP2015201391A JP2014080430A JP2014080430A JP2015201391A JP 2015201391 A JP2015201391 A JP 2015201391A JP 2014080430 A JP2014080430 A JP 2014080430A JP 2014080430 A JP2014080430 A JP 2014080430A JP 2015201391 A JP2015201391 A JP 2015201391A
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- 238000004458 analytical method Methods 0.000 title claims abstract description 42
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- 238000010894 electron beam technology Methods 0.000 claims abstract description 51
- 239000007787 solid Substances 0.000 claims abstract description 4
- 239000007773 negative electrode material Substances 0.000 claims description 80
- 239000007774 positive electrode material Substances 0.000 claims description 77
- 239000012528 membrane Substances 0.000 claims description 51
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- 229910052581 Si3N4 Inorganic materials 0.000 description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 10
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- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000005240 physical vapour deposition Methods 0.000 description 6
- 238000001020 plasma etching Methods 0.000 description 6
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- 238000006243 chemical reaction Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000007086 side reaction Methods 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 229910012851 LiCoO 2 Inorganic materials 0.000 description 3
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
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- 239000007795 chemical reaction product Substances 0.000 description 3
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- 239000011572 manganese Substances 0.000 description 3
- 239000012466 permeate Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- OIFBSDVPJOWBCH-UHFFFAOYSA-N Diethyl carbonate Chemical compound CCOC(=O)OCC OIFBSDVPJOWBCH-UHFFFAOYSA-N 0.000 description 2
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000012777 electrically insulating material Substances 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
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- 238000011065 in-situ storage Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910000625 lithium cobalt oxide Inorganic materials 0.000 description 2
- BFZPBUKRYWOWDV-UHFFFAOYSA-N lithium;oxido(oxo)cobalt Chemical compound [Li+].[O-][Co]=O BFZPBUKRYWOWDV-UHFFFAOYSA-N 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 2
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- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910012735 LiCo1/3Ni1/3Mn1/3O2 Inorganic materials 0.000 description 1
- 229910010707 LiFePO 4 Inorganic materials 0.000 description 1
- 229910015645 LiMn Inorganic materials 0.000 description 1
- 229910013290 LiNiO 2 Inorganic materials 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
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- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- IEJIGPNLZYLLBP-UHFFFAOYSA-N dimethyl carbonate Chemical compound COC(=O)OC IEJIGPNLZYLLBP-UHFFFAOYSA-N 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
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- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- BFDHFSHZJLFAMC-UHFFFAOYSA-L nickel(ii) hydroxide Chemical compound [OH-].[OH-].[Ni+2] BFDHFSHZJLFAMC-UHFFFAOYSA-L 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 239000011232 storage material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 150000003657 tungsten Chemical class 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/404—Cells with anode, cathode and cell electrolyte on the same side of a permeable membrane which separates them from the sample fluid, e.g. Clark-type oxygen sensors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/0203—Protection arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2002—Controlling environment of sample
- H01J2237/2003—Environmental cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2008—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated specially adapted for studying electrical or magnetical properties of objects
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Pathology (AREA)
- Secondary Cells (AREA)
- Cell Separators (AREA)
- Primary Cells (AREA)
- Cell Electrode Carriers And Collectors (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
前記第1ホルダ及び前記第2ホルダは、厚さ方向に貫通孔が形成された基板と、前記基板の一方の面から前記貫通孔を覆う電子線透過性の透過膜とをそれぞれ有し、前記基板の前記透過膜が設けられた側同士が向かい合うように重畳されることで重畳部を形成し、
前記重畳部では、内部空間が前記電解液を内包した状態でシールされ、且つ前記貫通孔同士が前記透過膜同士を介して対向することで、電子線を透過する観察窓を形成し、
前記観察窓の前記透過膜同士の間には、負極活物質及び正極活物質が互いに離間するとともに前記電解液と個別に接触するように設けられ、
前記負極活物質及び前記正極活物質の少なくとも一方と、前記観察窓の前記透過膜との間には、電子線透過性の固体からなる透過体が設けられることを特徴とする。
図1〜図4を参照しつつ、第1実施形態に係る分析用電池10について説明する。図1は、分析用電池10の概略全体斜視図である。図2は、図1のII−II線矢視断面図である。図3は、分析用電池10を構成する第1ホルダ12の透過膜14側の平面図である。図4は、分析用電池10を構成する第2ホルダ16の透過膜18側の平面図である。なお、以降の説明では、発明の理解を容易にするため、図1〜図4に示すX軸、Y軸、Z軸方向のうち、X軸方向を幅、Y軸方向を奥行き、Z軸方向を高さと定義する。また、上記のX軸、Y軸、Z軸方向の矢印の先端側を一端側、矢印の基端側を他端側ともいう。
第2実施形態に係る分析用電池92について、図33及び図34を参照しつつ説明する。図33は、分析用電池92について、図2と同様の視点で得られる断面図である。図34は、分析用電池92を構成する第1ホルダ12の透過膜14側の平面図である。なお、図33及び図34に示す構成要素のうち、図1〜図32Cに示す構成要素と同一又は同様の機能及び効果を奏するものに対しては、同一の参照符号を付し、詳細な説明を省略する。
第3実施形態に係る分析用電池98について、図35〜図38を参照しつつ説明する。図35は、分析用電池98の概略全体斜視図である。図36は、図35の分析用電池98のXXXVI−XXXVI線矢視断面図である。図37は、分析用電池98を構成する第1ホルダ100の透過膜14側の平面図である。図38は、分析用電池98を構成する第2ホルダ102の透過膜18側の平面図である。なお、図35〜図38に示す構成要素のうち、図1〜図34に示す構成要素と同一又は同様の機能及び効果を奏するものに対しては、同一の参照符号を付し、詳細な説明を省略する。
第4実施形態に係る分析用電池108について、図40を参照しつつ説明する。図40は、分析用電池108について、図2及び図36と同様の視点で得られる断面図である。なお、図40に示す構成要素のうち、図1〜図39に示す構成要素と同一又は同様の機能及び効果を奏するものに対しては、同一の参照符号を付し、詳細な説明を省略する。
11…スペーサ 12、100…第1ホルダ
14、18…透過膜 16、102…第2ホルダ
20…重畳部 22…シール
24、30、104、106…基板 26、32…貫通孔
28、34…被膜 36…観察窓
38…負極活物質 40…正極活物質
42、44…透過体 46…負極集電体
48…正極集電体 50…透過膜前駆体
52…被膜前駆体
54、60、70、78、88、90…フォトレジスト
56…集電体状部 58…集電体前駆体
62、64…透過体形成膜 66…スペーサ形成膜
68…第1スペーサ状部 72…負極活物質形成部
74…負極活物質前駆体 76…第2スペーサ状部
80…正極活物質形成部 82…正極活物質前駆体
84…第3スペーサ状部 86…第3スペーサ状部前駆体
94、96…遮断膜
Claims (4)
- 互いの間に電解液が介在するよう重畳された第1ホルダと第2ホルダとを有し、電子線を透過させて分析を行うための分析用電池であって、
前記第1ホルダ及び前記第2ホルダは、厚さ方向に貫通孔が形成された基板と、前記基板の一方の面から前記貫通孔を覆う電子線透過性の透過膜とをそれぞれ有し、前記基板の前記透過膜が設けられた側同士が向かい合うように重畳されることで重畳部を形成し、
前記重畳部では、内部空間が前記電解液を内包した状態でシールされ、且つ前記貫通孔同士が前記透過膜同士を介して対向することで、電子線を透過する観察窓を形成し、
前記観察窓の前記透過膜同士の間には、負極活物質及び正極活物質が互いに離間するとともに前記電解液と個別に接触するように設けられ、
前記負極活物質及び前記正極活物質の少なくとも一方と、前記観察窓の前記透過膜との間には、電子線透過性の固体からなる透過体が設けられることを特徴とする分析用電池。 - 請求項1記載の分析用電池において、
前記負極活物質及び前記正極活物質と、前記透過体とは、前記第1ホルダに設けられることを特徴とする分析用電池。 - 請求項1記載の分析用電池において、
前記負極活物質は、前記第1ホルダに設けられ、
前記正極活物質は、前記第2ホルダに設けられ、
前記透過体は、前第1ホルダ及び前記第2ホルダの少なくとも一方に設けられることを特徴とする分析用電池。 - 請求項1〜3のいずれか1項に記載の分析用電池において、
前記重畳部の内部で前記負極活物質及び前記正極活物質のそれぞれと電気的に接続され、且つ前記重畳部の内部から延在して外部に露出する正極集電体及び負極集電体をさらに有し、
前記負極集電体及び前記正極集電体の少なくとも一方には、前記重畳部内で、前記電解液と接触することを遮断する遮断膜が設けられていることを特徴とする分析用電池。
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JP2014080430A JP5993891B2 (ja) | 2014-04-09 | 2014-04-09 | 分析用電池 |
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JP5956498B2 (ja) * | 2014-04-09 | 2016-07-27 | 本田技研工業株式会社 | 分析用電池 |
JP6104857B2 (ja) * | 2014-08-19 | 2017-03-29 | 本田技研工業株式会社 | 分析用電池 |
JP6471070B2 (ja) * | 2015-08-26 | 2019-02-13 | 本田技研工業株式会社 | 分析用電池 |
KR102220901B1 (ko) * | 2016-12-16 | 2021-02-26 | 삼성에스디아이 주식회사 | 전지 관찰용 지그 |
US10921268B1 (en) * | 2019-09-09 | 2021-02-16 | Fei Company | Methods and devices for preparing sample for cryogenic electron microscopy |
US12044646B2 (en) * | 2021-05-14 | 2024-07-23 | Taiwan Semiconductor Manufacturing Company Ltd. | Fluid sensor system |
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JP2014186877A (ja) * | 2013-03-25 | 2014-10-02 | Honda Motor Co Ltd | 分析用電池 |
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