JP2015175502A5 - - Google Patents
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- Publication number
- JP2015175502A5 JP2015175502A5 JP2014054756A JP2014054756A JP2015175502A5 JP 2015175502 A5 JP2015175502 A5 JP 2015175502A5 JP 2014054756 A JP2014054756 A JP 2014054756A JP 2014054756 A JP2014054756 A JP 2014054756A JP 2015175502 A5 JP2015175502 A5 JP 2015175502A5
- Authority
- JP
- Japan
- Prior art keywords
- fluid control
- control device
- joint members
- flow path
- support mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims 12
- 230000001808 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014054756A JP6347969B2 (ja) | 2014-03-18 | 2014-03-18 | 流体制御装置および流体制御装置用継手部材 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014054756A JP6347969B2 (ja) | 2014-03-18 | 2014-03-18 | 流体制御装置および流体制御装置用継手部材 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2015175502A JP2015175502A (ja) | 2015-10-05 |
JP2015175502A5 true JP2015175502A5 (es) | 2016-11-24 |
JP6347969B2 JP6347969B2 (ja) | 2018-06-27 |
Family
ID=54254863
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014054756A Active JP6347969B2 (ja) | 2014-03-18 | 2014-03-18 | 流体制御装置および流体制御装置用継手部材 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6347969B2 (es) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102149689B1 (ko) | 2016-06-21 | 2020-08-31 | 가부시키가이샤 후지킨 | 유체제어장치 |
US10830367B2 (en) * | 2016-06-21 | 2020-11-10 | Fujikin Incorporated | Fluid control system |
KR102237047B1 (ko) | 2017-05-31 | 2021-04-08 | 가부시키가이샤 후지킨 | 밸브 장치 및 유체제어장치 |
JP7207761B2 (ja) | 2018-02-28 | 2023-01-18 | 株式会社フジキン | バルブ装置および流体制御装置 |
JPWO2020090521A1 (ja) | 2018-10-31 | 2021-09-16 | 株式会社フジキン | 流体制御装置および流体制御装置の製造方法 |
KR102584075B1 (ko) | 2018-12-27 | 2023-10-04 | 가부시키가이샤 후지킨 | 유체 제어장치, 조인트 블록 및 유체 제어장치의 제조방법 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3482601B2 (ja) * | 2000-06-30 | 2003-12-22 | 東京エレクトロン株式会社 | 流体制御装置 |
JP2002130479A (ja) * | 2000-10-23 | 2002-05-09 | Tokyo Electron Ltd | 集積化流体供給装置及びこれに用いるシール材及びこれを用いた半導体製造装置 |
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2014
- 2014-03-18 JP JP2014054756A patent/JP6347969B2/ja active Active
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