JP2015175502A5 - - Google Patents

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Publication number
JP2015175502A5
JP2015175502A5 JP2014054756A JP2014054756A JP2015175502A5 JP 2015175502 A5 JP2015175502 A5 JP 2015175502A5 JP 2014054756 A JP2014054756 A JP 2014054756A JP 2014054756 A JP2014054756 A JP 2014054756A JP 2015175502 A5 JP2015175502 A5 JP 2015175502A5
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JP
Japan
Prior art keywords
fluid control
control device
joint members
flow path
support mechanism
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Application number
JP2014054756A
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English (en)
Japanese (ja)
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JP2015175502A (ja
JP6347969B2 (ja
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Priority to JP2014054756A priority Critical patent/JP6347969B2/ja
Priority claimed from JP2014054756A external-priority patent/JP6347969B2/ja
Publication of JP2015175502A publication Critical patent/JP2015175502A/ja
Publication of JP2015175502A5 publication Critical patent/JP2015175502A5/ja
Application granted granted Critical
Publication of JP6347969B2 publication Critical patent/JP6347969B2/ja
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JP2014054756A 2014-03-18 2014-03-18 流体制御装置および流体制御装置用継手部材 Active JP6347969B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014054756A JP6347969B2 (ja) 2014-03-18 2014-03-18 流体制御装置および流体制御装置用継手部材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014054756A JP6347969B2 (ja) 2014-03-18 2014-03-18 流体制御装置および流体制御装置用継手部材

Publications (3)

Publication Number Publication Date
JP2015175502A JP2015175502A (ja) 2015-10-05
JP2015175502A5 true JP2015175502A5 (enrdf_load_stackoverflow) 2016-11-24
JP6347969B2 JP6347969B2 (ja) 2018-06-27

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ID=54254863

Family Applications (1)

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JP2014054756A Active JP6347969B2 (ja) 2014-03-18 2014-03-18 流体制御装置および流体制御装置用継手部材

Country Status (1)

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JP (1) JP6347969B2 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6681630B2 (ja) * 2016-06-21 2020-04-15 株式会社フジキン 流体制御装置
KR102152822B1 (ko) 2016-06-21 2020-09-07 가부시키가이샤 후지킨 유체제어장치
KR102237047B1 (ko) 2017-05-31 2021-04-08 가부시키가이샤 후지킨 밸브 장치 및 유체제어장치
US11339881B2 (en) 2018-02-28 2022-05-24 Fujikin Incorporated Valve device and fluid control device
JP7544378B2 (ja) 2018-10-31 2024-09-03 株式会社フジキン 流体制御装置および流体制御装置の製造方法
CN113227623A (zh) 2018-12-27 2021-08-06 株式会社富士金 流体控制装置、接头块和流体控制装置的制造方法
CN115839480A (zh) * 2022-11-25 2023-03-24 中科艾尔(北京)科技有限公司 一种特气柜

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3482601B2 (ja) * 2000-06-30 2003-12-22 東京エレクトロン株式会社 流体制御装置
JP2002130479A (ja) * 2000-10-23 2002-05-09 Tokyo Electron Ltd 集積化流体供給装置及びこれに用いるシール材及びこれを用いた半導体製造装置

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