JP2015169648A - Functional element, electronic device, physical quantity detection apparatus, electronic apparatus, and mobile body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electronic device improved in impact resistance while preventing the breakage of a functional element generated by concentration of stress in the case of application of impact.SOLUTION: A gyro element 2 comprises a vibration body 4, beams (first to fourth beams 61, 62, 63 and 64) extending from the vibration body 4, and support parts (a first support part 51 and a second support part 52) connected to the beams and supporting the vibration body 4. The beams are provided with a first curved portion 57 bent in a major arc shape between the vibration body 4 and the support parts and having an opening portion which opens at one side.

Description

  The present invention relates to a functional element, an electronic device, a physical quantity detection device, an electronic apparatus, and a moving body.

  Conventionally, a so-called “H-type” gyro element is known as a functional element for detecting angular velocity (see, for example, Patent Document 1). As an example, the gyro element disclosed in Patent Document 1 will be described. The gyro element disclosed in Patent Document 1 includes a base located at the center, a pair of drive arms extending from the base to one side, and a base on the opposite side across the drive arm and the base. And a detection arm extending from. In addition, a pair of support arms that are connected to each other via a curved portion with a base interposed therebetween are provided on opposite sides other than the sides on which the drive arm and the detection arm extend. The pair of support arms are connected to a fixing portion where the gyro element is fixed to the base.

JP 2011-75415 A

  In the gyro element as described above, the drive arm and the detection arm provided with the base interposed therebetween are connected to the fixed portion by the support portion via the bending portion. As described above, since the support portion is provided with the bending portion, when an impact such as dropping is applied to the gyro element from the outside, the bending portion bends and can exhibit a buffering action. However, in the above gyro element, since the arc shape of the bending portion is accommodated inside the width of the opening of the bending portion, the circumferential length of the bending portion is shortened, and stress concentration is likely to occur when an impact is applied. There was a risk of becoming. Therefore, in the above-described gyro element, there is a possibility that the support portion is destroyed due to the stress concentration.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A functional element according to this application example includes a vibrating body, a beam extending from the vibrating body, and a support unit that is connected to the beam and supports the vibrating body. The beam includes a first curved portion that has an opening that is open on one side between the vibrating body and the support portion and is bent in a dominant arc shape.

  According to this application example, the first curved portion provided in a dominant arc shape is provided on the beam connecting the vibrating body and the support portion. In this way, since the first arc-shaped curved portion having an opening is provided in the beam, the curved line can be formed into an arc shape, the stress when an impact is applied is dispersed, and stress concentration occurs. It becomes difficult. This makes it possible to provide a functional element with improved impact resistance.

  Application Example 2 In the functional element according to the application example described above, the beam has an opening portion that is open to the other side different from the one between the vibrating body and the support portion. It is preferable to include a second curved portion bent in a dominant arc shape continuously with one end of the curved portion.

  According to this application example, the first curved portion provided in a dominant arc shape on the beam connecting the vibrating body and the support portion, and the second curved portion provided in a dominant arc shape continuously with the first curved portion. Is provided. Thus, since the 1st curve part and the 2nd curve part have an opening part and are continuously provided in the dominant arc shape, the circular arc shape of the curve can be enlarged, and when an impact is applied Stress is dispersed and stress concentration is less likely to occur. This makes it possible to provide a functional element with improved impact resistance.

  In the description according to the present invention, the word “super arc” is, for example, a part of the circumference, and when the circumference is divided into two parts at two points on the circumference, the length is the whole circle. It is used as the one larger than half the circumference. In addition, the “circumference” in the description of the present invention includes not only a perfect circle but also a form that is curved in a generally arcuate shape.

  Application Example 3 In the functional element according to the application example described above, at least one of the first curved portion and the second curved portion is located on the side opposite to the opening from the width dimension of the beam on the opening side. It is preferable that the beam has a large width dimension.

  According to this application example, stress concentration is likely to occur when an impact is applied, and the width of the beam on the side opposite to the opening is large, so that the strength of the beam in this part can be increased, and breakage is less likely to occur. It becomes possible to do.

  Application Example 4 In the functional element according to the application example described above, the beam has a width of the connection portion of at least one of the connection portion with the base and the connection portion with the support portion. It is preferably larger than the width of the part.

  According to this application example, since the connection portion between the beam and the base portion or the support portion is provided with a large width, the strength of the connection portion where stress concentration easily occurs can be increased. Thereby, it becomes possible to prevent the vibrating body supported by the beam from being damaged by an impact such as dropping.

  Application Example 5 In the functional element according to the application example described above, it is preferable that the first curved portion and the second curved portion have the respective opening portions opened along the same axial direction.

  According to this application example, since the first curved portion and the second curved portion can be arranged side by side, the arrangement space can be reduced. This makes it possible to reduce the size of the functional element.

  Application Example 6 In the functional element according to the application example described above, the vibration body includes a base, and a first detection vibration arm and a first drive vibration arm that extend from the base along the first direction. It is preferable that the support portion is provided along a second direction that intersects the first direction.

  According to this application example, the vibrating body is connected to the support portion by the beam provided with the first curved portion and the second curved portion. As a result, the stress generated from the vibrating body to the beam can be relaxed by the first curved portion and the second curved portion, and damage due to impact can be prevented.

  Application Example 7 In the functional element according to the application example described above, the vibrating body includes a base, a first detection vibrating arm and a second detection vibrating arm that extend from the base to both sides along a first direction. The first drive vibrating arm and the third drive vibrating arm extending along the first direction from the base to both sides, the first drive vibrating arm and the third drive vibrating arm, and the first detection vibrating arm And a second drive vibrating arm and a fourth drive vibrating arm that are located on the opposite side of the second detection vibrating arm and extend from the base to both sides along the first direction, Comprises a first support part and a second support part that are arranged opposite to each other along the first direction across the vibrating body and extend in a second direction that intersects the first direction, A beam extends from the base and is between the first detection vibrating arm and the first drive vibrating arm. A first beam passing through, extending from the base, a second beam passing between the first detection vibrating arm and the second drive vibrating arm, and extending from the base, the second detection vibrating arm and the first It is preferable to include a third beam passing between the third drive vibrating arm and a fourth beam extending from the base and passing between the second detection vibrating arm and the fourth drive vibrating arm. .

  According to this application example, the first curved portion and the second curved portion are provided in each of the first to fourth beams. In addition, the vibrating body is connected to each of the first support portion and the second support portion arranged to face each other by the first beam and the second beam, and the third beam and the fourth beam. As a result, the stress generated from the vibrating body to the beam can be relaxed by the first curved portion and the second curved portion, and damage due to impact can be prevented.

  Application Example 8 An electronic device according to this application example includes the functional element according to any one of the application examples described above and a base, and the functional element is mounted on the base. .

  According to this application example, an electronic device with improved impact resistance can be provided.

  Application Example 9 A physical quantity detection device according to this application example is based on the functional element according to Application Example 6 or Application Example 7, a drive circuit that drives the functional element, and a detection signal from the functional element. And a detection circuit for detecting the physical quantity.

  According to this application example, it is possible to provide a physical quantity detection device that can improve impact resistance and detect a stable physical quantity.

  Application Example 10 An electronic apparatus according to this application example includes the functional element described in any one of the application examples described above.

  According to this application example, it is possible to provide an electronic device with stable performance because it has a functional element with improved impact resistance and stable characteristics.

  Application Example 11 A moving object according to this application example includes the functional element described in any one of the application examples described above.

  According to this application example, since the impact resistance is improved and the functional element having a stable characteristic is provided, it is possible to provide a moving body having a stable performance.

1 shows an embodiment of an electronic device according to the present invention, where (a) is a plan view and (b) is a front sectional view. The top view which shows 1st Embodiment of the gyro element as a functional element with which an electronic device is provided. (A), (b) is a top view explaining the drive of the gyro element of 1st Embodiment. The top view which shows 2nd Embodiment of the gyro element as a functional element with which an electronic device can be equipped. (A), (b) is a perspective view explaining the drive of the gyro element of 2nd Embodiment. The partial top view which shows the modification 1 of the bending part in a beam part. The fragmentary top view which shows the modification 2 of the bending part in a beam part. Schematic which shows the structure of a physical quantity detection apparatus. The perspective view which shows the structure of the mobile type personal computer as an example of an electronic device. The perspective view which shows the structure of the mobile telephone as an example of an electronic device. The perspective view which shows the structure of the digital still camera as an example of an electronic device. The perspective view which shows the structure of the motor vehicle as an example of a mobile body.

Hereinafter, functional elements of the present invention and electronic devices, electronic devices, and moving objects using the functional elements will be described in detail based on embodiments shown in the accompanying drawings.
<Embodiment>
First, embodiments of a functional element and an electronic device according to the present invention will be described.

  1A and 1B are diagrams showing an embodiment of an electronic device according to the present invention, in which FIG. 1A is a plan view seen through a lid (lid 92), and FIG. 1B is a front sectional view. FIG. 2 is a plan view showing a first embodiment of a gyro element included in the electronic device shown in FIG. FIG. 3 is a plan view for explaining driving of the gyro element of the first embodiment. FIG. 4 is a plan view showing a second embodiment of a gyro element that can be included in the electronic device shown in FIG. 1. FIG. 5 is a perspective view for explaining driving of the gyro element of the second embodiment. Moreover, in each figure, in order to make it intelligible, the dimension ratio of each component differs from actual.

  In the following, as shown in FIG. 1, the three axes orthogonal to each other are referred to as an X axis, a Y axis, and a Z axis, and the Z axis coincides with the thickness direction of the electronic device. A direction parallel to the X axis is referred to as an “X axis direction (a positive X axis direction is the second direction, a negative X axis direction is the fourth direction)”, and a direction parallel to the Y axis is the “Y axis direction (plus Y direction). The axial direction is referred to as the first direction, the negative Y-axis direction is the third direction), and the direction parallel to the Z-axis is referred to as the “Z-axis direction”. In addition, in the following, when the word “super arc” or “super arc” is a part of the circumference, for example, when the circumference is divided into two parts at two points on the circumference, the length is all It is used as the one larger than half the circumference. In addition, the “circumference” in the following description includes not only a perfect circle but also a shape that is curved in a generally arcuate shape.

  An electronic device 1 shown in FIG. 1 shows a gyro sensor (angular velocity sensor) including a gyro element 2 as an example of a functional element. An electronic device 1 shown in FIG. 1 includes a gyro element 2 and a package 9 that houses the gyro element 2. Hereinafter, the gyro element 2 and the package 9 will be sequentially described in detail.

(First Embodiment of Gyro Element)
FIG. 2 is a top view of the gyro element (first embodiment) as viewed from above (the lid 92 side). The gyro element includes a detection signal electrode, a detection signal wiring, a detection signal terminal, a detection ground electrode, a detection ground wiring, a detection ground terminal, a drive signal electrode, a drive signal wiring, a drive signal terminal, a drive ground electrode, and a drive ground wiring. In addition, a driving ground terminal and the like are provided, but are omitted in the figure.

  The gyro element 2 as a functional element is a sensor that detects an angular velocity around the Z axis, and is composed of a base material and a plurality of electrodes, wires, and terminals provided on the surface of the base material, although not shown. ing. The gyro element 2 can be made of a piezoelectric material such as quartz, lithium tantalate, or lithium niobate. Among these, it is preferable that the gyro element 2 is made of quartz. Thereby, the gyro element 2 which can exhibit the outstanding vibration characteristic (frequency characteristic) is obtained. Such a gyro element 2 includes a so-called double T-shaped vibrating body 4, a first support portion 51 and a second support portion 52 as support portions for supporting the vibrating body 4, and the vibrating body 4 and the support portion. And a connecting beam. In the present embodiment, the beam includes a first beam 61 and a second beam 62 that connect the vibrating body 4 and the first support portion 51, a third beam 63 that connects the vibrating body 4 and the second support portion 52, and 4th beam 64 is included.

  The vibrating body 4 has an extension in the XY plane and has a thickness in the Z-axis direction. Such a vibrating body 4 includes a base 41 located at the center, a first detection vibrating arm 421 and a second detection vibrating arm 422 extending from the base 41 to both sides along the Y-axis direction, and an X from the base 41. A first connecting arm 431 and a second connecting arm 432 extending on both sides along the axial direction, and a first drive vibrating arm extending on both sides along the Y-axis direction from the tip of the first connecting arm 431 441 and the third drive vibrating arm 442, and a second drive vibrating arm 443 and a fourth drive vibrating arm 444 extending from the tip of the second connecting arm 432 to both sides along the Y-axis direction. ing. The first detection vibration arm 421, the second detection vibration arm 422, the first drive vibration arm 441, the second drive vibration arm 443, the third drive vibration arm 442, and the fourth drive vibration arm 444 are respectively provided at the distal ends thereof. Weight portions (hammer heads) 425, 426, 445, 447, 446, and 448 are provided as wide portions of a substantially square shape that is wider than the end side. By providing such weight parts 425, 426, 445, 447, 446, 448, the detection sensitivity of the angular velocity of the gyro element 2 is improved, and the first and second detection vibrating arms 421, 422, and the first, first The lengths of the second, third, and fourth drive vibrating arms 441, 443, 442, and 444 can be shortened.

The first drive vibrating arm 441 and the third drive vibrating arm 442 may extend from the middle of the extending direction of the first connecting arm 431. Similarly, the second drive vibrating arm 443 and the fourth drive vibrating arm. 444 may extend from the middle of the extending direction of the second connecting arm 432.
In the present embodiment, the first connecting arm 431 extending from the base 41, the first connecting vibrating arm 441, the third driving vibrating arm 442, the second driving vibrating arm 443, and the fourth connecting arm 432 to the fourth connecting arm 432 are provided. Although the driving vibration arm 444 has been described as extending, the base 41, the first connecting arm 431, and the second connecting arm 432 may be used as the base. That is, a configuration in which the first drive vibration arm, the second drive vibration arm, the third drive vibration arm, and the fourth drive vibration arm extend from the base is also possible.

  The support part includes at least one of the first support part and the second support part. The support part in the present embodiment includes a first support part 51 and a second support part 52. The first support portion 51 and the second support portion 52 each extend along the X-axis direction, and the vibrating body 4 is located between the first support portion 51 and the second support portion 52. Yes. In other words, the first support portion 51 and the second support portion 52 are disposed so as to face each other along the Y-axis direction with the vibrating body 4 interposed therebetween. The first support 51 is connected to the base 41 via the first beam 61 and the second beam 62, and the second support 52 is connected to the base 41 via the third beam 63 and the fourth beam 64. It is connected with.

  The first beam 61 and the second beam 62 are provided with a bent portion 50 between the base portion 41 and the first support portion 51. Further, the third beam 63 and the fourth beam 64 are provided with a bent portion 50 between the base portion 41 and the second support portion 52. Each bent portion 50 includes a first curved portion 57 and a second curved portion 58 continuously connected to the first curved portion 57. Hereinafter, the first beam 61 and the second beam 62, and the third beam 63 and the fourth beam 64 will be specifically described.

  The first beam 61 extends from the base 41 in the plus X-axis direction, and then opens toward the first detection vibrating arm 421 between the first detection vibrating arm 421 and the first drive vibrating arm 441. The first curved portion 57 bent in a curved line with a dominant arc shape, and the first curved portion 57 continued from the first curved portion 57 and curved toward the first drive vibrating arm 441 in a curved manner. And a bent second curved portion 58. The first beam 61 extends from the second curved portion 58 and passes between the first detection vibrating arm 421 and the first drive vibrating arm 441 and is connected to the first support portion 51. In addition, in the above, the opened part is an opening part, and it is the same also in the following description.

  The first curved portion 57 in the first beam 61 is provided on the imaginary line Q1 along the X axis, and the second curved portion 58 in the first beam 61 is provided on the imaginary line Q2 along the X axis. It has been. In addition, since the structure of the 1st curve part 57 and the 2nd curve part 58 is the same as that of the 2nd beam 62 mentioned later, detailed description is given in description of the 2nd beam 62 mentioned later.

  The second beam 62 extends from the base 41 in the minus X-axis direction, and then opens toward the first detection vibration arm 421 between the first detection vibration arm 421 and the second drive vibration arm 443. The first curve portion 57 bent in a curved line with a dominant arc shape, and the first curve portion 57 continued from the first curve portion 57 and curved in a dominant arc shape so as to open toward the second drive vibrating arm 443. And a bent second curved portion 58. The second beam 62 extends from the second curved portion 58 and passes between the first detection vibrating arm 421 and the second drive vibrating arm 443 and is connected to the first support portion 51. In addition, in the above, the opened part is an opening part, and it is the same also in the following description.

  The first curved portion 57 of the second beam 62 has a part of the circumference of a radius r1 from the center P1 provided on the imaginary line Q1 along the X-axis, and the first detection vibrating arm 421. It opens toward (plus X-axis direction). That is, the inner width dimension L1 of the opening is smaller than the inner diameter dimension L2 (2 × r1) of the curved portion. In addition, the 1st curve part 57 of this embodiment has comprised the substantially symmetrical shape with respect to the virtual line Q1. In addition, the second curved portion 58 of the second beam 62 has a part of a circumference of a radius r2 from the center P2 provided on the imaginary line Q2 along the X axis, and the second drive vibration. It opens toward the arm 443 (toward the minus X-axis direction). That is, like the first curved portion 57, the inner width dimension of the opening is smaller than the inner diameter dimension (2 × r2) of the curved section. In addition, the 2nd curve part 58 of this example has comprised the substantially line symmetrical shape with respect to the virtual line Q2.

  The third beam 63 extends from the base portion 41 in the + X axis direction, and then opens toward the second detection vibration arm 422 between the second detection vibration arm 422 and the third drive vibration arm 442. A first curved portion 57 bent in a curved manner in a dominant arc shape, and further bent in a curved manner in a curved shape so as to open toward the third drive vibrating arm 442 and continue from the first curved portion 57. The second curved portion 58 is provided. The third beam 63 extends from the second curved portion 58 and passes between the second detection vibrating arm 422 and the third drive vibrating arm 442 and is connected to the second support portion 52. The third beam 63 is arranged so as to be symmetrical with the shape of the first beam 61 with respect to the center line C1 connecting the width center of the first connection arm 431 and the width center of the second connection arm 432. Yes.

  The fourth beam 64 extends from the base portion 41 in the minus X-axis direction, and then opens toward the second detection vibration arm 422 between the second detection vibration arm 422 and the fourth drive vibration arm 444. The first curve portion 57 bent in a curved line with a dominant arc shape, and the first curve portion 57 continued from the first curve portion 57 and curved in a dominant arc shape so as to open toward the fourth drive vibrating arm 444. And a bent second curved portion 58. The fourth beam 64 extends from the second curved portion 58 and passes between the second detection vibrating arm 422 and the fourth drive vibrating arm 444 and is connected to the second support portion 52. The fourth beam 64 is arranged in a shape symmetrical to the shape of the second beam 62 with respect to the center line C1 connecting the width center of the first connection arm 431 and the width center of the second connection arm 432. Yes.

  As described above, the first beam 61 and the second beam 62 that connect the vibrating body 4 and the first support portion 51, and the third beam 63 and the fourth beam 64 that connect the vibration body 4 and the second support portion 52. In addition, since the first curved portion 57 and the second curved portion 58 provided in a dominant arc shape are provided, the arc shape of the curved line can be increased, and the stress when an impact is applied is dispersed. , Stress concentration is less likely to occur. Thereby, it is possible to provide the gyro element 2 with improved impact resistance.

  The connection portion 65 between the first beam 61 and the first support portion 51 is formed so that the width dimension increases from the first beam 61 toward the first support portion 51. That is, the width dimension W2 of the connecting portion is larger than the width dimension W1 of the first beam 61. With the connection portion 65 having such a configuration, the strength of the connection portion where stress concentration easily occurs can be increased. As a result, it is possible to prevent the vibrating body 4 supported by the first beam 61 from being damaged by an impact such as dropping. Note that the second beam 62, the third beam 63, and the fourth beam 64, which are other beams, use the same configuration for the connection portions 66, 67, and 68, respectively. Such a configuration can also be applied to the first beam 61, the second beam 62, the third beam 63, and the connection portion between the fourth beam 64 and the base 41, and in this case, the same effect is obtained. doing.

  In the above description, the shape of the first beam 61 and the shape of the second beam 62, and the shape of the third beam 63 and the shape of the fourth beam 64 are axisymmetric with respect to the center line C1. As described in the example, the shape of each connecting beam (the first beam 61 to the fourth beam 64) is not necessarily a line-symmetric shape with respect to the center line C1. Even if the shape of each connecting beam is not a line-symmetric shape with respect to the center line C1, the same effect as the line-symmetric shape with respect to the center line C1 can be obtained.

  A detection ground terminal 724 is provided at each of the central portions of the first support portion 51 and the second support portion 52, and this detection ground terminal 724 portion is connected to the connection pad 10 (see FIG. 1). Similarly to the detection ground terminal 724, the detection signal terminal 714, the drive signal terminal 734, and the drive ground terminal 744 are electrically conductively fixed as other terminals provided in the first support portion 51 and the second support portion 52. It is electrically connected to a connection pad 10 (see FIG. 1) as a fixed portion via the member 8.

  The gyro element 2 configured as described above detects the angular velocity ω around the Z-axis as follows. When an electric field is generated between the drive signal electrode (not shown) and the drive ground electrode (not shown) in a state where the angular velocity ω is not applied, the gyro element 2 is driven as shown in FIG. The vibrating arms 441, 443, 442, and 444 perform bending vibration in the direction indicated by the arrow A. At this time, the first and second drive vibrating arms 441 and 443 and the third and fourth drive vibrating arms 442 and 444 perform plane-symmetric vibration with respect to the YZ plane passing through the center point G (center of gravity G). Therefore, the base 41, the first and second connecting arms 431 and 432, and the first and second detection vibrating arms 421 and 422 hardly vibrate.

  When an angular velocity ω is applied to the gyro element 2 around the Z axis in a state where the driving vibration is performed, vibration as shown in FIG. 3B is generated. That is, Coriolis force in the direction of arrow B acts on the drive vibrating arms 441, 443, 442, 444 and the connecting arms 431, 432, and in response to the vibration in the direction of arrow B, the detected vibration in the direction of arrow C is excited. . Then, the detection signal electrode (not shown) and the detection ground electrode (not shown) detect the distortion of the detection vibrating arms 421 and 422 generated by this vibration, and the angular velocity ω is obtained.

(Second Embodiment of Gyro Element)
Next, a second embodiment of a gyro element as a functional element will be described with reference to FIG. FIG. 4 is a top view of the gyro element as viewed from above (the lid 92 side). The gyro element includes a detection signal electrode, a detection signal wiring, a detection signal terminal, a detection ground electrode, a detection ground wiring, a detection ground terminal, a drive signal electrode, a drive signal wiring, a drive signal terminal, a drive ground electrode, and a drive ground wiring. In addition, a driving ground terminal and the like are provided, but are omitted in the figure. In addition, for easy understanding, the dimensional ratio of each component is different from the actual one.

  As shown in FIG. 4, the gyro element 100 as a functional element is a sensor that detects an angular velocity around the Y axis, and although not shown, a base material and a plurality of electrodes provided on the surface of the base material, It consists of wiring and terminals. The gyro element 100 includes a so-called H-shaped vibrating body 104, a first support portion 151 and a second support portion 152 as support portions that support the vibrating body 104, and a beam that connects the vibrating body 104 and the support portion. have. In the present embodiment, the beam includes a first connection beam 541 and a second connection beam 542 that connect the vibrating body 104 and the first support portion 151, and a third connection that connects the vibration body 104 and the second support portion 152. It has a beam 543 and a fourth connecting beam 544.

  The vibrating body 104 extends in the XY plane and has a thickness in the Z-axis direction. Such a vibrating body 104 has principal surfaces 110a and 110b along a plane (XY plane) parallel to the plus Y axis direction as the first direction and the plus X axis direction as the second direction orthogonal to the plus Y axis direction. A rectangular flat plate-shaped base 110 having a pair of first drive vibrating arms 111a and 111b extending from the edge of the base 110 on the plus Y side along the plus Y-axis direction, and a pair of first drive arms across the base 110. A pair of first detection vibrating arms 112a and 112b extending from the minus Y side of the base 110 along the minus Y-axis direction are provided on the opposite side of the one drive vibrating arms 111a and 111b.

  In addition, the vibrating body 104 is extended from the tips of the pair of first drive vibrating arms 111a and 111b and the pair of first detection vibrating arms 112a and 112b along the plus Y axis direction and the minus Y axis direction. Mass portions 113a, 113b, 114a, and 114b having a width in the X-axis direction wider than the width in the plus X-axis direction at the tips of the first drive vibrating arms 111a and 111b and the first detection vibrating arms 112a and 112b are provided.

  The support part includes at least one of the first support part and the second support part. The support part in this embodiment includes a first support part 151 and a second support part 152. The first support portion 151 and the second support portion 152 each extend along the X-axis direction, and the vibrating body 104 is located between the first support portion 151 and the second support portion 152. Yes. In other words, the first support portion 151 and the second support portion 152 are disposed so as to face each other along the Y-axis direction with the vibrating body 104 interposed therebetween. The first support portion 151 is connected to the base portion 110 via the first connection beam 541 and the second connection beam 542, and the second support portion 152 connects the third connection beam 543 and the fourth connection beam 544 to each other. It is connected with the base 110 via the via.

  The first connecting beam 541 and the second connecting beam 542 are provided with a bent portion 150 between the base portion 110 and the first support portion 151. Further, the third connecting beam 543 and the fourth connecting beam 544 are provided with a bent portion 150 between the base portion 110 and the second support portion 152. Each bent portion 150 includes a first curved portion 57 and a second curved portion 58 connected to the first curved portion 57. Hereinafter, the first connecting beam 541 and the second connecting beam 542, and the third connecting beam 543 and the fourth connecting beam 544 will be described in detail.

  The first connecting beam 541 is curved in a dominant arc shape so that the connecting portion 531 extends from the base 110 in the plus X-axis direction and then opens toward the first drive vibrating arm 111b (minus X-axis direction). A first curved portion 57 bent in a curved line, and a second curved portion 58 that is continuous from the first curved portion 57 and bent in a curved manner in a dominant arc shape so as to open toward the plus X-axis direction. have. The first connection beam 541 extends from the second curved portion 158 and is connected to the first support portion 151 via a support connection portion 161 that passes outside the first drive vibration arm 111b.

  The first curved portion 57 in the first connecting beam 541 has a part of the circumference of a radius r1 from the center P1 provided on the imaginary line Q1 along the X axis, and the first drive vibrating arm. It opens toward 111b (toward the minus X-axis direction). That is, the inner width dimension L1 of the opening is smaller than the inner diameter dimension L2 (2 × r1) of the curved portion. In addition, the 1st curve part 57 of this example has comprised the substantially line symmetrical shape with respect to virtual line Q1. Further, the second curved portion 58 in the first connecting beam 541 has a part of the circumference of the radius r2 from the center P2 provided on the virtual line Q2 along the X axis, and the plus X axis Open toward the direction. That is, the inner width dimension L1 of the opening is smaller than the inner diameter dimension L2 (2 × r2) of the curved part. In addition, the 2nd curve part 58 of this example has comprised the substantially symmetrical shape with respect to the virtual line Q2. Thus, since the 1st curve part 57 and the 2nd curve part 58 are opening along a coaxial direction, since the 1st curve part 57 and the 2nd curve part 58 can be arranged side by side, The arrangement space can be reduced.

  The second connecting beam 542 is curved in a dominant arc shape so as to open toward the first drive vibrating arm 111a (plus X-axis direction) after the connecting portion 532 extends from the base 110 in the minus X-axis direction. A first curved portion 57 bent in a curved manner, and a second curved portion 58 that is continuous from the first curved portion 57 and bent in a curved manner so as to open toward the minus X-axis direction. have. The second connecting beam 542 extends from the second curved portion 58 and is connected to the first support portion 151 via a support connecting portion 162 that passes outside the first drive vibrating arm 111a.

  The first curved portion 57 of the second connecting beam 542 has a part of the circumference of a radius r1 from the center P1 provided on the imaginary line Q1 along the X axis, and the first drive vibrating arm. It opens toward 111a (toward the plus X-axis direction). That is, the inner width dimension L1 of the opening is smaller than the inner diameter dimension L2 (2 × r1) of the curved portion. In addition, the 1st curve part 57 of this example has comprised the substantially symmetrical shape with respect to the virtual line Q1. Further, the second curved portion 58 in the second connecting beam 542 is such that a part of the circumference of the radius r2 from the center P2 provided on the imaginary line Q2 along the X-axis is arcuate, and the minus X-axis Open toward the direction. That is, the inner width dimension L1 of the opening is smaller than the inner diameter dimension L2 (2 × r2) of the curved part. In addition, the 2nd curve part 58 of this example has comprised the substantially symmetrical shape with respect to the virtual line Q2.

  The third connecting beam 543 is curved in a dominant arc shape so as to open toward the first detection vibrating arm 112b (minus X axis direction) after the connecting part 533 extends from the base part 110 in the plus X axis direction. A first curved portion 57 bent in a curved line, and a second curved portion 58 that is continuous from the first curved portion 57 and bent in a curved manner in a dominant arc shape so as to open toward the plus X-axis direction. have. The third connection beam 543 extends from the second curved portion 58 and is connected to the second support portion 152 via a support connection portion 163 that passes outside the first detection vibrating arm 112b. The third connecting beam 543 is arranged so as to have a shape symmetrical to the shape of the first connecting beam 541 with respect to the center line C passing through the center of the vibrating body 104.

  The fourth connecting beam 544 is curved in a dominant arc shape so as to open toward the first detection vibrating arm 112a (plus X-axis direction) after the connecting part 534 extends from the base 110 in the minus X-axis direction. A first curved portion 57 bent in a curved line, and a second curved portion 58 that is continuous from the first curved portion 57 and bent in a curved manner in a dominant arc shape so as to open toward the minus X-axis method, have. The fourth connection beam 544 extends from the second curved portion 58 and is connected to the second support portion 152 via a support connection portion 164 that passes outside the first detection vibrating arm 112a. The fourth connection beam 544 is arranged so as to be symmetrical with the shape of the second connection beam 542 with respect to the center line C passing through the center of the vibrating body 104.

  As described above, the first connection beam 541 and the second connection beam 542 that connect the vibrating body 104 and the first support portion 151, and the third connection beam 543 and the second connection beam 542 that connect the vibration body 104 and the second support portion 152. Since the first curved portion 57 and the second curved portion 58 provided in a dominant arc shape are provided on the four connecting beams 544, the arc shape of the curved line can be increased, and when an impact is applied Stress is dispersed and stress concentration is less likely to occur. Thereby, it is possible to provide the gyro element 2 with improved impact resistance.

  In the above description, the shape of the first connecting beam 541 and the shape of the second connecting beam 542, the shape of the third connecting beam 543, and the shape of the fourth connecting beam 544 are line symmetrical with respect to the center line C. However, the shape of each connecting beam (the first connecting beam 541 to the fourth connecting beam 544) does not necessarily have to be a line-symmetric shape with respect to the center line C. Even if the shape of each connecting beam is not a line-symmetric shape with respect to the center line C, the same effect as the line-symmetric shape with respect to the center line C can be obtained.

The gyro element 100 is formed using a quartz crystal, which is a piezoelectric material, as a base material (material constituting a main part). The crystal has an X axis called an electric axis, a Y axis called a mechanical axis, and a Z axis called an optical axis.
The gyro element 100 is cut out along a plane defined by the X-axis and the Y-axis orthogonal to the quartz crystal axis and processed into a flat plate shape, and has a predetermined thickness in the Z-axis direction orthogonal to the plane. ing. The predetermined thickness is appropriately set depending on the oscillation frequency (resonance frequency), the outer size, the workability and the like.

Further, the flat plate constituting the gyro element 100 can tolerate errors in the angle of cut-out from the quartz crystal in a certain range for each of the X axis, the Y axis, and the Z axis. For example, a flat plate that is cut out by rotating in the range of 0 to 7 degrees around the X axis can be used. The same applies to the Y axis and the Z axis.
The gyro element 100 is formed by etching (wet etching or dry etching) using a photolithography technique. Note that a plurality of gyro elements 100 can be obtained from one crystal wafer.

  Although not shown, the gyro element 100 is connected to the base 110 of the pair of first drive vibrating arms 111a and 111b and the pair of first detection vibrating arms 112a and 112b in a plan view seen from the Z-axis direction, From the viewpoint of stress relaxation, it is preferable to provide a curved portion at the connection portion of the mass portions 113a, 113b, 114a, 114b with the first drive vibrating arms 111a, 111b and the first detection vibrating arms 112a, 112b.

  Here, the operation of the gyro element 100 will be described with reference to FIGS. 5 (a) and 5 (b). 5A is a perspective view showing a driving vibration state, and FIG. 5B is a perspective view showing a detection vibration state in a state where an angular velocity is applied.

  As shown in FIG. 5A, when no angular velocity is applied, an AC voltage drive signal with a predetermined frequency is supplied from an oscillation source to a drive electrode (not shown) of the first drive vibrating arms 111a and 111b of the gyro element 100. By being applied, the first drive vibrating arms 111a and 111b vibrate in the X-axis direction. More specifically, the first drive vibrating arms 111a and 111b alternately perform bending vibrations in the direction away from each other and the direction approaching each other, as indicated by black arrows and white arrows in FIG. 5A in the X-axis direction. repeat. That is, the first drive vibrating arms 111a and 111b vibrate at a predetermined frequency in opposite directions (in opposite phases).

Next, as shown in FIG. 5B, when an angular velocity ω about the Y axis is applied to the gyro element 100 in this driving vibration state (when the gyro element 100 rotates about the Y axis), the first gyro element 100 Coriolis force acts on the first drive vibrating arms 111a and 111b, and the first drive vibrating arms 111a and 111b bend and vibrate in the Z-axis direction (direction perpendicular to the main surface 110a) (also referred to as walk mode vibration).
In the gyro element 100, the first detection vibrating arms 112a and 112b resonate in the walk mode with respect to the walk mode vibration of the first drive vibrating arms 111a and 111b, and bend and vibrate in the Z-axis direction. More specifically, the first drive vibrating arms 111a and 111b and the first detection vibrating arms 112a and 112b are opposite to each other in the Z-axis direction as shown by black arrows and white arrows in FIG. ) Bends at a frequency equal to the frequency of the drive vibration. In addition, the amplitude of the bending vibration in the Z-axis direction changes according to the magnitude of the Coriolis force.

  The gyro element 100 includes an electric signal (voltage) of the first detection vibrating arm 112a generated at a detection electrode (not shown) of the first detection vibrating arms 112a and 112b and an electric signal (voltage) of the first detection vibrating arm 112b. The difference is taken out as a detection signal, and the angular velocity is detected by this detection signal. Note that the magnitude of this detection signal changes according to the magnitude of the Coriolis force. At this time, since the vibration directions of the first detection vibrating arm 112a and the first detection vibrating arm 112b are opposite to each other, for example, when the voltage generated in the first detection vibrating arm 112a is a positive potential, The voltage generated in the vibrating arm 112b is −potential, and when the voltage generated in the first detection vibrating arm 112a is −potential, the voltage generated in the first detection vibrating arm 112b is + potential, and the potential difference (difference) between the two is relatively large. Becomes larger and the angular velocity detection accuracy can be improved.

(package)
As shown in FIG. 1, the package 9 stores the gyro elements 2 and 100. In addition to the gyro element 2, an IC chip that drives the gyro element 2 and the like may be stored in the package 9. Such a package 9 has a substantially rectangular shape in plan view (when viewed from the Z-axis direction).

  The package 9 has a base 91 having a recess opened on the upper surface, and a lid (lid) 92 joined to the base so as to close the opening of the recess. The base 91 has a plate-like bottom plate 911 and a frame-like side wall 912 provided on the peripheral edge of the upper surface of the bottom plate 911. Such a package 9 has a storage space S inside thereof, and the gyro element 2 is stored and installed in the storage space S in an airtight manner.

  The gyro elements 2 and 100 are made of solder, silver paste, conductive adhesive (adhesive in which conductive fillers such as metal particles are dispersed in a resin material) or the like at the first and second support portions 51 and 52. It is fixed to the upper surface of the bottom plate 911 via the conductive fixing member 8. Hereinafter, the gyro element 2 will be described as an example. Since the first and second support portions 51 and 52 are located at both ends of the gyro element 2 in the Y-axis direction, the vibrating body 4 of the gyro element 2 can be held at both ends by fixing such portions to the bottom plate 911. The gyro element 2 is supported and can be stably fixed to the bottom plate 911. Therefore, unnecessary vibration (vibration other than vibration to be detected) of the gyro element 2 is suppressed, and detection accuracy of the angular velocity ω by the gyro element 2 is improved.

  The conductive fixing member 8 corresponds to the two detection signal terminals 714, the two detection ground terminals 724, the drive signal terminal 734, and the drive ground terminal 744 provided on the first support portion 51 and the second support portion 52. There are six (contact) and spaced apart from each other. Further, six connection pads 10 corresponding to the two detection signal terminals 714, the two detection ground terminals 724, the drive signal terminal 734, and the drive ground terminal 744 are provided on the upper surface of the bottom plate 911, and a conductive fixing member is provided. These connection pads 10 and any one of the corresponding terminals are electrically connected via 8.

With such a configuration, the conductive fixing member 8 can be used as a fixing member for fixing the gyro element 2 to the bottom plate 911, and as a connection member for electrical connection with the gyro element 2. Since it can be used, the configuration of the electronic device 1 can be simplified.
In addition, the conductive fixing member 8 forms a gap (gap) between the gyro element 2 and the bottom plate 911, and is also used as a gap material for preventing these contacts. Thereby, destruction and breakage of the gyro element 2 due to contact with the bottom plate 911 can be prevented, and the electronic device 1 capable of detecting accurate angular velocity and exhibiting excellent reliability can be obtained.
Each connection pad 10 is drawn out of the package 9 through a conductor post (not shown), or when an IC chip or the like is stored in the package 9, it is electrically connected to the IC chip. To do.

  The constituent material of the base 91 is not particularly limited, but various ceramics such as aluminum oxide can be used. The constituent material of the lid 92 is not particularly limited, but may be a member whose linear expansion coefficient approximates that of the constituent material of the base 91. For example, when the constituent material of the base 91 is ceramic as described above, an alloy such as Kovar is preferable. The joining of the base 91 and the lid 92 is not particularly limited, and for example, the base 91 and the lid 92 may be joined via an adhesive or may be joined by seam welding or the like.

  According to the electronic device 1 described above, in the gyro element 2 and 100 as the functional element used, the vibrating bodies 4 and 104 and the first support portions 51 and 151 and the second support portions 52 and 152 as the support portions. Are provided with a first curved portion 57 and a second curved portion 58 provided in a dominant arc shape. Since the first curved portion 57 and the second curved portion 58 having an arcuate shape have arc-shaped curves, the stress when an impact is applied to the gyro elements 2 and 100 is dispersed, and stress concentration hardly occurs. . Therefore, it is possible to obtain the gyro elements 2 and 100 as functional elements having improved impact resistance.

Further, since the first curved portion 57 and the second curved portion 58 are continuously provided in a dominant arc shape, the arc shape of the curve can be increased, and the stress when an impact is applied is further dispersed. Stress concentration is less likely to occur. As a result, it is possible to provide the gyro elements 2 and 100 having further improved impact resistance.
Accordingly, even in the electronic device 1 using the gyro elements 2 and 100, impact resistance can be improved.

(Modification)
In the gyro elements 2 and 100 of the first embodiment and the second embodiment described above, the example using the two curved portions of the first curved portion 57 and the second curved portion 58 has been described. It may be one. Even if the curved portion has a single configuration, the curved line can be a dominant arc, and the stress when an impact is applied is dispersed and stress concentration is less likely to occur. This makes it possible to provide a functional element with improved impact resistance. Further, the curved portion has three or more configurations, and the same effect as in the case of two can be obtained.

(Modified example 1 of the curved part in the beam part)
Moreover, the following modifications can also be applied to the curved portion in the beam portion. First, a modified example 1 of the curved portion will be described with reference to FIG. FIG. 6 is a partial plan view showing Modification 1 of the curved portion in the beam portion.

  As shown in FIG. 6, the bent portion 50 as the curved portion according to the modification 1 includes a first curved portion 57 and a second curved portion 58 connected to the first curved portion 57. The first curved portion 57 and the second curved portion 58 are provided so that the beam width dimension W4 of the portion bent in a curved manner in a dominant arc shape is larger than the beam width dimension W3 on the opening side. . By adopting such a beam shape, stress concentration tends to occur when an impact is applied, and the width of the beam on the side opposite to the opening is large, so the strength of the beam in this part can be increased, and the beam It becomes possible to make it difficult to destroy. In addition, it is more preferable to use a beam shape so that the width dimension of the beam gradually increases from the opening side toward the top of the circumferential bent portion. By doing so, stress can be further dispersed and stress concentration can be prevented, so that the beam strength can be improved.

(Modified example 2 of curved part in beam part)
Next, a modified example 2 of the curved portion will be described with reference to FIG. FIG. 7 is a partial plan view showing Modification Example 2 of the curved portion in the beam portion. The curved portion according to Modification 2 is different from the above-described embodiment in the extending direction from the base portion 41 and the opening direction.

  As shown in FIG. 7, the curved portion according to the modified example 2 is extended in the minus Y-axis direction from the base 41 and then has an arc shape so as to open toward the base 41 (plus Y-axis direction). The first curved portion 57 bent in a curved manner and the second curved portion bent in a curved manner in a dominant arc shape so as to open toward the minus Y-axis direction. And a curved portion 58. As described above, even the first curved portion 57 and the second curved portion 58 that open along the Y-axis direction have the same effects as those of the above-described embodiment. The opening is not limited to the direction along the X-axis and the Y-axis, and may be the first curved portion 57 and the second curved portion 58 that open in the direction intersecting the X-axis and the Y-axis. Have The opening portion is an opening.

The functional element (vibrating body) according to the present invention is not limited to the so-called double T type or H type gyro element described above. For example, a so-called bipod tuning fork, H type tuning fork, double tuning fork, tripod tuning fork, comb Various functional elements (vibrating bodies) such as a tooth shape, an orthogonal shape, and a prism shape may be used.
The functional element (vibrating body) according to the present invention includes a piezoelectric thin film driving type vibrating element using a piezoelectric thin film formed on a substrate as a vibration source, a MEMS (Micro Electro Mechanical System) type vibrating element, and an electrostatic drive. The present invention can also be applied to a type of vibration element.

<Physical quantity detection device>
The gyro elements 2 and 100 as the functional elements as described above can be applied to a physical quantity detection device such as an angular velocity detection device, an acceleration detection device, or a pressure measurement device. Here, an embodiment of a physical quantity detection device using the gyro element 2 as an example will be described with reference to the drawings. FIG. 8 is a schematic diagram illustrating a configuration of the physical quantity detection device.

  A physical quantity detection device 1400 shown in FIG. 8 includes a gyro element 2 as a functional element according to the present invention. In the present embodiment, an example in which the gyro element 2 according to the first embodiment is used as a functional element according to the present invention will be described.

  As illustrated in FIG. 8, the physical quantity detection device 1400 includes a gyro element 2, a drive circuit 1410, and a detection circuit 1420. The driver circuit 1410 and the detection circuit 1420 can be incorporated in an IC chip not shown in FIG.

  The drive circuit 1410 functions as a drive circuit in the present invention, and can include an I / V conversion circuit (current-voltage conversion circuit) 1411, an AC amplification circuit 1412, and an amplitude adjustment circuit 1413. The drive circuit 1410 is a circuit that supplies a drive signal to the drive signal electrode formed in the gyro element 2. Hereinafter, the drive circuit 1410 will be described in detail.

  When the gyro element 2 vibrates, an alternating current based on the piezoelectric effect is output from the gyro element 2 and input to the I / V conversion circuit 1411. The I / V conversion circuit 1411 converts the input AC current into an AC voltage signal having the same frequency as the vibration frequency of the gyro element 2 and outputs the AC voltage signal.

  The AC voltage signal output from the I / V conversion circuit 1411 is input to the AC amplifier circuit 1412. The AC amplifier circuit 1412 amplifies and outputs the input AC voltage signal.

  The AC voltage signal output from the AC amplifier circuit 1412 is input to the amplitude adjustment circuit 1413. The amplitude adjustment circuit 1413 controls the gain so as to hold the amplitude of the input AC voltage signal at a constant value, and outputs the AC voltage signal after gain control to the gyro element 2. The gyro element 2 vibrates by this AC voltage signal (drive signal).

  The detection circuit 1420 functions as a detection circuit in the present invention, and includes charge amplifier circuits 1421, 1422, a differential amplifier circuit 1423, an AC amplifier circuit 1424, a synchronous detection circuit 1425, a smoothing circuit 1426, and a variable amplifier circuit 1427. And a filter circuit 1428. The detection circuit 1420 includes a first detection signal generated at the detection electrode formed on the first detection vibrating arm 421 of the gyro element 2, a second detection signal generated at the detection signal electrode formed on the second detection vibrating arm 422, and Are differentially amplified to generate a differential amplification signal, and a predetermined physical quantity is detected based on the differential amplification signal. Hereinafter, the detection circuit 1420 will be described in detail.

  The charge amplifier circuits 1421 and 1422 receive detection signals (AC currents) of opposite phases detected by the detection signal electrodes formed on the first detection vibrating arm 421 and the second detection vibrating arm 422 of the gyro element 2. Is done. For example, the first detection signal detected by the detection electrode formed on the first detection vibrating arm 421 is input to the charge amplifier circuit 1421, and the second detection vibrating arm 422 is formed on the charge amplifier circuit 1422. A second detection signal detected by the detection electrode is input. Then, the charge amplifier circuits 1421, 1422 convert the input detection signal (alternating current) into an alternating voltage signal centered on the reference voltage Vref.

  The differential amplifier circuit 1423 differentially amplifies the output signal of the charge amplifier circuit 1421 and the output signal of the charge amplifier circuit 1422 to generate a differential amplified signal. The output signal (differential amplified signal) of the differential amplifier circuit 1423 is further amplified by the AC amplifier circuit 1424.

  The synchronous detection circuit 1425 functions as a detection circuit in the present invention, and extracts an angular velocity component by synchronously detecting the output signal of the AC amplifier circuit 1424 based on the AC voltage signal output from the AC amplifier circuit 1412 of the drive circuit 1410. To do.

  The angular velocity component signal extracted by the synchronous detection circuit 1425 is smoothed into a DC voltage signal by the smoothing circuit 1426 and input to the variable amplification circuit 1427.

  The variable amplifier circuit 1427 amplifies (or attenuates) the output signal (DC voltage signal) of the smoothing circuit 1426 at a set amplification factor (or attenuation factor) to change the angular velocity sensitivity. The signal amplified (or attenuated) by the variable amplifier circuit 1427 is input to the filter circuit 1428.

  The filter circuit 1428 removes a high-frequency noise component from the output signal of the variable amplifier circuit 1427 (more precisely, attenuates to a predetermined level or less), and generates a detection signal having a polarity and a voltage level corresponding to the direction and magnitude of the angular velocity. To do. This detection signal is output to the outside from an external output terminal (not shown).

  According to the physical quantity detection device 1400, as described above, the detection circuit 1420 applies the first detection signal generated in the detection electrode formed on the first detection vibrating arm 421 and the detection electrode formed on the second detection vibrating arm 422. The generated second detection signal is differentially amplified to generate a differential amplification signal, and a predetermined physical quantity can be detected based on the differential amplification signal. Further, the gyro element 2 is configured to electrostatically couple a detection signal and a drive signal on the positive direction side of the Y axis and the negative direction side of the Y axis when an impact in the Y axis direction is applied from the outside. Can be kept (almost) uniform. That is, the amount of change in electrostatic coupling between the first detection signal and the drive signal and the amount of change in electrostatic coupling between the second detection signal and the drive signal can be equalized. The influence of can be canceled. Accordingly, it is possible to provide a physical quantity detection device 1400 that can detect a detection signal stably even when an impact in the Y-axis direction is applied from the outside, and is less likely to damage the gyro element 2 due to the impact.

[Electronics]
Next, electronic devices to which the electronic device 1 using the gyro elements 2 and 100 as functional elements according to an embodiment of the present invention are applied will be described in detail with reference to FIGS.

  FIG. 9 is a perspective view schematically illustrating a configuration of a mobile (or notebook) personal computer as an electronic apparatus including the electronic device 1 according to an embodiment of the present invention. In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 1101. The display unit 1106 is rotated with respect to the main body portion 1104 via a hinge structure portion. It is supported movably. Such a personal computer 1100 incorporates an electronic device 1 using a gyro element 2 having a function of detecting angular velocity.

  FIG. 10 is a perspective view schematically illustrating a configuration of a mobile phone (including PHS) as an electronic apparatus including the electronic device 1 according to an embodiment of the present invention. In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and a display unit 1201 is disposed between the operation buttons 1202 and the earpiece 1204. Such a cellular phone 1200 incorporates an electronic device 1 using a gyro element 2 that functions as an angular velocity sensor or the like.

  FIG. 11 is a perspective view illustrating a schematic configuration of a digital still camera as an electronic apparatus including the electronic device 1 according to an embodiment of the present invention. In this figure, connection with an external device is also simply shown. Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an image sensor such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

  A display unit 1301 is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to perform display based on an imaging signal from the CCD. The display unit 1301 displays an object as an electronic image. Functions as a viewfinder. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302.

  When the photographer confirms the subject image displayed on the display unit 1301 and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308. In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation. Such a digital still camera 1300 incorporates an electronic device 1 using a gyro element 2 that functions as an angular velocity sensor or the like.

  The electronic device 1 according to the embodiment of the present invention is not limited to the personal computer (mobile personal computer) shown in FIG. 9, the mobile phone shown in FIG. 10, and the digital still camera shown in FIG. (For example, inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations , Video phone, crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (eg, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring devices , Instruments (e.g. vehicles, Sky machine, gauges of a ship), can be applied to electronic equipment such as a flight simulator.

[Moving object]
FIG. 12 is a perspective view schematically showing an automobile as an example of a moving object. The automobile 506 is equipped with an electronic device 1 using the gyro element 2 according to the present invention. For example, as shown in the figure, an automobile 506 as a moving body includes an electronic control unit 508 that incorporates an electronic device 1 using a gyro element 2 and controls a tire 509 and the like on a vehicle body 507. In addition, the electronic device 1 includes keyless entry, immobilizer, car navigation system, car air conditioner, anti-lock brake system (ABS), airbag, tire pressure monitoring system (TPMS), engine The present invention can be widely applied to electronic control units (ECUs) such as controls, battery monitors for hybrid vehicles and electric vehicles, and vehicle attitude control systems.

  DESCRIPTION OF SYMBOLS 1 ... Electronic device, 2,100 ... Gyro element as a functional element, 4,104 ... Vibrating body, 8 ... Conductive fixing member (conductive adhesive), 9 ... Package, 10 ... Connection pad, 41, 110 ... Base , 50 ... bent portions, 51, 151 ... first support portions as support portions, 52, 152 ... second support portions as support portions, 57 ... first curve portions, 58 ... second curve portions, 61 ... as beams First beam 62, second beam as beam 63, third beam as beam 64, fourth beam as beam, 65, 66, 67, 68 ... connection portion, 91 ... base, 92 ... lid 111a, 111b ... first drive vibrating arm, 112a, 112b ... first detection vibrating arm, 421 ... first detection vibrating arm, 422 ... second detection vibrating arm, 425, 426, 445, 446, 447, 448 ... weight Part (hammer head), 431 ... No. Connection arm, 432, second connection arm, 441, first drive vibration arm, 442, third drive vibration arm, 443, second drive vibration arm, 444, fourth drive vibration arm, 506, automobile as a moving body, 541: First connecting beam as a beam, 542: Second connecting beam as a beam, 543: Third connecting beam as a beam, 544: Fourth connecting beam as a beam, 714: Detection signal terminal, 724: Detection ground Terminals 734... Drive signal terminal 744 drive ground terminal 911 base plate 912 side wall 1100 mobile personal computer as electronic device 1200 mobile phone as electronic device 1300 digital as electronic device Still camera, 1400 ... Gyro sensor as an electronic device.

Claims (11)

A vibrating body,
A beam extending from the vibrating body;
A support unit coupled to the beam and supporting the vibrating body,
The beam is
Between the vibrating body and the support part,
A functional element having an opening portion opened on one side and having a first curved portion bent in a dominant arc shape. The beam is
Between the vibrating body and the support part,
A second curved portion having an opening that is open to the other side different from the one, and being bent in a dominant arc shape continuously with one end of the first curved portion. The functional element according to claim 1. At least one of the first curved portion and the second curved portion is
The functional element according to claim 1, wherein a width of the beam on the side opposite to the opening is larger than a width of the beam on the opening side.   The width of the connecting portion of at least one of the connecting portion with the vibrating body and the connecting portion with the support portion is larger than the width of the other portion of the beam. The functional device according to claim 3.   5. The function according to claim 1, wherein each of the first curved portion and the second curved portion has an opening that is open along the same axial direction. 6. element. The vibrator is
The base,
A first detection vibrating arm and a first drive vibrating arm extending along the first direction from the base,
The support part is
The functional element according to claim 1, wherein the functional element is provided along a second direction that intersects the first direction. The vibrator is
The base,
A first detection vibrating arm and a second detection vibrating arm extending along the first direction from the base to both sides;
A first drive vibrating arm and a third drive vibrating arm extending along the first direction from the base to both sides;
The first drive vibration arm and the third drive vibration arm are located on the opposite side to the first detection vibration arm and the second detection vibration arm, and extend from the base to both sides along the first direction. A second driving vibrating arm and a fourth driving vibrating arm,
The support portion includes a first support portion and a second support portion that are disposed opposite to each other along the first direction with the vibrating body interposed therebetween and extend in a second direction that intersects the first direction. Prepared,
The beam extends from the base and passes between the first detection vibration arm and the first drive vibration arm, and extends from the base, the first detection vibration arm and the second drive. A second beam passing between the vibrating arm and the base; a third beam passing between the second detection vibrating arm and the third drive vibrating arm; and extending from the base; The functional element according to claim 1, further comprising a fourth beam passing between the detection vibrating arm and the fourth drive vibrating arm. A functional element according to any one of claims 1 to 7,
A base body,
An electronic device, wherein the functional element is mounted on the base. A functional element according to claim 6 or 7,
A drive circuit for driving the functional element;
And a detection circuit that detects a predetermined physical quantity based on a detection signal from the functional element.   An electronic device comprising the functional element according to claim 1.   A moving body comprising the functional element according to claim 1.

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