JP2015164158A5 - - Google Patents
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- Publication number
- JP2015164158A5 JP2015164158A5 JP2014039652A JP2014039652A JP2015164158A5 JP 2015164158 A5 JP2015164158 A5 JP 2015164158A5 JP 2014039652 A JP2014039652 A JP 2014039652A JP 2014039652 A JP2014039652 A JP 2014039652A JP 2015164158 A5 JP2015164158 A5 JP 2015164158A5
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- semiconductor device
- oxide thin
- crystalline oxide
- gallium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 8
- 239000004065 semiconductor Substances 0.000 claims 7
- 239000010409 thin film Substances 0.000 claims 7
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 4
- 229910052733 gallium Inorganic materials 0.000 claims 4
- 229910052742 iron Inorganic materials 0.000 claims 4
- 229910052593 corundum Inorganic materials 0.000 claims 1
- 239000010431 corundum Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014039652A JP2015164158A (ja) | 2014-02-28 | 2014-02-28 | 半導体装置用積層構造体、半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014039652A JP2015164158A (ja) | 2014-02-28 | 2014-02-28 | 半導体装置用積層構造体、半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2015164158A JP2015164158A (ja) | 2015-09-10 |
| JP2015164158A5 true JP2015164158A5 (zh) | 2017-03-16 |
Family
ID=54186989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014039652A Pending JP2015164158A (ja) | 2014-02-28 | 2014-02-28 | 半導体装置用積層構造体、半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2015164158A (zh) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6945121B2 (ja) * | 2015-09-30 | 2021-10-06 | 株式会社Flosfia | 結晶性半導体膜および半導体装置 |
| JP6994181B2 (ja) * | 2016-08-31 | 2022-02-04 | 株式会社Flosfia | 結晶性酸化物半導体膜および半導体装置 |
-
2014
- 2014-02-28 JP JP2014039652A patent/JP2015164158A/ja active Pending
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