JP2015163573A5 - - Google Patents
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- Publication number
- JP2015163573A5 JP2015163573A5 JP2015002878A JP2015002878A JP2015163573A5 JP 2015163573 A5 JP2015163573 A5 JP 2015163573A5 JP 2015002878 A JP2015002878 A JP 2015002878A JP 2015002878 A JP2015002878 A JP 2015002878A JP 2015163573 A5 JP2015163573 A5 JP 2015163573A5
- Authority
- JP
- Japan
- Prior art keywords
- process gas
- line
- processing
- production tool
- recovered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims description 70
- 239000007789 gas Substances 0.000 claims description 52
- 238000004519 manufacturing process Methods 0.000 claims description 23
- 238000004891 communication Methods 0.000 claims description 6
- 238000011084 recovery Methods 0.000 claims description 6
- 239000012530 fluid Substances 0.000 claims description 4
- 229910052734 helium Inorganic materials 0.000 claims description 3
- 239000001307 helium Substances 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims description 2
- 229910052754 neon Inorganic materials 0.000 claims 3
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims 3
- 230000006835 compression Effects 0.000 claims 2
- 238000007906 compression Methods 0.000 claims 2
- 238000007670 refining Methods 0.000 claims 1
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201461926649P | 2014-01-13 | 2014-01-13 | |
| US61/926,649 | 2014-01-13 | ||
| US14/567,353 US9649590B2 (en) | 2014-01-13 | 2014-12-11 | System and method for gas recovery and reuse |
| US14/567,353 | 2014-12-11 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015163573A JP2015163573A (ja) | 2015-09-10 |
| JP2015163573A5 true JP2015163573A5 (cg-RX-API-DMAC7.html) | 2015-12-10 |
| JP6224633B2 JP6224633B2 (ja) | 2017-11-01 |
Family
ID=52302144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015002878A Active JP6224633B2 (ja) | 2014-01-13 | 2015-01-09 | ガス回収と再利用のためのシステムと方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9649590B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP2893968B1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP6224633B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR101713116B1 (cg-RX-API-DMAC7.html) |
| CN (1) | CN104772008B (cg-RX-API-DMAC7.html) |
| MY (1) | MY172889A (cg-RX-API-DMAC7.html) |
| SG (1) | SG10201408623TA (cg-RX-API-DMAC7.html) |
| TW (1) | TWI617343B (cg-RX-API-DMAC7.html) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10443127B2 (en) * | 2013-11-05 | 2019-10-15 | Taiwan Semiconductor Manufacturing Company Limited | System and method for supplying a precursor for an atomic layer deposition (ALD) process |
| CA3063636C (en) | 2014-07-25 | 2022-03-01 | Exxonmobil Upstream Research Company | Cyclical swing absorption process and system |
| KR20170053682A (ko) | 2014-11-11 | 2017-05-16 | 엑손모빌 업스트림 리서치 캄파니 | 페이스트 임프린트를 통한 고용량 구조체 및 모노리스 |
| SG11201703809RA (en) | 2014-12-10 | 2017-06-29 | Exxonmobil Res & Eng Co | Adsorbent-incorporated polymer fibers in packed bed and fabric contactors, and methods and devices using same |
| EP3237091B1 (en) | 2014-12-23 | 2021-08-04 | ExxonMobil Upstream Research Company | Structured adsorbent beds and methods of producing the same |
| CA2979869C (en) | 2015-05-15 | 2019-12-03 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes related thereto comprising mid-bed purge systems |
| US9751041B2 (en) | 2015-05-15 | 2017-09-05 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes related thereto |
| US10124286B2 (en) | 2015-09-02 | 2018-11-13 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes related thereto |
| AU2016317387B2 (en) | 2015-09-02 | 2019-11-21 | Exxonmobil Upstream Research Company | Process and system for swing adsorption using an overhead stream of a demethanizer as purge gas |
| KR102123224B1 (ko) | 2015-10-27 | 2020-06-16 | 엑손모빌 업스트림 리서치 캄파니 | 복수의 밸브들을 갖는 관련 스윙 흡착 공정을 위한 장치 및 시스템 |
| AU2016346797B2 (en) | 2015-10-27 | 2019-10-03 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes related thereto having a plurality of valves |
| KR102119378B1 (ko) | 2015-10-27 | 2020-06-08 | 엑손모빌 업스트림 리서치 캄파니 | 능동 제어식 공급물 포핏 밸브 및 수동 제어식 생성물 밸브를 갖는 관련 스윙 흡착 공정용 장치 및 시스템 |
| KR20180083911A (ko) | 2015-11-16 | 2018-07-23 | 엑손모빌 업스트림 리서치 캄파니 | 흡착재 및 이산화탄소의 흡착 방법 |
| AU2017234450B2 (en) | 2016-03-18 | 2020-02-06 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes related thereto |
| CN109219476A (zh) | 2016-05-31 | 2019-01-15 | 埃克森美孚上游研究公司 | 用于变吸附方法的装置和系统 |
| WO2017209861A1 (en) | 2016-05-31 | 2017-12-07 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes |
| US10434458B2 (en) | 2016-08-31 | 2019-10-08 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes related thereto |
| WO2018044501A1 (en) | 2016-09-01 | 2018-03-08 | Exxonmobil Upstream Research Company | Swing adsorption processes for removing water using 3a zeolite structures |
| US10328382B2 (en) | 2016-09-29 | 2019-06-25 | Exxonmobil Upstream Research Company | Apparatus and system for testing swing adsorption processes |
| JP7021226B2 (ja) | 2016-12-21 | 2022-02-16 | エクソンモービル アップストリーム リサーチ カンパニー | 発泡幾何構造および活性材料を有する自己支持構造 |
| EP3558487A1 (en) | 2016-12-21 | 2019-10-30 | ExxonMobil Upstream Research Company | Self-supporting structures having active materials |
| WO2019147516A1 (en) | 2018-01-24 | 2019-08-01 | Exxonmobil Upstream Research Company | Apparatus and system for temperature swing adsorption |
| WO2019168628A1 (en) | 2018-02-28 | 2019-09-06 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes |
| US11535207B2 (en) | 2018-11-24 | 2022-12-27 | Change Energy Services | Compressed-gas distribution associated with vehicle |
| WO2020131496A1 (en) | 2018-12-21 | 2020-06-25 | Exxonmobil Upstream Research Company | Flow modulation systems, apparatus, and methods for cyclical swing adsorption |
| US11557462B2 (en) | 2019-03-13 | 2023-01-17 | Kla Corporation | Collecting and recycling rare gases in semiconductor processing equipment |
| WO2020222932A1 (en) | 2019-04-30 | 2020-11-05 | Exxonmobil Upstream Research Company | Rapid cycle adsorbent bed |
| WO2021071755A1 (en) | 2019-10-07 | 2021-04-15 | Exxonmobil Upstream Research Company | Adsorption processes and systems utilizing step lift control of hydraulically actuated poppet valves |
| EP4045173A1 (en) | 2019-10-16 | 2022-08-24 | Exxonmobil Upstream Research Company (EMHC-N1-4A-607) | Dehydration processes utilizing cationic zeolite rho |
| EP4265322A1 (en) * | 2022-04-22 | 2023-10-25 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Helium recovery process |
| KR102710551B1 (ko) | 2023-09-01 | 2024-09-26 | 주식회사 에프알디 | 흡착칼럼을 이용한 제논 및 크립톤 함유 미정제 혼합가스의 추출방법 |
| KR102710602B1 (ko) | 2023-09-01 | 2024-09-27 | 주식회사 에프알디 | 제논 및 크립톤의 분리정제방법 |
| KR20250095882A (ko) | 2023-12-20 | 2025-06-27 | 주식회사 에프알디 | 흡착제를 활용한 고순도 크립톤의 분리정제방법 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2189165A (en) * | 1986-04-16 | 1987-10-21 | James Ephraim Lovelock | Method and apparatus for purifying a continuous flow of helium and/or neon gas |
| US4916237A (en) * | 1986-07-08 | 1990-04-10 | American Cyanamid Company | Substituted 1,2,3-thiadiazole-4-thiolates |
| US4857082A (en) | 1988-09-15 | 1989-08-15 | Air Products And Chemicals, Inc. | Membrane unit turn-down control system |
| GB2260854B (en) | 1991-10-22 | 1995-04-05 | British Aerospace | Surface discharge corona plasma cathode assembly |
| US5377491A (en) | 1992-12-11 | 1995-01-03 | Praxair Technology, Inc. | Coolant recovery process |
| CN1196789A (zh) * | 1996-06-24 | 1998-10-21 | 康宁股份有限公司 | 用于光纤制造的氦气再循环 |
| ID17537A (id) | 1996-07-26 | 1998-01-08 | Praxair Technology Inc | Perolehan kembali helium bagi manupaktur serat optis |
| US6089282A (en) * | 1998-05-08 | 2000-07-18 | Aeronex, Inc. | Method for recovery and reuse of gas |
| US6125638A (en) | 1998-08-21 | 2000-10-03 | The Boc Group, Inc. | Optical fiber cooling process |
| AU7185900A (en) | 2000-01-14 | 2001-07-19 | Boc Group, Inc., The | Helium recovery process |
| US6517791B1 (en) * | 2000-12-04 | 2003-02-11 | Praxair Technology, Inc. | System and process for gas recovery |
| CA2455934A1 (en) | 2001-07-31 | 2003-02-13 | Mark Thomas Emley | Control system for helium recovery |
| EP1427508B1 (en) | 2001-07-31 | 2012-02-01 | Praxair Technology, Inc. | Helium recovery |
| US7261763B2 (en) | 2003-07-17 | 2007-08-28 | The Boc Group, Inc. | Method for the recovery and recycle of helium and chlorine |
| JP4652860B2 (ja) * | 2004-04-27 | 2011-03-16 | 大陽日酸株式会社 | クリプトン又はキセノンの回収方法 |
| JP2007019052A (ja) | 2005-07-05 | 2007-01-25 | Sharp Corp | 窒化物半導体製造装置および窒化物半導体素子 |
| US20070221065A1 (en) | 2006-03-23 | 2007-09-27 | Adisorn Aroonwilas | Heat recovery gas absorption process |
| JP5202836B2 (ja) * | 2006-12-01 | 2013-06-05 | 日本エア・リキード株式会社 | キセノンの回収システムおよび回収装置 |
| KR20090080609A (ko) * | 2008-01-22 | 2009-07-27 | 삼성전기주식회사 | 양면 발광 소자 패키지 및 그 제조 방법 |
| US8118914B2 (en) | 2008-09-05 | 2012-02-21 | Alstom Technology Ltd. | Solid materials and method for CO2 removal from gas stream |
| US8444749B2 (en) | 2009-06-10 | 2013-05-21 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Method and system for membrane-based gas recovery |
| US8308854B2 (en) * | 2009-12-15 | 2012-11-13 | Thermo Finnigan Llc | Helium reclamation systems and methods for a gas chromatograph |
| US8591634B2 (en) * | 2010-01-28 | 2013-11-26 | Air Products And Chemicals, Inc. | Method and equipment for selectively collecting process effluent |
| GB2477322B (en) * | 2010-02-01 | 2015-10-21 | Gas Recovery & Recycle Ltd | Inert gas recovery system |
| CN203048598U (zh) * | 2013-01-20 | 2013-07-10 | 廊坊黎明气体有限公司 | 一种高纯度氩气净化装置 |
-
2014
- 2014-12-11 US US14/567,353 patent/US9649590B2/en active Active
- 2014-12-23 SG SG10201408623TA patent/SG10201408623TA/en unknown
-
2015
- 2015-01-07 TW TW104100449A patent/TWI617343B/zh active
- 2015-01-08 MY MYPI2015700052A patent/MY172889A/en unknown
- 2015-01-09 EP EP15150696.1A patent/EP2893968B1/en active Active
- 2015-01-09 JP JP2015002878A patent/JP6224633B2/ja active Active
- 2015-01-13 KR KR1020150006021A patent/KR101713116B1/ko active Active
- 2015-01-13 CN CN201510017698.2A patent/CN104772008B/zh active Active
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