JP2015143513A5 - - Google Patents
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- Publication number
- JP2015143513A5 JP2015143513A5 JP2014042494A JP2014042494A JP2015143513A5 JP 2015143513 A5 JP2015143513 A5 JP 2015143513A5 JP 2014042494 A JP2014042494 A JP 2014042494A JP 2014042494 A JP2014042494 A JP 2014042494A JP 2015143513 A5 JP2015143513 A5 JP 2015143513A5
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- pump
- exhaust
- vacuum pump
- cylindrical portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims description 4
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014042494A JP6331491B2 (ja) | 2013-12-27 | 2014-03-05 | 真空ポンプ |
| US14/559,475 US9771940B2 (en) | 2013-12-27 | 2014-12-03 | Vacuum pump |
| CN201410787893.9A CN104747466B (zh) | 2013-12-27 | 2014-12-17 | 真空泵 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013272207 | 2013-12-27 | ||
| JP2013272207 | 2013-12-27 | ||
| JP2014042494A JP6331491B2 (ja) | 2013-12-27 | 2014-03-05 | 真空ポンプ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015143513A JP2015143513A (ja) | 2015-08-06 |
| JP2015143513A5 true JP2015143513A5 (cg-RX-API-DMAC7.html) | 2017-05-25 |
| JP6331491B2 JP6331491B2 (ja) | 2018-05-30 |
Family
ID=53481196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014042494A Active JP6331491B2 (ja) | 2013-12-27 | 2014-03-05 | 真空ポンプ |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9771940B2 (cg-RX-API-DMAC7.html) |
| JP (1) | JP6331491B2 (cg-RX-API-DMAC7.html) |
| CN (1) | CN104747466B (cg-RX-API-DMAC7.html) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6692635B2 (ja) * | 2015-12-09 | 2020-05-13 | エドワーズ株式会社 | 連結型ネジ溝スペーサ、および真空ポンプ |
| GB2579665B (en) * | 2018-12-12 | 2021-05-19 | Edwards Ltd | Multi-stage turbomolecular pump |
| JP7371852B2 (ja) * | 2019-07-17 | 2023-10-31 | エドワーズ株式会社 | 真空ポンプ |
| JP7638074B2 (ja) * | 2019-09-30 | 2025-03-03 | エドワーズ株式会社 | 真空ポンプ |
| GB2588146A (en) * | 2019-10-09 | 2021-04-21 | Edwards Ltd | Vacuum pump |
| CN114673671B (zh) * | 2020-12-25 | 2024-04-02 | 广东美的白色家电技术创新中心有限公司 | 风机和吸尘装置 |
| JP7672849B2 (ja) * | 2021-03-17 | 2025-05-08 | エドワーズ株式会社 | 真空ポンプ |
| CN113997197A (zh) * | 2021-10-29 | 2022-02-01 | 华海清科股份有限公司 | 一种用于基板减薄的主轴组件及基板减薄装置 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH056195A (ja) | 1991-06-27 | 1993-01-14 | Nec Corp | 会話状況表示装置 |
| JPH056195U (ja) * | 1991-07-03 | 1993-01-29 | セイコー精機株式会社 | 真空ポンプ |
| JP4447684B2 (ja) * | 1999-01-13 | 2010-04-07 | 株式会社島津製作所 | ターボ分子ポンプ |
| JP2001003890A (ja) | 1999-06-23 | 2001-01-09 | Shimadzu Corp | 磁気軸受式ターボ分子ポンプ |
| JP3961273B2 (ja) * | 2001-12-04 | 2007-08-22 | Ｂｏｃエドワーズ株式会社 | 真空ポンプ |
| US7717684B2 (en) * | 2003-08-21 | 2010-05-18 | Ebara Corporation | Turbo vacuum pump and semiconductor manufacturing apparatus having the same |
| JP2005194921A (ja) * | 2004-01-06 | 2005-07-21 | Boc Edwards Kk | 分子ポンプ |
| JP5420323B2 (ja) | 2009-06-23 | 2014-02-19 | 株式会社大阪真空機器製作所 | 分子ポンプ |
| JP5758303B2 (ja) * | 2009-12-11 | 2015-08-05 | エドワーズ株式会社 | ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ |
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2014
- 2014-03-05 JP JP2014042494A patent/JP6331491B2/ja active Active
- 2014-12-03 US US14/559,475 patent/US9771940B2/en active Active
- 2014-12-17 CN CN201410787893.9A patent/CN104747466B/zh active Active