JP2015137991A - Functional elements, sensor device, electronic apparatus and movable body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a functional element preventing noise superimposed on a detection signal due to capacity coupling between wiring and improving detection accuracy.SOLUTION: A functional elements 5 comprises: a substrate 10; a first vibration body 21 having a first outer extension portion 12 serving as an outer extension portion having a fixed potential and being supported by the substrate 10; a first detection fixed electrode section 54 and a second detection fixed electrode section 55 having at least parts closer to an inner side than the first outer extension portion 12 as viewed in a plan view and serving as first fixed electrodes provided on the substrate 10; and first wirings 56 and 60 extending from the first detection fixed electrode section 54 and the second detection fixed electrode section 55 and being provided on the substrate 10. The first wirings 56 and 60 are disposed at positions where the first wirings 56 and 60 overlap with at least a part of the first outer extension portion 12 as viewed in the plan view.

Description

  The present invention relates to a functional element, a sensor device using the functional element, an electronic apparatus, and a moving body.

  In recent years, as a vibrating device, for example, a gyro sensor (capacitive MEMS gyro sensor element) that detects an angular velocity using a silicon MEMS (Micro Electro Mechanical System) technology has been developed. As an example of such a gyro sensor, a gyro sensor provided with a movable inner frame and a movable outer frame provided so as to surround the inner frame is disclosed (for example, Patent Document 1). FIG. 2 and FIG. 1 of Patent Document 2).

  For example, in the gyro sensor disclosed in Patent Document 1, a driving finger and a sensing finger are provided on an inner frame of an annular body having a rectangular opening, and the driving finger and the sensing finger are provided on the inner frame. Opposed fixed dither drive fingers are provided. When the angular velocity is applied, the movement of the driving finger and the sensing finger is detected by a change in capacitance between the driving finger and the sensing finger and the dither driving finger. In this case, the angular velocity is detected by the driving finger, the sensing finger, and the dither driving finger in a region surrounded by the outer frame and the inner frame. In order to exchange signals for this detection, wiring electrodes that lead to the drive fingers and the sensing fingers are wired to the outer frame and the inner frame. Further, another electrode wiring pattern is provided so as to intersect with the outer frame and the inner frame, and is connected to a dither drive finger inside the inner frame.

Special table 2001-515201 gazette JP 2013-217666 A

  However, in the above configuration, the outer frame and the inner frame on which the wiring electrodes are provided and the electrode wiring pattern connected to the dither driving fingers are arranged so as to intersect with each other. Arise. If this noise is superimposed on the detection signal, the detection accuracy as a gyro sensor may be reduced. In addition, the gyro sensor element may be increased in size by drawing out the electrode wiring pattern.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

[Application Example 1]
The functional element according to this application example includes a base body, an outer extension portion, a first vibrating body supported by the base body, and at least a part inside the extension portion in plan view, and the base body A first fixed electrode provided on the base, and a first wiring extending from the first fixed electrode and provided on the base, wherein the outer extension portion has a fixed potential, The wiring is arranged so as to overlap with at least a part of the extension portion in a plan view.

  According to such a functional element, the first wiring extended from the first fixed electrode is provided at a position overlapping the extended portion having a fixed potential in a plan view, and is drawn to the outside of the extended portion. In addition, noise superposition due to capacitive coupling to the first wiring can be reduced. Thereby, it is possible to provide a functional element with reduced characteristic deterioration due to the influence of noise. In addition, since the restriction on the routing pattern of the first wiring, such as the positional relationship with other electrodes, can be reduced, the first wiring can be efficiently routed, so that an increase in the size of the functional element can be suppressed.

  In the description according to the present invention, the word “upper” is used, for example, “specifically” (hereinafter referred to as “A”) is formed above another specific thing (hereinafter referred to as “B”). The word “above” is used to include the case where B is formed directly on A and the case where B is formed on A via another object. Used.

  In the description of the present invention, the term “plan view” is used as a term meaning “plan view seen from the normal direction of the base surface on which the vibrating body of the base is provided”. Further, the term “fixed potential” is used as a term meaning “a potential that does not vary, such as a power supply or a reference potential”.

[Application Example 2]
In the functional element according to the application example described above, it is preferable that a driving unit that vibrates the first vibrating body is provided on a side opposite to the first fixed electrode with respect to the extended portion in plan view.

  According to such a functional element, the first fixed electrode is disposed so as to overlap the extended portion in a plan view, and the drive portion provided on the opposite side of the extended portion to the first fixed electrode overlaps with the extended portion. Don't be. In addition, since the extended portion has a fixed potential, it is possible to suppress capacitive coupling due to noise of the drive unit. In addition, since the first wiring is disposed between the first fixed electrode and the driving unit, the wiring efficiency can be improved, and the increase in size of the element can be prevented.

[Application Example 3]
In the functional element according to the application example described above, the first movable body is provided with a first movable electrode at a position at least partially facing the first fixed electrode and not overlapping the first wiring. Is preferred.

  According to such a functional element, since the first fixed electrode and the first wiring are arranged so as not to overlap the first movable electrode, the first movable electrode is connected to the first fixed electrode and the first wiring. It is possible to prevent electrical suction.

[Application Example 4]
In the functional element according to the application example, the first vibrating body is supported by the base via an elastic portion that can expand and contract in a first direction, and the first wiring is the first wiring in a plan view. It is preferable to have a portion extending along the first direction in a region where the outer extension portion and the outer extension portion overlap.

  According to such a functional element, the first wiring extends along the first direction in a region where the first wiring and the extension portion overlap in a plan view, and the first vibrating body extends in the first direction. Since the first wiring does not come off from the extended portion even if it vibrates, capacitive coupling can be suppressed even when the first vibrating body is vibrating.

[Application Example 5]
In the functional element according to the application example, the base includes a second fixed electrode that is arranged in parallel with the first fixed electrode, and a second wiring that extends from the second fixed electrode. Preferably, the first wiring overlaps with one side of the extension part in plan view, and the second wiring overlaps with the other side of the extension part in plan view.

  According to such a functional element, the first wiring overlaps with the outer extension portion on one side, and the second wiring overlaps with the outer extension portion on the other side. As a result, an electrical attractive force or an electrical repulsive force acting between the outer extension portion on one side and the first wiring, and an electric attractive force or an electric force acting between the outer extension portion on the other side and the second wiring. Since the repulsive force is the same, it is possible to prevent the inclination of the first vibrating body caused by the difference in electrical force.

[Application Example 6]
In the functional element according to the application example, the first vibrating body, a second vibrating body arranged in parallel in the direction along the first direction, and the first vibrating body and the second vibrating body are connected. A connecting portion that can expand and contract in a direction along the first direction, and the first and second vibrating bodies are provided with the first fixed electrode and the second fixed electrode, respectively. The first fixed electrode of the first vibrating body and the second fixed electrode of the second vibrating body are connected to the first wiring, and the second fixed electrode of the first vibrating body; It is preferable that the first fixed electrode of the second vibrating body is connected to the second wiring.

  According to such a functional element, the first vibrating body and the second vibrating body can be vibrated in mutually opposite phases, and can be used for, for example, a gyro sensor.

[Application Example 7]
In the functional element according to the application example described above, it is preferable that at least one of the first wiring and the second wiring is disposed in a recess provided in the base.

  According to such a functional element, it is possible to further reduce capacitive coupling generated in the wiring by providing the wiring in the recess.

[Application Example 8]
A sensor device according to this application example includes the functional element according to any one of the application examples described above and a lid that is bonded to the base of the functional element and covers at least the first vibrating body and the second vibrating body. And.

  According to the sensor device according to the present application, noise superimposition due to capacitive coupling is reduced, and the functional element with stable characteristics is covered with the lid, so that a sensor device with stable characteristics can be provided.

[Application Example 9]
An electronic apparatus according to this application example includes the functional element according to any one of the application examples described above.

  According to the electronic device according to the present application, since the noise superposition due to capacitive coupling is reduced and the functional element having stable characteristics is used, an electronic apparatus having more stable characteristics can be provided.

[Application Example 10]
The moving body according to this application example includes the functional element according to any one of the application examples described above.

  According to the moving body according to the present application, noise superposition due to capacitive coupling is reduced, and a functional element having stable characteristics is used, and the performance of the moving body can be stabilized.

The top view which shows typically the gyro sensor which concerns on 1st Embodiment. Sectional drawing which shows typically the gyro sensor which concerns on 1st Embodiment. Sectional drawing which shows typically the gyro sensor which concerns on 1st Embodiment. Sectional drawing which shows typically the gyro sensor which concerns on 2nd Embodiment. The schematic plan view explaining operation | movement of the gyro sensor which concerns on this embodiment. The schematic plan view explaining operation | movement of the gyro sensor which concerns on this embodiment. The schematic plan view explaining operation | movement of the gyro sensor which concerns on this embodiment. The schematic plan view explaining operation | movement of the gyro sensor which concerns on this embodiment. The perspective view which shows typically the structure of the mobile personal computer as an example of an electronic device. The perspective view which shows typically the structure of the mobile telephone as an example of an electronic device. The perspective view which shows typically the structure of the digital still camera as an example of an electronic device. The perspective view which shows typically the structure of the motor vehicle as an example of a mobile body.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below do not unduly limit the contents of the present invention described in the claims. In addition, not all of the configurations described below are essential constituent requirements of the present invention.

1. Gyro sensor 1-1. Configuration of Gyro Sensor According to First Embodiment First, a first embodiment of a gyro sensor as an electronic device using a gyro element as a functional element according to the present invention will be described with reference to the drawings. FIG. 1 is a plan view schematically showing the gyro sensor 100 according to the first embodiment. FIG. 2 is a cross-sectional view taken along line AA of FIG. 1 schematically showing the gyro sensor 100 according to the first embodiment. FIG. 3 is a cross-sectional view taken along line BB in FIG. 1 schematically showing the gyro sensor 100 according to the first embodiment. 1 to 3 illustrate an X axis (first direction), a Y axis (second direction), and a Z axis (third direction) as three axes orthogonal to each other.

  As shown in FIGS. 1 and 2, the gyro sensor 100 includes a base 10 and a functional element 5. The functional element 5 includes a vibrating body 20, a spring part 30 as an elastic part, a drive part 40, and a detection part 50. In the gyro sensor 100, the detection unit 50 constituting the functional element 5 is a gyro sensor element (capacitive MEMS gyro sensor element) that detects an angular velocity around the Z axis. For convenience, FIG. 1 shows the base body 10 and the lid body 80 in a perspective view. Further, viewing from the normal direction of the first surface 11 (see FIG. 2), which is a base surface on which the vibrating body 20 of the base body 10 is provided, that is, viewing the vibrating body 20 supported by the base body 10 from above. Hereinafter, it is referred to as “plan view”.

  The material of the base 10 is, for example, glass or silicon. As shown in FIG. 2, the base 10 has a first surface 11 and a second surface 11 b opposite to the first surface 11. A recess 14 is provided in the first surface 11. Above the recess 14, the vibrating body 20 (the first vibrating body 21, the second vibrating body 22, and the connecting spring part 26) and the spring part 30 are provided via a gap. By the recess 14, the vibrating body 20 can be moved in a desired direction without being obstructed by the base 10. The planar shape (the shape when viewed from the Z-axis direction) of the recess 14 is not particularly limited, but is rectangular in the example shown in FIG. The recess 14 is formed by, for example, a photolithography technique and an etching technique.

  As shown in FIG. 2, the base 10 has a first fixing portion 15 that is appropriately provided on the first surface 11 in accordance with the form of the vibrating body 20. The first fixing portion 15 is a portion that supports one end of the spring portion 30 that supports the vibrating body 20 and supports the vibrating body 20 via the spring portion 30. As shown in FIGS. 1 and 2, the first fixing portion 15 may be disposed so as to sandwich the vibrating body 20 in the X-axis direction.

  In addition, the base 10 has a second fixing portion 16 that is appropriately provided on the first surface 11 according to the form of the vibrating body 20 as shown in FIG. The second fixing portion 16 is a portion that supports (is connected to) one end of an elastic body 28 that extends from the connecting spring portion 26 of the vibrating body 20 and supports the connecting spring portion 26 via the elastic body 28. As shown in FIG. 3, the second fixing portion 16 is disposed so as to support at least the elastic body 28.

  The first surface 11 (base 10) of the first fixing portion 15 and the second fixing portion 16, the spring portion 30, the driving fixed electrode portion 42, the first detecting fixed electrode portion 54, and the second detecting fixing, which will be described later. A method for fixing (joining) the electrode portion 55 and the like is not particularly limited. For example, when the material of the base 10 is glass and the material of the vibrating body 20 or the like is silicon, anodic bonding may be applied. it can.

  As shown in FIG. 2, the vibrating body 20 is accommodated in a cavity 82 surrounded by the base body 10 and the lid body 80. The vibrating body 20 is provided above the base 10 via a gap (concave portion 14). The vibrating body 20 is supported on the first surface 11 of the base body 10 (on the base body 10) via a spring portion 30. As shown in FIG. 1, the vibrating body 20 includes a first vibrating body 21 and a second vibrating body 22, a connecting spring portion 26, and an elastic body 28.

  The material of the vibrating body 20 is, for example, silicon imparted with conductivity by doping impurities such as phosphorus and boron. The vibrating body 20 is formed, for example, by processing a silicon substrate (not shown) by a photolithography technique and an etching technique.

  The first vibrating body 21 and the second vibrating body 22 are juxtaposed in a direction along the X axis (first direction) and are connected by a connecting spring portion 26. In addition, the first vibrating body 21 and the second vibrating body 22 are supported by the first fixing portion 15 via the spring portion 30 and are spaced apart from the base body 10. More specifically, the first vibrating body 21 and the second vibrating body 22 are provided above the base body 10 via a gap (concave portion 14). The first vibrating body 21 and the second vibrating body 22 can have, for example, a frame shape (saddle shape). The first vibrating body 21 is provided with the first outer extension 12, and the second vibrating body 22. Is provided with a second extension 13. The first outer extension 12 and the second outer extension 13 have an electrically fixed potential. The first extension part 12 and the second extension part 13 in this example have a ground (GND) potential as a fixed potential. Note that the fixed potential is not limited to, for example, ground (installation), but may be a potential that does not vary, such as a power supply or a reference potential. As shown in FIG. 1, the first vibrating body 21 and the second vibrating body 22 may have a shape that is symmetric with respect to the boundary line BB (straight line along the Y axis) of both.

  The connecting spring portion 26 as a connecting portion is configured to be able to displace the first vibrating body 21 and the second vibrating body 22 in the X-axis direction. More specifically, the connecting spring portion 26 extends in the direction along the X axis between the first vibrating body 21 and the second vibrating body 22 and extends in the X axis direction while reciprocating in the Y axis direction. have. Thereby, the 1st vibrating body 21 and the 2nd vibrating body 22 can vibrate in a mutually opposite phase in the X-axis direction.

  The elastic body 28 extends from the connecting spring portion 26 in a direction along the Y axis (a direction orthogonal to the direction in which the vibrating body 20 vibrates), and is fixed (joined) to the second fixing portion 16. Specifically, as shown in FIGS. 1 and 3, one end of the elastic body 28 is connected to the connecting spring portion 26 at the extended position 27. The other end (tip portion 29) of the elastic body 28 is joined (fixed) to the second fixing portion 16 (the first surface 11 of the base body 10). The configuration of the elastic body 28 is not limited as long as it can be elastically deformed by a predetermined spring constant in the direction along the X axis (the direction in which the vibrating body 20 vibrates).

  Here, the spring constant of the elastic body 28 in the direction along the X axis can be set to be smaller than the spring constant of the connecting spring portion 26 in the direction along the X axis.

  In addition, the arrangement of the extended position 27 from which the elastic body 28 extends includes the spring constant (K1) of the connecting spring portion 26a from the extended position 27 to the first vibrating body 21 and the second vibration from the extended position 27. The spring constant (K2) of the connecting spring portion 26b up to the body 22 can be determined to be equal.

  As shown in FIGS. 1 and 3, for example, the elastic body 28 has a width W (width in the X-axis direction), a thickness T (thickness in the Z-axis direction), and a length L1 (length in the Y-axis direction). A plate-like member (cuboid) may be used. The length L1 of the elastic body 28 is a length excluding the distal end portion 29 that is joined to the second fixing portion 16 and cannot be substantially elastically deformed. Here, the elastic body 28 has a high aspect ratio (W <T) shape. The shape (width W, thickness T, length L1) of the elastic body 28 is appropriately adjusted in order to obtain a desired spring constant of the elastic body 28.

  By forming the elastic body 28 in such a shape, high alignment accuracy is not required in the manufacturing process, and the spring constant of the elastic body 28 can be easily adjusted. In addition, since the elastic body 28 has a highly symmetric shape, the symmetry of the vibrating body 20 in the X-axis direction can be easily maintained.

  The spring portion 30 as an elastic portion is configured to displace the vibrating body 20 in the X-axis direction. More specifically, the spring portion 30 extends from the first fixed portion 15 to the vibrating body 20 (the first vibrating body 21 or the second vibrating body 22) in the direction along the X axis, and reciprocates in the Y axis direction. It has a shape that extends in the X-axis direction. Specifically, one end of the spring portion 30 is joined (fixed) to the first fixing portion 15 (the first surface 11 of the base body 10). Further, the other end of the spring portion 30 is connected to the vibrating body 20 (the first vibrating body 21 or the second vibrating body 22). In the illustrated example, four spring portions 30 are provided so as to sandwich the vibrating body 20 in the X-axis direction.

  The material of the spring portion 30 is, for example, silicon imparted with conductivity by being doped with impurities such as phosphorus and boron. The spring portion 30 is formed by, for example, integrally processing a silicon substrate (not shown) together with the vibrating body 20 by a photolithography technique and an etching technique.

  The detection unit 50 is connected to the vibrating body 20 (the first vibrating body 21 and the second vibrating body 22). In the present embodiment, the detection unit 50 is provided inside the first outer extension 12 of the first vibrating body 21 and the second outer extension 13 of the second vibrating body 22. The detection unit 50 includes a detection support unit 51, a detection spring unit 52, a detection movable electrode unit 53 as a first movable electrode, and a detection fixed electrode unit (first fixed electrode and second fixed electrode). As a first detection fixed electrode portion 54 and a second detection fixed electrode portion 55. The shape of the detection support 51 is not particularly limited as long as it is an annular shape. The detection support 51 has, for example, a frame shape.

  The detection spring portion 52 is disposed outside the detection support portion 51. The detection spring portion 52 connects the detection support portion 51 and the vibrating body 20 (the first vibrating body 21 or the second vibrating body 22). More specifically, one end of the detection spring portion 52 is connected to the detection support portion 51. The other end of the detection spring portion 52 is connected to the vibrating body 20 (the first vibrating body 21 or the second vibrating body 22). The detection spring portion 52 is configured to be able to displace the detection support portion 51 in the Y-axis direction. More specifically, the detection spring portion 52 has a shape extending in the Y-axis direction while reciprocating in the X-axis direction. The detection movable electrode portion 53 is disposed inside the detection support portion 51 and connected to the detection support portion 51. In the illustrated example, the detection movable electrode portion 53 extends along the X axis.

  The first detection fixed electrode portion 54 and the second detection fixed electrode portion 55 are disposed inside the detection support portion 51. The first detection fixed electrode portion 54 and the second detection fixed electrode portion 55 are joined (fixed) to the bottom surface 11 a of the recess 14 provided in the first surface 11 of the base 10. In the illustrated example, a plurality of first detection fixed electrode portions 54 and a plurality of second detection fixed electrode portions 55 are provided, and are arranged to face each other via the detection movable electrode portion 53. In other words, the first detection fixed electrode portion 54 and the second detection fixed electrode portion 55 are arranged so as not to overlap the detection movable electrode portion 53 in plan view. Further, first wirings 56 and 60 electrically connected to the first detection fixed electrode portion 54 are extended from the first detection fixed electrode portion 54 of the first vibrating body 21 to be fixed to the second detection fixed electrode portion 54. From the electrode portion 55, second wirings 57 and 61 electrically connected to the second detection fixed electrode portion 55 are extended. Similarly, from the first detection fixed electrode portion 54 of the second vibrating body 22, second wirings 59 and 61 electrically connected to the first detection fixed electrode portion 54 are extended, and the second detection use electrode 54. From the fixed electrode portion 55, first wirings 58 and 60 electrically connected to the second detection fixed electrode portion 55 are extended.

  The first wirings 56 and 60 on the first vibrating body 21 side are a portion of the first wiring 56 extending in the direction along the Y axis and a portion of the first wiring 60 extending in the direction along the X axis. And are connected. Similarly, the first wirings 58 and 60 on the second vibrating body 22 side are the first wiring 58 that extends in the direction along the Y axis and the first wiring 58 that extends in the direction along the X axis. One wiring 60 is connected. The portion of the first wiring 56 extending in the direction along the Y axis is disposed at a position overlapping the outer extension portion along the Y axis in the first extension portion 12 of the first vibrating body 21 in plan view. Similarly, the first wiring 58 is disposed at a position overlapping the extension portion along the Y axis in the second extension portion 13 of the second vibrating body 22 in plan view. In other words, the first wires 56 and 58 are arranged so as not to overlap the detection movable electrode portion 53 in plan view. In addition, the first wiring 60 in a portion extending in the direction along the X axis includes one outer extension 12 b of the first outer extension 12 of the first vibrating body 21 and the second outer extension 13 of the second vibrating body 22. One end portion 13b of the base member 10 is arranged at a position overlapping with the one outer extension 13b in plan view, and an end portion thereof is connected to a connection terminal 62 provided on the first surface 11 of the base 10.

  The second wirings 57 and 61 on the first vibrating body 21 side are a portion of the second wiring 57 extending in the direction along the Y axis and a portion of the second wiring 61 extending in the direction along the X axis. And are connected. Similarly, the second wirings 59 and 61 on the second vibrating body 22 side are the second wiring 59 that extends in the direction along the Y axis and the second wiring 59 that extends in the direction along the X axis. Two wirings 61 are connected. The portion of the second wiring 57 that extends in the direction along the Y axis is disposed at a position overlapping the outer extension portion along the Y axis in the first extension portion 12 of the first vibrating body 21 in plan view. Similarly, the second wiring 59 is disposed at a position overlapping the extension portion along the Y axis in the second extension portion 13 of the second vibrating body 22 in plan view. In other words, the second wirings 57 and 59 are disposed so as not to overlap the detection movable electrode portion 53 in plan view. In addition, the second wiring 61 in a portion extending in the direction along the X axis includes the other outer extension 12 a of the first outer extension 12 of the first vibrating body 21 and the second outer extension 13 of the second vibrating body 22. The other end 13a is disposed at a position overlapping with the other extension 13a in plan view, and an end thereof is connected to a connection terminal 63 provided on the first surface 11 of the base 10.

  The first wirings 56, 58, 60 and the second wirings 57, 59, 61 are joined (fixed) to the bottom surface 11 a of the recess 14 provided on the first surface 11 of the base 10. The first wirings 56, 58, 60 and the second wirings 57, 59, 61 are the first detection fixed electrode portions 54 located inside the vibrating body 20 (the first vibrating body 21 and the second vibrating body 22). And a function of deriving an electric signal of the second detection fixed electrode portion 55 to the outside of the vibrating body 20.

  As described above, the first wirings 56, 58, 60 and the second wirings 57, 59, 61 extending from the first detection fixed electrode portion 54 and the second detection fixed electrode portion 55 as the first fixed electrodes are provided. Since the first extended portion 12 and the second extended portion 13 having a fixed potential are provided at a position overlapping the first extended portion 12 and the second extended portion 13 in a plan view, and are drawn to the outside of the vibrating body 20, the first wirings 56, 58, 60, and The functional element 5 in which noise superposition due to capacitive coupling to the two wirings 57, 59, 61 is reduced can be provided.

  In addition, since the restriction on the routing pattern of the first wirings 56, 58, 60 and the second wirings 57, 59, 61 such as the positional relationship with other electrodes can be reduced, the first wirings 56, 58, 60, And since the 2nd wiring 57, 59, 61 can be routed efficiently, the enlargement of the functional element 5 can be suppressed.

  In addition, the first detection fixed electrode portion 54 and the second detection fixed electrode portion 55, the first wirings 56, 58, 60 and the second wirings 57, 59, 61 are arranged in a plane with the detection movable electrode portion 53. It is arranged so that it does not overlap visually. Thereby, the detection movable electrode portion 53 is electrically connected to the first detection fixed electrode portion 54, the second detection fixed electrode portion 55, the first wirings 56, 58, 60, and the second wirings 57, 59, 61. It is possible to provide the functional element 5 that can prevent the suction.

  Further, the first wiring 60 and the second wiring 61 are along the X axis in a region where the first and second extensions 12b and 13b and the other extensions 12a and 13a overlap in the plan view. It extends along the direction (first direction). Thus, even if the first vibrating body 21 and the second vibrating body 22 vibrate in the direction along the X axis (first direction), the first wiring extends from the region of the first extension portion 12 and the second extension portion 13. Provided is a functional element 5 capable of suppressing capacitive coupling even when the first vibrating body 21 and the second vibrating body 22 are vibrating because the 60 and the second wiring 61 do not come off in plan view. Can do.

  The material of the detection unit 50 is, for example, silicon imparted with conductivity by being doped with impurities such as phosphorus and boron. The detection unit 50 is formed by, for example, integrally processing a silicon substrate (not shown) together with the vibrating body 20 by a photolithography technique and an etching technique.

  The drive unit 40 has a first fixed electrode portion 54 for detection as a first fixed electrode with respect to the first extended portion 12 of the first vibrating body 21 and the second extended portion 13 of the second vibrating body 22 in plan view. Further, the second detection fixed electrode portion 55 is provided on the opposite side. Accordingly, the first detection fixed electrode portion 54 and the second detection fixed electrode portion 55 can be arranged so as not to overlap with the drive unit 40. In addition, since the first outer extension 12 and the second outer extension 13 are at a fixed potential, capacitive coupling to the first detection fixed electrode 54 and the second detection fixed electrode 55 due to noise of the drive unit 40 is suppressed. It becomes possible.

  The drive unit 40 has a mechanism that can excite the first vibrating body 21 or the second vibrating body 22 of the vibrating body 20. Note that the configuration and number of the drive units 40 are not particularly limited as long as the first vibrating body 21 or the second vibrating body 22 can be excited. For example, the drive unit 40 may be provided directly on the vibrating body 20. As shown in FIG. 1, the driving movable electrode portion 41 is connected to the outside of the vibrating body 20, and the driving fixed electrode portion 42 is disposed to face the driving movable electrode portion 41 at a predetermined distance. May be. Although not shown, the drive unit 40 may have a mechanism for exciting the vibrating body 20 by electrostatic force or the like without being directly connected to the vibrating body 20 and may be disposed outside the vibrating body 20.

  A plurality of driving movable electrode portions 41 may be connected to the first vibrating body 21 and the second vibrating body 22 and provided. In the present embodiment, the drive movable electrode portion 41 includes a trunk portion that extends from the first vibrating body 21 and the second vibrating body 22 in the + Y-axis direction (or −Y-axis direction), a + X-axis direction from the trunk, and A comb-like electrode having a plurality of branches extending in the X-axis direction is formed.

  The driving fixed electrode portion 42 is disposed outside the driving movable electrode portion 41. The driving fixed electrode portion 42 is bonded (fixed) to the first surface 11 of the base 10. In the present embodiment, a plurality of driving fixed electrode portions 42 are provided, and are arranged to face each other via the driving movable electrode portion 41. When the drive movable electrode portion 41 has a comb-like shape, the shape of the drive fixed electrode portion 42 may be a comb-like electrode corresponding to the drive movable electrode portion 41.

  The driving movable electrode portion 41 and the driving fixed electrode portion 42 are electrically connected to a power source (not shown). When a voltage is applied to the driving movable electrode portion 41 and the driving fixed electrode portion 42, an electrostatic force can be generated between the driving movable electrode portion 41 and the driving fixed electrode portion 42. Thereby, the spring part 30 can be expanded-contracted along an X-axis, and the vibrating body 20 can be vibrated along an X-axis.

  The material of the drive unit 40 is, for example, silicon imparted with conductivity by being doped with impurities such as phosphorus and boron. The drive unit 40 is formed by, for example, integrally processing a silicon substrate (not shown) together with the vibrator 20 by a photolithography technique and an etching technique.

  The lid body 80 is provided on the base body 10. The base body 10 and the lid body 80 can constitute a package as shown in FIG. The base body 10 and the lid body 80 can form a cavity 82, and the vibrating body 20 can be accommodated in the cavity 82. For example, the joint portion between the base body 10 and the lid 80 shown in FIG. 2 may be filled with an adhesive member or the like. In this case, the cavity 82 has, for example, an inert gas (for example, nitrogen gas) atmosphere. Or may be sealed in a vacuum atmosphere.

  The material of the lid 80 is, for example, silicon or glass. The method for joining the lid 80 and the base 10 is not particularly limited. For example, when the base 10 is made of glass and the lid 80 is made of silicon, the base 10 and the lid 80 are made of an anode. Can be joined.

  According to the gyro sensor 100 according to the first embodiment, the first wirings 56, 58, 60 extended from the first detection fixed electrode portion 54 and the second detection fixed electrode portion 55 as the first fixed electrodes, and Since the second wirings 57, 59, 61 are provided at positions that overlap with the first outer extension 12 and the second outer extension 13 having a fixed potential in a plan view, and are drawn out to the outside of the vibrating body 20, the first Noise superposition due to capacitive coupling to the wirings 56, 58, 60 and the second wirings 57, 59, 61 can be reduced.

  In addition, since the restriction on the routing pattern of the first wirings 56, 58, 60 and the second wirings 57, 59, 61 such as the positional relationship with other electrodes can be reduced, the first wirings 56, 58, 60, And since the 2nd wiring 57, 59, 61 can be routed efficiently, the enlargement of the functional element 5 can be suppressed.

  In addition, the first detection fixed electrode portion 54 and the second detection fixed electrode portion 55, the first wirings 56, 58, 60 and the second wirings 57, 59, 61 are arranged in a plane with the detection movable electrode portion 53. It is arranged so that it does not overlap visually. Thereby, the detection movable electrode portion 53 is electrically connected to the first detection fixed electrode portion 54, the second detection fixed electrode portion 55, the first wirings 56, 58, 60, and the second wirings 57, 59, 61. It is possible to prevent suction.

  Further, the first wiring 60 and the second wiring 61 are along the X axis in a region where the first and second extensions 12b and 13b and the other extensions 12a and 13a overlap in the plan view. It extends along the direction (first direction). Thereby, even if the 1st vibrating body 21 and the 2nd vibrating body 22 vibrate in the direction (1st direction) along the X-axis, it is the 1st wiring 60 from the area | region of the 1st extension part 12 and the 2nd extension part 13. Since the second wiring 61 does not come off in plan view, capacitive coupling can be suppressed even when the first vibrating body 21 and the second vibrating body 22 are vibrating.

  Also, in plan view, the first fixed electrode portion 54 for detection and the second fixed electrode portion 54 as the first fixed electrode with respect to the first extended portion 12 of the first vibrating body 21 and the second extended portion 13 of the second vibrating body 22. The drive unit 40 is provided on the side opposite to the detection fixed electrode unit 55. Accordingly, the first detection fixed electrode portion 54 and the second detection fixed electrode portion 55 can be arranged so as not to overlap with the drive unit 40. In addition, since the first outer extension 12 and the second outer extension 13 are at a fixed potential, capacitive coupling to the first detection fixed electrode 54 and the second detection fixed electrode 55 due to noise of the drive unit 40 is suppressed. It becomes possible.

  Further, since the elastic body 28 can be elastically deformed in the vibration direction of the vibration body 20, the connecting spring portion is not hindered from interfering with vibration energy exchange between the first vibration body 21 and the second vibration body 22. 26 can be supported.

  Moreover, when the vibrating body 20 is comprised from the two 1st vibrating bodies 21 and the 2nd vibrating body 22, or when the some spring part 30 is provided, the dimension of each member is not the same, but a dimension dispersion | variation ( Error). As a result, not only the desired anti-phase mode but also the in-phase mode occurs in the vibration mode of the drive system. According to the gyro sensor 100, by providing the elastic body 28 fixed (anchored) to the second fixed portion 16, it is possible to separate the drive frequency of the common mode from the reverse phase mode in the vibration mode of the drive system.

1-2. Configuration of Gyro Sensor According to Second Embodiment A second embodiment of a gyro sensor as an electronic device using a gyro element as a functional element according to the present invention will be described with reference to the drawings. FIG. 4 is a cross-sectional view corresponding to the cross section taken along line AA of FIG. 1 showing the first embodiment schematically showing the gyro sensor 102 according to the second embodiment. In the following description, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  The gyro sensor 102 of the second embodiment includes a first detection fixed electrode portion 54 and a second detection fixed electrode portion 55 as first fixed electrodes, first wirings 56, 58 and 60, and a second wiring 57. , 59, 61 are different from the gyro sensor 100 of the first embodiment described above. Hereinafter, the gyro sensor 102 according to the second embodiment will be specifically described with a focus on a different configuration from the gyro sensor 100 according to the first embodiment.

  As shown in FIG. 4, the gyro sensor 102 of the second embodiment includes a base 10 and a functional element 5 as in the first embodiment. The functional element 5 includes a vibrating body 20, a spring part 30 as an elastic part, a drive part 40, and a detection part 50. In the gyro sensor 100, the detection unit 50 constituting the functional element 5 is a gyro sensor element (capacitive MEMS gyro sensor element) that detects an angular velocity around the Z axis.

  In the gyro sensor 102 of the second embodiment, the first detection fixed electrode portion 54 and the second detection fixed electrode portion 55 as the first fixed electrodes, the first wirings 56, 58, and 60, and the second wiring 57, 59 and 61 are disposed in a recess 65 dug down from the bottom surface 11 a of the recess 14 provided in the base 10. It should be noted that at least one of the first wirings 56, 58, 60 and the second wirings 57, 59, 61 may be disposed in the recess 65. Thereby, it is possible to provide the functional element 5 that can further reduce the capacitive coupling generated in the first wirings 56, 58, and 60 and the second wirings 57, 59, and 61.

  Further, as shown in FIG. 4, the first surface 11 of the base body 10 is also provided with a recess 66, and the first wiring 60, the second wiring 61, and the connection terminals 62 and 63 are arranged in the recess 66. May be. The first surface 11 of the base body 10 is also provided with a recess 66, and the first wiring 60, the second wiring 61, and the connection terminals 62 and 63 are arranged in the recess 66. The present invention can also be applied to the gyro sensor 100 of the embodiment.

  According to the gyro sensor 102 of the second embodiment as described above, since at least one of the first wirings 56, 58, 60 and the second wirings 57, 59, 61 is disposed in the recess 66, Capacitive coupling generated in the wirings 56, 58, 60 and the second wirings 57, 59, 61 can be further reduced.

1-3. Operation of Gyro Sensor Next, the operation of the gyro sensors 100 and 102 will be described with reference to the drawings. 5-8 is a figure for demonstrating typically operation | movement of the gyro sensor 100,102. 5 to 8, the X axis, the Y axis, and the Z axis are illustrated as three axes orthogonal to each other. For convenience, in FIGS. 5 to 8, each configuration of the gyro sensor 100 is illustrated in a simplified manner. For convenience, in FIGS. 7 and 8, the first vibrating body 21 side of the detection unit 50 is a first detection unit 50 a, and the second vibrating body 22 side is a second detection unit 50 b.

  As described above, in the vibration mode of the gyro sensor 100, the first vibrating body 21 and the second vibrating body 22 are excited by the drive unit 40 and can be driven to vibrate in opposite phases (reverse phase). More specifically, a first alternating voltage is applied between the driving movable electrode portion 41 and the driving fixed electrode portion 42 provided on the first vibrating body 21 to drive the driving movable electrode of the second vibrating body 22. A second alternating voltage that is 180 degrees out of phase with the first alternating voltage is applied between the portion 41 and the driving fixed electrode portion. Thereby, the 1st vibrating body 21 and the 2nd vibrating body 22 can be vibrated along an X-axis with a mutually opposite phase (reverse phase) and a predetermined frequency. That is, the first vibrating body 21 and the second vibrating body 22 connected to each other along the X axis vibrate in mutually opposite phases along the X axis. That is, the first vibrating body 21 and the second vibrating body 22 are displaced in opposite directions along the X axis.

  In the example shown in FIG. 5, the first vibrating body 21 is displaced in the α1 direction (−X axis direction), and the second vibrating body 22 is displaced in the α2 direction (+ X axis direction) opposite to the α1 direction. Yes. In the example shown in FIG. 6, the first vibrating body 21 is displaced in the α2 direction, and the second vibrating body 22 is displaced in the α1 direction.

  In addition, the part connected to the vibrating body 20 (the first vibrating body 21 and the second vibrating body 22) of the detection unit 50 is accompanied by the vibration of the vibrating body 20 (the first vibrating body 21 and the second vibrating body 22). , Displaced along the X axis.

  As shown in FIGS. 7 and 8, when an angular velocity ω about the Z axis is applied to the gyro sensor 100 in a state where the first vibrating body 21 and the second vibrating body 22 are vibrating along the X axis, Coriolis is applied. Thus, the detecting unit 50 is displaced along the Y axis. That is, the first detection unit 50a connected to the first vibrating body 21 and the second detection unit 50b connected to the second vibrating body 22 are displaced in opposite directions along the Y axis. In the example shown in FIG. 7, the first detection unit 50a is displaced in the β1 direction, and the second detection unit 50b is displaced in the β2 direction opposite to the β1 direction. In the example shown in FIG. 8, the first detection unit 50a is displaced in the β2 direction, and the second detection unit 50b is displaced in the β1 direction.

  As the first detection unit 50a and the second detection unit 50b are displaced along the Y axis, the distance L between the detection movable electrode unit 53 and the first detection fixed electrode unit 54 changes. Therefore, the capacitance between the detection movable electrode portion 53 and the first detection fixed electrode portion 54 changes. In the gyro sensor 100, a capacitance is applied between the detection movable electrode portion 53 and the first detection fixed electrode portion 54 by applying a voltage to the detection movable electrode portion 53 and the first detection fixed electrode portion 54. Can be detected, and the angular velocity ω about the Z axis can be obtained.

  According to the gyro sensor 100, since the elastic body 28 is provided in the connection spring part 26, the influence of the common mode can be reduced in the vibration mode. Thereby, the gyro sensor can achieve a desired vibration frequency, and the reliability of the gyro sensor can be improved.

2. Next, a method for manufacturing a gyro sensor according to this embodiment will be briefly described. In this description, reference is made to FIG. 1 and FIG. 2, and the same reference numerals as those in FIG.

  First, the recess 14 is formed in the first surface 11 of the substrate (base 10). At this time, a groove (not shown) can be formed around the recess 14. The recess 14 and the groove are formed by, for example, a photolithography technique and an etching technique. Thereby, it is possible to prepare the base body 10 in which the concave portion 14 is provided on the first surface 11.

  Next, although not shown, wiring for configuring the drive unit 40 and the detection unit 50 can be formed on the base 10 including the inside of the recess 14. The wiring is formed by, for example, forming a film by a sputtering method, a CVD (Chemical Vapor Deposition) method, or the like and then patterning the film by a photolithography technique and an etching technique.

  Next, the vibrating body 20, the spring portion 30, and the like are formed on the base body 10. More specifically, it is formed by placing (bonding) a silicon substrate (not shown) on the first surface 11 of the base 10, thinning the silicon substrate, and then patterning. The patterning is performed by a photolithography technique and an etching technique. The bonding between the silicon substrate and the substrate 10 is performed by, for example, anodic bonding.

  In this step, the driving fixed electrode portion 42, the first detecting fixed electrode portion 54, and the like can be formed on the first surface 11, and the driving portion 40 and the detecting portion 50 can be formed.

As shown in FIG. 2, the base body 10 and the lid body 80 are joined, and the vibrating body 20 is accommodated in a cavity 82 surrounded by the base body 10 and the lid body 80. The base 10 and the lid 80 are joined by, for example, anodic joining.
Through the above steps, the gyro sensor 100 can be manufactured.

  In the above-described embodiment, the configuration in which the first vibrating body 21 and the second vibrating body 22 are provided is described as an example of the configuration of the vibrating body 20, but the configuration of the vibrating body 20 is, for example, the first A configuration in which only the vibrating body 21 is provided, or a configuration in which three or more first to nth vibrating bodies are used may be employed.

  In the above description, the gyro element used in the gyro sensors 100 and 102 for detecting the angular velocity is described as an example of the functional element 5, but the functional element 5 is not limited to this. The functional element 5 is not particularly limited as long as the functional element 5 operates in a cavity 82 sealed in a reduced pressure state or an inert gas atmosphere. For example, the functional element 5 is an acceleration detection element or pressure gauge used in an acceleration sensor. Various functional elements such as pressure detecting elements, vibrators, microactuators and the like used in the above can be mentioned.

3. Next, an electronic device according to the present embodiment will be described with reference to the drawings. The electronic device according to the present embodiment includes gyro sensors 100 and 102 according to the present invention. Hereinafter, an electronic apparatus including the gyro sensor 100 according to the present invention will be described.

  FIG. 9 is a perspective view schematically showing a mobile (or notebook) personal computer 1100 as the electronic apparatus according to the present embodiment. As shown in FIG. 9, the personal computer 1100 includes a main body portion 1104 having a keyboard 1102 and a display unit 1106 having a display portion 1108. The display unit 1106 has a hinge structure portion with respect to the main body portion 1104. It is supported so that rotation is possible. Such a personal computer 1100 has a built-in gyro sensor 100.

  FIG. 10 is a perspective view schematically showing a mobile phone (including PHS) 1200 as the electronic apparatus according to the present embodiment. As shown in FIG. 10, the cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and a display unit 1208 is disposed between the operation buttons 1202 and the earpiece 1204. . Such a cellular phone 1200 incorporates the gyro sensor 100.

  FIG. 11 is a perspective view schematically showing a digital still camera 1300 as an electronic apparatus according to the present embodiment. Note that FIG. 11 also shows a simple connection with an external device. Here, a conventional camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an image sensor such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

  A display unit 1310 is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to perform display based on an imaging signal from the CCD. The display unit 1310 displays a subject as an electronic image. Functions as a viewfinder. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302. When the photographer confirms the subject image displayed on the display unit 1310 and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308.

  In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. A television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication, if necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation. Such a digital still camera 1300 incorporates the gyro sensor 100.

  The personal computer 1100, the mobile phone 1200, and the digital still camera 1300 as electronic devices as described above do not impede the exchange of vibration energy between the two vibrating bodies in the driving system in which the two vibrating bodies vibrate in opposite phases and are capacitively coupled. It is possible to have the gyro sensor 100 that can prevent deterioration of characteristics due to the above.

  The electronic device provided with the gyro sensor 100 includes, for example, a personal computer 1100 (mobile personal computer) shown in FIG. 9, a mobile phone 1200 shown in FIG. 10, and a digital still camera 1300 shown in FIG. Inkjet ejection device (for example, inkjet printer), laptop personal computer, TV, video camera, head mounted display, video tape recorder, various navigation devices, pager, electronic notebook (including communication function), electronic dictionary, calculator, Electronic game machine, word processor, workstation, videophone, TV monitor for crime prevention, electronic binoculars, POS terminal, medical equipment (eg electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnosis) Location, an electronic endoscope), a fish finder, various measurement devices, gauges (e.g., vehicles, aircraft, rockets, instruments and a ship), attitude control such as a robot or a human body, and the like flight simulators.

4). Mobile Object FIG. 12 is a perspective view schematically showing an automobile as an example of a mobile object according to the present embodiment. The automobile 506 is equipped with a gyro sensor 100 using the functional element 5 (gyro element) according to the present invention. For example, as shown in the figure, an automobile 506 as a moving body includes a gyro sensor 100 using a functional element 5 (gyro element) and an electronic control unit 508 that controls a tire 509 and the like mounted on a vehicle body 507 Has been. The gyro sensor 100 includes keyless entry, immobilizer, car navigation system, car air conditioner, anti-lock brake system (ABS), airbag, tire pressure monitoring system (TPMS), engine The present invention can be widely applied to electronic control units (ECUs) such as controls, battery monitors for hybrid vehicles and electric vehicles, and vehicle body attitude control systems.

  The above-described embodiments are examples, and the present invention is not limited to these. For example, the embodiments can be appropriately combined.

  The present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same objects and effects). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the invention includes a configuration that achieves the same effect as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

  DESCRIPTION OF SYMBOLS 5 ... Functional element (gyro element), 10 ... Base | substrate, 11 ... 1st surface, 11a ... Bottom surface, 11b ... 2nd surface, 12 ... 1st extension part, 12a ... The other extension, 12b ... One extension, 13 ... 2nd Extension part, 13a ... The other extension, 13b ... One extension, 14 ... Recess, 15 ... First fixing part, 16 ... Second fixing part, 20 ... Vibrating body, 21 ... First vibrating body, 22 ... Second vibrating body, 26... Connection spring portion, 27. Extension position, 28. Elastic body, 29. Tip portion, 30. Spring portion, 40. Driving portion, 41 drive movable electrode portion, 42 drive fixed electrode portion, 50. Detection unit 51... Detection support unit 52. Detection spring unit 53. Detection movable electrode unit 54. First detection fixed electrode unit 55. Second detection fixed electrode unit 56. , 57 ... second wiring, 58 ... first wiring, 59 ... second wiring, 60 ... first wiring, 61 ... second wiring, 62, DESCRIPTION OF SYMBOLS 3 ... Connection terminal, 65 ... Recessed part, 66 ... Recessed part, 80 ... Lid, 82 ... Cavity, 100, 102 ... Gyro sensor as electronic device, 506 ... Automobile as moving body, 1100 ... Personal computer as electronic equipment DESCRIPTION OF SYMBOLS 1102 ... Keyboard, 1104 ... Main unit, 1106 ... Display unit, 1108 ... Display unit, 1200 ... Mobile phone as electronic device, 1202 ... Operation button, 1204 ... Earpiece, 1206 ... Mouthpiece, 1208 ... Display unit, DESCRIPTION OF SYMBOLS 1300 ... Digital still camera as electronic equipment, 1302 ... Case, 1304 ... Light receiving unit, 1306 ... Shutter button, 1308 ... Memory, 1310 ... Display unit, 1312 ... Video signal output terminal, 1314 ... Input / output terminal, 1430 ... TV monitor , 1440 ... Personal compilation Ta.

Claims (10)

A substrate;
A first vibrating body having an extended portion and supported by the base;
A first fixed electrode having at least a part inside the extension portion in plan view and provided on the base body;
A first wiring extending from the first fixed electrode and provided on the base body,
The extension portion has a fixed potential,
The functional element, wherein the first wiring is disposed so as to overlap with at least a part of the extended portion in a plan view.   2. The functional element according to claim 1, wherein a driving unit that vibrates the first vibrating body is provided on a side opposite to the first fixed electrode with respect to the extended portion in a plan view.   The first movable body is provided with a first movable electrode provided at a position at least partially facing the first fixed electrode and not overlapping the first wiring. 2. The functional element according to 2. The first vibrating body is supported by the base via an elastic part that can be expanded and contracted in a first direction,
2. The first wiring has a portion extending along the first direction in a region where the first wiring and the outward extending portion overlap in a plan view. The functional element according to claim 3. The substrate is
A second fixed electrode juxtaposed with the first fixed electrode with a gap;
A second wiring extending from the second fixed electrode,
The first wiring overlaps with one side of the extension part in plan view,
5. The functional device according to claim 1, wherein the second wiring overlaps with the other side of the extension portion in a plan view. The first vibrating body and a second vibrating body arranged in parallel in the direction along the first direction;
A connecting portion connected to the first vibrating body and the second vibrating body and capable of extending and contracting in a direction along the first direction;
The first vibrating body and the second vibrating body are provided with the first fixed electrode and the second fixed electrode, respectively.
The first fixed electrode of the first vibrating body and the second fixed electrode of the second vibrating body are connected to the first wiring;
The functional element according to claim 5, wherein the second fixed electrode of the first vibrating body and the first fixed electrode of the second vibrating body are connected to the second wiring.   The functional element according to claim 5, wherein at least one of the first wiring and the second wiring is disposed in a recess provided in the base. A functional element according to any one of claims 1 to 7,
A sensor device comprising: a lid that is bonded to the base of the functional element and covers at least the first vibrating body and the second vibrating body.   An electronic device comprising the functional element according to claim 1.   A moving body comprising the functional element according to claim 1.

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