JP2015132497A - Inspection device and inspection method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection device and inspection method which can suppress the vibrations of an inspection object caused by external vibration.SOLUTION: An inspection device comprises a transparent member, a support part that supports a workpiece so as to form a space between the transparent member and the workpiece, and an installation part in which the transparent member and the support part are installed.

Description

  The present invention relates to an inspection apparatus and an inspection method.

  In the inspection of a workpiece such as an inkjet nozzle plate, for example, it is inspected whether there is a foreign object in a minute hole or the like provided in the workpiece, and whether or not the hole is defective. For example, in the technique described in Patent Literature 1, transmitted light is applied to a work installed in an opening, and the work is photographed by a camera.

JP 2010-175491 A

  However, when the workpiece is thin, the workpiece installed in the opening may vibrate due to external vibration such as air vibration. As a result, even if the technique described in Patent Document 1 is used, the camera may not be focused, and the workpiece that is the inspection object may not be correctly inspected.

  The present invention has been made in view of the above points, and an object of the present invention is to provide an inspection apparatus and an inspection method that can suppress vibration of an inspection object due to external vibration.

The present invention has been made to solve the above-described problems, and one aspect of the present invention is an inspection apparatus, wherein the transparent member and the space are formed between the transparent member and the workpiece. It is an inspection apparatus provided with the support part which supports a workpiece | work, and the installation part in which the said transparent member and the said support part are installed.
According to this configuration, the inspection apparatus includes the transparent member and the support unit that supports the transparent member so as to form a space between the transparent member and the workpiece, thereby suppressing vibration of the workpiece due to external vibration. it can. Moreover, since a space is formed between a transparent member and a workpiece | work without a transparent member and a workpiece | work contacting, it can prevent that the dust adhering to the transparent member adheres to a workpiece | work.

One aspect of the present invention may be an inspection apparatus in which the support portion has a shape that supports the workpiece so as to close the entire outer periphery of the workpiece.
According to this configuration, the inspection apparatus can support the entire outer periphery of the workpiece by the support portion, and can suppress vibration of the workpiece due to air vibration.

One aspect of the present invention may be an inspection apparatus in which the support part includes a fixed support part fixed to the installation part and a movable support part movable with respect to the installation part.
According to this configuration, the inspection apparatus supports the workpiece by the movable support portion and moves even when the inspection of the workpiece supported by the fixed support portion and the movable support portion is completed and the next workpiece is inspected. By doing so, the workpiece can be easily exchanged.

One aspect of the present invention may be an inspection apparatus in which the transparent member is provided on a side pulled by gravity with respect to the workpiece supported by the support portion.
According to this configuration, the inspection apparatus can prevent the dust attached to the transparent member from dropping and attaching to the workpiece.

One aspect of the present invention may be an inspection apparatus in which the transparent member is provided on a side opposite to a side pulled by gravity with respect to the workpiece supported by the support portion.
According to this configuration, the inspection apparatus can suppress the vibration of the workpiece due to the external vibration by providing the transparent member on the side opposite to the side pulled by the gravity of the workpiece.

One aspect of the present invention may be an inspection apparatus in which the transparent member is provided on both the side pulled by gravity with respect to the work supported by the support portion and the opposite side. .
According to this configuration, the inspection apparatus can suppress the vibration of the workpiece due to external vibrations compared to the case where the transparent member is provided on one of the workpieces.

One aspect of the present invention may be an inspection apparatus in which the transparent member is a glass panel or an acrylic panel.
According to this configuration, the inspection apparatus can suppress the vibration of the work due to external vibration, and inspects the work from one or both of the lower side and the upper side of the transparent member through the glass panel or the acrylic panel. be able to.

One aspect of the present invention may be an inspection apparatus including an illumination unit that illuminates the workpiece supported by the support unit, and an imaging unit that images the workpiece supported by the support unit.
According to this configuration, the inspection apparatus can suppress the vibration of the workpiece due to the external vibration, and can take an image while illuminating the workpiece from one or both of the lower side and the upper side of the transparent member. .

One aspect of the present invention is an inspection method, wherein the work is supported so as to form a space between a transparent member and the work, and the supported work is inspected.
According to this configuration, by supporting the work by the support portion so as to form a space between the transparent member and the work, vibration of the work due to external vibration can be suppressed. Moreover, since a space is formed between a transparent member and a workpiece | work without a transparent member and a workpiece | work contacting, it can prevent that the dust adhering to the transparent member adheres to a workpiece | work.

  As described above, according to the present invention, vibration of the workpiece due to external vibration can be suppressed by supporting the workpiece by the support portion so as to form a space between the transparent member and the workpiece. Moreover, since a space is formed between a transparent member and a workpiece | work without a transparent member and a workpiece | work contacting, it can prevent that the dust adhering to the transparent member adheres to a workpiece | work.

It is the schematic which shows an example of a structure of the inspection apparatus which concerns on embodiment of this invention. It is a top view which shows an example of a structure of the test | inspection part which concerns on embodiment of this invention. It is PP sectional drawing which shows an example of a structure of the test | inspection part which concerns on embodiment of this invention. It is a figure which shows an example of a structure of the support part which concerns on embodiment of this invention. It is sectional drawing which shows another example of a structure of the test | inspection part which concerns on embodiment of this invention. It is a top view which shows another example of a structure of the support part which concerns on embodiment of this invention.

(Embodiment)
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic diagram illustrating an example of a configuration of an inspection apparatus 100 according to an embodiment of the present invention.
The inspection apparatus 100 includes a personal computer (PC) 200 and is controlled by the personal computer 200. The inspection apparatus 100 further includes an inspection camera 101, an alignment camera 102, a focus correction displacement meter 103, an X stage STX, a Y stage STY, a Z stage STZ, and an inspection unit KB. The inspection part KB includes a support part SJ and a transparent member TB.

The inspection camera 101 is disposed on a Z stage STZ that moves in the Z-axis direction of the inspection apparatus 100. Each of the Z stage STZ, the alignment camera 102, and the focus correction displacement meter 103 is disposed on the Y stage STY that moves in the Y axis direction with respect to the inspection apparatus 100. The Y stage STY is disposed on the inspection apparatus 100, for example.
An X stage STX that moves in the X-axis direction of the inspection apparatus 100 is disposed below the inspection apparatus 100. An inspection unit KB is arranged on the X stage STX. The inspection part KB includes a transparent member TB, a support part SJ, and the like. In the inspection unit KB, a work W to be inspected is installed.

  The workpiece W is an inspection target, and is, for example, a wafer. The wafer may have fine holes, for example, like an inkjet nozzle plate. The work W is installed in the inspection unit KB by a robot or a person when the inspection is started, and is removed from the inspection unit KB by the robot or a person when the inspection is completed.

  The inspection camera 101 is a camera whose lens magnification is higher than that of the alignment camera 102. The inspection camera 101 images the workpiece W installed on the X stage STX as an inspection target.

  The alignment camera 102 is a camera whose lens magnification is lower than that of the inspection camera 101. The alignment camera 102 is a camera for confirming the position of the workpiece W on the X stage STX. The alignment camera 102 outputs an image signal representing the photographed image to the personal computer 200.

The focus correction displacement meter 103 calculates a focus value to be set in the inspection camera 101. The focus correction displacement meter 103 calculates a movement amount for moving the Z stage STZ based on the focus value. The focus correction displacement meter 103 outputs the calculated movement amount to the personal computer 200.
The personal computer 200 adjusts the position of the X stage STX and the position of the Y stage STY based on the image signal input from the alignment camera 102. The personal computer 200 adjusts the focus of the inspection camera 101 by moving the Z stage STZ based on the movement amount input from the focus correction displacement meter 103.

Next, the inspection unit KB will be described with reference to FIGS.
FIG. 2 is a top view showing an example of the configuration of the inspection unit KB according to the embodiment of the present invention. FIG. 3 is a cross-sectional view taken along the line PP, illustrating an example of the configuration of the inspection unit KB according to the embodiment of the present invention.
The inspection unit KB includes a support unit SJ that supports the workpiece W, a transparent member TB that is disposed below the gravity direction of the workpiece W, and an illumination unit 300 that illuminates the workpiece W from below the transparent member TB. And including. Here, the lower side with respect to the direction of gravity refers to the side pulled by gravity, that is, the surface side of the workpiece W existing in the direction in which gravity works. The transparent member TB is a highly translucent transparent member such as a glass panel or an acrylic panel. For example, the illumination unit 300 illuminates the workpiece W from the lower side with respect to the gravity direction of the workpiece W and from the lower side of the transparent member TB, and the inspection camera 101 photographs the workpiece W.
The transparent member TB is installed on the X stage STX. The transparent member TB is disposed below the support portion SJ that supports the workpiece W so as to form a space in which the distance between the transparent member TB and the workpiece W is a predetermined distance between the transparent member TB and the workpiece W. The predetermined distance between the transparent member TB and the workpiece W may be arbitrary, for example, 2 mm.

In the plane of the X stage STX, for example, a circular hole is provided as an opening. On the plane of the X stage STX, a support part SJ of a hollow circular plate having a diameter larger than that of the opening is provided so as to cover the periphery of the opening.
A transparent member TB is arranged at the lower end in the hollow of the support portion SJ so as to close the opening in the hollow. There is a predetermined distance between the upper surface of the transparent member TB disposed in the hollow of the support portion SJ and the upper surface of the support portion SJ. That is, the hollow height of the support portion SJ is larger than the height (thickness) of the transparent member TB.
With such a configuration, when the workpiece W is installed on the support SJ, a predetermined distance exists between the transparent member TB and the workpiece W, and a space is formed by the distance. . Therefore, the airflow from the opening with respect to the workpiece W can be blocked by the transparent member TB, and the transparent member TB plays the role of a damper, so that the air vibration with respect to the workpiece W can be suppressed.

Next, a support part is demonstrated with reference to FIG.
FIG. 4 is a diagram illustrating an example of the configuration of the support unit according to the embodiment of the present invention.
The support portion SJ includes fixed support portions SJ1a and SJ1b fixed to the X stage STX, and movable movable support portions SJ2a and SJ2b. The fixed support portions SJ1a and SJ1b and the movable support portions SJ2a and SJ2b are combined to support the entire outer periphery of the workpiece W in a substantially unbroken state. Here, the substantially unbroken state is a state in which there is no complete break or there is a slight gap (for example, about several mm to several cm), but the lower surface of the workpiece W with respect to the direction of gravity. It is a state in which the entire outer periphery is closed. That is, with respect to the outer periphery of the workpiece W, the movable support portions SJ2a and SJ2b support portions other than the portions supported by the fixed support portions SJ1a and SJ1b.

For example, the movable support portions SJ2a and SJ2b are raised and lowered under the control of the personal computer 200. When the movable support portions SJ2a and SJ2b are lowered, the movable support portions SJ2a and SJ2b have the same height as the fixed support portions SJ1a and SJ1b, and the fixed support portions SJ1a and SJ1b and the movable support portions SJ2a and SJ2b are substantially unbroken. The entire outer periphery of the workpiece W is supported by
At this time, if the workpiece W is placed on the support portion SJ, the movable support portions SJ2a and SJ2b move up while moving the workpiece W while supporting the outer periphery of the workpiece W when ascending, and move the workpiece W upward when descending. The work W is moved downward while supporting the outer periphery.

Note that the two movable support portions SJ2a and SJ2b may be raised simultaneously under the control of the personal computer 200, or, as another example, one movable support portion SJ2a is raised before the other movable support portion SJ2b. Then, the other movable support SJ2b may be raised.
As described above, since the movable support portions SJ2a and SJ2b are movable, for example, when the movable support portions SJ2a and SJ2b are raised, the workpiece W to be inspected can be replaced by a robot or the like. The workpiece W can be easily replaced. In addition, when the workpiece W is thin, the movable support portions SJ2a and SJ2b move upward so that the workpiece W can be easily gripped when the workpiece W is replaced, and the workpiece W to be inspected can be easily replaced.

  Thus, according to this embodiment, the inspection apparatus 100 includes the transparent member TB, the support portion SJ that supports the workpiece W so as to form a space between the transparent member TB and the workpiece W, and the transparent member TB. And an installation part (X stage STX) on which the support part SJ is installed.

  Accordingly, the inspection apparatus 100 includes the transparent member TB and the support portion SJ that supports the workpiece W so as to form a space between the transparent member TB and the workpiece W, so that the transparent member TB is the workpiece W. It is possible to prevent the dust adhering to the transparent member TB from adhering to the workpiece W without being in direct contact with the workpiece W. Further, since the transparent member TB is disposed, the vibration of the workpiece W due to external vibration such as airflow can be suppressed.

In the above-described embodiment, an example in which the transparent member TB is provided below the gravity direction of the workpiece W has been described. However, the transparent member TB is provided on both the lower side and the upper side with respect to the gravity direction of the workpiece W. May be. This will be described with reference to FIG.
FIG. 5 is a cross-sectional view showing an example of the configuration of the inspection unit KB1 according to the embodiment of the present invention. This cross-sectional view is a cross-sectional view of the same part as the inspection unit KB shown in FIG.
The inspection unit KB1 includes a support SJ that supports the workpiece W, a transparent member TB1 that is disposed below the gravity direction of the workpiece W, and a transparent that is disposed above the gravity direction of the workpiece W. The member TB2 and the illumination unit 300 that illuminates the workpiece W from below the transparent member TB1 are included.

  Here, the upper side with respect to the direction of gravity is the side opposite to the direction pulled by gravity, that is, the surface side of the workpiece W existing in the direction opposite to the direction in which gravity works. The transparent members TB1 and TB2 are highly transparent members such as glass panels and acrylic panels. For example, the illumination unit 300 illuminates the workpiece W from below the gravity direction of the workpiece W and from below the transparent member TB1, and the inspection camera 101 photographs the workpiece W from above the transparent member TB2.

In the inspection unit KB1 in the illustrated example, the support unit SJ, the transparent member TB1 disposed on the lower side with respect to the direction of gravity, the illumination unit 300, and the X stage STX are similar to the configuration illustrated in FIG. It has a configuration.
Further, the transparent member TB2 is disposed on the upper surface of the support portion SJ. The transparent member TB2 has a circular surface having a larger diameter than the transparent member TB1 and the workpiece W. The shape of the transparent member TB2 is a shape in which the inside of the diameter of the circular surface of the transparent member TB2 is recessed so as to form a ridge having a predetermined height. The transparent member TB2 is installed such that the flange portion is in contact with the upper surface of the support portion SJ. With such a configuration, when the workpiece W is installed on the support SJ, a predetermined distance exists between the transparent member TB2 and the workpiece W depending on the height of the ridges of the transparent member TB2, and the distance A space is formed by the presence. Therefore, the airflow from the upper side with respect to the gravity direction of the workpiece W can be blocked by the transparent member TB2, and the transparent member TB2 serves as a damper, so that air vibration to the workpiece W can be suppressed.

The distance between each of the transparent member TB1 and the transparent member TB2 and the workpiece W may be different distances or the same distance.
As described above, by providing the transparent members TB1 and TB2 on both the lower side and the upper side with respect to the gravity direction of the workpiece W, air is provided more than when the transparent member is provided only on the lower side with respect to the gravity direction of the workpiece W. The vibration of the workpiece W due to vibration can be suppressed.
As another configuration example, a configuration in which only the upper transparent member TB2 with respect to the gravity direction of the workpiece W is provided and the lower transparent member TB1 with respect to the gravity direction of the workpiece W is not provided may be used. Moreover, the structure which operate | moves transparent member TB2 with a movable support part may be sufficient.

Moreover, although the above-mentioned embodiment demonstrated the example which a part of support part moves, a movable part does not need to be a part of support part. This will be described with reference to FIG.
FIG. 6 is a top view showing another example of the configuration of the support portion SJ according to the embodiment of the present invention.
In the plane of the X stage STX, for example, a circular hole is provided as an opening. On the plane of the X stage STX, a support part SJ of a hollow circular plate having a diameter larger than that of the opening is provided so as to cover the periphery of the opening.
A transparent member TB is arranged at the lower end in the hollow of the support portion SJ so as to close the opening in the hollow. There is a predetermined distance between the upper surface of the transparent member TB disposed in the hollow of the support portion SJ and the upper surface of the support portion SJ. That is, the hollow height of the support portion SJ is larger than the height (thickness) of the transparent member TB.
With such a configuration, when the workpiece W is installed on the support SJ, a predetermined distance exists between the transparent member TB and the workpiece W, and a space is formed by the distance. . Therefore, the airflow from the opening with respect to the workpiece W can be blocked by the transparent member TB, and the transparent member TB plays the role of a damper, so that the air vibration with respect to the workpiece W can be suppressed.

  Further, between the support SJ and the opening, movable parts KD2a and KD2b are disposed and provided in a part of the periphery of the opening so as to surround a part of the opening. Around the movable portions KD2a and KD2b, a support portion SJ is disposed so as to surround the opening and the movable portions KD2a and KD2b. The support part SJ is a fixed support part fixed to, for example, the X stage STX. The support portion SJ is configured to support the entire outer periphery of the workpiece W without any break. Each of the movable portions KD2a and KD2b rises while supporting the workpiece W under the control of the personal computer 200, similarly to the movable support portions SJ2a and SJ2b shown in FIG. Then, when the movable parts KD2a and KD2b are lowered by the control of the personal computer 200, the support part SJ supports the work W substantially entirely on the outer periphery of the work W.

  Note that the shape of the workpiece W when viewed from the side surface that is not the lower surface or the upper surface with respect to the direction of gravity may be various shapes, for example, a flat shape or a concave shape. It may be a convex shape or the like. The shape of the workpiece W when viewed from the upper surface with respect to the direction of gravity may be various shapes, for example, a circle or an ellipse, or a polygon such as a triangle or a rectangle. It may be. Further, the arrangement shape of the support portions SJ may be various shapes, for example, may be a circle, or may be a polygon such as a triangle or a rectangle. Further, the shapes of the movable portions KD2a and KD2b and the movable support portions SJ2a and SJ2b may be various shapes, polygonal shapes such as a triangle and a quadrangle, or a circle, an ellipse, and a sector. It may be a shape such as Further, the arrangement positions of the movable parts KD2a and KD2b and the movable support parts SJ2a and SJ2b may be provided at any position as long as the support part can support the entire outer periphery of the workpiece W without any breaks during inspection. Further, the number of the movable parts KD2a, KD2b and the movable support parts SJ2a, SJ2b may be one, or may be three or more.

As another configuration example, the inspection camera 101 and the alignment camera 102 may be disposed below the gravity direction of the workpiece W, and the illumination unit 300 may be disposed above the gravity direction of the workpiece W.
As another configuration example, the inspection apparatus 100 may include only a fixed support portion as a support portion, and may not include a movable mechanism such as a movable portion or a movable support portion.

  In addition, you may make it implement | achieve part or all of the test | inspection apparatus 100 in embodiment mentioned above with a computer. In that case, the program for realizing the control function may be stored in a computer-readable storage medium, and the program stored in the storage medium may be read into the computer system and executed.

  Note that the “computer system” here is a computer system built in the inspection apparatus 100 and includes an OS and hardware such as peripheral devices. The “computer-readable storage medium” refers to a storage device such as a portable medium such as a flexible disk, a magneto-optical disk, a ROM, a CD-ROM, or a hard disk built in a computer system. Furthermore, "computer-readable storage medium" means a program that dynamically holds a program for a short time, such as a communication line when transmitting a program via a network such as the Internet or a communication line such as a telephone line, In such a case, a volatile memory inside a computer system serving as a server or a client may be included, and a program holding a program for a certain period of time may be included. The program may be a program for realizing a part of the functions described above, and may be a program capable of realizing the functions described above in combination with a program already stored in the computer system.

  Moreover, you may implement | achieve part or all of the test | inspection apparatus 100 in embodiment mentioned above as integrated circuits, such as LSI (Large Scale Integration). Each functional block of the inspection apparatus 100 may be individually made into a processor, or a part or all of them may be integrated into a processor. Further, the method of circuit integration is not limited to LSI, and may be realized by a dedicated circuit or a general-purpose processor. In addition, when an integrated circuit technology that replaces LSI appears due to the advancement of semiconductor technology, an integrated circuit based on the technology may be used.

  As described above, the embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration is not limited to that described above, and various design changes and the like can be made without departing from the scope of the present invention. It is possible to

DESCRIPTION OF SYMBOLS 100 ... Inspection apparatus, 101 ... Inspection camera (imaging part), 102 ... Alignment camera, 103 ... Focus correction displacement meter, STX ... X stage (installation part), STY ... Y stage, STZ ... Z stage, W ... work, KB, KB1 ... inspection part, SJ ... support part, TB, TB1, TB2 ... transparent member, 200 ... personal computer, 300 ... Illumination unit, SJ1a, SJ1b ... Fixed support unit, SJ2a, SJ2b ... Movable support unit, KD2a, KD2b ... Movable unit

Claims (9)

A transparent member;
A support part for supporting the work so as to form a space between the transparent member and the work;
An installation part in which the transparent member and the support part are installed;
An inspection apparatus comprising: The support part has a shape that supports the work so as to close the entire outer periphery of the work.
The inspection apparatus according to claim 1. The support part includes a fixed support part fixed to the installation part, and a movable support part movable with respect to the installation part.
The inspection apparatus according to claim 1 or 2. The transparent member is provided on the side pulled by gravity with respect to the work supported by the support portion.
The inspection apparatus according to any one of claims 1 to 3. The transparent member is provided on a side opposite to a side pulled by gravity with respect to the workpiece supported by the support portion.
The inspection apparatus according to any one of claims 1 to 3, wherein: The transparent member is provided on both the side pulled by gravity with respect to the work supported by the support portion and the opposite side, respectively.
The inspection apparatus according to any one of claims 1 to 3. The transparent member is a glass panel or an acrylic panel.
The inspection apparatus according to any one of claims 1 to 6. An illumination unit that illuminates the workpiece supported by the support unit;
An imaging unit for imaging the workpiece supported by the support unit;
The inspection apparatus according to claim 1, further comprising:   An inspection method for supporting the workpiece so as to form a space between the transparent member and the workpiece, and inspecting the supported workpiece.

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