JP2015115870A - Acoustic wave device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an acoustic wave device which improves characteristics and is capable of suppressing influences caused by a higher-order mode.SOLUTION: In an acoustic wave device 1, on a top face 2a of a support substrate 2, a high sonic velocity film 3 is laminated on which a sonic velocity of bulk waves to be propagated is higher than a sonic velocity of acoustic waves to be propagated on a piezoelectric film 5. On the high sonic velocity film 3, a low sonic velocity film 4 is laminated of which a sonic velocity of bulk waves to be propagated is lower than a sonic velocity of bulk waves to be propagated on the piezoelectric film 5. On the low sonic velocity film 4, a dielectric film 5 is laminated, and on one side of the piezoelectric film 5, an IDT (Interdigital Transducer) electrode 6 is laminated. The top face 2a of the support substrate 2 is coarse. In a structure portion including the high sonic velocity film 3 and in a part located higher than the high sonic velocity film 3 of the structure portion, a degree of energy concentration in a main mode of acoustic waves to be utilized is 99.9% or more and a degree of energy concentration in a higher-order mode to be spurious is 99.5% or less.

Description

  The present invention relates to an acoustic wave device used for a resonator, a bandpass filter, and the like, and more particularly to an acoustic wave device having a structure in which another material is laminated between a support substrate and a piezoelectric layer.

  Conventionally, acoustic wave devices have been widely used as resonators and bandpass filters, and in recent years, higher frequencies have been demanded. Patent Document 1 below discloses a surface acoustic wave device in which a hard dielectric layer, a piezoelectric film, and an IDT electrode are laminated in this order on a dielectric substrate. In this surface acoustic wave device, the acoustic velocity of the surface acoustic wave is increased by disposing a hard dielectric layer between the dielectric substrate and the piezoelectric film. Accordingly, the surface acoustic wave device can be increased in frequency.

  Patent Document 1 also discloses a structure in which an equipotential layer is provided between the hard dielectric layer and the piezoelectric film. The equipotential layer is made of metal or semiconductor. The equipotential layer is provided in order to equalize the potential at the interface between the piezoelectric film and the hard dielectric layer.

JP 2004-282232 A

  In the surface acoustic wave device described in Patent Document 1, the speed of sound is increased by forming a hard dielectric layer. However, since there is a considerable amount of propagation loss and the elastic wave cannot be effectively confined in the piezoelectric thin film, the energy of the surface acoustic wave device leaks to the dielectric substrate. Therefore, there has been a problem that the characteristics of the acoustic wave device are impaired.

  An object of the present invention is to provide an acoustic wave device that has good characteristics and can suppress the influence of higher-order modes.

  An acoustic wave device according to the present invention is an acoustic wave device having a piezoelectric film, and is formed on a support substrate and an upper surface of the support substrate, and a bulk wave sound velocity propagating from an acoustic wave sound velocity propagating through the piezoelectric film. A high-velocity film having a high velocity, and a low-velocity film having a lower bulk-wave sound velocity propagating than the bulk-wave sound velocity propagating through the piezoelectric film, A laminated piezoelectric film and an IDT electrode formed on one surface of the piezoelectric film are provided. In the present invention, the energy concentration of the main mode, which is an elastic wave used, is 99.9% or higher in the structural portion above the support substrate having a rough upper surface, including the high sound velocity film, and above the high sound velocity film. In addition, the energy concentration degree of the higher-order mode that becomes spurious is set to 99.5% or less.

  On the specific situation with the elastic wave device which concerns on this invention, surface roughness Ra of the upper surface of the said support substrate is 1 nm or more. In this case, compared with the case where the surface of the support substrate on which the high acoustic velocity film is formed is smooth, the influence of higher order modes can be further suppressed.

  In another specific aspect of the acoustic wave device according to the present invention, the surface roughness Ra of the upper surface of the support substrate is 25 nm or more. In this case, compared with the case where the surface of the support substrate on which the high acoustic velocity film is formed is smooth, the influence of higher order modes can be further suppressed. Furthermore, even if the surface roughness varies, the strength of the higher-order mode is unlikely to fluctuate.

  In still another specific aspect of the acoustic wave device according to the present invention, the surface roughness Ra of the upper surface of the support substrate is 25 nm or more and 80 nm or less. In this case, the influence of higher order modes can be further suppressed. Furthermore, even if the surface roughness of the support substrate on which the high-velocity film is formed varies, the strength of the higher-order mode is unlikely to fluctuate.

  In a specific aspect of the elastic wave device according to the present invention, the sound speed at the anti-resonance frequency in the main mode is V1 [m / s], the sound speed of the high-sonic film is Vh [m / s], and the wavelength of the elastic wave λ [m ], When the film thickness of the high acoustic velocity film is Th (= high acoustic velocity film thickness / λ), V1 and Th satisfy the following relational expressions in the following Vh.

・ When 4200 ≦ Vh <4400;
V1 ≦ 125.9 × Th ² −102.0 × Th + 3715.0
・ When 4400 ≦ Vh <4600;
V1 ≦ 296.3 × Th ² −253.0 × Th + 3742.2
・ When 4600 ≦ Vh <4800;
V1 ≦ 506.1 × Th ² −391.5 × Th + 3759.2
・ When 4800 ≦ Vh <5000;
V1 ≦ 768.0 × Th ² −552.4 × Th + 3776.8
・ In the case of 5000 ≦ Vh <5200;
V1 ≦ 848.5 × Th ² −541.6 × Th + 3767.8
・ When 5200 ≦ Vh <5400;
V1 ≦ 1065.2 × Th ² −709.4 × Th + 3792.8
・ In the case of 5400 ≦ Vh <5600;
V1 ≦ 1197.1 × Th ² −695.0 × Th + 3779.8
・ When 5600 ≦ Vh <5800;
V1 ≦ 1393.8 × Th ² −843.8 × Th + 3801.5
・ When 5800 ≦ Vh <6000;
V1 ≦ 1713.7 × Th ² −1193.3 × Th + 3896.1
・ In the case of 6000 ≦ Vh;
V1 ≦ 1839.9 × Th ² −1028.7 × Th + 384.1

  In another specific aspect of the elastic wave device according to the present invention, the sound velocity of the higher-order mode is V2 [m / s], the sound velocity of the high sound velocity film is Vh [m / s], and the wavelength of the elastic wave is λ [m]. When the standardized film thickness of the high sound velocity film is Th (= high sound velocity film thickness / λ), V2 and Th satisfy the following relational expression for each Vh below.

・ When Vh <4200;
V2 ≧ 187.0 × Th ² -137.0 × Th + 3919.7
・ When 4200 ≦ Vh <4400;
V2 ≧ −115.0 × Th ² + 515.0 × Th + 3796.4
・ When 4400 ≦ Vh <4600;
V2 ≧ −268.4 × Th ² + 898.0 × Th + 3728.8
・ When 4600 ≦ Vh <4800;
V2 ≧ −352.8 × Th ² + 1125.2 × Th + 3726.8
・ When 4800 ≦ Vh <5000;
V2 ≧ −568.7 × Th ² + 1564.3 × Th + 3657.2
・ In the case of 5000 ≦ Vh <5200;
V2 ≧ −434.2 × Th ² + 1392.6 × Th + 3808.2
・ When 5200 ≦ Vh <5400;
V2 ≧ −576.5 × Th ² + 17.17.1 × Th + 3748.3
・ In the case of 5400 ≦ Vh <5600;
V2 ≧ −602.9 × Th ² + 1882.6 × Th + 3733.7
・ When 5600 ≦ Vh <5800;
V2 ≧ −576.9 × Th ² + 2066.9 × Th + 3703.7
・ When 5800 ≦ Vh <6000;
V2 ≧ −627.0 × Th ² + 2256.1 × Th + 3705.7

  In still another specific aspect of the acoustic wave device according to the present invention, the sound velocity of the higher-order mode is V2 [m / s], the sound velocity of the high acoustic velocity film is Vh [m / s], and the wavelength λ [ m] When the film thickness of the high sound velocity film normalized by Th is Th (= high sound velocity film thickness / λ), V2 and Th satisfy the following relational expression in each Vh below.

・ When Vh <4200;
V2 ≧ 197.8 × Th ² -158.0 × Th + 418.5
・ When 4200 ≦ Vh <4400;
V2 ≧ −119.5 × Th ² + 523.8 × Th + 3992.7
・ When 4400 ≦ Vh <4600;
V2 ≧ −274.0 × Th ² + 908.9 × Th + 3924.2
・ When 4600 ≦ Vh <4800;
V2 ≧ −372.3 × Th ² + 11162.9 × Th + 3910.9
・ When 4800 ≦ Vh <5000;
V2 ≧ −573.4 × Th ² + 1573.9 × Th + 3852.8
・ In the case of 5000 ≦ Vh <5200;
V2 ≧ −443.7 × Th ² + 1411.0 × Th + 4000.5
・ When 5200 ≦ Vh <5400;
V2 ≧ −557.0 × Th ² + 1679.2 × Th + 3964.2
・ In the case of 5400 ≦ Vh <5600;
V2 ≧ −581.0 × Th ² + 1840.1 × Th + 3951.6
・ When 5600 ≦ Vh <5800;
V2 ≧ −570.7 × Th ² + 2054.7 × Th + 3908.8
・ When 5800 ≦ Vh <6000;
V2 ≧ −731.1 × Th ² + 2408.0 × Th + 3857.0

  In another specific aspect of the elastic wave device according to the present invention, the bulk wave sound velocity propagating through the support substrate is slower than the bulk wave sound velocity propagating through the high sound velocity film. In this case, since the substrate has a low sound velocity, the higher-order mode leaks more reliably on the substrate side. Therefore, the influence of the higher order mode can be more effectively suppressed.

  In still another specific aspect of the acoustic wave device according to the present invention, the elastic wave device further includes a medium layer laminated between the support substrate and the high acoustic velocity film.

  In still another specific aspect of the acoustic wave device according to the present invention, the bulk wave sound velocity propagating through the medium layer is slower than the bulk wave sound velocity propagating through the piezoelectric film. In this case, higher-order modes tend to leak into the medium layer. Therefore, higher order modes can be leaked by the medium layer. Therefore, the degree of freedom of the selectivity of the material for the support substrate can be increased.

  In still another aspect of the acoustic wave device according to the present invention, the medium layer is made of silicon oxide. In this case, the absolute value of the frequency temperature coefficient TCF can be lowered to improve the temperature characteristics.

  In still another specific aspect of the acoustic wave device according to the present invention, the piezoelectric film is made of a lithium tantalate single crystal or a lithium niobate single crystal. In this case, an ion implantation method can be used to easily form a piezoelectric thin film as a piezoelectric film. In addition, by selecting the cut angle, it is possible to easily provide elastic wave devices having various characteristics.

  In still another specific aspect of the acoustic wave device according to the present invention, the support substrate is made of silicon. In this case, it is possible to easily roughen the support substrate. In addition, since silicon has high thermal conductivity, good heat dissipation can be obtained. Therefore, good power durability can be obtained.

  In the acoustic wave device according to the present invention, the high sound velocity film and the low sound velocity film are disposed between the support substrate and the piezoelectric film, and further include the high sound velocity film, and in the structure portion above the high sound velocity film, Since the energy concentration degree of the mode and the higher order mode is in the specific range, the energy of the elastic wave to be used can be effectively confined in the portion where the piezoelectric film and the low acoustic velocity film are laminated. In addition, higher-order modes that become spurious can be leaked to the support substrate side of the high-speed film. Furthermore, since the upper surface of the support substrate is rough, higher-order modes that have reached the upper surface of the support substrate are scattered toward the support substrate, so that higher-order mode spurious can be further suppressed. Therefore, it is possible to obtain good resonance characteristics, filter characteristics, and the like due to the elastic wave to be used, and to suppress an undesired response due to higher-order modes.

(A) is typical front sectional drawing of the surface acoustic wave device which concerns on the 1st Embodiment of this invention, (b) is a typical top view which shows the electrode structure. It is a schematic diagram showing the energy distribution of the SH wave, that is, the U2 component, which is the main mode of the surface acoustic wave device when the film thickness of the high acoustic velocity film is 0.2λ. It is a schematic diagram showing the energy distribution of the SH wave, that is, the U2 component, which is the main mode of the surface acoustic wave device when the film thickness of the high acoustic velocity film is 0.5λ. It is a schematic diagram showing the energy distribution of the SH wave, that is, the U2 component, which is the main mode of the surface acoustic wave device when the film thickness of the high acoustic velocity film is 1.0λ. It is a schematic diagram showing the energy distribution of the SH wave, that is, the U2 component, which is the main mode of the surface acoustic wave device when the film thickness of the high acoustic velocity film is 3.0λ. It is a schematic diagram which shows the energy distribution of U2 + U3 component which is a higher order mode in case the film thickness of a high-sonic-velocity film | membrane is 0.5 (lambda). It is a schematic diagram which shows energy distribution of U2 + U3 component which is a higher order mode in case the film thickness of a high-sonic-speed film | membrane is 1.0lambda. It is a schematic diagram which shows the energy distribution of U2 + U3 component which is a higher order mode in case the film thickness of a high-sonic-speed film | membrane is 2.0 (lambda). In embodiment of this invention, it is a figure which shows the relationship between the film thickness of a high-velocity film, and the energy concentration degree of a surface acoustic wave. It is a figure which shows the relationship between the film speed of a high-sonic film, the sound speed of the main mode which is an elastic wave to be used, and the sound speed of a high-sonic film. It is a figure which shows the relationship between the film thickness of a high-sonic-velocity film | membrane, and the sound speed of the main mode which is an elastic wave to utilize. It is a figure which shows the relationship between the film thickness of a high-sonic-speed film | membrane, the sound speed of a high-order mode, and the sound speed of the high-sonic-speed film to utilize. It is a figure which shows the relationship between the film thickness of a high-sonic-velocity film | membrane, the main mode which is an elastic wave to utilize, and the sound speed of the high-order mode which becomes a spurious. It is a figure which shows the relationship between the film thickness of a high-sonic-speed film | membrane, the sound speed of a high-order mode, and the sound speed of the high-sonic-speed film to utilize. It is a figure which shows the relationship between the film thickness of a high-sonic-velocity film | membrane, the main mode which is an elastic wave to utilize, and the sound speed of the high-order mode used as a spurious. It is a typical front sectional view of a surface acoustic wave device of a 2nd embodiment of the present invention. It is a figure which shows the relationship between the sound speed and energy concentration degree of a main mode, and the film thickness of a high sound speed film. It is a figure which shows the relationship between the film thickness of a high sound speed film, and the sound speed of a main mode. It is a figure for demonstrating the approximate expression about the relationship between the film thickness of the high sound speed film | membrane shown in FIG. 18, and the sound speed of a main mode. It is a figure which shows the relationship between the sound speed and energy concentration degree of a high-order mode, and the film thickness of a high sound speed film. It is a figure which shows the relationship between surface roughness Ra of a support substrate, and phase max. It is a typical front sectional view of a boundary acoustic wave device as a 3rd embodiment of the present invention. It is a typical front sectional view of a boundary acoustic wave device as a 4th embodiment of the present invention.

  Hereinafter, the present invention will be clarified by describing specific embodiments of the present invention with reference to the drawings.

(First embodiment)
FIG. 1A is a schematic front sectional view of a surface acoustic wave device as a first embodiment of the present invention.

  The surface acoustic wave device 1 has a support substrate 2. A high sound velocity film 3 having a relatively high sound velocity is laminated on the upper surface 2 a of the support substrate 2. On the high sound velocity film 3, a low sound velocity film 4 having a relatively low sound velocity is laminated. A piezoelectric film 5 is laminated on the low acoustic velocity film 4. An IDT electrode 6 is laminated on the upper surface of the piezoelectric film 5. The IDT electrode 6 may be laminated on the lower surface of the piezoelectric film 5.

  The support substrate 2 can be made of an appropriate material as long as the support substrate 2 can support a laminated structure including the high sound velocity film 3, the low sound velocity film 4, the piezoelectric film 5, and the IDT electrode 6. As such a material, a piezoelectric body, a dielectric body, a semiconductor, or the like can be used. In the present embodiment, the support substrate 2 is made of glass.

  The upper surface 2a of the support substrate 2 is a rough surface. Details of the action and the like due to the rough upper surface 2a will be described later with reference to FIG.

  The high sound velocity film 3 functions to confine the surface acoustic wave in a portion where the piezoelectric film 5 and the low sound velocity film 4 are laminated. In the present embodiment, the high acoustic velocity film 3 is made of aluminum nitride. However, various high sound velocity materials such as aluminum nitride, aluminum oxide, silicon carbide, silicon nitride, or diamond can be used as long as the elastic wave can be confined.

  Let λ be the wavelength of the elastic wave determined by the period of the electrode fingers of the IDT electrode. In the present embodiment, the energy concentration degree of the main mode, which is an elastic wave to be used, is 99.9% or more in the structure portion including the high acoustic velocity film and above the high acoustic velocity membrane, and a higher order mode that becomes spurious. The energy concentration is 99.5% or less. That is, the main mode, which is an elastic wave to be used, is surely confined in the structural portion above the high acoustic velocity film. On the other hand, higher-order modes that become spurious leak to the support substrate side. Thereby, as will be described later, the elastic wave to be used, that is, the energy of the main mode, can be confined in the portion where the piezoelectric film 5 and the low-sonic film 4 are laminated, and the high-order mode that becomes spurious is selected as the high-sonic film. 3 can be leaked to the support substrate 2 side.

  In the present specification, the high acoustic velocity film refers to a membrane in which the acoustic velocity of the bulk wave in the high acoustic velocity film is higher than that of the elastic wave propagating through the piezoelectric film 5. The low sound velocity film is a film in which the sound velocity of the bulk wave in the low sound velocity film is lower than the bulk wave propagating through the piezoelectric film 5. The bulk wave mode that determines the sound velocity of the bulk wave is defined according to the use mode of the elastic wave propagating through the piezoelectric film 5. When the high acoustic velocity film 3 and the low acoustic velocity film 4 are isotropic with respect to the propagation direction of the bulk wave, the following Table 1 is obtained. That is, the high sound velocity and the low sound velocity are determined according to the right-axis bulk wave mode of Table 1 below with respect to the left-axis elastic wave main mode of Table 1 below. The P wave is a longitudinal wave, and the S wave is a transverse wave.

  In Table 1 below, U1 means a P wave as a main component, U2 means an SH wave as a main component, and U3 means an elastic wave whose main component is an SV wave.

When the low acoustic velocity film 4 and the high acoustic velocity film 3 are anisotropic in bulk wave propagation, the bulk wave mode for determining the high acoustic velocity and the low acoustic velocity is determined as shown in Table 2 below. Of the bulk wave modes, the slower one of the SH wave and the SV wave is called a slow transverse wave, and the faster one is called a fast transverse wave. Which is the slower transverse wave depends on the anisotropy of the material. In LiTaO ₃ and LiNbO ₃ in the vicinity of the rotational Y-cut, the SV wave has a slow transverse wave and the SH wave has a fast transverse wave among bulk waves.

  As the material constituting the low sound velocity film 4, an appropriate material having a bulk wave sound velocity lower than the bulk wave propagating through the piezoelectric film 5 can be used. As such a material, silicon oxide, glass, silicon oxynitride, tantalum oxide, a compound obtained by adding fluorine, carbon, or boron to silicon oxide can be used.

  The low sound velocity film and the high sound velocity film are made of an appropriate dielectric material capable of realizing the high sound velocity and the low sound velocity determined as described above.

  The piezoelectric film 5 can be formed of an appropriate piezoelectric material, but is preferably made of a piezoelectric single crystal. When a piezoelectric single crystal is used, an elastic wave device having various characteristics can be easily provided by selecting an Euler angle. More preferably, a lithium tantalate single crystal or a lithium niobate single crystal is used. In this case, the resonance characteristics and filter characteristics of the surface acoustic wave device 1 can be further enhanced by selecting the Euler angle.

  In this embodiment, the IDT electrode 6 is made of Al. However, the IDT electrode 6 can be formed of an appropriate metal material such as Al, Cu, Pt, Au, Ag, Ti, Ni, Cr, Mo, W, or an alloy mainly composed of any of these metals. . The IDT electrode 6 may have a structure in which a plurality of metal films made of these metals or alloys are stacked.

  Although schematically shown in FIG. 1A, the electrode structure shown in FIG. 1B is formed on the piezoelectric film 5. That is, the IDT electrode 6 and the reflectors 7 and 8 disposed on both sides of the IDT electrode 6 in the surface acoustic wave electrode direction are formed. Thus, a 1-port surface acoustic wave resonator is configured. However, the electrode structure including the IDT electrode in the present invention is not particularly limited, and can be modified to constitute a ladder filter, a longitudinally coupled filter, a lattice type filter, and a transversal type filter that combine appropriate resonators and resonators. .

  The surface acoustic wave device 1 of the present embodiment is characterized in that the high sound velocity film 3, the low sound velocity film 4 and the piezoelectric film 5 are laminated as described above, and includes a high sound velocity film. In the upper structural part, the energy concentration of the main mode, which is the elastic wave to be used, is 99.9% or more, and the energy concentration of the higher-order mode that is spurious is 99.5% or less. It is in. Accordingly, the elastic wave to be used, that is, the main mode can be effectively confined, and higher-order mode spurious can be effectively suppressed. This will be described below.

  Conventionally, it has been known that by arranging a high-sonic film on the lower surface of a piezoelectric substrate, part of an elastic wave propagates while distributing energy in the high-sonic film, so that it is possible to increase the acoustic velocity of the elastic wave. Yes.

  On the other hand, in the present invention, since the low acoustic velocity film 4 is disposed between the high acoustic velocity film 3 and the piezoelectric film 5, the acoustic velocity of the elastic wave is lowered. The energy of an elastic wave is concentrated in a medium that is essentially a low sound velocity. Therefore, the effect of confining the elastic wave energy in the piezoelectric film 5 and the IDT in which the elastic wave is excited can be enhanced. Therefore, compared with the case where the low sound velocity film 4 is not provided, according to this embodiment, loss can be reduced and Q value can be raised. Since the low acoustic velocity film 4 is disposed between the high acoustic velocity film 3 and the piezoelectric film 5, the acoustic velocity of the elastic wave is reduced as compared with the structure in which the piezoelectric film is formed on the high acoustic velocity film. However, in the structure of the present invention, by appropriately selecting the piezoelectric film and the low sound velocity film, it is possible to achieve a higher sound velocity than the piezoelectric film alone. In other words, high frequency is also possible in the structure of the present invention.

  Furthermore, in the present embodiment, the energy concentration of the main mode, which is an elastic wave to be used, is 99.9% or more in the structural portion including the high sound velocity film and above the high sound velocity film, and high spurious. Since the energy concentration of the next mode is 99.5% or less, it is possible to confine the energy of the elastic wave in the portion up to the high acoustic velocity film 3 and to leak the higher order mode to the support substrate 2 side of the high acoustic velocity film 3. it can. This will be described with reference to FIGS.

2 to 5 are diagrams showing energy distributions in the main mode, which are elastic waves to be used, and FIGS. 6 to 8 are diagrams showing energy distributions in higher-order modes. 2 to 8 are results obtained by the finite element method based on the following surface acoustic wave device 1. In order from the top, IDT electrode 6: Al electrode, thickness 0.08λ / piezoelectric film 5: Y-cut LiTaO ₃ LiTaO ₃ single crystal film, thickness 0.25λ / low sound velocity film 4: silicon oxide film, thickness 0.34λ / Supersonic film 3: Aluminum nitride film, thickness varied between 0.1λ and 3.0λ / support substrate 2: glass substrate.

  2 to 5 and FIGS. 6 to 8, the vertical direction in the figure is the thickness direction of the surface acoustic wave device 1. A broken line A indicates the position of the upper surface of the high sonic film 3, and a broken line B indicates the position of the lower surface of the high sonic film 3.

  2, 3, 4, and 5 show cases where the thicknesses of the aluminum nitride films constituting the high sound velocity film 3 are 0.2λ, 0.5λ, 1.0λ, and 3.0λ, respectively. The energy distribution of the elastic wave which is the main mode of is shown. The elastic wave used here is the U2 component in FIGS. 2 to 5, that is, the SH wave.

  As apparent from FIG. 2, when the film thickness of the high sonic film 3 made of an aluminum nitride film is 0.2λ, the U2 component that is the main mode to be used leaks downward from the lower surface of the high sonic film 3. I understand that. On the other hand, as shown in FIGS. 3 to 5, when the film thickness of the aluminum nitride film constituting the high acoustic velocity film 3 is 0.5λ or more, it is above the lower surface of the high acoustic velocity film 3. It can be seen that the U2 component, that is, the energy of the SH wave is well confined. Therefore, it can be seen that the energy of the main mode, that is, the elastic wave to be used can be effectively confined by setting the film thickness of the high acoustic velocity film 3 to 0.5λ or more. Here, the energy of the main mode is confined by 99.9% or more. That is, the energy concentration of the main mode is 99.9% or more.

  On the other hand, FIG. 6, FIG. 7 and FIG. 8 show the energy distributions of higher-order modes when the film thickness of the high sonic film 3 made of an aluminum nitride film is 0.5λ, 1.0λ, and 2.0λ, respectively. . Here, the U2 component + U3 component of the higher-order mode becomes a problem as spurious. As shown in FIG. 8, it can be seen that when the film thickness of the aluminum nitride film is 2.0λ, the U2 component and the U3 component are distributed with higher energy than the high sound velocity film 3. On the other hand, in the case of FIG. 6 and FIG. 7 where the film thickness of the aluminum nitride film is 1.0λ or less, the energy concentration degree above the high acoustic velocity film 3 in the higher order mode is lower than that in the main mode. It can be seen that the U2 component and the U3 component are considerably leaked to the support substrate 2 side of the high acoustic velocity film 3.

  Therefore, nitriding is performed so that the energy concentration of the main mode, which is the elastic wave to be used, is 99.9% or more, and the energy concentration of the higher-order mode that is spurious is 99.5% or less. If the film thickness of the aluminum film is in the range of 0.5λ to 1.0λ, the higher-order mode can be leaked from the high acoustic velocity film 3 to the support substrate 2 side while confining the energy of the main mode. Therefore, it can be seen that good characteristics due to the main mode, that is, the surface acoustic wave can be obtained, and spurious out-of-band due to the higher order mode can be effectively suppressed.

  By the way, the energy concentration degree is known as one of the indexes for determining the presence or absence of leakage of elastic wave energy to the support substrate 2 side. FIG. 9 is a diagram showing the energy concentration levels of the main mode and the higher-order mode when the film thickness of the high sonic velocity film 3 is changed.

  The vertical axis | shaft of FIG. 9 shows each energy concentration degree (%) of a main mode and a high-order mode. Here, the energy concentration degree indicates the ratio of the energy of the mode confined in the laminated structure of the IDT electrode 6 / piezoelectric film 5 / low sound velocity film 4 / high sound velocity film 3 to the total energy of the mode. If this energy concentration is 100%, it means that no energy leaks to the support substrate 2 side. When it is lower than 100%, the decrease in concentration means the proportion of energy leaking to the support substrate 2 side. As a method for calculating the degree of energy concentration, when energy obtained by integrating the energy distribution shown in FIGS. 2 to 8 to a desired depth (lower layer of the high sonic film 3) is E1, and the total energy is E_total, the energy concentration is calculated. Calculated in degrees (%) = (E1 / E_total × 100).

  As is apparent from FIG. 9, when the film thickness of the high sound velocity film is 0.5λ or more, the energy concentration in the main mode is almost 100%. Therefore, it can be seen that the main mode can be effectively confined. It can also be seen that the higher order mode can be leaked by setting the film thickness of the high acoustic velocity film 3 to 1.2λ or less.

  Therefore, as is apparent from FIG. 9, it can be seen that the film thickness of the high acoustic velocity film 3 needs to be 0.5λ or more and 1.2λ or less.

In order to leak the higher order mode and suppress the spurious, it is desirable that the energy concentration degree of the higher order mode is 99.5% or less, more preferably 98% or less. Therefore, if the film thickness is 1.2λ or less, the energy concentration degree of the higher-order mode can be less than 100%, so that the higher-order mode can be leaked to the support substrate side as described above. However,
More preferably, by setting the film thickness of the high acoustic velocity film 3 to 1.0λ or less, the energy concentration degree in the higher-order mode can be set to 99.5% or less, and the film thickness is set to 0.8λ or less. As a result, the energy concentration of the higher mode can be reduced to 98% or less. Therefore, the upper limit of the film thickness of the high sound velocity film 3 is preferably 1.0λ or less, more preferably 0.8λ or less.

2 to 9 are evaluation results in the case where the piezoelectric film 5 is a LiTaO ₃ single crystal, the low acoustic velocity film 4 is silicon oxide, and the high acoustic velocity film 3 is an aluminum nitride film. However, in the present invention, it has been confirmed that the same results as in FIGS. 2 to 9 can be obtained even when the piezoelectric film 5, the low acoustic velocity film 4, and the high acoustic velocity film 3 are made of other materials.

  FIG. 17 shows that the Al electrode film thickness is 0.08λ, the Y-cut LT thickness is 0.01λ to 0.05λ, the low sound velocity film thickness is 0.05λ to 2.00λ, and the sound velocity of the high sound velocity film is 4200 m / sec. It is a figure which shows the relationship between the sound speed of the main mode at the time of doing, energy concentration, and the film thickness of a high-speed film thickness. It can be seen that the energy of the main mode is more likely to leak when the sound speed of the main mode is increased, and more likely to leak when the film thickness of the high sound velocity film is reduced. Here, the relationship between the high sound velocity film thickness and the main mode sound velocity when the energy concentration in the main mode is 99.99% is plotted. This is shown in FIG. The sound speed in the main mode means the sound speed at the antiresonance frequency.

In FIG. 18, if the sound speed of the main mode is made slower than the plotted value, the energy concentration degree of the main mode satisfies 99.99%. Here, the sound velocity y of the main mode from the results of the plot in FIG. 18, when the film thickness of the high acoustic velocity film approximated as x, as shown in FIG. ^{19, y = 125.9x 2 -102.0x +} 3715.0 is obtained It is done. However, R ² = 1.0. That is, the sound velocity at the anti-resonance frequency of the main mode is V1 [m / s], and the film thickness of the high sound velocity film normalized by the wavelength λ [m] of the surface acoustic wave is Th (= high sound velocity film thickness / λ). Then, the following relational expression should be satisfied.

V1 ≦ 125.9 × Th ² −102.0 × Th + 3715.0 (1)

  Similarly, the sound velocity Vh [m / s] of the high sound velocity film is divided into cases, the sound velocity V1 at the antiresonance frequency of the main mode and the wavelength λ [m of the surface acoustic wave at the sound velocity Vh of each high sound velocity film. ] And the relationship with the film thickness Th of the high acoustic velocity film normalized. The results are shown below.

・ When 4400 ≦ Vh <4600;
V1 ≦ 296.3 × Th ² −253.0 × Th + 3742.2
・ When 4600 ≦ Vh <4800;
V1 ≦ 506.1 × Th ² −391.5 × Th + 3759.2
・ When 4800 ≦ Vh <5000;
V1 ≦ 768.0 × Th ² −552.4 × Th + 3776.8
・ In the case of 5000 ≦ Vh <5200;
V1 ≦ 848.5 × Th ² −541.6 × Th + 3767.8
・ When 5200 ≦ Vh <5400;
V1 ≦ 1065.2 × Th ² −709.4 × Th + 3792.8
・ In the case of 5400 ≦ Vh <5600;
V1 ≦ 1197.1 × Th ² −695.0 × Th + 3779.8
・ When 5600 ≦ Vh <5800;
V1 ≦ 1393.8 × Th ² −843.8 × Th + 3801.5
・ When 5800 ≦ Vh <6000;
V1 ≦ 1713.7 × Th ² −1193.3 × Th + 3896.1
・ In the case of 6000 ≦ Vh;
V1 ≦ 1839.9 × Th ² −1028.7 × Th + 384.1

  FIG. 10 is a diagram showing the result of the relationship between the film thickness of the high sound velocity film, the elastic wave to be used, that is, the sound speed of the main mode, and the sound speed of the high sound velocity film to be used by the finite element method. Incidentally, the relationship in FIG. 10 when the sound velocity of the high sound velocity film is 4200 m / sec is the above-described equation (1). Similarly, FIG. 10 shows a calculation of the relationship between the high sound velocity film thickness and the main mode sound velocity at the sound velocity of each high sound velocity film. The assumed structure is as follows.

In order from the top, IDT electrode 6: Al electrode, film thickness is 0.08λ / piezoelectric film 5: Y-cut LiTaO ₃ single crystal, film thickness is 0.01λ to 0.50λ / low sound velocity film 4: silicon oxide film, film Thickness 0.05λ to 2.00λ / high sound velocity film 3: various high sound velocity films having a sound velocity of 4200 m / second to 6000 m / second, film thickness less than 1.6λ / support substrate 2: glass substrate.

  In addition, although the sound speed of a high-sonic film can be changed by varying the material which comprises a high-sonic film, in FIG. 10, about several types of high-sonic films in the range of 4200 m / sec-6000 m / sec. The result was shown.

  The sound speed of the main mode in FIG. 10 indicates the sound speed of the main mode when leakage to the support substrate 2 side in the main mode starts when the sound speed of the high sound velocity film is any of 4200 m / sec to 6000 m / sec. If the sound speed of the main mode is slower than each curve shown in FIG. 10, the main mode can be completely confined above the high sound velocity film 3. Therefore, good device characteristics can be obtained. Such control of the sound speed in the main mode can be realized by selecting each film thickness and material of the IDT electrode 6, the piezoelectric film 5, and the low sound speed film 4. As an example, when the surface acoustic wave device having the following first structure example is configured, the sound speed in the main mode is about 3800 m / sec.

(First structural example)
IDT electrode 6: Al film, thickness 0.08λ / piezoelectric film 5: Y-cut LiTaO ₃ single crystal, thickness 0.25λ / low sound velocity film 4: SiO ₂ , thickness 0.35λ / high sound velocity film 3: aluminum nitride film, The speed of sound is 5800 m / sec.

  FIG. 11 is a diagram showing the relationship between the film thickness of the high sound velocity film and the sound speed in the main mode when the sound velocity of the high sound velocity film is 5800 m / sec. The curve in FIG. 11 shows the sound speed at which the main mode starts leaking when the sound speed of the high sound speed film is 5800 m / sec. Above this curve, the main mode leaks and good elastic wave characteristics cannot be obtained. On the other hand, when the sound speed in the main mode is 3800 m / sec, the sound speed in the main mode is located at the position indicated by the broken line D in FIG. Therefore, in this case, it can be seen that the film thickness of the high sound velocity film should be 0.6λ or more.

  As is clear from the first structural example, the main mode is more effectively confined more effectively by controlling the sound speed of the high sound speed film 3, the film thickness of the high sound speed film 3, and the sound speed of the main mode. Can do.

10 and 11, the IDT electrode 6 is made of Al, the piezoelectric film 5 is made of LiTaO ₃ , and the low acoustic velocity film 4 is made of silicon oxide. However, the same applies when other materials are used. It has been confirmed by the present inventors that this relationship is established. That is, even when other structures and materials are used, the optimum film thickness can be set by referring to FIG.

  Next, conditions for leaking high-order mode energy to the support substrate 2 side were examined. The presupposed structure is as the second structure example below.

(Second structural example)
IDT electrode 6: Al film, film thickness changed / piezoelectric film 5: Y-cut LiTaO ₃ single crystal, film thickness 0.01λ to 0.50λ / low sound velocity film 4: silicon oxide, film thickness 0.05λ ˜2.00λ / high sound velocity film 3: various high sound velocity films having a sound velocity of 4200 m / second to 6000 m / second, film thickness of 1.6λ or less / support substrate 2: glass substrate.

  Here, in the same manner as when FIG. 10 was derived, the relationship between the high-order mode energy concentration, the high-sonic film thickness, and the high-order mode sound velocity was plotted. This is shown in FIG. Using this result of FIG. 20, this relationship was set so that the energy concentration degree of the higher-order mode would satisfy 99.5% or less, and the relational expression was calculated in the same manner as in FIG. Then, the sound velocity Vh [m / s] of the high sound velocity film is divided into cases, and is normalized by the sound velocity V2 of the higher order mode and the wavelength λ [m] of the surface acoustic wave at the sound velocity Vh of each high sound velocity film. The relationship with the film thickness Th of the high acoustic velocity film was calculated. The results are shown below.

・ When Vh <4200;
V2 ≧ 187.0 × Th ² -137.0 × Th + 3919.7
・ When 4200 ≦ Vh <4400;
V2 ≧ −115.0 × Th ² + 515.0 × Th + 3796.4
・ When 4400 ≦ Vh <4600;
V2 ≧ −268.4 × Th ² + 898.0 × Th + 3728.8
・ When 4600 ≦ Vh <4800;
V2 ≧ −352.8 × Th ² + 1125.2 × Th + 3726.8
・ When 4800 ≦ Vh <5000;
V2 ≧ −568.7 × Th ² + 1564.3 × Th + 3657.2
・ In the case of 5000 ≦ Vh <5200;
V2 ≧ −434.2 × Th ² + 1392.6 × Th + 3808.2
・ When 5200 ≦ Vh <5400;
V2 ≧ −576.5 × Th ² + 17.17.1 × Th + 3748.3
・ In the case of 5400 ≦ Vh <5600;
V2 ≧ −602.9 × Th ² + 1882.6 × Th + 3733.7
・ When 5600 ≦ Vh <5800;
V2 ≧ −576.9 × Th ² + 2066.9 × Th + 3703.7
・ When 5800 ≦ Vh <6000;
V2 ≧ −627.0 × Th ² + 2256.1 × Th + 3705.7

  FIG. 12 shows the relationship among the film thickness of the high sonic film, the sound speed of the higher order mode, and the sound speed of the high sonic film. The relationship at the time of the sound velocity of each high sound velocity film in FIG. 12 is the above-described relational expression. That is, each curve in FIG. 12 indicates the sound speed of the higher-order mode when the higher-order mode starts to leak toward the support substrate 2 when the sound speed of the high-speed film is in the range of 4200 m / sec to 6000 m / sec. Indicates. When the sound speed of the higher order mode becomes faster than the curve shown in FIG. 12, the higher order mode leaks to the support substrate 2 side. As a result, the higher order mode can be leaked downward from the high sound velocity film 3, and spurious can be suppressed. Such high-order mode sound speed control can be achieved by controlling the film thickness and materials of the IDT electrode 6, the piezoelectric film 5, and the low sound speed film 4. As an example, a surface acoustic wave device having the following structure is given. In this case, the sound speed in the main mode is 3800 m / second, and the sound speed in the higher mode is 5240 m / second.

  FIG. 13 shows the sound speed at which leakage of the main mode and the higher-order mode starts when the sound speed of the high sound speed film 3 is 5800 m / sec. FIG. 13 shows the relationship between the film thickness of the high sound speed film and the sound speeds of the main mode and the higher order mode, that is, the sound speed when the main mode and the higher order mode start leaking.

  As can be seen from FIG. 13, if the film thickness of the high sound velocity film is 0.6λ or more, the main mode can be effectively confined when the sound velocity in the main mode is 3800 m / sec. On the other hand, it can be seen that the film thickness of the high sound velocity film should be 1.05λ or less in order to suppress the influence of the higher order mode. Also in the second structure example, the optimum film thickness can be set by referring to FIG. 12 even when other structures and materials are used.

  FIG. 14 corresponds to FIG. That is, on the premise of the second structural example used to obtain the result of FIG. 12, the sound speed of the higher order mode when the higher order mode starts to leak to the support substrate 2 side, the film thickness of the high speed film, The relationship with the sound speed of a high-velocity film is shown. However, here, the vertical axis represents the speed of sound of the higher order mode when the higher order mode leaks 2.0% or more to the support substrate 2 side. Therefore, compared with the case of FIG. 12, in the result shown in FIG. 14, the higher-order mode leaks further to the support substrate 2 side. That is, if the film thickness of the high sonic film 3 is set so as to increase the sound speed of the higher order mode than the curves shown in FIG. 14, the higher order mode can be effectively leaked to the support substrate 2 side.

  Further, the derivation of FIG. 14 was performed in the same manner as the case of FIGS. 10 and 12. With reference to FIG. 20, this relationship was set so that the energy concentration degree of the higher mode satisfies 98% or less, and the relational expression was calculated in the same manner as in FIG. Then, the sound velocity Vh [m / s] of the high sound velocity film is divided into cases, and is normalized by the sound velocity V2 of the higher order mode and the wavelength λ [m] of the surface acoustic wave at the sound velocity Vh of each high sound velocity film. The relationship with the film thickness Th of the high acoustic velocity film was calculated. The results are shown below.

・ When Vh <4200;
V2 ≧ 197.8 × Th ² -158.0 × Th + 418.5
・ When 4200 ≦ Vh <4400;
V2 ≧ −119.5 × Th ² + 523.8 × Th + 3992.7
・ When 4400 ≦ Vh <4600;
V2 ≧ −274.0 × Th ² + 908.9 × Th + 3924.2
・ When 4600 ≦ Vh <4800;
V2 ≧ −372.3 × Th ² + 11162.9 × Th + 3910.9
・ When 4800 ≦ Vh <5000;
V2 ≧ −573.4 × Th ² + 1573.9 × Th + 3852.8
・ In the case of 5000 ≦ Vh <5200;
V2 ≧ −443.7 × Th ² + 1411.0 × Th + 4000.5
・ When 5200 ≦ Vh <5400;
V2 ≧ −557.0 × Th ² + 1679.2 × Th + 3964.2
・ In the case of 5400 ≦ Vh <5600;
V2 ≧ −581.0 × Th ² + 1840.1 × Th + 3951.6
・ When 5600 ≦ Vh <5800;
V2 ≧ −570.7 × Th ² + 2054.7 × Th + 3908.8
・ When 5800 ≦ Vh <6000;
V2 ≧ −731.1 × Th ² + 2408.0 × Th + 3857.0

  FIG. 15 shows the relationship between the film thickness of the high sonic film and the sound speeds of the main mode and the higher mode in the case where the sound speed of the high sonic film is 5800 m / sec. The solid line in FIG. 15 indicates the main mode, and the broken line indicates the sound speed at which the higher mode starts to leak. As is apparent from FIG. 15, the main mode can be effectively confined by setting the film thickness of the high sound velocity film to 0.6λ or more. Moreover, by setting it to 0.85λ or less, the higher-order mode can be sufficiently leaked. Therefore, it is preferable that the film thickness of the high sound velocity film is in the range of 0.6λ to 0.85λ. Even when other structures and materials are used, the optimum film thickness can be set by referring to FIG. Thereby, the influence of the higher order mode can be further suppressed than the condition of FIG.

  Although FIG. 15 has been described with respect to the case where the sound velocity of the high sound velocity film is 5800 m / sec, it has been confirmed by the present inventor that the sound velocity of the high sound velocity membrane is the same in other values.

  In the surface acoustic wave device 1 shown in FIG. 1, it is preferable that the sound velocity of the support substrate 2 is low. As a result, more high-order mode energy can be leaked to the support substrate 2 side. Therefore, it is preferable that the sound speed of the support substrate 2 is slower than the sound speed of the high sound speed film 3.

  In the surface acoustic wave device 1 shown in FIG. 1, since the upper surface 2a of the support substrate 2 is a rough surface, the bulk wave that has reached the rough surface of the support substrate 2 is scattered by the unevenness of the rough surface. Therefore, compared with the case where the support substrate upper surface 2a is smooth, the influence of higher order modes can be further suppressed.

  FIG. 21 is a diagram showing the relationship between the surface roughness Ra of the support substrate and the phase max. The surface roughness Ra in the present specification is a value defined in JIS B 0601. In FIG. 21, the higher the phase max, the higher the intensity of the higher order mode.

  As shown in FIG. 21, when the surface roughness Ra of the support substrate is 1 nm or more, the strength of the higher-order mode can be reduced.

  Therefore, the surface roughness Ra of the support substrate is preferably 1 nm or more.

  When the surface roughness Ra of the support substrate is 25 nm or more, the variation in the intensity of the higher mode is small with respect to the change in the surface roughness Ra of the support substrate. Therefore, even if the surface roughness Ra of the support substrate varies, the strength of the higher-order mode is unlikely to fluctuate.

  Therefore, the surface roughness Ra of the support substrate is more preferably 25 nm or more.

  When the surface roughness Ra of the support substrate is larger than 80 nm, it is necessary to increase the thickness of the layer in contact with the support substrate in order to absorb the unevenness of the rough surface, and an additional step of planarization is required.

  Accordingly, the surface roughness Ra of the support substrate is more preferably 25 nm or more and 80 nm or less.

  In the first embodiment, a glass substrate is used as the support substrate 2, but alumina may be used instead of glass.

  Further, high resistance silicon may be used as the support substrate. In this case, since the capacitive coupling with the substrate can be reduced and the insertion loss of the surface acoustic wave device can be improved, the resistivity of the silicon support substrate is preferably 100 Ωcm or more. Furthermore, if the resistivity of the silicon support substrate is 1000 Ωcm or more, workability is improved while obtaining an insertion loss equivalent to that of alumina or glass as a device, so that the degree of freedom of the manufacturing process is increased, which is more preferable. Furthermore, if the resistivity is 4000 Ωcm, the filter characteristics of the surface acoustic wave device can be further improved, which is more preferable.

(Second Embodiment)
FIG. 16 is a schematic front sectional view of a surface acoustic wave device as a second embodiment of the present invention.

  As shown in FIG. 16, a medium layer 9 may be laminated between the high acoustic velocity film 3 and the support substrate 2. As the medium layer 9, the same material as that of the low sound velocity film 4 can be used. In the present embodiment, the medium layer 9 is made of silicon oxide. When silicon oxide is used, the absolute value of the frequency temperature coefficient TCF can be lowered to improve the temperature characteristics.

  When the medium layer 9 is disposed, the medium layer 9 becomes a second low sound velocity film whose bulk wave sound velocity propagating through the medium layer 9 is lower than the bulk wave sound velocity propagating through the piezoelectric film 5. For this reason, higher order modes can be effectively leaked into the medium layer 9 from the high sound velocity film 3 side. Therefore, even when the support substrate 2 is configured using a support substrate material having a high sonic velocity such as alumina, the higher order mode can be leaked downward from the high sonic velocity film 3. Therefore, when the medium layer 9 is used, the degree of freedom in selecting the material constituting the support substrate 2 can be increased.

When LiTaO ₃ single crystal, LiNbO ₃ single crystal, or the like is used, a thin piezoelectric thin film can be easily obtained by a process that uses ion implantation and a peeling method from the ion implanted portion.

(Third and fourth embodiments)
In each of the embodiments described above, the surface acoustic wave device has been described. However, the present invention can also be applied to other acoustic wave devices such as a boundary acoustic wave device, and even in that case, the same effect can be obtained. be able to. FIG. 22 is a schematic front cross-sectional view showing a boundary acoustic wave device 43 as a third embodiment. Here, below the piezoelectric film 5, a low sound velocity film 4 / a high sound velocity film 3 / a support substrate 2 are laminated in order from the top. This structure is the same as that of the first embodiment. In order to excite the boundary acoustic wave, the IDT electrode 6 is formed on the interface between the piezoelectric film 5 and the dielectric 44 laminated on the piezoelectric film 5.

  FIG. 23 is a schematic front sectional view of a so-called three-medium structure boundary acoustic wave device 45 as the fourth embodiment. Again, the IDT electrode 6 is formed at the interface between the piezoelectric film 5 and the dielectric 46 in contrast to the structure in which the low acoustic velocity film 4 / the high acoustic velocity membrane 3 / the support substrate 2 are laminated below the piezoelectric membrane 5. . Further, a dielectric 47 having a faster transverse wave speed than the dielectric 46 is laminated on the dielectric 46. Thereby, a so-called boundary acoustic wave device having a three-medium structure is formed.

  Like the boundary acoustic wave devices 43 and 45, also in the boundary acoustic wave devices, the low acoustic velocity film 4 / the high acoustic velocity membrane 3 are disposed below the piezoelectric film 5 similarly to the surface acoustic wave device 1 of the first embodiment. By stacking the stacked structure, the same effects as those of the first embodiment can be obtained.

DESCRIPTION OF SYMBOLS 1 ... Surface acoustic wave device 2 ... Supporting substrate 2a ... Upper surface 3 ... High acoustic velocity film 4 ... Low acoustic velocity membrane 5 ... Piezoelectric membrane 6 ... IDT electrode 7, 8 ... Reflector 9 ... Medium layer 43 ... Elastic boundary wave device 44 ... Dielectric Body 45 ... boundary acoustic wave device 46, 47 ... dielectric

Claims (13)

An acoustic wave device having a piezoelectric film,
A support substrate;
A high-velocity film that is formed on the upper surface of the support substrate and has a bulk acoustic wave velocity that is higher than an acoustic wave velocity that propagates through the piezoelectric film;
A low-velocity film that is laminated on the high-velocity film and has a lower bulk-wave sound speed than the bulk-wave sound speed that propagates through the piezoelectric film;
The piezoelectric film laminated on the low sound velocity film;
An IDT electrode formed on one surface of the piezoelectric film,
The upper surface of the support substrate is a rough surface,
The energy concentration of the main mode, which is an elastic wave to be used, is 99.9% or more in the structural portion including the high sound velocity film and above the high sound velocity film, and the energy concentration of the higher order mode that becomes spurious. An acoustic wave device having a ratio of 99.5% or less.   The acoustic wave device according to claim 1, wherein a surface roughness Ra of an upper surface of the support substrate is 1 nm or more.   The acoustic wave device according to claim 1, wherein a surface roughness Ra of the upper surface of the support substrate is 25 nm or more.   The acoustic wave device according to claim 1, wherein the surface roughness Ra of the upper surface of the support substrate is 25 nm or more and 80 nm or less. The sound velocity at the anti-resonance frequency in the main mode is V1 [m / s], the sound velocity of the high sound velocity film is Vh [m / s], and the film thickness of the high sound velocity film normalized by the elastic wave wavelength λ [m] is Th. The elastic wave device according to any one of claims 1 to 4, wherein V1 and Th satisfy the following relational expression in each of the following Vhs when (= high sonic film thickness / λ).
・ When 4200 ≦ Vh <4400;
V1 ≦ 125.9 × Th ² −102.0 × Th + 3715.0
・ When 4400 ≦ Vh <4600;
V1 ≦ 296.3 × Th ² −253.0 × Th + 3742.2
・ When 4600 ≦ Vh <4800;
V1 ≦ 506.1 × Th ² −391.5 × Th + 3759.2
・ When 4800 ≦ Vh <5000;
V1 ≦ 768.0 × Th ² −552.4 × Th + 3776.8
・ In the case of 5000 ≦ Vh <5200;
V1 ≦ 848.5 × Th ² −541.6 × Th + 3767.8
・ When 5200 ≦ Vh <5400;
V1 ≦ 1065.2 × Th ² −709.4 × Th + 3792.8
・ In the case of 5400 ≦ Vh <5600;
V1 ≦ 1197.1 × Th ² −695.0 × Th + 3779.8
・ When 5600 ≦ Vh <5800;
V1 ≦ 1393.8 × Th ² −843.8 × Th + 3801.5
・ When 5800 ≦ Vh <6000;
V1 ≦ 1713.7 × Th ² −1193.3 × Th + 3896.1
・ In the case of 6000 ≦ Vh;
V1 ≦ 1839.9 × Th ² −1028.7 × Th + 384.1 The sound velocity of the higher order mode is V2 [m / s], the sound velocity of the high sound velocity film is Vh [m / s], and the film thickness of the high sound velocity film normalized by the wavelength λ [m] of the elastic wave is Th (= high 6. The acoustic wave device according to claim 5, wherein V2 and Th satisfy the following relational expression in each of the following Vhs:
・ When Vh <4200;
V2 ≧ 187.0 × Th ² -137.0 × Th + 3919.7
・ When 4200 ≦ Vh <4400;
V2 ≧ −115.0 × Th ² + 515.0 × Th + 3796.4
・ When 4400 ≦ Vh <4600;
V2 ≧ −268.4 × Th ² + 898.0 × Th + 3728.8
・ When 4600 ≦ Vh <4800;
V2 ≧ −352.8 × Th ² + 1125.2 × Th + 3726.8
・ When 4800 ≦ Vh <5000;
V2 ≧ −568.7 × Th ² + 1564.3 × Th + 3657.2
・ In the case of 5000 ≦ Vh <5200;
V2 ≧ −434.2 × Th ² + 1392.6 × Th + 3808.2
・ When 5200 ≦ Vh <5400;
V2 ≧ −576.5 × Th ² + 17.17.1 × Th + 3748.3
・ In the case of 5400 ≦ Vh <5600;
V2 ≧ −602.9 × Th ² + 1882.6 × Th + 3733.7
・ When 5600 ≦ Vh <5800;
V2 ≧ −576.9 × Th ² + 2066.9 × Th + 3703.7
・ When 5800 ≦ Vh <6000;
V2 ≧ −627.0 × Th ² + 2256.1 × Th + 3705.7 The sound velocity of the higher order mode is V2 [m / s], the sound velocity of the high sound velocity film is Vh [m / s], and the film thickness of the high sound velocity film normalized by the wavelength λ [m] of the elastic wave is Th (= high 6. The acoustic wave device according to claim 5, wherein V2 and Th satisfy the following relational expression in each of the following Vhs:
・ When Vh <4200;
V2 ≧ 197.8 × Th ² -158.0 × Th + 418.5
・ When 4200 ≦ Vh <4400;
V2 ≧ −119.5 × Th ² + 523.8 × Th + 3992.7
・ When 4400 ≦ Vh <4600;
V2 ≧ −274.0 × Th ² + 908.9 × Th + 3924.2
・ When 4600 ≦ Vh <4800;
V2 ≧ −372.3 × Th ² + 11162.9 × Th + 3910.9
・ When 4800 ≦ Vh <5000;
V2 ≧ −573.4 × Th ² + 1573.9 × Th + 3852.8
・ In the case of 5000 ≦ Vh <5200;
V2 ≧ −443.7 × Th ² + 1411.0 × Th + 4000.5
・ When 5200 ≦ Vh <5400;
V2 ≧ −557.0 × Th ² + 1679.2 × Th + 3964.2
・ In the case of 5400 ≦ Vh <5600;
V2 ≧ −581.0 × Th ² + 1840.1 × Th + 3951.6
・ When 5600 ≦ Vh <5800;
V2 ≧ −570.7 × Th ² + 2054.7 × Th + 3908.8
・ When 5800 ≦ Vh <6000;
V2 ≧ −731.1 × Th ² + 2408.0 × Th + 3857.0   The acoustic wave device according to any one of claims 1 to 7, wherein a bulk wave sound velocity propagating through the support substrate is slower than a bulk wave sound velocity propagating through the high sound velocity film.   The acoustic wave device according to any one of claims 1 to 8, further comprising a medium layer laminated between the support substrate and the high acoustic velocity film.   The acoustic wave device according to claim 9, wherein a bulk wave sound velocity propagating through the medium layer is slower than a bulk wave sound velocity propagating through the piezoelectric film.   The acoustic wave device according to claim 10, wherein the medium layer is made of silicon oxide.   The acoustic wave device according to claim 1, wherein the piezoelectric film is made of a lithium tantalate single crystal or a lithium niobate single crystal.   The elastic wave device according to claim 1, wherein the support substrate is made of silicon.

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