JP2015103645A - 圧電層の分極処理方法、圧電デバイス、電子機器及び移動体 - Google Patents

圧電層の分極処理方法、圧電デバイス、電子機器及び移動体 Download PDF

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JP2015103645A
JP2015103645A JP2013242630A JP2013242630A JP2015103645A JP 2015103645 A JP2015103645 A JP 2015103645A JP 2013242630 A JP2013242630 A JP 2013242630A JP 2013242630 A JP2013242630 A JP 2013242630A JP 2015103645 A JP2015103645 A JP 2015103645A
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piezoelectric
electrode layer
electric field
piezoelectric layer
layer
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JP2015103645A5 (enExample
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伊井　稔博
Toshihiro Ii
稔博 伊井
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Seiko Epson Corp
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Seiko Epson Corp
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JP2013242630A 2013-11-25 2013-11-25 圧電層の分極処理方法、圧電デバイス、電子機器及び移動体 Withdrawn JP2015103645A (ja)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019021701A (ja) * 2017-07-13 2019-02-07 キヤノン株式会社 積層圧電素子、振動子、振動波モータ、光学機器および電子機器

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07131086A (ja) * 1993-09-13 1995-05-19 Ngk Insulators Ltd 圧電膜型素子及びその処理方法並びにその駆動方法
JP2003243741A (ja) * 2002-02-19 2003-08-29 Seiko Epson Corp 圧電アクチュエータ、その駆動方法、圧電アクチュエータの製造方法および液滴噴射装置
JP2004180496A (ja) * 2002-11-15 2004-06-24 Matsushita Electric Ind Co Ltd 圧電体アクチュエータの駆動方法および圧電体アクチュエータ並びにこれを用いたディスク記録再生装置
JP2007024810A (ja) * 2005-07-21 2007-02-01 Matsushita Electric Ind Co Ltd 角速度センサ素子およびその製造方法
JP2008218547A (ja) * 2007-03-01 2008-09-18 Fujifilm Corp 圧電体とその駆動方法、圧電素子、及び液体吐出装置
JP2008258197A (ja) * 2007-03-30 2008-10-23 Fujifilm Corp 圧電素子製造方法及び液体吐出ヘッド製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07131086A (ja) * 1993-09-13 1995-05-19 Ngk Insulators Ltd 圧電膜型素子及びその処理方法並びにその駆動方法
JP2003243741A (ja) * 2002-02-19 2003-08-29 Seiko Epson Corp 圧電アクチュエータ、その駆動方法、圧電アクチュエータの製造方法および液滴噴射装置
JP2004180496A (ja) * 2002-11-15 2004-06-24 Matsushita Electric Ind Co Ltd 圧電体アクチュエータの駆動方法および圧電体アクチュエータ並びにこれを用いたディスク記録再生装置
JP2007024810A (ja) * 2005-07-21 2007-02-01 Matsushita Electric Ind Co Ltd 角速度センサ素子およびその製造方法
JP2008218547A (ja) * 2007-03-01 2008-09-18 Fujifilm Corp 圧電体とその駆動方法、圧電素子、及び液体吐出装置
JP2008258197A (ja) * 2007-03-30 2008-10-23 Fujifilm Corp 圧電素子製造方法及び液体吐出ヘッド製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019021701A (ja) * 2017-07-13 2019-02-07 キヤノン株式会社 積層圧電素子、振動子、振動波モータ、光学機器および電子機器
JP7013151B2 (ja) 2017-07-13 2022-01-31 キヤノン株式会社 積層圧電素子、振動子、振動波モータ、光学機器および電子機器

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