JP2015093751A - Carrier device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a carrier device capable of properly driving first and second carrier parts by driving means.SOLUTION: A carrier device 1 comprises an endless conveyor belt 2 for conveying an article W while turning. The carrier device 1 also comprises support means 3 for supporting the conveyor belt 2, and driving means 4 for turning the conveyor belt 2. The conveyor belt 2 has a first carrier part 11 for conveying the article W in a first conveyance direction, and a second carrier part 12 for conveying the article W in a second conveyance direction. The articles W merge and move onto the first carrier part 11 from the top of the second carrier part 12.

Description

  The present invention relates to a transport device that transports articles.

  Conventionally, for example, a conveying device described in Non-Patent Document 1 below is known.

  The conventional conveying apparatus includes a first conveyor for conveying an article in a first conveying direction, a driving means for the first conveyor for driving the first conveyor, and a first conveyor disposed on a side of the first conveyor. A second conveyor for conveying in a second conveying direction intersecting with the first conveying direction, a driving means for a second conveyor for driving the second conveyor, and a guide for guiding articles from the first conveyor onto the second conveyor; Pusher device.

"Light Conveyor Conveyor General Catalog January 2010", Okura Transport Equipment Co., Ltd., January 2010, p. 75

  However, in the above-described conventional conveying apparatus, the driving means for the first conveyor and the driving means for the second conveyor are provided separately, so that the second conveyor cannot be driven by the driving means for the first conveyor, for example. .

  SUMMARY An advantage of some aspects of the invention is that it provides a transport device that can appropriately drive a first transport unit and a second transport unit with a driving unit.

  The transport apparatus according to claim 1, comprising: an endless transport body that transports articles while rotating; a support unit that supports the transport body; and a drive unit that rotates the transport body; Has a first transport unit that transports the article in the first transport direction, and a second transport unit that transports the article in a second transport direction that intersects the first transport direction, and the article is the second transport unit It moves from above to the first transport unit.

  The transport apparatus according to claim 2, comprising: an endless transport body that transports an article while rotating; a support unit that supports the transport body; and a driving unit that rotates the transport body; Has a first transport unit that transports the article in the first transport direction and a second transport unit that transports the article in a second transport direction that intersects the first transport direction, and the article is the first transport unit Branching and moving from above to the second transport unit.

  The transport apparatus according to claim 3, comprising: an endless transport body that transports articles while rotating; a support unit that supports the transport body; and a driving unit that rotates the transport body, and the transport body. Has a first transport unit that transports the article in the first transport direction, and a second transport unit that transports the article in a second transport direction that intersects the first transport direction, and the article is the second transport unit The product moves from above onto the first transport unit, and the article branches and moves from above the first transport unit onto the second transport unit.

  According to a fourth aspect of the present invention, there is provided the conveying apparatus according to the second or third aspect, further comprising guide means for guiding an article from the first conveying unit onto the second conveying unit.

  A conveying device according to a fifth aspect is the conveying device according to any one of the first to fourth aspects, wherein the conveying member is constituted by one endless belt member.

  According to a sixth aspect of the present invention, in the conveying device according to any one of the first to fifth aspects, the driving means is constituted by a single driving motor.

  The transport device according to claim 7 is the transport device according to any one of claims 1 to 6, wherein the support means supports the transport start end portion and the transport end portion of the first transport portion, respectively. And a second transport unit end pulley that supports the transport start end and transport end of the second transport unit, respectively, and the axial direction of each of the first transport unit end pulleys is a plan view of the first transport unit. The axial direction of each end pulley for the second conveying unit coincides with the direction orthogonal to the second conveying direction of the second conveying unit in plan view.

  According to the present invention, the first conveyance unit and the second conveyance unit can be appropriately driven by the driving unit by rotating the conveyance body by the driving unit.

It is a top view of the conveying apparatus which concerns on the 1st Embodiment of this invention. It is a side view of a conveyance apparatus same as the above. It is a front view of a conveyance apparatus same as the above. It is explanatory drawing of how to hang the conveyance belt of a conveyance apparatus same as the above. It is a top view of the conveying apparatus which concerns on the 2nd Embodiment of this invention. It is a front view of a conveyance apparatus same as the above. It is a top view of the conveying apparatus which concerns on the 3rd Embodiment of this invention. It is a front view of a conveyance apparatus same as the above. It is a schematic plan view of the conveying apparatus which concerns on the 4th Embodiment of this invention. It is a schematic plan view of the conveying apparatus which concerns on the 5th Embodiment of this invention. It is a schematic plan view of the conveying apparatus which concerns on the 6th Embodiment of this invention. It is a schematic plan view of the conveying apparatus which concerns on the 7th Embodiment of this invention. It is a schematic plan view of the conveying apparatus which concerns on the 8th Embodiment of this invention. It is a schematic plan view of the conveying apparatus which concerns on the 9th Embodiment of this invention. It is a schematic plan view of the conveying apparatus which concerns on the 10th Embodiment of this invention. It is a schematic plan view of the conveying apparatus which concerns on the 11th Embodiment of this invention. It is a schematic plan view of the conveying apparatus which concerns on the 12th Embodiment of this invention. It is a schematic plan view of the conveying apparatus which concerns on the 13th Embodiment of this invention. It is a top view of the conveying apparatus which concerns on the 14th Embodiment of this invention.

  A first embodiment of the present invention will be described with reference to FIGS.

  In FIG. 1 to FIG. 3, reference numeral 1 denotes a transport device. The transport device 1 is, for example, a merging type integrated orthogonal conversion machine that transports an article W and joins it from a sub line to a main line.

  As shown in FIGS. 1 to 3, the transport device 1 can transport the transport belt 2, which is an endless single transport body that transports the article W while rotating in a predetermined direction, and the transport belt 2. And a single driving means 4 for rotating the conveyor belt 2 in a predetermined direction.

  The transport belt 2 is composed of only one endless belt member 5 having a certain width and having flexibility, for example, and this endless belt member 5 can be attached to and detached from the support means 3. The drive means 4 is composed of only one drive motor 6 provided at one location.

  The transport belt 2 is constituted by a part of the upper surface portion on the transport side of the transport belt 2 and transports an article W in a horizontal first transport direction (left direction in FIG. 1) a; Of the upper surface portion of the conveyor belt 2 on the conveyance side, the article W is configured by another portion different from the first conveyance unit 11 and intersects the first conveyance direction a in a plan view, that is, for example, a horizontal second conveyance direction orthogonal to the first conveyance direction a. It has the 2nd conveyance part 12 conveyed to b (downward in FIG. 1) b. Then, the article W moves from the second transport unit 12 to the first transport unit 11.

  The first transport unit (main transport unit) 11 has an elongated rectangular shape in a plan view having a longitudinal direction in a direction (front-rear direction) along the first transport direction a. On the other hand, the merging second transport unit (sub transport unit) 12 has a rectangular shape in plan view having a short direction in a direction (left-right direction) along the second transport direction b.

  For example, the first conveyance unit 11 and the second conveyance unit 12 may have a configuration in which the length and width are opposite, or a configuration in which the conveyance direction length is the same (including substantially the same).

  The second transport unit 12 for joining the articles W onto the first transport unit 11 is disposed on the side of the first transport unit 11 so as to be orthogonal to the first transport unit 11. ing. Moreover, the 2nd conveyance part 12 is arrange | positioned in the position higher than the 1st conveyance part 11 (refer FIG. 3). Note that the second transport unit 12 may be disposed at the same height as the first transport unit 11.

  The support means (belt support means) 3 has a horizontal first transport portion support plate 16 that supports the lower surface of the first transport portion 11 of the transport belt 2 and is in sliding contact with the lower surface, and supports the first transport portion. The plate 16 is installed between a pair of left and right first conveyor frames 17. Similarly, the support means 3 has a horizontal second transport unit support plate 18 that supports the lower surface of the second transport unit 12 of the transport belt 2 and is in sliding contact with the lower surface, and this second transport unit support plate 18. Is constructed between a pair of left and right second conveyor frames 19.

  As shown in FIG. 4, the support means 3 includes a plurality of longitudinal support members, for example, 11 support members that support the transport belt 2 composed of only one endless belt member 5 so as to be able to rotate. Have. That is, for example, the support means 3 is a pulley 21 to which is a rotation support member as a first to eleventh support member that is rotatable in the axial direction longer (or shorter) than the width of the conveyor belt 2. 31, and a single conveyor belt 2 is stretched around the first to eleventh pulleys 21 to 31.

  For example, in the first to eleventh pulleys (support members) 21 to 31, only two of the fourth pulley 24 and the eleventh pulley 31 are used as a fixed support member from the viewpoint of preventing belt meandering. You may fix to the side.

  The first pulley 21 is a second conveyance unit end pulley on the conveyance start end side that supports the conveyance start end portion of the second conveyance unit 12. The second pulley 22 is an end pulley for the second conveyance unit on the conveyance end side that supports the conveyance end portion of the second conveyance unit 12.

  The first pulley 21 and the second pulley 22 are spaced apart from each other and arranged in parallel at the same height position. Note that the heights are not necessarily the same, and one of the first pulley 21 and the second pulley 22 may be lower or higher than the other. The axial directions (longitudinal directions) of the second pulleys 21 and 22 for the second transport unit coincide with the direction orthogonal to the second transport direction b of the second transport unit 12 in plan view.

  The fifth pulley 25 is a first conveyance unit end pulley on the conveyance start end side that supports the conveyance start end portion of the first conveyance unit 11. The sixth pulley 26 is a first conveyance unit end pulley on the conveyance end side that supports the conveyance termination unit of the first conveyance unit 11.

  The fifth pulley 25 and the sixth pulley 26 are disposed at the same height in parallel and spaced apart from each other. It should be noted that the heights are not necessarily the same, and either one of the fifth pulley 25 and the sixth pulley 26 may be lower or higher than the other. The axial direction (longitudinal direction) of each of the first transport unit end pulleys 25 and 26 coincides with a direction orthogonal to the first transport direction a of the first transport unit 11 in plan view.

  Further, the third pulley 23 is disposed below the second pulley 22 in parallel with the second pulley 22. The first to third pulleys 21, 22, and 23 are installed between the second conveyor frames 19.

  Further, the rod-shaped fourth pulley (45 ° rod) 24 and the rod-shaped eleventh pulley (45 ° rod) 31 are arranged at different height positions in parallel and spaced apart from each other. . That is, the eleventh pulley 31 is disposed directly below the fourth pulley 24. The axial direction (longitudinal direction) of each of the pulleys 24 and 31 is in a direction inclined at a predetermined inclination angle (for example, 45 °) α with respect to the first conveying direction a of the first conveying unit 11 in plan view. Match. Each pulley 24, 31 is formed in a round bar shape having a smaller diameter (the same or larger diameter) than other pulleys such as end pulleys. Further, the predetermined inclination angle α may be, for example, 30 ° or 60 ° other than 45 °. In this case, the second conveyance unit 12 is not perpendicular to the first conveyance unit 11 but is an oblique intersection. A transfer roller that fills the oblique gap may be provided as necessary.

  Further, the tenth pulley (return pulley) 30 is disposed below the fifth pulley (end pulley) 25 in parallel with the fifth pulley 25 and is at the same height as the eleventh pulley 31. positioned. Note that the heights are not necessarily the same, and one of the tenth pulley 30 and the eleventh pulley 31 may be lower or higher than the other.

  The eighth pulley 28 is a drive pulley in which a predetermined portion on the return side of the conveyor belt 2 is wound in an arc shape. Above the eighth pulley 28, a seventh pulley 27 and A ninth pulley 29 is arranged in parallel.

  The fourth to eleventh pulleys 24 to 31 are installed between the first conveyor frames 17. As is apparent from FIG. 1, the pulleys 24 and 31, which are elongated round bar-like support members, are provided with a plate-like support portion 36 bolted to one first conveyor frame 17 and the other first conveyor frame. A plate-like support portion 37 that is bolted to 17 is rotatably supported. The end portion of the fourth pulley 24 on the support portion 36 side is located in the vicinity of the end portion of the third pulley 23 (see FIG. 4). From the viewpoint of preventing belt meandering, the two pulleys 24 and 31 may be fixed to the support portions 36 and 37 as fixed support members, and the two pulleys (support members) 24 and 31 may be rotated. It may be possible to selectively switch between a possible state and a non-rotatable state. Further, the support portion 36 may be bolted to the second conveyor frame 19 instead of the first conveyor frame 17.

  The drive means 4 is composed of, for example, only one drive motor 6, and the eighth pulley 28 that is the drive pulley of the support means 3 is rotationally driven by the power output from the drive motor 6. The conveyor belt 2 rotates based on the rotation of the eighth pulley 28, and the article W is conveyed by the rotating conveyor belt 2. The drive motor 6 is attached to a bracket 33 provided on the first conveyor frame 17.

  The transport device 1 includes a first conveyor section (conveyor main section) 41 that is a main line for transporting the articles W in the first transport direction a by the first transport section 11 of the transport belt 2, and the first conveyor section 41. Is arranged in an orthogonal shape (crossing shape) to the side of a desired portion (arbitrary intermediate portion) on the conveyance start end side, and the second conveyance unit 12 of the conveyance belt 2 conveys the article W in the second conveyance direction b. It is comprised with the 2nd conveyor part (conveyor conversion part) 42 which is a line.

  Next, the operation and the like of the transport device 1 will be described.

  When the eighth pulley 28, which is a driving pulley, is rotated by the operation of the drive motor 6 that is the driving means 4, the conveyor belt 2 rotates in a predetermined direction. As a result, the first conveyor unit 11 of the conveyor belt 2 and Both of the second transport units 12 are driven to travel simultaneously.

  Then, the article W placed on the second transport unit 12 is transported in the second transport direction b by the second transport unit 12 and is transferred from the second transport unit 12 onto the first transport unit 11. After the merging and moving, the first transport unit 11 transports the first transport direction a. That is, the article W moves from the second transport unit 12 to the first transport unit 11 and joins the main line.

  In addition, when the article W is carried in from an upstream conveyor (not shown) which is an upstream conveying means disposed upstream of the first conveying unit 11, the article W is transferred to the first conveying unit 11 by the first conveying unit 11. From the conveyance start end portion to the conveyance end portion, it is conveyed in a straight line in the first conveyance direction a and, for example, unloaded to a downstream conveyor (not shown) that is a downstream conveyance means.

  And according to such a conveying apparatus 1, the first driving unit 4 and the second conveying unit 12 share the first driving unit 4 by rotating the conveying belt 2 with the driving unit 4. Both the transport unit 11 and the second transport unit 12 can be appropriately synchronously driven.

  The support means 3 for supporting the transport belt 2 includes first transport end pulleys 25 and 26 for supporting the transport start end and transport end of the first transport section 11 and the transport start end of the second transport section 12, respectively. And second end pulleys 21 and 22 for supporting the transfer end portions, and the axial directions of the first end pulleys 25 and 26 for the first transfer portion are the first transfer direction a of the first transfer portion 11 in plan view. For example, the end pulleys 21 and 22 for the second transport unit are configured so that the axial directions thereof coincide with the direction perpendicular to the second transport direction b of the second transport unit 12 in plan view. Compared to a configuration in which the axial direction of the belt is inclined with respect to a direction orthogonal to the transport direction, the transport belt 2 is less likely to meander and the travel of the first transport unit 11 and the second transport unit 12 can be stabilized. .

  Furthermore, by shortening the length of the transport belt 2 in the transport direction of the second transport section 12, the length of the second conveyor section 42 can be shortened, and space can be saved.

  Moreover, compared with the structure etc. which carry out orthogonal conversion by the two conveyors like the past, the drive means 4 becomes one place, and energy saving, a manufacturing cost reduction, etc. can be aimed at.

  Furthermore, since there are only two pulleys 24 and 31 that are inclined support members positioned to be inclined with respect to the first transport direction a, for example, compared to a configuration having three or more inclined pulleys, etc. The turning resistance (running resistance) of the conveyor belt 2 is small, and energy saving can be achieved.

  Next, FIGS. 5 and 6 show a second embodiment of the present invention.

  Unlike the first embodiment, the transport device 1 according to the second embodiment is a branching type integrated orthogonal converter that transports the article W and branches it from the main line to the sub-line. That is, in the transport device 1, the article W branches and moves from the first transport unit 11 to the second transport unit 12.

  As shown in FIGS. 5 and 6, the transport device 1 guides the article W from the first transport unit 11 of the transport belt 2 to the second transport unit 12 for branching and branching. Means 51 are provided.

  The guide means 51 is, for example, a pusher device, and can advance and retreat with respect to the upper part of the first transport unit 11, and abuts against the article W on the first transport unit 11 by the advance operation so that the article W is brought into contact with the second transport unit 12. An article extruding body 52 to be pushed out, and an air cylinder 53 as a driving means for moving the article extruding body 52 forward and backward are provided. The guide means 51 is provided on the first conveyor frame 17 on the opposite side of the first conveyor section 41 from the second conveyor section 42 side.

  Moreover, the 2nd conveyance part 12 of the 2nd conveyor part 42 is arrange | positioned in the position lower than the 1st conveyance part 11 so that the articles | goods W from the 1st conveyance part 11 can be received smoothly ( (See FIG. 6). Note that the second transport unit 12 may be disposed at the same height as the first transport unit 11.

  Furthermore, the turning direction of the transport belt 2 is opposite to that in the first embodiment, and the first transport direction a and the second transport direction b are opposite to those in the first embodiment. is there. The other configuration of the transfer device 1 is basically the same as that of the first embodiment.

  Even in this transport apparatus 1, the same operation and effect as in the first embodiment, such that both the first transport unit 11 and the second transport unit 12 can be appropriately synchronously driven by the common drive unit 4, etc. Can be played.

  The guide means 51 is not limited to the pusher device, and may be a diverter device, for example, as in the third embodiment shown in FIGS. The diverter device can be rotated to contact the article W on the first conveyance section 11 and guide the article W onto the second conveyance section 12 by rotating the first conveyance section 11 upward, for example. It has an article guide body 54 and an air cylinder 55 which is a driving means for rotating the article guide body 54 around the rotation center P. The article guide 54 is composed of a drive pulley 56 and a driven pulley 57 that are spaced apart from each other, and an article guide endless member 58 that spans the pulleys 56 and 57.

  Next, FIGS. 9 to 18 show fourth to thirteenth embodiments of the present invention, respectively.

  The conveyance device 1 according to the fourth embodiment shown in FIG. 9 is a merging type, and the first conveyance direction a of the first conveyance unit 11 of the conveyance belt 2 is opposite to that of the first embodiment. Yes.

  The conveyance device 1 according to the fifth embodiment shown in FIG. 10 is a branch type, and the first conveyance direction a of the first conveyance unit 11 of the conveyance belt 2 is opposite to that of the second embodiment. Yes.

  The conveyance device 1 according to the sixth embodiment shown in FIG. 11 is a merge type, and includes a plurality of conveyance belts 2, that is, for example, two second conveyance units 12 for merging. The two second transport units 12 for merging are both disposed on one side of the first transport unit 11.

  The conveyance device 1 according to the seventh embodiment shown in FIG. 12 is a merge / branch type, and the conveyance belt 2 includes one second conveyance unit 12 for merging and one second conveyance unit 12 for divergence. Have. One confluence second transport unit 12 is disposed on one side of the first transport unit 11, and one branch second transport unit 12 is disposed on the other side of the first transport unit 11. It is arranged.

  The conveyance device 1 according to the eighth embodiment shown in FIG. 13 is a merge / branch type, and the conveyance belt 2 has one second conveyance unit 12 for merging and one second conveyance unit 12 for divergence. Have. One merging second transport unit 12 and one branching second transport unit 12 are all disposed on one side of the first transport unit 11.

  The transport apparatus 1 according to the ninth embodiment shown in FIG. 14 is of a branch type, and has a plurality of transport belts 2, that is, for example, two second transport sections 12 for branching. One branching second transport unit 12 is disposed on one side of the first transport unit 11, and the other branching second transport unit 12 is disposed on the other side of the first transport unit 11. It is arranged.

  The transport apparatus 1 according to the tenth embodiment shown in FIG. 15 is a branch type, and has a plurality of transport belts 2, that is, for example, two second transport sections 12 for branching. Each of the two branching second transport units 12 is disposed on the other side of the first transport unit 11.

  The conveyance device 1 according to the eleventh embodiment shown in FIG. 16 is a merge / branch type, and the conveyance belt 2 has one second conveyance unit 12 for merging and one second conveyance unit 12 for divergence. Have. One confluence second transport unit 12 is disposed on one side of the first transport unit 11, and one branch second transport unit 12 is disposed on the other side of the first transport unit 11. It is arranged.

  The conveyance device 1 according to the twelfth embodiment shown in FIG. 17 is a merge / branch type, and the conveyance belt 2 includes one second conveyance unit 12 for merging and one second conveyance unit 12 for divergence. Have. One merging second transport unit 12 and one branching second transport unit 12 are all disposed on one side of the first transport unit 11.

  The conveying apparatus 1 according to the thirteenth embodiment shown in FIG. 18 is a merging type, and has a plurality of conveying belts 2, that is, for example, two second conveying portions 12 for merging. One merging second transport unit 12 is disposed on one side of the first transport unit 11, and the other merging second transport unit 12 is disposed on the other side of the first transport unit 11. It is arranged.

  Although not shown, for example, the configuration in which the conveyor belt 2 has three or more merging second conveyance units 12 or the conveyance belt 2 has three or more branching second conveyance units 12 may be used. .

  In any of the embodiments, the second transport unit 12 is not limited to a configuration in which the second transport unit 12 is located at a predetermined fixed position. For example, the position of the second transport unit 12 can be arbitrarily changed according to the layout. In addition, the second transport unit 12 may be configured such that the position of the second transport unit 12 can be adjusted along the first transport direction a of the first transport unit 11 (see a two-dot chain line in FIG. 11 and the like).

  Furthermore, the endless transport body supported by the support means 3 so as to be able to rotate is not limited to the belt-shaped transport belt 2, and may be composed of, for example, a plurality of transport ropes arranged in the width direction.

  In addition, the configuration is not limited to the configuration in which the first transport unit 11 and the second transport unit 12 are arranged orthogonal to each other. The structure etc. which were made may be sufficient.

  Further, for example, as in the fourteenth embodiment shown in FIG. 19, a plurality of endless transport bodies, for example, two endless belt members 61 and 62 may be configured. These endless belt members 61 and 62 are synchronously driven by one drive motor 6. A configuration in which a plurality of, for example, two drive motors 6 for individually driving the two endless belt members 61 and 62 are provided may be employed. Further, the two second transport units 12 may be for merging or for branching.

  In addition, although several embodiment of this invention and its modification were demonstrated, it is also possible to combine each said embodiment and each modification suitably.

DESCRIPTION OF SYMBOLS 1 Conveyance apparatus 2 Conveyance belt which is a conveyance body 3 Support means 4 Drive means 5 Endless belt member 6 Drive motor
11 First transport section
12 Second transport section
21 1st pulley which is the end pulley for the 2nd conveyance section
22 Second pulley that is an end pulley for the second conveying section
25 The fifth pulley which is the end pulley for the first conveying section
26 A sixth pulley which is an end pulley for the first conveying section
51 Guide means W Article a First transport direction b Second transport direction

Claims (7)

An endless transport body for transporting articles while rotating;
A support means for supporting the carrier;
Driving means for rotating the carrier,
The carrier is
A first transport unit for transporting articles in a first transport direction;
A second transport unit that transports an article in a second transport direction that intersects the first transport direction;
Articles are joined and moved from the second transport unit to the first transport unit. An endless transport body for transporting articles while rotating;
A support means for supporting the carrier;
Driving means for rotating the carrier,
The carrier is
A first transport unit for transporting articles in a first transport direction;
A second transport unit that transports an article in a second transport direction that intersects the first transport direction;
The article is branched and moved from the first transport unit to the second transport unit. An endless transport body for transporting articles while rotating;
A support means for supporting the carrier;
Driving means for rotating the carrier,
The carrier is
A first transport unit for transporting articles in a first transport direction;
A second transport unit that transports an article in a second transport direction that intersects the first transport direction;
An article moves from above the second conveyor to the first conveyor, and the article branches from the first conveyor to the second conveyor. The transport apparatus according to claim 2 or 3, further comprising guide means for guiding an article from the first transport unit onto the second transport unit. The conveyance device according to any one of claims 1 to 4, wherein the conveyance body is configured by one endless belt member. The conveying device according to any one of claims 1 to 5, wherein the driving unit is configured by a single driving motor. Support means are
An end pulley for a first transport unit that supports a transport start end and a transport end of the first transport unit;
An end pulley for the second transport unit that supports the transport start end and the transport end of the second transport unit,
The axial direction of each first transport unit end pulley coincides with a direction orthogonal to the first transport direction of the first transport unit in plan view,
The axial direction of each said 2nd conveyance part end pulley corresponds in the direction orthogonal to the 2nd conveyance direction of the said 2nd conveyance part by planar view. The conveyance as described in any one of Claim 1 thru | or 6 characterized by the above-mentioned. apparatus.

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