JP2015084290A - Atmospheric pressure plasma generator - Google Patents

Atmospheric pressure plasma generator Download PDF

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JP2015084290A
JP2015084290A JP2013222038A JP2013222038A JP2015084290A JP 2015084290 A JP2015084290 A JP 2015084290A JP 2013222038 A JP2013222038 A JP 2013222038A JP 2013222038 A JP2013222038 A JP 2013222038A JP 2015084290 A JP2015084290 A JP 2015084290A
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plasma
atmospheric pressure
metal electrode
pressure plasma
plasma generator
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信行 能島
Nobuyuki Nojima
信行 能島
英史 内山
Eiji Uchiyama
英史 内山
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Tateyama Machine Co Ltd
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Tateyama Machine Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To solve a problem that a conventional torch-type plasma device as a generator of atmospheric pressure plasma which is used for a medical purpose has a small irradiation area to make it difficult to give effect of plasma uniformly over a wide range, and to provide an atmospheric pressure plasma generator which generates atmospheric pressure plasma with uniform density and a wide irradiation area.SOLUTION: There is provided an atmospheric pressure plasma generator in which a tapered part 21 is provided for one end of a cylindrical base body 20 which is made of a dielectric body, and two or more surface electrodes 40 to which polyphase current is added is equipped for an outer periphery of the tapered part 21, and a plasma jetting port 23 is provided for a tip end of the tapered part 21, a metal electrode 30 is loosely fitted inside the cylindrical base body 20, and plasma raw material gas is introduced from the other end of the cylindrical base body 20.

Description

本発明は、大気圧プラズマ発生装置及びそれを使用した医療器具に関するものである。   The present invention relates to an atmospheric pressure plasma generator and a medical instrument using the same.

近年、プラズマを利用した医療の研究が盛んに行われている。低温（常温）の大気圧プラズマの照射により、癌細胞のアポトーシス（細胞死）誘発、止血、皮膚疾患等の治癒や再生に効果があり、またプラズマを照射した溶液については生物活性を有するとの報告もある。   In recent years, medical research using plasma has been actively conducted. Irradiation with low-temperature (normal temperature) atmospheric pressure plasma is effective in inducing apoptosis (cell death) of cancer cells, hemostasis, healing and regeneration of skin diseases, etc. In addition, plasma-irradiated solutions have biological activity There are also reports.

特開２００７−３２３８６４号公報JP 2007-323864 A

しかし上記照射に用いるためのプラズマ発生装置として、特許文献１に記載のグロー放電を利用したトーチ型プラズマ装置は、照射面積が小さく、プラズマの効果を広範囲に均一にもたらすことが困難であるという問題があった。よって密度が均一で、かつ照射面積が広い大気圧プラズマを発生させる大気圧プラズマ発生装置を提供することが、本発明が解決しようとする課題である。   However, as a plasma generator for use in the irradiation described above, the torch type plasma apparatus using glow discharge described in Patent Document 1 has a problem that the irradiation area is small and it is difficult to bring the plasma effect uniformly over a wide range. was there. Accordingly, it is an object of the present invention to provide an atmospheric pressure plasma generator that generates atmospheric pressure plasma having a uniform density and a wide irradiation area.

本発明は、上記課題を解決すべく次のような技術的手段を講じた。
すなわち、請求項１記載の発明は、誘電体からなる筒状基体２０の一端にテーパ部２１を設け、このテーパ部２１の外周には多相交流を付加する面電極４０を二以上備えると共に、このテーパ部２１の先端にはプラズマ噴出口２３を設け、前記筒状基体２０の内側に金属電極３０を遊嵌し、前記筒状基体２０の他端からプラズマ原料ガスを導入する大気圧プラズマ発生装置である。 The present invention has taken the following technical means to solve the above problems.
That is, the invention described in claim 1 is provided with a tapered portion 21 at one end of the cylindrical base body 20 made of a dielectric, and provided with two or more surface electrodes 40 for applying multiphase alternating current on the outer periphery of the tapered portion 21. A plasma jet 23 is provided at the tip of the tapered portion 21, a metal electrode 30 is loosely fitted inside the cylindrical base 20, and atmospheric pressure plasma generation is performed by introducing a plasma source gas from the other end of the cylindrical base 20. Device.

また、請求項２記載の発明は、前記金属電極３０の一端には金属テーパ部３１を有すると共に、前記金属電極３０の金属直線部３２にフランジ３３を設け、このフランジ３３に前記プラズマ原料ガスが通過する通過孔３５を二以上設けた請求項１に記載の大気圧プラズマ発生装置である。   According to the second aspect of the present invention, the metal electrode 30 has a metal taper portion 31 at one end, and a flange 33 is provided on the metal straight portion 32 of the metal electrode 30, and the plasma source gas is supplied to the flange 33. The atmospheric pressure plasma generator according to claim 1, wherein two or more passage holes 35 are provided.

また、請求項３記載の発明は、前記金属電極３０が、前記筒状基体２０に対して、この金属電極３０の軸線方向に動作可能な構成とする請求項１又は請求項２に記載の大気圧プラズマ発生装置である。   According to a third aspect of the present invention, the metal electrode 30 is configured to be operable in the axial direction of the metal electrode 30 with respect to the cylindrical base body 20. It is an atmospheric pressure plasma generator.

また、請求項４記載の発明は、請求項１から請求項３の何れか１項に記載の大気圧プラズマ発生装置を使用した医療器具である。   The invention according to claim 4 is a medical instrument using the atmospheric pressure plasma generator according to any one of claims 1 to 3.

請求項１記載の発明によれば、誘電体からなる筒状基体２０の一端に設けたテーパ部２１の外周に、多相交流を付加する面電極４０を二以上備えることにより、バリア放電による大気圧プラズマを容易に発生させることができる。   According to the first aspect of the present invention, two or more surface electrodes 40 for adding a multiphase alternating current are provided on the outer periphery of the taper portion 21 provided at one end of the cylindrical base body 20 made of a dielectric material, whereby a large amount due to barrier discharge. Atmospheric pressure plasma can be easily generated.

また、筒状基体２０の他端からプラズマ原料ガスを導入し、テーパ部２１の先端から、プラズマ原料ガスの流れに従い、プラズマ状態の気体を噴出することにより、密度が均一でかつ照射面積が広いプラズマを照射できる。   In addition, a plasma source gas is introduced from the other end of the cylindrical substrate 20, and a gas in a plasma state is ejected from the tip of the tapered portion 21 in accordance with the flow of the plasma source gas, so that the density is uniform and the irradiation area is wide. Plasma can be irradiated.

更に、筒状基体２０の内側に金属電極３０を遊嵌することで、この点でもプラズマを容易に発生させることができる。   Furthermore, by loosely fitting the metal electrode 30 inside the cylindrical base body 20, plasma can be easily generated in this respect.

請求項２記載の発明によれば、請求項１記載の発明の効果に加えて、金属電極３０の一端には金属テーパ部３１を有し、金属電極３０の金属直線部３２にフランジ３３を設けたことにより、多相交流によるプラズマの発生をより容易にできる。   According to the second aspect of the invention, in addition to the effect of the first aspect of the invention, the metal electrode 30 has the metal taper portion 31 at one end, and the metal linear portion 32 of the metal electrode 30 is provided with the flange 33. This makes it easier to generate plasma by multiphase alternating current.

またフランジ３３に、プラズマ原料ガスが通過する通過孔３５を設けたことにより、プラズマ原料ガスの流速を一定に保ちながら、ガス供給量を抑えることができる。これによりガスのランニングコストを抑えることができる。   Further, by providing the flange 33 with the passage hole 35 through which the plasma source gas passes, the gas supply amount can be suppressed while keeping the flow rate of the plasma source gas constant. Thereby, the running cost of gas can be held down.

請求項３記載の発明によれば、請求項１又は請求項２に記載の発明の効果に加えて、金属電極３０が、筒状基体２０に対して、この金属電極３０の軸線方向に動作可能な構成としたことにより、プラズマ発生後金属電極３０をプラズマ噴出口２３から遠ざけることができる。これにより金属電極３０がプラズマにより削られることが防止でき、金属電極３０の寿命を長くできると共に、噴出するプラズマを含む気体に金属が含有することを防止できる。   According to the invention described in claim 3, in addition to the effect of the invention described in claim 1 or 2, the metal electrode 30 can be operated in the axial direction of the metal electrode 30 with respect to the cylindrical base body 20. With this configuration, the metal electrode 30 can be moved away from the plasma outlet 23 after the plasma is generated. As a result, the metal electrode 30 can be prevented from being scraped by plasma, the life of the metal electrode 30 can be extended, and the gas containing the gas to be ejected can be prevented from being contained in the gas.

請求項４記載の発明によれば、請求項１から請求項３のいずれか１項に記載の発明の効果に加えて、密度が均一でかつ照射面積が広い大気圧プラズマを照射して、癌細胞の細胞死を誘発する等の医学的効果を得ることができる。また、操作が容易な医療器具を提供できる。   According to the invention described in claim 4, in addition to the effect of the invention described in any one of claims 1 to 3, the plasma is irradiated with atmospheric pressure plasma having a uniform density and a wide irradiation area. Medical effects such as inducing cell death can be obtained. In addition, a medical instrument that can be easily operated can be provided.

本発明の第一実施形態にかかる大気圧プラズマ発生装置の外観図である。1 is an external view of an atmospheric pressure plasma generator according to a first embodiment of the present invention. 図１の大気圧プラズマ発生装置の断面図である。It is sectional drawing of the atmospheric pressure plasma generator of FIG. 図１の大気圧プラズマ発生装置の電源装置の構成図である。It is a block diagram of the power supply device of the atmospheric pressure plasma generator of FIG. 図１の大気圧プラズマ発生装置のプラズマ発生時の説明図である。It is explanatory drawing at the time of the plasma generation of the atmospheric pressure plasma generator of FIG. 図１の大気圧プラズマ発生装置の使用図である。It is a usage figure of the atmospheric pressure plasma generator of FIG.

上記技術思想に基づいて具体的に構成された実施の形態について以下に図面を参照しつつ説明する。   Embodiments specifically configured based on the above technical idea will be described below with reference to the drawings.

図１は、本発明の第一実施形態にかかる大気圧プラズマ発生装置１の外観図で、図１（ａ）には正面図を、図１（ｂ）には右側面図を示す。また図２は、図１の大気圧プラズマ発生装置の断面図で、図２（ａ）には、図１のＳ断面図を、図２（ｂ）には、図１のＴ断面図を示す。本実施形態においては、図１（ａ）の右側、即ち後述するプラズマ噴出口２３のある側を大気圧プラズマ発生装置１の前側、図１（ａ）の左側を後側として説明する。   FIG. 1 is an external view of an atmospheric pressure plasma generator 1 according to the first embodiment of the present invention. FIG. 1 (a) shows a front view and FIG. 1 (b) shows a right side view. 2 is a cross-sectional view of the atmospheric pressure plasma generator of FIG. 1, FIG. 2 (a) shows the S cross-sectional view of FIG. 1, and FIG. 2 (b) shows the T cross-sectional view of FIG. . In the present embodiment, the right side of FIG. 1A, that is, the side with a plasma jet port 23 described later will be described as the front side of the atmospheric pressure plasma generator 1, and the left side of FIG.

大気圧プラズマ発生装置１は、石英ガラスなどの誘電体からなる筒状基体２０と、この筒状基体２０の内側に遊嵌した金属電極３０と、筒状基体２０のテーパ部２１に設けた多相交流を付加するための二以上の面電極４０、・・・と、プラズマ原料ガスを導入するためのガス供給口５０とから構成される。   The atmospheric pressure plasma generator 1 includes a cylindrical substrate 20 made of a dielectric material such as quartz glass, a metal electrode 30 loosely fitted inside the cylindrical substrate 20, and a multiplicity provided on a tapered portion 21 of the cylindrical substrate 20. It comprises two or more surface electrodes 40 for adding phase alternating current, and a gas supply port 50 for introducing plasma raw material gas.

本実施形態における筒状基体２０は、大気圧プラズマ発生装置１の前側に設けたテーパ部２１と、直線部２２とから構成され、この直線部２２は、厚さ１、２ｍｍの石英ガラスの円柱体で、外形が円柱形状であると共に、外形の軸心と同軸の円柱形状の内面を有する。テーパ部２１の外周には、多相交流を付加するための面電極４０を６枚、接着剤を用いて固定し、大気圧プラズマ発生装置１の後部に設けた端子４１までそれぞれ配線する。テーパ部２１の前側先端には、直線部２２と径の異なる円筒部を設け、この前側を開放しプラズマ噴出口２３とする。このプラズマ噴出口２３の径は、３０ｍｍである。筒状基体２０の後端には後蓋２４を固定し、この後蓋２４には、電源装置７０と電気的に接続するための端子４１や、大気圧プラズマ発生装置１の後方からプラズマ原料ガスを導入するためのガス供給口５０を設ける。   The cylindrical substrate 20 in the present embodiment includes a tapered portion 21 provided on the front side of the atmospheric pressure plasma generator 1 and a straight portion 22, and the straight portion 22 is a quartz glass cylinder having a thickness of 1 or 2 mm. It has a cylindrical outer shape and a cylindrical inner surface that is coaxial with the outer axis. Six surface electrodes 40 for applying multiphase alternating current are fixed to the outer periphery of the taper portion 21 using an adhesive, and wired to a terminal 41 provided at the rear portion of the atmospheric pressure plasma generator 1. A cylindrical portion having a diameter different from that of the linear portion 22 is provided at the front end of the tapered portion 21, and the front side is opened to serve as a plasma outlet 23. The diameter of the plasma outlet 23 is 30 mm. A rear lid 24 is fixed to the rear end of the cylindrical substrate 20, and a plasma source gas is connected to the rear lid 24 from the terminal 41 for electrical connection with the power supply device 70 and the rear side of the atmospheric pressure plasma generator 1. Is provided with a gas supply port 50.

金属電極３０は、比較的表面の傷つきにくいステンレス製で、概略の形状は中実の円柱である。金属電極３０は、前側の金属テーパ部３１と、後側の金属直線部３２により構成し、金属直線部３２の前部にフランジ３３を設ける。このフランジ３３の外径は、筒状基体２０の内径よりも数百μｍ程度小さくし、このフランジ３３に金属電極３０の軸心と平行に、プラズマ原料ガスが通過するための通過孔３５を６つ等分に配置する。金属電極３０の金属テーパ部３１のテーパ角θ２（図４参照）は、筒状基体２０の前部に設けたテーパ部２１のテーパ角θ１と同じであり、これにより筒状基体２０のテーパ部２１と、金属電極３０の金属テーパ部３１との、対向する部分の距離が等しくする。なお金属電極３０の材料は、プラズマの照射対象により銅やこれらの合金などを用いることが可能である。加えて、テーパ角θ１とθ２の大きさを同じとしたが、特にこれに限定するものではなく、例えば、θ２をθ１よりも小さくしてプラズマ噴出口２３に近い領域で、対向する部分の距離を小さくして、プラズマの発生を容易にすることも可能である。   The metal electrode 30 is made of stainless steel whose surface is relatively hard to be damaged, and the rough shape is a solid cylinder. The metal electrode 30 includes a front metal taper portion 31 and a rear metal straight portion 32, and a flange 33 is provided at the front portion of the metal straight portion 32. The outer diameter of the flange 33 is made several hundred μm smaller than the inner diameter of the cylindrical base body 20, and a passage hole 35 through which the plasma source gas passes through the flange 33 in parallel with the axis of the metal electrode 30. Arrange equally. The taper angle θ2 (see FIG. 4) of the metal taper portion 31 of the metal electrode 30 is the same as the taper angle θ1 of the taper portion 21 provided at the front portion of the cylindrical base body 20, and thereby the taper portion of the cylindrical base body 20 is obtained. 21 and the metal taper part 31 of the metal electrode 30 are made equal to each other in the distance between the opposing parts. The material of the metal electrode 30 can be copper or an alloy thereof depending on the plasma irradiation target. In addition, the sizes of the taper angles θ1 and θ2 are the same. However, the present invention is not particularly limited to this. For example, the distance between the opposed portions in the region near θ2 that is smaller than θ1 and close to the plasma outlet 23 It is also possible to make the generation of plasma easier by reducing.

金属電極３０には、この金属電極３０を筒状基体２０に対して、相対的に後側、即ちプラズマ噴出口２３と逆方向に動作させることができる機構を設ける。本実施形態では、外周に螺子を切ってある円柱形状のオスネジ６０を金属電極３０の後部に設けると共に、筒状基体２０の後蓋２４の中央に設けたネジ孔６２と螺合させる。そして、オスネジ６０の後部に設けたハンドル６１を回転させることで、金属電極３０を、金属電極３０の軸心方向であって、プラズマ噴出口２３と逆方向に動作させることができる。金属電極３０の後部には、金属電極３０の動作を円滑に行うための案内体３４を、金属電極３０の円周方向に等分に配置する。なお、金属電極３０の前端は、緩やかなＲ形状とし、異常放電が起こるのを防止する。動作機構としては、本実施形態以外にエアシリンダや、モータを用いる構成を採用することもできる。   The metal electrode 30 is provided with a mechanism capable of operating the metal electrode 30 relative to the cylindrical base body 20 in the rear direction, that is, in the direction opposite to the plasma outlet 23. In the present embodiment, a cylindrical male screw 60 having a thread on the outer periphery is provided at the rear portion of the metal electrode 30 and is screwed into a screw hole 62 provided at the center of the rear cover 24 of the cylindrical base body 20. Then, by rotating the handle 61 provided at the rear portion of the male screw 60, the metal electrode 30 can be operated in the axial direction of the metal electrode 30 and in the direction opposite to the plasma jet port 23. At the rear part of the metal electrode 30, a guide body 34 for smoothly operating the metal electrode 30 is equally arranged in the circumferential direction of the metal electrode 30. The front end of the metal electrode 30 has a gentle R shape to prevent abnormal discharge from occurring. As an operation mechanism, a configuration using an air cylinder or a motor can be employed in addition to the present embodiment.

誘電体からなる筒状基体２０の一端に設けたテーパ部２１の外周には多相交流を付加する面電極４０を二以上備えることにより、バリア放電による大気圧プラズマを容易に発生させることができる。   By providing two or more surface electrodes 40 for applying a multiphase alternating current on the outer periphery of the tapered portion 21 provided at one end of the cylindrical substrate 20 made of a dielectric, atmospheric pressure plasma due to barrier discharge can be easily generated. .

また、筒状基体２０の他端からプラズマ原料ガスを導入し、テーパ部２１の先端から、プラズマ原料ガスの流れに従い、プラズマを含む気体を噴出することにより、密度が均一でかつ照射面積が広いプラズマを照射できる。   In addition, a plasma source gas is introduced from the other end of the cylindrical substrate 20, and a gas containing plasma is ejected from the tip of the taper portion 21 in accordance with the flow of the plasma source gas, so that the density is uniform and the irradiation area is wide. Plasma can be irradiated.

更に、筒状基体２０の内側に、この筒状基体２０と同心の金属電極３０を遊嵌することで、プラズマを容易に発生させることができる。   Furthermore, plasma can be easily generated by loosely fitting the metal electrode 30 concentric with the cylindrical substrate 20 inside the cylindrical substrate 20.

金属電極３０の一端には金属テーパ部３１を有し、金属電極３０の金属直線部３２にフランジ３３を設けたことにより、多相交流によるプラズマの発生をより容易にできる。   One end of the metal electrode 30 has a metal taper portion 31 and a flange 33 is provided on the metal straight portion 32 of the metal electrode 30, thereby making it easier to generate plasma due to multiphase alternating current.

またフランジ３３に、プラズマ原料ガスが通過する通過孔３５を設けたことにより、プラズマ原料ガスの流速を一定に保ちながら、ガス供給量を抑えることができる。これによりガスのランニングコストを抑えることができる。   Further, by providing the flange 33 with the passage hole 35 through which the plasma source gas passes, the gas supply amount can be suppressed while keeping the flow rate of the plasma source gas constant. Thereby, the running cost of gas can be held down.

金属電極３０が、筒状基体２０に対して、この金属電極３０の軸線方向に動作可能な構成としたことにより、プラズマ発生後金属電極３０をプラズマ噴出口２３から遠ざけることができる。これにより金属電極３０がプラズマにより削られることが防止でき、金属電極３０の寿命を長くできると共に、噴出するプラズマを含む気体に金属が含有することを防止できる。   Since the metal electrode 30 is configured to be operable in the axial direction of the metal electrode 30 with respect to the cylindrical base body 20, the metal electrode 30 can be moved away from the plasma ejection port 23 after the plasma is generated. As a result, the metal electrode 30 can be prevented from being scraped by plasma, the life of the metal electrode 30 can be extended, and the gas containing the gas to be ejected can be prevented from being contained in the gas.

本実施形態の大気圧プラズマ発生装置１に接続する電源装置７０の構成について、図３により説明する。図３では、一点鎖線内が電源装置７０であり、この電源装置７０から筒状基体２０の後蓋２４に設けた端子４１を介在して、面電極４０までの配線を示している。電源装置７０は、多電極型交流放電電源装置であり、電源装置７０内のインバータ７２が、互いに対向する一対の面電極４０毎に設けられ、本実施形態では、３対の分割した面電極４０に対して、３個のインバータ７２、・・・を備える。更に電源装置７０内には、それぞれのインバータ７２、・・・の位相等を制御する制御部７１と、インバータ７２、・・・に直流電圧を印加する整流器７３を備える。   The configuration of the power supply device 70 connected to the atmospheric pressure plasma generator 1 of the present embodiment will be described with reference to FIG. In FIG. 3, the inside of the one-dot chain line is the power supply device 70, and the wiring from the power supply device 70 to the surface electrode 40 through the terminal 41 provided on the rear cover 24 of the cylindrical base body 20 is shown. The power supply device 70 is a multi-electrode AC discharge power supply device, and an inverter 72 in the power supply device 70 is provided for each pair of face electrodes 40 facing each other. In the present embodiment, three pairs of face electrodes 40 are divided. In contrast, three inverters 72 are provided. Further, the power supply device 70 includes a control unit 71 that controls the phase of each inverter 72,... And a rectifier 73 that applies a DC voltage to the inverters 72,.

本実施形態にかかる大気圧プラズマ発生装置１のプラズマの発生方法、及びその使用方法について図４及び図５により説明する。図４は本実施形態にかかる大気圧プラズマ発生装置のプラズマＰの発生時の説明図であり、筒状基体２０前部の断面図である。図５は、本実施形態にかかる大気圧プラズマ発生装置１の使用状態を示す。   A method for generating plasma and a method for using the plasma in the atmospheric pressure plasma generator 1 according to the present embodiment will be described with reference to FIGS. FIG. 4 is an explanatory diagram when the plasma P is generated in the atmospheric pressure plasma generator according to the present embodiment, and is a cross-sectional view of the front portion of the cylindrical substrate 20. FIG. 5 shows a usage state of the atmospheric pressure plasma generator 1 according to the present embodiment.

大気圧プラズマ発生装置１で発生するプラズマＰは、非平衡プラズマであり、プラズマＰを含む気体の温度は、医療に用いることができる温度内（数℃から１００℃まで）に収まる。プラズマとは、荷電種であるイオンや電子、及び中性種であるラジカルの集団であり、有機物である癌細胞のアポトーシス（細胞死）誘発、止血、皮膚疾患等の治癒や再生に効果があり、またプラズマを照射した溶液については生物活性を有する場合がある。   The plasma P generated by the atmospheric pressure plasma generator 1 is non-equilibrium plasma, and the temperature of the gas containing the plasma P falls within the temperature (from several degrees Celsius to 100 degrees Celsius) that can be used for medical treatment. Plasma is a group of charged species such as ions and electrons, and neutral species as radicals, and is effective in inducing apoptosis (cell death) of organic cancer cells, hemostasis, and healing and regeneration of skin diseases. In addition, a solution irradiated with plasma may have biological activity.

大気圧プラズマ発生装置１の使用者は、金属電極３０を遊嵌した筒状基体２０のハンドル６１を操作して、筒状基体２０のテーパ部２１と、金属テーパ部３１との距離を所定量に設定して固定する。この距離は、プラズマ原料ガスの流速や、多相交流の電圧、周波数等によって異なり、プラズマを発生させる際のパラメータの一つとなる。この際、電源装置７０と面電極４０とを端子４１により接続する。   The user of the atmospheric pressure plasma generator 1 operates the handle 61 of the cylindrical base body 20 in which the metal electrode 30 is loosely fitted, and sets the distance between the taper portion 21 of the cylindrical base body 20 and the metal taper portion 31 by a predetermined amount. Set to and fix. This distance varies depending on the flow rate of the plasma source gas, the voltage and frequency of the multiphase AC, and is one of the parameters for generating plasma. At this time, the power supply device 70 and the surface electrode 40 are connected by the terminal 41.

次に使用者は、プラズマ原料ガスを筒状基体２０の後部のガス供給口５０から供給する。プラズマ原料ガスは、図４の矢印で示したように筒状基体２０の直線部２２を流れ、金属電極３０の６個の通過孔３５を通過した後、テーパ部２１でプラズマＰを発生させる。プラズマ原料ガスは、公知のアルゴンガス、ヘリウムガス、ネオンガス等の希ガスや窒素等が該当し、プラズマの用途により使い分ける。プラズマ原料ガスのガス流の流速は、プラズマ噴出口２３で３ｍ／ｓｅｃ〜３５ｍ／ｓｅｃとすることが望ましい。   Next, the user supplies the plasma source gas from the gas supply port 50 at the rear of the cylindrical substrate 20. As shown by the arrows in FIG. 4, the plasma source gas flows through the straight portion 22 of the cylindrical base 20, passes through the six passage holes 35 of the metal electrode 30, and then generates plasma P at the tapered portion 21. The plasma raw material gas is a known rare gas such as argon gas, helium gas, neon gas, nitrogen, or the like, and is selectively used depending on the application of the plasma. The gas flow rate of the plasma source gas is desirably 3 m / sec to 35 m / sec at the plasma outlet 23.

次に使用者は、多相交流を面電極４０に付加する。交流電圧は数ｋＶ程度とし、給電電力の周波数は１０ｋＨｚから２００ｋＨｚの間で使用するのが望ましい。インバータ７２に直流電圧を供給しインバータ７２、・・・により交流に変換された電力が、端子４１を介して面電極４０、・・・に供給される。そして電源装置７０の制御部７１の位相制御によりバリア放電が行われる。この放電は所定の位相だけずれた状態で行われ、プラズマＰが発生する。この際、プラズマ原料ガスが筒状基体２０の後部から前部に向けて流れているので、生成されたプラズマＰがプラズマ噴出口２３より噴出する。   Next, the user applies multiphase alternating current to the surface electrode 40. The AC voltage is preferably about several kV, and the frequency of the feed power is preferably between 10 kHz and 200 kHz. The DC voltage is supplied to the inverter 72 and the electric power converted into the AC by the inverters 72,... Is supplied to the surface electrodes 40,. And barrier discharge is performed by the phase control of the control part 71 of the power supply device 70. FIG. This discharge is performed in a state shifted by a predetermined phase, and plasma P is generated. At this time, since the plasma raw material gas flows from the rear part to the front part of the cylindrical base body 20, the generated plasma P is ejected from the plasma ejection port 23.

次に使用者は、プラズマＰの発生が、継続的に行われるのを確認した後、ハンドル６１で金属電極３０をプラズマ噴出口２３から遠ざける方向に動作させる。   Next, after confirming that the generation of the plasma P is continuously performed, the user moves the metal electrode 30 in the direction away from the plasma ejection port 23 with the handle 61.

使用者は、本実施形態にかかる大気圧プラズマ発生装置１を、プラズマ噴出口２３を下にした状態で架台の上に固定し、プラズマ噴出口２３の下方にプラズマ被照射体を置くことも可能であるが、例えば図５に示すように、大気圧プラズマ発生装置１を被覆し、それを手に持って、プラズマ被照射体に照射することも可能である。なお本稿において医療器とは、人体に対して使用するもののほか、生物の細胞に対して使用するものも含む概念である。   The user can also fix the atmospheric pressure plasma generator 1 according to the present embodiment on the gantry with the plasma outlet 23 facing down, and place the plasma irradiated object below the plasma outlet 23. However, for example, as shown in FIG. 5, it is possible to cover the atmospheric pressure plasma generator 1 and hold it in the hand to irradiate the plasma irradiation object. In this paper, the term "medical device" is a concept that includes not only those used for the human body but also those used for living cells.

１ 大気圧プラズマ発生装置
２０ 筒状基体
２１ テーパ部
２２ 直線部
２３ プラズマ噴出口
２４ 後蓋
３０ 金属電極
３１ 金属テーパ部
３２ 金属直線部
３３ フランジ
３４ 案内体
３５ 通過孔
４０ 面電極
４１ 端子
５０ ガス供給口
６０ オスネジ
６１ ハンドル
６２ ネジ孔
７０ 電源装置
７１ 制御部
７２ インバータ
７３ 整流器 DESCRIPTION OF SYMBOLS 1 Atmospheric pressure plasma generator 20 Cylindrical base | substrate 21 Tapered part 22 Linear part 23 Plasma outlet 24 Rear cover 30 Metal electrode 31 Metal taper part 32 Metal linear part 33 Flange 34 Guide body 35 Passing hole 40 Surface electrode 41 Terminal 50 Gas supply Port 60 Male screw 61 Handle 62 Screw hole 70 Power supply device 71 Control unit 72 Inverter 73 Rectifier

Claims (4)

誘電体からなる筒状基体の一端にテーパ部を設け、
このテーパ部の外周には多相交流を付加する面電極を二以上備えると共に、
このテーパ部の先端にはプラズマ噴出口を設け、
前記筒状基体の内側に金属電極を遊嵌し、
前記筒状基体の他端からプラズマ原料ガスを導入する大気圧プラズマ発生装置。 A tapered portion is provided at one end of a cylindrical substrate made of a dielectric,
The outer periphery of this taper portion is provided with two or more surface electrodes for adding polyphase alternating current,
A plasma outlet is provided at the tip of this taper part,
A metal electrode is loosely fitted inside the cylindrical substrate,
An atmospheric pressure plasma generator for introducing a plasma source gas from the other end of the cylindrical substrate. 前記金属電極の一端には金属テーパ部を有すると共に、
前記金属電極の金属直線部にフランジを設け、
このフランジに前記プラズマ原料ガスが通過する通過孔を二以上設けた請求項１に記載の大気圧プラズマ発生装置。 While having a metal taper at one end of the metal electrode,
A flange is provided on the metal straight portion of the metal electrode,
The atmospheric pressure plasma generator according to claim 1, wherein two or more passage holes through which the plasma source gas passes are provided in the flange. 前記金属電極が、
前記筒状基体に対して、この金属電極の軸線方向に動作可能な構成とする請求項１又は請求項２に記載の大気圧プラズマ発生装置。 The metal electrode is
The atmospheric pressure plasma generator according to claim 1 or 2, wherein the apparatus is configured to be operable in the axial direction of the metal electrode with respect to the cylindrical substrate. 請求項１から請求項３の何れか１項に記載の大気圧プラズマ発生装置を使用した医療器具。   A medical instrument using the atmospheric pressure plasma generator according to any one of claims 1 to 3.
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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104994673A (en) * 2015-06-29 2015-10-21 河北大学 Device and method for generating uniform plasma brush under atmospheric pressure in air environment
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KR101773846B1 (en) * 2016-05-30 2017-09-01 광운대학교 산학협력단 Apparatus for dermatitis using non-thermal plasma with gas injection and uses thereof
KR101773847B1 (en) * 2016-05-30 2017-09-01 광운대학교 산학협력단 Apparatus for skin care using non-thermal plasma with gas injection and uses thereof
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KR20190032227A (en) * 2017-09-18 2019-03-27 아주대학교산학협력단 Composition for skin-soothing comprising liquid type plasma
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JP2020072974A (en) * 2015-08-31 2020-05-14 積水化学工業株式会社 Cell activation method and cell activation device
JP2020529257A (en) * 2017-08-04 2020-10-08 ユー．エス． パテント イノベーションズ エルエルシーＵ．Ｓ． Ｐａｔｅｎｔ Ｉｎｎｏｖａｔｉｏｎｓ Ｌｌｃ Diffuse applicator for cold atmospheric plasma systems
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US11583689B2 (en) 2016-09-22 2023-02-21 Ajou University Industry-Academic Cooperation Foundation Composition for atopy or psoriasis treatment comprising liquid type plasma

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05125460A (en) * 1991-09-06 1993-05-21 Manyou Hozen Kenkyusho:Kk Apparatus and method for treating metal material
JPH0839260A (en) * 1995-04-10 1996-02-13 Daido Steel Co Ltd Powder cladding by welding method
JP2001007095A (en) * 1993-05-14 2001-01-12 Seiko Epson Corp Surface treatment method and apparatus thereof, method and apparatus for manufacturing semiconductor device, and method of manufacturing liquid crystal display
JP2001139144A (en) * 1999-11-12 2001-05-22 Canon Inc Powder transport device and image forming device
JP2005322416A (en) * 2003-05-01 2005-11-17 Gunma Univ Atmospheric pressure low-temperature plasma device and surface treating method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05125460A (en) * 1991-09-06 1993-05-21 Manyou Hozen Kenkyusho:Kk Apparatus and method for treating metal material
JP2001007095A (en) * 1993-05-14 2001-01-12 Seiko Epson Corp Surface treatment method and apparatus thereof, method and apparatus for manufacturing semiconductor device, and method of manufacturing liquid crystal display
JPH0839260A (en) * 1995-04-10 1996-02-13 Daido Steel Co Ltd Powder cladding by welding method
JP2001139144A (en) * 1999-11-12 2001-05-22 Canon Inc Powder transport device and image forming device
JP2005322416A (en) * 2003-05-01 2005-11-17 Gunma Univ Atmospheric pressure low-temperature plasma device and surface treating method

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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KR101773847B1 (en) * 2016-05-30 2017-09-01 광운대학교 산학협력단 Apparatus for skin care using non-thermal plasma with gas injection and uses thereof
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KR101933920B1 (en) 2016-09-22 2018-12-31 아주대학교 산학협력단 Method for treating or preventing obesity with liquid type plasma
US11583689B2 (en) 2016-09-22 2023-02-21 Ajou University Industry-Academic Cooperation Foundation Composition for atopy or psoriasis treatment comprising liquid type plasma
KR102062320B1 (en) 2016-09-22 2020-01-03 아주대학교 산학협력단 Method for treating of preventing atopic dermatitis with liquid type plasma
KR20190087358A (en) * 2016-09-22 2019-07-24 아주대학교산학협력단 Method for treating of preventing atopic dermatitis with liquid type plasma
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US10537014B2 (en) 2016-09-22 2020-01-14 Ajou University Industry-Academic Cooperation Foundation Composition for obesity treatment comprising liquid-phase plasma
KR101880852B1 (en) * 2017-05-16 2018-07-20 (주)어플라이드플라즈마 Atmospheric Plasma Device
US11051389B2 (en) 2017-05-16 2021-06-29 Cobi Platec Co., Ltd. Atmospheric plasma device
WO2019022553A1 (en) * 2017-07-28 2019-01-31 아주대학교산학협력단 Non-thermal atmospheric-pressure plasma keloid treatment device, and use thereof
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KR20190012723A (en) * 2017-07-28 2019-02-11 아주대학교산학협력단 Apparatus for keloids using non-thermal atmospheric pressure plasma and uses thereof
US11684793B2 (en) 2017-07-28 2023-06-27 Ajou University Industry-Academic Cooperation Foundation Non-thermal atmospheric-pressure plasma keloid treatment device, and use thereof
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