JP2015080894A5 - - Google Patents
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- Publication number
- JP2015080894A5 JP2015080894A5 JP2013219505A JP2013219505A JP2015080894A5 JP 2015080894 A5 JP2015080894 A5 JP 2015080894A5 JP 2013219505 A JP2013219505 A JP 2013219505A JP 2013219505 A JP2013219505 A JP 2013219505A JP 2015080894 A5 JP2015080894 A5 JP 2015080894A5
- Authority
- JP
- Japan
- Prior art keywords
- recording head
- head substrate
- insulating member
- etching
- substrate according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013219505A JP6298269B2 (ja) | 2013-10-22 | 2013-10-22 | 記録ヘッド用基板、その製造方法、記録ヘッド、および記録装置 |
| US14/507,959 US9061500B2 (en) | 2013-10-22 | 2014-10-07 | Printhead substrate, method of manufacturing the same, printhead, and printing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013219505A JP6298269B2 (ja) | 2013-10-22 | 2013-10-22 | 記録ヘッド用基板、その製造方法、記録ヘッド、および記録装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015080894A JP2015080894A (ja) | 2015-04-27 |
| JP2015080894A5 true JP2015080894A5 (https=) | 2016-09-23 |
| JP6298269B2 JP6298269B2 (ja) | 2018-03-20 |
Family
ID=52825816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013219505A Expired - Fee Related JP6298269B2 (ja) | 2013-10-22 | 2013-10-22 | 記録ヘッド用基板、その製造方法、記録ヘッド、および記録装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9061500B2 (https=) |
| JP (1) | JP6298269B2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150092581A (ko) * | 2014-02-05 | 2015-08-13 | 삼성전자주식회사 | 배선 구조물 및 그 형성 방법 |
| JP7163134B2 (ja) * | 2018-10-18 | 2022-10-31 | キヤノン株式会社 | 液体吐出ヘッド、液体吐出ヘッドの製造方法および液体吐出装置 |
| JP7767880B2 (ja) * | 2021-11-30 | 2025-11-12 | セイコーエプソン株式会社 | 液体吐出ヘッドおよび液体吐出装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7244370B2 (en) | 2003-08-05 | 2007-07-17 | Canon Kabushiki Kaisha | Method for producing circuit substrate |
| JP5222005B2 (ja) * | 2008-04-09 | 2013-06-26 | キヤノン株式会社 | 記録ヘッドの製造方法 |
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2013
- 2013-10-22 JP JP2013219505A patent/JP6298269B2/ja not_active Expired - Fee Related
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2014
- 2014-10-07 US US14/507,959 patent/US9061500B2/en not_active Expired - Fee Related