JP2015074153A - Method for producing sheet, and method for producing electronic device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for producing a sheet, at the cutting step of which a space can be restrained from being created between a second release sheet and a particle-containing resin sheet, and to provide a method for producing a sealed electronic device by using the particle-containing resin sheet, which is obtained by peeling the second release sheet from the sheet produced by the method for producing the sheet.SOLUTION: The method for producing the sheet 100 comprises: a sheet forming step of forming the sheet 100 including the particle-containing resin sheet 70, a first separator 8 to be arranged on the lower surface of the particle-containing resin sheet 70, and a second separator 9 to be arranged on the upper surface of the particle-containing resin sheet 70; and a cutting step of cutting the sheet 100 from the upper side thereof to the lower side thereof. The first adhesive force F1 of the first separator 8 to the particle-containing resin sheet 70 is made smaller than the second adhesive force F2 of the second separator 9 to the particle-containing resin sheet 70 or the first adhesive force F1 and the second adhesive force F2 are made equal to or higher than 0.04 N/20 mm and are made similar to each other. The thickness T1 of the first separator 8 is thinner than that T2 of the second separator 9.

Description

  The present invention relates to a method for producing a sheet and an electronic device, and more specifically, a method for producing a sheet containing a particle-containing resin sheet, and a sheet including a first release sheet and a second release sheet provided thereon, and thereby, and thereby It is related with the manufacturing method of the electronic device which peels the 1st peeling sheet of the sheet | seat obtained, and seals an electronic element with a particle | grain containing resin sheet.

  Conventionally, various methods for producing a sheet containing particles from a composition containing particles and a resin component have been studied.

  For example, an article containing a thermally conductive grease containing particles between a first release liner (lower release liner) and a second release liner (upper release liner) has been proposed (for example, Patent Document 1 below) reference.). When using the article described in Patent Document 1, first, the first release liner is peeled from the thermally conductive grease, and then the peeled surface (exposed surface) of the thermally conductive grease is brought into contact with the electronic component, Glue. Thereafter, the second release liner is peeled off from the thermally conductive grease as necessary.

Special table 2010-524236

  However, when the article described in Patent Document 1 is cut into a desired size in accordance with the shape of the electronic component or the like, a cut end portion (a portion that becomes an end portion by cutting) of the second release liner and the heat conductive grease. It is conceivable that a large stress is likely to be generated on the second release liner, so that the second release liner floats, specifically, a gap is formed at the interface between the second release liner and the thermally conductive grease at the cut end. In that case, when the thermally conductive grease is heated and bonded to the electronic component, the gaps described above become large voids due to thermal expansion, and thus there is a problem that deformation such as a dent is generated in the thermally conductive grease.

  An object of the present invention is to provide a sheet manufacturing method capable of suppressing generation of a gap between the second release sheet and the resin-containing sheet in the cutting step, and a first release sheet of the sheet obtained thereby. An object of the present invention is to provide an electronic device manufacturing method that peels off and seals an electronic element with a particle-containing resin sheet.

  In order to achieve the above object, the sheet manufacturing method of the present invention includes a particle-containing resin sheet containing particles and a resin component, a first release sheet provided on one surface in the thickness direction of the particle-containing resin sheet, The sheet | seat preparation process which produces the sheet | seat provided with the 2nd peeling sheet provided in the said thickness direction other side of the particle-containing resin sheet, and the cutting process which cut | disconnects the said sheet | seat from the said thickness direction other side to the said thickness direction one side A first adhesion force of the first release sheet to the particle-containing resin sheet is smaller than a second adhesion force of the second release sheet to the particle-containing resin sheet, or the The first adhesion strength and the second adhesion strength are the same at 0.04 N / 20 mm or more, and the thickness of the first release sheet is the second release strength. It is characterized in that thinner than the thickness of the over door.

  According to this method, the first adhesion force of the first release sheet to the particle-containing resin sheet is smaller than the second adhesion force of the second release sheet to the particle-containing resin sheet, or the first adhesion force and the second adhesion force. The force is the same at 0.04 N / 20 mm or more, and the thickness of the first release sheet is thinner than the thickness of the second release sheet. Therefore, in the cutting step, when a large stress is generated at the cut end of the second release sheet and the particle-containing resin sheet, it is possible to suppress the occurrence of interfacial peeling between the second release sheet and the particle-containing resin sheet at the cut end. Can do. That is, it can suppress that a clearance gap is produced in the interface of the 2nd exfoliation sheet and particle content resin sheet in a cutting end part in a cutting process.

  In the sheet manufacturing method of the present invention, it is preferable that the first adhesion force is smaller than the second adhesion force.

  When the first adhesion force and the second adhesion force are the same at 0.04 N / 20 mm or more and the thickness of the first release sheet is smaller than the thickness of the second release sheet, While the sheet follows the deformation of the particle-containing resin sheet based on the stress accompanying cutting, it can be suppressed that a gap is formed between the second release sheet and the particle-containing resin sheet, while the first release step is smoothly performed. May be difficult. That is, since the first adhesion force and the second adhesion force are the same, it may be difficult to peel only the first release sheet from the particle-containing resin sheet in the first release step. That is, not the first release sheet but the second release sheet may be unintentionally released from the particle-containing resin sheet.

  However, in this method, since the first adhesive force is smaller than the second adhesive force, only the first release sheet can be reliably released from the particle-containing resin sheet in the first release step.

  In the manufacturing method of the sheet | seat of this invention, it is suitable for the said sheet | seat to be used so that an electronic element may be sealed.

  According to this method, even when the particle-containing resin sheet is heated when the electronic element is sealed with the particle-containing resin sheet after the first release sheet is peeled off, large voids due to the gaps described above are generated. Can be suppressed.

  Moreover, the manufacturing method of the electronic device of this invention is the 1st peeling process which peels the said 1st peeling sheet in the said sheet | seat manufactured by the manufacturing method of an above-described sheet from the said particle | grain containing resin sheet, and a 1st peeling process. Is provided with a sealing degree for sealing the electronic element with the particle-containing resin sheet.

  According to this method, even when the particle-containing resin sheet is heated in the sealing step, generation of large voids due to the gaps described above can be suppressed. An electronic device that can prevent deformation and has high reliability can be manufactured.

  Moreover, it is preferable that the manufacturing method of the electronic device of the present invention further includes a second peeling step of peeling the second release sheet from the particle-containing resin sheet after the sealing step.

  Moreover, according to this method, the structure of the particle | grain containing resin sheet in an electronic device can be simplified by a 2nd peeling process.

  According to the sheet manufacturing method of the present invention, it is possible to suppress the formation of a gap between the second release sheet and the particle-containing resin sheet in the cutting step.

  According to the method for manufacturing an electronic device of the present invention, an electronic device having excellent reliability can be manufactured.

FIG. 1 is a partially cutaway plan view of an embodiment of a sheet manufacturing apparatus used in the sheet manufacturing method of the present invention. FIG. 2 shows a cross-sectional side view of FIG. FIG. 3 shows a partially enlarged view of FIG. 4 shows an exploded perspective view of a pair of gears of the gear structure shown in FIG. FIG. 5 is a side sectional view for explaining the meshing of the pair of gears shown in FIG. 1, and FIG. 5A shows the downstream end of the convex surface of the first gear and the concave surface of the second gear. 5B shows a state in which the middle part of the convex surface of the inclined tooth of the first gear and a middle part of the concave surface of the inclined tooth of the second gear, FIG. 5C shows the first gear. This shows a state in which the upstream end portion of the convex surface of the inclined tooth meshes with the upstream end portion of the concave surface of the inclined tooth of the second gear. FIG. 6 is a development view when the first gear of FIG. 1 is viewed from the upper surface of the casing. 7 is a partially enlarged plan view of the vicinity of the cutting portion in FIG. 1. FIG. 7A is a state in which the chucking arm is gripping the sheet near the cutting portion, and FIG. 7B is a state in which the chucking arm conveys the laminated sheet. The state which is moving to the direction downstream side is shown. FIG. 8 is a partially enlarged side sectional view of the vicinity of the housing case of FIG. 1, FIG. 8A shows a state in which the sheet is positioned on the upper side of the conveyor, and FIG. 8B shows that the sheet is on the movable body. FIG. 8C shows a state where the sheet begins to move, FIG. 8C shows a state where the sheet is moving on the movable body, and FIG. 8D shows a state where the sheet is stored in the storage case. FIG. 9 shows an enlarged side view of the cutting process. FIG. 10 is a manufacturing process diagram of an embodiment of a method for manufacturing an electronic device according to the present invention. FIG. 10A is a first peeling process, FIGS. 10B and 10C are sealing processes, and FIG. 10D is a second peeling process. A process is shown. FIG. 11 shows an aspect 1 of the first separator and the second separator in the cutting step (an aspect in which the second separator follows the particle-containing resin sheet while the first separator does not follow the particle-containing resin sheet). FIG. 12 shows an aspect 2 (an aspect in which the second separator and the first separator follow the particle-containing resin sheet without a gap) of the first separator and the second separator in the cutting step. FIG. 13 shows an aspect 3 (an aspect in which interfacial peeling occurs between the second separator and the first separator and the particle-containing resin sheet) of the first separator and the second separator in the cutting step. FIG. 14 shows an aspect 4 of the first separator and the second separator in the cutting step (an aspect in which interfacial peeling occurs between the second separator and the first separator and the particle-containing resin sheet).

  In FIG. 2, the upper side of the page is the upper side (one side in the first direction), the lower side of the page is the lower side (the other side in the first direction), and the right side of the page is the front side (one in the second direction orthogonal to the first direction) Side), the left side of the paper surface is the rear side (the other side in the second direction), and the front side of the paper surface is the left side (the one side in the third direction orthogonal to the first direction and the second direction). Will be described with a direction arrow as the right side (the other side in the third direction). In FIG. 2, the upper side is the upstream side in the cutting direction (the other side in the thickness direction) of the sheet (laminated sheet, which will be described later), and the lower side is the downstream side in the cutting direction of the sheet (the one side in the thickness direction). The rear side is the upstream side in the conveying direction of the sheet (laminated sheet), the front side is the downstream side in the conveying direction of the sheet (laminated sheet), and the right side is the rotational axis direction of a pair of gears (described later) One side and the left side is the other side in the rotational axis direction. The directions of the drawings other than FIG. 2 conform to the directions described in FIG.

<Basic process of one embodiment of the present invention>
As shown in FIG. 9, one embodiment of the sheet manufacturing method of the present invention is provided on a particle-containing resin sheet 70 containing particles and a resin component, and a lower surface (one surface in the thickness direction) of the particle-containing resin sheet 70. A sheet production step of producing a sheet 100 including the first separator 8 as the first release sheet and the second separator 9 as the second release sheet provided on the upper surface (the other surface in the thickness direction) of the particle-containing resin sheet 70; And the cutting process which cut | disconnects the sheet | seat 100 from an upper side to a lower side (from the thickness direction other side to the thickness direction one side) is provided.

[Sheet preparation process]
(Particle-containing resin sheet 70)
The particles include powder, granules, powders, and powders, and examples of the material forming the particles include inorganic materials and organic materials. Preferably, an inorganic material is used.

  Examples of the inorganic material include carbide, nitride, oxide, carbonate, sulfate, metal, clay mineral, and carbon-based material.

  Examples of the carbide include silicon carbide, boron carbide, aluminum carbide, titanium carbide, and tungsten carbide.

  Examples of the nitride include silicon nitride, boron nitride (BN), aluminum nitride (AlN), gallium nitride, chromium nitride, tungsten nitride, magnesium nitride, molybdenum nitride, and lithium nitride.

Examples of the oxide include silicon oxide (silica, including spherical fused silica powder, crushed fused silica powder, etc.), aluminum oxide (alumina, Al ₂ O ₃ ), magnesium oxide (magnesia), titanium oxide, cerium oxide, Examples thereof include iron oxide and beryllium oxide. Furthermore, as the oxide, for example, indium tin oxide or antimony tin oxide doped with metal ions can be used.

  Examples of the carbonate include calcium carbonate.

  Examples of the sulfate include calcium sulfate (gypsum).

  Examples of the metal include copper (Cu), silver, gold, nickel, chromium, lead, zinc, tin, iron, palladium, or an alloy thereof (such as solder).

  Examples of clay minerals include montmorillonite, magnesia montmorillonite, tetsu montmorillonite, tetsu magnesian montmorillonite, beidellite, aluminian beidelite, nontronite, aluminian nontronite, support stone, aluminian support stone, Examples include hectorite, soconite, and stevensite.

  Examples of the carbon-based material include carbon black, graphite, diamond, fullerene, carbon nanotube, carbon nanofiber, nanohorn, carbon microcoil, and nanocoil.

In addition, examples of the material include a material having specific physical properties, and a heat conductive material (for example, a heat conductive material selected from carbide, nitride, oxide and metal, specifically, BN, AlN, Al _2). O ₃ ), an electrically conductive material (for example, an electrically conductive material selected from metals and carbon-based materials, specifically Cu), an insulating material (for example, nitride, oxide, etc.) BN, silica, etc.), magnetic materials (for example, oxides, metals, specifically, ferrites (soft magnetic ferrite, hard magnetic), iron, etc.). The material having specific physical properties may overlap with the material exemplified above.

  The thermal conductivity of the heat conductive material is, for example, 10 W / m · K or more, preferably 30 W / m · K or more, and for example, 2000 W / m · K or less.

Further, the electrical conductivity of the electrically conductive material is, for example, 10 ⁶ S / m or more, preferably 10 ⁸ S / m or more, and usually 10 ¹⁰ S / m or less.

The volume resistance of the insulating material is 1 × 10 ¹⁰ Ω · cm or more, preferably 1 × 10 ¹² Ω · cm or more, and for example, 1 × 10 ²⁰ Ω · cm or less.

  The magnetic material has a magnetic permeability (μ ″ at a wavelength of 2.45 GHz), for example, 0.1 to 10.

  Moreover, the shape of particle | grains is not specifically limited, For example, plate shape, scale shape, particle shape (indefinite shape), spherical shape etc. are mentioned. Preferably, particle shape and spherical shape are mentioned, More preferably, spherical shape is mentioned.

  The average value of the maximum length of particles (in the case of a spherical shape, the average particle diameter) is, for example, 0.1 μm or more, preferably 1 μm or more, and, for example, 1000 μm or less, preferably 100 μm or less. It is.

  The aspect ratio of the particles is, for example, 2 or more, preferably 10 or more, and for example, 10,000 or less, preferably 5000 or less.

The specific gravity of the particles is, for example, 0.1 g / cm ³ or more, preferably 0.2 g / cm ³ or more, and for example, 20 g / cm ³ or less, preferably 10 g / cm ³ or less. .

  These particles can be used alone or in combination of two or more.

  The resin component can disperse the particles, that is, a dispersion medium (matrix) in which the particles are dispersed and contains an insulating component, and examples thereof include resin components such as a thermosetting resin component and a thermoplastic resin component. It is done.

  Examples of the thermosetting resin component include epoxy resins, thermosetting polyimides, urea resins, melamine resins, unsaturated polyester resins, diallyl phthalate resins, silicone resins, thermosetting urethane resins, and the like.

  Examples of the thermoplastic resin component include acrylic resin, polyolefin (for example, polyethylene, polypropylene, ethylene-propylene copolymer, etc.), polyvinyl acetate, ethylene-vinyl acetate copolymer, polyvinyl chloride, polystyrene, polyacrylonitrile, Polyamide, polycarbonate, polyacetal, polyethylene terephthalate, polyphenylene oxide, polyphenylene sulfide, polysulfone, polyethersulfone, polyetheretherketone, polyallylsulfone, thermoplastic polyimide, thermoplastic urethane resin, polyaminobismaleimide, polyamideimide, polyetherimide, Bismaleimide triazine resin, polymethylpentene, fluororesin, liquid crystal polymer, olefin-vinyl alcohol copolymer, polymer Ionomer, polyarylate, acrylonitrile - ethylene - styrene copolymers, acrylonitrile - butadiene - styrene copolymer, acrylonitrile - styrene copolymer.

  These resin components can be used alone or in combination of two or more.

  Among the resin components, the thermosetting resin component is preferably an epoxy resin, and the thermoplastic resin component is preferably an acrylic resin.

  The epoxy resin is in a liquid, semi-solid, or solid form at normal temperature.

  Specifically, as the epoxy resin, for example, bisphenol type epoxy resin (for example, bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, hydrogenated bisphenol A type epoxy resin, dimer acid modified bisphenol type) Epoxy resin, etc.), novolac type epoxy resin, naphthalene type epoxy resin, fluorene type epoxy resin (eg, bisarylfluorene type epoxy resin), triphenylmethane type epoxy resin (eg, trishydroxyphenylmethane type epoxy resin), etc. Aromatic epoxy resins such as nitrogen-containing ring epoxy resins such as triepoxypropyl isocyanurate and hydantoin epoxy resins such as aliphatic epoxy resins, alicyclic epoxy resins, Glycidyl ether type epoxy resins, and glycidyl amine type epoxy resin.

  These epoxy resins can be used alone or in combination of two or more.

  The epoxy equivalent of the epoxy resin is, for example, 100 to 1000 g / eq. , Preferably 180 to 700 g / eq. It is. Moreover, when an epoxy resin is a normal temperature solid state, a softening point is 20-90 degreeC, for example.

  Moreover, an epoxy resin can be prepared as an epoxy resin composition by containing a hardening | curing agent and a hardening accelerator, for example.

  The curing agent is a latent curing agent (epoxy resin curing agent) that can cure the epoxy resin by heating. For example, a phenol compound, an amine compound, an acid anhydride compound, an amide compound, a hydrazide compound, an imidazoline compound, and the like. Is mentioned. In addition to the above, urea compounds, polysulfide compounds, and the like are also included.

  The phenol compound contains a phenol resin, for example, a novolac type phenol resin obtained by condensing phenol and formaldehyde in the presence of an acidic catalyst, for example, phenol synthesized from phenol and dimethoxyparaxylene or bis (methoxymethyl) biphenyl. Examples include aralkyl resins such as biphenyl aralkyl resins, such as dicyclopentadiene type phenol resins, such as cresol novolac resins, such as resole resins.

  Examples of the amine compound include polyamines such as ethylenediamine, propylenediamine, diethylenetriamine, and triethylenetetramine, or amine adducts thereof such as metaphenylenediamine, diaminodiphenylmethane, and diaminodiphenylsulfone.

  Examples of the acid anhydride compound include phthalic anhydride, maleic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, 4-methyl-hexahydrophthalic anhydride, methyl nadic acid anhydride, and pyromellitic acid. Anhydride, dodecenyl succinic anhydride, dichlorosuccinic anhydride, benzophenone tetracarboxylic acid anhydride, chlorendic acid anhydride and the like can be mentioned.

  Examples of the amide compound include dicyandiamide and polyamide.

  Examples of the hydrazide compound include adipic acid dihydrazide.

  Examples of the imidazoline compound include methyl imidazoline, 2-ethyl-4-methyl imidazoline, ethyl imidazoline, isopropyl imidazoline, 2,4-dimethyl imidazoline, phenyl imidazoline, undecyl imidazoline, heptadecyl imidazoline, 2-phenyl-4-methyl. Examples include imidazoline.

  These curing agents can be used alone or in combination of two or more.

  The curing accelerator is a curing catalyst, for example, an imidazole compound such as 2-phenylimidazole, 2-methylimidazole, 2-ethyl-4-methylimidazole, 2-phenyl-4-methyl-5-hydroxymethylimidazole, For example, tertiary amine compounds such as triethylenediamine and tri-2,4,6-dimethylaminomethylphenol, such as triphenylphosphine, tetraphenylphosphonium tetraphenylborate, tetra-n-butylphosphonium-o, o-diethylphospho Phosphorus compounds such as rosioate, for example, quaternary ammonium salt compounds, for example, organometallic salt compounds, for example, derivatives thereof and the like. These curing accelerators can be used alone or in combination of two or more.

  The compounding ratio of the curing agent in the epoxy resin composition is, for example, 0.5 to 200 parts by mass, preferably 1 to 150 parts by mass with respect to 100 parts by mass of the epoxy resin. For example, 0.1 to 10 parts by mass, preferably 0.2 to 5 parts by mass. Moreover, when a hardening | curing agent contains a phenol resin, the hydroxyl group of a phenol resin is 0.5-2.0 mol with respect to 1 mol of epoxy groups of an epoxy resin in an epoxy resin composition, Preferably , 0.8 to 1.2 mol.

  The above-mentioned curing agent and / or curing accelerator can be prepared and used as a solvent solution and / or a solvent dispersion dissolved and / or dispersed with a solvent, if necessary.

  Examples of the solvent include organic solvents such as ketones such as acetone and methyl ethyl ketone (MEK), esters such as ethyl acetate, and amides such as N, N-dimethylformamide. Examples of the solvent also include aqueous solvents such as water, for example, alcohols such as methanol, ethanol, propanol, and isopropanol.

  The acrylic resin contains acrylic rubber, and is specifically obtained by polymerization of a monomer containing (meth) acrylic acid alkyl ester.

  The (meth) acrylic acid alkyl ester is a methacrylic acid alkyl ester and / or an acrylic acid alkyl ester. For example, methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, (meth) Hexyl acrylate, 2-ethylhexyl (meth) acrylate, nonyl (meth) acrylate, isononyl (meth) acrylate, decyl (meth) acrylate, isodecyl (meth) acrylate, undecyl (meth) acrylate, (meth Linear or branched alkyl groups having 30 or less carbon atoms such as lauryl acrylate, tridecyl (meth) acrylate, tetradecyl (meth) acrylate, octadecyl (meth) acrylate and octadodecyl (meth) acrylate (Meth) acrylic acid alkyl ester Preferably, the alkyl moieties are linear (meth) acrylic acid alkyl esters having 1 to 18 carbon atoms.

  These alkyl (meth) acrylates can be used alone or in combination of two or more.

  The blending ratio of the (meth) acrylic acid alkyl ester is, for example, 50% by mass or more, preferably 75% by mass or more, for example, 99% by mass or less with respect to the monomer.

  The monomer may also include a copolymerizable monomer that can be polymerized with (meth) acrylic acid alkyl ester.

  The copolymerizable monomer contains a vinyl group, for example, a cyano group-containing vinyl monomer such as (meth) acrylonitrile, for example, a glycidyl group-containing vinyl monomer such as glycidyl (meth) acrylate (epoxy group-containing vinyl monomer), for example, Examples thereof include aromatic vinyl monomers such as styrene.

  The blending ratio of the copolymerizable monomer is, for example, 50% by mass or less, preferably 25% by mass or less, for example, 1% by mass or more with respect to the monomer.

  These copolymerizable monomers can be used alone or in combination of two or more.

  When the copolymerizable monomer is a cyano group-containing vinyl monomer and / or an epoxy group-containing vinyl monomer, the resulting acrylic resin has a functional group such as an epoxy group and / or a cyano group bonded to the terminal or midway of the main chain. Are introduced into the functional group-modified acrylic resin (specifically, cyano-modified acrylic resin, epoxy-modified acrylic resin, cyano-epoxy-modified acrylic resin).

  The melt viscosity at 80 ° C. of the resin component (when the thermosetting resin component is contained, the resin component in which the thermosetting resin component is in an A stage state) is, for example, 10 mPa · s or more, preferably 50 mPa · s. For example, it is 10000 mPa · s or less.

  The softening temperature (ring and ball method) of the resin component is, for example, 80 ° C. or lower, preferably 70 ° C. or lower, and for example, 20 ° C. or higher, preferably 35 ° C. or higher.

  Specifically, the mixing ratio of the particles and the resin component is such that the volume ratio of the particles in the particle-containing resin sheet 70 exceeds, for example, 30% by volume, preferably 35% by volume or more, preferably 40% by volume or more. More preferably, it is 60% by volume or more, more preferably 70% by volume or more, for example, 98% by volume or less, preferably 95% by volume or less.

  The mass-based blending ratio of the particles and the resin component is set so as to be the volume ratio of the particles in the particle-containing resin sheet 70 described above.

  The resin component includes, for example, a polymer precursor (for example, a low molecular weight polymer including an oligomer) and / or a monomer in addition to the above-described components (polymerized products).

  These resin components can be used alone or in combination.

  The particle-containing resin sheet 70 is formed from a composition containing particles and a resin component into a sheet shape extending in the surface direction (a direction orthogonal to the thickness direction).

(First separator 8)
As shown in FIG. 9, the first separator 8 is provided below the particle-containing resin sheet 70 (one side in the thickness direction) so as to contact the lower surface of the particle-containing resin sheet 70. Specifically, the first separator 8 is provided under the particle-containing resin sheet 70 without forming a gap with the lower surface of the particle-containing resin sheet 70.

  Examples of the first separator 8 include polypropylene films, ethylene-propylene copolymer films, polyester films (PET, etc.), plastic films such as polyvinyl chloride, papers such as kraft paper, cotton cloth, soft cloth, etc. Cloth such as cloth, for example, non-woven cloth such as polyester non-woven cloth and vinylon non-woven cloth, for example, metal foil and the like. Preferably, plastic films, more preferably, a polyester film is used.

  A surface treatment can be applied to the surface of the first separator 8 (the upper surface in FIG. 9, specifically, the surface facing the particle-containing resin sheet 70). Specifically, the surface of the first separator 8 is subjected to molding processing (anchor processing) such as embossing (unevenness processing) and / or peeling processing such as fluorination or alkylation processing.

  The thickness of the 1st separator 8 is 10 micrometers or more, for example, and is 500 micrometers or less, for example.

(Second separator 9)
As shown in FIG. 9, the second separator 9 is provided on the particle-containing resin sheet 70 (on the other side in the thickness direction) so as to contact the upper surface of the particle-containing resin sheet 70. Specifically, the second separator 9 is provided on the particle-containing resin sheet 70 without forming a gap with the upper surface of the particle-containing resin sheet 70.

  Examples of the material constituting the second separator 9 include the same materials as those for the first separator 8. Moreover, surface treatment can also be performed on the surface of the second separator 9 (the lower surface in FIG. 9, specifically, the surface facing the particle-containing resin sheet 70). Specifically, the surface of the second separator 9 is subjected to molding processing such as embossing (unevenness processing) and / or chemical processing such as fluorination or alkylation processing.

  The thickness of the second separator 9 is, for example, 10 μm or more, for example, 500 μm or less.

(Adhesion of first separator 8 and second separator 9)
And in the sheet 100,
(1) The first adhesion force F1 of the first separator 8 to the particle-containing resin sheet 70 is smaller than the second adhesion force F2 of the second separator 9 to the particle-containing resin sheet 70, or
(2) The first adhesion force F1 and the second adhesion force F2 are the same at 0.04 N / 20 mm or more, and the thickness T1 of the first separator 8 is thinner than the thickness T2 of the second separator 9.

[In the case of (1)]
The first adhesion force F1 will be described in detail in a later example. After the outer shape of the first separator 8 and the particle-containing resin sheet 70 is processed to a width of 20 mm, the first separator 8 is peeled off at a peeling angle of 180 degrees. It is calculated as the peel strength when peeled from the particle-containing resin sheet 70 at a speed of 300 mm / min. Further, the second adhesion force F2 will be described in detail in a later embodiment. After the outer shape of the second separator 9 and the particle-containing resin sheet 70 is processed to a width of 20 mm, the second separator 9 is peeled at a peeling angle of 180 degrees. The peel strength when peeled from the particle-containing resin sheet 70 at a peel speed of 300 mm / min is calculated.

  The ratio (F1 / F2) of the first adhesion force F1 to the second adhesion force F2 is, for example, less than 1, preferably 0.8 or less, more preferably 0.6 or less, and further preferably 0.4 or less. Especially preferably, it is 0.2 or less, for example, 0.001 or more. The difference obtained by subtracting the first adhesion force F1 from the second adhesion force F2 is, for example, more than 0 N / 20 mm, preferably 0.01 N / 20 mm or more, more preferably 0.03 N / 20 mm or more, and still more preferably. Is 0.05 N / 20 mm or more, for example, 1.0 N / 20 mm or less. Specifically, the second adhesion force F2 is, for example, 0.03 N / 20 mm or more, preferably 0.04 N / 20 mm or more, more preferably 0.05 N / 20 mm or more. 0 N / 20 mm or less. On the other hand, the first adhesion force F1 is, for example, less than 0.03 N / 20 mm, preferably 0.015 N / 20 mm or less, and, for example, 0.001 N / 20 mm or more.

  If the ratio of the above-mentioned adhesion force exceeds the above upper limit or the difference between the above-mentioned adhesion forces below the above lower limit, the relationship of (1) cannot be satisfied. In the process, a gap may be generated at the interface between the first separator 8 and the particle-containing resin sheet 70 at the cut end.

  In order to satisfy the relationship (1), for example, the surface state of the first separator 8 is varied. Specifically, adjustment is performed so that the surface of the first separator 8 is peeled while the surface of the second separator 9 is not peeled.

  Furthermore, the surface roughness of the 1st separator 8 and the 2nd separator 9 can also be adjusted while performing the peeling process of the 1st separator 8. FIG.

[In the case of (2)]
The first adhesion force F1 and the second adhesion force F2 are both the same. Specifically, both are preferably 0.05 N / 20 mm or more, more preferably 0.06 N / 20 mm or more. For example, it is 1.0 N / 20 mm or less.

  In order to satisfy the relationship between the first adhesion force F1 and the second adhesion force F2 in (2) above, the surface states of the first separator 8 and the second separator 9 are treated in the same manner as described above. Specifically, the surface states of the first separator 8 and the second separator 9 are set to the same state.

  The ratio (T1 / T2) of the thickness T1 of the first separator 8 to the thickness T2 of the second separator 9 is, for example, less than 1.0, preferably 0.9 or less, more preferably 0.8 or less. More preferably, it is 0.7 or less, particularly preferably 0.5 or less, most preferably 0.4 or less, and for example, 0.01 or more. The thickness obtained by subtracting the thickness T1 of the first separator 8 from the thickness T2 of the second separator 9 (thickness T2 of the second separator 9−thickness T1 of the first separator 8) exceeds, for example, 0 μm, 5 μm or more, more preferably 10 μm or more, further preferably 15 μm or more, particularly preferably 20 μm or more, and for example, 500 μm or less.

  Specifically, the thickness T1 of the first separator 8 is, for example, less than 60 μm, preferably less than 40 μm, more preferably less than 30 μm, and 10 μm or more. On the other hand, the thickness T2 of the second separator 9 is, for example, 30 μm or more, preferably 40 μm or more, more preferably 60 μm or more, and 500 μm or less.

  If the above thickness ratio exceeds the above upper limit, or if the above thickness difference falls below the above lower limit, the relationship of (2) above cannot be satisfied. Therefore, in the cutting step described below, There may be a case where a gap is formed at the interface between the first separator 8 and the particle-containing resin sheet 70 at the cut end.

  And in this sheet | seat 100, Preferably, the relationship of said (1) is satisfied. Thereby, in the cutting process to be described next, the interface between the first separator 8 and the particle-containing resin sheet 70 at the cut end is generated, compared with the second separator 9 and the particle-containing resin sheet 70 at the cut end. Interfacial peeling can be further suppressed.

[Cutting process]
A cutting process is implemented by the cutting blade 85, for example. The cutting blade 85 is configured such that the cutting direction is the thickness direction of the sheet 100. Examples of the cutting blade 85 include blades that can be cut along the left-right direction in the sheet 100, such as band blades such as Thomson blade 22 (see FIG. 9), pinnacle blade (corrosion blade), and guillotine blade.

  Detailed operations and conditions in the cutting process will be described later.

<Sheet manufacturing equipment>
Next, a sheet manufacturing apparatus for producing the sheet 100 shown in FIG. 9 as the laminated sheet 10 will be described with reference to FIGS.

  1 and 2, the sheet manufacturing apparatus 1 includes a particle-containing resin sheet 70 prepared from a composition containing particles and a resin component, which will be described later, and a first separator 8 and a second separator 9 that sandwich the particle-containing resin sheet 70. The laminated sheet 10 (sheet 100) is manufactured, the laminated sheet 10 is cut, and the sheet 18 is accommodated. The sheet manufacturing apparatus 1 includes a production unit 21, a cutting unit 3, and a storage unit 6. The production unit 21, the cutting unit 3, and the storage unit 6 are arranged in series in the sheet manufacturing apparatus 1. That is, the sheet manufacturing apparatus 1 is configured to convey a composition or sheet described later in a straight line.

  The preparation unit 21 is configured to manufacture a laminated sheet 10 from a composition (described later), and is provided on the rear side of the sheet manufacturing apparatus 1. The production unit 21 includes a kneading extruder 2, a gear structure 4, a sheet forming unit 5, and a tension adjusting unit 20.

  The kneading extruder 2 is provided at the rear portion of the production unit 21. The kneading extruder 2 is, for example, a biaxial kneader or the like, and specifically includes a cylinder 11 and a kneading screw 12 accommodated in the cylinder 11.

  The cylinder 11 has a substantially cylindrical shape whose axis extends in the front-rear direction. Further, the rear end of the cylinder 11 is closed.

  As shown in FIG. 2, a kneading extruder inlet 14 opening upward is formed on the upper wall of the rear end portion of the cylinder 11. A hopper 16 is connected to the kneading extruder inlet 14.

  A kneading extruder outlet 15 opening forward is formed at the front end of the cylinder 11. A connecting pipe 17 is connected to the kneading extruder outlet 15.

  The connecting pipe 17 is formed in a substantially cylindrical shape having an axis common to the axis of the cylinder 11.

  The cylinder 11 is provided with a block heater (not shown) divided into a plurality along the front-rear direction.

  The kneading screw 12 has a rotation axis parallel to the axis of the cylinder 11. The kneading screw 12 is provided in the cylinder 11 along the front-rear direction.

  The kneading extruder 2 is provided with a motor (not shown) connected to the kneading screw 12 on the rear side of the cylinder 11.

  Thereby, the kneading extruder 2 is configured to knead and extrude the particles and the resin component.

  The gear structure 4 is provided on the front side of the kneading extruder 2. The gear structure 4 includes a casing 31 and a pair of gears 32. The gear structure 4 is a gear pump that conveys the composition supplied from the kneading extruder 2 to the sheet forming unit 5.

  The casing 31 is formed integrally with the connecting pipe 17 and is connected to the front side of the kneading extruder 2 via the connecting pipe 17. The casing 31 has a substantially rectangular shape in plan view extending in the left-right direction, and the front side is opened in the left-right direction.

  As shown in FIG. 3, the casing 31 includes a lower casing 31 a and an upper casing 31 b that is spaced upward from the lower casing 31 a, and the lower casing 31 a and the upper casing Both end portions in the left-right direction with 31b are connected by side walls 31c shown in FIG. As shown in FIG. 3, the lower casing 31a includes a lower portion 61 (described later) and a lower side wall 47 (described later), and the upper casing 31b includes an upper portion 62 (described later) and an upper side wall 48 (described later). (Described later).

  Between the lower casing 31a and the upper casing 31b, a first storage portion 27 is provided at the rear end portion, and a gear accommodating portion 40 for accommodating a pair of gears is provided at the center portion in the front-rear direction. A discharge port 46 is provided at the front end. In addition, a second reservoir 28 and a discharge passage 44 are formed between the gear housing 40 and the discharge port 46 so as to communicate therewith. A plurality (four) of heaters (not shown) are provided on the outer surface of the casing 31.

  As shown in FIGS. 1 and 2, the first reservoir 27 communicates with the front side of the connecting pipe 17 at the center in the left-right direction, and is formed in a substantially rectangular shape in plan view. Further, in a side sectional view, it is formed in a substantially linear shape from the rear end portion to the front end portion, and is formed in a substantially tapered shape that increases toward the front at the front end portion.

  As shown in FIG. 3, the gear housing portion 40 communicates with the front side of the first storage portion 27, and includes a lower portion 61 and an upper portion 62 that communicates with the upper side of the lower portion 61.

  Further, the upper side surface (inner side surface) 71 of the lower portion 61 and the lower side surface (inner side surface) 72 of the upper portion 62 are formed in a circular arc surface shape (half-circumferential surface shape divided into two), and a pair of gears 32. A housing space 73 for housing the container is defined. The accommodation space 73 communicates with the first storage portion 27 and is formed to extend in the vertical direction in a cross-sectional view. The lower portion 61 and the upper portion 62 are formed in the casing 31 over the left-right direction. A sealed space 74 described later is provided at the upper end and the lower end of the accommodation space 73.

  The discharge port 46 is partitioned by two discharge walls 45 formed at an interval in the vertical direction, and is formed to be opened forward. The discharge wall 45 is provided at the front end of the casing 31 and includes a lower side wall 47 and an upper side wall 48.

  The lower side wall 47 has a thick flat plate shape extending in the left-right direction and the up-down direction, and each of its front surface and upper surface is formed flat.

  The upper side wall 48 has a flat bottom surface. Further, the upper side wall 48 has a substantially L shape in a side sectional view, and is formed so that the front end portion of the lower portion of the upper side wall projects forward with respect to the front surface of the upper portion of the upper side wall. That is, in the upper side wall 48, the front end part of the lower part of the upper side wall is a protruding part 63 as a doctor having a substantially rectangular shape in a side sectional view. The protrusion length (that is, the length in the front-rear direction) of the protrusion 63 is, for example, 2 mm or more, and is, for example, 150 mm or less, preferably 50 mm or less. Moreover, the thickness (that is, the length in the vertical direction) of the protrusion 63 is, for example, 2 mm or more, and is, for example, 100 mm or less, preferably 50 mm or less. The front surface of the protrusion 63 and the front surface of the lower side wall 47 are formed so as to be in the same position when projected in the vertical direction.

  The 2nd storage part 28 is connected to the front side of the gear accommodating part 40, and is formed in the cross-sectional view substantially U shape by which the back is open | released. Moreover, the 2nd storage part 28 is made into the downstream space of the conveyance direction downstream with respect to the sealed space 74 mentioned later.

  The discharge passage 44 communicates with the front side of the second reservoir 28 and also communicates with the rear side of the discharge port 46. The discharge passage 44 is formed in a substantially straight line extending forward when viewed from a side sectional view.

  As shown in FIG. 4, the pair of gears 32 is, for example, a double helical gear, and specifically includes a first gear 33 and a second gear 34.

  A first shaft 25 that is a rotation shaft of the first gear 33 is provided in the casing 31 (see FIG. 1) so as to extend in the left-right direction and be rotatable.

  The second shaft 26, which is the rotation shaft of the second gear 34, is provided in the casing 31 so as to extend in parallel with the first shaft 25 and be rotatable. Further, the second shaft 26 is disposed so as to face the first shaft 25 upward.

  Each of the first gear 33 and the second gear 34 is accommodated in each of a lower part 61 and an upper part 62 (see FIG. 3). In addition, the radial end portion in the lower half portion of the first gear 33 is fitted to the upper side surface 71 (described later) of the lower portion 61, and the radial end portion in the upper half portion of the second gear 34 is the upper portion 62. It is fitted to the lower side surface 72 (described later).

Each of the first gear 33 and the second gear 34 specifically includes inclined teeth 35 that mesh with each other.

  In the first gear 33, the tooth traces of the inclined teeth 35 are inclined outward in the rotational axis direction A1 from the downstream side in the rotational direction R2 of the first gear 33 toward the upstream side in the rotational direction R2. The oblique teeth 35 are integrally provided with a first right oblique tooth 36 and a first left oblique tooth 37 having different tooth traces. In the first gear 33, the first right inclined tooth 36 is formed on the right side with respect to the axial center of the first gear 33, and the first left inclined tooth 37 is relative to the axial center of the first right inclined tooth 36. It is formed on the left side.

  Specifically, the tooth traces of the first right oblique teeth 36 are inclined from the left side (center side) to the right side (right end side) from the downstream side in the rotation direction R2 toward the upstream side in the rotation direction R2. On the other hand, the tooth traces of the first left oblique teeth 37 are formed symmetrically with respect to the tooth traces of the first right oblique teeth 36 with respect to the central portion in the left-right direction of the first gear 33. Specifically, As it goes from the downstream side in the rotational direction R2 to the upstream side in the rotational direction R2, the slope is inclined from the right side (center side) to the left side (left end side).

  The second gear 34 is formed vertically symmetrical with respect to the first gear 33, and is configured to mesh with the first gear 33. Specifically, the second right 34 meshes with the first right inclined tooth 36. The inclined teeth 38 and the second left inclined teeth 39 that mesh with the first left inclined teeth 37 are integrally provided.

  As shown in FIG. 5, the pair of gears 32 are configured such that the meshing portions indicated by black circles are configured such that the first gear 33 and the second gear 34 come into point-like contact in a side sectional view. It is a side cross-section point contact type. In addition, the pair of gears 32 are formed in the shape of a helical winding of the first gear 33 and the second gear 34 along the tooth traces of the pair of gears 32. Also referred to as contact type.

  The inclined teeth 35 of the pair of gears 32 are provided at intervals in the rotational direction R2 and connect the concave surfaces 42 formed so as to be curved inward in the radial direction, and the concave surfaces 42. A curved surface 41 integrally provided with a convex surface 43 formed so as to curve radially outward from both circumferential ends is provided.

  Further, a tooth groove 75 including a concave surface 42 is formed between the tooth traces of the oblique teeth 35, that is, between the apexes of the convex surface 43.

  As shown in FIG. 3, the casing 31 includes a pair of gears 32 between the inclined teeth 35 of the first gear 33 and the upper surface 71 of the lower portion 61, and the inclined teeth 35 of the second gear 34. An accommodation space 73 is provided so that a sealed space 74 is formed between the upper surface 62 and the lower surface 72 of the upper portion 62.

  That is, the upper side surface 71 and the lower side surface 72 are formed in a cross-sectional arc shape having the same curvature as the diameter of the pair of gears 32, and the radial ends of the pair of gears 32 (the apex of the convex surface 43, (See FIG. 5). As a result, the sealed space 74 covers the tooth gap 75 between the tooth traces of the oblique teeth 35 with the upper side surface 71 and the lower side surface 72.

  The sealed space 74 is partitioned by the tooth gap 75, and the upper side surface 71 and the lower side surface 72.

  The pair of gears 32 are arranged so that the first storage portion 27 and the second storage portion 28 do not communicate with each other via the tooth spaces 75 between the tooth traces of the inclined teeth 35. It is configured.

  As shown in FIGS. 4 and 6, the tooth groove 75 of the first right oblique tooth 36 and the tooth groove 75 of the first left oblique tooth 37 communicate with each other. In addition, the space 75 when projected from the rotation axis A1 to the tooth groove 75 of the first right oblique tooth 36 and the tooth groove 75 of the first right oblique tooth 36 over the entire rotation axis direction A1 is a sealed space. A plurality (two) of overlapping tooth grooves 76 overlapping the inner surface of 74, that is, the upper surface 71 (see FIG. 3) are formed.

  Among the overlapping tooth grooves 76, the frontmost (most downstream) overlapping tooth groove 76A has a left end portion of the first right inclined tooth 36 and a right end portion of the first left inclined tooth 37 (that is, the left and right direction of the first gear 33). When the central portion, that is, the connecting portion thereof is disposed opposite to the front end portion (downstream end portion in the rotational direction) of the upper side surface 71 (see FIG. 6), the right end portion of the corresponding first right inclined tooth 36 and The left end portion of the first left inclined tooth 37 (that is, both left and right end portions of the first gear 33) does not face the first storage portion 27 (see FIG. 6), and the upper side surface 71 is in the front-rear direction (rotating direction). Are arranged opposite to each other.

  Of the overlapping tooth grooves 76, the rearmost (most upstream) overlapping tooth groove 76 B has a right end portion of the first right inclined tooth 36 and a left end portion of the first left inclined tooth 37 (that is, the first gear 33 of the first gear 33). When the left and right end portions are disposed opposite to the rear end portion (upstream end portion in the rotational direction) of the upper side surface 71 (see FIG. 6), the left end portion and the first left oblique portion of the corresponding first right inclined tooth 36 are arranged. The right end portion of the tooth 37 (that is, the central portion in the left-right direction of the first gear 33, that is, the connecting portion) is opposed to the middle of the upper side surface 71 in the front-rear direction (rotation direction) without facing the second storage portion 28. The

The plurality of overlapping tooth grooves 76 are shifted to the tooth grooves 75 directed upstream in the rotation direction by the rotation of the first gear 33.

  Further, the overlapping tooth groove 76 and the lower side surface 72 of the second gear 34 have the same configuration as the overlapping tooth groove 76 and the upper side surface 71 of the first gear 33, and specifically, are vertically symmetrical with respect to the meshing portion. It is supposed to be configured. That is, a plurality of overlapping tooth spaces 76 that overlap with the lower surface 72 are formed in the tooth space 75. The overlapping tooth groove 76 shifts to the tooth groove 75 toward the upstream side in the rotation direction by the rotation of the second gear 34.

  A motor (not shown) connected to the first shaft 25 and the second shaft 26 of the pair of gears 32 is provided on the right side of the gear structure 4.

  Next, the meshing of the pair of gears 32 on the curved surface 41 will be described with reference to FIGS. 5A to 5C.

  First, as shown in FIG. 5A, in the case where the downstream end in the rotational direction R2 of the convex surface 43 of the first gear 33 and the downstream end in the rotational direction R2 of the concave surface 42 of the second gear 34 are engaged. 5A and 5B, when the first gear 33 and the second gear 34 rotate in the rotation direction R2, the middle portion of the convex surface 43 of the first gear 33 in the rotation direction R2 and the second gear 34 The midway portion of the concave surface 42 in the rotational direction R2 meshes. Subsequently, as shown in the arrow of FIG. 5B and FIG. 5C, when the first gear 33 and the second gear 34 rotate in the rotation direction R2, the upstream end of the convex surface 43 of the first gear 33 in the rotation direction R2, The upstream end portion in the rotational direction R2 of the concave surface 42 of the two gear 34 meshes. In other words, the meshing portion of the convex surface 43 of the first gear 33 and the concave surface 42 of the second gear 34 sequentially and sequentially moves to the downstream end portion, the middle portion, and the upstream end portion in the rotational direction R2 on each surface. .

  Subsequently, although not shown, the meshing portions of the concave surface 42 of the first gear 33 and the convex surface 43 of the second gear 34 are also sequentially arranged on the downstream end, the middle portion, and the upstream end in the rotational direction R2 on each surface. Move continuously.

  Therefore, the meshing portion of the curved surface 41 of the first gear 33 and the curved surface 41 of the second gear 34 moves continuously along the rotational direction R2. This movement of the meshing portion prevents a storage portion (not shown) where the composition is accumulated from being formed in the tooth gap 75 between the tooth traces during conveyance of the composition.

  As shown in FIGS. 1 and 3, the sheet forming portion 5 is provided so as to include the protruding portion 63 of the upper side wall 48 on the front side of the gear structure 4. A support roll 51 as a moving support and a rolling roll 54 are provided. Further, as shown in FIG. 2, the sheet forming unit 5 includes a second delivery roll 59 and a first delivery roll 56.

  As shown in FIG. 3, the protrusion 63 adjusts the role of a wall that partitions the discharge port 46 of the casing 31 in the gear structure 4 and the thickness of the composition discharged from the discharge port 46 in the sheet forming unit 5. It has both the role of a doctor (or knife).

  The support roll 51 is disposed to face the protruding portion 63 so that the first gap 50 as a gap is provided. The support roll 51 is formed of a metal whose chromium plating is applied to the peripheral surface of stainless steel (SUS304). The rotation axis of the support roll 51 is parallel to the first shaft 25 and the second shaft 26 of the pair of gears 32, and specifically extends in the left-right direction. Further, the rotation axis of the support roll 51 is arranged so as to overlap the discharge port 46 and the protrusion 63 when projected in the front-rear direction. Moreover, the support roll 51 is comprised so that a composition may be supported and conveyed. Therefore, the support roll 51 is configured to pass the composition through the first gap 50. The support roll 51 is provided with a heater (not shown).

  As shown in FIG. 2, the first delivery roll 56 is provided below the support roll 51 with a gap. The rotation axis of the first delivery roll 56 extends in the left-right direction, and the first separator 8 is wound around the circumferential surface of the first delivery roll 56 in a roll shape.

  As shown in FIG. 3, the rolling roll 54 is positioned downstream in the transport direction with respect to the first gap 50, and is disposed to face the support roll 51 so that the second gap 60 is provided. The rotation axis of the rolling roll 54 is parallel to the first shaft 25, the second shaft 26, and the support roll 51 of the pair of gears 32, and specifically extends in the left-right direction. Further, the rotation axis of the rolling roll 54 is arranged so as to overlap the support roll 51 when projected in the vertical direction. The rolling roll 54 is configured to adjust the variation in sheet thickness with respect to the pre-rolling sheet 7a (sheet-like composition) passing through the first gap 50. The rolling roll 54 is made of a metal whose peripheral surface of iron is treated with chrome plating. The rolling roll 54 rotates in the opposite direction to the support roll 51 at a portion facing the support roll 51 (nip portion).

  An air pump (not shown) is provided above the rolling roll 54. The air pump is configured to apply a downward pressure (that is, pressure to the unrolled sheet 7a) to the rolling roll 54 by applying air pressure to the rolling roll 54.

  As shown in FIG. 2, the second delivery roll 59 is disposed to face the upper part of the rolling roll 54 slightly forward. The rotation axis of the second delivery roll 59 extends in the left-right direction, and the second separator 9 is wound around the peripheral surface of the second delivery roll 59 in a roll shape.

  As shown in FIGS. 1 and 2, the tension adjusting unit 20 includes a first tension roll 81, a dancer roll 80, and a second tension roll 82.

  The first tension roll 81 is horizontal to the support roll 51 (the height in the vertical direction is substantially the same) and is provided on the downstream side in the transport direction. The rotation axis of the first tension roll 81 is parallel to the first shaft 25 and the second shaft 26 of the pair of gears 32, and specifically extends in the left-right direction.

  The dancer roll 80 is provided on the downstream side in the transport direction of the first tension roll 81 so as to be movable in the vertical direction. Specifically, the rear end (upper end in the transport direction) of the dancer roll 80 is provided so as to substantially coincide with the front end (end on the downstream side in the transport direction) of the first tension roll 81 when projected in the vertical direction. ing. The axis of rotation of the dancer roll 80 is parallel to the first shaft 25 and the second shaft 26 of the pair of gears 32, and specifically extends in the left-right direction. The dancer roll 80 includes a heater (not shown). The dancer roll 80 is configured to adjust the tension applied to the conveyed laminated sheet 10 by moving in the vertical direction, and as a result, adjust the conveying speed and position of the laminated sheet 10.

  The second tension roll 82 is provided on the downstream side in the conveyance direction of the dancer roll 80 so as to be horizontal (the height in the vertical direction is substantially the same) with respect to the first tension roll 81. When the second tension roll 82 is projected in the vertical direction, the front end (lower end in the transport direction) of the dancer roll 80 substantially coincides with the rear end (upstream end in the transport direction) of the second tension roll 82. It is provided to do. The rotation axis of the second tension roll 82 is parallel to the first shaft 25 and the second shaft 26 of the pair of gears 32, and specifically extends in the left-right direction.

  The cutting unit 3 is configured to be able to cut a laminated sheet 10 (sheet 100) that is an example of a sheet manufactured in the sheet manufacturing process of the present invention, and on the downstream side in the transport direction of the tension adjusting unit 20 in the manufacturing unit 21. Provided. The cutting unit 3 includes a pair of transport rolls 83, a pair of cutting and pressing members 84, a cutting blade 85, a mounting member 86, and a pair of gripping and moving units 87 (see FIG. 7).

  As shown in FIG. 2, the pair of transport rolls 83 includes a first transport roll 83a and a second transport roll 83b that is disposed on the upper side of the first transport roll 83a. It is arranged on the downstream side in the transport direction of the roll 82.

  The upper end surface of the first transport roll 83 a is disposed so as to be horizontal with the upper end surface of the second tension roll 82. The rotation axes of the first transport roll 83a and the second transport roll 83b are parallel to the first shaft 25 and the second shaft 26 of the pair of gears 32, and specifically extend in the left-right direction. The pair of transport rolls 83 is configured to transport the laminated sheet 10 transported from the upstream in the transport direction to the downstream side in the transport direction while pressing.

  The pair of cutting presser members 84 press the rear side (upstream side in the conveying direction) of the laminated sheet 10 when the cutting blade 85 to be described next cuts the laminated sheet 10. It is configured. The pair of cutting presser members 84 includes a first presser member 84a and a second presser member 84b disposed on the upper side of the first presser member 84a, and the transport direction of the pair of transport rolls 83. It is arranged downstream.

  The first pressing member 84a has a substantially rectangular shape in cross-section with the upper end surface being a flat surface, and is formed long in the left-right direction. That is, the first pressing member 84a is provided so as to extend in the left-right direction. The upper end surface of the first pressing member 84a is designed to be horizontal with the upper end edge of the first transport roll 83a.

  The second pressing member 84b is disposed on the upper side of the first pressing member 84a so as to be movable in the vertical direction. The second pressing member 84b is formed so as to be substantially the same shape as the first pressing member 84a in the vertical direction with respect to the surface of the conveyed sheet. Specifically, the lower end surface is a substantially rectangular shape in a cross-sectional view with a flat surface, and is long in the left-right direction. The second pressing member 84b is movable from the upper side to the lower side, and the lower end surface of the second pressing member 84b presses the laminated sheet 10 so as to temporarily restrict the movement of the laminated sheet 10 in the conveyance direction downstream. Yes.

  The cutting blade 85 is provided on the downstream side in the transport direction of the cutting presser member 84. As shown in FIG. 7, the cutting blade 85 is arranged along the left-right direction. Specifically, the cutting blade 85 is configured such that the cutting direction is a direction orthogonal to the conveying direction of the laminated sheet 10, that is, the vertical direction. As the cutting blade 85, for example, a blade that can be cut along the left-right direction in the laminated sheet 10, for example, a Thomson blade 22 (see FIG. 9), a pinnacle blade (corrosion blade), or a blade tip that moves up and down from one side to the other in the left-right direction. Examples thereof include a band blade extending in the left-right direction, such as a guillotine blade inclined in the direction. The cutting blade 85 preferably includes a Thomson blade 22 and a pinnacle blade that can cut the laminated sheet 10 at a time in the left-right direction without the blade tip being inclined in the vertical direction from one side to the other in the left-right direction, and more preferably Since the blade length of the pinnacle blade is usually 1 mm or less, a Thomson blade 22 capable of securing a sufficient blade length is mentioned.

  As shown in FIG. 9, the Thomson blade 22, which is an example of the cutting blade 85, is a band blade that extends in the left-right direction and sharpens downward in a side view, and has a blade edge 23 formed at the lower end. Further, the Thomson blade 22 of FIG. 9 is formed in both blades. Specifically, the Thomson blade 22 of FIG. 9 includes two inclined surfaces 24 facing each other in the front-rear direction, and a portion where the two inclined surfaces 24 intersect forms a cutting edge 23 as a ridge line in a cross-sectional view. . The blade edge 23 is formed along the left-right direction.

  The two inclined surfaces 24 are formed to be inclined with respect to the center surface 55 (the surface 55 passing through the blade edge 23 in the vertical direction). The two inclined surfaces 24 include a front inclined surface 57 and a rear inclined surface 58 formed on the rear side of the front inclined surface 57. The front inclined surface 57 is formed to be inclined rearward as it goes downward. On the other hand, the rear inclined surface 58 is formed so as to incline forward as it goes downward. Specifically, the front inclined surface 57 and the rear inclined surface 58 are formed symmetrically with respect to the center surface 55.

  In the cutting unit 3, a support base 77 is provided below the above-described cutting blade 85, specifically, the Thomson blade 22 and the pinnacle blade. The upper surface of the support base 77 is configured to be able to place and support the laminated sheet 10. Specifically, as shown in FIG. 7, the upper surface of the support base 77 is formed in a flat shape extending in the left-right direction. ing. The support base 77 is formed so as to include the cutting blade 85 when projected in the thickness direction. The cutting blade 85 is configured to be able to reach the vicinity of the upper surface of the support base 77 when the blade tip 23 of the Thomson blade 22 or the pinnacle blade moves downward.

  The material for forming the cutting blade 85 is not particularly limited, and examples thereof include alloys such as stainless steel, carbon tool steel, high-speed steel, and cemented carbide, for example, ceramics such as diamond.

  In addition, when the laminated sheet 10 is cut in the tension adjusting unit 20 and the cutting unit 3, the sheet manufacturing apparatus 1 is provided with a temperature adjusting device so that a predetermined temperature T is secured in the laminated sheet 10. Specifically, a heater 78 is provided on the support base 77. The heater 78 is built in the support base 77 so that the laminated sheet 10 can be heated.

  The mounting member 86 is disposed downstream of the cutting blade 85 in the transport direction. The mounting member 86 has a substantially rectangular shape in cross-section in which the upper end surface is a flat surface, and is formed long in the left-right direction. The upper end surface of the mounting member 86 is disposed so as to be horizontal with respect to the support base 77.

  As shown in FIG. 7, the gripping movement unit 87 includes a pair of caterpillars 89 and a pair of chucking arms 88.

  The pair of caterpillars 89 is arranged in the left-right direction with respect to the first caterpillar 89a disposed on the right side with respect to the mounting member 86 and the first caterpillar 89a with the mounting member 86 and a transport conveyor 90 (described later) interposed therebetween. And a second caterpillar 89b arranged to face each other.

  The first caterpillar 89a and the second caterpillar 89b are arranged along the front-rear direction, and when projected in the left-right direction, the front end portion thereof overlaps with the mounting member 86, and the rear end portion thereof overlaps with the conveyer 90 (described later). As is provided.

  The first caterpillar 89a and the second caterpillar 89b are configured so as to be able to rotate forward and reverse at the same speed. During forward rotation, the first caterpillar 89a and the second caterpillar 89b move counterclockwise when viewed from the right side. When the caterpillar moves from the front side to the rear side and rotates in the reverse direction, the caterpillar moves clockwise in the right side view, that is, the upper caterpillar visible in the plan view moves from the rear side to the front side.

  The pair of chucking arms 88 includes a first chucking arm 88a fixed to the first caterpillar 89a and a second chucking arm 88b fixed to the second caterpillar 89b.

  The first chucking arm 88a and the second chucking arm 88b are respectively fixed to the first caterpillar 89a and the second caterpillar 89b so as to be in the same position when projected in the left-right direction.

  The first chucking arm 88a is operated by air pressure and is configured to be able to grip the right end portion of the seat from above and below, and the second chucking arm 88b is operated by air pressure and moves the left end portion of the seat up and down. It is configured to be grippable from the direction.

  In the gripping movement unit 87, a pair of chucking arms 88 is opposed to the mounting member 86 in the left-right direction (hereinafter referred to as a gripping position), and a middle portion in the front-rear direction of the transport conveyor 90 in the left-right direction. And a pair of caterpillars 89 are rotated forward and backward so as to move between the positions facing each other (hereinafter referred to as a release position).

  As shown in FIGS. 1 and 2, the storage unit 6 includes a transport conveyor 90 as a transport support, a detection sensor 91, a movable plate 92 as a movable support, and a storage case 93 as a sheet storage unit. I have.

  As shown in FIG. 7, the transport conveyor 90 is disposed on the downstream side of the mounting member 86 in the transport direction, and is disposed between the first caterpillar 89 a and the second caterpillar 89 b in the left-right direction. As shown in FIG. 1, the transport conveyor 90 is disposed between the placing member 86 and the housing case 93 in the front-rear direction. The conveyance conveyor 90 is configured to convey the cut sheet (sheet-fed sheet 18) from the placement member 86 to the storage case 93.

  As shown in FIG. 2, the detection sensor 91 is disposed on the downstream side in the transport direction of the transport conveyor 90, and is disposed above the transport conveyor 90 with an interval therebetween. The detection sensor 91 includes a reflection type optical sensor, and is configured to detect the sheet 18 on the transport conveyor 90 that passes below the detection sensor 91.

  The movable plate 92 is disposed below the transport conveyor 90 and is configured to be movable in the front-rear direction. Specifically, the movable plate 92 is formed in a substantially rectangular flat plate shape in plan view whose length in the front-rear direction is slightly shorter than the length in the front-rear direction of the sheet 18. A pair of frames (not shown) are provided on both sides of the movable plate 92 in the left-right direction, and guide rails along the front-rear direction are provided on the pair of frames.

  The left and right ends of the movable plate 92 are slidably fitted to the guide rails of a pair of frames.

  As a result, the movable plate 92 is moved from the transport conveyor 90 as shown in FIG. 8A to a retracted position where the front end is slightly exposed, and as shown in FIG. 8C, from the transport conveyor 90, the front end to the rear end. It moves along the front-rear direction to the advance position where everything is exposed across the part.

  The storage cases 93 are arranged on the downstream side and the lower side of the transfer conveyor 90 in the transfer direction. The storage case 93 is formed to be slightly larger than the sheet 18 in the left-right direction length and the vertical direction length. When projected in the vertical direction, the rear end edge of the storage case 93 substantially coincides with the front end edge of the transport conveyor 90. The storage case 93 is configured to store the single-wafer sheets 18 transported from the transport conveyor 90 while being stacked.

  The dimensions of the sheet manufacturing apparatus 1 are appropriately set according to the types and blending ratios of the particles and resin components used, and the width and thickness of the target sheet.

  As shown in FIG. 4, the length W2 in the rotational axis direction of the pair of gears 32 (first gear 33, second gear 34) is, for example, 200 mm or more, preferably 300 mm or more, and, for example, 2000 mm. It is as follows.

  The gear diameter of the pair of gears 32 (the diameter (outer diameter) of the gear 32, specifically, the diameter of the cutting edge circle) is set so that the pair of gears 32 is not distorted by the pressure during conveyance of the composition. It is 10 mm or more, preferably 20 mm or more, and for example, 200 mm or less, preferably 80 mm or less. The diameter of the root circle of the pair of gears 32 (a value obtained by subtracting the tooth depth L3 described below from the gear diameter) is, for example, 8 mm or more, preferably 10 mm or more, and, for example, 198 mm or less. , Preferably, it is 194 mm or less.

  As shown in FIG. 4, the tooth depth L3 of the pair of gears 32 is, for example, 1 mm or more, preferably 3 mm or more, and for example, 30 mm or less, preferably 20 mm or less.

  The pitch interval of the inclined teeth 35 in the rotation axis direction A1 is, for example, 5 mm or more, preferably 10 mm or more, and for example, 30 mm or less, preferably 25 mm or less. Further, the angle (inclination angle) of the tooth traces of the inclined teeth 35 with respect to the rotation axis of the pair of gears 32 exceeds, for example, 0 degrees, preferably 5 degrees or more, and more preferably 15 degrees or more. Also, for example, it is less than 75 degrees, preferably 70 degrees or less, and more preferably 60 degrees or less. If the inclination angle is equal to or greater than the above lower limit, the composition can be spread on both outer sides of the rotation axis A1 to reliably form a wide sheet. On the other hand, if the inclination angle is less than or equal to the above upper limit, the overlapping tooth groove 76 can be reliably formed and the conveyance efficiency of the composition can be improved.

  As shown in FIG. 6, in the rotation trajectory of the pair of gears 32, the rotation direction length W1 where the first gear 33 and the upper side surface 71 face each other, and the rotation where the second gear 34 and the lower side surface 72 face each other. The direction length (not shown in FIG. 6) is, for example, 2 mm or more, preferably 3 mm or more, preferably 5 mm or more, and for example, 324 mm or less, preferably 315 mm or less. If the above-described length is equal to or greater than the above lower limit, a plurality of overlapping tooth grooves 76 can be reliably formed, and the conveyance efficiency of the composition can be improved. On the other hand, if the above-described length is not more than the above upper limit, the conveyance efficiency of the composition can be improved.

  The length of the support roll 51 in the rotation axis direction (the length in the left-right direction) is, for example, 210 mm or more, preferably 310 mm or more, and, for example, 2040 mm or less. The diameter (outer diameter) of the support roll 51 is, for example, 300 mm or less, preferably 150 mm or less. For example, it is 30 mm or more, preferably 50 mm or more. The length of the rolling roll 54 in the rotation axis direction is, for example, 95 to 120% of the length of the support roll 51 in the rotation axis direction, and is preferably substantially the same as the length of the support roll 51 in the rotation axis direction. The diameter of the rolling roll 54 is, for example, 80 to 120% of the diameter of the support roll 51, and is preferably substantially the same as the diameter of the support roll 51.

  The length of the dancer roll 80 in the rotational axis direction (length in the left-right direction) is, for example, 210 mm or more, preferably 310 mm or more, and, for example, 2040 mm or less.

  The diameter (outer diameter) of the dancer roll 80 is, for example, 300 mm or less, preferably 150 mm or less. For example, it is 30 mm or more, preferably 50 mm or more.

  The length of the first transport roll 83a in the rotation axis direction (length in the left-right direction) is, for example, 210 mm or more, preferably 310 mm or more, and, for example, 2040 mm or less.

  The diameter (outer diameter) of the 1st conveyance roll 83a is 300 mm or less, for example, Preferably, it is 150 mm or less. For example, it is 30 mm or more, preferably 50 mm or more.

  The length of the second transport roll 83b in the rotational axis direction is 210 mm or more, preferably 310 mm or more, and is 2040 mm or less, and is preferably substantially the same as the length of the first transport roll 83a in the rotational axis direction. The diameter of the 2nd conveyance roll is 300 mm or less, for example, Preferably, it is 150 mm or less. For example, it is 30 mm or more, preferably 50 mm or more. Preferably, it is substantially the same as the diameter of the first transport roll 83a.

  Further, as shown in FIG. 3, the longitudinal distance L1 of the first gap 50 is appropriately set according to the thickness of the first separator 8 and the desired thickness of the pre-rolling sheet 7a, for example, 60 μm or more, preferably , 100 μm or more, and for example, 3500 μm or less, preferably 2500 μm or less.

  The vertical distance L2 of the second gap 60 is appropriately set according to the dimension of the distance L1 of the first gap 50, the thickness of the second separator 9, and the like. Specifically, the distance L2 is slightly smaller than the distance L1 of the first gap 50. Set to narrow. Thereby, the rolling roll 54 pushes into a sheet | seat and adjusts the dispersion | variation in the thickness of a sheet | seat. Specifically, for example, the distance (roll push amount: L1-L2) narrower than the first gap 50 is, for example, 5 μm or more, preferably 10 μm or more, and for example, 100 μm or less, preferably 50 μm or less. More specifically, the vertical distance L2 of the second gap 60 is, for example, 65 μm or more, preferably 70 μm or more, and, for example, 3600 μm or less, preferably 3550 μm or less.

  As shown in FIG. 9, the cutting edge angle α of the cutting blade 85, specifically, the cutting edge angle α of the Thomson blade 22 is an acute angle when the Thomson blade 22 is a double blade, for example, 5 degrees or more. , Preferably 10 degrees or more, more preferably 15 degrees or more, and for example, 60 degrees or less, preferably 50 degrees or less, more preferably less than 42 degrees, and further preferably 40 degrees or less. .

The cutting edge angle α is an angle formed on the upper side (upstream in the cutting direction) from the intersection where the two inclined surfaces 24 intersect each other. The blade edge angle α is a total angle (α1 + α2) of an angle α1 formed by the front inclined surface 57 and the center surface 55 and an angle α2 formed by the rear inclined surface 58 and the center surface 55.
Further, the length of the Thomson blade 22, that is, the length in the vertical direction (cutting direction) of the Thomson blade 22 is not particularly limited, and is, for example, 8 mm or more, preferably 12 mm or more, more preferably 23.6 mm or more. Yes, for example, 100 mm or less. Further, the blade thickness of the Thomson blade 22, that is, the maximum length in the front-rear direction of the Thomson blade 22 is not particularly limited, and is, for example, 450 μm or more, preferably 700 μm or more, and for example, 1500 μm or less, preferably , 1000 μm or less.

  The front-rear gap between the pressing member 84 and the mounting member 86 is appropriately selected depending on the blade thickness of the Thomson blade 22 of the cutting blade 85 and the like.

  The length in the left-right direction of the movable plate 92 is, for example, 50% or more, preferably 70% or more, and 150% or less, preferably 100% or less, with respect to the length in the left-right direction of the sheet 18. It is. The length of the movable plate 92 in the front-rear direction is, for example, 70% or more, preferably 100% or more, and 300% or less, preferably 150, with respect to the length of the sheet 18 in the conveyance direction. % Or less.

<Manufacturing method of single sheet>
Next, the manufacturing method of the sheet 18 using this sheet manufacturing apparatus 1 is explained in detail.

  The manufacturing method of the sheet | seat sheet 18 is equipped with a sheet | seat preparation process, a cutting process, and an accommodation process. Hereinafter, each process is explained in full detail.

[Sheet preparation process]
In the sheet preparation step, a rolled sheet 7 (an example of a particle-containing resin sheet) is prepared from a composition containing particles and a resin component, and the rolled sheet 7 is sandwiched between the first separator 8 and the second separator 9. That is, in the sheet manufacturing process, the rolled sheet 7, the first separator 8 provided on the lower surface (one surface in the thickness direction) of the rolled sheet 7, and the second separator 9 provided on the upper surface (the other surface in the thickness direction) of the rolled sheet 7. A laminated sheet 10 is prepared.

  Specifically, first, as shown in FIG. 2, a hopper 16 is charged with a composition containing particles and a resin component.

  Further, in the production unit 21 of the sheet manufacturing apparatus 1, the kneading extruder 2, the gear structure 4, the sheet forming unit 5 (particularly the support roll 51 and the rolling roll 54), and the tension adjusting unit 20 (particularly the dancer roll 82). Adjust to a predetermined temperature and / or rotational speed. The temperatures of the kneading extruder 2, the gear structure 4 and the sheet forming portion 5 are, for example, higher than the softening temperature when the resin component contains a thermoplastic resin component, and the resin component is thermoset. When it contains a functional resin component, it is lower than its curing temperature. Specifically, the temperatures of the kneading extruder 2, the gear structure 4, and the sheet forming portion 5 are, for example, 50 ° C or higher, preferably 70 ° C or higher, and for example, 200 ° C or lower, preferably 150 ° C. or lower.

  In particular, the temperature of the support roll 51 and the rolling roll 54 is set to be higher than the temperature of the gear structure 4, and the temperature difference is, for example, 5 ° C. or more, preferably 10 ° C. or more. C. or lower, preferably 30 C or lower. The temperature difference between the support roll 51 and the rolling roll 54 is, for example, 50 ° C. or less, and preferably is approximately isothermal.

  The rotation speed of the support roll 51 is, for example, 0.05 m / min or more, preferably 0.10 m / min or more, for example, 10.00 m / min or less, preferably 5.00 m / min. The rotation speed of the rolling roll 54 is substantially constant with respect to the rotation speed of the support roll 51.

  Moreover, the air pressure with respect to the rolling roll 54 of an air pump is 0.1 MPa or more, for example, Preferably, it is 0.3 MPa or more, for example, is 5.0 MPa or less, Preferably, it is 2.0 MPa or less.

  The temperature of the tension adjusting unit 20 (particularly the dancer roll 82) is room temperature or higher, for example, 25 ° C. or higher, preferably 40 ° C. or higher, and for example, 90 ° C. or lower, preferably 60 ° C. or lower. By setting it as this range, when the sheet contains silica and a thermosetting resin (preferably, an epoxy resin), it is possible to suppress cracking of the sheet surface caused by the tension by the dancer roll 80.

  In the cutting unit 3, the temperature of the support base 77 is set to a predetermined temperature T. Specifically, the predetermined temperature T is equal to or higher than a softening start temperature SP (described later) of the rolled sheet 7 and equal to or lower than a glass transition temperature Tg (described later) of the rolled sheet 7. Specifically, the temperature of the heater 78 is set to the predetermined temperature T described above.

  The predetermined temperature T corresponds to the type and / or blending ratio of the particles in the rolled sheet 7, and is 30 ° C. or more, for example, if the blending ratio of the particles in the rolled sheet 7 is less than 70% by volume. For example, it is less than 40 ° C., preferably 35 ° C. or less. Further, when the mixing ratio of the particles in the rolled sheet 7 is 70% by volume or more, the predetermined temperature T is, for example, 30 ° C. or more, and for example, less than 50 ° C., preferably 46 ° C. or less, more preferably. 45 ° C. or lower.

  The moving speed of the pair of caterpillars 89 and the transporting speed of the transporting conveyor 90 of the gripping and moving part 87 shown in FIG. 7 are 60 to 200% with respect to the pair of transporting rolls 83, respectively. Is fast.

  In addition, as shown in FIG. 2, the first separator 8 is wound around the first delivery roll 56 in advance.

  Further, the second separator 9 is wound around the second delivery roll 59 in advance.

  Next, the composition is charged into the cylinder 11 from the hopper 16 through the kneading extruder inlet 14 of the cylinder 11.

  In the kneading extruder 2, the composition is kneaded and extruded by the rotation of the kneading screw 12 while being heated by the block heater, and the composition is passed through the connecting pipe 17 from the kneading extruder outlet 15 as shown in FIG. To the first reservoir 27 (kneading extrusion process).

Thereafter, the composition is conveyed forward in the gear structure 4 while being deformed in the rotation axis direction A1 of the pair of gears 32 (deformation conveyance step).

  Specifically, the composition is conveyed while being spread from the center portion in the rotation axis direction A1 to both ends by the meshing of the pair of gears 32.

  Specifically, as shown in FIG. 3, the composition reaches from the upper end portion and the lower end portion of the front side portion of the first storage portion 27 to the rear side portion from the meshing portion of the pair of gears 32 in the accommodation space 73. While being sheared by the oblique teeth 35 of the pair of gears 32, the tooth is entrained in the tooth gap 75 and then reaches the sealed space 74. Then, in the sealed space 74, the composition moves along the tooth traces of the oblique teeth 35, that is, the communication between the first storage portion 27 and the second storage portion 28 by the tooth spaces 75 that become the overlapping tooth spaces 76. While being prevented, the pair of gears 32 are transported downstream of the pair of gears 32 in the rotational direction R2, that is, forward. As a result, the composition is pushed out to the front side of the pair of gears 32 and reaches the front side part from the meshing part of the pair of gears 32 in the accommodation space 73.

  At this time, the composition is prevented from flowing backward (returning back) to the first storage portion 27 via the meshing portion of the oblique teeth 35 (see FIG. 5), while being prevented in the left-right direction by the meshing portion of the oblique teeth 35. It is pushed out.

  Specifically, as shown in FIG. 3, in the right side portion of the gear structure 4, the rotation axis direction A <b> 1 of the pair of gears 32 is engaged by the engagement of the first right inclined teeth 36 and the second right inclined teeth 38. It is spread from the center of the head toward the right edge. On the other hand, in the left portion of the gear structure 4, the first left inclined teeth 37 and the second left inclined teeth 39 are engaged to push the pair of gears 32 from the central portion in the rotation axis direction A 1 toward the left end portion. Can be spread.

  Subsequently, as shown in FIG. 3, the composition reaches the discharge port 46 via the second reservoir 28 and the discharge passage 44, and then is discharged (conveyed) from the discharge port 46 toward the support roll 51. .

  Specifically, the first separator 8 delivered from the first delivery roll 56 (see FIG. 2) is laminated on the peripheral surface of the support roll 51, and the composition passes through the first separator 8. While being supported by the support roll 51, it is transported in the rotation direction of the support roll 51.

  The composition discharged from the discharge port 46 is once discharged to the rear of the support roll 51 via the first separator 8, and immediately, the first gap 50 (that is, the protrusion 63 and the peripheral surface of the support roll 51). The thickness is adjusted by Specifically, the excess composition is scraped off by the protrusion 63 and formed as a sheet-like composition having a desired thickness and a desired width (hereinafter referred to as a pre-rolling sheet 7a). And the sheet | seat 7a before rolling is conveyed by the 2nd clearance gap 60 as the sheet | seat 13 with a 1st separator in which the sheet | seat 7a before rolling was laminated | stacked on the 1st separator 8 (gap passage process).

  Specifically, by adjusting the distance L1 of the first gap 50 and the thickness of the first separator-attached sheet 13 by the distance L1 of the first gap 50, the thickness of the sheet 7a before rolling or the second gap passing step The thickness of the obtained rolled sheet 7 is determined.

  The thickness of the sheet 13 with the first separator is, for example, 60 μm or more, preferably 110 μm or more, and for example, 2500 μm or less, preferably 1500 μm or less.

  The thickness of the sheet 7a before rolling is, for example, 50 μm or more, preferably 100 μm or more, and for example, 2000 μm or less, preferably 1000 μm or less.

  Subsequently, as shown in FIG. 2, the pre-rolling sheet 7 a is conveyed from the rear end of the support roll 51 along the outer periphery of the support roll 51 to the upper end of the support roll 51, and then the second gap 60 (that is, Between the rolling roll 54 and the support roll 51), the second separator 9 is laminated on the upper surface of the pre-rolling sheet 7a and simultaneously rolled. Specifically, in the second gap 60, the pre-rolling sheet 7a formed into a sheet shape by the first gap 50 is immediately pressed by the rolling roll 54 via the second separator 9 from above. Is applied. The pressure is, for example, 0.05 MPa or more, preferably 0.1 MPa or more, and for example, 1.0 MPa or less, preferably 0.5 MPa or less. Therefore, the sheet 7a before rolling is a sheet whose surface is deformed flat and variation in the thickness of the sheet surface is suppressed (hereinafter referred to as a rolled sheet 7). As a result, a laminated sheet 10 in which the first separator 8 and the second separator 9 are laminated on both surfaces of the rolled sheet 7 is obtained. That is, the laminated sheet 10 includes the rolled sheet 7, the first separator 8, and the second separator 9, and is formed as a long sheet that is long in the conveying direction.

  The thickness of the laminated sheet 10 is, for example, 50 μm or more, preferably 80 μm or more, and for example, 2900 μm or less, preferably 1950 μm or less.

  The thickness of the rolled sheet 7 in the laminated sheet 10 is, for example, 60% or more and, for example, 95% or less with respect to the thickness of the unrolled sheet 7a when passing through the first gap 50. Specifically, for example, it is 30 μm or more, preferably 60 μm or more, and for example, 1900 μm or less, preferably 950 μm or less.

The softening start temperature SP of the rolled sheet 7 is, for example, 25 ° C. or more, preferably 30 ° C. or more, and for example, 45 ° C. or less, preferably 35 ° C. or less. The softening start temperature SP of the rolled sheet 7 is a tensile storage elastic modulus E ′ obtained by dynamic viscoelasticity measurement (DMA) of the rolled sheet 7 having a frequency of 1 Hz, a heating rate of 10 ° C./min, and a temperature range of −10 to 65 ° C. Obtained from. Specifically, in the DMA of the rolled sheet 7, the temperature starts to shift from the glass region to the transition region, and the rate of change of the tensile storage elastic modulus E ′ with respect to the temperature is −1.5 × 10 ⁷ Pa / ° C. or less. Temperature.

  The glass transition temperature Tg of the rolled sheet 7 is, for example, 40 ° C. or higher, preferably 45 ° C. or higher, and for example, 50 ° C. or lower, preferably 46 ° C. or lower. The glass transition temperature Tg of the rolled sheet 7 is obtained as the peak value of tan δ obtained by dynamic viscoelasticity measurement (TMA) of the rolled sheet 7 under the above conditions.

The tensile storage modulus E ′ of the rolled sheet 7 at the predetermined temperature T (that is, the set temperature of the cutting blade 85) is appropriately determined according to, for example, the type and / or blending ratio of the resin component in the rolled sheet 7. In particular, it is appropriately adjusted according to the blending ratio of the resin component. The tensile storage elastic modulus E ′ at the predetermined temperature T of the rolled sheet 7 is, for example, 1.0 × 10 ⁸ Pa or more and 1.5 × 10 ⁹ Pa or less. Specifically, if the mixing ratio of the particles in the rolled sheet 7 is less than 70% by volume, the tensile storage elastic modulus E ′ of the rolled sheet 7 is, for example, 1.0 × 10 ⁸ Pa or more. 1.2 × 10 ⁹ Pa or less, preferably 8.0 × 10 ⁸ Pa or less. Moreover, if the compounding ratio of the particles in the rolled sheet 7 is 70% by volume or more, the tensile storage elastic modulus E ′ of the rolled sheet 7 is, for example, 1.0 × 10 ⁸ Pa or more. 5 × 10 ⁹ Pa or less, preferably 1.3 × 10 ⁹ Pa or less.

  Thereafter, the laminated sheet 10 passes from the upper end of the first tension roll 81 through the front end and is conveyed downward, is conveyed from the rear end of the dancer roll 80 to the lower end along the periphery, and further from the lower end of the dancer roll 80. It is conveyed along the periphery to the front end, and then conveyed upward to the second tension roll 82.

  At this time, the dancer roll 80 is set so that a certain tension is applied to the laminated sheet 10 by pressing the laminated sheet 10 downward. Although the tension | tensile_strength added to the lamination sheet 10 is suitably selected by the width | variety of a sheet | seat, and the material (tensile strength) of a sheet | seat, it is 10N or more and 200N or less, for example.

  The laminated sheet 10 that has passed the upper end from the rear end of the second tension roll 82 is transported horizontally forward and passes between the first transport roll 83a and the second transport roll 83b.

  The laminated sheet 10 is pressed from above and below between the pair of transport rolls 83. The pressure is, for example, 0.1 MPa or more, preferably 0.3 MPa or more, and for example, 2.0 MPa or less, preferably 1.0 MPa or less.

[Cutting process]
Next, the laminated sheet 10 passes between the first pressing member 84 a and the second pressing member 84 b, passes below the cutting blade 85, and reaches the upper surface of the mounting member 86.

  At this time, as shown in FIG. 7A, the pair of chucking arms 88 are located at the gripping position, and the left and right (widthwise) both ends of the front end of the laminated sheet 10 are a pair of chucking arms. 88.

  More specifically, the pair of chucking arms 88 grips a portion of the laminated sheet 10 from 5 to 10 mm inward in the left-right direction from both left-right direction edges.

  Thereafter, as shown in FIG. 7B, the pair of caterpillars 89 rotate forward so as to interlock with the pair of transport rolls 83, and the pair of chucking arms 88 are arranged at both ends in the left-right direction of the front end portion of the laminated sheet 10. It is moved to the release position while holding the part. As a result, the front end portion of the laminated sheet 10 is separated from the cutting blade 85 by a predetermined length (the length of the single sheet 18).

  In the present embodiment, when the sheet 100 satisfies the relationship (1), the particle-containing resin sheet 70 is deformed in the cutting step as shown in FIG. Follow without. That is, an interface peeling does not occur between the second separator 9 and the particle-containing resin sheet 70. On the other hand, the first separator 8 does not follow the particle-containing resin sheet 70 and is positioned on the upper surface of the support base 77. That is, an interface peeling occurs between the first separator 8 and the particle-containing resin sheet 70.

  Or in this embodiment, when the sheet | seat 100 satisfies the relationship of said (2), as FIG. 12 shows, the particle-containing resin sheet 70 deform | transforms, and the 2nd separator 9 and the 1st separator are added to this. 8 follows without a gap. That is, an interface peeling does not occur between the second separator 9 and the particle-containing resin sheet 70 and between the first separator 8 and the particle-containing resin sheet 70.

  In this embodiment, as shown in FIG. 11 and FIG. 12, the particle-containing resin sheet 70 and the second separator 9 have no interface peeling. In particular, as shown in FIG. 11, an embodiment in which there is no interface peeling between the particle-containing resin sheet 70 and the second separator 9 and there is an interface peeling between the particle-containing resin sheet 70 and the first separator 8 is preferable.

  On the other hand, as shown in FIGS. 13 and 14, the particle-containing resin sheet 70 is deformed, while the second separator 9 and the first separator 8 do not follow this, and the second separator 9 and the particle-containing resin sheet. 70 in which the interface peeling occurs between the first separator 8 and the particle-containing resin sheet 70, that is, at least the interface peeling occurs between the second separator 9 and the particle-containing resin sheet 70, In this embodiment, it is not preferable.

  That is, in this embodiment, as shown in FIGS. 11 and 12, it is preferable that there is at least no interfacial peeling between the particle-containing resin sheet 70 and the second separator 9, in other words, in FIGS. 13 and 14. As shown, it is not preferable that there is interfacial peeling between the particle-containing resin sheet 70 and the second separator 9.

  2, the second pressing member 84b and the cutting blade 85 move downward. First, the second pressing member 84b presses the surface of the laminated sheet 10, and the laminated sheet 10 After being sandwiched between the first pressing member 84a and the second pressing member 84b, the laminated sheet 10 is cut at once along the left-right direction by the cutting blade 85. Further, the laminated sheet 10 is cut by the cutting blade 85 from the upper side (the other side in the thickness direction) to the lower side (the one side in the thickness direction). In this cutting step, the laminated sheet 10 is cut while being heated by the heater 78.

  In the cutting step, the cutting speed V of the cutting blade 85 is, for example, 1 mm / second or more, preferably 5 mm / second or more, more preferably 10 mm / second or more, and 100 mm / second or less, preferably 80 mm. / Second or less, more preferably 50 mm / second or less. The cutting speed V of the cutting blade 85 is a speed at which the cutting blade 85 cuts through the thickness direction of the laminated sheet 10. Specifically, the cutting speed V of the cutting blade 85 is a value obtained by dividing the thickness of the rolled sheet 7 by the time required for the blade edge 23 to pass through the thickness direction of the rolled sheet 7 (unit: mm / second, for example). ).

  As described above, the heating temperature of the heater 78 is set to be equal to or higher than the softening start temperature SP of the rolled sheet 7 and equal to or lower than the glass transition temperature Tg of the rolled sheet 7.

  In addition, the dimensions of the cut laminated sheet 10 (hereinafter referred to as a sheet 18) are appropriately adjusted according to the application and purpose. For example, the dimensions can collectively cover a plurality of electronic elements 96 described below. Adjusted to.

  Thereafter, the pair of chucking arms 88 releases the grip of the laminated sheet 10, and the sheet 18 is placed on the transport conveyor 90 and transported forward by the transport conveyor 90.

  After the cutting, the second pressing member 84b and the cutting blade 85 immediately move upward, and after the sheet 18 is released, the pair of chucking arms 88 are immediately held by the reverse rotation of the pair of caterpillars 89. Moved to.

  Then, the laminated sheet 10 before cutting is conveyed again to the upper surface of the mounting member 86 by the pair of conveying rolls 83. Thereafter, the above-described cutting process is repeated.

  In such a cutting process, since the laminated sheet 10 is sandwiched between the first holding member 84a and the second holding member 84b and cut by the cutting blade 85, the continuous conveyance of the laminated sheet 10 becomes intermittent (temporary). Will be stopped.)

  On the other hand, the kneading and extruding step, the deformation conveying step, and the gap passing step behind the tension adjusting unit 20 (upstream in the conveying direction) are continuously performed. The tension adjusting unit 20 includes the laminated sheet 10. Conveyed continuously.

  In the tension adjustment unit 20, the dancer roll 80 moves in the vertical direction in response to intermittent conveyance forward (downstream in the conveyance direction), thereby moving forward (conveyance). (On the downstream side in the direction), while being transported intermittently on the rear side (upstream side in the transport direction) from the tension adjusting unit 20, the tension of the laminated sheet 10 that is excessive in the tension adjusting unit 20 is increased. It is kept constant. Thereby, it can suppress that a wrinkle generate | occur | produces in the lamination sheet 10. FIG.

  The tension | tensile_strength of the lamination sheet 10 in the dancer roll 80 is 10-50N, for example.

[Containment process]
Next, the sheet 18 released from the pair of chucking arms 88 is transported forward (downstream in the transport direction) by the transport conveyor 90. Thereafter, the sheet 18 moves from the conveyor 90 onto the movable plate 92 and is accommodated in the accommodation case 93 from above the movable plate 92.

  Specifically, as shown in FIG. 8A, the detection sensor 91 detects the sheet 18 when the front end portion of the sheet 18 conveyed to the conveyance conveyor 90 comes below the detection sensor 91. Then, based on the detection, the movable plate 92 moves forward from the retracted position.

  Next, as shown in FIG. 8B, when the rear end of the sheet 18 comes to the front end of the transport conveyor 90, the front end of the sheet 18 is lower than the front end of the transport conveyor 90 in the transport direction. It falls to the side and comes into contact with the upper surface of the movable plate 92 that is in the process of advancing.

  Next, as shown in FIG. 8C, at the same time when the transport conveyor 90 reaches the advanced position, the sheet 18 is completely separated from the transport conveyor 90 and placed on the movable plate 92. Thereafter, the movable plate 92 on which the sheet 18 is placed moves backward (in the arrow direction in FIG. 8C) toward the retracted position.

  Then, the rear end portion of the sheet 18 on the movable plate 92 comes into contact with the front end portion (lower front end portion 94) of the transport conveyor 90, and the backward movement of the sheet 18 is restricted. On the other hand, the movable plate 92 continues to move rearward while sliding with the sheet 18. When the movable plate 92 reaches the retracted position, the sheet 18 falls from the movable plate 92 and is accommodated in the accommodation case 93 (FIG. 8D).

  Thus, since the sheet 18 is temporarily received by the movable plate 92 from the transport conveyor 90 and then stored in the storage case 93, the sheet 18 is reduced in the dropping speed and the transport speed from the transport conveyor 90. Can be accommodated in the accommodation case 93 gently. Therefore, the generation of wrinkles in the sheet 18 can be suppressed.

  In addition, in this sheet manufacturing apparatus 1, when the resin component contains a thermosetting resin component, after being heated by the kneading extruder 2, the thermosetting resin in the composition is stored until it is stored in the storage case 93. The component is in the B-stage state, and the thermosetting resin component in the sheet 18 is also in the B-stage state.

  For example, the sheet 18 is used to seal an electronic element 96 described below.

<Method for Manufacturing Electronic Device>
Next, a method for manufacturing an electronic device 95 that seals the electronic element 96 using the above-described single-wafer sheet 18 will be described with reference to FIG.

  The manufacturing method of the electronic device 95 includes a first peeling step (see FIG. 10A), a sealing step (see FIGS. 10B and 10C), and a second peeling step (see FIG. 10D). Hereinafter, each process is explained in full detail.

(First peeling step)
In the first peeling step, first, the first separator 8 is peeled from the particle-containing resin sheet 70 as shown by the arrow in FIG. 10A.

  In order to peel the first separator 8 from the particle-containing resin sheet 70, specifically, the end of the first separator 8 (right end in FIG. 10A, one end in the surface direction) is gripped, and then the first The separator 8 is pulled downward (one side in the thickness direction) and / or left side (the other side in the surface direction). The peeling speed of the 1st separator 8 is not specifically limited, For example, 100 mm / min or more, Preferably, it is 200 mm / min or more, for example, is 500 mm / min or less, Preferably, it is 300 mm / min or less.

  Next, as shown in FIG. 10B, a substrate 97 on which an electronic element 96 is mounted is prepared separately.

  The substrate 97 is made of, for example, an insulating substrate extending in the surface direction. A conductor pattern (not shown) including electrodes is formed on the upper surface of the substrate 97.

  A plurality of electronic elements 96 are mounted on the substrate 97, and the plurality of electronic elements 96 are arranged at intervals in the surface direction. A terminal (not shown) of each electronic element 96 is electrically connected to an electrode (not shown) of the substrate 97. Specific examples of the electronic element 96 include an IC (integrated circuit) chip, a capacitor, a coil, a resistor, and a light emitting diode. The thickness of the electronic element 96 is not specifically limited, For example, 10 micrometers or more, Preferably, it is 50 micrometers or more, for example, is 200 micrometers or less, Preferably, it is 150 micrometers or less.

  The sealing step is performed after the first peeling step. In the sealing step, as shown in FIGS. 10B and 10C, the electronic element 96 is sealed with the particle-containing resin sheet 70.

  First, the substrate 97 on which the electronic element 96 is mounted is placed on the press device 107.

  The press device 107 includes an upper plate 108 and a lower plate 109 that are arranged to face each other in the vertical direction. Each of the upper plate 108 and the lower plate 109 is provided so as to extend in the plane direction, and the substrate 97 on which the electronic element 96 is mounted and the particle-containing resin sheet 70 can be hot-pressed in the vertical direction (thickness direction). It is configured.

  In this method, as shown in FIG. 10B, specifically, the substrate 97 is placed on the upper surface of the lower plate 109 so that the electronic element 96 faces upward.

  Subsequently, in this method, the peeling surface of the particle-containing resin sheet 70 from which the first separator 8 has been peeled, that is, the lower surface (the surface facing the laminated surface on which the second separator 9 is laminated) is placed on the upper surface of the electronic element 96. Put. Specifically, the upper surfaces of the plurality of electronic elements 96 are covered with the particle-containing resin sheet 70.

  Thereafter, the particle-containing resin sheet 70 is pressed against the substrate 97 by the press device 107 described above. Specifically, the upper plate 108 is brought closer (lowered) relative to the lower plate 109. Thereby, the particle-containing resin sheet 70 is filled between the electronic elements 96 adjacent to each other, and covers the upper surface of the substrate 97 exposed from the electronic elements 96. Further, the particle-containing resin sheet 70 covers all side surfaces of the electronic element 96.

Further, in the pressure contact of the particle-containing resin sheet 70 to the substrate 97, the particle-containing resin sheet 70 is heated by a heater (not shown) built in the upper plate 108 and the lower plate 109. The heating temperature is, for example, 30 ° C. or more, preferably 35 ° C. or more, and for example, 45 ° C. or less, preferably 40 ° C. or less.
Thereby, the particle-containing resin sheet 70 which is the B stage is changed to the C stage.

  As a result, the electronic element 96 mounted on the substrate 97 is sealed with the particle-containing resin sheet 70. And the electronic device 95 provided with the board | substrate 97, the electronic element 96, the particle | grain containing resin sheet 70, and the 2nd separator 9 is obtained.

(Second peeling step)
A 2nd peeling process is implemented after a sealing process. In the second peeling step, the second separator 9 is peeled from the particle-containing resin sheet 70 as shown in FIG. 10D.

  In order to peel the second separator 9 from the particle-containing resin sheet 70, specifically, the second separator 9 is grasped while holding the end of the second separator 9 (the right end in FIG. 10A, one end in the surface direction). Is pulled upward (on the other side in the thickness direction) and / or on the left side (the other side in the surface direction). The peeling speed of the 2nd separator 9 is not specifically limited, For example, 100 mm / min or more, Preferably, it is 200 mm / min or more, for example, is 500 mm / min or less, Preferably, it is 300 mm / min or less.

  Thus, an electronic device 95 including the substrate 97, the electronic element 96, and the particle-containing resin sheet 70 and having the second separator 9 peeled is obtained.

[Function and effect]
According to this method, the first adhesion force F1 of the first separator 8 to the particle-containing resin sheet 70 is smaller than the second adhesion force F2 of the second separator 9 to the particle-containing resin sheet 70, or the first The adhesion force F1 and the second adhesion force F2 are the same at 0.04 N / 20 mm or more, and the thickness T1 of the first separator 8 is thinner than the thickness T2 of the second separator 9. Therefore, in the cutting step, when stress is generated at the cut end portions of the second separator 9 and the particle-containing resin sheet 70, interfacial peeling between the second separator 9 and the particle-containing resin sheet 70 occurs at the cut end portion (FIG. 13). And FIG. 14) can be suppressed (see FIG. 11 and FIG. 12). That is, it can suppress that a clearance gap arises in the interface of the 2nd separator 9 and particle content resin sheet 70 in a cutting end part (refer to Drawing 13 and Drawing 14) in a cutting process (refer to Drawing 11 and Drawing 12).

  When the first adhesion force F1 and the second adhesion force F2 are the same at 0.04 N / 20 mm or more and the thickness T1 of the first separator 8 is thinner than the thickness T2 of the second separator 9, cutting is performed. In the process, the second separator 9 can suppress the formation of a gap between the second separator 9 and the particle-containing resin sheet 70 while following the deformation of the particle-containing resin sheet 70 based on the stress accompanying cutting (FIG. 12). reference). On the other hand, it may be difficult to smoothly perform the first peeling step. That is, since the first adhesion force F1 and the second adhesion force F2 are the same, it may be difficult to peel only the first separator 8 from the particle-containing resin sheet 70 in the first peeling step. That is, not the first separator 8 but the second separator 9 may be unintentionally peeled off from the particle-containing resin sheet 70.

  However, in this method, when the first adhesion force F1 is smaller than the second adhesion force F2, only the first separator 8 can be reliably separated from the particle-containing resin sheet 70 in the first separation step ( FIG. 11).

  Moreover, according to this method, even when the particle-containing resin sheet 70 is heated when the electronic element 96 is sealed with the particle-containing resin sheet 70 after the first separator 8 is peeled off, the above-described gap is caused. Generation of large voids (see reference numeral 110 in FIG. 10C) can be suppressed.

  Moreover, according to this method, even if the particle-containing resin sheet 70 is heated in the sealing step, generation of large voids (see reference numeral 110 in FIG. 10C) due to the gaps can be suppressed. The deformation due to the above-described void 110 in the resin sheet 70 can be prevented, and the electronic device 95 having excellent reliability can be manufactured.

  Further, according to this method, the configuration of the particle-containing resin sheet 70 in the electronic device 95 can be simplified by the second peeling step.

(Modification)
In the embodiment shown in FIGS. 1 to 9, the sheet manufacturing process of the present invention is performed in the manufacturing unit 21 of the sheet manufacturing apparatus 1 shown in FIG. 1. The sheet manufacturing process can be performed by the manufacturing unit of the manufacturing apparatus. Specifically, although not shown, the pre-rolling sheet 7a in which the first separator 8 and the second separator 9 are provided on the upper surface and the lower surface, respectively, by the sheet manufacturing apparatus 1 that does not include the rolling roll 54 or the tension adjusting unit 20 or the like. (Sheet 100) can be obtained and used for the cutting step.

  1 to 11, the second peeling process is performed as shown in FIG. 11D. For example, the second peeling process is not performed, and the electronic device 95 of FIG. 11C is used as a product. It can also be obtained.

  In the embodiment shown in FIGS. 1 to 9, the laminated sheet 10 is produced in the sheet producing process, and the laminated sheet 10 is cut in the cutting process to produce the sheet 18. However, in the sheet manufacturing process, the laminated sheet 10 is manufactured, and then the sheet is cut to prepare the sheet 18, and then in the cutting process, the sheet 18 is cut and externally processed. You can also.

  In the present invention, the sheet includes the concept of a tape or a film.

  The numerical values in the following examples can be substituted for the numerical values (that is, the upper limit value or the lower limit value) described in the above embodiment.

Examples 1-42 and Comparative Examples 1-34
In accordance with the following formulation, each component (particles and resin component) was mixed and stirred to prepare a semi-solid mixture (composition).

(Combination prescription)
Spherical fused silica powder (trade name “FB-9454”, manufactured by Denki Kagaku Kogyo Co., Ltd., spherical shape, average particle diameter 17 μm, specific gravity 2.2 g / cm ³ ): 83.85% by mass
・ Bisphenol F type epoxy resin (thermosetting resin, trade name “YSLV-80XY”
”Manufactured by Nippon Steel Chemical Co., Ltd., epoxy equivalent 200 g / eq. , Softening point 80 ° C.): 6% by mass
Phenol aralkyl resin (curing agent, trade name “MEH7851SS”, manufactured by Meiwa Kasei Co., Ltd., hydroxyl group equivalent 203 g / eq., Softening point 67 ° C.): 6% by mass
2-phenyl-4-methyl-5-hydroxymethylimidazole (curing accelerator, trade name “2PHZ”, manufactured by Shikoku Kasei Kogyo Co., Ltd.): 0.15% by mass
・ Butyl acrylate-acrylonitrile-glycidyl methacrylate copolymer (thermoplastic resin, cyano-epoxy modified acrylic resin): 4% by mass
Separately, a sheet manufacturing apparatus 1 having the apparatus configuration shown in FIGS. 1 to 9 was prepared with the prescriptions and conditions shown in Tables 1 to 3.

  In the sheet manufacturing apparatus 1, the first separator 8 (type A or type B) and the second separator 9 (type C or type D) of the type shown in Table 1 are respectively used as the first sending roll 56 and the second sending roll. 56.

  For the sheet manufacturing apparatus 1, a Thomson blade 22 was prepared in the cutting unit 3. The Thomson blade 22 was a double-edged blade, the blade length was 23.6 mm, and the blade thickness was 700 μm. In addition, a pair of chucking arms 88 and a pair of caterpillars 89 were set so that they could be cut by a length of 300 mm in the transport direction.

  With this sheet manufacturing apparatus 1, the sheet 18 (thermosetting insulating resin sheet) having a conveyance direction of 300 mm × width direction of 500 mm was manufactured, and 50 sheets were laminated in the housing case 93.

  In the single-wafer sheet 18 of Example 1, the volume-based ratio of the particles in the sheet was 79% by volume.

  Then, the manufacturing method of the electronic device 95 provided with the 1st peeling process, the sealing process, and the 2nd peeling process was implemented using the sheet | seat sheet 18. FIG.

  Specifically, in the first peeling step, first, the first separator 8 was peeled from the particle-containing resin sheet 70 at a peeling speed of 300 mm / min as indicated by the arrow in FIG. 10A.

  In the sealing step, first, as shown in FIG. 10B, a substrate 97 on which an electronic element 96 having a thickness of 150 μm was separately prepared. Subsequently, the prepared substrate 97 was placed in the press device 107. Subsequently, the lower surface of the particle-containing resin sheet 70 from which the first separator 8 was peeled was placed on the upper surface of the electronic element 96.

  Thereafter, as shown in FIG. 10C, the particle-containing resin sheet 70 was pressed against the substrate 97 at a heating temperature of 40 ° C. by the press device 107 described above. Next, the particle-containing resin sheet 70 was C-staged.

  In the second peeling step, as shown in FIG. 10D, the second separator 9 was then peeled from the particle-containing resin sheet 70 at a peeling speed of 300 mm / min.

(Evaluation)
1. Adhesive force between the separator and the particle-containing resin sheet The adhesive force between the separator and the particle-containing resin sheet was measured.

Specifically, after externally processing the laminate of the first separator 8 and the particle-containing resin sheet 70 to a width of 20 mm, the first separator 8 is peeled at a normal temperature (25 ° C.) at a peeling angle of 180 degrees and a peeling speed of 300 mm. The first adhesion force F1 was calculated as the peel strength when peeled from the particle-containing resin sheet 70 per minute. Moreover, after externally processing the laminated body of the second separator 9 and the particle-containing resin sheet 70 to a width of 20 mm, the second separator 9 is subjected to normal temperature (25 ° C.), a peeling angle of 180 degrees, and a peeling speed of 300 mm / min. The second adhesion force F2 was calculated as the peel strength when peeled from the particle-containing resin sheet 70.
2. Appearance at the time of a cutting process The sheet 18 (sheet 100) at the time of a cutting process was observed, and those states were classified into the following modes.

    Aspect 1: As illustrated in FIG. 11, the particle-containing resin sheet 70 was deformed, and the second separator 9 followed this without a gap. On the other hand, the first separator 8 did not follow the particle-containing resin sheet 70 and was positioned on the upper surface of the support base 77. That is, interfacial peeling occurred between the first separator 8 and the particle-containing resin sheet 70.

    Aspect 2: As illustrated in FIG. 12, the particle-containing resin sheet 70 was deformed, and the second separator 9 and the first separator 8 followed this without a gap. That is, no interfacial peeling occurred between the second separator 9 and the particle-containing resin sheet 70 and between the first separator 8 and the particle-containing resin sheet 70.

    Aspect 3: As illustrated in FIG. 13, while the particle-containing resin sheet 70 is deformed, the second separator 9 and the first separator 8 do not follow this, and between the second separator 9 and the particle-containing resin sheet 70. And interfacial peeling occurred between the first separator 8 and the particle-containing resin sheet 70. Further, the first separator 8 was located on the upper surface of the support base 77.

Aspect 4: As illustrated in FIG. 14, while the particle-containing resin sheet 70 is deformed, the second separator 9 and the first separator 8 do not follow this, and between the second separator 9 and the particle-containing resin sheet 70. And interfacial peeling occurred between the first separator 8 and the particle-containing resin sheet 70. Further, the first separator 8 was located on the upper surface of the support base 77. In particular, at the cut end, a large gap was generated between the second separator 9 and the particle-containing resin sheet 70 and between the first separator 8 and the particle-containing resin sheet 70.
3. Evaluation Evaluation of the 1st exfoliation process and the 2nd exfoliation process was carried out according to the following table 4.

7 Rolled sheet 8 First separator 9 Second separator 10 Laminated sheet 18 Sheet sheet 50 Sheet 70 Particle-containing resin sheet 95 Electronic device 96 Electronic element 97 Substrate T1 First separator 8 thickness T2 Second separator 9 thickness F1 First Adhesion force F2 Second adhesion force

Claims (5)

A particle-containing resin sheet containing particles and a resin component, a first release sheet provided on one surface in the thickness direction of the particle-containing resin sheet, and a second release sheet provided on the other surface in the thickness direction of the particle-containing resin sheet And a sheet production process for producing a sheet comprising:
A sheet manufacturing method comprising a cutting step of cutting the sheet from the other side in the thickness direction to the one side in the thickness direction,
The first adhesion force of the first release sheet to the particle-containing resin sheet is smaller than the second adhesion force of the second release sheet to the particle-containing resin sheet, or
The first contact force and the second contact force are the same at 0.04 N / 20 mm or more, and the thickness of the first release sheet is thinner than the thickness of the second release sheet. Manufacturing method.   The sheet manufacturing method according to claim 1, wherein the first adhesion force is smaller than the second adhesion force.   The said sheet | seat is used so that an electronic element may be sealed, The manufacturing method of the sheet | seat of Claim 1 or 2 characterized by the above-mentioned. A first peeling step of peeling the first release sheet in the sheet manufactured by the sheet manufacturing method according to claim 3 from the particle-containing resin sheet, and
An electronic device manufacturing method comprising a sealing step of sealing an electronic element with the particle-containing resin sheet after the first peeling step.   The method for manufacturing an electronic device according to claim 4, further comprising a second peeling step of peeling the second release sheet from the particle-containing resin sheet after the sealing step.

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