JP2015043103A - Wavelength variable interference filter, optical module, and photometric analyzer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter where a desired gap can be accurately set while variation of the gap due to an external factor is suppressed, and to provide an optical module and a photometric analyzer.SOLUTION: The wavelength variable interference filter includes: a first movable mirror 56 provided on a first substrate 51; a second movable mirror 57 facing the first movable mirror 56 with a prescribed gap G therebetween; and an electrostatic actuator 54 which changes dimensions of the gap G between the mirrors. The first substrate 51 includes a first movable portion 512 provided with the first movable mirror 56 and a first connection holding part 513 which holds the first movable portion 512 so that the first movable portion 512 is movable in a substrate thickness direction. A second substrate 52 includes a second movable portion 522 provided with the second movable mirror 57 and a second connection holding part 523 which holds the second movable portion 522 so that the second movable portion 522 is movable in the substrate thickness direction. The electrostatic actuator 54 relatively moves the movable portions 512 and 522 to change the dimensions of the gap G.

Description

  The present invention relates to a wavelength variable interference filter that selects and emits light having a desired target wavelength from incident light, an optical module including the wavelength variable interference filter, and an optical analyzer including the optical module.

  2. Description of the Related Art Conventionally, an optical filter (a wavelength variable interference filter) is known in which mirrors are arranged to face each other of a pair of substrates (see, for example, Patent Document 1). In such a tunable interference filter, incident light is subjected to multiple interference between a pair of mirrors, and only light of a specific wavelength strengthened by multiple interference is transmitted.

  In the wavelength tunable interference filter of Patent Document 1, the first substrate and the second substrate are disposed to face each other. An annular groove is formed on the surface of the first substrate that does not face the second substrate, and a cylindrical movable portion is formed at the center of the first substrate by forming this groove. And a diaphragm formed in an annular shape coaxially with the movable portion. A pair of electrodes is disposed between the pair of substrates, and a mirror is disposed to face the surface of the movable portion facing the second substrate and the second substrate. Here, by applying a voltage to the pair of electrodes, the diaphragm is bent by electrostatic attraction, and the movable part on which the mirror is formed moves in the substrate thickness direction, and the gap between the pair of mirrors can be adjusted. It becomes possible. Thereby, the variable wavelength interference filter can transmit only light of a specific wavelength corresponding to the gap.

JP 2010-204457 A

  By the way, in the variable wavelength interference filter of Patent Document 1, the diaphragm is formed only on the first substrate. In such a configuration, in order to greatly displace the movable part and reduce the gap, it is necessary to reduce the thickness of the diaphragm or to increase the area of the diaphragm in plan view as viewed in the substrate thickness direction. . However, when the thickness dimension of the diaphragm is reduced and the area is increased, the diaphragm is easily displaced, and accordingly, the mirror provided on the movable portion is also easily displaced. That is, it is expected that the gap between the mirrors fluctuates due to external factors such as external vibration and cannot be set to a desired gap according to the applied voltage.

  An object of the present invention is to provide a tunable interference filter, an optical module, and an optical analyzer that can be accurately set to a desired gap while suppressing gap fluctuation due to external factors.

  The wavelength variable interference filter according to the present invention includes a first substrate, a second substrate facing the first substrate, a first reflective film provided on a surface of the first substrate facing the second substrate, A second reflection film provided on the second substrate and facing the first reflection film with a predetermined gap; and a gap variable portion that changes a dimension of a gap between the first reflection film and the second reflection film. The first substrate includes a first movable portion provided with the first reflective film, and a first connection holding portion that holds the first movable portion movably in the thickness direction of the first substrate. The second substrate includes a second movable portion provided with the second reflective film, and a second connection holding portion that holds the second movable portion movably in the thickness direction of the second substrate. The gap variable part relatively moves the first movable part and the second movable part. , Characterized in that to change the size of the gap.

  By the way, in order to displace the movable part by a predetermined displacement amount, for example, as described above, it is necessary to reduce the thickness dimension of the diaphragm or increase the area of the diaphragm in plan view. For this reason, the gap may vary due to external factors such as vibration. However, according to the present invention, since the first substrate and the second substrate include the first and second movable parts and the first and second connection holding parts, respectively, when an external factor such as vibration is added, The first and second movable parts are displaced in the same direction, and the variation in the gap dimension can be reduced. Further, the connection holding portions are bent in the direction approaching each other by the gap variable portion, and the movable portions are displaced in the direction approaching each other. For this reason, since the sum total of the displacement amount of a 1st movable part and a 2nd movable part should just be the same as the conventional displacement amount, the displacement amount of each movable part can be made smaller than before. That is, since the thickness dimension and area of the connection holding portion of the present invention can be made larger than the thickness dimension and area of the conventional diaphragm described above, gap variation due to external factors can be suppressed, and a desired value according to the applied voltage can be suppressed. The gap can be set accurately.

  In the wavelength tunable interference filter according to the aspect of the invention, the first substrate includes a first displacement portion including the first movable portion and the first connection portion, and the second substrate includes the second movable portion and the first movable portion. It is preferable that a second displacement portion including a second connection portion is provided, and the first displacement portion and the second displacement portion are formed of the same material and in the same shape.

  According to the present invention, since the first displacement portion of the first substrate and the second displacement portion of the second substrate are formed of the same material and in the same shape, the first connection holding portion when an external factor is applied And the bending amount of the 2nd connection holding part becomes the same, and the displacement amount of the 1st movable part and the 2nd movable part also becomes the same. Thereby, even if external factors, such as the vibration mentioned above, are added and each movable part is displaced, since each movable part is displaced by the same displacement amount in the same direction, the fluctuation | variation of a gap can be suppressed more.

  In the wavelength tunable interference filter according to the aspect of the invention, the first displacement portion may pass through a center line of the first connection holding portion in the thickness direction of the first substrate in the cross-sectional view taken in the substrate thickness direction, and the first displacement portion. The second displacement portion is formed in line symmetry with a straight line along a direction parallel to the reflection film as a symmetry axis, and the second displacement portion has a substrate thickness in the second connection holding portion in a cross-sectional view taken in the thickness direction of the second substrate. It is preferable that the line is symmetrical with respect to a straight line passing through the center line of the direction and extending along a direction parallel to the second reflective film.

According to the present invention, each displacement part is formed in line symmetry with a straight line passing through the center line of the connection holding part in the substrate thickness direction and parallel to each reflection film as an axis of symmetry.
By the way, when the displacement part is not formed in line symmetry as described above, external factors such as vibration are applied, and when the displacement part vibrates in the surface direction of the substrate, a force in the surface direction is applied to each displacement part. For this reason, the balance of the force which acts on each displacement part worsens, and the gap between each reflecting film provided in each movable part fluctuates. Therefore, in the present invention, since each displacement portion is formed symmetrically as described above, the forces in the surface direction acting on each displacement portion are balanced, and even when the displacement portion vibrates in the surface direction of the substrate, the gap is Variation can be suppressed.
As described above, in the present invention, even when an external factor such as vibration in the thickness direction and the surface direction in the substrate is applied, gap variation can be suppressed.

  In the wavelength tunable interference filter according to the aspect of the invention, it is preferable that the first substrate and the second substrate are formed of the same material and in the same shape.

  According to the present invention, since each substrate is formed with the same material and in the same shape, the above-described gap variation can be suppressed, and the manufacturing process for each substrate can be made the same when manufacturing each substrate. The process can be simplified.

  In the wavelength tunable interference filter according to the aspect of the invention, the gap variable portion may include a first electrode provided on a surface of the first substrate facing the second substrate, and a second substrate facing the first electrode. A second electrode provided on the surface of the first substrate opposite to the surface on which the first electrode is provided, and a surface on the second substrate opposite to the surface on which the second electrode is provided. The surface of the first substrate is provided with a first anti-bending film made of the same material as the first electrode or the second electrode, and is opposite to the surface of the first substrate on which the first reflective film is provided. And a surface of the second substrate opposite to the surface on which the second reflective film is provided are formed of the same material as the first reflective film or the second reflective film. A film is preferably provided.

By the way, when the environmental temperature changes, the linear expansion coefficient depending on the temperature of the reflective film and the electrode formed on each substrate changes, so that the internal stress of the reflective film and the electrode changes. For this reason, there exists a possibility that a board | substrate may bend by a temperature change.
In the present invention, the first deflection preventing film made of the same material as the electrode on the surface opposite to the surface on which each electrode is formed on the substrate, and the surface on the opposite side to the surface on which each reflective film is formed on the substrate. A second anti-bending film made of the same material as the film is provided. According to this, even when the environmental temperature changes, the force exerted on the substrate by the internal stress of the electrode and the reflective film balances the force exerted on the substrate by the first and second anti-bending films, and the substrate is bent. Can be suppressed. Therefore, since the first reflection film and the second reflection film can be made parallel, the resolution of the wavelength variable interference filter can be improved.

  An optical module of the present invention includes the above-described wavelength tunable interference filter and light receiving means for receiving inspection target light transmitted through the wavelength tunable interference filter.

  According to the present invention, similarly to the above-described invention, the fluctuation of the gap due to vibration or the like that is an external factor can be suppressed, so that the wavelength variable interference filter can be accurately set to a desired gap according to the applied voltage. Therefore, the optical module can measure with high accuracy by the light receiving means.

  An optical analyzer according to the present invention includes the above-described optical module, and an analysis processing unit that analyzes optical characteristics of the inspection target light based on light received by the light receiving unit of the optical module. To do.

  According to the present invention, since the optical module having the wavelength variable interference filter described above is provided, high-precision measurement can be performed, and accurate spectral characteristics can be measured by performing optical analysis processing based on the measurement result. An optical analyzer can be realized.

1 is a block diagram showing a schematic configuration of a color measurement device according to a first embodiment of the present invention. The top view which shows schematic structure of the etalon of the said 1st Embodiment. Sectional drawing which shows schematic structure of the etalon of the said 1st Embodiment. The figure which shows the manufacturing process of each board | substrate of the etalon of the said 1st Embodiment. The top view which shows schematic structure of the etalon of 2nd Embodiment which concerns on this invention. Sectional drawing which shows schematic structure of the etalon of the said 2nd Embodiment. The figure which shows the manufacturing process of each board | substrate of the etalon of the said 2nd Embodiment. Sectional drawing which shows the etalon of the modification based on this invention. The top view which shows the etalon of the modification which concerns on this invention. The top view which shows the etalon of the modification which concerns on this invention. Sectional drawing which shows the etalon of the modification based on this invention.

[First Embodiment]
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a first embodiment according to the invention will be described with reference to the drawings.
[1. (Schematic configuration of the color measuring device)
FIG. 1 is a block diagram illustrating a schematic configuration of a colorimetric device 1 (light analysis device) according to the first embodiment.
As shown in FIG. 1, the colorimetric device 1 includes a light source device 2 that emits light to the inspection target A, a colorimetric sensor 3 (optical module), and a control device 4 that controls the overall operation of the colorimetric device 1. With. The colorimetric device 1 reflects the light emitted from the light source device 2 on the inspection target A, receives the reflected inspection target light on the colorimetric sensor 3, and outputs the light from the colorimetric sensor 3. This is an apparatus for analyzing and measuring the chromaticity of the inspection target light, that is, the color of the inspection target A based on the detected signal.

[2. Configuration of light source device]
The light source device 2 includes a light source 21 and a plurality of lenses 22 (only one is shown in FIG. 1), and emits white light to the inspection target A. In addition, the plurality of lenses 22 may include a collimator lens. In this case, the light source device 2 converts the white light emitted from the light source 21 into parallel light by the collimator lens and covers the light from a projection lens (not shown). It injects toward inspection object A. In the present embodiment, the colorimetric device 1 including the light source device 2 is illustrated. However, for example, when the inspection target A is a light emitting member such as a liquid crystal panel, the light source device 2 may not be provided.

[3. (Configuration of colorimetric sensor)
As shown in FIG. 1, the colorimetric sensor 3 includes an etalon 5 (wavelength variable interference filter), a light receiving element 31 (light receiving means) that receives light transmitted through the etalon 5, and a wavelength of light transmitted through the etalon 5. And a variable voltage control unit 6. Further, the colorimetric sensor 3 includes an incident optical lens (not shown) that guides reflected light (inspection target light) reflected by the inspection target A at a position facing the etalon 5. The colorimetric sensor 3 uses the etalon 5 to split only the light having a predetermined wavelength out of the inspection target light incident from the incident optical lens, and the light receiving element 31 receives the split light.
The light receiving element 31 includes a plurality of photoelectric exchange elements, and generates an electrical signal corresponding to the amount of received light. The light receiving element 31 is connected to the control device 4 and outputs the generated electrical signal to the control device 4 as a light reception signal.

(3-1. Composition of etalon)
FIG. 2 is a plan view showing a schematic configuration of the etalon 5, and FIG. 3 is a cross-sectional view of the etalon 5 at a position indicated by a line III-III in FIG. In FIG. 1, the inspection target light is incident on the etalon 5 from the lower side in the figure, but in FIG. 3, the inspection target light is incident from the upper side in the figure.
As shown in FIG. 2, the etalon 5 is a plate-like optical member having a square shape in plan view, and one side is formed, for example, at 10 mm. As shown in FIG. 3, the etalon 5 includes a first substrate 51 and a second substrate 52 from the light incident side of the inspection target light, and these substrates 51 and 52 use, for example, room temperature activated bonding or a plasma polymerized film. These are integrally formed by bonding to each other via a bonding layer 53 by siloxane bonding or the like. The first substrate 51 and the second substrate 52 are formed in the same shape, and are configured to be line-symmetric with respect to the bonding layer 53 as a central axis in the sectional view shown in FIG. And these two board | substrates 51 and 52 are each formed with various glass, such as soda glass, crystalline glass, quartz glass, lead glass, potassium glass, borosilicate glass, an alkali free glass, quartz, etc., for example. ing.

A first movable mirror 56 (first reflective film) and a second movable mirror 57 (second reflective film) are provided between the first substrate 51 and the second substrate 52. Here, the first movable mirror 56 is fixed to a surface (first movable surface 515 </ b> A described later) of the first substrate 51 that faces the second substrate 52, and the second movable mirror 57 is the first substrate 52 of the second substrate 52. It is fixed to a surface (second movable surface 525A described later) facing the substrate 51. Further, these first and second movable mirrors 56 and 57 are arranged to face each other with an inter-mirror gap G interposed therebetween.
Further, an electrostatic actuator 54 for adjusting the dimension of the inter-mirror gap G between the movable mirrors 56 and 57 is provided between the first substrate 51 and the second substrate 52.

(3-1-1. Configuration of the first substrate)
The first substrate 51 is formed by processing a glass substrate having a thickness of, for example, 200 μm by etching. The first substrate 51 has a circular first displacement portion 511 centered on the substrate center point in a plan view (hereinafter referred to as etalon plan view) of the etalon 5 as shown in FIG. It is formed. The first displacement portion 511 is coaxial with the columnar first movable portion 512 and is formed in an annular shape in plan view of the etalon so as to hold the first movable portion 512 movably in the thickness direction of the first substrate 51. 1st connection holding | maintenance part 513 is provided.

The first displacement portion 511 is formed by forming a groove by etching a flat glass substrate that is a material for forming the first substrate 51. That is, an annular first annular groove 513A for forming the first connection holding portion 513 is formed by etching on the light incident side surface of the first displacement portion 511 that does not face the second substrate 52 of the first substrate 51. It is formed.
A circular first circular groove 514 centered on the substrate center point in the etalon plan view is formed by etching on the surface of the first displacement portion 511 facing the second substrate 52.
As described above, since the first substrate 51 and the second substrate 52 are formed of the same material and have the same shape, the first displacement portion 511 has the same structure as the second displacement portion 521 of the second substrate 52 described later. The same material is used to form the same shape.

The first movable part 512 is formed to have a thickness dimension larger than that of the first connection holding part 513. The bottom surface of the first circular groove portion 514, which is the surface facing the second substrate 52 of the first movable portion 512, is coaxial with the first circular groove portion 514 around the substrate center point in a plan view of the etalon, and has a first circular shape. A circular second circular groove 515 smaller than the diameter of the groove 514 is formed by etching. Fixed to the first movable surface 515A, which is the bottom surface of the second circular groove 515, is a first movable mirror 56 having a diameter of about 3 mm and formed of a circular TiO ₂ —SiO ₂ dielectric multilayer film. .
In this embodiment, a TiO ₂ —SiO ₂ dielectric multilayer mirror is used as the first movable mirror 56, but an Ag alloy single layer capable of covering the entire visible light region as a spectral range that can be dispersed. It is good also as a structure using the mirror of this.

The 1st connection holding | maintenance part 513 is a diaphragm surrounding the circumference | surroundings of the 1st movable part 512, and a thickness dimension is formed in 50 micrometers, for example. An annular first electrode 541 is formed on the first electrode fixing surface 514A that faces the second substrate 52 of the first connection holding portion 513 and is the bottom surface of the first circular groove portion 514 in plan view of the etalon.
The first electrode 541 has conductivity, and an electrostatic attractive force is generated between the first electrode 541 and the second electrode 542 by applying a voltage to the second electrode 542 of the second substrate 52 described later. In this embodiment, ITO (Indium Tin Oxide) is used, but a metal laminate such as Au / Cr may be used.
Although not shown in the drawing, an insulating film is formed on the upper surface of the first electrode 541 in order to prevent leakage due to discharge or the like between the first electrode 541 and the second electrode 542. As this insulating film, SiO ₂ , TEOS (TetraEthoxySilane), or the like can be used. In particular, SiO ₂ having the same optical characteristics as the glass substrate on which the first substrate 51 is formed is preferable. When SiO ₂ is used as the insulating film, there is no reflection of light between the first substrate 51 and the insulating film. Therefore, after forming the first electrode 541 on the first substrate 51, An insulating film can be formed on the entire surface on the side facing the two substrates 52.

A first electrode lead portion 541L extends from a part of the outer peripheral edge of the first electrode 541 toward the lower left direction of the etalon 5 in plan view of the etalon shown in FIG. Furthermore, a first electrode pad 541P is formed at the tip of the first electrode lead portion 541L, and the first electrode pad 541P is connected to the voltage controller 6 (see FIG. 1).
When the electrostatic actuator 54 is driven, a voltage is applied to the first electrode pad 541P by the voltage controller 6 (see FIG. 1).

  Here, in the first substrate 51, the portion where the first circular groove 514 is not formed becomes the bonding surface 51 </ b> A of the first substrate 51. As shown in FIGS. 2 and 3, a bonding layer 53 for bonding is formed in a film shape on the bonding surface 51A. For the bonding layer 53, a plasma polymerization film using polyorganosiloxane as a main material can be used.

(3-1-2. Configuration of Second Substrate)
Since the second substrate 52 is configured in the same shape as the first substrate 51 as described above, the description of the configuration of the second substrate 52 is simplified below.
Similar to the first substrate 51, the second substrate 52 is formed by processing a glass substrate having a thickness of, for example, 200 μm by etching. The second substrate 52 is formed with a circular second displacement portion 521 in a plan view of the etalon. As shown in FIG. 2, the second displacement portion 521 includes a cylindrical second movable portion 522 and a second connection holding portion 523 that holds the second movable portion 522 so as to be movable in the thickness direction of the second substrate 52. With.
That is, since the connection holding portions 513 and 523 are formed on both the first substrate 51 and the second substrate 52, when electrostatic attraction occurs between the first electrode 541 and the second electrode 542 described later, each substrate The movable parts 512 and 522 of 51 and 52 are displaced in directions close to each other.

An annular first annular groove 523A for forming the second connection holding part 523 is formed on the surface of the second displacement part 521 that does not face the first substrate 51 by etching.
A circular third circular groove 524 centered on the substrate center point in the etalon plan view is formed on the surface of the second displacement portion 521 facing the first substrate 51 by etching.

The bottom surface of the third circular groove portion 524, which is the surface facing the first substrate 51 of the second movable portion 522, is coaxial with the third circular groove portion 524 and centered on the substrate center point in plan view of the etalon, and has a third circular shape. A circular fourth circular groove 525 smaller than the diameter of the groove 524 is formed by etching.
The second movable surface 525A, which is the bottom surface of the fourth circular groove 525, is formed in parallel with the first movable surface 515A, and the second movable mirror 57 having the same configuration as the first movable mirror 56 is formed on the second movable surface 525A. Fixed.

  An annular second electrode 542 is formed on the second electrode fixing surface 524 </ b> A that faces the first substrate 51 of the second connection holding portion 523 and is the bottom surface of the third circular groove portion 524 in plan view of the etalon. The second electrode 542 faces the first electrode 541 with a predetermined gap, and is formed with the same configuration as the first electrode 541. Here, the second electrode 542 and the first electrode 541 described above constitute an electrostatic actuator 54 as a gap variable portion according to the present invention.

A second electrode lead-out portion 542L extends from a part of the outer peripheral edge of the second electrode 542 toward the upper right direction of the etalon 5 in plan view of the etalon shown in FIG. Furthermore, a second electrode pad 542P is formed at the tip of the second electrode lead portion 542L, and is connected to the voltage control unit 6 in the same manner as the first electrode pad 541P.
When the electrostatic actuator 54 is driven, a voltage is applied to the second electrode pad 542P by the voltage controller 6 (see FIG. 1).

  Here, on the surface of the second substrate 52 facing the first substrate 51, the portion where the second circular groove 524 is not formed becomes the bonding surface 52 </ b> A in the second substrate 52. Similar to the bonding surface 51A of the first substrate 51, the bonding surface 52A is provided with a bonding layer 53 using polyorganosiloxane as a main material.

  In the etalon 5 having the first substrate 51 and the second substrate 52 described above, when a predetermined voltage is applied to the electrostatic actuator 54, the first connection holding portion 513 and the second connection holding portion 523 are bent, and the first movable portion. 512 and the second movable part 522 are relatively displaced. For this reason, the dimension of the gap G between mirrors is determined by the total displacement amount obtained by summing the displacement amounts of the movable parts 512 and 522.

(3-2. Configuration of voltage control unit)
The voltage control unit 6 controls the voltage applied to the first electrode 541 and the second electrode 542 of the electrostatic actuator 54 based on the control signal input from the control device 4.

[4. Configuration of control device]
The control device 4 controls the overall operation of the color measurement device 1. As the control device 4, for example, a general-purpose personal computer, a portable information terminal, other color measurement dedicated computer, or the like can be used.
As shown in FIG. 1, the control device 4 includes a light source control unit 41, a colorimetric sensor control unit 42, a colorimetric processing unit 43 (analysis processing unit), and the like.

The light source control unit 41 is connected to the light source device 2. Then, the light source control unit 41 outputs a predetermined control signal to the light source device 2 based on, for example, a user setting input, and causes the light source device 2 to emit white light with a predetermined brightness.
The colorimetric sensor control unit 42 is connected to the colorimetric sensor 3. The colorimetric sensor control unit 42 sets a wavelength of light received by the colorimetric sensor 3 based on, for example, a user's setting input, and outputs a control signal for detecting the amount of light received at this wavelength. Output to the colorimetric sensor 3. Thereby, the voltage control unit 6 of the colorimetric sensor 3 sets the applied voltage to the electrostatic actuator 54 so as to transmit only the wavelength of light desired by the user based on the control signal.
The colorimetric processing unit 43 controls the colorimetric sensor control unit 42 to change the inter-mirror gap of the etalon 5 to change the wavelength of light transmitted through the etalon 5. Further, the colorimetric processing unit 43 acquires the amount of light transmitted through the etalon 5 based on the light reception signal input from the light receiving element 31. Then, the colorimetric processing unit 43 calculates the chromaticity of the light reflected by the inspected object A based on the received light amount of each wavelength obtained as described above.

[5. Etalon Manufacturing Method)
Next, a method for manufacturing the etalon 5 will be described with reference to FIG.
In order to manufacture the etalon 5, the first substrate 51 and the second substrate 52 are manufactured, and the formed first substrate 51 and second substrate 52 are bonded together. Since the manufacturing process of each of the substrates 51 and 52 is the same, only the manufacturing process of the first substrate 51 will be described below.

A quartz glass substrate having a thickness of 200 μm, which is a material for forming the first substrate 51, is prepared, and both surfaces are precisely polished until the surface roughness Ra of the glass substrate becomes 1 nm or less. Then, as shown in FIG. 4A, a resist 61 is applied to the upper and lower surfaces of the first substrate 51.
Next, the applied resist 61 is exposed and developed by a photolithography method to form the first connection holding part 513 (first annular groove part 513A) and the first circular groove part 514 (first electrode fixing). The portion where the surface 514A) is formed is patterned. Then, the first substrate 51 is immersed in an etchant such as HF, and wet etching is performed until the upper surface and the lower surface of the first substrate 51 have a desired depth as shown in FIG. At this time, since it is known in advance how long the substrate is immersed in the etching solution to what depth dimension, the first substrate 51 is immersed in the etching solution for a predetermined time. The first annular groove 513A and the first circular groove 514 are formed.

Next, a resist 62 is newly applied to the bottom surface of the first circular groove 514. Then, the applied resist 62 is exposed and developed by a photolithography method, and a portion where the second circular groove 515 (first movable surface 515A) is formed is patterned. Next, as shown in FIG. 4C, wet etching is performed until the lower surface of the first substrate 51 has a desired depth to form a second circular groove 515.
Then, by removing the resists 61 and 62, a first connection holding portion 513, a first movable portion 512, a first electrode fixing surface 514A, and a first movable surface 515A having a thickness of 50 μm are formed.

  Next, a resist (lift-off pattern) is formed on the lower surface of the first substrate 51 other than the portion where the first electrode 541 is formed. Then, an ITO layer is formed by sputtering and the resist is removed. Thereby, as shown in FIG. 4D, the first electrode 541 is formed on the first electrode fixing surface 514A.

Next, a resist (lift-off pattern) is formed on the first movable surface 515A other than the portion where the first movable mirror 56 is formed. Then, by forming a TiO ₂ —SiO ₂ thin film by sputtering and removing the resist, as shown in FIG. 4E, the first movable surface 515A has a circular shape with a diameter of about 3 mm. A first movable mirror 56 is formed.
Thus, the first substrate 51 is formed.

Further, since the second substrate 52 is the same as the manufacturing process of the first substrate 51, the second substrate 52 is manufactured simultaneously with the manufacturing of the first substrate 51. Note that the second substrate 52 may be manufactured by repeating the manufacturing process of the first substrate 51.
And the manufactured 1st board | substrate 51 and the 2nd board | substrate 52 are joined. Specifically, O ₂ plasma treatment or UV treatment is performed in order to impart activation energy to the plasma polymerization film constituting the bonding layer 53 formed on the bonding surfaces 51A and 52A of the substrates 51 and 52, respectively. The O ₂ plasma treatment is performed for 30 seconds under the conditions of an O ₂ flow rate of 30 cc / min, a pressure of 27 Pa, and an RF power of 200 W. The UV treatment is performed for 3 minutes using excimer UV (wavelength 172 nm) as a UV light source. After the activation energy is applied to the plasma polymerization film, the two substrates 51 and 52 are aligned, and the bonding surfaces 51A and 52A are overlapped via the bonding layer 53 and a load is applied. Join.
Thus, the etalon 5 is manufactured.

[6. Effects of First Embodiment]
The etalon 5 according to the first embodiment described above has the following effects.
(1) Since the first substrate 51 and the second substrate 52 include movable parts 512 and 522 and connection holding parts 513 and 523, respectively, by applying a voltage to the electrodes 541 and 542, the connection holding parts 513 and 523 bends in the direction approaching each other, and the movable portions 512 and 522 are displaced in the direction approaching each other. For this reason, the total displacement amount of the displacement amounts of the first movable portion 512 and the second movable portion 522 may be the same as the displacement amount in the configuration in which the movable portion is provided only on the one substrate described above. That is, each displacement amount of each movable part 512, 522 may be half of the conventional displacement amount. Therefore, the gap variation due to external factors can be suppressed without reducing the thickness dimension and area of each of the connection holding portions 513 and 523, and the desired gap can be accurately set according to the applied voltage.

(2) Since the substrates 51 and 52 are formed of the same material and the same shape, the amount of bending of the first connection holding portion 513 and the second connection holding portion 523 when the external factor is applied becomes the same, and the first The displacement amount of the movable part 512 and the second movable part 522 is also the same. As a result, external factors such as the aforementioned vibration are added, and even if the movable portions 512 and 522 of the substrates 51 and 52 are displaced, the movable portions 512 and 522 are displaced in the same direction by the same displacement amount. , Gap variation can be further suppressed. Moreover, when manufacturing each board | substrate 51 and 52, the manufacturing process for every board | substrate 51 and 52 can be made the same, and a manufacturing process can be simplified.

(3) Since the first movable portion 512 and the second movable portion 522 are provided on each of the substrates 51 and 52, a desired gap is obtained by adding the displacement amounts of the first movable portion 512 and the second movable portion 522. Dimensions are determined. For this reason, the displacement amount of each movable part 512,522 may be half compared with the structure which provided the movable part only in one board | substrate like the past. Therefore, the voltage applied to the electrostatic actuator 54 for displacing the movable parts 512 and 522 may be small, and power saving can be achieved.
By the way, in order to save power, in the configuration in which the movable portion is provided only on one substrate, it may be possible to reduce the thickness dimension of the connection holding portion. However, the gap variation occurs due to the above-described external factors. . However, in this embodiment, it is possible to save power without reducing the thickness dimension or the like of the connection holding portion.

[Second Embodiment]
Hereinafter, a second embodiment according to the present invention will be described with reference to FIGS. 5 and 6.
The etalon 5A of the present embodiment has the same configuration as the etalon 5 of the first embodiment, but in the etalon 5A of the present embodiment, the connection holding portions 513 and 523 of the substrates 51 and 52 are cross sections shown in FIG. It is different in that it is formed at the center of each of the substrates 51 and 52 in view, and further, an antireflection film 58 and a dummy electrode 59 are formed.
In the following description, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

In the etalon 5A according to the present embodiment, the first substrate 51 and the second substrate are configured in the same shape as in the first embodiment. Therefore, hereinafter, the configuration of the first substrate 51 will be described, and the description of the configuration of the second substrate 52 will be omitted.
The first displacement portion 511 of the first substrate 51 includes a columnar first movable portion 512 to which the first movable mirror 56 is fixed, an annular first connection holding portion 513 in a plan view of the etalon, and a first movable portion. A first electrode fixing portion 516 having an annular shape in plan view of the etalon to which the first electrode 541 is fixed is provided between the 512 and the first connection holding portion 513.

  The first movable part 512 is formed to be larger than the thickness dimension of the first connection holding part 513 and smaller than the thickness dimension of the first electrode fixing part 516. The first movable portion 512 is formed by etching the circular groove portions 517 having the same shape and the same groove depth dimension on the upper surface and the lower surface of the first substrate 51, respectively, so that the substrate thickness in the sectional view shown in FIG. Formed in the center of direction. The first movable mirror 56 is formed on the bottom surface of the circular groove portion 517 facing the second substrate 52, and the first groove 51 is formed on the bottom surface of the circular groove portion 517 formed on the light incident side surface of the first substrate 51. An antireflection film 58 (second anti-bending film) made of the same material as the movable mirror 56 is formed.

  The antireflection film 58 prevents reflection of incident light and increases transmitted light, and is formed at a position overlapping the first movable mirror 56 in a plan view of the etalon. Further, the antireflection film 58 suppresses the bending generated in the first substrate 51 due to the fluctuation of the stress acting in the surface direction of the first movable mirror 56 due to the change of the environmental temperature. Specifically, when the environmental temperature changes, the linear expansion coefficient and the like of the first movable mirror 56 change, so that the internal stress of the first movable mirror 56 changes and the first substrate 51 is bent. Therefore, an antireflection film 58 is formed by using the same material as the first movable mirror 56 so that the internal stress is the same. Even when the environmental temperature changes, the linear expansion coefficient and the like of the antireflection film 58 change in the same manner, so that the internal stress of the antireflection film 58 changes. That is, if the film is formed so that the direction in which the internal stress of the antireflection film 58 acts is opposite to the direction in which the internal stress of the first movable mirror 56 acts, the inside of the first movable mirror 56 is formed. The bending moment acting on the first substrate 51 due to the stress and the bending moment acting on the first substrate 51 due to the internal stress of the antireflection film 58 are balanced, and the bending of the first substrate 51 can be suppressed.

  The first connection holding portion 513 is formed at the center in the thickness direction of the first substrate in the cross-sectional view shown in FIG. Therefore, the first substrate 51 has the same shape as the first annular groove 513A on the surface facing the second substrate 52, in addition to the first annular groove 513A formed on the light incident side surface, and An annular second annular groove 513B having the same groove depth is formed.

The first electrode fixing portion 516 has a predetermined thickness dimension by forming the circular groove portions 517 and the annular groove portions 513A and 513B described above and etching the upper surface and the lower surface of the first substrate 51. Formed. The first electrode fixing part 516 is formed to be larger than the thickness dimension of the first movable part 512 and smaller than the thickness dimension of the first connection holding part 513, and is centered in the substrate thickness direction in the sectional view shown in FIG. It is formed. Thereby, also in this embodiment, the gap dimension between the first electrode 541 and the second electrode 542 is formed smaller than the gap dimension between the first movable mirror 56 and the second movable mirror 57.
A ring-shaped first electrode 541 is formed on the surface of the first electrode fixing portion 516 facing the second substrate 52, and the first electrode fixing portion 516 has a first incident surface on the light incident side. A dummy electrode 59 (first deflection preventing film) having the same shape and the same material as the electrode 541 is formed. That is, the dummy electrode 59 is formed to overlap the first electrode 541 in the etalon plan view.
The dummy electrode 59 has a function similar to that of the antireflection film 58, and suppresses the bending generated in the first substrate 51 due to a change in the linear expansion coefficient of the first electrode 541 caused by a change in environmental temperature. Is. Since the specific action is the same as that of the antireflection film 58 described above, description thereof is omitted here.

  As described above, the first movable portion 512, the first connection holding portion 513, and the first electrode fixing portion 516 of the first substrate 51 of the present embodiment are formed at the center in the substrate thickness direction. The first displacement portion 511 is a straight line that passes through the center line in the substrate thickness direction of the first connection holding portion 513 and is parallel to the surfaces of the movable mirrors 56 and 57 in the cross-sectional view shown in FIG. Are symmetrical about the axis of symmetry. Further, since the second displacement portion 521 of the second substrate 52 has the same shape as the first displacement portion 511, the second displacement portion 521 similarly has a center line in the second substrate thickness direction in the second connection holding portion 523. And a line that is parallel to the plane of each of the movable mirrors 56 and 57 is formed symmetrically about a straight line.

Next, a method for manufacturing the etalon 5A will be described with reference to FIG. Hereinafter, only the manufacturing process of the first substrate 51 will be described, and the description of the manufacturing process of the second substrate 52 will be omitted.
A quartz glass substrate, which is a material for forming the first substrate 51, is prepared, and both surfaces are precisely polished until the surface roughness Ra of the glass substrate is 1 nm or less. Then, as shown in FIG. 7A, a resist 61 is applied to the upper and lower surfaces of the first substrate 51.
Next, the applied resist 61 is exposed and developed by a photolithography method, and a portion where the first movable portion 512 is formed is patterned. Then, the first substrate 51 is immersed in an etching solution such as HF, and wet etching is performed on the upper surface and the lower surface of the first substrate 51 as shown in FIG. As a result, circular groove portions 517A having dimensions smaller than the groove depth dimensions of the circular groove portions 517 are formed on the upper surface and the lower surface of the first substrate 51.

  Next, the applied resist 61 is further exposed and developed by a photolithography method, and a portion where the first electrode fixing portion 516 is formed is patterned. Then, as shown in FIG. 7C, wet etching is further performed until the circular groove 517A on the upper surface and the lower surface of the first substrate 51 has a desired depth, and the circular groove 517 having a desired groove depth is obtained. As a result, the first movable portion 512 is formed. In addition, the first electrode fixing portion 516 is formed by forming the circular groove portion 518 that is larger than the diameter of the circular groove portion 517 and coaxial with the circular groove portion 517.

Next, the applied resist 61 is further exposed and developed by a photolithography method, and a portion where the first connection holding portion 513 (annular groove portions 513A and 513B) is formed is patterned. Further, as shown in FIG. 7D, a resist 62 is newly applied to the first movable portion 512 and the first electrode fixing portion 516. Then, as shown in FIG. 7D, by performing wet etching on the upper surface and the lower surface of the first substrate 51, the annular groove portions 513A and 513B having desired depth dimensions are formed, and the thickness is increased. A first connection holding portion 513 having a thickness of 50 μm is formed.
Then, by removing the resists 61 and 62, the first connection holding part 513, the first electrode fixing part 516, and the first movable part 512 are formed.

  Next, a resist (lift-off pattern) is formed on portions other than the portion where the dummy electrode 59 is formed on the upper surface of the first substrate 51 and the portion where the first electrode 541 is formed on the lower surface. Then, an ITO layer is formed by sputtering and the resist is removed. Thereby, as shown in FIG. 7E, the first electrode 541 and the dummy electrode 59 are formed in the first electrode fixing portion 516.

Next, a resist (lift-off pattern) is formed on portions other than the portion where the anti-reflection film 58 is formed on the upper surface of the first movable portion 512 and the portion where the first movable mirror 56 is formed on the lower surface. Then, by forming a TiO ₂ —SiO ₂ thin film by sputtering and removing the resist, the first movable portion 512 has a circular shape with a diameter of about 3 mm, as shown in FIG. A first movable mirror 56 and an antireflection film 58 are formed.
Thus, the first substrate 51 is formed.
The second substrate 52 is manufactured by the same process as the process for manufacturing the first substrate 51 described above.
And each board | substrate 51,52 is joined similarly to the said 1st Embodiment, and etalon 5A is manufactured.

According to the etalon 5A according to the second embodiment described above, in addition to the effects (1) to (3) of the first embodiment, the following effects can be obtained.
According to the present embodiment, each of the substrates 51 and 52 passes through the center line in the substrate thickness direction of each of the connection holding portions 513 and 523 and is parallel to the surfaces of the movable mirrors 56 and 57 in the cross-sectional view. It is formed in line symmetry with a straight line along the axis of symmetry.
By the way, when each displacement part 511,521 is not formed in the above-mentioned line symmetry, when external factors, such as a vibration, are added and the displacement part 511,521 is vibrated in the surface direction of a board | substrate, each displacement part 511,521 is demonstrated. The force in the surface direction is applied. For this reason, the balance of the force which acts on each displacement part 511,521 becomes bad, and the gap between each mirror provided in each movable part 512,522 changes. In this embodiment, since each displacement part 511,521 is formed in the above-mentioned line symmetry, the force of the surface direction which acts on each displacement part 511,521 will be balanced, and it will displace to the surface direction of each board | substrate 51,52. Even when the portions 511 and 521 vibrate, fluctuations in the gap can be suppressed.
As described above, in the present embodiment, even when an external factor is added and each of the substrates 51 and 52 vibrates in the thickness direction or the surface direction, fluctuations in the gap can be suppressed.

  When the environmental temperature changes, as described above, the internal stresses of the movable mirrors 56 and 57 and the electrodes 541 and 542 formed on the substrates 51 and 52 fluctuate. There is a risk of bending. Therefore, in the present embodiment, dummy electrodes 59 of the same material and shape as the electrodes 541 and 542 and the substrates 51 and 52 on the opposite surfaces of the substrates 51 and 52 on which the electrodes 541 and 542 are formed are provided. An antireflection film 58 having the same material and the same shape as the movable mirrors 56 and 57 is provided on the opposite surface on which the movable mirrors 56 and 57 are formed. According to this, even when the environmental temperature changes, the bending moment acting on each of the substrates 51 and 52 due to the internal stress of each of the movable mirrors 56 and 57 and each of the electrodes 541 and 542, the dummy electrode 59, and the antireflection film The bending moment acting on each of the substrates 51 and 52 is balanced by the internal stress of 58, and the bending of each of the substrates 51 and 52 can be suppressed. In addition, since each of the substrates 51 and 52 has a symmetric structure, the bending of each of the substrates 51 and 52 is further suppressed, and the first movable mirror 56 and the second movable mirror 57 can be made parallel. Therefore, the resolution of the etalon 5A can be further improved.

[Modification of Embodiment]
It should be noted that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
In each of the above embodiments, the electrostatic actuator 54 is exemplified as the gap variable portion according to the present invention, but an electromagnetic actuator 55 as shown in FIG. 8 may be used. The electromagnetic actuator 55 includes an electromagnetic coil 551 through which a current flows and a permanent magnet 552 that moves relative to the electromagnetic coil 551 by electromagnetic force. The electromagnetic coil 551 is provided on the first electrode fixing surface 514A of the first substrate 51, the permanent magnet 552 is provided on the second electrode fixing surface 524A of the second substrate 52, and the electromagnetic coil 551 and the permanent magnet 552 are arranged to face each other. Has been. Then, a current is passed through the electromagnetic coil 551, and the electromagnetic coil 551 and the permanent magnet 552 move toward each other due to the electromagnetic force generated by the magnetic flux from the permanent magnet 552 and the interaction between the magnetic flux and the current. Each displacement part 511,521 changes.

  In each of the above-described embodiments, each of the connection holding portions 513 and 523 is an annular diaphragm. The portion 513 may be formed in a beam shape. Specifically, referring to a plan view of a modification to the etalon 5 of the first embodiment shown in FIG. 9, the first connection holding part 513 is a through hole that penetrates outside the first movable part 512 in the substrate thickness direction. 50 is formed by forming four places. The electrostatic actuator 54 in this configuration is formed in a ring shape outside the first movable mirror 56 on the surface of the first movable portion 512 on the side facing the second substrate 52.

In each of the embodiments described above, the electrostatic actuator 54 is formed in a single ring shape, but may be formed in a double ring shape as shown in FIG. Specifically, referring to a plan view of a modification of the etalon 5 of the first embodiment shown in FIG. 10, the etalon 5 has the first movable portion 512 and the second movable portion 522 on the surfaces facing each other. A first electrostatic actuator 71 (gap variable portion) formed in a ring shape outside the first movable mirror 56 and a second electrostatic actuator 72 (gap formed in a C ring shape outside the first electrostatic actuator 71 Variable portion).
Then, from a part of the outer peripheral edge of the inner first electrode 711 (electrode formed on the first substrate 51) of the first electrostatic actuator 71, the inner first electrode 711 toward the upper left direction of the etalon 5 in plan view. A one-electrode lead portion 711L is formed to extend. Furthermore, an inner first electrode pad 711P is formed at the tip of the inner first electrode lead portion 711L, and the inner first electrode pad 711P is connected to the voltage control unit 6 (see FIG. 1). Thus, when the first electrostatic actuator 71 is driven, a voltage is applied to the inner first electrode pad 711P by the voltage controller 6 (see FIG. 1).
On the other hand, from a part of the outer peripheral edge of the outer first electrode 721 (electrode formed on the first substrate 51) of the second electrostatic actuator 72, the outer side toward the lower right of the etalon 5 in plan view of the etalon. A first electrode lead portion 721L is formed to extend. Furthermore, an outer first electrode pad 721P is formed at the tip of the outer first electrode lead portion 721L, and the outer first electrode pad 721P is connected to the voltage control unit 6 (see FIG. 1). Thus, when the second electrostatic actuator 72 is driven, a voltage is applied to the outer first electrode pad 721P by the voltage controller 6 (see FIG. 1).
Further, the second electrodes 712 and 722 (electrodes formed on the second substrate 52) of the electrostatic actuators 71 and 72 are disposed to face the first electrodes 711 and 721, respectively. The second electrode lead portion 712L extends from a part of the outer peripheral edge of the inner second electrode 712 so as to straddle the outer second electrode 722 toward the upper right direction of the etalon 5 in plan view of the etalon. It is formed. Furthermore, a second electrode pad 712P is formed at the tip of the second electrode lead portion 712L, and the second electrode pad 712P is connected to the voltage controller 6 (see FIG. 1). Thus, when the electrostatic actuators 71 and 72 are driven, a voltage is applied to the second electrode pad 712P by the voltage control unit 6 (see FIG. 1).
In the above configuration, the applied voltage can be controlled by the voltage control unit 6 for each of the electrostatic actuators 71 and 72, so that a more accurate gap can be set.

In the above-described modification, the electrostatic actuators 71 and 72 are formed on the mutually opposing surfaces of the first movable portion 512 and the second movable portion 522, respectively, but the first connection holding portion 513 and the second connection holding portion are provided. 523 may be formed on the surfaces facing each other.
Further, in FIG. 10, a modification of the first embodiment is shown as a representative, but the same configuration described above can also be adopted in the etalon 5 </ b> A of the second embodiment. In this case, the dummy electrode may be formed in a double ring shape.

  In each of the above embodiments, the substrates 51 and 52 have the same shape, but the thickness dimension of the first substrate 51 is smaller than the thickness dimension of the second substrate 52 as in the etalon 5B shown in FIG. May be. Further, the thickness dimension of the first substrate 51 may be formed larger than the thickness dimension of the second substrate 52.

In the first embodiment, the first circular groove portion 514 is formed in the first substrate 51 and the third circular groove portion 524 is formed in the second substrate 52, thereby ensuring the gap G between the mirrors and the gap between the electrodes. However, the first circular groove 514 and the third circular groove 524 may not be formed. In this case, the thickness dimension of the bonding layer 53 of each of the substrates 51 and 52 may be increased to ensure the gap G between the mirrors and the gap between the electrodes. Thus, the process of forming the first circular groove part 514 and the third circular groove part 524 can be omitted, and the manufacturing process can be simplified.
In the second embodiment, each of the connection holding portions 513 and 523 is formed at the center in the thickness direction of each of the substrates 51 and 52, but may not be provided at the center.

In the manufacturing process of each substrate 51, 52 in each of the above embodiments, each electrode 541, 542 is formed before each movable mirror 56, 57, but each movable mirror 56, 57 is formed first. Also good.
In the above embodiments, the bonding surfaces 51A and 52A are bonded by the bonding layer 53, but the present invention is not limited to this. For example, the bonding layer 53 is not formed, the bonding surfaces 51A and 52A are activated, and the activated bonding surfaces 51A and 52A are bonded by overlapping and pressing, for example, so-called room temperature activation bonding. Any joining method may be used.

In each of the above-described embodiments, the colorimetric sensor 3 is exemplified as the optical module of the present invention, and the colorimetric device 1 including the colorimetric sensor 3 is illustrated as the optical analysis device. However, the present invention is not limited to this. . For example, a gas sensor that allows gas to flow into the sensor and detects light absorbed by the gas in the incident light may be used as the optical module of the present invention. A gas detector for analyzing and discriminating gas may be used as the optical analyzer of the present invention. Further, the optical analyzer may be a spectroscopic camera, a spectroscopic analyzer or the like provided with such an optical module.
It is also possible to transmit data using light of each wavelength by changing the intensity of light of each wavelength with time. In this case, light of a specific wavelength is spectrally separated by the etalon 5 provided in the optical module. By receiving light at the light receiving unit, data transmitted by light of a specific wavelength can be extracted, and light data of each wavelength is processed by an optical analyzer equipped with such an optical module for data extraction. By doing so, optical communication can also be implemented.

  DESCRIPTION OF SYMBOLS 1 ... Color measuring device (light analyzer), 3 ... Color measuring sensor (optical module) 5, 5A ... Etalon (wavelength variable interference filter), 31 ... Light receiving element (light receiving means), 43 ... Color measuring processing part (analysis) Processing unit), 51 ... first substrate, 52 ... second substrate, 54 ... electrostatic actuator (gap variable unit), 55 ... electromagnetic actuator (gap variable unit), 56 ... first movable mirror (first reflective film), 57 ... second movable mirror (second reflection film), 58 ... antireflection film (second deflection prevention film), 59 ... dummy electrode (first deflection prevention film), 511 ... first displacement portion, 512 ... first movement , 521... First connection holding part, 521... Second displacement part, 522... Second movable part, 523... Second connection holding part, 541.

  The wavelength variable interference filter according to the present invention includes a first substrate, a second substrate disposed so as to face the first substrate, and a first mirror disposed between the first substrate and the second substrate. A second mirror disposed between the first mirror and the second substrate; a first electrode disposed between the first substrate and the second substrate; the first electrode; A second electrode disposed between the second substrate and the first mirror being displaced toward the second mirror by applying a voltage between the first electrode and the second electrode. And the second mirror is displaced toward the first mirror.
  In the wavelength tunable interference filter according to the aspect of the invention, the first substrate includes a first movable portion and a first connection holding portion that holds the first movable portion, and the first mirror includes the first substrate. When the second substrate side is viewed from the side, it preferably overlaps the first movable part.
  In the wavelength variable interference filter according to the aspect of the invention, it is preferable that the first movable portion has a thickness dimension larger than that of the first connection holding portion.
  In the wavelength tunable interference filter according to the aspect of the invention, it is preferable that the second mirror overlaps the first movable portion when the second substrate side is viewed from the first substrate side.
  In the wavelength tunable interference filter according to the aspect of the invention, it is preferable that the first electrode overlaps the first connection holding portion when the second substrate side is viewed from the first substrate side.
  In the variable wavelength interference filter according to the aspect of the invention, the second substrate includes a second movable portion and a second connection holding portion that holds the second movable portion, and the second mirror includes the first substrate. When viewed from the side of the second substrate, it is preferable to overlap the second movable portion.
  In the wavelength variable interference filter according to the aspect of the invention, it is preferable that the second movable portion has a thickness dimension larger than that of the second connection holding portion.
  The wavelength tunable interference filter according to the present invention includes a first mirror, a second mirror disposed so as to face the first mirror, and electrostatic attraction to displace the first mirror toward the second mirror, And a gap variable section that displaces the second mirror toward the first mirror.
  The optical module of the present invention includes the above-described wavelength variable interference filter.
  An optical analyzer according to the present invention includes the above-described variable wavelength interference filter.

A wavelength tunable interference filter according to a reference technique of the present invention includes a first substrate, a second substrate facing the first substrate, and a first reflection provided on a surface of the first substrate facing the second substrate. A film, a second reflective film provided on the second substrate and opposed to the first reflective film with a predetermined gap, and a gap dimension between the first reflective film and the second reflective film. The first substrate includes a first movable portion provided with the first reflective film, and a first movable portion that holds the first movable portion movably in the thickness direction of the first substrate. A second holding portion provided with the second reflective film, and a second connecting portion for holding the second movable portion movably in the thickness direction of the second substrate. A holding portion, and the gap variable portion relatively moves the first movable portion and the second movable portion relative to each other. It is to movement, characterized in that changing the dimension of the gap.
By the way, in order to displace the movable part by a predetermined displacement amount, for example, as described above, it is necessary to reduce the thickness dimension of the diaphragm or increase the area of the diaphragm in plan view. For this reason, the gap may vary due to external factors such as vibration. However, according to the above-described reference technique , the first substrate and the second substrate include the first and second movable parts and the first and second connection holding parts, respectively, so that external factors such as vibration are added. The first and second movable parts are displaced in the same direction, and the variation of the gap dimension can be reduced. Further, the connection holding portions are bent in the direction approaching each other by the gap variable portion, and the movable portions are displaced in the direction approaching each other. For this reason, since the sum total of the displacement amount of a 1st movable part and a 2nd movable part should just be the same as the conventional displacement amount, the displacement amount of each movable part can be made smaller than before. That is, by making the thickness dimension and area of the connection holding part of the above-mentioned reference technology larger than the thickness dimension and area of the conventional diaphragm described above, it is possible to suppress the fluctuation of the gap due to external factors, and according to the applied voltage It can be accurately set to a desired gap.

In the wavelength tunable interference filter according to the above-described reference technology, the first substrate includes a first displacement unit including the first movable unit and the first connection unit, and the second substrate includes the second movable unit. In addition, it is preferable that the second displacement portion includes the second connecting portion, and the first displacement portion and the second displacement portion are formed of the same material and in the same shape.

According to the above reference technique , the first displacement portion of the first substrate and the second displacement portion of the second substrate are formed of the same material and in the same shape, so that the first connection holding when an external factor is applied. The amount of bending of the first and second connection holding portions is the same, and the amount of displacement of the first movable portion and the second movable portion is also the same. Thereby, even if external factors, such as the vibration mentioned above, are added and each movable part is displaced, since each movable part is displaced by the same displacement amount in the same direction, the fluctuation | variation of a gap can be suppressed more.

In the wavelength tunable interference filter according to the above-described reference technique, the first displacement portion passes through a center line in the thickness direction of the first substrate in the first connection holding portion in a cross-sectional view taken in the substrate thickness direction, and The second displacing portion is formed in line symmetry with a straight line along a direction parallel to the first reflecting film as a symmetric axis, and the second displacement portion in the second connection holding portion in a cross-sectional view in the thickness direction of the second substrate. It is preferable that the line is symmetrical with respect to a straight line passing through the center line in the substrate thickness direction and parallel to the second reflective film.

According to the above-described reference technique , each displacement portion is formed in line symmetry with a straight line passing through the center line of the connection holding portion in the substrate thickness direction and parallel to each reflection film as a symmetry axis.
By the way, when the displacement part is not formed in line symmetry as described above, external factors such as vibration are applied, and when the displacement part vibrates in the surface direction of the substrate, a force in the surface direction is applied to each displacement part. For this reason, the balance of the force which acts on each displacement part worsens, and the gap between each reflecting film provided in each movable part fluctuates. Therefore, in the above-described reference technique , each displacement portion is formed in the above-described line symmetry, so that the forces in the surface direction acting on each displacement portion are balanced, and even when the displacement portion vibrates in the surface direction of the substrate, the gap Can be suppressed.
As described above , in the above-described reference technique , gap variation can be suppressed even when an external factor such as vibration in the thickness direction and surface direction of the substrate is applied.

In the wavelength tunable interference filter according to the above-described reference technique, it is preferable that the first substrate and the second substrate are formed of the same material and in the same shape.

According to the above-mentioned reference technique , since each substrate is formed in the same shape with the same material, in addition to suppressing the above-described gap variation, when manufacturing each substrate, the manufacturing process for each substrate can be the same, The manufacturing process can be simplified.

In the wavelength tunable interference filter according to the above-described reference technique, the gap variable unit includes a first electrode provided on a surface of the first substrate facing the second substrate, and a second substrate facing the first electrode. A surface of the first substrate opposite to the surface on which the first electrode is provided, and a surface of the second substrate on which the second electrode is provided. The opposite surface is provided with a first anti-bending film made of the same material as the first electrode or the second electrode, and the surface of the first substrate provided with the first reflective film. The second surface made of the same material as the first reflective film or the second reflective film is formed on the opposite surface and the surface opposite to the surface on which the second reflective film of the second substrate is provided. It is preferable that a deflection preventing film is provided.

By the way, when the environmental temperature changes, the linear expansion coefficient depending on the temperature of the reflective film and the electrode formed on each substrate changes, so that the internal stress of the reflective film and the electrode changes. For this reason, there exists a possibility that a board | substrate may bend by a temperature change.
In the above-mentioned reference technique , the first deflection preventing film made of the same material as the electrode on the surface opposite to the surface on which the electrodes are formed on the substrate, and the surface on the opposite side to the surface on which the reflective films are formed on the substrate. A second anti-bending film made of the same material as the reflective film is provided. According to this, even when the environmental temperature changes, the force exerted on the substrate by the internal stress of the electrode and the reflective film balances the force exerted on the substrate by the first and second anti-bending films, and the substrate is bent. Can be suppressed. Therefore, since the first reflection film and the second reflection film can be made parallel, the resolution of the wavelength variable interference filter can be improved.

An optical module according to a reference technique of the present invention includes the above-described wavelength tunable interference filter and light receiving means for receiving inspection target light transmitted through the wavelength tunable interference filter.

According to the reference technology, like the variable wavelength interference filter according to the reference technique, since the variation of the gap by an external factor such as vibration can be suppressed, the desired gap variable wavelength interference filter corresponding to the applied voltage It can be set accurately. Therefore, the optical module can measure with high accuracy by the light receiving means.

An optical analyzer according to a reference technique of the present invention includes the above-described optical module, and an analysis processing unit that analyzes optical characteristics of the inspection target light based on light received by the light receiving unit of the optical module. It is characterized by that.

According to the reference technique, since an optical module having a variable wavelength interference filter according to the reference technique, can be performed with high accuracy measurement, by performing the optical analysis process based on the measurement result, accurate spectral An optical analyzer capable of measuring characteristics can be realized.

Claims (7)

A first substrate;
A second substrate facing the first substrate;
A first reflective film provided on a surface of the first substrate facing the second substrate;
A second reflective film provided on the second substrate and facing the first reflective film with a predetermined gap;
A gap variable portion that changes the size of the gap between the first reflective film and the second reflective film;
The first substrate includes a first movable portion provided with the first reflective film, and a first connection holding portion that holds the first movable portion movably in the thickness direction of the first substrate,
The second substrate includes a second movable portion provided with the second reflective film, and a second connection holding portion that holds the second movable portion movably in the thickness direction of the second substrate,
The variable wavelength interference filter according to claim 1, wherein the gap variable section changes the size of the gap by relatively moving the first movable section and the second movable section. The tunable interference filter according to claim 1,
The first substrate includes a first displacement part configured by the first movable part and the first connection part,
The second substrate includes a second displacement part configured by the second movable part and the second connection part,
The variable wavelength interference filter, wherein the first displacement portion and the second displacement portion are formed of the same material and in the same shape. The tunable interference filter according to claim 2,
The first displacement portion passes through a center line of the first connection holding portion in the thickness direction of the first substrate and is parallel to the surface of the first reflective film in a cross-sectional view taken along the substrate thickness direction. Is formed in line symmetry with a straight line along
The second displacement portion passes through the center line of the second connection holding portion in the thickness direction of the second substrate and is on the surface of the second reflective film in a cross-sectional view taken along the thickness direction of the second substrate. A wavelength tunable interference filter, characterized by being formed in line symmetry with a straight line along a parallel direction as a symmetry axis. In the wavelength variable interference filter according to any one of claims 1 to 3,
The variable wavelength interference filter, wherein the first substrate and the second substrate are formed of the same material and in the same shape. In the wavelength variable interference filter according to any one of claims 1 to 4,
The gap variable part is
A first electrode provided on a surface of the first substrate facing the second substrate;
A second electrode provided on the second substrate so as to face the first electrode;
The surface of the first substrate opposite to the surface provided with the first electrode and the surface of the second substrate opposite to the surface provided with the second electrode are respectively provided with the first electrode. Alternatively, a first bending prevention film made of the same material as the second electrode is provided,
The surface of the first substrate opposite to the surface provided with the first reflective film and the surface of the second substrate opposite to the surface provided with the second reflective film are provided with the first A wavelength tunable interference filter, comprising a reflective film or a second anti-bending film made of the same material as the second reflective film. The wavelength variable interference filter according to any one of claims 1 to 5,
An optical module comprising: a light receiving unit configured to receive inspection target light transmitted through the wavelength variable interference filter. An optical module according to claim 6;
An optical analysis apparatus comprising: an analysis processing unit that analyzes optical characteristics of the inspection target light based on light received by the light receiving unit of the optical module.

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