JP2015039804A - Liquid jet head and liquid jet device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid jet head which makes a secure seal with a seal member and thereby achieves high quality discharge in which liquid discharge failure is inhibited, and to provide a liquid jet device.SOLUTION: A liquid jet head includes: a head chip 2 which jets an ink from a liquid jet surface 20a; an upstream passage member 210 provided with an upstream passage 500; a downstream passage member 220 where an ink downstream passage 600 connected with the head chip 2 is provided; and a seal member 230 including a base part 235 where a communication passage 232 is formed and a wall part 236 annularly formed on a surface of the base part 235 which faces the upstream passage member 210. A groove part 219 into which the wall part 236 is inserted is formed at the upstream passage member 210. The wall part 236 inserted into the groove part 219 is sandwiched by the upstream passage member 210 and the downstream passage member 220.

Description

  The present invention relates to a liquid ejecting head and a liquid ejecting apparatus that eject liquid from nozzles, and more particularly to an ink jet recording head and an ink jet recording apparatus that eject ink as liquid.

  A typical example of a liquid ejecting head that ejects droplets is an ink jet recording head that ejects ink droplets. The ink jet recording head includes, for example, a head main body that discharges ink droplets from nozzles and a flow that supplies ink from a liquid storage unit such as an ink cartridge that is fixed to the head main body and stores ink to each head main body. The thing provided with a road member is proposed (for example, refer to patent documents 1).

  The flow path member of such an ink jet recording head includes a first flow path member that holds a plurality of head main bodies, and a second flow path that is fixed on the opposite side of the surface of the first flow path member that fixes the head main body. A flow path member and a seal member sandwiched between the first flow path member and the second flow path member are provided. The seal member is made of an annular elastic material such as a sheet, and is provided with a communication path that communicates the first flow path provided in the first flow path member and the second flow path provided in the second flow path member. ing.

  The seal member is pressed by the first flow path member and the second flow path member in a state where the communication path communicates the first flow path and the second flow path. By such a sealing member, the first flow path and the second flow path are communicated in a sealed state.

  Further, in such an annular seal member, a wall portion protruding toward the first flow path member or the second flow path member is formed on the outer peripheral portion. Since the wall portion is pressed and in close contact with the first flow path member and the second flow path member in the height direction, the space inside the seal member is blocked from the outside.

  By blocking the space inside the seal member from the outside, it is possible to prevent air from entering the gaps between the first flow path, the communication path, and the second flow path, and generating bubbles in the ink. Even if the solvent in the ink is volatilized and discharged from the gap to the space inside the seal member, the space inside the seal member is blocked from the outside, so that the solvent volatilization is suppressed to a certain amount. Can do.

JP 2011-207180 A

  However, when the pressure that presses the wall portion by the first flow path member and the second flow path member becomes larger, or when a larger negative pressure or positive pressure is applied to the space inside the seal member, the wall There is a risk that the part may be tilted or deformed. A phenomenon (leak) in which the space inside the seal member communicates with the outside occurs due to such inclination of the wall portion.

If a leak occurs, air may enter the gaps between the first flow path, the communication path, and the second flow path, and bubbles may be generated in the ink, which may cause ink droplet ejection failure. Further, when a leak occurs, the volatile matter of the ink solvent is discharged to the outside through the gap, so that the viscosity of the ink is increased and there is a possibility of causing ejection failure.
Such a problem is not limited to the ink jet recording head, and similarly exists in a liquid ejecting head that ejects another liquid.

  In view of such circumstances, the present invention provides a liquid ejecting head and a liquid ejecting apparatus that can perform high-quality ejection in which defective ejection of liquid is suppressed by ensuring sealing by a sealing member. For the purpose.

An aspect of the present invention that solves the above problems includes a head chip that ejects liquid from a liquid ejection surface, a first flow path member provided with a first flow path for liquid, the head chip, and the head chip. A second flow path member provided with a second flow path for the liquid connected to the base, a base portion in which a communication path connecting the first flow path and the second flow path is formed, and the base section A seal member having an annular wall on a surface facing at least one of the first flow path member or the second flow path member, and the first flow path member or the second flow path member. A groove portion into which the wall portion is inserted is formed in at least one of the wall portions, and the wall portion inserted into the groove portion is sandwiched between the first flow path member and the second flow path member. It is in the liquid jet head.
In such an aspect, the wall portion of the seal member is press-fitted into the groove portion formed in at least one of the first flow path member or the second flow path member, so that the seal by the seal member is caused due to the inclination or deformation of the wall portion. The destruction of is suppressed. As described above, since the breakage of the seal is suppressed, it is possible to provide a liquid ejecting head capable of suppressing a liquid discharge failure due to a seal failure and discharging a high-quality liquid.

  Here, it is preferable that the wall portion is press-fitted into the groove portion. According to this, the side surface of the wall portion can be reliably brought into contact with the inner surface of the groove portion, and the sealing by the sealing member can be made more reliable.

  Moreover, it is preferable that the opening in which the said wall part of the said groove part is inserted is chamfered. According to this, the wall portion can be guided into the groove portion, and the assembly operation of the liquid ejecting head can be facilitated.

  Moreover, it is preferable that the said base part is formed in plate shape, and the said wall part is formed in the outer periphery of the said base part. According to this, it can suppress that a sealing member twists.

  In addition, at least one of the first flow path member and the second flow path member is formed on the surface facing the base portion, inside the groove portion and the groove portion, and contacts the base portion. It is preferable that a groove forming part and a second groove forming part formed outside the groove part and projecting toward the base part side than the first groove forming part are formed. According to this, it is suppressed more reliably that a wall part inclines or deform | transforms inside and outside.

Furthermore, another aspect of the invention is a liquid ejecting apparatus including the liquid ejecting head described in the above aspect.
In such an aspect, there is provided a liquid ejecting apparatus that can perform high-quality ejection in which defective liquid ejection is suppressed by ensuring sealing by the sealing member.

2 is an exploded perspective view of a head chip according to Embodiment 1. FIG. 4 is a plan view of the head chip according to Embodiment 1. FIG. FIG. 3 is a cross-sectional view of the head chip according to the first embodiment. FIG. 3 is an exploded perspective view of the recording head according to the first embodiment. FIG. 3 is a cross-sectional view of the recording head according to the first embodiment. It is sectional drawing to which the principal part of FIG. 5 was expanded. FIG. 3 is an enlarged cross-sectional view of a wall portion of the recording head according to the first embodiment. FIG. 4 is a plan view of the upstream flow path member according to Embodiment 1 on the seal member side. 1 is a schematic diagram illustrating an example of an ink jet recording apparatus.

<Embodiment 1>
Hereinafter, the present invention will be described in detail based on embodiments. An ink jet recording head is an example of a liquid ejecting head, and is also simply referred to as a recording head.

  First, an example of a head chip provided in the recording head according to the present embodiment will be described. FIG. 1 is an exploded perspective view of a head chip according to the present embodiment, FIG. 2 is a plan view of the head chip, and FIG. 3 is a cross-sectional view of the head chip.

  As illustrated, the head chip 2 includes a plurality of members such as a head main body 11 and a case member 40 fixed to one side of the head main body 11. The head main body 11 is provided on the opposite side of the flow path forming substrate 10, the communication plate 15 provided on one side of the flow path forming substrate 10, and the flow path forming substrate 10 of the communication plate 15. The nozzle plate 20, the protective substrate 30 provided on the side opposite to the communication plate 15 of the flow path forming substrate 10, and the compliance substrate 45 provided on the surface side of the communication plate 15 on which the nozzle plate 20 is provided are provided. To do.

The flow path forming substrate 10 constituting the head body 11 is made of a metal such as stainless steel or Ni, a ceramic material typified by ZrO ₂ or Al ₂ O ₃ , a glass ceramic material, an oxide such as MgO or LaAlO _3. Can be used. In the present embodiment, the flow path forming substrate 10 is made of a silicon single crystal substrate. The flow path forming substrate 10 is subjected to anisotropic etching from one side so that the pressure generating chambers 12 partitioned by the plurality of partition walls are arranged in a direction in which a plurality of nozzles 21 for discharging ink are arranged in parallel. It is installed side by side.

  Hereinafter, this direction is referred to as a direction in which the pressure generating chambers 12 are arranged side by side or a first direction X. Further, the flow path forming substrate 10 is provided with a plurality of rows in which the pressure generation chambers 12 are arranged in parallel in the first direction X, and in this embodiment, two rows. The direction in which a plurality of rows of pressure generation chambers 12 are provided is hereinafter referred to as a second direction Y. Furthermore, a direction orthogonal to the first direction X and the second direction Y is referred to as an ink droplet (droplet) ejection direction, or a third direction Z. Incidentally, the flow path forming substrate 10, the communication plate 15, and the nozzle plate 20 are stacked in the third direction Z.

  Further, the flow path forming substrate 10 has an opening area narrower than that of the pressure generation chamber 12 on one end portion side in the second direction Y of the pressure generation chamber 12, and the flow path resistance of ink flowing into the pressure generation chamber 12. A supply path or the like for providing the above may be provided.

  Further, the communication plate 15 and the nozzle plate 20 are sequentially stacked on one surface side of the flow path forming substrate 10. That is, a communication plate 15 provided on one surface of the flow path forming substrate 10 and a nozzle plate 20 having a nozzle 21 provided on the opposite surface side of the communication plate 15 from the flow path forming substrate 10 are provided.

  The communication plate 15 is provided with a nozzle communication path 16 that communicates the pressure generating chamber 12 and the nozzle 21. The communication plate 15 has a larger area than the flow path forming substrate 10, and the nozzle plate 20 has a smaller area than the flow path forming substrate 10. By providing the communication plate 15 in this manner, the nozzle 21 of the nozzle plate 20 and the pressure generating chamber 12 can be separated from each other, so that the ink in the pressure generating chamber 12 is the amount of moisture in the ink generated by the ink near the nozzle 21 Less susceptible to thickening due to evaporation. Further, since the nozzle plate 20 only needs to cover the opening of the nozzle communication passage 16 that communicates the pressure generating chamber 12 and the nozzle 21, the area of the nozzle plate 20 can be made relatively small, and the cost can be reduced. Can do. In the present embodiment, the surface on which the nozzles 21 of the nozzle plate 20 are opened and ink droplets are ejected is referred to as a liquid ejecting surface 20a.

The communication plate 15 is provided with a first manifold portion 17 and a second manifold portion 18 that constitute a part of the manifold 100.
The first manifold portion 17 is provided through the communication plate 15 in the thickness direction (the stacking direction of the communication plate 15 and the flow path forming substrate 10 (third direction Z)). The second manifold portion 18 is provided to open to the nozzle plate 20 side of the communication plate 15 without penetrating the communication plate 15 in the thickness direction.

  Further, the communication plate 15 is provided with a supply communication passage 19 that communicates with one end portion in the second direction Y of the pressure generation chamber 12 for each pressure generation chamber 12. The supply communication path 19 communicates the second manifold portion 18 and the pressure generation chamber 12. That is, in the present embodiment, the supply communication path 19, the pressure generation chamber 12, and the nozzle communication path 16 are provided as individual flow paths communicating with the nozzle 21 and the second manifold portion 18.

  As the communication plate 15, a metal such as stainless steel or nickel (Ni), or a ceramic such as zirconium (Zr) can be used. The communication plate 15 is preferably made of a material having the same linear expansion coefficient as the flow path forming substrate 10. That is, when a material having a linear expansion coefficient that is significantly different from that of the flow path forming substrate 10 is used as the communication plate 15, warping due to a difference in linear expansion coefficient between the flow path forming substrate 10 and the communication plate 15 due to heating or cooling. Will occur. In this embodiment, by using the same material as the flow path forming substrate 10 as the communication plate 15, that is, a silicon single crystal substrate, it is possible to suppress the occurrence of warping due to heat, cracking due to heat, peeling, and the like.

  In the nozzle plate 20, nozzles 21 communicating with the pressure generation chambers 12 through the nozzle communication passages 16 are formed. Specifically, nozzles 21 that eject the same type of liquid (ink) are arranged in parallel in the first direction X, and the row of nozzles 21 arranged in parallel in the first direction X is the second. Two rows are formed in the direction Y.

  In addition, the row | line | column (nozzle group) of the nozzle 21 is not limited to what was linearly arranged in the 1st direction X, for example, the nozzle 21 arranged in the 1st direction X is 2nd direction alternately. You may be comprised by what is arrange | positioned in the position shifted | deviated to Y, what is arrange | positioned in what is called zigzag form. Further, the nozzle group may be configured by a plurality of nozzles 21 arranged in the first direction X being shifted in the second direction Y for every plurality of nozzles 21. That is, the nozzle group only needs to be composed of a plurality of nozzles 21 provided on the liquid ejection surface 20a, and the arrangement thereof is not particularly limited.

  However, generally, when trying to arrange a plurality of nozzles 21 at a high density (multiple nozzles), the nozzles 21 are elongated in the direction in which the nozzles 21 are arranged in parallel (first direction X). That is, in the head chip 2, the first direction X is usually the longitudinal direction, and the second direction Y is usually the short direction.

  The pressure generating chambers 12 are arranged corresponding to the nozzles 21 and a plurality of pressure generating chambers in the first direction X are provided in order to provide pressure generating means for causing pressure changes in the ink corresponding to the pressure generating chambers 12. 12 and a plurality of piezoelectric actuators 130 as pressure generating means are arranged side by side. As will be described in detail later, the wiring member 121 that supplies electric signals to a plurality of piezoelectric actuators 130 formed at a high density is arranged in parallel with the piezoelectric actuators 130 on the substrate, that is, the first direction X (longitudinal direction). This space is used to connect to the piezoelectric actuator 130. Accordingly, the width of the wiring member 121 is arranged along the parallel direction of the piezoelectric actuators 130. That is, the width direction of the sheet-like wiring member 121 is set as the direction in which the piezoelectric actuators 130 are arranged in parallel, so that the piezoelectric actuator 130 and the wiring member 121 can be connected well even when a large number of piezoelectric actuators 130 are arranged at high density. It can be carried out.

  As such a nozzle plate 20, for example, a metal such as stainless steel (SUS), an organic substance such as a polyimide resin, a silicon single crystal substrate, or the like can be used. In addition, by using a silicon single crystal substrate as the nozzle plate 20, the linear expansion coefficients of the nozzle plate 20 and the communication plate 15 are made equal, and the occurrence of warpage due to heating or cooling, cracks due to heat, peeling, and the like are suppressed. can do.

  On the other hand, a diaphragm 50 is formed on the surface of the flow path forming substrate 10 opposite to the communication plate 15. In the present embodiment, an elastic film 51 made of silicon oxide provided on the flow path forming substrate 10 side and an insulator film 52 made of zirconium oxide provided on the elastic film 51 are provided as the diaphragm 50. I made it. The liquid flow path such as the pressure generation chamber 12 is formed by anisotropically etching the flow path forming substrate 10 from one side (the side where the nozzle plate 20 is bonded). The other surface of the liquid flow path is defined by the elastic film 51.

  In addition, the first electrode 60, the piezoelectric layer 70, and the second electrode 80 are stacked on the insulator film 52 of the vibration plate 50 to form the piezoelectric actuator 130. Here, the piezoelectric actuator 130 refers to a portion including the first electrode 60, the piezoelectric layer 70, and the second electrode 80. In general, one of the electrodes of the piezoelectric actuator 130 is used as a common electrode, and the other electrode and the piezoelectric layer 70 are patterned for each pressure generating chamber 12. In addition, here, a portion that is configured by any one of the patterned electrodes and the piezoelectric layer 70 and in which piezoelectric distortion is generated by applying a voltage to both electrodes is referred to as a piezoelectric active portion. In the present embodiment, the first electrode 60 is used as a common electrode for the piezoelectric actuator 130 and the second electrode 80 is used as an individual electrode for the piezoelectric actuator 130. However, there is no problem even if this is reversed for the convenience of the drive circuit and wiring. In the above-described example, since the first electrode 60 is continuously provided across the plurality of pressure generating chambers 12, the first electrode 60 functions as a part of the diaphragm, but of course, the present invention is not limited thereto. For example, the first electrode 60 may function as a diaphragm without providing the elastic film 51 and the insulator film 52 described above. Further, the piezoelectric actuator 130 itself may substantially double as a diaphragm. However, when the first electrode 60 is provided directly on the flow path forming substrate 10, it is preferable to protect the first electrode 60 with an insulating protective film or the like so that the first electrode 60 and the ink are not electrically connected. That is, in the present embodiment, the configuration in which the first electrode 60 is provided on the substrate (the flow path forming substrate 10) via the vibration plate 50 is illustrated, but the present invention is not particularly limited thereto. You may make it provide the 1st electrode 60 directly on a board | substrate, without providing. That is, you may make it the 1st electrode 60 act as a diaphragm. That is, the term “on the substrate” includes both the state immediately above the substrate and a state in which another member is interposed (upward).

  Furthermore, each second electrode 80 that is an individual electrode of the piezoelectric actuator 130 is drawn from the vicinity of the end opposite to the supply communication path 19 and extended to the diaphragm 50. For example, One end portions of lead electrodes 90 made of gold (Au) or the like are connected to each other. Further, the other end of the lead electrode 90 is connected to a wiring member 121 provided with a drive circuit 120 for driving a piezoelectric actuator 130 which is a pressure generating means described later. The wiring member 121 can be a flexible (flexible) sheet, such as a COF substrate. Note that the driving circuit 120 may not be provided in the wiring member 121. That is, the wiring member 121 is not limited to the COF substrate, and may be FFC, FPC, or the like.

  The other end portion of the lead electrode 90 connected to the wiring member 121 is provided in parallel in the first direction X. Incidentally, the other end of the lead electrode 90 may be extended to one end in the first direction X of the flow path forming substrate 10 and the other end of the lead electrode 90 may be arranged in parallel in the second direction Y. Although it is conceivable, a space for routing the lead electrode 90 is required, and the recording head becomes large and expensive. In addition, if a large number of piezoelectric actuators 130 are provided at a high density and the number of nozzles is increased, the width of the lead electrode 90 is reduced and the electrical resistance is increased. For this reason, when the lead electrode 90 is routed, the electrical resistance may be further increased and the piezoelectric actuator 130 may not be driven normally. In the present embodiment, the other end of the lead electrode 90 is extended between two rows of piezoelectric actuators 130 arranged in parallel in the first direction X, and the other end of the lead electrode 90 is connected in the first direction. By arranging in parallel with X, the recording head 1 can be reduced in size and cost without increasing in size, and the electrical resistance of the lead electrode 90 is suppressed and the piezoelectric actuator 130 is increased in density. In addition, a large number of nozzles can be provided.

  In the present embodiment, in the second direction Y, the other end portion of the lead electrode 90 is provided between the rows of the piezoelectric actuators 130, and the lead electrode 90 and the wiring member 121 are connected between the rows of the piezoelectric actuators 130. Since the connection is made, one wiring member 121 is connected to the two rows of piezoelectric actuators 130 via the lead electrodes 90. Of course, the number of the wiring members 121 is not limited to this, and the wiring members 121 may be provided for each row of the piezoelectric actuators 130. By providing one wiring member 121 in a row of two piezoelectric actuators 130 as in this embodiment, the space for connecting the wiring member 121 and the lead electrode 90 can be reduced, and the recording head 1 can be downsized. Can be achieved. Incidentally, when the wiring member 121 is provided for each row of the piezoelectric actuators 130, the lead electrode 90 may be extended to the side opposite to the row of the piezoelectric actuators 130. In such a configuration, the lead electrode and the wiring member are provided. And an extra space for connecting the two to the case member and the like, and two areas for drawing the wiring member 121 to the case member or the like. That is, by providing the lead electrode 90 between two rows of piezoelectric actuators 130 as in this embodiment, it is possible to simultaneously connect to two rows of piezoelectric actuators 130 with one wiring member 121. Thus, the sheet-like wiring member 121 connected to the lead electrode 90 is arranged along the first direction X in the width direction.

  A protective substrate 30 having substantially the same size as the flow path forming substrate 10 is bonded to the surface of the flow path forming substrate 10 on the side of the piezoelectric actuator 130 that is a pressure generating means. The protective substrate 30 has a holding portion 31 that is a space for protecting the piezoelectric actuator 130. The holding unit 31 is provided independently for each row composed of the piezoelectric actuators 130 arranged in parallel in the first direction X, and between the two holding units 31 (second direction Y), A through hole 32 penetrating in the thickness direction is provided. The other end of the lead electrode 90 extends so as to be exposed in the through hole 32, and the lead electrode 90 and the wiring member 121 are electrically connected in the through hole 32.

  In addition, a case member 40 is fixed to the head main body 11 having such a configuration. The case member 40 defines a manifold 100 communicating with the plurality of pressure generating chambers 12 together with the head main body 11. The case member 40 has substantially the same shape as the communication plate 15 described above in a plan view, and is bonded to the protective substrate 30 and is also bonded to the communication plate 15 described above. Specifically, the case member 40 has a recess 41 having a depth in which the flow path forming substrate 10 and the protective substrate 30 are accommodated on the protective substrate 30 side. The concave portion 41 has an opening area larger than the surface of the protective substrate 30 bonded to the flow path forming substrate 10. The opening surface on the nozzle plate 20 side of the recess 41 is sealed by the communication plate 15 in a state where the flow path forming substrate 10 and the like are accommodated in the recess 41. As a result, a third manifold portion 42 is defined by the case member 40 and the head body 11 on the outer peripheral portion of the flow path forming substrate 10. The manifold 100 of this embodiment is configured by the first manifold portion 17 and the second manifold portion 18 provided on the communication plate 15, and the third manifold portion 42 defined by the case member 40 and the head body 11. It is configured. That is, the manifold 100 includes the first manifold portion 17, the second manifold portion 18, and the third manifold portion 42. Further, the manifold 100 of the present embodiment is disposed on both outer sides of the two rows of pressure generating chambers 12 in the second direction Y, and two manifolds provided on both outer sides of the two rows of pressure generating chambers 12. 100 are provided independently so as not to communicate with each other in the head chip 2. That is, one manifold 100 is provided in communication for each row of pressure generation chambers 12 (rows arranged in parallel in the first direction X) of the present embodiment. In other words, a manifold 100 is provided for each group of nozzles 21. Of course, the two manifolds 100 may communicate with each other.

  Further, the case member 40 is provided with an introduction port 44 that communicates with the manifold 100 and supplies ink to each manifold 100. In the present embodiment, the upper surface of the case member 40 is formed substantially flat, and the introduction port 44 is opened on the upper surface. Further, since the ink is only supplied to the head chip 2 and is not circulated from the head chip 2 and discharged, only the inlet 44 is formed in the head chip 2. The case member 40 may be provided with an outlet serving as an outlet for ink not used in the head chip 2.

  The case member 40 is provided with a connection port 43 that communicates with the through hole 32 of the protective substrate 30 and through which the wiring member 121 is inserted. The other end of the wiring member 121 extends in the penetrating direction of the through hole 32 and the connection port 43, that is, in the third direction Z and opposite to the ink droplet ejection direction.

  In addition, as a material of such a case member 40, resin, a metal, etc. can be used, for example. Incidentally, the case member 40 can be mass-produced at low cost by molding a resin material.

  A compliance substrate 45 is provided on the surface of the communication plate 15 where the first manifold portion 17 and the second manifold portion 18 open. The compliance substrate 45 has substantially the same size as the communication plate 15 described above in a plan view, and is provided with a first exposure opening 45a that exposes the nozzle plate 20. The compliance substrate 45 seals the opening on the liquid ejection surface 20a side of the first manifold portion 17 and the second manifold portion 18 in a state where the nozzle plate 20 is exposed by the first exposed opening portion 45a.

  That is, the compliance substrate 45 defines a part of the manifold 100. In this embodiment, the compliance substrate 45 includes a sealing film 46 and a fixed substrate 47. The sealing film 46 is made of a flexible film-like thin film (for example, a thin film having a thickness of 20 μm or less formed of polyphenylene sulfide (PPS) or the like), and the fixed substrate 47 is made of stainless steel (SUS) or the like. It is made of a hard material such as metal. Since the region of the fixed substrate 47 facing the manifold 100 is an opening 48 that is completely removed in the thickness direction, one surface of the manifold 100 is sealed only with a flexible sealing film 46. The compliance portion 49 is a flexible portion. In the present embodiment, one compliance portion 49 is provided corresponding to one manifold 100. That is, in this embodiment, since the two manifolds 100 are provided, the two compliance portions 49 are provided on both sides in the second direction Y with the nozzle plate 20 interposed therebetween.

  In the head chip having such a configuration, when ink is ejected, the ink is taken in through the introduction port 44, and the inside of the flow path is filled with ink from the manifold 100 to the nozzle 21. Thereafter, according to a signal from the drive circuit 120, a voltage is applied to each piezoelectric actuator 130 corresponding to the pressure generating chamber 12, so that the diaphragm 50 is flexibly deformed together with the piezoelectric actuator 130. As a result, the pressure in the pressure generating chamber 12 increases and ink droplets are ejected from the predetermined nozzle 21.

  The recording head 1 of this embodiment having such a head chip 2 will be described in detail. 4 is an exploded perspective view of the recording head according to the present embodiment, FIG. 5 is a sectional view of the recording head, and FIG. 6 is an enlarged sectional view of the main part.

  As shown in the figure, the recording head 1 holds two head chips 2 that discharge ink (liquid) from the nozzles as ink droplets (droplets), holds the two head chips 2, and sets ink (liquid) on the head chip 2. Are provided, a wiring board 300 held by the flow path member 200, and a cover head 400 which is an example of a fixing member provided on the liquid ejection surface 20a side of the head chip 2.

  The channel member 200 includes an upstream channel member 210 that is an example of a first channel member, a downstream channel member 220 that is an example of a second channel member, an upstream channel member 210, and a downstream channel member 220. And a seal member 230 disposed between the two.

  The upstream flow path member 210 has an upstream flow path 500 that is an example of a first flow path that serves as an ink flow path. In the present embodiment, the upstream flow path member 210 is the third upstream flow path member 211, the second upstream flow path member 212, and the third upstream flow path member 213 in the direction in which the ink droplets are ejected. They are stacked in the direction Z. Each of these members is provided with a first upstream flow path 501, a second upstream flow path 502, and a third upstream flow path 503, which are connected to form an upstream flow path 500.

  In addition, the upstream flow path member 210 is not limited to such an aspect, and may be a single member or a plurality of two or more members. Further, the stacking direction of the plurality of members constituting the upstream flow path member 210 is not particularly limited, and may be the first direction X and the second direction Y.

  The first upstream flow path member 211 has a connection part 214 connected to a liquid holding means such as an ink tank or an ink cartridge in which ink (liquid) is held on the side opposite to the downstream flow path member 220. In this embodiment, the connecting portion 214 protrudes in a needle shape. Note that a liquid holding part such as an ink cartridge may be directly connected to the connection part 214, or a liquid holding part such as an ink tank may be connected via a supply pipe such as a tube. A first upstream flow path 501 to which ink from the liquid holding unit is supplied is provided inside the connection unit 214. In addition, a guide wall 215 for positioning the liquid holding portion is provided around the connection portion 214 of the first upstream flow path member 211. The first upstream flow path 501 is a flow path extending in the third direction Z or a direction orthogonal to the third direction Z, that is, the first direction, depending on the position of the second upstream flow path 502 described later. It is comprised by the flow path etc. which extend in the surface containing X and the 2nd direction Y.

  The second upstream flow path member 212 has a second upstream flow path 502 that is fixed to the opposite side of the connection portion 214 of the first upstream flow path member 211 and communicates with the first upstream flow path 501. A first liquid reservoir 502 a having an inner diameter wider than that of the first upstream channel 501 is provided on the downstream side of the second upstream channel 502 (on the third upstream channel member 213 side).

  The third upstream flow path member 213 is provided on the opposite side of the second upstream flow path member 212 from the first upstream flow path member 211. The third upstream flow path member 213 is provided with a third upstream flow path 503. An opening portion of the third upstream channel 503 on the second upstream channel 502 side is a second liquid reservoir 503a widened in accordance with the first liquid reservoir 502a, and the opening of the second liquid reservoir 503a. In the portion (between the first liquid reservoir 502a and the second liquid reservoir 503a), a filter 216 for removing bubbles and foreign matters contained in the ink is provided. As a result, the ink supplied from the second upstream channel 502 (first liquid reservoir 502a) is supplied to the third upstream channel 503 (second liquid reservoir 503a) via the filter 216.

  A first protrusion 217 that protrudes toward the downstream flow channel member 220 is provided on the downstream flow channel member 220 side of the third upstream flow channel member 213. The first protrusion 217 is provided for each third upstream flow path 503, and the discharge port 504 is opened at the distal end surface of the first protrusion 217.

  The first upstream flow channel member 211, the second upstream flow channel member 212, and the third upstream flow channel member 213 provided with such an upstream flow channel 500 are integrally laminated by, for example, an adhesive or welding. ing. The first upstream flow channel member 211, the second upstream flow channel member 212, and the third upstream flow channel member 213 can be fixed with screws, clamps, or the like. In order to suppress the leakage of ink (liquid) from the connection portion up to 503, it is preferable to join with an adhesive or welding.

  In the present embodiment, four connection portions 214 are provided in one upstream flow path member 210, and four independent upstream flow paths 500 are provided in one upstream flow path member 210. A total of four inlets 44 are provided corresponding to each upstream flow path 500. Incidentally, in this embodiment, although it connects to the one inlet 44 of the head chip 2 from one upstream flow path 500, it is not limited to such an aspect. For example, the upstream flow channel 500 may be branched into two or more in the middle, and the branched flow channel may be connected to the introduction port 44 of the head chip 2.

  Further, a groove portion into which the wall portion of the seal member 230 is inserted is provided on the downstream flow channel member 220 side of the upstream flow channel member 210. Details of the groove will be described later.

  The downstream flow path member 220 is a member that is joined to the upstream flow path member 210 and has a housing portion 226 in which the head chip 2 is housed. The upstream flow channel member 210 side of the downstream flow channel member 220 is referred to as an upper surface side, and the opposite side to the upstream flow channel member 210 is referred to as a lower surface side.

  In the downstream flow path member 220, an accommodation portion 226 is formed as a recess that opens to the lower surface side, that is, the liquid ejection surface 20 a side and accommodates the head chip 2. The accommodating portion 226 according to the present embodiment can accommodate two head chips, and the depth of the accommodating portion 226 (depth in the third direction Z) is slightly deeper than the height of the head chip 2. It is.

  The downstream flow path member 220 includes a downstream flow path 600 that is an example of a second flow path that serves as an ink flow path. The downstream flow path member 220 according to the present embodiment includes a first downstream flow path member 222 and a second downstream flow path member 223, and a downstream flow path 600 is formed from these members. As the downstream flow path 600, two types of downstream flow paths 600A and downstream flow paths 600B having different shapes are configured.

  A first flow path 601 is formed in the first downstream flow path member 222, and a second flow path 602 is formed between the first downstream flow path member 222 and the second downstream flow path member 223. A third flow path 603 is formed in the second downstream flow path member 223.

  As a configuration common to both the downstream flow path 600A and the downstream flow path 600B, the downstream flow path member 220 (each of the first downstream flow path member 222 and the second downstream flow path member 223) has an upstream flow path member 210 side. A second projecting portion 221 is provided to project. The second protrusion 221 is provided for each upstream flow path 500, that is, for each first protrusion 217. In addition, one end of the downstream flow path 600 is open to the distal end surface of the second protrusion 221, and the other end is a surface opposite to the upstream flow path member 210 in the third direction Z, that is, the bottom surface portion of the housing portion 226. The opening is provided.

  The downstream flow path 600 </ b> A is linearly formed along the third direction Z in the second downstream flow path member 223. The downstream flow path 600B includes a first flow path 601 connected to the upstream flow path 500 (discharge port 504), a second flow path 602 connected to the first flow path 601 and a second flow path 602. And a third flow path 603 that connects the inlet 44. The first flow path 601 and the third flow path 603 are formed as through holes along the third direction Z of the second downstream flow path member 223. The second channel 602 is formed by sealing a groove formed on one surface of the first downstream channel member 222 with the second downstream channel member 223. By joining the first downstream flow path member 222 and the second downstream flow path member 223 as described above, the second flow path 602 can be easily formed in the downstream flow path member 220.

  The second flow path 602 is an example of an extended flow path that extends in the second direction Y. Here, the second channel 602 extending in the second direction Y means that a component (vector) in the second direction Y exists in the extending direction of the second channel 602. That means. Incidentally, the extending direction of the second flow path 602 is a direction in which the ink (liquid) in the second flow path 602 flows. Therefore, the second flow path 602 is provided in the horizontal direction (a direction orthogonal to the third direction Z), but also in the third direction Z and the horizontal direction (the first direction X and the second direction Y). In-plane direction). In the present embodiment, the first flow path 601 and the third flow path 603 are provided along the third direction Z, and the second flow path 602 is provided along the horizontal direction (second direction Y). Note that the first flow path 601 and the third flow path 603 may be provided in a direction intersecting the third direction Z.

  Of course, the downstream flow path 600B is not limited to this, and a flow path other than the first flow path 601, the second flow path 602, and the third flow path 603 may exist, and the first flow path 601 or The third flow path 603 may not be provided. In the above-described example, the configuration in which only the second flow path 602 is an extended flow path has been described. However, the present invention is not particularly limited thereto, and a plurality of flow paths having components in the second direction Y are extended. It may be a road. Furthermore, the entire downstream flow path 600B may be an extended flow path.

  A plurality of head chips 2, in the present embodiment, two head chips 2 are accommodated in the accommodation portion 226 of the downstream flow path member 220. In one head chip 2, nozzle rows are formed side by side in the second direction Y (see FIGS. 1 and 2), and in the recording head 1, two head chips 2 are arranged in the second direction Y. It is provided. Thereafter, the first direction X, the second direction Y, and the third direction Z of the head chip 2 are the same as the first direction X, the second direction Y, and the third direction Z of the recording head 1, respectively. Indicates.

  The two head chips 2 are each provided with two introduction ports 44. The downstream flow path 600 (downstream flow path 600 </ b> A and downstream flow path 600 </ b> B) provided in the downstream flow path member 220 is provided to open in accordance with the position where each introduction port 44 opens.

  Each introduction port 44 of the head chip 2 is aligned so as to communicate with the downstream flow path 600 opened in the bottom surface portion of the accommodating portion 226 of the downstream flow path member 220. The head chip 2 is fixed to the accommodating portion 226 by an adhesive 227 provided around each introduction port 44. Thus, the head chip 2 is fixed to the housing portion 226, whereby the downstream flow path 600 and the introduction port 44 communicate with each other so that ink is supplied to the head chip 2.

  Further, the downstream passage member 220 is provided with a second insertion hole 224. The second insertion hole 224 is provided to open to the housing portion 226 and the upstream flow channel member 210 side of the downstream flow channel member 220. The second insertion hole 224 communicates with the connection port 43 of the head chip 2 and allows the wiring member 121 to be inserted from the head chip 2 side to the upstream flow path member 210 side. The second insertion hole 224 is provided with an opening having substantially the same width as the width of the head chip 2 in the first direction X.

  Between the upstream flow channel member 210 and the downstream flow channel member 220, a seal member 230 that is a joint that connects (joins) the upstream flow channel 500 and the downstream flow channel 600 is provided. As a material of the seal member 230, a material (elastic material) that has liquid resistance to an ink or the like used in the recording head 1 and is elastically deformable, such as rubber or elastomer, can be used. .

  The seal member 230 includes a base portion 235 and a wall portion 236 formed on the base portion 235. The base part 235 is formed in a plate shape, and the communication path 232 and the third protrusion part 231 are formed. In the present embodiment, four communication paths 232 and third protrusions 231 are formed corresponding to each upstream flow path 500 and downstream flow path 600.

  An annular first recess 233 into which the first protrusion 217 is inserted is provided on the upstream channel member 210 side of the base portion 235. The first recess 233 is provided at a position facing the third protrusion 231.

  The third protrusion 231 protrudes toward the downstream flow path member 220 and is provided at a position facing the second protrusion 221 of the downstream flow path member 220. A second recess 234 into which the second protrusion 221 is inserted is provided on the top surface of the third protrusion 231 (the surface facing the downstream flow path member 220).

  The communication path 232 penetrates in the thickness direction (third direction Z) of the base portion 235, one end opens to the first recess 233, and the other end opens to the second recess 234. The third protrusion 231 is in the third direction between the tip surface of the first protrusion 217 inserted into the first recess 233 and the tip surface of the second protrusion 221 inserted into the second recess 234. It is held in a state where a predetermined pressure is applied to Z. As described above, the upstream flow path 500 and the communication path 232 are connected to the seal member 230 in a state in which pressure is applied in the third direction Z, and the communication path 232 and the downstream flow path 600 are connected to the seal member 230 in the third direction. Connection is made in a state where pressure is applied in the direction Z. Therefore, the upstream flow path 500 and the downstream flow path 600 are communicated in a sealed state via the communication path 232.

  Note that the first projecting portion 217 and the second projecting portion 221 may be inserted into the communication path 232 to communicate with each other. That is, the inner surface of the communication path 232 of the third protrusion 231 and the outer peripheral surface of at least one of the first protrusion 217 and the second protrusion 221 are in close contact, that is, the first direction X and the radial direction You may connect a flow path by applying a pressure to the surface direction of the 2nd direction Y. FIG.

  Further, the seal member 230 is formed with a wall portion 236 that is formed so as to surround the outer periphery of the base portion 235 and protrudes toward the upstream flow path member 210 side. In the present embodiment, the wall portion 236 is also formed in a square shape in plan view in accordance with the substantially rectangular base portion 235. Further, a beam portion 237 that connects the opposing wall portions 236 is formed on the upstream flow path member 210 side of the base portion 235.

  Since the wall portion 236 and the beam portion 237 provided on the plate-like base portion 235 serve as resistance against a force for twisting the base portion 235, the torsion of the base portion 235 can be suppressed. As described above, the seal member 230 is configured such that the wall portion 236 and the beam portion 237 are provided on the plate-like base portion 235 so that the base portion 235 is not easily twisted. This facilitates handling of the seal member 230 and facilitates the work of disposing the seal member 230 between the upstream flow path member 210 and the downstream flow path member 220. Incidentally, if the sealing member is annular and portions corresponding to the wall portion 236 and the beam portion 237 are not provided, the sealing member is twisted, and it takes time to correct the sealing member.

  The wall 236 is press-fitted into a groove 219 formed in the upstream flow path member 210. The wall part 236 press-fitted into the groove part 219 formed in the upstream flow path member 210 will be described in detail with reference to FIGS. 7 and 8. FIG. 7 is an enlarged cross-sectional view of the wall portion of the recording head, and FIG. 8 is a plan view of the upstream flow path member on the seal member side.

As shown in FIGS. 7A and 8, the third upstream flow path member 213 of the upstream flow path member 210 is formed with a groove portion 219 into which the wall portion 236 is press-fitted on the surface of the seal member 230. .
Specifically, the third upstream flow path member 213 has a groove portion 219 in which a wall portion 236 is inserted on a surface facing the base portion 235, and is formed on the inner side of the groove portion 219 and contacts the base portion 235. A first groove forming portion 213a and a second groove forming portion 213b that is formed outside the groove portion 219 and protrudes to the base portion 235 side from the first groove forming portion 213a are formed.

  The groove part 219 is formed in an annular shape in plan view. The term “annular” as used herein means that the groove 219 has no end. The groove 219 according to the present embodiment is formed in a square shape in plan view. The groove 219 may be annular, and may be square or circular as described above.

  In the present embodiment, the groove portion 219 is formed so that a beam portion 237 formed integrally with the wall portion 236 of the seal member 230 can also be inserted. That is, the grooves are provided so as to connect the opposite sides of the rectangular groove 219.

  The first groove forming portion 213 a and the second groove forming portion 213 b protrude toward the seal member 230 side of the third upstream flow path member 213 and constitute the inner surface of the groove portion 219. Further, the second groove forming portion 213b protrudes closer to the seal member 230 than the first groove forming portion 213a.

Further, a boundary portion 218a between the first groove forming portion 213a and the groove portion 219 is chamfered. Further, a boundary portion 218b between the second groove forming portion 213b and the groove portion 219 is also chamfered.
A wall 236 is press-fitted into such a groove 219. The wall portion 236 press-fitted into the groove portion 219 is sandwiched between the upstream flow channel member 210 and the downstream flow channel member 220.

  The wall portion 236 receives pressure in the third direction Z by being sandwiched between the upstream flow path member 210 and the downstream flow path member 220. Thereby, the upper surface and lower surface of the wall part 236 can contact the upstream flow path member 210 and the downstream flow path member 220 without a gap, and can seal more reliably between them. Thus, the wall portion 236 is sandwiched between the upstream flow path member 210 and the downstream flow path member 220, so that the boundary portion between the upstream flow path member 210 and the base portion 235 inside the wall portion 236 is kept airtight. , Outside air can be prevented from entering the flow path (upstream flow path 500, communication path 232, downstream flow path 600). Further, volatilization of the solvent of the ink in the flow path can be suppressed, and the thickening of the ink can be suppressed.

  Further, since the wall portion 236 is press-fitted into the groove portion 219, the side surface of the wall portion 236 is in contact with the inner surface of the groove portion 219. Accordingly, the wall portion 236 is restricted from being inclined or deformed in the first direction X and the second direction Y by the inner surface of the groove portion 219. Since the inclination or the like of the wall portion 236 is regulated by the groove portion 219, the occurrence of a gap between the upstream flow path member 210 and the downstream flow path member 220 due to the inclination or deformation of the wall portion 236 is suppressed. be able to.

  Thus, since the inclination of the wall portion 236 is regulated by the groove portion 219, the inclination of the wall portion 236 is unlikely to occur even if the pressure of the upstream flow path member 210 and the downstream flow path member 220 is increased. Therefore, by increasing the pressure with which the upstream flow path member 210 and the downstream flow path member 220 press the wall portion 236, the air tightness by the seal member 230 is further ensured without causing leakage due to the inclination of the wall portion 236 or the like. be able to.

  Further, the boundary portion 218a and the boundary portion 218b of the groove portion 219 of the third upstream flow path member 213 are chamfered. Thereby, when joining the 3rd upstream flow path member 213 (upstream flow path member 210) with respect to the seal member 230 from the upper direction of the 3rd direction Z, the wall part 236 can be guide | induced in the groove part 219. .

  Further, the first groove forming portion 213 a is in contact with the base portion 235. As a result, the entire inner side surface of the wall portion 236 comes into contact with the first groove forming portion 213a, and the wall portion 236 can be more reliably suppressed from inclining or deforming. Further, the second groove forming portion 213b protrudes closer to the seal member 230 than the first groove forming portion 213a. Thereby, the side surface of the outer side of the wall part 236 will contact the 2nd groove formation part 213b, and it can suppress more reliably that the wall part 236 inclines outside or deform | transforms.

  In addition, as a structure of the wall part 236 or the groove part 219, it is not limited to the aspect shown to Fig.7 (a). In the configuration shown in FIG. 7A, the second groove forming portion 213b is joined to the downstream flow path member 220. That is, the second groove forming part 213b of the third upstream flow path member 213 is joined to the downstream flow path member 220 and also serves as a part of the groove part 219.

  FIG. 7B shows another mode in which the groove 219 is independently provided in the third upstream flow path member 213. Specifically, the first groove forming part 213a, the groove part 219, and the second part projecting toward the seal member 230 inside the leg part 213d joined to the downstream flow path member 220 of the third upstream flow path member 213. A groove forming portion 213b is formed. Although the 2nd groove formation part 213b is not in contact with the downstream flow path member 220, you may make the 2nd groove formation part 213b contact the downstream flow path member 220 not only in this.

  Even in the groove portion 219 having such a configuration, it is possible to prevent the wall portion 236 of the seal member 230 from being inclined and the like, as in FIG. 3) the space formed by the upstream flow path member 213, the base portion 235, and the wall portion 236) can be made airtight.

Furthermore, although the groove part 219 shown in FIG. 7A and FIG. 7B is formed in the upstream flow path member 210, it may be formed in the downstream flow path member 220.
FIG. 7C shows another mode in which the groove portion 219 is provided in the downstream flow path member 220. Specifically, the first groove forming portion 213a, the groove portion 219, and the second groove forming portion 213b are formed on the surface of the downstream flow path member 220 on the seal member 230 side.

  Even in the groove portion 219 having such a configuration, it is possible to prevent the wall portion 236 of the seal member 230 from being inclined as in FIG. 7A, and the space B (wiring) inside the wall portion 236 can be suppressed. The space formed by the substrate 300, the downstream flow path member 220, the base portion 235, and the wall portion 236) can be made airtight.

  As shown in FIGS. 4 to 6, a wiring board 300 to which the wiring member 121 is connected is provided between the seal member 230 and the downstream flow path member 220. The wiring board 300 is provided with a first insertion hole 301 through which the wiring member 121 and the third protrusion 231 are inserted. Further, the wiring board 300 is provided with a through hole 302 through which only the third protrusion 231 of the seal member 230 is inserted.

  That is, in the present embodiment, two of the four third protrusions 231 and the first insertion hole 301 which is an opening through which the wiring member 121 is inserted, and each of the remaining two third protrusions 231 are provided. A through-hole 302 that is an opening to be inserted is provided.

  The first insertion hole 301 of the present embodiment is formed with a size that allows the two wiring members 121 to be inserted. Since two downstream flow paths 600 of the two head chips 2 are provided between the two wiring members 121, the third protrusion 231 of the seal member 230 corresponding to the downstream flow path 600 is The first insertion hole 301 is inserted together with the wiring member 121.

In addition, the through hole 302 is provided for each third protrusion 231 provided corresponding to two of the four downstream flow paths 600.
In the present embodiment, one wiring board 300 common to the two head chips 2 is provided. Of course, the wiring board 300 is not limited to this, and may be provided separately for each head chip 2.
As in this embodiment, by using one wiring board 300 common to the two head chips 2, the number of parts can be reduced and the assembling work can be simplified.

  Further, the wiring board 300 has a terminal portion 310 to which the wiring member 121 is connected at the opening edge on both sides in the second direction Y of the first insertion hole 301 on the surface on the upstream flow path member 210 side. Is provided. The terminal portion 310 is formed in the first direction X over substantially the same width as the width of the wiring member 121. Such a terminal part 310 is formed without exceeding the through hole 302 through which the third protrusion part 231 is inserted. That is, the terminal portion 310 is provided between the first insertion hole 301 and the through hole 302.

The other end portion of the wiring member 121 is inserted into the first insertion hole 301 of the wiring substrate 300 from the downstream flow path member 220 side. Thus, the other end of the wiring member 121 inserted into the first insertion hole 301 is bent along the second direction Y on the surface of the wiring substrate 300 (the surface on the upstream flow path member 210 side), and the wiring substrate 300 is connected to the terminal portion 310 on the surface on the upstream flow path member 210 side. That is, the connection surface between the wiring member 121 and the wiring substrate 300 (terminal portion 310) is an in-plane direction in the first direction X and the second direction Y.
Thus, by bending the other end portion of the wiring member 121, the wiring member 121 can be reduced in height, and the third direction Z of the recording head 1 can be reduced in size.

  Further, in the downstream flow path member 220, a caulking pin 228 is erected on the wiring board 300 side. The caulking pins 228 are formed from a resin or the like that can be deformed by heating. In the present embodiment, six caulking pins 228 are formed integrally with the downstream flow path member 220. On the other hand, six caulking holes 303 into which caulking pins 228 are inserted are formed in the wiring board 300.

  The caulking pin 228 is inserted through the caulking hole 303, and the top portion 228a of the caulking pin 228 is larger than the opening diameter of the caulking pin 228 due to thermal deformation. Thereby, the wiring board 300 placed on the downstream flow path member 220 is fixed to the downstream flow path member 220 by the caulking pins 228.

  The configuration for fixing the wiring board 300 to the downstream flow path member 220 is not limited to the caulking pin 228 and the caulking hole 303 as described above. Bonding with an adhesive or fixing with screws or the like may be used. In addition, a claw portion may be provided in the downstream flow path member 220 and the claw portion may be fixed by being engaged with the wiring board 300.

Here, as described above, the wiring board 300 is formed with the first insertion hole 301 and the through hole 302 through which the third protrusion 231 provided in the seal member 230 is inserted.
The through hole 302 is also used for positioning the seal member 230 at a predetermined position. The predetermined position of the seal member 230 here is a position when the third protrusion 231 faces the second protrusion 221 of the downstream flow path member 220.

  As described above, in a state where the wiring board 300 is fixed to the downstream flow path member 220 by the caulking hole 303 and the caulking pin 228, the sealing member 230 is inserted so that the third protrusion 231 is inserted into the through hole 302 of the wiring board 300. By moving the seal member 230, the seal member 230 can be disposed at the predetermined position as described above. Thus, the first insertion hole 301 and the through hole 302 guide the seal member 230 to be disposed at a predetermined position, so that the seal member 230 can be easily positioned and fixed to the downstream flow path member 220.

  Note that wiring, electronic parts, and the like (not shown) are mounted on the wiring board 300, and the wiring connected to the terminal portion 310 is connected to the connectors 320 provided on both end sides in the second direction Y. Yes. The connector 320 is connected to external wiring (not shown). The downstream flow path member 220 is provided with a connector connection port 225 for exposing the connector 320, and the external wiring is connected to the connector 320 exposed by the connector connection port 225.

Further, a cover head 400 which is an example of a fixing member is attached to the accommodation portion 226 side of the downstream flow path member 220.
The cover head 400 is a member that is fixed to the downstream flow path member 220 to which the head chip 2 is fixed, and is provided with a second exposure opening 401 that exposes the nozzle 21. In the present embodiment, the second exposure opening 401 has a size that exposes the nozzle plate 20, that is, substantially the same opening as the first exposure opening 45 a of the compliance substrate 45.

  The cover head 400 is bonded to the side of the compliance substrate 45 opposite to the communication plate 15 and seals the space of the compliance portion 49 opposite to the flow path (manifold 100). By covering the compliance portion 49 with the cover head 400 in this manner, the compliance portion 49 can be prevented from being destroyed even when a recording medium such as paper comes into contact. In addition, it is possible to suppress the ink (liquid) from adhering to the compliance portion 49, and to wipe the ink (liquid) adhering to the surface of the cover head 400 with, for example, a wiper blade. It is possible to suppress contamination with ink or the like adhering to the ink. Although not particularly illustrated, the space between the cover head 400 and the compliance unit 49 is open to the atmosphere. Of course, the cover head 400 may be provided independently for each head chip 2.

Thus, the cover head 400 to which the two head chips 2 are fixed is fixed to the lower surface side (liquid ejection surface 20a side) of the downstream flow path member 220. In addition, a slight gap is formed between the opening edge of the introduction port 44 of the head chip 2 and the opening edge of the downstream flow path 600 opened at the bottom surface of the housing portion 226. An adhesive 227 is provided in the gap, and the introduction port 44 and the downstream flow path 600 communicate with each other without any gap. In addition, the fixing method of the downstream flow path member 220 and the head chip 2 is not limited to bonding with the adhesive 227, and may be fixing with screws or the like, for example.
Further, although not particularly illustrated, the upstream flow path member 210 and the downstream flow path member 220 are fixed by an arbitrary fixing means such as a screw or an adhesive.

  As described above, according to the recording head 1 according to the present embodiment, the wall portion 236 of the seal member 230 is press-fitted into the groove portion 219 formed in the upstream flow path member 210, thereby inclining the wall portion 236. Further, the breakage of the seal by the seal member 230 caused by deformation is suppressed. As described above, since the destruction of the seal is suppressed, it is possible to provide the recording head 1 that can suppress the ink discharge failure due to the seal failure and can discharge the high-quality ink.

<Other embodiments>
As mentioned above, although one Embodiment of this invention was described, the basic composition of this invention is not limited to what was mentioned above.
For example, in Embodiment 1 described above, the wall portion 236 is press-fitted into the groove portion 219, but the width of the groove portion 219 is formed with a margin slightly larger than the width of the wall portion 236, and the wall portion 236 is formed in the groove portion 219. May be inserted. Then, the wall portion 236 is elastically deformed so as to expand in the first direction X and the second direction Y by pressing the wall portion 236 with the upstream flow path member 210 and the downstream flow path member 220. Thereby, since the wall part 236 closely contacts the inner surface of the groove part 219, the seal member 230 can seal the upstream flow path member 210 and the downstream flow path member 220.

  Moreover, in Embodiment 1, the groove part 219 was formed in either the upstream flow path member 210 or the downstream flow path member 220 (refer FIG. 7). However, the present invention is not limited thereto, and the groove 219 may be formed on both sides, and the wall 236 may be formed on both surfaces of the seal member 230.

  In the first embodiment described above, the recording head 1 provided with two head chips 2 has been described. However, the number of head chips 2 is not particularly limited thereto, and the recording head 1 having one head chip is not limited thereto. Alternatively, the recording head 1 having three or more head chips 2 may be used.

  Further, in the first embodiment described above, the two insertion members 121 and the third protrusions 231 corresponding to the two downstream flow paths 600 are inserted into the first insertion hole 301. However, the present invention is particularly limited to this. Instead, the first insertion hole through which the wiring member 121 is inserted and the through hole through which the third protrusion 231 is inserted may be provided independently. Moreover, you may make it provide a through-hole independently for every 3rd projection part 231. FIG.

  Furthermore, in Embodiment 1 mentioned above, although the flow path member 200 which has the upstream flow path member 210 provided with the upstream flow path 500 and the downstream flow path member 220 provided with the downstream flow path 600 was illustrated, for example, When ink (liquid) is circulated, upstream and downstream may be reversed. That is, the ink supplied to the head chip 2 may flow from the downstream flow path 600 to the upstream flow path 500 and be discharged (circulated) to a liquid holding portion, a storage portion where discharged ink is stored, or the like.

  Further, in the first embodiment described above, the thin film piezoelectric actuator 130 has been described as the pressure generating means for causing the pressure change in the pressure generating chamber 12. However, the present invention is not particularly limited thereto. For example, a green sheet is attached. It is possible to use a thick film type piezoelectric actuator formed by such a method, a longitudinal vibration type piezoelectric actuator in which piezoelectric materials and electrode forming materials are alternately stacked and expanded and contracted in the axial direction. Also, as a pressure generating means, a heating element is arranged in the pressure generating chamber, and droplets are discharged from the nozzle opening by bubbles generated by the heat generated by the heating element, or static electricity is generated between the diaphragm and the electrode. Thus, a so-called electrostatic actuator that discharges liquid droplets from the nozzle openings by deforming the diaphragm by electrostatic force can be used.

  The recording head 1 of Embodiment 1 constitutes a part of an ink jet recording head unit having an ink flow path communicating with an ink cartridge or the like, and is mounted on an ink jet recording apparatus. FIG. 9 is a schematic view showing an example of the ink jet recording apparatus.

  In the ink jet recording apparatus I shown in FIG. 9, an ink jet recording head unit II (hereinafter also referred to as a head unit II) having a plurality of recording heads 1 is detachably provided with a cartridge 1A constituting a liquid holding unit. The carriage 3 on which the head unit II is mounted is provided on a carriage shaft 5 attached to the apparatus main body 4 so as to be movable in the axial direction. For example, the head unit II ejects a black ink composition and a color ink composition.

  Then, the driving force of the driving motor 6 is transmitted to the carriage 3 via a plurality of gears and a timing belt 7 (not shown), so that the carriage 3 on which the head unit II is mounted is moved along the carriage shaft 5. On the other hand, the apparatus body 4 is provided with a platen 8 along the carriage shaft 5, and a recording sheet S that is a recording medium such as paper fed by a paper feed roller (not shown) is wound around the platen 8. It is designed to be transported.

  In the ink jet recording apparatus I described above, the recording head 1 (head unit II) is mounted on the carriage 3 and moves in the main scanning direction. However, the present invention is not particularly limited thereto. The present invention can also be applied to a so-called line-type recording apparatus that performs printing only by moving the recording sheet S such as paper in the sub-scanning direction.

  In the above-described example, the ink jet recording apparatus I has a configuration in which the cartridge 1 </ b> A that is a liquid holding unit is mounted on the carriage 3. However, the present invention is not particularly limited thereto. The liquid holding unit and the recording head 1 may be fixed to the apparatus main body 4 and connected via a supply pipe such as a tube. Further, the liquid holding unit may not be mounted on the ink jet recording apparatus.

  Furthermore, the present invention is intended for a wide range of liquid jet heads in general, for example, for manufacturing recording heads such as various ink jet recording heads used in image recording apparatuses such as printers, and color filters such as liquid crystal displays. The present invention can also be applied to a coloring material ejecting head, an organic EL display, an electrode material ejecting head used for forming electrodes such as an FED (field emission display), a bioorganic matter ejecting head used for biochip manufacturing, and the like.

I ink jet recording apparatus (liquid ejecting apparatus), II ink jet recording head unit, 1 recording head (liquid ejecting head), 2 head chip, 20 nozzle plate, 20a liquid ejecting surface, 21 nozzle, 100 manifold, 120 drive circuit, 121 Wiring Member, 130 Piezoelectric Actuator, 200 Channel Member, 210 Upstream Channel Member, 219 Groove, 220 Downstream Channel Member, 224 Second Insertion Hole, 226 Housing, 230 Seal Member, 231 Third Projection (Projection) ), 232 communication path, 235 base portion, 236 wall portion, 300 wiring board, 301 first insertion hole, 302 through hole, 400 cover head (fixing member), 500 upstream flow path, 600 downstream flow path

Claims (6)

A head chip that ejects liquid from the liquid ejection surface;
A first flow path member provided with a liquid first flow path;
A second flow path member that holds the head chip and is provided with a second flow path for liquid connected to the head chip;
A base portion in which a communication path connecting the first flow path and the second flow path is formed, and a surface of the base portion facing at least one of the first flow path member or the second flow path member. A seal member having a wall portion formed in an annular shape,
At least one of the first flow path member or the second flow path member is formed with a groove portion into which the wall portion is inserted,
The liquid ejecting head, wherein the wall portion inserted into the groove portion is sandwiched between the first flow path member and the second flow path member. The liquid ejecting head according to claim 1,
The liquid ejecting head, wherein the wall portion is press-fitted into the groove portion. The liquid ejecting head according to claim 1 or 2,
An opening into which the wall portion of the groove portion is inserted is chamfered. In the liquid jet head according to any one of claims 1 to 3,
The base part is formed in a plate shape, and the wall part is formed on the outer periphery of the base part. In the liquid jet head according to any one of claims 1 to 4,
At least one of the first flow path member or the second flow path member is formed on the surface facing the base portion, on the inner side of the groove portion and the groove portion, and in contact with the base portion. And a second groove forming portion that is formed on the outer side of the groove portion and protrudes toward the base portion side of the first groove forming portion.   A liquid ejecting apparatus comprising the liquid ejecting head according to claim 1.

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