JP2015038469A5 - - Google Patents

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Publication number
JP2015038469A5
JP2015038469A5 JP2014122959A JP2014122959A JP2015038469A5 JP 2015038469 A5 JP2015038469 A5 JP 2015038469A5 JP 2014122959 A JP2014122959 A JP 2014122959A JP 2014122959 A JP2014122959 A JP 2014122959A JP 2015038469 A5 JP2015038469 A5 JP 2015038469A5
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JP
Japan
Prior art keywords
sample
workpiece
ion beam
probe
flake
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014122959A
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English (en)
Japanese (ja)
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JP6359351B2 (ja
JP2015038469A (ja
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Publication date
Priority claimed from US13/930,911 external-priority patent/US9040908B2/en
Application filed filed Critical
Publication of JP2015038469A publication Critical patent/JP2015038469A/ja
Publication of JP2015038469A5 publication Critical patent/JP2015038469A5/ja
Application granted granted Critical
Publication of JP6359351B2 publication Critical patent/JP6359351B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014122959A 2013-06-28 2014-06-16 平面視試料の調製 Active JP6359351B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/930,911 2013-06-28
US13/930,911 US9040908B2 (en) 2013-06-28 2013-06-28 Plan view sample preparation

Publications (3)

Publication Number Publication Date
JP2015038469A JP2015038469A (ja) 2015-02-26
JP2015038469A5 true JP2015038469A5 (OSRAM) 2017-07-13
JP6359351B2 JP6359351B2 (ja) 2018-07-18

Family

ID=50979660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014122959A Active JP6359351B2 (ja) 2013-06-28 2014-06-16 平面視試料の調製

Country Status (4)

Country Link
US (2) US9040908B2 (OSRAM)
EP (1) EP2818844A1 (OSRAM)
JP (1) JP6359351B2 (OSRAM)
CN (1) CN104251795B (OSRAM)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9040908B2 (en) 2013-06-28 2015-05-26 Fei Company Plan view sample preparation
CN105158516B (zh) * 2015-08-20 2018-10-16 上海华力微电子有限公司 一种集成电路分析中透射电镜平面样品的制备方法
US10546719B2 (en) * 2017-06-02 2020-01-28 Fei Company Face-on, gas-assisted etching for plan-view lamellae preparation
US10801926B2 (en) * 2017-07-17 2020-10-13 Expresslo Llc Probe with solid beveled tip and method for using same for specimen extraction
DE102018108974B3 (de) * 2018-04-16 2019-05-09 Carl Zeiss Microscopy Gmbh Verfahren zum Herstellen einer TEM-Probe
CN109374663B (zh) * 2018-12-29 2021-05-04 中国工程物理研究院材料研究所 一种柔性高原子序数材料透射电镜样品的制备方法
KR102760504B1 (ko) * 2020-05-01 2025-02-03 주식회사 히타치하이테크 핀셋, 반송 장치 및 시료편의 반송 방법
CN115148568A (zh) * 2021-03-30 2022-10-04 台湾积体电路制造股份有限公司 样品载台及修饰样品的系统及方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5435755Y2 (OSRAM) * 1975-11-29 1979-10-30
US5435850A (en) 1993-09-17 1995-07-25 Fei Company Gas injection system
US5851413A (en) 1996-06-19 1998-12-22 Micrion Corporation Gas delivery systems for particle beam processing
JP3547143B2 (ja) * 1997-07-22 2004-07-28 株式会社日立製作所 試料作製方法
NL1022426C2 (nl) 2003-01-17 2004-07-26 Fei Co Werkwijze voor het vervaardigen en transmissief bestralen van een preparaat alsmede deeltjes optisch systeem.
US20060085978A1 (en) 2004-10-21 2006-04-27 Milidantri Thomas H Jr Turbine component fixture for manufacture or repair
WO2007082380A1 (en) 2006-01-19 2007-07-26 Fibics Incorporated Redeposition technique for membrane attachment
US7423263B2 (en) 2006-06-23 2008-09-09 Fei Company Planar view sample preparation
CN101105430B (zh) 2006-07-10 2011-11-16 Fei公司 用于从工件上分离微型样品的方法
WO2008051880A2 (en) * 2006-10-20 2008-05-02 Fei Company Method and apparatus for sample extraction and handling
US8525137B2 (en) * 2006-10-20 2013-09-03 Fei Company Method for creating S/TEM sample and sample structure
JP2009216534A (ja) * 2008-03-11 2009-09-24 Jeol Ltd 薄膜試料作製方法
US9040908B2 (en) 2013-06-28 2015-05-26 Fei Company Plan view sample preparation

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