JP2015030883A - Method and apparatus for production of three-dimensional laminate formed object - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the problem that, when a plurality of melt solidified layers are laminated, while a thin melt solidified layer allows reduction of a level difference of an outer surface consisting of a side end surface of the layer, presence of irregularities with the height comparable with the thickness of the layer in the upper surface of the melt solidified layer lead to an accumulative increase of the irregularities, making smooth finishing of the surface of a product impossible.SOLUTION: A method of producing a three-dimensional laminate formed object comprises laminating melt solidified layers by repeating the process of: forming an adhesive layer by applying an adhesive of a specified thickness to necessary parts in the upper surface of a metal solid according to the shape of an intended laminate formed object; forming a metal powder layer by supplying a metal powder and fixing the metal powder to the adhesive layer; removing excessive metal powder not fixed with the adhesive, and producing plasma in an annular anode electrode in an atmosphere of a rare gas in a vacuum chamber and irradiating the metal powder layer with an electron beam to melt and solidify the metal powder layer so as to be integrated with the metal solid and thereby make the surface of the metal solid in a modified state.

Description

  In the present invention, the metal powder material is irradiated with an electron beam to melt and solidify the metal powder layer to be integrated with the metal solid to form a melt-solidified layer so that the surface of the metal solid is modified. The present invention relates to a method for manufacturing a desired layered object by repeatedly laminating a melt-solidified layer and an apparatus for manufacturing the layered object.

  In the method of manufacturing a three-dimensional layered object, a sintered layer is formed by irradiating a powder layer made of a powder material such as a metal to sinter, and a new powder is formed on the sintered layer. A plurality of sintered layers are formed by laying a layer, forming a new sintered layer joined to the underlying sintered layer by irradiating the new powder layer with a beam and sintering, and repeating this. Manufactures a desired three-dimensional layered product that is laminated and integrated. The manufacturing method is also referred to as a powder sintering additive manufacturing method, and when the material is a metal powder, it is also referred to as a metal stereolithography method. If processing such as grinding is added, it may be referred to as metal stereolithography combined processing.

  Examples of the beam applied to the powder layer include a laser beam disclosed in Patent Document 1 (Japanese Patent No. 2620353) and an electron beam disclosed in Patent Document 2 (Japanese Patent Laid-Open No. 2010-255057). The laser beam can be irradiated in the atmosphere. The electron beam is irradiated in a vacuum or in a state close to a vacuum.

  The electron beam shaping apparatus of Patent Document 2 includes a vacuum chamber whose inside is evacuated by a vacuum pump, an electron beam generator for generating an electron beam to be irradiated in the vacuum chamber, and the electron beam generator A focus coil for focusing the generated electron beam, a deflection coil for deflecting and scanning the electron beam focused by the focus coil, and a metal powder for modeling a model A powder container to be stored, a base plate whose upper surface is exposed in the vacuum chamber, and the metal powder is supplied from the powder container to the upper surface, and the metal powder supplied on the base plate is scraped. Reiki and an elevator for raising and lowering the base plate.

  Therefore, in the electron beam shaping apparatus of Patent Document 2, the base plate is lowered by the elevator so that the upper surface of the base plate is positioned below the focal point of the electron beam by the particle size of the metal powder, The metal powder is supplied from the powder container onto the base plate, the metal powder supplied onto the base plate is scraped with the rake, and the metal powder scraped with the base plate is added to the metal powder. The metal powder is preheated by scanning an electron beam, and the preheated metal powder is formed on the base plate based on the two-dimensional layered data obtained by slicing the three-dimensional CAD data of the modeled object to a predetermined thickness. By performing a modeling process that repeats melting the metal powder by scanning the electron beam, Serial-based play on preparative stacked layers of melt of the metal powder to shape the shaped article. Furthermore, in the electron beam modeling apparatus of Patent Document 2, in the modeling process, after the metal powder on the base plate is scanned with the electron beam to melt the metal powder, the upper surface of the melt is the focusing point. The base plate is moved up by the elevator so that the melt is re-melted by scanning the electron beam on the melt on the base plate based on the two-dimensional stratified data. Discloses that the top surface of the melt is smooth.

Japanese Patent No. 2620353 JP 2010-255057 A

  In the method for manufacturing a layered object using the laser beam of Patent Document 1, in the manufactured layered object, when the thickness of the sintered layer is increased, a step is formed on the outer peripheral surface including the side end surfaces of the plurality of sintered layers. Therefore, it is necessary to separately process the step to the desired shape and size of the final product by cutting or grinding. In particular, in the manufacture of precision molds, for example, it is impossible to perform finishing by cutting or grinding, such as a layered product with narrow grooves such as ribs that cannot be used after molding or curved holes. There is also a case. Moreover, in the manufacturing method of patent document 1, the level | step difference formed in the outer peripheral surface which consists of the side end surface of a several sintered layer can be reduced by making the thickness of a sintered layer thin in the laminate-molded article manufactured. On the other hand, in the process of baking the powder material on the upper surface of the sintered layer with a laser beam, high and low irregularities comparable to the thickness of the layer are easily formed on the upper surface of the sintered layer. As a result, since the sintered layer is thin, unevenness is easily formed on the upper surface of the sintered layer directly above the uneven surface formed on the upper surface of the sintered layer directly below, and the thickness of the sintered layer is thin. Since the number of sintered layers to be stacked will increase, the unevenness on the upper surface of each sintered layer will increase cumulatively each time the layers are stacked, and surface processing such as cutting and grinding will be applied to the outer surface of the final product. In some cases, the surface of the outer surface of the final product cannot be smoothly finished, for example, sharp irregularities that cannot be removed even if it is performed. In particular, in the mold apparatus, a molded product cannot be easily released from the cavity space unless the surface forming the cavity space can be formed smoothly. For example, in the manufacturing method of Patent Document 1, when a large number of thin sintered layers are stacked in a mold apparatus to form a fine and complex cavity space, the unevenness on the upper surface of the sintered layer is cumulatively large. Therefore, there may be a case where sharp irregularities that cannot be removed even if surface processing such as milling or polishing is performed and the surface of the cavity space cannot be formed smoothly.

  Further, in the electron beam shaping apparatus of Patent Document 2, primary melting for melting metal powder to form a melt layer and remelting the melt layer to smooth the upper surface of the melt layer are performed. In this case, an electron beam that is scanned at an arbitrary position by being deflected by a deflection coil after being focused by a focus coil is used. Patent Document 2 discloses an apparatus that irradiates an electron beam while scanning (hereinafter referred to as a scanning line method for convenience of explanation). Therefore, in the electron beam shaping apparatus of Patent Document 2, since it is necessary to irradiate the electrons in a small range by the scanning line method, traces of the scanning lines may remain on the upper surface of the melt layer. The trace may interfere with further improving the smoothing of the upper surface. In addition, melting of metal powder by an electron beam depends on energy when electrons moving at high speed collide with the metal powder, so that the molten metal powder may be scattered by the impact of the electron collision. There is.

  Therefore, the present invention reduces the unevenness remaining on the surface of the melt-solidified layer before laying the metal powder layer and forms it on a smooth surface, so that the outer surface of the layered object that is the final product is surface-roughened. An object of the present invention is to propose a manufacturing method and a manufacturing apparatus of a three-dimensional layered object that can be formed on a fine and smooth surface.

  In order to achieve the above object, in the method for manufacturing a three-dimensional layered object of the present invention, an adhesive having a predetermined thickness is applied to a required portion of the upper surface of the metal solid in accordance with the shape of the desired layered object. A first step of applying and forming an adhesive layer; a second step of supplying a metal powder to the adhesive layer and fixing the metal powder to the adhesive layer to form a metal powder layer; and the adhesive. A third step of removing excess metal powder that is not fixed, and plasma is generated in the annular anode electrode in an atmosphere of a rare gas in a vacuum chamber that is evacuated, and electrons are generated in the metal powder layer. A fourth step of irradiating a beam to melt and solidify the metal powder layer to be integrated with the metal solid to form a melt-solidified layer so that the surface of the metal solid is modified; Repeat step 4 from step 4 The fused solidified layer are stacked, characterized in that to produce the desired laminate shaped article.

Here, in the present invention, an electron beam is irradiated in a state where plasma is generated in an annular anode electrode in an atmosphere of a rare gas in a vacuumed vacuum chamber, and the cross-sectional area of the beam is An electron beam of 10 mm ² or more is used. For convenience of explanation, the case where the cross-sectional area of the electron beam is 10 mm ² or more is called a large area irradiation method. The large area irradiation method is disclosed in JP-A-2006-344387, JP-A-2010-100904, JP-A-2013-49880, JP-A-2013-49882, and the like. The large-area irradiation method irradiates an electron beam with a large current at a relatively low energy density with a large cross-sectional area of the particle beam bundle. In the large area irradiation method, since the electron beam has a low energy density, the irradiated object is not eroded more than several μm from the surface. Therefore, there is an advantage that the entire surface of the irradiated body can be uniformly modified. In addition, in the large area irradiation method, irradiation is performed while shifting the electron beam irradiation range by a predetermined pitch. At this time, the surface that has already been modified and the surface to which the electron beam is irradiated are partially It is preferable to perform a more uniform surface modification by superimposing an electron beam so as to overlap, that is, a surface that is not modified or a surface that is not sufficiently modified. In the large area irradiation method, since the sectional area of the particle beam bundle of the electron beam is large, it is difficult to deflect the irradiation direction of the electron beam, and the electron beam is apparently irradiated straight. Therefore, in the large area irradiation method, the electron beam is irradiated while shifting the other one by a predetermined pitch with respect to one of the irradiation object and the electron beam irradiation apparatus. “Improving the surface irradiated with the electron beam” means that the irradiated surface is melted by irradiating the electron beam so that the uneven portion of the irradiated surface is smoothed by the action of surface tension, etc. By solidifying in a smoothed state by self-cooling, the unevenness of the irradiated surface is smoothed to reduce the surface roughness, or the irradiated surface is made amorphous by irradiating an electron beam to withstand resistance. Abrasion is improved, and if it is a composite material, any of the materials melts uniformly on the surface and re-solidifies, covering the surface smoothly and smoothly, improving corrosion resistance, only iron containing impurities This means that the corrosion resistance is improved by, for example, becoming amorphous when the iron on the surface is re-solidified. Further, the surface-modified surface not only has a small surface roughness, but also has a smooth and smooth shape with irregularities.

According to the method for manufacturing a three-dimensional layered object of the present invention, the metal powder layer is irradiated with an electron beam of a large area irradiation method, and the metal powder layer is melted and solidified to be integrated with the metal solid. By forming the melt-solidified layer so that the surface of the film is modified, a melt-solidified layer having a smooth surface with reduced irregularities can be formed. Here, the metal solid is a pedestal, a melt-solidified layer, an object in which the pedestal and the melt-solidified layer are integrated, or a layered object that is a final product. A large area irradiation type electron beam can be formed on a smooth surface by melting surface irregularities instantaneously by collision of electrons. In particular, in the present invention, an electron beam beam irradiated in a state where plasma is generated in an annular anode electrode in a rare gas atmosphere in a vacuumed vacuum chamber, that is, an electron beam of a large area irradiation system By irradiating the metal powder layer, the molten solidified layer can be formed and the top surface of the molten solidified layer can be formed smoothly. Further, the scanning powder type electron beam is irradiated to the metal powder layer and the molten solidified layer. Compared to the case, the surface of the melt-solidified layer can be formed smoothly. Therefore, in the production method of the present invention, by laminating the melt-solidified layer, the surface of the final product can be smoothly and smoothly formed by suppressing the unevenness of the melt-solidified layer from being cumulatively increased. In addition, by applying the manufacturing method of the present invention to the manufacturing of a mold apparatus, depending on the shape, the electron beam is intensively irradiated only at a specific location to damage the shape, or the electron beam is irradiated locally. It is possible to reduce the risk of not being performed. And it becomes possible to form smoothly the surface which comprises cavity space, and it becomes possible to manufacture the metal mold | die apparatus which can release a molded article easily from cavity space. In addition, the layered object formed by the manufacturing method of the present invention does not form sharp irregularities that are difficult to remove on the surface, and is smoothed by irradiation with an electron beam as necessary. By performing various cutting processes such as milling processes and various grinding processes such as polishing processes on the surface, it is possible to obtain a layered object with high shape accuracy without increasing the processing time.

  Preferably, in the method for producing a three-dimensional layered object of the present invention, at least one of the step of cutting or grinding the outer surface of the metal solid is performed by the layered model. It is good to include in the middle of manufacturing.

  According to the method for manufacturing a three-dimensional layered object according to the present invention, various grinding processes such as milling and polishing are performed on the surface of the layered object during the manufacturing of the layered object. By doing so, the surface of the final product can be finished smoothly.

  In order to achieve the above object, in the three-dimensional layered object manufacturing apparatus of the present invention, an adhesive having a predetermined thickness is applied to a predetermined portion of the upper surface of the metal solid in accordance with the shape of the desired layered object. An adhesive application device for forming an adhesive layer by coating, a powder material supply device for supplying a metal powder to the adhesive layer and fixing the metal powder to the adhesive layer to form a metal powder layer, and the adhesive. A powder material supply device that removes excess metal powder that is not fixed, and plasma is generated in an annular anode electrode in an atmosphere of a rare gas in a vacuumed vacuum chamber, and electrons are generated in the metal powder layer. And an electron beam irradiation device that forms a melt-solidified layer by irradiating a beam to melt and solidify the metal powder layer so as to be integrated with the metal solid so that the surface of the metal solid is modified. With features That.

  Here, the electron beam irradiation apparatus used in the present invention adopts a large area irradiation method as an electron beam irradiation method, and includes an electron beam generator including a vacuum chamber, a vacuum device, a rare gas supply device, and a power supply device. Including. The vacuum chamber is a vacuum-resistant container that can contain a metal solid including a pedestal therein. The vacuum device is a means for bringing the inside of a sealed chamber into a state close to a vacuum. The vacuum apparatus depressurizes the inside of the vacuum chamber by so-called evacuation by drawing air from the vacuum chamber by a vacuum pump. The vacuum pump evacuates the chamber while the metal solid is irradiated with the electron beam, and maintains a state close to vacuum. The rare gas supply device is means for supplying a rare gas into the chamber. The noble gas (inert gas) indicates helium, neon, argon, krypton, xenon, or radon which are Group 18 elements of the long periodic table. A rare gas that has a proven track record in surface modification with an electron beam is argon gas, which is considered to be highly safe in that it is present in the atmosphere more than other rare gases. The electron beam generator includes a cathode electrode that is an electron gun, an annular anode electrode, a table (collector) for energizing a metal solid that is an object to be irradiated, and a solenoid for forming a magnetic field. The table on which the metal solid including the pedestal is placed is grounded to the chamber by a ground line. In addition, an electron beam is generated by applying a voltage pulse between the poles of the table and the irradiated object to be energized and the cathode electrode. The anode electrode has a function of generating plasma for converging the electrons so that the irradiated electrons are not scattered, and a power source device for plasma generation is provided between the cathode electrode and the anode electrode. .

  An electron beam irradiation method using such an electron beam irradiation apparatus is as follows. First, the inside of a clean chamber is evacuated to supply a rare gas. Next, a magnetic field is formed by a solenoid, and a predetermined voltage pulse is applied to the anode electrode to generate plasma in the ring of the annular anode electrode. Then, a voltage pulse is applied between the cathode electrode and the collector to generate an electron beam. The soot remaining in the vacuum chamber is removed after several electron beam irradiations.

  According to the three-dimensional layered object manufacturing apparatus of the present invention, an electron beam irradiated in a state in which plasma is generated in an annular anode electrode in an atmosphere of a rare gas in a vacuumed vacuum chamber That is, by including an electron beam irradiation apparatus that irradiates a predetermined area of the metal powder layer with an electron beam of a large area irradiation method, the metal powder is irradiated with the electron beam of a large area irradiation method onto the metal powder. Compared to the case of using a scanning line method electron beam by forming a melt-solidified layer so that the surface of the metal solid is modified by melting and solidifying the layer and integrating with the metal solid, A melt-solidified layer having a smooth surface with reduced irregularities can be formed. Therefore, in the manufacturing apparatus of the present invention, even when the molten solidified layer is formed as thin as possible in order to obtain high shape accuracy, the thin molten solidified layer is accumulated so that the molten solidified layer is accumulated. The surface of the final product can be smoothly finished by preventing the unevenness of the surface from remaining to the extent that it cannot be easily removed after molding. Therefore, in the manufacturing apparatus of the present invention, particularly when applied to the manufacture of a mold apparatus, it is possible to smoothly form the surface forming the cavity space, and the mold that can easily release the molded product from the cavity space. The device can be manufactured. In addition, the layered object formed by the manufacturing apparatus of the present invention does not have sharp irregularities that are difficult to remove on the surface. In addition, it is possible to finish the shape with higher shape accuracy by performing various cutting processes such as milling and various grinding processes such as polishing. In particular, even in the case of a layered product having a narrow groove or a bent hole in which a tool cannot be used after molding, the desired shape accuracy and surface roughness can be obtained by performing the cutting and grinding processes at an appropriate timing during molding. It becomes easy to obtain a layered object having a thickness.

  Preferably, the three-dimensional layered object manufacturing apparatus of the present invention includes at least one of a device for cutting or grinding an outer surface of the metal solid.

  According to the three-dimensional layered object manufacturing apparatus of the present invention, either one of the apparatuses that perform various cutting processes such as milling or grinding processes such as a polishing process on the surface of the layered object. Since the apparatus or both apparatuses are included, an appropriate cutting process or grinding process can be performed in a timely manner in the manufacturing process in which the melt-solidified layer is laminated and shaped.

  According to the method for manufacturing a three-dimensional layered object and its manufacturing apparatus of the present invention, a molten solidified layer formed on a smooth surface is formed by irradiating a metal powder layer with an electron beam of a large area irradiation method. In addition, by reducing the unevenness of the surface on which the metal powder layer is spread and forming a smooth surface, the outer surface of the layered product that will be the final product is formed with a fine surface roughness and a smooth surface It becomes possible to do.

BRIEF DESCRIPTION OF THE DRAWINGS It is the schematic of the manufacturing apparatus of the laminate-molded article of this invention, Comprising: It adhere | attached on the process A (adhesive application apparatus) which apply | coats an adhesive layer, the process B (powder material supply apparatus) which spreads a metal powder layer, and an adhesive layer Step C (powder material removal device) for removing the metal powder material that is not present, and the molten solidified layer so that the surface of the metal solid is modified by melting and solidifying the metal powder layer and integrating it with the metal solid It is the schematic which shows the manufacturing apparatus of the laminate-molded article of this invention including the process D (electron beam irradiation apparatus) to form. It is the schematic of the various apparatuses contained in the manufacturing apparatus of the laminate-molded article of this invention, Comprising: (a) Adhesive application apparatus, (b) Powder material supply apparatus, (c) Powder material removal apparatus, (d) It is the schematic which shows the manufacturing apparatus of the laminate-molded article of this invention containing an electron beam irradiation apparatus. It is the schematic of the manufacturing apparatus of the laminate-molded article of this invention, Comprising: (a) Adhesive application apparatus, (b) Powder material supply apparatus, (c) Powder material removal apparatus in the vacuum chamber on a machine stand, (D) It is the schematic which shows the manufacturing apparatus of the laminate-molded article of this invention shown by the embodiment containing the electron beam irradiation apparatus. It is the schematic which shows another embodiment of the manufacturing apparatus of the laminate-molded article of this invention, Comprising: The embodiment which included any one or both of a cutting apparatus or a grinding apparatus on a machine stand It is the schematic which shows the manufacturing apparatus of the laminate-molded article of this invention shown by this. It is the schematic which shows another embodiment of the manufacturing apparatus of the layered object of this invention, Comprising: The book shown by the embodiment which has arrange | positioned each apparatus other than an electron beam irradiation apparatus outside the chamber on a machine stand It is the schematic which shows the manufacturing apparatus of the laminate-molded article of invention.

  Embodiments of a method for manufacturing a three-dimensional layered object and a manufacturing apparatus according to the present invention will be described below with reference to FIGS. 1 to 5.

  The three-dimensional layered object manufacturing apparatus 1 of the present invention includes an adhesive application device 30 that applies an adhesive layer 9e made of an adhesive 3 to a predetermined location on a base 9d or a melt-solidified layer 9b, and an adhesive layer 9e. Powder material supply device 20 for laying a metal powder layer 9c made of metal powder 2 on the surface, and powder material removal for removing metal powder 2 remaining without being adhered to the adhesive layer 9e around the metal powder layer 9c The apparatus 40 and the electron beam irradiation apparatus 50 for irradiating the predetermined area | region of the metal powder layer 9c with the electron beam 50a of a large area irradiation system are included.

  The adhesive application device 30 first applies the adhesive layer 9e having a predetermined thickness on a predetermined portion on the base 9d, and otherwise applies a predetermined thickness on a predetermined portion on the latest melt-solidified layer 9b. The adhesive layer 9e is applied. The adhesive application device 30 includes means for applying the adhesive 3 soaked in the roller member 31 or a brush member or brush member (not shown) onto a predetermined position on the base 9d or the melt-solidified layer 9c. Alternatively, it may include means for spraying or applying the adhesive 3 on the mask member using a mask member having a predetermined portion opened. Further, for example, the adhesive application device 30 may include a nozzle (not shown) that injects the adhesive 3 from the pedestal 9d or the melt-solidified layer 9b. Then, the adhesive application device 30 has a horizontal uniaxial direction and a horizontal uniaxial direction (X-axis) with respect to the roller 31 or the nozzle side and either the pedestal 9d or the melt-solidified layer 9b side. The pedestal 9d or the melt-solidified layer 9b is configured to be movable in another horizontal one-axis direction (Y-axis) orthogonal to each other and, if necessary, a vertical direction (Z-axis) with respect to the XY plane composed of both axes. The adhesive layer 9e may be applied by applying or spraying the adhesive 3 on the predetermined portion. The adhesive application device 30 may include means for moving the roller 31 and the nozzle in the X-axis direction and means for moving in the Y-axis direction with respect to the base 9d or the melt-solidified layer 9b. On the other hand, a moving device 70 described later for moving the base 9d or the molten solidified layer 9b in the X-axis direction or the Y-axis direction may be used. Further, the adhesive application device 30 may include means for moving the roller 31 and the nozzle in the Z-axis direction so that the roller 31 and the nozzle are brought close to and away from the base 9d or the melt-solidified layer 9b. A moving device 70 described later that moves the base 9d or the melt-solidified layer 9b closer to or away from the base 9d may be used. Further, the adhesive application device 30 includes a control device (not shown), and controls movement of the roller 31 and the nozzle side or movement of the base 9d or the melt-solidified layer 9b side based on the NC program. In order to apply the adhesive 3 to a predetermined location on the upper surface of the base 9d or the melt-solidified layer 9b, a program for controlling relative movement in at least the simultaneous horizontal biaxial directions is, for example, a three-dimensional CAD designed by three-dimensional CAD The data may be generated by inputting data to a two-dimensional CAM, slicing in the stacking direction to create a plurality of plane shape data, and converting the data into an NC program.

  The powder material supply apparatus 20 lays the metal powder layer 9c on the adhesive layer 9e. The powder material supply device 20 may appropriately employ various means capable of laying the metal powder layer 9c made of the metal powder 2 with a predetermined thickness dimension on at least the adhesive layer 9e.

  The powder material removing device 40 preferably sucks and removes the metal powder 2 not adhered to the adhesive layer 9e after the metal powder layer 9c is laid on the adhesive layer 9e. Further, the removing device 40 may be a device that blows away the metal powder 2 that is not bonded to the adhesive layer 9e with a blower wind, or a device that blows off by operating a brush or a brush, as will be described later. In order to form the molten solidified layer 9b by irradiating the metal powder layer 9c with the electron beam 50a in the vacuum chamber 51, it is preferable that the inside of the vacuum chamber 51 is in a clean state. It is preferable to include a device for collecting the metal powder 2 by suction or the like. The metal powder 2 that has been sucked and collected can be returned to the material supply device 20, and the configuration can be modified so as to be reused as the powder layer 9c again.

  The electron beam irradiation device 50 is a large-area irradiation method, and mainly includes a vacuum chamber 51, a rare gas supply device 52, a vacuum device 53, an electron beam generator 54 including a power supply device, and a moving device 70. Including.

  The vacuum chamber 51 is a means for accommodating the solid metal 9a composed of the pedestal 9d and the molten solidified layer 9b as an irradiated body when the electron beam 50a is irradiated, and has a vacuum-resistant structure. The vacuum chamber 51 may be placed on the machine base 10 when the electron beam 50a is irradiated. Moreover, the vacuum chamber 51 may be always installed on the machine base 10 so that various devices are built in the chamber 51 as in the embodiment shown in FIGS. 3 and 4.

  The vacuum device 53 is a means for bringing the sealed vacuum chamber 51 into a state close to a vacuum. The vacuum device 53 evacuates the air in the vacuum chamber 51 by the vacuum pump 53a, so-called evacuation, and decompresses the inside of the vacuum chamber 51. After the air in the vacuum chamber 51 is evacuated, the flow rate adjustment valves 53b and 53c are throttled to maintain a state close to the vacuum in the vacuum chamber 51. The vacuum device 53 also serves as a means for purifying the inside of the vacuum chamber 51. The vacuum device 53 operates while irradiating the electron beam 50a, discharges the gas in the vacuum chamber 51, and maintains the vacuum chamber 51 in a state close to a vacuum. The vacuum device 53 sucks out the soot of floating material from the vacuum chamber 51 while discharging the gas from the vacuum chamber 51.

  The rare gas supply device 52 is a means for supplying a rare gas necessary for generating plasma in the vacuum chamber 51. The noble gas (inert gas) indicates helium, neon, argon, krypton, xenon, or radon which are Group 18 elements of the long periodic table. In the embodiment of the present invention, an argon gas that is relatively safe and easily available is used as the inert gas. The rare gas supply device 52 includes a cylinder 52a filled with liquefied argon, a pipe connected to the vacuum chamber 51, and a valve 52b. The electron beam irradiation apparatus 50 is preferably designed so that the gas pressure in the vacuum chamber 51 can be set to 0.03 Pa to 0.1 Pa.

  The electron beam generator 54 includes a cathode electrode 54a that is an electron gun, an annular anode electrode 54b, a collector 54c that energizes a metal solid 9a that is an object to be irradiated, and a solenoid 54d that forms a magnetic field. . In the embodiment shown in the figure, the collector 54 c is a table 73 a of the lifting device 73. The table 73a is grounded to the vacuum chamber 51 through a ground line 54e.

  An electron beam generating power supply device 54f including a high voltage power source for applying a voltage pulse for generating an electron beam 50a is provided between both electrodes of the cathode electrode 54a and the metal solid 9a energizing the table 73a. Further, a plasma generating power supply device 54g is provided between the cathode electrode 54a and the anode electrode 54b. The switch 54h switches the connection of the power supply of the cathode electrode 54b. The cathode electrode 54a is provided with a large number of needle-like protrusions made of titanium on a base having a circular cross section. The anode electrode 54b has a ring shape having an inner diameter larger than the cross-sectional area of the cathode electrode 54a. In the electron beam irradiation apparatus 50 according to the embodiment, for example, the cathode electrode 54a has a diameter of 90 mmφ and the anode electrode 54b has an inner diameter of 140 mmφ. The anode electrode 54b generates plasma having a relatively short time in the ring. The ionosphere of plasma converges electrons emitted from the cathode electrode 54a.

  The moving device 70 is a metal solid that becomes an object to be irradiated in one horizontal axis direction, another horizontal one axis direction (Y axis) orthogonal to the horizontal one axis direction (X axis), and the vertical direction (Z axis). It is a means to move 9a. The moving device 70 includes a first moving body 71 that moves in the X-axis direction, a second moving body 72 that moves in the Y-axis direction, and an elevating device 73 that moves up and down in the Z-axis direction. In the moving device 70 of the embodiment shown in the figure, the second moving body 72 is mounted on the first moving body 71, and the lifting device 73 is installed on the second moving body 72. A table 73 is provided on the elevating device 30 for installing the metal solid 9a to be irradiated. Each axis direction will be described assuming that, for example, the X-axis direction is the horizontal direction in the figure, the Z-axis direction is the vertical direction in the figure, and the Y-axis direction is perpendicular to the horizontal direction in the figure and perpendicular to the vertical direction. .

  The first moving body 71 may be moved in the X-axis direction by a guide member including a first guide rail 71a serving as a guide shaft and a first guide block 71b serving as a guide bearing, and a drive source such as a motor (not shown). . The second moving body 72 may be moved in the Y-axis direction by a guide member including a second guide rail 72a serving as a guide shaft and a second guide block 72b serving as a guide bearing, and a drive source such as a motor (not shown). . The first moving body 71 and the second moving body 72 are controlled by a movement control device (not shown). The lifting device 73 may be moved in the Z-axis direction by a lifting member such as a jack device (not shown) and a drive source such as a motor (not shown). The lifting device 73 can be controlled by the above-described movement control device that controls the first moving body 71 and the second moving body 72. Each drive source is not limited to motor drive, and various drive mechanisms such as electric type, hydraulic type, and pneumatic type may be appropriately mounted. Further, the moving device 70 may be shared by the powder material supply device 20, the adhesive application device 30, and the powder material removing device 40 as a moving device that moves the metal solid 9a. The numerical control device that controls the moving device 70 is generated by inputting three-dimensional shape data designed by three-dimensional CAD into a two-dimensional CAM and slicing in the stacking direction to create a plurality of planar shape data. NC programs can also be used.

  The electron beam irradiation apparatus 50 makes the inside of the sealed vacuum chamber 51 close to a vacuum. The solenoid 54d is excited to form a magnetic field in the acceleration space between the cathode electrode 54a in the chamber 51 and the metal solid 9a that is the object to be irradiated. Electrons emitted from the cathode electrode 54a are accelerated to a speed required in the acceleration space by a magnetic field formed between the cathode electrode 54a and the metal solid 9a. A rare gas necessary for generating plasma is supplied into the ring of the anode electrode 54b. The electrons emitted from the cathode electrode 54a are converged in the plasma space and reach the metal powder layer 9c serving as an irradiated surface. In the large area irradiation method, the electron beam 50a with a large current is irradiated at a relatively low energy density with a large cross-sectional area of the particle beam bundle. In the large-area irradiation method, since the electron beam 50a has a low energy density, the latest melt-solidified layer 9b of the metal solid 9a is not eroded more than several μm from the surface. For this reason, irradiation is performed while shifting the upper surface range of the latest melt-solidified layer 9b by a predetermined pitch. At this time, the surface that has already been modified and the surface to which the electron beam is irradiated are partially overlapped. In other words, it is preferable that the electron beam 50a is superimposedly irradiated so that a surface that is not modified or a surface that is insufficiently modified cannot be formed, so that more uniform modification is performed.

  The three-dimensional layered object manufacturing apparatus 1 of the present invention includes a chamber 51 of an electron beam irradiation device 50 disposed on a machine base 10, and a powder material supply device 20 and an adhesive in the vacuum chamber 51. A coating device 30, a powder material removing device 40, and an electron beam irradiation device 50 are included. In addition, such a manufacturing apparatus 1 is provided in the vacuum chamber 51, the moving device 70 that is shared and used by each device is disposed on the machine base 10, and the pedestal is placed on the lifting table 73 a of the moving device 70. 9d may be placed (FIG. 3). Further, the elevating device 73 may be arranged in a frame not shown, and the elevating table 73a may be arranged so as to be movable up and down in the frame. Therefore, when forming the metal powder layer 9c, the lifting table 73a is lowered by the size of the metal powder layer 9c, and a predetermined thickness is adhered to the required portion on the base 9d or the latest melt-solidified layer 9b. The metal powder 2 may be spread on the adhesive layer 9e coated with the agent 3 by the material supply device 20, and the metal powder layer 9c having a predetermined thickness may be formed by a leveling device not shown.

  In such a manufacturing apparatus 1, the following method for manufacturing a three-dimensional layered object according to the present invention is performed. On the table 73, a base 9d is first fixed. For example, the pedestal 9d becomes a part of the mold apparatus if the layered object 9 to be manufactured is a mold apparatus. First, (A) the adhesive application device 30 of the manufacturing apparatus 1 of the present invention applies the adhesive layer 9e made of the adhesive 3 having a predetermined thickness on a required portion on the base 9d. (B) The powder material supply device 20 of the manufacturing apparatus 1 of the present invention lays the metal powder layer 9c made of the metal powder 2 on a predetermined portion of the adhesive layer 9e with a predetermined thickness dimension. (C) The powder material removing device 40 of the manufacturing apparatus 1 of the present invention removes the metal powder 2 that has not been adhered to the adhesive layer 9e from the periphery of the metal powder layer 9c. (D) The electron beam irradiation apparatus 50 of the manufacturing apparatus 1 of the present invention irradiates a predetermined portion of the metal powder layer 9c with the large-area irradiation type electron beam 50a, and melts and solidifies the metal powder 2 at the predetermined portion. Thus, the solidified layer 9b is formed so that the surface of the metal solid 9a is modified by being integrated with the metal solid 9a. At this time, the adhesive 3 of the adhesive layer 9e does not evaporate and remain in the metal solid 9a due to a high temperature state when the metal powder 2 is melted and solidified by irradiation with the electron beam 50a. The upper surface of the melt-solidified layer 9b formed by irradiating the metal powder layer 9c with the electron beam 50a to melt and solidify the metal powder 2 is caught when the molded product is released, for example, in the case of a mold apparatus. The unevenness of the upper surface is reduced to such an extent that it does not occur. From then on, a tertiary layer composed of a metal solid 9a integrated by laminating a plurality of melt-solidified layers 9b on the base 9d by repeating these steps for a new melt-solidified layer 9b instead of the base 9d. An original shaped layered product 9 is formed.

  As another embodiment, the three-dimensional layered object manufacturing apparatus 1 according to the present invention performs various grinding processes such as milling or polishing on the surface of the metal solid 9a. A device 60 comprising either one or both of them may be included. The manufacturing apparatus 1 includes the first guide up to the position of the main shaft to which the cutting tool or grinding tool 61 of the cutting and / or grinding apparatus 60 is attached, for example, as in another embodiment shown in FIG. The rail 71a may be extended to move the first moving body 71 in the X-axis direction, and the metal solid 9a may be moved before processing. Further, at that time, as in the embodiment shown in FIG. 4, an opening / closing door 51 a is provided in the chamber 51, and an apparatus for cutting and / or grinding on the machine base 10 and outside the vacuum chamber 51. 60 may be arranged. The main shaft to which the cutting or grinding tool 61 is attached may include a rotational drive device that rotates the tool 61 and may be attached to a column attached to the machine base 10 so as to be movable up and down in the Z-axis direction. Moreover, if the metal solid 9a is moved up and down in the Z-axis direction by the elevating device 73 of the moving device 70, the main shaft can also omit the Z-axis driving device for the main shaft. Further, the cutting and / or grinding device 60 may include a device for removing cutting waste and the like. Further, the cutting and / or grinding apparatus 60 may be arranged in the vacuum chamber 51 of the machine base 10.

  With such a manufacturing apparatus 1, it is also possible to adjust the shape by performing appropriate cutting or grinding in a timely manner in the manufacturing process in which the melt-solidified layer 9 b is laminated and shaped. Of course, the step of cutting or grinding may be performed every time the melt-solidified layer 9b is formed, or may be performed at intervals each time the plurality of melt-solidified layers 9b are formed. Further, the step of cutting or grinding may be performed every time or every predetermined number of times after the step (D) irradiating the metal powder layer 9c with the electron beam 50a of the large area irradiation method.

  Moreover, the three-dimensional layered object manufacturing apparatus 1 of the present invention applies (A) the adhesive layer 9e and (B) on the adhesive layer 9e, as in another embodiment shown in FIG. The powder material 2 is supplied to form the metal powder layer 9c, and (C) a work area in which the work of removing the powder material 2 not bonded to the adhesive layer 9e is collectively performed, and (D) the electron beam 50a is irradiated. Each device is arranged separately into work and a work area where the surface of the metal solid 9a is cut or ground as necessary, and the guide rail 71a of the moving body 71 of the moving device 70 is used as a machine. By laying over each work area on the table 10, the molten solidified layer 9a placed on the moving device 70 may be moved between these work areas. Further, the three-dimensional layered object manufacturing apparatus 1 of the present invention may share the moving device 70 with each device as in another embodiment shown in FIG. For example, when it is necessary to keep the inside of the vacuum chamber 51 of the electron beam irradiation apparatus 50 cleaner, the electron beam irradiation apparatus 50 can be arranged on the machine base 10 alone. It is also possible to prevent the bonded metal powder 2 from entering the chamber 51. In addition to the embodiment shown in FIG. 5, the work area may be subdivided, and the combination of devices sharing the work area may be changed as appropriate. In addition to the embodiment shown in FIG. 5, a means for moving the work area by placing the moving device 70 on the rotary table may be used, or another means for moving appropriately may be used. good.

  The manufacturing method and manufacturing apparatus for a three-dimensional layered object of the present invention are widely applied in the technical field of metal processing. In particular, the method for manufacturing a three-dimensional layered object and its manufacturing apparatus according to the present invention require smooth surface processing with a fine surface roughness and gentle unevenness, such as a mold apparatus. Applied.

DESCRIPTION OF SYMBOLS 1 Manufacturing apparatus of layered object 2 Metal powder material 3 Adhesive 9 Layered object 9a Metal solid 9b Melt-solidified layer 9c Metal powder layer 9d Base 9e Adhesive layer 10 Machine base 20 Powder material supply apparatus 30 Adhesive application apparatus 31 Roller 40 Powder material removing device 50 Electron beam irradiation device 50a Electron beam 51 Chamber 52 Noble gas supply device 52a Gas cylinder 52b filled with rare gas Valve 53 Vacuum device 53a Vacuum pump 53b Flow rate adjusting valve 53c Flow rate adjusting valve 54 Electron beam generating device 54a Cathode electrode 54b Anode electrode 54c Collector 54d Solenoid 54e Ground line 54f Electron beam generating power supply 54g Plasma generating power supply 54h Switch 60 Cutting and / or grinding apparatus 61 Cutting tool or grinding tool 70 XY table 71 Moves in the X-axis direction First Moving body 71a First guide rail 71b First guide block 72 Second moving body 72a moving in the Y-axis direction Second guide rail 72b Second guide block 73 Lifting device 73a Table

Claims (4)

  A first step of forming an adhesive layer by applying an adhesive of a predetermined thickness to a required portion on the upper surface of the metal solid in accordance with the shape of the desired layered object, and supplying metal powder to the adhesive layer A second step of fixing the metal powder to the adhesive layer to form a metal powder layer, a third step of removing excess metal powder not fixed by the adhesive, and a vacuum chamber that is evacuated Plasma is generated in a ring-shaped anode electrode in an atmosphere of a rare gas inside, and the metal powder layer is irradiated with an electron beam to melt and solidify the metal powder layer to be integrated with the metal solid. A fourth step of forming a melt-solidified layer so that the surface of the solid is in a modified state; and the desired layered product by repeating the first to fourth steps to laminate the melt-solidified layer. 3D characterized by manufacturing Production method shaped for laminate shaped article.   3. The tertiary according to claim 1, wherein at least one of a step of cutting an outer surface of the metal solid or a step of grinding is included in the course of manufacturing the layered object. Manufacturing method of original shaped layered object.   An adhesive application device that forms an adhesive layer by applying an adhesive of a predetermined thickness to a required portion on the upper surface of the metal solid in accordance with the shape of the desired layered object, and supplying metal powder to the adhesive layer A powder material supply device that fixes the metal powder to the adhesive layer to form a metal powder layer, a powder material supply device that removes excess metal powder not fixed by the adhesive, and a vacuum chamber that is evacuated Plasma is generated in a ring-shaped anode electrode in an atmosphere of a rare gas inside, and the metal powder layer is irradiated with an electron beam to melt and solidify the metal powder layer to be integrated with the metal solid. An electron beam irradiation device that forms a melt-solidified layer so that the surface of the solid is in a modified state, and laminates the melt-solidified layer to produce the desired three-dimensional model, Laminated structure Things of manufacturing equipment.   The apparatus for producing a three-dimensional layered object according to claim 4 or 5, comprising at least one of a device for cutting an outer surface of the metal solid and a device for grinding. .

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