JP2015026772A - Joining and cutting device for connection conductor and joining and cutting control method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To sequentially join a long and flexible connection conductor having a large cross sectional area with an ultrasonic wave to junction surfaces of a plurality of junction objects and sharply cut the connection conductor at the final junction position to prevent junction peeling from being generated.SOLUTION: A long and flexible connection conductor 110 sequentially joined with an ultrasonic wave to a plurality of junction objects 106, 102, 104 mounted on a substrate 101 planarly moving with a movable table 200 is cut by a cutting tool 410 at a final junction position 104. The cutting tool 410 is provided between a route guiding tool 420 of the connection conductor 110 and an excited tool 310 for ultrasonic junction and provided with a front cutter and a rear cutter. Since the excited tool 310 and the cutting tool 410 can independently perform vertical movement, there may be a difference between the cutting position and the junction surface position, and thereby the rear cutter can be arranged.

Description

  The present invention provides a connection conductor in which a long flexible connection conductor is sequentially ultrasonically bonded to the bonding surfaces of a plurality of objects to be bonded, and the connection conductor is cut at a bonding end position. Joining cutting apparatus and joining cutting control method, and in particular, a joining conductor cutting apparatus and joining cutting control method suitable for an object to be joined including, for example, a power semiconductor element and a connecting conductor having a large cross-sectional area through which a large current flows. It relates to the improved technology.

  The electrode pads of one or a plurality of power semiconductor elements and the case terminals for external connection are connected in series by, for example, an aluminum foil ribbon or a copper foil ribbon which is a tape-shaped flat metal conductor, and such series connection Various techniques for performing ribbon bonding by ultrasonic bonding in a manufacturing process of a power semiconductor module in which a plurality of power semiconductor elements are mounted on one circuit board are disclosed.

  For example, in FIGS. 5 and 6 of the following Patent Document 1 “Semiconductor Module Manufacturing Method”, a wedge bond tool 26 in which ultrasonic vibration is applied and ultrasonic bonding is performed at a point B on the semiconductor chip 12 includes a cutter 28. The wire 16 as a connecting conductor is half-cut in the air in the vicinity after ultrasonic bonding (FIG. 5), and further moved to tear it off (FIG. 6), so that the semiconductor chip 12 is impacted and scratched when the wire is cut. And so on. The wire 16 is supplied from a wire guide 24, and the wire guide 24 is provided with a clamper 22. The clamper 22 is released when the wire guide 24 is moved to the aerial position. The clamper 22 holds the wire 16, and the wedge bond tool 26, the cutter 28, and the wire guide 24 are integrated, and the wire 16 is pulled out from a wire reel (not shown) when moving relative to the semiconductor chip 12. . Further, since the cutter 28 and the wire guide 24 are arranged with the wedge bond tool 26 sandwiched therebetween, when the wire 16 is cut, the wire 16 wraps around the distal end surface of the wedge bond tool 26, thereby It is not necessary to send out the wire 16 at the start of joining to the joining surface.

  Further, according to FIGS. 2 and 3 of Patent Document 2 “Wire bonding method and wire bonding apparatus” below, the cutter 6 is disposed between the tool 3 to which ultrasonic vibration is applied and the wire guide 25, and FIG. In FIG. 3, the bonding wire 4 is ultrasonically bonded and cut by the cutter 6, and then the whole ascends in FIG. 3 and the wire guide 25 is tilted. It is sent to the tip surface of the tool 3 to prepare for joining to other joining surfaces. Even in the process of moving from one joining point to another joining point, the bonding wire 4 is delivered by the wire delivery mechanism 21.

  In addition, according to FIG. 2 of the following Patent Document 3 “Wire Bonding Capillary Device and Method”, the ultrasonic bonding capillary 102 is provided with a clamp holding portion 118 and a cutting tool 124 of the ribbon-like wire 104, The cutting tool 124 cuts the ribbon-like wire 104 in a shearing manner at the end face position of the clamp holding portion 118.

Japanese Patent Laid-Open No. 2002-026058 (paragraph [0014] in FIG. 4, abstract, FIG. 5, FIG. 6) JP 2008-270556 A (FIG. 1, abstract, FIG. 2, FIG. 3, paragraphs [0014], [0015]) Japanese translation of PCT publication No. 2008-543115 (FIG. 2, abstract, paragraph [0016])

(1) Description of problems in the prior art The “semiconductor module manufacturing method” according to Patent Document 1 has a feature that the motor for feeding the wire 16 is not required, but the cutter 28 is provided on the opposite side of the wedge bond tool 26. Therefore, when the wire 16 is cut, the wedge bond tool 26 needs to be shifted back, and the wire 16 is cut by half cutting and tearing, so that the cutting tension causes the ultrasonic bonding surface to be peeled off. There is a fear.

  In particular, when the connecting conductor is a rectangular wire having a large cross-sectional area, the tension required for half-cutting and tearing increases, which causes a problem of acting on the local portion of the ultrasonic bonding surface to promote bonding peeling. In addition, since the cutter 28 and the wire guide 24 are arranged at a position sandwiching the wedge bond tool 26, the ultrasonic bonding unit mainly including the wedge bond tool 26, the cutter 28, its driving mechanism, and the wire guide 24 are included. There is a problem that it is difficult to separate the peripheral accessory unit and it is difficult to use a general-purpose ultrasonic bonding unit.

  In the “wire bonding method and wire bonding apparatus” according to Patent Document 2, since the cutter 6 cuts the bonding wire 4 at a position closest to the second bonding portion S2, the second bonding terminal T2 may be an electrode of a semiconductor element. However, it must be used as the case terminal surface. If it is cut at the surface of the semiconductor element, the semiconductor element may be damaged. Further, since the cutter 6 is provided between the tool 3 and the wire guide 25, it is necessary to send the wire by the wire sending mechanism 21 after cutting the bonding wire 4.

  However, the pair of rollers 22 that are rotationally driven by the wire delivery mechanism 21 are provided outside the slide base 17 and the electric motor 19 that are wire guide tilt mechanisms, and are disposed at a relatively remote position from the end face of the tool 3. Therefore, there is a problem that it is difficult to accurately control the delivery length of the bonding wire 4.

  In particular, when the connecting conductor is a flat wire, the wire is bent in a bellows shape in the hollow wire guide 25 and is difficult to feed, and the rotation amount of the feeding roller 22 and the end face of the tool 3 are There is a problem that the actual length dimension sent out does not match the fluctuation. Further, the ultrasonic joining unit mainly composed of the tool 3, the cutter 6 and its driving mechanism, and the peripheral accessory unit including the wire guide 25 and the wire delivery mechanism 21 are configured integrally, depending on the joining member. The general-purpose ultrasonic bonding unit cannot be easily replaced and used.

  In the “wire bonding capillary device and method” according to Patent Document 3, the ribbon-like wire 104 is cut in a shearing manner by the cutting tool 124 and the clamp holding portion 118, so that the workpiece 106 is not damaged. Thus, it becomes difficult to feed the cut ribbon-like wire 104 to the distal end surface of the ultrasonic bonding capillary 102.

  Also, a peripheral accessory unit including an ultrasonic bonding unit mainly composed of an ultrasonic bonding capillary 102, a cutting tool 124 and its driving mechanism, a clamp holding portion 118 and its driving mechanism, and a ribbon wire 104 delivery mechanism. There is a need to be integrated and there is a problem that a general-purpose ultrasonic bonding unit cannot be used.

(2) Object of the present invention A first object of the present invention is to provide a connection conductor joining and cutting device having a cutting tool that sharply cuts a connection conductor having a large cross-sectional area and does not damage a semiconductor element. is there.

  A second object of the present invention is to provide a connection conductor joining / cutting device having a route guiding tool capable of delivering a connection conductor having a large cross-sectional area to an ultrasonic joining site with an accurate dimension.

  A third object of the present invention is to provide a general-purpose ultrasonic bonding unit by dividing an ultrasonic bonding unit mainly including a vibration tool and a peripheral accessory unit including a connection conductor cutting tool and a route guidance tool. It is an object of the present invention to provide a method for controlling the joining and cutting of connection conductors that can utilize the above.

  A connecting conductor bonding / cutting device according to a first aspect of the present invention is a long flexible connecting conductor supplied via a route guidance tool to bonding surfaces of a plurality of bonding objects mounted on a substrate. A vibrating tool for performing ultrasonic bonding by sequentially pressing, a cutting tool for cutting ends of the connection conductors that electrically connect the plurality of bonding objects, and ultrasonic waves for the plurality of bonding objects A connecting conductor joining and cutting device comprising: a movable table movable in the X-axis direction or the Y-axis direction in parallel with the joining surface; and a lifting table movable in the Z-axis direction orthogonal to the ultrasonic joining surface. The elevating table is divided into a first elevating table and a second elevating table that can perform an elevating operation independently of each other, and the movable table includes the plurality of joining objects. The board on which the object is mounted The first and second elevating tables are mounted, and the substrate is opposed to the vibrating tool, the cutting tool, and the route guiding tool with a gap between them. One lifting table includes an ultrasonic vibration mechanism that applies ultrasonic vibration to the vibration tool, a pressing mechanism that presses the vibration tool against the surface of the connection conductor with a predetermined pressure, and the vibration table. The tool is integrated and moved up and down by a first lifting mechanism, and the second lifting table is mounted with the cutting tool including the route guiding tool, a cutting drive mechanism and a cutter. The cutting tool is disposed between and adjacent to the path guiding tool and the vibration-excited tool, and the cutting tool is disposed along the path. Invitation A through path that guides the connection conductor as a part of the tool is provided, and at the opening end of the through path, a back cutter that is positioned on the back side of the connection conductor, and a front surface that is positioned on the front side of the connection conductor. A cutter is disposed, and the front cutter and the back cutter cooperate to constitute the cutter for cutting the connection conductor, and the connection conductor led out from the opening end is a joint surface of the joint object Passing through a gap space between the pressing end surface of the vibrating tool at the lowering standby position, and the cutter is moved down and moved toward the bonding surface of the final object to be bonded. At a time after the conductor is pressed, the connection conductor is cut by the cutting drive mechanism.

  According to a second aspect of the present invention, there is provided a connection conductor bonding / cutting device, which is a long flexible connection conductor that is supplied to a bonding surface of a plurality of bonding objects mounted on a substrate via a route guidance tool. A vibrating tool for performing ultrasonic bonding by sequentially pressing, a cutting tool for cutting ends of the connection conductors that electrically connect the plurality of bonding objects, and ultrasonic waves for the plurality of bonding objects A connecting conductor joining and cutting device comprising: a movable table movable in the X-axis direction or the Y-axis direction in parallel with the joining surface; and a lifting table movable in the Z-axis direction orthogonal to the ultrasonic joining surface. The elevating table is divided into a first elevating table and a second elevating table that can perform an elevating operation independently of each other, and the movable table includes the plurality of joining objects. The board on which the object is mounted The first and second elevating tables are mounted, and the substrate is opposed to the vibrating tool, the cutting tool, and the route guiding tool with a gap between them. One lifting table includes an ultrasonic vibration mechanism that applies ultrasonic vibration to the vibration tool, a pressing mechanism that presses the vibration tool against the surface of the connection conductor with a predetermined pressure, and the vibration table. The tool is integrated and moved up and down by a first lifting mechanism, and the second lifting table is mounted with the cutting tool including the route guiding tool, a cutting drive mechanism and a cutter. The path guide tool is provided with a feed roller that is driven to rotate by a feed motor capable of controlling the amount of rotation, and the length of the connecting conductor passing through the cutter is raised and lowered by a second lifting mechanism. Is a value proportional to the amount of rotation of the feed roller, and the overall length of the cut portion of the connection conductor connecting the plurality of objects to be joined is controlled by the feed dimension of the connection conductor by the feed motor. It has become so.

  According to a third aspect of the present invention, there is provided a connection conductor cutting control method comprising: a long flexible connection supplied via a route guidance tool to bonding surfaces of a plurality of bonding objects mounted on a substrate; A vibrating tool that performs ultrasonic bonding by sequentially pressing conductors, a cutting tool that cuts the ends of the connection conductors that electrically connect the plurality of objects to be bonded with a cutter, and the cutting of the connection conductors A feed motor that feeds from the open end of the tool, a movable table that is movable in the X-axis direction or the Y-axis direction in parallel with the ultrasonic bonding surfaces of the plurality of objects to be bonded, and orthogonal to the ultrasonic bonding surfaces A connection conductor joining / cutting control method for a connecting conductor joining / cutting device having first and second lifting tables movable in the Z-axis direction, wherein the applied object mounted on the first lifting table Vibration tool and the vibration tool An ultrasonic vibration mechanism that imparts high-frequency vibrations to the head, a pressing mechanism that presses the vibration-excited tool against the connection conductor, and a first lifting mechanism that lifts and lowers the first lifting table. An ultrasonic bonding control unit for the bonding unit, the cutting tool and the route guidance tool mounted on the second lifting table, a second lifting mechanism for lifting and lowering the second lifting table, and the movable table And a peripheral accessory control unit for the peripheral accessory unit constituted by an X-axis drive mechanism or a Y-axis drive mechanism for driving the first and second lift tables, and the first and second lift tables perform a lift operation independently of each other. The ultrasonic bonding control unit and the peripheral incidental control unit communicate with each other while exchanging control signals with each other. And it performs a cooperative control for ultrasonic bonding unit and the peripheral supplementary unit.

  As described above, according to the connection conductor bonding and cutting apparatus according to the first aspect of the present invention, the long flexible connection conductor that is sequentially ultrasonically bonded to a plurality of objects to be bonded is the final bonding position. The cutting tool is located between the path guiding tool of the connecting conductor and the vibration tool for ultrasonic bonding, and includes a front cutter and a back cutter. The vibration tool and the cutting tool Can be moved up and down independently.

  Therefore, the raising and lowering positions can be individually variably set so that the cutting tool can be moved close to and lowered within the range that does not contact the obstacle on the substrate, and the vibrating tool can wait at the upper position of the connection conductor passing through the space. Since it is possible to secure the space to install the back cutter on the back side of the connection conductor, a large current flows and the connection conductor with a relatively large cross-sectional area is cut sharply, the joint part does not peel off, There is an effect that high quality joining and cutting can be performed without scattering the cutting fine pieces.

  In addition, since the cutting tool is provided between the vibration-excited tool and the route guidance tool, the ultrasonic cutting between the connecting conductor and the object to be joined is completed without shifting the cutting tool. Thus, there is an effect that it is possible to suppress an increase in the required space even if a cutting tool is added. Further, since the cutting tool is arranged adjacent to the vibration-excited tool, there is an effect that the connection conductor can be cut by shortening the uncut portion from the final joining position.

  As described above, according to the connection conductor bonding / cutting device according to the second aspect of the present invention, the long flexible connection conductor that is sequentially ultrasonically bonded to a plurality of objects to be bonded is used as a route guidance tool. The total length of the connection conductors that are actively supplied by the provided feed motor and feed roller and connect a plurality of objects to be joined, or the length of the first feed free end is controlled by the amount of rotation of the feed motor. It has become.

  Therefore, the vibration-excited tool can be relatively moved at a space movement distance shorter than the length of the connection conductor having an arch-shaped detour space distance between a plurality of objects to be joined, so that the time required for the relative movement is shortened. As a result, the overall efficiency is improved.

  In addition, by connecting a connecting conductor with a relatively large cross-sectional area with a large current flowing in conjunction with the movement of the movable table, the desired space curve can be obtained without overdoing the joining portion that has already been ultrasonically joined. Can be bridged to the next joining portion, and cutting can be performed with a cutter at the final position, so that high-quality joining and cutting can be performed.

  Furthermore, since the cutting tool and the route guiding tool having the feed motor are integrally driven up and down by the second lifting mechanism, a feed roller is provided at a position adjacent to the cutter so that the connecting conductor is not bent. There is an effect that the connection conductor can be reliably sent out.

  As described above, according to the connection conductor joining / cutting control method according to the third aspect of the present invention, the connection conductor joining / cutting device is divided into the ultrasonic joining unit and the peripheral accessory unit, and the ultrasonic joining control unit is configured. And the peripheral accessory control unit perform coordinated control for the ultrasonic bonding unit and the peripheral accessory unit while exchanging control signals with each other.

  Therefore, there is an effect that it is possible to obtain a connection conductor bonding / cutting device having an inexpensive configuration by using a general-purpose ultrasonic bonding device for wire bonding. In addition, when a programmable controller is used as the peripheral accessory control unit, there is a feature that it is possible to flexibly cope with the required entire system including workpiece loading / unloading control.

It is a top view of the workpiece | work in Embodiment 1 of this invention. It is a side view of the workpiece | work in Embodiment 1 of this invention. BRIEF DESCRIPTION OF THE DRAWINGS It is a whole block diagram of the joining conductor cutting apparatus and workpiece | work in Embodiment 1 of this invention. It is a block diagram of the cutting tool in Embodiment 1 of this invention. It is a right view of the cutting tool in Embodiment 1 of this invention. It is a block diagram of the route guidance tool in Embodiment 1 of this invention. It is a flowchart which shows the procedure of the whole operation | movement of the joining conductor cutting apparatus in Embodiment 1 of this invention. In Embodiment 1 of this invention, it is explanatory drawing when the start end junction part of a connection conductor is joined to a 1st junction surface. In Embodiment 1 of this invention, it is explanatory drawing when the intermediate junction part of a connection conductor is joined to a 2nd junction surface. It is a whole block diagram of the joining cutting apparatus of the connection conductor in Embodiment 2 of this invention, and a workpiece | work.

  DESCRIPTION OF THE PREFERRED EMBODIMENTS A connecting conductor bonding cutting apparatus and a bonding cutting control method according to the present invention will be described below with reference to the drawings according to a preferred embodiment. In the description of the drawings, the same reference numerals are assigned to the same elements, and duplicate descriptions are omitted.

Embodiment 1 FIG.
(1) Detailed Description of Configuration First, a work (joined object) to which a connection conductor is joined by a connection conductor joining / cutting apparatus according to Embodiment 1 of the present invention will be described with reference to FIGS. 1 and 2. . FIG. 1 is a plan view of a workpiece according to Embodiment 1 of the present invention. FIG. 2 is a side view of the workpiece according to Embodiment 1 of the present invention. 2 corresponds to a side view of the workpiece as viewed from the direction of arrow A in FIG. Hereinafter, a case where a power element module is used will be described as a specific example of the work.

  1 and 2, a power element module 100A as a work includes a substrate 101 on which a circuit pattern is generated, a power diode 102a mounted on the substrate 101, a power transistor 104a, a terminal block 106a, a control block, and the like. A first unit circuit element constituted by the element 108a and the signal connector 109a, a power diode 102b, a power transistor 104b, a terminal block 106b, a control element 108b, and a signal connector 109b. A second unit circuit element is provided.

  In FIG. 2, the junction terminals 107a and 107b, which are the middle terminals of the terminal blocks 106a and 106b constituted by the upper, middle, and lower three terminals, the junction electrodes 103a and 103b of the power diodes 102a and 102b, and the power transistor 104a. A power element module is electrically connected to the joining electrodes 105a and 105b of 104b by cutting portions 111a and 111b (111a not shown) of the connection conductor (see the connection conductor 110 in FIG. 3) shown in FIG. 100B is configured.

  The other electrode terminals of the power diodes 102 a and 102 b and the power transistors 104 a and 104 b are connected to the upper and lower terminals of the terminal blocks 106 a and 106 b by the back surface pattern of the substrate 101. The signal terminals of the power transistors 104a and 104b, the control circuit elements 108a and 108b, and the signal connectors 109a and 109b are connected to each other by a signal pattern generated on the substrate 101 or a thin wire bonding wire (not shown).

  In the following description, the power diodes 102a and 102b are collectively referred to as the second bonding target object 102, the bonding electrodes 103a and 103b are collectively referred to as the second bonding surface 103, and the power transistors 104a and 104b are collectively referred to as the third bonding target object 104. The bonding electrodes 105a and 105b are collectively referred to as the third bonding surface 105, the terminal blocks 106a and 106b are collectively referred to as the first bonding object 106, the bonding terminals 107a and 107b are collectively referred to as the first bonding surface 107, and The cut portions 111a and 111b are collectively referred to as a cut portion 111. Further, in this embodiment, a desirable joining order is the first joining object 106, the second joining object 102, and the third joining object 104, which are arranged in the X-axis direction, The circuit elements and the second unit circuit elements are arranged in the Y-axis direction.

  Next, the connection conductor joining and cutting device and the overall structure of the workpiece according to Embodiment 1 of the present invention will be described with reference to FIG. FIG. 3 is an overall configuration diagram of the connection conductor joining and cutting device and the workpiece according to Embodiment 1 of the present invention.

  In FIG. 3, a power element module 100 </ b> A that is a workpiece is configured by a substrate 101 on which circuit elements such as a second bonding target 102, a third bonding target 104, and a first bonding target 106 are mounted. The substrate 101 is carried in and out by a loading / unloading mechanism (not shown) on a movable table 200 serving as a jig.

  The movable table 200 is installed on a stationary base 500, and is at least in the X-axis direction, or X · Y direction, for example, by an X-axis drive mechanism 201 or Y-axis drive mechanism 202 which is a servo motor, and a rotation drive mechanism (not shown). It can be moved or rotated in the axial direction or the X, Y, and θ axis directions. As shown in FIG. 1, the X-axis and the Y-axis are directions parallel to the joint surfaces of the first, second, and third joint surfaces 107, 103, and 105, and the direction orthogonal to this is the Z-axis direction. To do. The Z-axis direction may be the ascending / descending direction for the sake of convenience, but this does not necessarily indicate the vertical direction.

  The first lifting table 300 is moved up and down in the Z-axis direction by a first lifting mechanism 530 that is a servo motor, for example. In the first lifting table 300, the vibration tool 310 to which ultrasonic vibration is applied by the ultrasonic vibration mechanism 320, and the tip surface of the vibration tool 310 are connected to the first and second via the connection conductor 110. A pressing mechanism 330 that is, for example, an air cylinder for sequentially pressing the bonding surfaces of the third objects 106, 102, and 104 is mounted.

  The second lifting table 400 is moved up and down in the Z-axis direction by a second lifting mechanism 540 that is, for example, a servo motor. On the second lifting table 400, a cutting tool 410 described later with reference to FIGS. 4 and 5 and a route guiding tool 420 described later with reference to FIG. 6 are mounted.

  A long flexible connecting conductor 110 made of, for example, an aluminum foil tape having a thickness of 0.4 mm and a width of 5 mm is wound around the rotating reel 510 installed on the stationary base 500. The extracted connection conductor 110 passes through a through roller 430, a guide roller 432, and a route guide tool 420, passes through a through-path 411 c provided in a cutting tool 410 described later, and is supplied to the ultrasonic bonding surface. It has become.

  The hand feeding roller 430 is periodically pushed downward by a swing drive mechanism 431, which is an air cylinder, for example, according to the supply amount of the connecting conductor 110, and the connecting conductor 110 is handed out from the rotating reel 510. The connection conductor 110 is replenished while waiting at the position and having a slack.

  The control panel 700A includes an ultrasonic bonding control unit 730 that operates with a dedicated microprocessor and a peripheral accessory control unit 740 that operates with, for example, a programmable controller. The ultrasonic bonding control unit 730 vibrates the tool 310 to be excited. The ultrasonic vibration mechanism 320, the pressing mechanism 330, and the first lifting mechanism 530 are controlled to control the ultrasonic bonding unit. The peripheral accessory control unit 740 includes a cutting motor 413a and a pressing drive member that constitute a cutting tool 410 described later. 414b and the peripheral accessory unit constituted by the feed motor 421, the swing drive mechanism 431, the X-axis drive mechanism 201, and the Y-axis drive mechanism 202 included in the route guidance tool 420 are controlled.

  The ultrasonic bonding unit, the peripheral accessory unit, and the control panel 700A are installed in a stationary housing (not shown) to form a connecting conductor bonding and cutting device, but the power element module 100A as a workpiece is not shown. -The unloading mechanism allows loading and unloading from the stationary cabinet window.

  Further, the rotating reel 510 installed in the stationary casing is arranged so that the replacement work can be performed, and a setting display unit (not shown) is provided on the outer surface of the stationary casing, so that the ultrasonic bonding control unit 730 and the peripheral auxiliary control are provided. Communicate with the unit 740.

  Next, details of the cutting tool 410 in FIG. 3 will be described with reference to FIGS. 4 and 5. FIG. 4 is a configuration diagram of the cutting tool 410 according to the first embodiment of the present invention. FIG. 5 is a right side view of the cutting tool 410 according to Embodiment 1 of the present invention. 5 corresponds to a side view of the cutting tool 410 viewed from the direction of arrow B in FIG.

  4 and 5, the body upper part 411a and the body lower part 411b, which are the core of the cutting tool 410, are integrated on the side wall with the through passage 411c interposed therebetween, and supported on the left end surface of the body upper part 411a in FIG. The plate 411d is fixed. A cutter 412 constituted by a movable front cutter 412a and a fixed back cutter 412b is provided at the opening end on the right side of the through passage 411c in FIG.

  The cutting drive mechanism 413 includes a cutting motor 413a fixed on the support plate 411d, a cam disk 413b that is rotationally driven by the cutting motor 413a, a slide plate 413c that moves downward by the cam disk 413b, It is constituted by a return spring 413d that lifts the slide plate 413c upward, and a front cutter 412a is screwed to the slide plate 413c. As shown in FIG. 5, the front cutter 412 a is an oblique blade for cutting the connection conductor 110 in a sheared manner from the front surface to the back surface of the connection conductor 110, and the operation of the front cutter 412 a from the start of cutting to the completion of cutting. The stroke is at least twice the thickness dimension of the connecting conductor 110.

  The time required for cutting the connection conductor 110 by the cutter 412 can be variably set according to the rotational speed of the cutting motor 413a. The press holding mechanism 414 includes a pressing member 414a provided in the through passage 411c and a pressing driving member 414b that is an air cylinder that moves the pressing member 414a up and down. At least the cutter 412 connects the connecting conductor. When cutting 110, the pressing member 414a is pressed downward to press the connecting conductor 110 into which the through passage 411c is introduced against the lower inner surface of the through passage 411c. Further, also when the hand roller 430 is lowered in FIG. 3, the pressing member 414a is pressed downward so that the connecting conductor 110 does not return backward.

  Next, details of the route guidance tool 420 in FIG. 3 will be described with reference to FIG. FIG. 6 is a configuration diagram of the route guidance tool 420 according to the first embodiment of the present invention.

  In FIG. 6, the route guiding tool 420 is configured by holding a lower plate 420a and an upper plate 420b separated by a plurality of round pin spacers 420c, and the connection conductor 110 is provided between the lower plate 420a and the upper plate 420b. The plurality of round pin spacers 420c introduced to the through-path 411c of the cutting tool 410 and arranged on the left and right sides prevent the connecting conductor 110 from meandering.

  The feed motor 421 rotationally drives the feed roller 422, and the pinch roller 423a that presses the connection conductor 110 against the feed roller 422, together with the pressure contact spring 423d that acts around the rotation fulcrum 423c of the L-shaped plate 423b, is a pressure contact mechanism 423. Is configured.

  The route guidance tool 420 has an inclination angle θ, and a horizontal flat portion 110h is generated in the connection conductor 110 pressed by the pressing member 414a in the through passage 411c. Further, the gap dimension G (see FIG. 4) with the inner surface of the through passage 411c when the pressing member 414a is raised has an important relationship with the length dimension L of the through passage 411c. When the actual gap GT obtained by reducing the thickness dimension T of the connection conductor 110 is reduced, the connection conductor 110 led out from the through passage 411c becomes horizontal, and when the actual gap GT is increased, the inclination angle θ is the same. Derived as an angle. However, the horizontal flat portion 110h is deformed upward.

(2) Detailed Description of Action / Operation Next, a control method of the connecting conductor joining and cutting device shown in FIGS. 3 to 6 will be described with reference to FIGS. FIG. 7 is a flowchart showing a procedure of the entire operation of the connecting conductor joining and cutting device according to Embodiment 1 of the present invention. FIG. 8 is an explanatory diagram in the case where the start end joint portion of the connection conductor 110 is joined to the first joint surface 107 in the first embodiment of the present invention. FIG. 9 is an explanatory diagram when the intermediate joint portion of the connection conductor 110 is joined to the second joint surface 103 in the first embodiment of the present invention.

  First, in FIG. 3, the connection conductor 110 is laid and arranged in advance from the rotary reel 510 to the exit of the cutter 412 by manual operation. Further, for the ultrasonic bonding control unit 730 and the peripheral accessory control unit 740 in the control panel 700A, the position coordinates of the bonding surface, the length of the cut portion of the connection conductor, the super The operation is started after the control constants such as the value of the joining pressure at the time of the sonic joining and the cumulative value of the vibration energy for performing the joining completion determination are stored.

  Subsequently, the steps executed by the ultrasonic bonding control unit 730 (steps 731a, 731b, 732-736) and the steps executed by the peripheral accessory control unit 740 (steps 741a to 741c, 742, 743a, 743b, 744-748). The contents of each step will be described.

  In FIG. 7, step 730 s is an operation start step of the ultrasonic bonding control unit 730, and step 740 s is an operation start step of the peripheral incidental control unit 740.

  Steps 731a and 741a following step 730s and step 740s determine whether or not the common operation command switch is closed. If they are closed, the process proceeds to steps 731b and 741b, respectively. If not, step 731a is executed. This is a determination step for returning to 741a and waiting for the operation command switch to be closed.

  In step 741b, it is determined whether or not a setup for replacing the rotating reel 510 is necessary. If a setup operation is necessary, a determination of YES is made and the process proceeds to step 741c. If the setup operation is not performed, NO is determined. This is a determination step of making a determination and proceeding to step 742.

  Step 741c is a preceding step in which the connection conductor 110 is disposed, and then the cutting tool 410 is driven by a manual operation to cut off an excessive tip of the connection conductor 110 and then the process proceeds to step 742. 8 (A) shows the state of the cutting tool 410 at the time when the process 741c is executed.

  Step 742 drives the X-axis drive mechanism 201 and the Y-axis drive mechanism 202 to move the joining surface of a desired joining object to a position below the vibrating tool 310 and drives the feed motor 421 to connect the connection conductor. FIG. 8B shows the state of the cutting tool 410 at this point.

  Subsequent step 743a is an auxiliary step of generating a lowering command for the vibration tool 310 and interlocking with the lowering operation of the vibration tool 310 in step 732, which will be described later, and additionally sending the connection conductor 110 as necessary. .

  In step 731b, it is determined whether or not the lowering instruction in step 743 has been received. If received, the determination is YES, and the process proceeds to step 732. If not, the determination is NO and the process returns to step 731b. It has become a step.

  Step 732 is a second step in which the first lifting mechanism 530 is driven to lower the vibrating tool 310 to, for example, the first joining surface 107, and FIG. 8C shows the state of the cutting tool 410 at this time. Show.

  In the subsequent step 733, the shape of the connection conductor 110 is joined by pre-pressurizing the vibrating tool 310 to the first predetermined pressure by the pressing mechanism 330 and then releasing it to make it equal to or lower than the second predetermined pressure. This is the third step to get familiar with the surface.

  In the subsequent step 734, the vibrating tool 310 is repressurized to the third predetermined pressure by the pressing mechanism 330, and then the ultrasonic vibration mechanism 320 is driven to apply high-frequency vibration to the vibrating tool 310. The excitation drive is stopped when the accumulated value of the excitation energy this time reaches a predetermined value.

  Subsequent Step 735 is a step of transmitting a notice of completion of ultrasonic bonding when the vibration operation in Step 734 is completed.

  In the subsequent step 736, the excited tool 310 is lifted and retracted by the first drive mechanism 530, and then the process proceeds to step 731a. If the operation command in step 731a continues, the process proceeds to step 731b and the next time. It waits for the descent start.

  In step 743b following step 743a, it is determined whether the joining completion notification in step 735 has been received. If received, YES is determined and the process proceeds to step 744. If not received, the standby step returns to step 743b. It has become.

  In step 744, it is determined whether or not one unit of ultrasonic bonding is completed and the connection conductor 110 needs to be cut. When cutting, a determination of YES is made and the process proceeds to step 746, and NO if not cut. This is a determination step in which the determination is made and the process proceeds to step 745.

  In step 745, the second joining surface 103 of the next second joining object 102 is moved to a position below the vibrating tool 310 by the X-axis driving mechanism 201 and the Y-axis driving mechanism 202 and connected by the feed motor 421. FIG. 9A shows the state of the cutting tool 410 at this point in the fifth step of delivering the conductor 110.

  If the route guidance tool 420 does not have the feed motor 421 but has only the pressing member 414a, first, the pressing member 414a is released from the pressure and the connecting conductor 110 is wired in an arch shape. Increases the relative distance between the substrate 101 and the route guidance tool 420 by a distance corresponding to the required total length of the connection conductor 110, and then clamps the connection conductor 110 with the pressing member 414 a, and then between the substrate 101 and the route guidance tool 420. It is necessary to bring the relative distance closer and stop at the desired joint surface position.

  Therefore, the movable table 200 or the second lift table 400 needs to perform an extra operation to make the connecting conductor 110 arched. However, when the feed motor 421 is provided, the movable table 200 or the second lift table 400 is used. The table 400 may be moved by the shortest distance.

  The state of the cutting tool when the process returns to the process 743a following the process 745 and the process 732 is executed along with the process 743a is as shown in FIG. 9B, but the right side of the connection conductor 110 is It is connected to the previous joining surface 103, and the joining surface at the lower position of the vibrating tool 310 is the next joining surface 105.

  Step 746 is a sixth step of driving the cutting tool 410 to cut the connection conductor 110, and FIG. 8A shows the state of the cutting tool 410 at this point.

  In subsequent step 747, it is determined whether or not there is another unit bonding target in the same substrate 101, and if it is determined that the operation of the current substrate 101 is incomplete, NO is determined and the process proceeds to step 742, and is completed. If so, this is a determination step of determining YES and proceeding to step 748.

  In the case of the power element module 100A shown in FIG. 1, the first joint surface 107a, the second joint surface 103a, and the third joint are obtained by repeating a series of steps 742, 732, 733, 734, and 745. When the joining at the joining surface 105a is completed and the joining at the first joining surface 107b, the second joining surface 103b, and the third joining surface 105b is completed by the determination at Step 747, the process proceeds to Step 748.

  Step 748 is a step of returning to Step 741a after replacing the power element module 100A, which is a work mounted on the movable table 200, with a loading / unloading device (not shown). It should be noted that, by using the joint terminals 107a and 107b adjacent to the terminal blocks 106a and 106b, which are tall parts, as the first joint surface 107, the vibrated tool 310 can be approached, and the connection conductor is cut. Even when the bonding surface 105 is on the semiconductor element, the connection conductor is sharply cut by the cutting tool 410 so that the semiconductor element is not damaged.

(3) Key Points and Features of Embodiment 1 As is apparent from the above description, the connection conductor joining and cutting device according to Embodiment 1 of the present invention has a plurality of joining objects 102, 104, and 106 mounted on the substrate 101. A vibrating tool 310 for performing ultrasonic bonding by sequentially pressing the long flexible connecting conductor 110 supplied via the route guiding tool 420 to the bonding surface of the plurality of bonding objects 102. A cutting tool 410 that cuts the terminal ends of the connecting conductors 110 that are electrically connected to each other and the ultrasonic bonding surfaces of the plurality of objects to be joined 102, 104, and 106, in the X-axis direction or the Y direction A connecting conductor joining and cutting device having a movable table 200 movable in the axial direction and a lifting table movable in the Z-axis direction orthogonal to the ultrasonic bonding surface, wherein the lifting tables are mutually connected The first elevating table 300 and the second elevating table 400 that can be moved up and down independently are configured, and the movable table 200 is mounted with the plurality of objects to be joined. The substrate 101 is placed, and the substrate 101 is disposed so that the vibration tool 310, the cutting tool 410, and the route guidance tool 420 are opposed to each other with a gap.

  The first lifting table 300 includes an ultrasonic vibration mechanism 320 that applies ultrasonic vibration to the vibration tool 310 and a pressure that presses the vibration tool 310 against the surface of the connection conductor 110 with a predetermined pressure. The mechanism 330 and the vibrating tool 310 are integrated, and the first elevating mechanism 530 performs an elevating operation. The second elevating table 400 includes the path guiding tool 420 and the cutting drive mechanism 413. And the cutting tool 410 including the cutter 412 are mounted and moved up and down by a second lifting mechanism 540. The cutting tool 410 is located between the route guiding tool 420 and the vibration tool 310, The cutting tools 410 are arranged adjacent to each other, and the cutting tool 410 becomes a part of the route guidance tool 420 to guide the connection conductor 110. And a through passage 411c to be. A back cutter 412b located on the back surface side of the connection conductor 110 and a front cutter 412a located on the front surface side of the connection conductor 110 are disposed at the opening end of the through passage 411c, and the front cutter 412a and the back surface are arranged. The cutter 412 forms the cutter 412 that cuts the connection conductor 110 in cooperation with the cutter 412b, and the connection conductor 110 led out from the opening end waits for the descent of the joint surface of the workpieces 102, 104, and 106. The cutter 412 passes through a gap space with the pressing end surface of the vibration tool 310 at a position, and the vibration tool 310 approaches and lowers the final bonding surface of the workpiece 104, and the cutter 412 At a time after the connection conductor 110 is pressed, the connection conductor 110 is cut by the cutting drive mechanism 413.

  The cutter 412 is an oblique blade that sequentially cuts the connection conductor 110 from one end to the other end of the cutting line, or is rotated around one end as a fulcrum, and the cutting stroke exceeds the thickness dimension of the connection conductor 110. The lower portion of the opening end has a thickness dimension that is greater than the movable dimension of the cutter 412.

  As described above, in relation to claim 2 of the present invention, the cutter has a movable dimension that exceeds the thickness dimension of the connecting conductor, and the lower portion of the opening of the cutting tool has a thickness dimension greater than this movable dimension. Yes. Therefore, even a connection conductor such as a rectangular conductor having a large thickness dimension can be cut smoothly without requiring a large cutting force, and the joining object is not damaged by the cutter.

  The cutting drive mechanism 413 that drives the cutter 412 includes a cam disk 413b that is rotationally driven by a cutting motor 413a. The time required from the start of cutting of the connecting conductor 110 to the completion of cutting is determined by the cam disk 413b. It is variably set according to the rotation speed.

  As described above, in connection with claim 3 of the present invention, the time required for cutting the connection conductor by the cutter is variably set according to the rotational speed of the cam disk. Accordingly, there is a feature that cutting is performed at a reasonable cutting speed according to the material, thickness, and cross-sectional area of the connection conductor, and the cutting fine pieces are not scattered.

  The through-path 411c provided in the cutting tool 410 is provided with a pressing and holding mechanism 414 for the connection conductor 110. The pressing and holding mechanism 414 cuts the connection conductor 110 by the front cutter 412a and the back cutter 412b. Before the start of the operation, the connecting conductor 110 is pressed against the inner surface of the through-passage 411c to prevent the connecting conductor 110 from being pulled out from the open end by a cutting force, and the path guiding tool 420 is used to tilt the inclination angle. A horizontal flat portion 110h is generated at the end of the connection conductor 110 having θ.

  As described above, in connection with the fifth aspect of the present invention, the connection conductor pressing and holding mechanism is provided inside the opening end of the cutting tool so that the connection conductor is not pulled out from the opening end when the connection conductor is cut. A horizontal flat portion is generated in the connection conductor. Accordingly, there is a feature that the cutting surface is prevented from moving and cutting is inaccurate, and the free end of the connection conductor is easily pressed against the bonding surface of the object to be bonded by the vibrating tool.

  The thickness dimension of the connection conductor 110 from the gap dimension G between the pressing surface and the inner surface of the through passage 411c when the press holding mechanism 414 does not press the connection conductor 110 against the inner surface of the through passage 411c. The ratio (GT) / L between the actual gap dimension obtained by subtracting T and the length dimension L of the through-passage 411c is adjustable to a predetermined value.

  As described above, in relation to the sixth aspect of the present invention, the gap dimension at the non-pressing initial position between the inner surface of the through path of the cutting tool and the pressing surface of the pressing holding mechanism is set to be adjustable. Therefore, if the gap size is increased, the inclination angle of the connection conductor derived from the opening end of the through passage becomes the same value as the inclination angle of the route guidance tool, and if the gap size is reduced, the connection angle derived from the opening end of the penetration passage. Since the inclination angle of the conductor is substantially horizontal, there is a feature that it can be adjusted in advance to an appropriate gap according to the thickness of the connection conductor.

  Ultrasonic bonding is performed by sequentially pressing the long flexible connection conductors 110 supplied via the route guidance tool 420 to the bonding surfaces of the plurality of bonding objects 102, 104, and 106 mounted on the substrate 101. A vibration tool 310 for performing cutting, a cutting tool 410 for cutting the terminal end of the connection conductor 110 electrically connecting the plurality of objects to be bonded 102, 104, and 106, and the plurality of objects to be bonded 102, 104 A connecting conductor having a movable table 200 movable in the X-axis direction or the Y-axis direction in parallel with the ultrasonic bonding surface 106 and a lifting table movable in the Z-axis direction orthogonal to the ultrasonic bonding surface The lifting / lowering table is divided into a first lifting / lowering table 300 and a second lifting / lowering table 400 that can be lifted and lowered independently of each other. The movable table 200 is mounted with the substrate 101 on which the plurality of objects to be joined are mounted. The substrate 101 includes the vibration tool 310, the cutting tool 410, and the route guidance tool 420. Oppositely arranged with a gap.

  The first lifting table 300 includes an ultrasonic vibration mechanism 320 that applies ultrasonic vibration to the vibration tool 310 and a pressure that presses the vibration tool 310 against the surface of the connection conductor 110 with a predetermined pressure. The mechanism 330 and the vibrating tool 310 are integrated, and the first elevating mechanism 530 performs an elevating operation. The second elevating table 400 includes the path guiding tool 420 and the cutting drive mechanism 413. And the cutting tool 410 including the cutter 412 are mounted and moved up and down by a second lifting mechanism 540, and the route guidance tool 420 is rotated by a feed motor 421 whose rotational drive amount can be controlled. A length of the connecting conductor 110 provided with a roller 422 and passing through the cutter 412 is proportional to the amount of rotation of the feed roller 422. Thus, the overall length of the cut portions 111a and 111b of the connection conductor 110 connecting the plurality of objects to be joined 102, 104, and 106 is controlled by the feed dimension of the connection conductor 110 by the feed motor 421. It is like that.

  The feed motor 421 rotates and drives one or both of the feed roller 422 and the pinch roller 423a which are a pair of rotating rollers, and one or both of the pair of rotating rollers has a lower hardness than the connection conductor 110. While being comprised with the material, one is press-contacted with the predetermined pressure with respect to the other by the press-contact mechanism 423.

  As described above, in relation to claim 8 of the present invention, the low-hardness rotating roller is brought into pressure contact with a predetermined pressure and is rotationally driven by the feed motor. Therefore, since there is no slip between the feed roller and the connecting conductor, there is a feature that accurate feeding can be performed and the surface damage of the connecting conductor does not occur.

  The second lifting table 400 is installed in a stationary state with respect to the lifting operation, and includes a rotating reel 510 around which the connecting conductor 110 is wound, and the connecting conductor 110 unwound from the rotating reel 510 includes: It is guided to the cutter position of the cutting tool 410 via the hand roller 430 mounted on the second lifting table 400 and the route guide tool 420, and the feed motor 421 is stopped at the hand roller 430. During the period, the swing drive mechanism 431 is driven to swing, so that the connection conductor 110 is handed out from the rotary reel 510 to generate the slack of the connection conductor 110 up to the position of the feed motor 421. It has become.

  As described above, in connection with the ninth aspect of the present invention, the connection conductor is unwound from the rotating reel and is guided to the cutter position via the hand roller installed in the second lifting mechanism. The hand roller is driven to swing up and down. Accordingly, there is a feature that the connecting conductor can be accurately sent out at a target variable speed by suppressing the fluctuation of the load torque with respect to the feed motor during the rotational drive.

  The substrate 101 on which the plurality of objects 102, 104, and 106 are mounted is moved by the X-axis drive mechanism 201 or the Y-axis drive mechanism 202 in the X-axis or Y-axis direction parallel to the bonding surface. The first lifting table 300 loaded with the ultrasonic vibration mechanism 320, the pressing mechanism 330, and the vibration tool 310, the route guidance tool 420, and the cutting tool 410 are loaded. The second lifting table 400 and the movable table 200 are mounted on a common stationary base 500.

  As described above, in relation to the eleventh aspect of the present invention, the movable table that performs relative movement and the first and second elevating mechanisms are mounted on the stationary base. Therefore, since the first and second lifting tables do not need to be moved in any direction other than the lifting direction, the entire structure is characterized by being reduced in size and weight.

  Ultrasonic bonding is performed by sequentially pressing the long flexible connection conductors 110 supplied via the route guidance tool 420 to the bonding surfaces of the plurality of bonding objects 102, 104, and 106 mounted on the substrate 101. A vibration tool 310 for performing cutting, a cutting tool 410 for cutting a terminal end of the connection conductor 110 electrically connecting the plurality of objects to be joined 102, 104, and 106 with a cutter 412, and the connection conductor 110 for the connection conductor 110 A feed motor 421 that feeds from the opening end of the cutting tool 410, and a movable table 200 that is movable in the X-axis direction or the Y-axis direction in parallel with the ultrasonic bonding surfaces of the plurality of objects to be bonded 102, 104, and 106. And a first and second elevating tables 300 and 400 that are movable in the Z-axis direction orthogonal to the ultrasonic bonding surface. In the cutting control method, the vibration tool 310 mounted on the first lifting table 300, an ultrasonic vibration mechanism 320 that applies high-frequency vibration to the vibration tool 310, and the vibration tool 310 An ultrasonic bonding control unit 730 for an ultrasonic bonding unit configured by a pressing mechanism 330 that presses the connection conductor 110 and a first lifting mechanism 530 that lifts and lowers the first lifting table 300; The cutting tool 410 and the route guiding tool 420 mounted on the second lifting table 400, the second lifting mechanism 540 for lifting and lowering the second lifting table 400, and the X-axis drive for driving the movable table 200 A peripheral accessory control unit 740 for the peripheral accessory unit constituted by the mechanism 201 or the Y-axis drive mechanism 202 is provided. The first and second lifting tables 300 and 400 are divided so as to be able to perform the lifting operation independently of each other, and the ultrasonic bonding control unit 730 and the peripheral auxiliary control are configured. The unit 740 performs coordinated control for the ultrasonic bonding unit and the peripheral accessory unit while exchanging control signals with each other.

  The peripheral accessory control unit 740 shares the first step 742, the fifth step 745, and the sixth step 746, and the ultrasonic bonding control unit 730 performs the second step 732, the third step 733, and the fourth step. 734, and the first step 742 performs cutting of the connection conductor 110 with the cutting tool 410, and then the vibration tool 310 is connected to one of the bonding surfaces of the plurality of bonding objects 102, 104, and 106. The connection conductor 110 is moved relative to the upper part, and the connection motor 110 is sent to the upper part of the joining surface by the feed motor 421. In the second step 732, the connection conductor 110 sent out in the first step 742 is added to the target. The third step 733 is moved down to the upper part of the joint surface by a swing tool 310, and the third step 733 The vibrating tool 310 lowered by 42 is further lowered to pre-pressurize the joint surface, and after forming the joint surface portion of the connection conductor 110, the pressing force is released, and the fourth step 734 includes the step Subsequent to the third step 733, the vibration tool 310 is lowered again and pressed against the joining surface to apply ultrasonic vibration, and the connection conductor 110 is connected to one of the plurality of joining objects 102, 104, and 106. Ultrasonic bond to two joint surfaces. In the fifth step 745, following the fourth step 734, the vibrating tool 310 is relatively moved above the joining surface of the next object 102, 104, 106, and the feed motor 421 is connected to the connection. The conductor 110 is sent out by a predetermined dimension, and the sixth step 746 is performed from the second step 732 to the fifth step until ultrasonic connection of the connection conductor 110 to the plurality of objects 102, 104, 106 is completed. Subsequent to the fourth step 734 after repeating up to 745, the connecting conductor 110 is cut using the cutting tool 410, and a plurality of joints mounted on one substrate 101 in the sixth step 746 are cut. One unit of joining and cutting of the connection conductor 110 to the object 102, 104, 106 is completed, and the other on the same substrate 101 When there is unit bonding and cutting, the first step 742 to the sixth step 746 are repeatedly executed, and after the sixth step 746 in which the bonding and cutting to one substrate 101 is completed, the next substrate 101 is processed. Is transferred to the first step 742.

  As described above, in connection with the fourteenth aspect of the present invention, the long flexible connecting conductor that is sequentially ultrasonically bonded to a plurality of objects to be bonded is positively provided by the feed motor provided in the route guidance tool. The total length of the connection conductors connected to the plurality of objects to be joined or the length of the first delivery free end is controlled by the amount of rotation of the feed motor, and at the final position, it is cut by a cutter and applied. The vibration tool is transferred to the upper part of one joining surface of a plurality of objects to be joined on the next substrate, and then the sending of the connection conductor and the ultrasonic joining are started again. Therefore, in a substrate on which a plurality of objects to be joined are mounted, a series of joining units from joining start to joining completion are continuously repeated, or connection conductors are cut and connected efficiently to a plurality of substrates. There is an effect that can be performed well. Further, since a connection conductor having a relatively large cross-sectional area can be used because a large current flows, for example, a part of the electrode terminals of a power semiconductor element mounted on a circuit board and the electrode terminals of other power semiconductor elements There is an effect that a part or connection between external connection terminals can be connected without depending on a circuit pattern.

  The peripheral accessory control unit 740 further shares the preceding step 741c. As a pre-process of the first step 742, the connection conductor 110 is cut by the sixth step 746, or after the setup change. In the initial operation, the protruding portion of the connection conductor 110 protruding from the open end of the cutting tool 410 in the preceding step 741c is cut by the cutter 412 and sent out from the route guiding tool 420 with a predetermined inclination angle θ. The connecting conductor 110 is pressed and formed in a horizontal direction by a pressing and holding mechanism 414 provided in the cutting tool 410. In the first second step 732 following the first step 742, the vibration tool 310 is vibrated. The press-molded horizontal flat part 110h is joined to the object 10 to be joined. It is adapted to approach or contact the bonding surface of the.

  As described above, in relation to the fifteenth aspect of the present invention, in the initial operation in which the vibrating tool presses the free end of the connection conductor and presses it against the joint surface, the horizontal flat portion provided at the free end of the connection conductor is pressed. It is like that. Therefore, since the connection conductor does not come off from the tip of the vibrating tool, there is a feature that it can be surely pressed against the joint surface. Moreover, the horizontal flat part provided in the free end of a connection conductor has the characteristic automatically generated at the time of the last cutting of a connection conductor.

  The peripheral accessory control unit 740 further shares an auxiliary step 743a. The auxiliary step 743a is a process in which the ultrasonic welding control unit 730 lowers the vibrating tool 310 in the second step 732, and the feeding motor 421 is driven to further deliver the connecting conductor 110.

  As described above, in connection with the sixteenth aspect of the present invention, when the tool to be vibrated descends, the connection conductor is further fed out. Therefore, it is possible to avoid the contact with other obstacles by shortening the distance of the sending free end of the connection conductor at the initial joining position, and at the intermediate joining position, the vibration tool being lowered is lowered. There is a feature that the contact pressure between the tip and the connecting conductor can be reduced, and the vibrating tool can be lowered smoothly.

  In the third step 733, the pressing mechanism 330 of the vibration tool 310 causes the vibration to be applied so that the pressure that presses the connection conductor 110 by the vibration tool 310 is equal to or higher than a first predetermined pressure. The tool 310 is further lowered to press the connecting conductor 110 against the objects 102, 104, and 106 to be joined, and subsequently the pressure is reduced so that the pressing force by the vibrating tool 310 is equal to or lower than a second predetermined pressure. In the fourth step 734, the connecting conductor 110 is pressed against the objects to be joined 102, 104, and 106 until the pressing force by the vibrating tool 310 reaches a third predetermined pressure, and then the applied object is applied. The vibration operation of the vibration tool 310 is started and ultrasonic bonding is performed.

  As described above, in connection with the seventeenth aspect of the present invention, the vibration-excited tool preliminarily pressurizes the connection conductor against the object to be joined with a pressing force equal to or higher than the first predetermined pressure, and releases the prepressurization. Re-pressurization is performed with a pressing force that is a third predetermined pressurization, and then ultrasonic vibration is applied to perform ultrasonic bonding. Therefore, even if there is a step between the back surface of the connection conductor led out from the opening end of the cutting tool and the connection surface of the object to be bonded, the bonding flat portion of the connection conductor is formed by pre-pressurization, and the connection conductor and There is a feature that ultrasonic bonding is performed after the objects to be bonded come into plane contact. In this way, ultrasonic bonding is possible even when the opening end of the cutting tool is located at a position higher than the bonding surface, so that the back cutter can be arranged at the back surface position of the connection conductor.

  In the sixth step 746, as a pre-process for cutting the connection conductor 110, the vibration tool 310 is first lifted, and then the feed motor 421 is moved while the cutting tool 410 is moved closer to the joining surface side. Is driven in reverse to absorb the slackness of the connection conductor 110 accompanying the approaching movement.

  As described above, in connection with claim 18 of the present invention, as a pre-process for cutting the connection conductor, first, the vibrating tool is raised to create an empty space, and then the cutting tool is moved closer to the joining surface side. The feed motor is driven in reverse. Therefore, there is a feature that the uncut portion of the connection conductor after cutting can be further shortened.

Embodiment 2. FIG.
(1) Detailed Description of Configuration, Action, and Operation Next, the connection conductor joining / cutting device and the overall configuration of the work in Embodiment 2 of the present invention will be described with reference to FIG. FIG. 10 is an overall configuration diagram of a connection conductor joining and cutting device and a workpiece according to Embodiment 2 of the present invention.

  In FIG. 10, the power element module 100 </ b> A that is a workpiece is the same as that shown in FIGS. 1 and 2, and is the second joining object 102, the third joining object 104, and the first joining object. The circuit board 101 includes a circuit board 101 on which circuit elements such as the object 106 are mounted. The circuit board 101 is mounted on the mounting jig 120 and placed on the stationary frame 500 or is intermittently transferred by the transport conveyor 550. It is like that.

The movable table 600 can be moved at least in the X-axis direction or the Y-axis direction by, for example, an X-axis drive mechanism 601 or a Y-axis drive mechanism 602 that is a servo motor.
As shown in FIG. 1, the X-axis and the Y-axis are directions parallel to the joint surfaces of the first, second, and third joint surfaces 107, 103, and 105, and the direction orthogonal to this is the Z-axis direction. To do.
The Z-axis direction may be the ascending / descending direction for the sake of convenience, but this does not necessarily indicate the vertical direction.

  The first lifting table 300 is mounted on the movable table 600 and is moved up and down in the Z-axis direction by a first lifting mechanism 630 that is a servo motor, for example. As in the case of FIG. 3, the first lifting table 300 is provided with the vibration tool 310 to which ultrasonic vibration is applied by the ultrasonic vibration mechanism 320 and the tip surface of the vibration tool 310 with the connection conductor 110. A pressing mechanism 330 which is an air cylinder, for example, is sequentially mounted on the bonding surfaces of the first, second, and third objects to be bonded 106, 102, and 104.

  The second lifting table 400 is mounted on the movable table 600 and is moved up and down in the Z-axis direction by a second lifting mechanism 640 that is a servo motor, for example. The second lifting table 400 is mounted with the cutting tool 410 described above with reference to FIGS. 4 and 5 and the route guiding tool 420 described with reference to FIG.

  A long flexible connecting conductor 110 made of, for example, an aluminum foil tape having a thickness of 0.4 mm and a width of 5 mm is wound around the rotating reel 610 installed on the movable table 600. The output connection conductor 110 passes through the slack detection sensor 440, the guide roller 432, and the route guidance tool 420, passes through the through-path 411c provided in the cutting tool 410, and is supplied to the ultrasonic bonding surface. It is like that.

  Note that an unwinding motor 611 is provided on the rotating shaft of the rotating reel 610, and the unwinding motor 611 is rotationally driven according to the supply amount of the connecting conductor 110, and the connecting conductor 110 detected by the slack sensor 440. The amount of slack is controlled so as not to be less than a predetermined value. The unwinding motor 611 may be provided with a feed roller that sandwiches the connection conductor 110 instead of being provided on the rotating shaft of the rotary reel 610, and this feed roller may be driven.

  The control panel 700B includes an ultrasonic bonding control unit 730 that operates with a dedicated microprocessor and a peripheral accessory control unit 740 that operates with, for example, a programmable controller. The ultrasonic bonding control unit 730 includes the above-described vibrating tool 310. The ultrasonic joining unit constituted by the ultrasonic vibration mechanism 320, the pressing mechanism 330, and the first elevating mechanism 630 that controls vibration is controlled, and the peripheral accessory control unit 740 presses the cutting motor 413a that constitutes the cutting tool 410 described above. The peripheral accessory unit configured by the drive member 414b and the feed motor 421, the unwind motor 611, the X-axis drive mechanism 601, and the Y-axis drive mechanism 602 included in the route guidance tool 420 is controlled.

  The ultrasonic bonding control unit 730, the peripheral accessory control unit 740, and the control panel 700B are installed in a stationary casing (not shown) to form a connecting conductor bonding cutting device. It is installed on a stationary stand to constitute, and is opposed to the power element module 100A as a work with a gap.

  Further, the rotating reel 610 installed on the movable table 600 is arranged so as to be able to be exchanged, and a setting display unit (not shown) is provided on the outer surface of the stationary housing, so that the ultrasonic bonding control unit 730 and peripheral accessories are provided. Communication is performed with the control unit 740.

  In the above description, the unwinding motor 611 and the slack sensor 440 are used to perform the replenishment control of the connection conductor 110, but the hand roller 430 and the swing drive mechanism 431 can be provided as in FIG. On the other hand, instead of providing the hand roller 430 and the swing drive mechanism 431 in FIG. 3, an unwinding motor 611 and a slack sensor 440 can be used.

  Further, a rotation lever 413e is added to the cutting tool 410 in FIG. 10, and a cam disk 413b that is rotationally driven by the cutting motor 413a drives the cutter 412 via the rotation lever 413e. . As a result, the movable dimension of the front cutter 412a can be increased beyond the lift dimension of the cam disk 413b, and the axial direction of the cutting motor 413a is made to coincide with the axial direction of the feed motor 421, so that an installation space is secured. It is easy to configure.

  The rotation lever 413e can be applied to the case of FIG. 3, but the cutting tool 410 having no rotation lever 413e as shown in FIG. 3 can also be used in the case of FIG.

(2) Key Points and Features of Embodiment 2 As is clear from the above description, the connection conductor joining and cutting device according to Embodiment 2 of the present invention includes a plurality of joining objects 102, 104, and 106 mounted on the substrate 101. A vibrating tool 310 for performing ultrasonic bonding by sequentially pressing the long flexible connecting conductor 110 supplied via the route guiding tool 420 to the bonding surface of the plurality of bonding objects 102. A cutting tool 410 that cuts the terminal ends of the connecting conductors 110 that are electrically connected to each other and the ultrasonic bonding surfaces of the plurality of objects to be joined 102, 104, and 106, in the X-axis direction or the Y direction A connecting conductor joining and cutting device having a movable table 600 movable in the axial direction and a lifting table movable in the Z-axis direction orthogonal to the ultrasonic bonding surface, wherein the lifting tables are mutually connected The movable table 600 is divided into a first lifting table 300 and a second lifting table 400 that can perform the lifting operation independently. The movable table 600 includes the first and second lifting tables 300. 400 is mounted, and the substrate 101 is disposed so that the vibrating tool 310, the cutting tool 410, and the route guiding tool 420 are opposed to each other with a gap.

  The first lifting table 300 includes an ultrasonic vibration mechanism 320 that applies ultrasonic vibration to the vibration tool 310 and a pressure that presses the vibration tool 310 against the surface of the connection conductor 110 with a predetermined pressure. The mechanism 330 and the vibrating tool 310 are integrated, and the first elevating mechanism 630 performs the elevating operation. The second elevating table 400 includes the path guiding tool 420 and the cutting drive mechanism 413. And the cutting tool 410 including the cutter 412 are mounted and moved up and down by a second lifting mechanism 640, and the cutting tool 410 is between the path guiding tool 420 and the vibrating tool 310, The cutting tools 410 are arranged adjacent to each other, and the cutting tool 410 becomes a part of the route guidance tool 420 to guide the connection conductor 110. And a through passage 411c to be. A back cutter 412b located on the back surface side of the connection conductor 110 and a front cutter 412a located on the front surface side of the connection conductor 110 are disposed at the opening end of the through passage 411c, and the front cutter 412a and the back surface are arranged. The cutter 412 forms the cutter 412 that cuts the connection conductor 110 in cooperation with the cutter 412b, and the connection conductor 110 led out from the opening end waits for the descent of the joint surface of the workpieces 102, 104, and 106. The cutter 412 passes through a gap space with the pressing end surface of the vibration tool 310 at a position, and the vibration tool 310 approaches and lowers the final bonding surface of the workpiece 104, and the cutter 412 At a time after the connection conductor 110 is pressed, the connection conductor 110 is cut by the cutting drive mechanism 413.

  The cutting drive mechanism 413 that drives the cutter 412 is rotated by a cam disk 413b that is rotationally driven by a cutting motor 413a, and a rotating operation of the cam disk 413b. A rotation lever 413e for pressing the front cutter 412a is provided, and a required time from the start of cutting of the connecting conductor 110 to the completion of cutting is variably set according to the rotational speed of the cam disk 413b.

  As described above, in connection with the fourth aspect of the present invention, the time required for cutting the connection conductor by the cutter is variably set according to the rotational speed of the cam disk. Further, a rotating lever is interposed between the cam disk and the cutter. Accordingly, there is a feature that cutting is performed at a reasonable cutting speed according to the material, thickness, and cross-sectional area of the connection conductor, and the cutting fine pieces are not scattered. In addition, there is a feature that the operating dimension of the cutter can be expanded by using a cam disk having a small lift size.

  Ultrasonic bonding is performed by sequentially pressing the long flexible connection conductors 110 supplied via the route guidance tool 420 to the bonding surfaces of the plurality of bonding objects 102, 104, and 106 mounted on the substrate 101. A vibration tool 310 for performing cutting, a cutting tool 410 for cutting the terminal end of the connection conductor 110 electrically connecting the plurality of objects to be bonded 102, 104, and 106, and the plurality of objects to be bonded 102, 104 A connecting conductor having a movable table 600 movable in the X-axis direction or the Y-axis direction in parallel with the ultrasonic bonding surface 106 and a lifting table movable in the Z-axis direction orthogonal to the ultrasonic bonding surface The lifting / lowering table is divided into a first lifting / lowering table 300 and a second lifting / lowering table 400 that can be lifted and lowered independently of each other. The movable table 600 includes the first and second lifting tables 300 and 400, and the substrate 101 is spaced from the vibration tool 310, the cutting tool 410, and the route guidance tool 420. Are placed opposite each other.

  The first lifting table 300 includes an ultrasonic vibration mechanism 320 that applies ultrasonic vibration to the vibration tool 310 and a pressure that presses the vibration tool 310 against the surface of the connection conductor 110 with a predetermined pressure. The mechanism 330 and the vibrating tool 310 are integrated, and the first elevating mechanism 630 performs the elevating operation. The second elevating table 400 includes the path guiding tool 420 and the cutting drive mechanism 413. And the cutting tool 410 including the cutter 412 are mounted and moved up and down by a second lifting mechanism 640, and the route guidance tool 420 is rotated by a feed motor 421 whose rotational drive amount can be controlled. A length of the connecting conductor 110 provided with a roller 422 and passing through the cutter 412 is proportional to the amount of rotation of the feed roller 422. Thus, the overall length of the cut portions 111a and 111b of the connection conductor 110 connecting the plurality of objects to be joined 102, 104, and 106 is controlled by the feed dimension of the connection conductor 110 by the feed motor 421. It is like that.

  The rotary table 610 is installed in a stationary state with respect to the lifting and lowering operation of the second lifting table 400 and includes a rotating reel 610 around which the connection conductor 110 is wound, and at the rotating shaft of the rotating reel 610 or the outlet of the rotating reel. The provided unwinding roller is actively unwound and driven by a unwinding motor 611, and the connection conductor 110 unwound from the rotary reel 610 is a slack detection sensor 440 mounted on the second lifting table 400. And the path guiding tool 420 to the cutter position of the cutting tool 410, and the unwinding motor 611 removes the connecting conductor 110 from the rotating reel 610 during the period when the feed motor 421 is stopped. The slack of the connecting conductor 110 is generated by unwinding to the position of the feed motor 421.

As described above, in connection with the tenth aspect of the present invention, the connection conductor is unwound from the rotating reel and is guided to the cutter position via the slack detection sensor installed on the second lifting table. . Accordingly, there is a feature that the connecting conductor can be accurately sent out at a target variable speed by suppressing the fluctuation of the load torque with respect to the feed motor during the rotational drive. Also, in order to shorten the time interval required for setup, even if a large number of long connection conductors are wound around the rotating reel, the reverse load torque for the feed motor is not generated even if the weight of the rotating reel increases. There are features that can be done.

  The substrate 101 on which the plurality of objects to be joined 102, 104, and 106 are mounted is placed on the conveyor 550 or the stationary stand 500 so as to face the movable table 600 with a gap therebetween, and the ultrasonic vibration The first elevating table 300 on which the mechanism 320, the pressing mechanism 330, and the vibrating tool 310 are mounted, and the second elevating table 400 on which the route guiding tool 420 and the cutting tool 410 are mounted are: It is mounted on the movable table 600 driven by the shaft drive mechanism 601 or the Y-axis drive mechanism 602 and moves in the X-axis or Y-axis direction parallel to the joint surface.

  As described above, in relation to the twelfth aspect of the present invention, the first and second lifting tables are mounted and installed on the movable table that moves relative to the opposing substrates with a gap. Therefore, for example, by placing a movable table facing a substrate that moves and stops on a conveyor, the connection conductors can be joined and cut, and a loading / unloading mechanism for mounting the substrate on the movable table can be omitted. There are features that can be done.

  Ultrasonic bonding is performed by sequentially pressing the long flexible connection conductors 110 supplied via the route guidance tool 420 to the bonding surfaces of the plurality of bonding objects 102, 104, and 106 mounted on the substrate 101. A vibration tool 310 for performing cutting, a cutting tool 410 for cutting a terminal end of the connection conductor 110 electrically connecting the plurality of objects to be joined 102, 104, and 106 with a cutter 412, and the connection conductor 110 for the connection conductor 110 A feed motor 421 that feeds from the opening end of the cutting tool 410, and a movable table 600 that can move in the X-axis direction or the Y-axis direction in parallel with the ultrasonic bonding surfaces of the plurality of workpieces 102, 104, and 106. And a first and second elevating tables 300 and 400 that are movable in the Z-axis direction orthogonal to the ultrasonic bonding surface. In the step control method, the vibration tool 310 mounted on the first lifting table 300, an ultrasonic vibration mechanism 320 that applies high-frequency vibration to the vibration tool 310, and the vibration tool An ultrasonic bonding control unit 730 for an ultrasonic bonding unit including a pressing mechanism 330 that presses 310 against the connection conductor 110 and a first lifting mechanism 530 that lifts and lowers the first lifting table 300; The cutting tool 410 and the route guide tool 420 mounted on the second lifting table 400, the second lifting mechanism 540 for lifting and lowering the second lifting table 400, and the X axis that drives the movable table 600 A peripheral accessory control unit 740 for the peripheral accessory unit constituted by the drive mechanism 201 or the Y-axis drive mechanism 202 is provided. The first and second lifting tables 300 and 400 are divided so as to be able to perform the lifting operation independently of each other, and the ultrasonic bonding control unit 730 and the peripheral auxiliary control are configured. The unit 740 performs coordinated control for the ultrasonic bonding unit and the peripheral accessory unit while exchanging control signals with each other.

  101 substrate, 102 object to be joined (second joint), 104 object to be joined (third joint), 106 object to be joined (first joint), 110 connection conductor (ribbon), 110h horizontal flat part, (111a) and 111b Cutting portion of connecting conductor, 200 movable table, 201 X-axis drive mechanism (servo motor), 202 Y-axis drive mechanism (servo motor), 300 first lifting table, 310 vibration tool, 320 ultrasonic vibration mechanism, 330 Press mechanism (air cylinder), 400 Second lifting table, 410 Cutting tool, 411c Through passage, 412 cutter, 412a Front cutter, 412b Back cutter, 413 Cutting drive mechanism, 413a Cutting motor, 413b Cam disc, 413e Rotation Lever, 414 press holding mechanism, 420 route guidance tool, 421 feed motor, 22 feed roller, 423 pressure contact mechanism, 423a pinch roller, 430 hand roller, 431 swing drive mechanism, 440 slack detection sensor, 500 stationary rack, 510 rotating reel, 530 first lifting mechanism (servo motor), 540 second Lifting mechanism (servo motor), 550 Conveyor, 600 Movable table, 601 X-axis driving mechanism (servo motor), 602 Y-axis driving mechanism (servo motor), 610 Rotating reel, 611 Unwinding motor, 630 First lifting mechanism (Servo motor), 640 second lifting mechanism (servo motor), 730 ultrasonic bonding control unit, 740 peripheral control unit, 741c preceding step, 742 first step, 732 second step, 733 third step, 734 first 4 steps, 743a Auxiliary step 745 Fifth step 746 Sixth step, theta angle of inclination, G gap size, thickness of the T connection conductor, L length.

A connecting conductor bonding / cutting device according to a first aspect of the present invention is a long flexible connecting conductor supplied via a route guidance tool to bonding surfaces of a plurality of bonding objects mounted on a substrate. A vibrating tool for performing ultrasonic bonding by sequentially pressing, a cutting tool for cutting ends of the connection conductors that electrically connect the plurality of bonding objects, and ultrasonic waves for the plurality of bonding objects A connecting conductor joining and cutting device comprising: a movable table movable in the X-axis direction or the Y-axis direction in parallel with the joining surface; and a lifting table movable in the Z-axis direction orthogonal to the ultrasonic joining surface. The elevating table is divided into a first elevating table and a second elevating table that can perform an elevating operation independently of each other, and the movable table includes the plurality of joining objects. The board on which the object is mounted The first and second elevating tables are mounted, and the substrate is opposed to the vibrating tool, the cutting tool, and the route guiding tool with a gap between them. One lifting table includes an ultrasonic vibration mechanism that applies ultrasonic vibration to the vibration tool, a pressing mechanism that presses the vibration tool against the surface of the connection conductor with a predetermined pressure, and the vibration table. The tool is integrated with the first elevating mechanism, and the second elevating table has the route guiding tool mainly including a feed motor for sending the connection conductor, and the cutting drive. The cutting tool including a mechanism and a cutter is mounted, and is moved up and down by a second lifting mechanism, and the cutting tool is located between the route guiding tool and the vibrating tool and adjacent to each other. Arranged As well as a shall, in the cutting tool and a through passage and the pressure holding mechanism for guiding the connecting conductor is part of the route guidance tool, the open end of the through passage, the rear surface of the connection conductor and back cutter positioned on a side, is table cutter arrangement located on the surface side of the connecting conductors, constitute the cutter said with the table cutter and back cutter cooperate to cut the connection conductor, the The pressing and holding mechanism generates a horizontal flat portion at an end portion of the connection conductor having an inclination angle θ by the route guidance tool, and the connection conductor led out from the opening end is lowered with the joint surface of the object to be joined. Passing through the gap space with the pressing end surface of the vibrating tool in the standby position, the cutter is moved down and lowered with respect to the bonding surface of the final bonding target, and the connecting conductor is Time after being pressed Oite adapted to cut the connection conductor by the cutting drive mechanism.

According to a second aspect of the present invention, there is provided a connection conductor bonding / cutting device, which is a long flexible connection conductor that is supplied to a bonding surface of a plurality of bonding objects mounted on a substrate via a route guidance tool. A vibrating tool for performing ultrasonic bonding by sequentially pressing, a cutting tool for cutting ends of the connection conductors that electrically connect the plurality of bonding objects, and ultrasonic waves for the plurality of bonding objects A connecting conductor joining and cutting device comprising: a movable table movable in the X-axis direction or the Y-axis direction in parallel with the joining surface; and a lifting table movable in the Z-axis direction orthogonal to the ultrasonic joining surface. The elevating table is divided into a first elevating table and a second elevating table that can perform an elevating operation independently of each other, and the movable table includes the plurality of joining objects. The board on which the object is mounted The first and second elevating tables are mounted, and the substrate is opposed to the vibrating tool, the cutting tool, and the route guiding tool with a gap between them. One lifting table includes an ultrasonic vibration mechanism that applies ultrasonic vibration to the vibration tool, a pressing mechanism that presses the vibration tool against the surface of the connection conductor with a predetermined pressure, and the vibration table. A tool is integrated and the first elevating mechanism performs an elevating operation, and the second elevating table includes the path guiding tool, a cutting drive mechanism, a cutter constituted by a front cutter and a back cutter. The cutting tool including the cutting tool is mounted, and is moved up and down by a second lifting mechanism, and the route guidance tool is provided with a feed roller that is driven to rotate by a feed motor that can control the amount of rotation. The length dimension of the connection conductor passing through the cutter is a value proportional to the amount of rotation of the feed roller, and the overall length of the cut portion of the connection conductor connecting the plurality of objects to be joined is the feed motor. The connecting conductor is controlled by the feed dimension of the connecting conductor, and the sending speed of the connecting conductor by the feed motor is equal to or higher than the relative movement speed of the movable table and the second lifting table.

According to a third aspect of the present invention, there is provided a connection conductor cutting control method comprising: a long flexible connection supplied via a route guidance tool to bonding surfaces of a plurality of bonding objects mounted on a substrate; A vibrating tool that performs ultrasonic bonding by sequentially pressing the conductors, and the end of the connection conductor that electrically connects the plurality of objects to be joined to each other by a front cutter and a back cutter driven by a cutting drive mechanism A cutting tool for cutting with a configured cutter, a feed motor for sending the connection conductor from the opening end of the cutting tool, and an X-axis direction or a Y-axis in parallel with the ultrasonic bonding surfaces of the plurality of bonding objects A connecting conductor cutting control method for a connecting conductor bonding cutting apparatus comprising: a movable table movable in a direction; and first and second lifting tables movable in a Z-axis direction orthogonal to the ultrasonic bonding surface Because The vibration tool mounted on the first lifting table, an ultrasonic vibration mechanism that applies high-frequency vibration to the vibration tool, a pressing mechanism that presses the vibration tool against the connection conductor, and An ultrasonic bonding control unit for an ultrasonic bonding unit configured by a first lifting mechanism that lifts and lowers the first lifting table, the cutting tool mounted on the second lifting table, and the connection conductor The route guidance tool mainly composed of a feed motor for feeding , a second lifting mechanism for lifting and lowering the second lifting table, and an X-axis driving mechanism or a Y-axis driving mechanism for driving the movable table A peripheral accessory control unit for the configured peripheral accessory unit, and the first and second lifting tables can perform a lifting operation independently of each other. Is configured by dividing to the said peripheral supplementary control unit and the ultrasonic bonding control unit I row cooperation control for the ultrasonic bonding unit and the peripheral supplementary unit while communicating mutually control signal, The long flexible connection conductor that is sequentially ultrasonically bonded to the plurality of objects to be joined is positively supplied by a feed motor provided in the route guidance tool, and connects the plurality of objects to be joined. The total length of the connection conductor or the length of the first feed free end is controlled by the amount of rotation of the feed motor, and at the final position, the tool is cut by the cutter, and the tool to be excited is placed on the next substrate. After transfer to the upper part of one joining surface of a plurality of joining objects, sending out of the connecting conductor and ultrasonic joining are started again.

The first lifting table 300 includes an ultrasonic vibration mechanism 320 that applies ultrasonic vibration to the vibration tool 310 and a pressure that presses the vibration tool 310 against the surface of the connection conductor 110 with a predetermined pressure. A mechanism 330 and the vibrating tool 310 are integrated, and a first elevating mechanism 530 performs an elevating operation, and a feed motor for delivering the connection conductor 110 to the second elevating table 400 The route guide tool 420 mainly composed of 421 and the cutting tool 410 including the cutting drive mechanism 413 and the cutter 412 are mounted, and the second lifting mechanism 540 moves up and down, and the cutting tool 410 is The cutting tool 410 is arranged between the route guidance tool 420 and the vibration tool 310 and adjacent to each other. And a through passage 411c and the pressing retaining mechanism 414 for guiding the connecting conductor 110 is part of the route guidance tool 420. A back cutter 412b located on the back surface side of the connection conductor 110 and a front cutter 412a located on the front surface side of the connection conductor 110 are disposed at the opening end of the through passage 411c, and the front cutter 412a and the back surface are arranged. The cutter 412b cooperates to form the cutter 412 that cuts the connection conductor 110, and the pressing and holding mechanism 414 is horizontal to the end of the connection conductor 110 having an inclination angle θ by the path guiding tool 420. The connecting conductor 110 that generates the flat portion 110h and is led out from the opening end is a gap between the joining surface of the joining object 102, 104, and 106 and the pressing end surface of the vibrating tool 310 in the descending standby position. The cutter 412 passes through the space, and the vibration tool 310 approaches and lowers with respect to the final joining surface of the joining object 104, so that the connection conductor In time after which 10 is pressed, so as to cut the connection conductor 110 by the cutting drive mechanism 413.

The front Symbol pressing and holding mechanism 414 provided on the cutting tool 410, presses the connecting conductor 110 before the cutting of the connection conductor 110 by the back cutter 412b and the table cutter 412a begins on the inner surface of the through passage 411c Thus, the connection conductor 110 is prevented from being pulled out from the opening end by the cutting force, and a horizontal flat portion 110h is generated at the end portion of the connection conductor 110 having the inclination angle θ by the route guidance tool 420. It is like that.

The first lifting table 300 includes an ultrasonic vibration mechanism 320 that applies ultrasonic vibration to the vibration tool 310 and a pressure that presses the vibration tool 310 against the surface of the connection conductor 110 with a predetermined pressure. The mechanism 330 and the vibrating tool 310 are integrated, and the first elevating mechanism 530 performs an elevating operation. The second elevating table 400 includes the path guiding tool 420 and the cutting drive mechanism 413. And the cutting tool 410 including a cutter 412 configured by a front cutter 412a and a back cutter 412b is mounted, and is moved up and down by a second lifting mechanism 540. A feed roller 422 that is rotationally driven by a feed motor 421 that can control the connection conductor 11 that passes through the cutter 412. Is a value proportional to the amount of rotation of the feed roller 422, and the total length of the cut portions 111a and 111b of the connection conductor 110 connecting the plurality of objects to be joined 102, 104, and 106 is as follows. The feed motor 421 is controlled by the feed dimension of the connection conductor 110 and the feed speed of the connection conductor 110 by the feed motor 421 is the relative movement speed of the movable table 200 and the second lifting table 400. This is the speed.

Ultrasonic bonding is performed by sequentially pressing the long flexible connection conductors 110 supplied via the route guidance tool 420 to the bonding surfaces of the plurality of bonding objects 102, 104, and 106 mounted on the substrate 101. The front cutter 412a and the back cutter 412b driven by the cutting drive mechanism 413 are connected to the terminal end of the connection conductor 110 that electrically connects the plurality of workpieces 102, 104, and 106 to each other. A cutting tool 410 that is cut by a cutter 412 constituted by : a feed motor 421 that feeds the connection conductor 110 from an opening end of the cutting tool 410; and ultrasonic bonding surfaces of the plurality of bonding objects 102, 104, and 106. Parallel to the movable table 200 movable in the X-axis direction or the Y-axis direction, and the first movable in the Z-axis direction orthogonal to the ultrasonic bonding surface. A connection conductor joining / cutting control method for a connection conductor joining / cutting device having a second lifting table 300/400, the vibration tool 310 mounted on the first lifting table 300, and An ultrasonic vibration mechanism 320 that applies high-frequency vibration to the vibrating tool 310, a pressing mechanism 330 that presses the vibrating tool 310 against the connection conductor 110, and a first that lifts and lowers the first lifting table 300. An ultrasonic bonding control unit 730 for the ultrasonic bonding unit constituted by the lifting mechanism 530, the cutting tool 410 mounted on the second lifting table 400, and a feed motor for feeding the connection conductor 110. 421 and the route guidance tool 420 mainly composed of a second elevating mechanism 54 for elevating the second lifting table 400 And a peripheral accessory control unit 740 for the peripheral accessory unit constituted by the X-axis drive mechanism 201 or the Y-axis drive mechanism 202 for driving the movable table 200, and the first and second lifting tables 300, 400 is divided so that it can move up and down independently of each other, and the ultrasonic bonding control unit 730 and the peripheral auxiliary control unit 740 exchange control signals with each other while exchanging control signals. The long flexible connection conductor 110 that is sequentially ultrasonically bonded to the plurality of objects 102, 104, and 106 by performing cooperative control on the sonic bonding unit and the peripheral accessory unit is connected to the route guidance tool 420. The plurality of objects to be joined 102, 104, and 106 are positively supplied by a feed motor 421 provided. The total length of the connecting conductor 110 to be connected or the length of the first feed free end is controlled by the amount of rotation of the feed motor 421, and is cut by the cutter 412 at the final position, so that the vibrating tool 310 Is transferred to the upper part of one joining surface of the plurality of joining objects 102, 104, and 106 on the next substrate 101, and then the sending of the connecting conductor 110 and the ultrasonic joining are started again. Yes.

As described above, in relation to the fourteenth aspect of the present invention, the first step, the fifth step and the sixth step on the incidental control unit side, and the second step, the third step and the fourth step on the ultrasonic bonding control unit side. The long flexible connecting conductors that are sequentially ultrasonically bonded to a plurality of objects to be joined are actively supplied by a feed motor provided in the route guidance tool, and the plurality of objects to be joined are connected. The total length of the connecting conductor or the length of the first feed free end is controlled by the amount of rotation of the feed motor, and at the final position, the tool is cut by a cutter. After being transferred to the upper part of one joining surface of the object, the sending out of the connecting conductor and the ultrasonic joining are started again. Therefore, in a substrate on which a plurality of objects to be joined are mounted, a series of joining units from joining start to joining completion are continuously repeated, or connection conductors are cut and connected efficiently to a plurality of substrates. There is an effect that can be performed well. Further, since a connection conductor having a relatively large cross-sectional area can be used because a large current flows, for example, a part of the electrode terminals of a power semiconductor element mounted on a circuit board and the electrode terminals of other power semiconductor elements There is an effect that a part or connection between external connection terminals can be connected without depending on a circuit pattern.

The first lifting table 300 includes an ultrasonic vibration mechanism 320 that applies ultrasonic vibration to the vibration tool 310 and a pressure that presses the vibration tool 310 against the surface of the connection conductor 110 with a predetermined pressure. The mechanism 330 and the vibrating tool 310 are integrated, and the first elevating mechanism 630 performs an elevating operation, and the second elevating table 400 feeds the connection conductor 110 to the feed motor. The route guide tool 420 mainly composed of 421, and the cutting tool 410 including the cutting drive mechanism 413 and the cutter 412 are mounted, and the second lifting mechanism 640 moves up and down. The cutting tool 410 is arranged between the route guidance tool 420 and the vibration tool 310 and adjacent to each other. And a through passage 411c and the pressing retaining mechanism 414 for guiding the connecting conductor 110 is part of the route guidance tool 420. A back cutter 412b located on the back surface side of the connection conductor 110 and a front cutter 412a located on the front surface side of the connection conductor 110 are disposed at the opening end of the through passage 411c, and the front cutter 412a and the back surface are arranged. The cutter 412b cooperates to form the cutter 412 that cuts the connection conductor 110, and the pressing and holding mechanism 414 is horizontal to the end of the connection conductor 110 having an inclination angle θ by the path guiding tool 420. The connecting conductor 110 that generates the flat portion 110h and is led out from the opening end is a gap between the joining surface of the joining object 102, 104, and 106 and the pressing end surface of the vibrating tool 310 in the descending standby position. The cutter 412 passes through the space, and the vibration tool 310 approaches and lowers with respect to the final joining surface of the joining object 104, so that the connection conductor In time after which 10 is pressed, so as to cut the connection conductor 110 by the cutting drive mechanism 413.

The first lifting table 300 includes an ultrasonic vibration mechanism 320 that applies ultrasonic vibration to the vibration tool 310 and a pressure that presses the vibration tool 310 against the surface of the connection conductor 110 with a predetermined pressure. The mechanism 330 and the vibrating tool 310 are integrated, and the first elevating mechanism 630 performs the elevating operation. The second elevating table 400 includes the path guiding tool 420 and the cutting drive mechanism 413. And the cutting tool 410 including a cutter 412 constituted by a front cutter 412a and a back cutter 412b is mounted, and is moved up and down by a second lifting mechanism 640, and the route guidance tool 420 has a rotational drive amount. A feed roller 422 that is rotationally driven by a feed motor 421 that can control the connection conductor 11 that passes through the cutter 412. Is a value proportional to the amount of rotation of the feed roller 422, and the total length of the cut portions 111a and 111b of the connection conductor 110 connecting the plurality of objects to be joined 102, 104, and 106 is as follows. The feed speed of the connection conductor 110 by the feed motor 421 is controlled by the feed size of the connection conductor 110 by the feed motor 421, and the relative movement speed of the movable table 600 and the second lifting table 400 is set. This is the speed.

Ultrasonic bonding is performed by sequentially pressing the long flexible connection conductors 110 supplied via the route guidance tool 420 to the bonding surfaces of the plurality of bonding objects 102, 104, and 106 mounted on the substrate 101. The front cutter 412a and the back cutter 412b driven by the cutting drive mechanism 413 are connected to the terminal end of the connection conductor 110 that electrically connects the plurality of workpieces 102, 104, and 106 to each other. A cutting tool 410 that is cut by a cutter 412 constituted by : a feed motor 421 that feeds the connection conductor 110 from an opening end of the cutting tool 410; and ultrasonic bonding surfaces of the plurality of bonding objects 102, 104, and 106. The movable table 600 is movable in the X-axis direction or the Y-axis direction in parallel with the first axis, and is movable in the Z-axis direction orthogonal to the ultrasonic bonding surface. A connection conductor joining / cutting control method for a connection conductor joining / cutting device having a second lifting table 300/400, the vibration tool 310 mounted on the first lifting table 300, and An ultrasonic vibration mechanism 320 that applies high-frequency vibration to the vibrating tool 310, a pressing mechanism 330 that presses the vibrating tool 310 against the connection conductor 110, and a first that lifts and lowers the first lifting table 300. feeding the ultrasonic bonding control unit 730 for ultrasonic bonding unit configured by an elevating mechanism 6 30, and the cutting tool 410 mounted on the second lifting table 400, for delivery of the connection conductor 110 of the and the route guidance tool 420 to the motor 421 mainly, the second elevating mechanism 6 4 for vertical movement of the second lifting table 400 0 and provided with a peripheral supplementary control unit 740 to the peripheral supplementary units each formed by the X axis driving mechanism 6 01 or Y-axis drive mechanism 6 02 for driving the movable table 600, the first and second lifting The tables 300 and 400 are divided so that they can move up and down independently of each other. The ultrasonic bonding control unit 730 and the peripheral auxiliary control unit 740 exchange control signals with each other. However, the long flexible connecting conductor 110 that is sequentially ultrasonically bonded to the plurality of objects 102, 104, and 106 by performing cooperative control on the ultrasonic bonding unit and the peripheral accessory unit is route guidance. The plurality of objects to be joined 102, 104, and 10 are positively supplied by a feed motor 421 provided on the tool 420. The total length of the connection conductor 110 for connecting the wire or the length of the first feed free end is controlled by the amount of rotation of the feed motor 421, and is cut by the cutter 412 at the final position, so that the vibration tool 310 is transferred to the upper part of one joining surface of the plurality of joining objects 102, 104, and 106 on the next substrate 101, and then the sending of the connecting conductor 110 and ultrasonic joining are started again. ing.

Claims (18)

A vibrating tool that performs ultrasonic bonding by sequentially pressing long flexible connection conductors supplied via a route guidance tool to bonding surfaces of a plurality of bonding objects mounted on a substrate;
A cutting tool for cutting ends of the connection conductors that electrically connect the plurality of joining objects to each other;
A movable table movable in the X-axis direction or the Y-axis direction in parallel with the ultrasonic bonding surfaces of the plurality of bonding objects;
A joining conductor cutting apparatus having a lifting table movable in a Z-axis direction orthogonal to the ultrasonic joining surface,
The elevating table is divided into a first elevating table and a second elevating table that can perform an elevating operation independently of each other,
The movable table is mounted with the substrate on which the plurality of objects to be joined are mounted, or the first and second lifting tables are mounted,
The substrate is arranged to face the vibration-excited tool, the cutting tool, and the route guidance tool with a gap therebetween,
The first lifting table includes an ultrasonic vibration mechanism that applies ultrasonic vibration to the vibration tool, a pressing mechanism that presses the vibration tool against the surface of the connection conductor with a predetermined pressure, and the vibration table. The vibration tool is integrated, and the first lifting mechanism moves up and down,
The second lifting table is mounted with the cutting tool including the route guidance tool, a cutting drive mechanism and a cutter, and performs a lifting operation by the second lifting mechanism,
The cutting tool is located between the route guidance tool and the vibrating tool and is disposed adjacent to each other, and the cutting tool becomes a part of the route guidance tool to connect the connection conductor. With a guiding throughway,
A back cutter located on the back side of the connection conductor and a front cutter located on the front side of the connection conductor are disposed at the opening end of the through passage, and the front cutter and the back cutter cooperate with each other. Forming the cutter for cutting the connection conductor,
The connection conductor led out from the opening end passes through a gap space between the joining surface of the object to be joined and the pressing end surface of the vibrating tool at the descending standby position,
The cutter is configured to cut the connection conductor by the cutting drive mechanism at a time after the vibrating tool approaches and descends the joining surface of the final joining object and the connecting conductor is pressed. A connecting conductor joining and cutting device characterized by the above. The cutter is an oblique blade that sequentially cuts the connection conductor from one end to the other end of the cutting line, or rotates with one end as a fulcrum, and the cutting stroke at the other end exceeds the thickness dimension of the connection conductor. And
The joint conductor cutting apparatus according to claim 1, wherein a lower portion of the opening end has a thickness dimension equal to or greater than a movable dimension of the cutter. The cutting drive mechanism for driving the cutter includes a cam disk that is rotationally driven by a cutting motor,
The connection conductor joining and cutting device according to claim 1 or 2, wherein the time required from the start of cutting of the connection conductor to the completion of cutting is variably set according to the rotational speed of the cam disk. The cutting drive mechanism for driving the cutter is rotated by a cam disk rotated by a cutting motor, and rotates at one end as a support shaft and presses the front cutter at the other end. And a rotating lever that
The connection conductor joining and cutting device according to claim 1 or 2, wherein the time required from the start of cutting of the connection conductor to the completion of cutting is variably set according to the rotational speed of the cam disk. The through path provided in the cutting tool is provided with a pressing and holding mechanism for the connection conductor,
The pressing and holding mechanism presses the connection conductor against the inner surface of the through passage before the cutting of the connection conductor by the front cutter and the back cutter, and the connection conductor is pulled out from the opening end by a cutting force. 5. The connection according to claim 1, wherein a horizontal flat portion is generated at an end portion of the connection conductor having an inclination angle by the route guidance tool. Conductor joint cutting device. The thickness obtained by subtracting the thickness dimension T of the connecting conductor from the gap dimension G between the pressing surface and the inner surface of the through path when the pressing holding mechanism does not press the connecting conductor against the inner surface of the through path. The joint conductor cutting apparatus according to claim 5, wherein a ratio (G−T) / L between the gap dimension and the length dimension L of the through path is adjustable to a predetermined value. . A vibrating tool that performs ultrasonic bonding by sequentially pressing long flexible connection conductors supplied via a route guidance tool to bonding surfaces of a plurality of bonding objects mounted on a substrate;
A cutting tool for cutting ends of the connection conductors that electrically connect the plurality of joining objects to each other;
A movable table movable in the X-axis direction or the Y-axis direction in parallel with the ultrasonic bonding surfaces of the plurality of bonding objects;
A joining conductor cutting apparatus having a lifting table movable in a Z-axis direction orthogonal to the ultrasonic joining surface,
The elevating table is divided into a first elevating table and a second elevating table that can perform an elevating operation independently of each other,
The movable table is mounted with the substrate on which the plurality of objects to be joined are mounted, or the first and second lifting tables are mounted,
The substrate is arranged to face the vibration-excited tool, the cutting tool, and the route guidance tool with a gap therebetween,
The first lifting table includes an ultrasonic vibration mechanism that applies ultrasonic vibration to the vibration tool, a pressing mechanism that presses the vibration tool against the surface of the connection conductor with a predetermined pressure, and the vibration table. The vibration tool is integrated, and the first lifting mechanism moves up and down,
The second lifting table is mounted with the cutting tool including the route guidance tool, a cutting drive mechanism and a cutter, and performs a lifting operation by the second lifting mechanism,
The route guidance tool is provided with a feed roller that is rotationally driven by a feed motor whose rotational drive amount can be controlled,
The length dimension of the connection conductor passing through the cutter is a value proportional to the rotation amount of the feed roller,
The connection conductor bonding / cutting apparatus, wherein an overall length of the cut portion of the connection conductor connecting the plurality of bonding objects is controlled by a feeding dimension of the connection conductor by the feed motor. The feed motor rotationally drives one or both of the feed roller and the pinch roller that are a pair of rotating rollers,
One or both of the pair of rotating rollers is made of a resin material having a hardness lower than that of the connection conductor, and one is pressed against the other with a predetermined pressure by a pressing mechanism. Item 8. The connection conductor cutting apparatus according to Item 7. A rotating reel that is installed in a stationary state with respect to the lifting operation of the second lifting table and on which the connecting conductor is wound is provided, and the connecting conductor that is unwound from the rotating reel is connected to the second lifting and lowering table. Guided to the cutter position of the cutting tool via the hand roller mounted on the table and the route guidance tool,
The hand roller is oscillated by a oscillating drive mechanism during a period when the feed motor is stopped, and the connection conductor is handed out from the rotary reel to the position of the feed motor. The connection conductor joining / cutting device according to claim 7 or 8, wherein the slack is generated. A rotary reel installed in a stationary state with respect to the lifting operation of the second lifting table and wound with the connection conductor, and a winding provided on a rotating shaft of the rotating reel or an outlet of the rotating reel. The exit roller is actively driven by an unwinding motor, and the connection conductor unwound from the rotating reel passes through a slack detection sensor mounted on the second lifting table and the route guiding tool. Is guided to the cutter position of the cutting tool,
The unwinding motor unwinds the connection conductor from the rotating reel during a period in which the feed motor is stopped, and generates a slack of the connection conductor to the position of the feed motor. A joining conductor cutting apparatus according to claim 7 or claim 8. The substrate on which the plurality of objects to be bonded are mounted is loaded and mounted on the movable table that moves in the X-axis or Y-axis direction parallel to the bonding surface by an X-axis drive mechanism or a Y-axis drive mechanism, and the ultrasonic wave The first elevating table on which the vibration mechanism, the pressing mechanism, and the vibration tool are mounted, the second elevating table on which the route guidance tool and the cutting tool are mounted, and the movable table are common. The connection conductor joining / cutting device according to claim 1, wherein the connection conductor joining / cutting device is attached to a stationary base. The substrate on which the plurality of objects to be bonded are mounted is arranged to face the movable table with a gap, and is mounted on a conveyor or a stationary base,
The first elevating table on which the ultrasonic vibration mechanism, the pressing mechanism, and the vibrating tool are mounted, and the second elevating table on which the route guiding tool and the cutting tool are mounted are an X-axis drive mechanism. The connecting conductor according to claim 1, wherein the connecting conductor is mounted on the movable table driven by a Y-axis driving mechanism and moves in the X-axis or Y-axis direction parallel to the joint surface. Joining and cutting device. A vibrating tool that performs ultrasonic bonding by sequentially pressing long flexible connection conductors supplied via a route guidance tool to bonding surfaces of a plurality of bonding objects mounted on a substrate;
A cutting tool for cutting a terminal end of the connection conductor electrically connecting the plurality of objects to be joined with a cutter;
A feed motor that feeds the connection conductor from the open end of the cutting tool;
A movable table movable in the X-axis direction or the Y-axis direction in parallel with the ultrasonic bonding surfaces of the plurality of bonding objects;
First and second lifting tables movable in the Z-axis direction orthogonal to the ultrasonic bonding surface;
A connection conductor bonding cutting control method for a connection conductor bonding cutting apparatus having:
The vibration tool mounted on the first lifting table, an ultrasonic vibration mechanism that applies high-frequency vibration to the vibration tool, a pressing mechanism that presses the vibration tool against the connection conductor, and An ultrasonic bonding control unit for an ultrasonic bonding unit configured by a first lifting mechanism that lifts and lowers the first lifting table; the cutting tool and the route guiding tool mounted on the second lifting table; A peripheral accessory control unit for the peripheral accessory unit constituted by a second elevator mechanism for raising and lowering the second elevator table, and an X-axis drive mechanism or a Y-axis drive mechanism for driving the movable table. ,
The first and second lifting tables are divided and configured to be able to perform a lifting operation independently of each other,
The connection cutting control method for a connection conductor, wherein the ultrasonic bonding control unit and the peripheral auxiliary control unit perform cooperative control on the ultrasonic bonding unit and the peripheral auxiliary unit while exchanging control signals with each other. The peripheral accessory control unit shares the first step, the fifth step, and the sixth step,
The ultrasonic bonding control unit shares the second step, the third step, and the fourth step,
In the first step, after cutting the connection conductor with the cutting tool, the tool to be vibrated is relatively moved to an upper part of one joining surface of the plurality of joining objects, and the connection conductor is moved to the feed motor. To the upper part of the joint surface,
In the second step, the connecting conductor sent out in the first step is caused to approach and descend to the upper part of the joining surface by the vibration tool,
The third step further lowers the vibrating tool lowered by the second step, pre-pressurizes the joint surface, forms the joint surface portion of the connection conductor, and then releases the pressing force,
In the fourth step, following the third step, the vibrating tool is lowered again and pressed against the joining surface to apply ultrasonic vibration, and the connection conductor is connected to one of the plurality of joining objects. Ultrasonically bonded to the bonding surface,
In the fifth step, following the fourth step, the vibratory tool is relatively moved above the joining surface of the next object to be joined, and the feed motor sends out the connection conductor by a predetermined dimension.
In the sixth step, following the fourth step after repeating the second step to the fifth step until the ultrasonic bonding of the connection conductor to the plurality of bonding objects is completed, the cutting tool Cutting the connecting conductor using
When one unit of joining and cutting of the connection conductor to a plurality of joining objects mounted on one substrate is completed in the sixth step, and there is joining and cutting of other units on the same substrate The above-described first step to the sixth step are repeatedly executed, and after the sixth step in which bonding and cutting to one substrate is completed, the next substrate is loaded and the process proceeds to the first step. The joint conductor cutting control method according to claim 13. The peripheral incidental control unit further shares the preceding steps,
As a pre-process of the first step, the connection conductor is cut in the sixth step, or in the initial operation after the setup change, it protrudes from the opening end of the cutting tool in the preceding step. The protruding portion of the connection conductor is cut with the cutter, and the connection conductor sent out from the route guidance tool with a predetermined inclination angle is pressed in a horizontal direction by a pressing holding mechanism provided in the cutting tool. ,
15. The first vibration step following the first step, the vibratory tool approaches or abuts the press-molded horizontal flat portion to a joining surface of the joining object. For controlling the cutting of connecting conductors. The peripheral accessory control unit further shares auxiliary steps,
The auxiliary step drives the feed motor to further feed the connection conductor in the process in which the ultrasonic welding control unit lowers the vibration tool in the second step. Item 14. The method for controlling joint cutting of connection conductors according to item 14 or claim 15. In the third step, the pressing mechanism of the vibration tool further lowers the vibration tool so that a pressure pressing the connection conductor by the vibration tool is equal to or higher than a first predetermined pressure. And pressing the connection conductor against the object to be joined, and subsequently retreating and depressurizing so that the pressing force by the vibrating tool is equal to or lower than a second predetermined pressure,
In the fourth step, the connecting conductor is pressed against the joining object until the pressing force by the vibrating tool becomes a third predetermined pressure, and then the vibrating operation of the vibrating tool is started. Ultrasonic bonding is performed. The connection conductor bonding cutting control method according to claim 14, wherein ultrasonic bonding is performed. In the sixth step, as a pre-process for cutting the connection conductor, first, the vibrating tool is raised, and then the feed motor is driven in reverse while moving the cutting tool closer to the joining surface side. The connection conductor joint cutting control method according to any one of claims 14 to 17, wherein slackness of the connection conductor accompanying the approaching movement is absorbed.

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