JP2015021543A - ダイヤフラム弁 - Google Patents
ダイヤフラム弁 Download PDFInfo
- Publication number
- JP2015021543A JP2015021543A JP2013149254A JP2013149254A JP2015021543A JP 2015021543 A JP2015021543 A JP 2015021543A JP 2013149254 A JP2013149254 A JP 2013149254A JP 2013149254 A JP2013149254 A JP 2013149254A JP 2015021543 A JP2015021543 A JP 2015021543A
- Authority
- JP
- Japan
- Prior art keywords
- height
- diaphragm valve
- protrusion
- sheet
- protruding portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920003002 synthetic resin Polymers 0.000 claims abstract description 14
- 239000000057 synthetic resin Substances 0.000 claims abstract description 14
- 239000012530 fluid Substances 0.000 claims description 12
- 229920002493 poly(chlorotrifluoroethylene) Polymers 0.000 description 6
- 239000005023 polychlorotrifluoroethylene (PCTFE) polymer Substances 0.000 description 6
- 229910000831 Steel Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- -1 polychlorotrifluoroethylene Polymers 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Diaphragms And Bellows (AREA)
- Lift Valve (AREA)
- Fluid-Driven Valves (AREA)
- Valve Housings (AREA)
Abstract
Description
Claims (2)
- 流体流入通路、流体流出通路および上向きに開口した凹所が設けられたボディと、ボディの凹所の底面に配置された環状のシートと、シートに押圧・離間されることで流体通路の開閉を行う弾性変形可能なダイヤフラムとを備えており、ボディの凹所の底面に、環状で相対的に径が小さい内側突出部と環状で相対的に径が大きい外側突出部とが設けられており、シートは、合成樹脂製とされて、内側突出部と外側突出部との間に挿入されており、両突出部がかしめられることで、シートの抜けが防止されているダイヤフラム弁において、
内側突出部の高さが外側突出部の高さよりも低くなされるとともに、内側突出部の外側の角が曲面とされていることを特徴とするダイヤフラム弁。 - 0.4mm≦内側突出部の高さ≦1.0mmとされていることを特徴とする請求項1のダイヤフラム弁。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013149254A JP6218470B2 (ja) | 2013-07-18 | 2013-07-18 | ダイヤフラム弁 |
KR1020157035669A KR101809810B1 (ko) | 2013-07-18 | 2014-07-04 | 다이어프램 밸브 |
US14/898,584 US9976658B2 (en) | 2013-07-18 | 2014-07-04 | Diaphragm valve |
CN201480034016.2A CN105452741B (zh) | 2013-07-18 | 2014-07-04 | 隔膜阀 |
PCT/JP2014/067870 WO2015008633A1 (ja) | 2013-07-18 | 2014-07-04 | ダイヤフラム弁 |
TW103124469A TWI611130B (zh) | 2013-07-18 | 2014-07-17 | 隔膜閥 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013149254A JP6218470B2 (ja) | 2013-07-18 | 2013-07-18 | ダイヤフラム弁 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015021543A true JP2015021543A (ja) | 2015-02-02 |
JP6218470B2 JP6218470B2 (ja) | 2017-10-25 |
Family
ID=52346102
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013149254A Active JP6218470B2 (ja) | 2013-07-18 | 2013-07-18 | ダイヤフラム弁 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9976658B2 (ja) |
JP (1) | JP6218470B2 (ja) |
KR (1) | KR101809810B1 (ja) |
CN (1) | CN105452741B (ja) |
TW (1) | TWI611130B (ja) |
WO (1) | WO2015008633A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017089837A (ja) * | 2015-11-13 | 2017-05-25 | 株式会社フジキン | ダイヤフラムバルブおよびその製造方法 |
JPWO2018037993A1 (ja) * | 2016-08-25 | 2019-06-20 | 株式会社キッツエスシーティー | ダイヤフラムバルブと半導体製造装置用流量制御機器 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7237370B2 (ja) | 2018-07-31 | 2023-03-13 | 株式会社フジキン | バルブ装置 |
KR102307625B1 (ko) * | 2020-05-08 | 2021-10-01 | 주식회사 유니락 | 로킹 밸브 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08210454A (ja) * | 1995-02-01 | 1996-08-20 | Honda Motor Co Ltd | 無段変速機用プーリにおけるアクチュエータケースのかしめ構造 |
JP2008304067A (ja) * | 1997-02-03 | 2008-12-18 | Swagelok Co | ダイヤフラム弁の弁座装置 |
JP2012092861A (ja) * | 2010-10-25 | 2012-05-17 | Ckd Corp | 流体制御弁の弁座構造 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0234527Y2 (ja) | 1986-07-07 | 1990-09-17 | ||
JPH0448470U (ja) | 1990-08-29 | 1992-04-24 | ||
US5215286A (en) * | 1992-05-26 | 1993-06-01 | Nupro Company | High pressure diaphragm valve |
JP3343313B2 (ja) | 1995-06-30 | 2002-11-11 | 株式会社フジキン | ダイヤフラム弁 |
JP4587419B2 (ja) * | 2000-11-16 | 2010-11-24 | 株式会社フジキン | メタルダイヤフラム弁 |
JP4085012B2 (ja) * | 2003-02-13 | 2008-04-30 | 忠弘 大見 | 真空排気系用バルブ |
KR20050114721A (ko) * | 2003-04-14 | 2005-12-06 | 스와겔로크 컴패니 | 다이어프램 밸브용 밸브 시트 |
TWM276133U (en) * | 2004-12-07 | 2005-09-21 | Metal Ind Res & Dev Ct | Pushing block applied in the valve |
US8172197B2 (en) * | 2006-07-06 | 2012-05-08 | Mks Instruments, Inc. | Fast-acting pneumatic diaphragm valve |
JP4355738B2 (ja) * | 2007-07-20 | 2009-11-04 | シーケーディ株式会社 | 流体制御弁 |
KR101702170B1 (ko) * | 2010-06-22 | 2017-02-03 | 스와겔로크 컴패니 | 용접된 다이어프램들을 위한 클램프 링 |
-
2013
- 2013-07-18 JP JP2013149254A patent/JP6218470B2/ja active Active
-
2014
- 2014-07-04 CN CN201480034016.2A patent/CN105452741B/zh not_active Expired - Fee Related
- 2014-07-04 US US14/898,584 patent/US9976658B2/en active Active
- 2014-07-04 WO PCT/JP2014/067870 patent/WO2015008633A1/ja active Application Filing
- 2014-07-04 KR KR1020157035669A patent/KR101809810B1/ko active IP Right Grant
- 2014-07-17 TW TW103124469A patent/TWI611130B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08210454A (ja) * | 1995-02-01 | 1996-08-20 | Honda Motor Co Ltd | 無段変速機用プーリにおけるアクチュエータケースのかしめ構造 |
JP2008304067A (ja) * | 1997-02-03 | 2008-12-18 | Swagelok Co | ダイヤフラム弁の弁座装置 |
JP2012092861A (ja) * | 2010-10-25 | 2012-05-17 | Ckd Corp | 流体制御弁の弁座構造 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017089837A (ja) * | 2015-11-13 | 2017-05-25 | 株式会社フジキン | ダイヤフラムバルブおよびその製造方法 |
JPWO2018037993A1 (ja) * | 2016-08-25 | 2019-06-20 | 株式会社キッツエスシーティー | ダイヤフラムバルブと半導体製造装置用流量制御機器 |
JP6995047B2 (ja) | 2016-08-25 | 2022-01-14 | 株式会社キッツエスシーティー | ダイヤフラムバルブと半導体製造装置用流量制御機器 |
Also Published As
Publication number | Publication date |
---|---|
CN105452741B (zh) | 2018-04-27 |
JP6218470B2 (ja) | 2017-10-25 |
CN105452741A (zh) | 2016-03-30 |
KR101809810B1 (ko) | 2017-12-15 |
US9976658B2 (en) | 2018-05-22 |
WO2015008633A1 (ja) | 2015-01-22 |
US20160131269A1 (en) | 2016-05-12 |
TW201516299A (zh) | 2015-05-01 |
KR20160009060A (ko) | 2016-01-25 |
TWI611130B (zh) | 2018-01-11 |
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