JP2015014503A - Interface evaluation method - Google Patents

Interface evaluation method Download PDF

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JP2015014503A
JP2015014503A JP2013140656A JP2013140656A JP2015014503A JP 2015014503 A JP2015014503 A JP 2015014503A JP 2013140656 A JP2013140656 A JP 2013140656A JP 2013140656 A JP2013140656 A JP 2013140656A JP 2015014503 A JP2015014503 A JP 2015014503A
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interface
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strength
abrasive grains
base material
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松原 亨
Toru Matsubara
亨 松原
力 勝俣
Riki Katsumata
力 勝俣
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PALMESO CO Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide an interface evaluation method which exhibits an action effect which is not exhibited in a prior art and excellent in practical utility.SOLUTION: Provided is the method for evaluating an interface between a substrate and a coating on a subject which is formed by forming the coating on a surface of the substrate made of metal or a synthetic resin material or the like. Spherical abrasive grains are injected with compressed air to the subject for reducing the subject. Then, based on a reduction amount of the subject and an abrasive grain amount or time required for reducing the subject, intensity of the interface between the subject and the coating is determined for evaluating the interface.

Description

本発明は、金属材や合成樹脂材などの基材表面に皮膜が形成された被験体における基材と皮膜との界面、若しくは、基材表面に複数の皮膜が積層形成された被験体における皮膜間の界面を評価する界面評価方法に関するものである。   The present invention relates to an interface between a substrate and a film in a subject in which a film is formed on the surface of a substrate such as a metal material or a synthetic resin material, or a film in a subject in which a plurality of films are stacked on the substrate surface. It is related with the interface evaluation method of evaluating the interface between.

従来から、金属製品や合成樹脂製品の基材表面に皮膜が形成された被験体における基材と皮膜との界面の特性を評価する方法として、例えばピーリングが提案されているが、皮膜が薄過ぎたり脆かったりした場合は引き剥がしが良好に行えず評価精度が著しく低下したり、評価自体が出来ないなどの問題点がある。また、他の評価方法としてスクラッチもあるが、やはり皮膜が薄過ぎた場合には、皮膜自体や基材を含めた引っ掻き破壊の数値となる為、界面そのものの強さを計れないなどの問題点がある。   Conventionally, for example, peeling has been proposed as a method for evaluating the characteristics of the interface between a base material and a film in a subject in which a film is formed on the surface of a metal product or synthetic resin product, but the film is too thin. If it is fragile or brittle, there is a problem that the peeling cannot be performed well and the evaluation accuracy is remarkably lowered, or the evaluation itself cannot be performed. In addition, there is scratch as another evaluation method. However, if the film is too thin, it becomes a numerical value of scratch destruction including the film itself and the base material, so that the strength of the interface itself cannot be measured. There is.

従って、基材表面に形成される皮膜が薄くても、簡易且つ良好に基材と皮膜との界面若しくは皮膜間の界面を評価できる界面評価方法が要求されている。   Therefore, there is a demand for an interface evaluation method that can easily and satisfactorily evaluate the interface between the substrate and the film or the interface between the films even if the film formed on the substrate surface is thin.

本発明者は、前述したような金属材や合成樹脂材などの基材表面に皮膜が形成された被験体における基材と皮膜との界面、若しくは、基材表面に複数の皮膜が積層形成された被験体における皮膜間の界面を評価する評価方法について更なる研究開発を進め、その結果、従来にない作用効果を発揮する実用性に秀れた界面評価方法を開発した。   The present inventor has formed a plurality of coatings on the substrate surface or the interface between the substrate and the coating in the subject in which the coating is formed on the substrate surface such as the metal material and the synthetic resin material as described above. As a result, we developed an interface evaluation method with excellent practicality that exhibits unprecedented effects.

添付図面を参照して本発明の要旨を説明する。   The gist of the present invention will be described with reference to the accompanying drawings.

金属材や合成樹脂材などの基材表面に皮膜が形成された被験体における該基材と該皮膜との界面を評価する方法であって、前記被験体に球状の砥粒を圧搾空気と共に噴射して該被験体を減少させ、この被験体の減少量と該減少に要した砥粒の量若しくは時間との因果関係をもとにした下記の式1から前記基材と前記皮膜との界面の強さを確知して該界面を評価することを特徴とする界面評価方法に係るものである。
式1
界面の強さ(摩耗率比)=界面近傍の摩耗率÷基材と皮膜のうち摩耗率が大きい方
A method for evaluating an interface between a base material and a coating film in a subject in which a coating film is formed on the surface of a base material such as a metal material or a synthetic resin material, and injecting spherical abrasive grains together with compressed air onto the subject The subject is reduced, and the interface between the base material and the coating is expressed by the following equation 1 based on the causal relationship between the reduction amount of the subject and the amount or time of the abrasive grains required for the reduction. The interface evaluation method is characterized in that the interface is evaluated by knowing the strength of the interface.
Formula 1
Interfacial strength (wear rate ratio) = wear rate near the interface ÷ substrate and coating with higher wear rate

また、金属材や合成樹脂材などの基材表面に複数の皮膜が積層形成された被験体における前記皮膜間の界面を評価する方法であって、前記被験体に球状の砥粒を圧搾空気と共に噴射して該被験体を減少させ、この被験体の減少量と該減少に要した砥粒の量若しくは時間との因果関係をもとにした下記の式2から前記皮膜間の界面の強さを確知して該界面を評価することを特徴とする界面評価方法に係るものである。
式2
界面の強さ(摩耗率比)=界面近傍の摩耗率÷界面を境界とした表裏の皮膜のうち摩耗率が大きい方
Further, it is a method for evaluating an interface between the films in a subject in which a plurality of films are laminated on a base material surface such as a metal material or a synthetic resin material, and spherical abrasive grains are put on the subject together with compressed air. The strength of the interface between the coatings from the following equation 2 based on the causal relationship between the amount of decrease in the subject and the amount or time of the abrasive grains required for the decrease. It is related with the interface evaluation method characterized by evaluating this and evaluating this interface.
Formula 2
Interface strength (ratio of wear rate) = wear rate near the interface ÷ surface film with a higher wear rate between the front and back surfaces

また、金属材や合成樹脂材などの基材表面に皮膜が形成された被験体における該基材と該皮膜との界面を評価する方法であって、前記被験体に球状の砥粒を圧搾空気と共に噴射して該被験体を減少させ、この被験体の減少量と該減少に要した砥粒の量若しくは時間との因果関係をもとに、前記界面近傍の強さ,前記基材の強さ及び前記皮膜の強さを確知して、前記界面を評価することを特徴とする界面評価方法に係るものである。   Further, it is a method for evaluating an interface between the base material and the film in a subject in which a film is formed on the surface of the base material such as a metal material or a synthetic resin material, and spherical air grains are compressed on the subject. And the strength of the base material and the strength of the base material based on the causal relationship between the decrease amount of the subject and the amount or time of the abrasive grains required for the decrease. The present invention relates to an interface evaluation method characterized in that the interface is evaluated by knowing the thickness and the strength of the film.

また、金属材や合成樹脂材などの基材表面に複数の皮膜が積層形成された被験体における前記皮膜間の界面を評価する方法であって、前記被験体に球状の砥粒を圧搾空気と共に噴射して該被験体を減少させ、この被験体の減少量と該減少に要した砥粒の量若しくは時間との因果関係をもとに、前記界面近傍の強さ及び前記界面を境界とした表裏の皮膜の強さを確知して、前記界面を評価することを特徴とする界面評価方法に係るものである。   Further, it is a method for evaluating an interface between the films in a subject in which a plurality of films are laminated on a base material surface such as a metal material or a synthetic resin material, and spherical abrasive grains are put on the subject together with compressed air. The subject is reduced by jetting, and based on the causal relationship between the reduction amount of the subject and the amount or time of the abrasive grains required for the reduction, the strength in the vicinity of the interface and the interface as a boundary The present invention relates to an interface evaluation method characterized by evaluating the interface by knowing the strength of the front and back films.

また、請求項1〜4いずれか1項に記載の界面評価方法において、前記界面近傍は、界面を境界とした表裏方向における所定範囲の部位であることを特徴とする界面評価方法に係るものである。   The interface evaluation method according to any one of claims 1 to 4, wherein the vicinity of the interface is a part of a predetermined range in a front and back direction with the interface as a boundary. is there.

また、請求項1〜5いずれか1項に記載の界面評価方法において、前記砥粒として最大粒径が10μm以下の砥粒を採用したことを特徴とする界面評価方法に係るものである。   The interface evaluation method according to claim 1, wherein an abrasive having a maximum particle size of 10 μm or less is employed as the abrasive.

また、請求項1〜6いずれか1項に記載の界面評価方法において、前記砥粒としてヤング率が300GPa以下の砥粒を採用したことを特徴とする界面評価方法に係るものである。   The interface evaluation method according to any one of claims 1 to 6, wherein an abrasive having a Young's modulus of 300 GPa or less is employed as the abrasive.

また、請求項1〜7いずれか1項に記載の界面評価方法において、前記被験体に、液体に前記砥粒が混入された噴射材を圧搾空気と共に噴射することを特徴とする界面評価方法に係るものである。   The interface evaluation method according to any one of claims 1 to 7, wherein an injection material in which the abrasive particles are mixed in a liquid is injected to the subject together with compressed air. It is concerned.

本発明は上述のようにしたから、基材と皮膜との界面、若しくは、皮膜間の界面を簡易且つ良好に評価することができる実用性に秀れた界面評価方法となる。   Since the present invention has been described above, the interface evaluation method is excellent in practicality and can easily and satisfactorily evaluate the interface between the base material and the film or the interface between the films.

本発明者が提案する従来方法の処理条件を示す表である。It is a table | surface which shows the process conditions of the conventional method which this inventor proposes. 本発明者が提案する従来方法の界面評価結果を示すグラフである。It is a graph which shows the interface evaluation result of the conventional method which this inventor proposes. 本発明者が提案する従来方法の界面評価結果を示すグラフである。It is a graph which shows the interface evaluation result of the conventional method which this inventor proposes. 本実施例の処理条件を示す表である。It is a table | surface which shows the process conditions of a present Example. 本実施例の界面評価結果を示すグラフである。It is a graph which shows the interface evaluation result of a present Example. 本実施例の界面評価結果を示すグラフである。It is a graph which shows the interface evaluation result of a present Example. 本実施例の界面評価結果を示すグラフである。It is a graph which shows the interface evaluation result of a present Example. 本実施例の界面評価結果を示すグラフである。It is a graph which shows the interface evaluation result of a present Example.

好適と考える本発明の実施形態を、図面に基づいて本発明の作用を示して簡単に説明する。   An embodiment of the present invention which is considered to be suitable will be briefly described with reference to the drawings showing the operation of the present invention.

本発明者は、特開2010−237071号に開示される、被験体に砥粒を繰り返し噴射して減量させる表面特性評価方法(以下、従来方法)を提案している。   The inventor has proposed a surface property evaluation method (hereinafter referred to as a conventional method) disclosed in Japanese Patent Application Laid-Open No. 2010-237071 in which abrasive grains are repeatedly injected onto a subject to reduce the amount.

即ち、この従来方法は、被験体の表面に砥粒を噴射して表面を摩耗させ、摩耗進行速度が材料強さに応じて異なることを応用して材料表面の強さを評価する技術であり、被験体に砥粒を噴射して該被験体を減少させ、この被験体の減少と該減少に要した砥粒の量との因果関係を確認して該被験体の表面の特性を評価することができるものである。   In other words, this conventional method is a technique for evaluating the strength of the material surface by applying abrasive particles to the surface of the subject to wear the surface and applying the fact that the wear progressing speed varies depending on the material strength. The abrasive is sprayed onto the subject to reduce the subject, and the causal relationship between the reduction in the subject and the amount of abrasive required for the reduction is confirmed to evaluate the surface characteristics of the subject. It is something that can be done.

本発明者は、この従来方法であれば被験体の深さ方向の各部位における特性を簡易に把握できるため、この従来方法は、金属材や合成樹脂材などの基材表面に皮膜が形成された被験体における基材と皮膜との界面、若しくは、基材表面に複数の皮膜が積層形成された被験体における皮膜間の界面を評価する方法として有効ではないかと考えた。   Since the present inventor can easily grasp the characteristics of each part in the depth direction of the subject with this conventional method, this conventional method has a film formed on the surface of a substrate such as a metal material or a synthetic resin material. It was considered that this method is effective as a method for evaluating the interface between a base material and a film in a subject, or the interface between films in a subject in which a plurality of films are laminated on the surface of the base material.

ところが、実際に従来方法で界面評価を行ったところ、不十分であることが判明した。   However, when the interface evaluation was actually performed by the conventional method, it was found to be insufficient.

即ち、図1に示した処理条件によりガラス表面にカラーフィルタ材料1・2・3を約2マイクロメートル塗布して紫外線硬化した被験体に対して砥粒を3回噴射して界面の評価を行おうとした。   That is, the interface is evaluated by spraying abrasive grains three times to a subject that has been coated with about 2 micrometers of color filter material 1, 2, 3 on the glass surface under the processing conditions shown in FIG. I tried.

噴射砥粒量と摩耗深さに基づいて示した図2のグラフからも判るように、必ず皮膜に該当する部位(グラフ線が急傾斜となる部分)と基材に該当する部位(グラフ線が緩傾斜となる部分)とは現れるが、皮膜と基材の界面に該当する部位は明確に現れず、よって、この界面を良好に評価できず、界面評価方法としては採用できないことが判明した。   As can be seen from the graph of FIG. 2 based on the amount of abrasive grains and the wear depth, the part corresponding to the film (part where the graph line is steeply inclined) and the part corresponding to the base material (the graph line is It appears that the portion corresponding to the interface between the film and the substrate does not appear clearly, and therefore this interface cannot be evaluated well and cannot be adopted as an interface evaluation method.

また、摩耗率(摩耗深さ/噴射砥粒量)と深さに基づいて示した図3のグラフにおいても、皮膜に該当する部位と基材に該当する部位との間に、両者と傾きが異なり界面と思われる部位が僅かに現れたものの、依然として界面を評価するには不十分であった。   Also, in the graph of FIG. 3 shown based on the wear rate (wear depth / abrasive grain amount) and depth, there is an inclination between the portion corresponding to the film and the portion corresponding to the substrate. Although the part which seems to be an interface slightly appeared, it was still insufficient for evaluating the interface.

これは、界面を境界とした表裏方向における所定範囲の部位としての界面近傍(以下、界面部)は、極めて薄く、この薄い部位に砥粒を衝突させると直ちに当該部位が切削されてしまい、グラフに現れなくなるからではないかと推測した。   This is because the vicinity of the interface (hereinafter referred to as the interface portion) in a predetermined range in the front and back direction with the interface as the boundary is extremely thin, and when the abrasive grains collide with this thin site, the site is immediately cut, and the graph I guessed that it would not appear in the.

そこで、本発明者は、球状の砥粒を採用することを着想した。即ち、球状の砥粒は角状の砥粒に比して切削作用が弱く、疲労や押し延ばしなどで微小な除去が行われ摩耗が緩やかに進行し、よって、界面部の切削を抑制して摩耗進行の差を拡大できるのではないかと考え、球状の砥粒を圧搾空気と共に噴射したところ、界面部に該当する部位がグラフに現れることを確認した。   Therefore, the present inventor has conceived of adopting spherical abrasive grains. In other words, spherical abrasive grains have a weaker cutting action than square abrasive grains, and minute wear is removed due to fatigue, stretching, etc., and wear progresses slowly, thus suppressing cutting at the interface. Assuming that the difference in the progress of wear could be expanded, when spherical abrasive grains were jetted together with the compressed air, it was confirmed that a portion corresponding to the interface portion appeared in the graph.

具体的には、図4に示した処理条件により図2と同じ被験体に対して砥粒を3回噴射して界面の評価を行った。   Specifically, the interface was evaluated by injecting abrasive grains three times to the same subject as in FIG. 2 under the processing conditions shown in FIG.

その結果を示した、噴射砥粒量と摩耗深さに基づいて示した図5のグラフからも判るように、皮膜に該当する部位(図5中の囲み部位B)と基材に該当する部位(図5中の囲み部位C)との間に界面部に該当する部位(図5中の囲み部位A)が現れた。   As can be seen from the graph of FIG. 5 shown based on the amount of abrasive grains and the wear depth showing the result, the part corresponding to the coating (enclosed part B in FIG. 5) and the part corresponding to the substrate A part corresponding to the interface (enclosed part A in FIG. 5) appeared between (enclosed part C in FIG. 5).

この図5のグラフから界面部に該当する部位はその他の部位に比して強さは弱く、この界面がどの深さ位置に分布するかが判る。   From the graph of FIG. 5, the portion corresponding to the interface is weaker than the other portions, and it can be seen at which depth position the interface is distributed.

また、摩耗率(摩耗深さ/噴射砥粒量)と深さに基づいて示した図6のグラフにおいても、皮膜に該当する部位(図5中の囲み部位B)と基材に該当する部位(図5中の囲み部位C)との間に界面部に該当する部位(図5中の囲み部位A)が現れた。   Further, in the graph of FIG. 6 shown based on the wear rate (wear depth / abrasive grain amount) and depth, the portion corresponding to the coating (enclosed portion B in FIG. 5) and the portion corresponding to the base material. A part corresponding to the interface (enclosed part A in FIG. 5) appeared between (enclosed part C in FIG. 5).

この図6のグラフからも界面部に該当する部位はその他の部位に比して強さは弱く、この界面がどの深さ位置に分布するかが判る。   From the graph of FIG. 6, the portion corresponding to the interface is weaker than the other portions, and it can be seen at which depth position the interface is distributed.

そして更に、この図6のグラフから、摩耗率比を界面の強さと定義し、皮膜若しくは基材の摩耗率に対する界面近傍の摩耗率の比で界面の強さを評価できることを確認し、これにより界面の強さが数値化できたため、他の界面との強さの比較も可能となった。   Further, from the graph of FIG. 6, the wear rate ratio is defined as the strength of the interface, and it is confirmed that the strength of the interface can be evaluated by the ratio of the wear rate in the vicinity of the interface to the wear rate of the film or the substrate. Since the strength of the interface could be quantified, it was possible to compare the strength with other interfaces.

具体的には、下記の式1を見い出し、基材と皮膜との界面の強さを算出して、基材と皮膜との界面を評価することができる。尚、界面の強さは、実用上は基材又は皮膜の弱い方(摩耗率が大きい)よりも強いか弱いかが重要であるために、分母は摩耗率の大きい方とした。
式1
界面の強さ(摩耗率比)=界面近傍の摩耗率÷基材と皮膜のうち摩耗率が大きい方
Specifically, the following formula 1 is found, the strength of the interface between the substrate and the film is calculated, and the interface between the substrate and the film can be evaluated. In practice, it is important that the strength of the interface is stronger or weaker than the weaker base material or film (higher wear rate), so that the denominator has the higher wear rate.
Formula 1
Interfacial strength (wear rate ratio) = wear rate near the interface ÷ substrate and coating with higher wear rate

上記の式1により、界面の強さが1の場合を必要十分と評価でき、1より小さい場合は界面の強さが強いと評価でき、1より大きい場合は界面の強さが弱いと評価できる。   According to the above formula 1, the case where the interface strength is 1 can be evaluated as necessary and sufficient. When the interface strength is less than 1, the interface strength can be evaluated as strong. When the interface strength is greater than 1, the interface strength can be evaluated as weak. .

また、前述した皮膜と基材との界面を評価する場合と同様、基材表面に複数の皮膜が積層形成された被験体における皮膜間の界面を評価する場合、摩耗率比を界面の強さと定義し、界面を境界とした表裏の皮膜の摩耗率に対する界面近傍の摩耗率の比で界面の強さを評価できることを確認し、これにより界面の強さが数値化できたため、他の界面との強さの比較も可能となった。   Similarly to the case of evaluating the interface between the film and the substrate described above, when evaluating the interface between the films in a subject in which a plurality of films are laminated on the surface of the substrate, the wear rate ratio is defined as the strength of the interface. It was confirmed that the strength of the interface can be evaluated by the ratio of the wear rate in the vicinity of the interface to the wear rate of the coating on the front and back surfaces with the interface as the boundary. It is also possible to compare the strength of.

具体的には、下記の式2を見い出し、皮膜間の界面の強さを算出して、皮膜間の界面を評価することができる。尚、界面の強さは、実用上は皮膜の弱い方(摩耗率が大きい)よりも強いか弱いかが重要であるために、分母は摩耗率の大きい方とした。
式2
界面の強さ(摩耗率比)=界面近傍の摩耗率÷界面を境界とした表裏の皮膜のうち摩耗率が大きい方
Specifically, the following formula 2 can be found, the strength of the interface between the films can be calculated, and the interface between the films can be evaluated. In practice, it is important that the strength of the interface is stronger or weaker than the weaker film (higher wear rate), so that the denominator has the higher wear rate.
Formula 2
Interface strength (ratio of wear rate) = wear rate near the interface ÷ surface film with a higher wear rate between the front and back surfaces

上記の式2により、界面の強さが1の場合を必要十分と評価でき、1より小さい場合は界面の強さが強いと評価でき、1より大きい場合は界面の強さが弱いと評価できる。   According to the above formula 2, the case where the interface strength is 1 can be evaluated as necessary and sufficient. When the interface strength is less than 1, the interface strength can be evaluated as strong. When the interface strength is greater than 1, the interface strength can be evaluated as weak. .

また、図5及び図6から、界面がどの深さ位置に分布しているか分かり、更に、界面近傍の強さが皮膜や基材に比してどのくらい強いか弱いかを確知して、基材と皮膜との界面や皮膜間の界面を評価できる。   5 and FIG. 6, it can be seen at which depth position the interface is distributed, and further know how strong or weak the strength in the vicinity of the interface is compared with the film or the substrate. The interface with the film and the interface between the films can be evaluated.

よって、球状の砥粒を用いることで被験体における皮膜と基材との界面、並びに、皮膜間の界面を良好に評価できることが判明した。   Therefore, it has been found that the use of spherical abrasive grains makes it possible to satisfactorily evaluate the interface between the film and the substrate and the interface between the films in the subject.

本発明は以上の事実及び結果をもとに創出されたものである。   The present invention has been created based on the above facts and results.

本発明の具体的な実施例について図面に基づいて説明する。   Specific embodiments of the present invention will be described with reference to the drawings.

本実施例は、金属材や合成樹脂材などの基材表面に皮膜が形成された被験体における基材と皮膜との界面、若しくは、基材表面に複数の皮膜が積層形成された被験体における皮膜間の界面を評価する方法であって、被験体に球状の砥粒を圧搾空気と共に噴射して該被験体を減少させる噴射部を具備した従来評価法に用いる評価装置と同構造の評価装置に、特別に研究開発した砥粒を用いた場合である。   In this example, the interface between a base material and a film in a subject in which a film is formed on the surface of a base material such as a metal material or a synthetic resin material, or in a subject in which a plurality of films are laminated on the surface of the base material A method for evaluating an interface between coatings, the evaluation device having the same structure as the evaluation device used in the conventional evaluation method including an injection unit that reduces the subject by injecting spherical abrasive grains together with the compressed air to the subject. This is the case where specially researched and developed abrasive grains are used.

具体的には、特開2010−237071号に公開された装置と仕組みを使って、噴射砥粒には材質はガラス(SiO2)で球状のビーズを用いた。このビーズは平均粒径が1,0μm、ヤング率は94GPaのものを使用した。   Specifically, using the apparatus and mechanism disclosed in Japanese Patent Application Laid-Open No. 2010-237071, spherical particles were used as the material for the spraying abrasive grains made of glass (SiO 2). The beads used had an average particle size of 1.0 μm and a Young's modulus of 94 GPa.

噴射条件は図4の表にあるように水に上記ガラスビーズを1wt%に調整した噴射材(スラリー)を作成し、このスラリーを噴射ノズルに導き、圧搾空気にて混合加速して被験体に噴射した。この時の圧搾空気の圧力は0.25Mpaとし、ノズル先端と被験体の距離は4mmに固定、噴射角度は90°とした。   As shown in the table of FIG. 4, the injection condition is to prepare a spray material (slurry) in which the glass beads are adjusted to 1 wt% in water, and this slurry is guided to the spray nozzle and mixed and accelerated with compressed air. Jetted. The pressure of the compressed air at this time was 0.25 MPa, the distance between the nozzle tip and the subject was fixed at 4 mm, and the injection angle was 90 °.

被験体は、3種類の合成樹脂製の基材(E48R(日本ゼオン(株)製の光学用樹脂),330R(日本ゼオン(株)製の光学用樹脂),パンライト(帝人(株)製のポリカーボネート樹脂の商標登録))とガラス製の基材夫々の表面に透明で薄い無機系の酸化チタン(TiO)をEB(エレクトロンビーム)法で210ナノメートル厚さに皮膜したものを選択した。 The subjects were three types of synthetic resin base materials (E48R (Optical resin manufactured by Nippon Zeon Co., Ltd.)), 330R (Optical resin manufactured by Nippon Zeon Co., Ltd.), Panlite (manufactured by Teijin Limited). (Registered trademark of polycarbonate resin)) and glass substrates were selected by coating thin and transparent inorganic titanium oxide (TiO 2 ) with a thickness of 210 nanometers by EB (electron beam) method. .

手順は、スラリー流量から計算された噴射砥粒量を噴射して、発生した摩耗痕を精密形状計測機(触針式または光干渉式形状測定機など)で摩耗痕中央部の深さを計測、この方法(噴射砥粒量と摩耗深さの相関データを得る方法)を繰り返し行う方法を選択した。尚、時間と摩耗深さの相関データを得る方法でも良い。   The procedure is to inject the amount of abrasive grain calculated from the slurry flow rate and measure the depth of the center of the wear mark with a precision shape measuring instrument (such as a stylus type or optical interference type shape measuring machine). The method of repeatedly performing this method (a method of obtaining correlation data between the amount of abrasive grains and the wear depth) was selected. A method of obtaining correlation data between time and wear depth may be used.

上記試験で得られた積算噴射砥粒量と摩耗深さの関係を図7に示す。   FIG. 7 shows the relationship between the cumulative amount of abrasive grains obtained in the above test and the wear depth.

皮膜に該当する部位(図7中の囲み部位B)と基材に該当する部位(図7中の囲み部位C)との間の界面部に該当する部位(図7中の囲み部位A)が現れた。   A site (enclosed site A in FIG. 7) corresponding to the interface between the site corresponding to the film (enclosed site B in FIG. 7) and the site corresponding to the substrate (enclosed site C in FIG. 7) Appeared.

この図7のグラフから界面部に該当する部位はその他の部位に比して強さは弱く、この界面がどの深さ位置に分布するかが判る。   From the graph of FIG. 7, the portion corresponding to the interface is weaker than the other portions, and it can be seen at which depth position the interface is distributed.

また、更に検討を進め、摩耗率(摩耗深さ/噴射砥粒量)と深さに基づいて示した図8のグラフにおいても、皮膜に該当する部位(図8中の囲み部位B)と基材に該当する部位(図8中の囲み部位C)との間に界面部に該当する部位(図8中の囲み部位A)が現れた。   Further, in the graph of FIG. 8 shown based on the wear rate (abrasion depth / abrasive grain amount) and the depth, the portion corresponding to the film (enclosed portion B in FIG. 8) and the base are also examined. A part corresponding to the interface (enclosed part A in FIG. 8) appeared between the part corresponding to the material (enclosed part C in FIG. 8).

この図8のグラフからも界面部に該当する部位はその他の部位に比して強さは弱く、この界面がどの深さ位置に分布するかが判る。   From the graph of FIG. 8, the portion corresponding to the interface is weaker than the other portions, and it can be seen at which depth position the interface is distributed.

そして更に、この図8のグラフから、界面の強さを、皮膜若しくは基材の強さとの割合で数値化して示すこともできる。   Further, from the graph of FIG. 8, the strength of the interface can be expressed by a numerical value in proportion to the strength of the film or the substrate.

具体的には、下記の式1から基材と皮膜との界面の強さを算出して、基材と皮膜との界面を評価することができる。
式1
界面の強さ(摩耗率比)=界面近傍の摩耗率÷基材と皮膜のうち摩耗率が大きい方
Specifically, the strength of the interface between the substrate and the film can be calculated from the following formula 1 to evaluate the interface between the substrate and the film.
Formula 1
Interfacial strength (wear rate ratio) = wear rate near the interface ÷ substrate and coating with higher wear rate

上記の式1により、強さ度合いが1の場合を必要十分と評価でき、1より小さい場合は強さが強いと評価でき、1より大きい場合は強さが弱いと評価できる。   According to the above formula 1, a case where the strength degree is 1 can be evaluated as necessary and sufficient, and if it is smaller than 1, it can be evaluated as strong, and if it is larger than 1, it can be evaluated as weak.

具体的には、式1を用いた各材料(E48R,330R,パンライト(商標登録),ガラス)における基材と皮膜との界面の強さは次の通りである。尚、式1の摩耗率は夫々の最大摩耗率とする。   Specifically, the strength of the interface between the substrate and the coating in each material (E48R, 330R, Panlite (registered trademark), glass) using Formula 1 is as follows. Note that the wear rate in Equation 1 is the maximum wear rate.

TiO2 EB E48Rの場合、界面の強さは、界面近傍の摩耗率(0.046)÷基材の摩耗率(0.028)=1.64である。   In the case of TiO2 EB E48R, the strength of the interface is the wear rate in the vicinity of the interface (0.046) ÷ the wear rate of the substrate (0.028) = 1.64.

TiO2 EB 330Rの場合、界面の強さは、界面近傍の摩耗率(0.097)÷基材の摩耗率(0.040)=2.43である。   In the case of TiO 2 EB 330R, the strength of the interface is the wear rate in the vicinity of the interface (0.097) ÷ the wear rate of the substrate (0.040) = 2.43.

TiO2 EB パンライト(商標登録)の場合、界面の強さは、界面近傍の摩耗率(0.030)÷基材の摩耗率(0.008)=3.75である。   In the case of TiO 2 EB Panlite (registered trademark), the strength of the interface is the wear rate in the vicinity of the interface (0.030) ÷ the wear rate of the substrate (0.008) = 3.75.

TiO2 EB ガラスの場合、界面の強さは、界面近傍の摩耗率(0.018)÷基材の摩耗率(0.009)=2.00である。   In the case of TiO 2 EB glass, the strength of the interface is the wear rate in the vicinity of the interface (0.018) ÷ the wear rate of the substrate (0.009) = 2.00.

この結果から、基材又は皮膜の弱い方の摩耗率を基準に各被験体の界面強さは1.64〜3.75となり、1よりも大きいことから、界面の強さがかなり弱い界面が存在することが判る。   From this result, the interface strength of each subject is 1.64 to 3.75 on the basis of the wear rate of the weaker base material or film, and is larger than 1, so that there is an interface with considerably weak interface strength. It can be seen that it exists.

また、更に図7,8を見るに、E48R,330R,パンライト(商標登録)には、基材に該当する部位(図7,8中の囲み部位C)と界面部に該当する部位(図7,8中の囲み部位A)との間に、基材に該当する部位より弱く且つ界面部に該当する部位より強い部位(囲み部位D)が現れている。   7 and 8, E48R, 330R and Panlite (registered trademark) include a part corresponding to the base material (enclosed part C in FIGS. 7 and 8) and a part corresponding to the interface (see FIG. 7). A portion (enclosed portion D) that is weaker than the portion corresponding to the base material and stronger than the portion corresponding to the interface portion appears between the surrounding portions A) in FIGS.

この図7,8中の囲み部位Dは、皮膜のEB蒸着の高エネルギーにより樹脂が変質した部位であり、かなりの厚みで弱い部分が存在することが判り、ガラスにはこのような変質劣化は見られないことも判る。   The enclosed part D in FIGS. 7 and 8 is a part where the resin has been altered by the high energy of the EB deposition of the film, and it can be seen that there is a weak part with a considerable thickness. I understand that I can't see it.

このように、被験体の深さ方向における各部位の状態を簡易且つ事細かに評価することができる。   Thus, the state of each part in the depth direction of the subject can be evaluated easily and in detail.

以上から、球径の砥粒を用いることで被験体の表面に形成されている基材と皮膜との界面を評価できることが判明した。また、同様に基材表面に複数の被膜が積層形成された被験体における皮膜間の界面を評価できることも判明した。   From the above, it was found that the interface between the base material and the film formed on the surface of the subject can be evaluated by using abrasive grains having a spherical diameter. In addition, it has also been found that the interface between coatings in a subject in which a plurality of coatings are formed on the substrate surface can be evaluated.

即ち、角状の砥粒だと良好な評価は行えなかったが、球状の砥粒を用いて砥粒量と摩耗深さをグラフ化したところ、界面の状態が明確に表れた。よって、被験体の界面を良好に評価でき、しかも、それを数値化することができたのである。   That is, good evaluation could not be made with square abrasive grains, but when the amount of abrasive grains and wear depth were graphed using spherical abrasive grains, the interface state clearly appeared. Therefore, it was possible to evaluate the subject's interface well and to quantify it.

本実施例は上述のように構成したから、高精度な皮膜と基材との界面を簡易に評価することができる実用性に秀れた界面評価方法となる。   Since the present Example was comprised as mentioned above, it becomes the interface evaluation method excellent in practicality which can evaluate easily the interface of a highly accurate membrane | film | coat and a base material.

具体的には、接合する2つの材料の相関を数値化が可能になり、よって、塗装やメッキや薄膜コーティング(硬・軟質)やゴム・エラストマーなどの接合界面の剥がれ・密着強さの特定,疲労前後の界面強さの数値化,熱履歴前後の界面強さの数値化及び変質(光や薬品)前後の界面強さの数値化などの応用ができる他、次の効果が期待できる。   Specifically, it is possible to quantify the correlation between the two materials to be joined. Therefore, the peeling and adhesion strength of joint interfaces such as painting, plating, thin film coating (hard and soft), rubber and elastomer, In addition to quantifying the interface strength before and after fatigue, quantifying the interface strength before and after thermal history, and quantifying the interface strength before and after alteration (light and chemicals), the following effects can be expected.

(1) 界面設計・開発の判定の精密化、高度化が期待できる。
(2) 従来出来なかった材料界面の数値化による品質向上が期待できる。
(3) 生産技術の保証能力向上が期待できる。
(4) 超薄膜界面の数値化実現による品質向上が期待できる。
(1) Refinement and sophistication of interface design / development can be expected.
(2) Expected to improve quality by quantification of material interface that could not be done before.
(3) Expected improvement in production technology assurance capability.
(4) Expected to improve quality by quantifying ultra-thin film interface.

尚、本発明は、本実施例に限られるものではなく、各構成要件の具体的構成は適宜設計し得るものである。   Note that the present invention is not limited to this embodiment, and the specific configuration of each component can be designed as appropriate.

Claims (8)

金属材や合成樹脂材などの基材表面に皮膜が形成された被験体における該基材と該皮膜との界面を評価する方法であって、前記被験体に球状の砥粒を圧搾空気と共に噴射して該被験体を減少させ、この被験体の減少量と該減少に要した砥粒の量若しくは時間との因果関係をもとにした下記の式1から前記基材と前記皮膜との界面の強さを確知して該界面を評価することを特徴とする界面評価方法。
式1
界面の強さ(摩耗率比)=界面近傍の摩耗率÷基材と皮膜のうち摩耗率が大きい方
A method for evaluating an interface between a base material and a coating film in a subject in which a coating film is formed on the surface of a base material such as a metal material or a synthetic resin material, and injecting spherical abrasive grains together with compressed air onto the subject The subject is reduced, and the interface between the base material and the coating is expressed by the following equation 1 based on the causal relationship between the reduction amount of the subject and the amount or time of the abrasive grains required for the reduction. An interface evaluation method characterized in that the interface is evaluated by knowing the strength of the interface.
Formula 1
Interfacial strength (wear rate ratio) = wear rate near the interface ÷ substrate and coating with higher wear rate
金属材や合成樹脂材などの基材表面に複数の皮膜が積層形成された被験体における前記皮膜間の界面を評価する方法であって、前記被験体に球状の砥粒を圧搾空気と共に噴射して該被験体を減少させ、この被験体の減少量と該減少に要した砥粒の量若しくは時間との因果関係をもとにした下記の式2から前記皮膜間の界面の強さを確知して該界面を評価することを特徴とする界面評価方法。
式2
界面の強さ(摩耗率比)=界面近傍の摩耗率÷界面を境界とした表裏の皮膜のうち摩耗率が大きい方
A method for evaluating an interface between the coatings in a subject in which a plurality of coatings are formed on a base material surface such as a metal material or a synthetic resin material, wherein spherical abrasive grains are jetted onto the subject together with compressed air. The subject is reduced, and the strength of the interface between the coatings is ascertained from the following equation 2 based on the causal relationship between the reduction amount of the subject and the amount or time of the abrasive grains required for the reduction. And evaluating the interface.
Formula 2
Interface strength (ratio of wear rate) = wear rate near the interface ÷ surface film with a higher wear rate between the front and back surfaces
金属材や合成樹脂材などの基材表面に皮膜が形成された被験体における該基材と該皮膜との界面を評価する方法であって、前記被験体に球状の砥粒を圧搾空気と共に噴射して該被験体を減少させ、この被験体の減少量と該減少に要した砥粒の量若しくは時間との因果関係をもとに、前記界面近傍の強さ,前記基材の強さ及び前記皮膜の強さを確知して、前記界面を評価することを特徴とする界面評価方法。   A method for evaluating an interface between a base material and a coating film in a subject in which a coating film is formed on the surface of a base material such as a metal material or a synthetic resin material, and injecting spherical abrasive grains together with compressed air onto the subject The subject is reduced, and based on the causal relationship between the reduction amount of the subject and the amount or time of the abrasive grains required for the reduction, the strength in the vicinity of the interface, the strength of the base material, and An interface evaluation method characterized by evaluating the interface by knowing the strength of the film. 金属材や合成樹脂材などの基材表面に複数の皮膜が積層形成された被験体における前記皮膜間の界面を評価する方法であって、前記被験体に球状の砥粒を圧搾空気と共に噴射して該被験体を減少させ、この被験体の減少量と該減少に要した砥粒の量若しくは時間との因果関係をもとに、前記界面近傍の強さ及び前記界面を境界とした表裏の皮膜の強さを確知して、前記界面を評価することを特徴とする界面評価方法。   A method for evaluating an interface between the coatings in a subject in which a plurality of coatings are formed on a base material surface such as a metal material or a synthetic resin material, wherein spherical abrasive grains are jetted onto the subject together with compressed air. The subject is reduced, and based on the causal relationship between the reduction amount of the subject and the amount or time of the abrasive grains required for the reduction, the strength in the vicinity of the interface and the An interface evaluation method comprising evaluating the interface by knowing the strength of the film. 請求項1〜4いずれか1項に記載の界面評価方法において、前記界面近傍は、界面を境界とした表裏方向における所定範囲の部位であることを特徴とする界面評価方法。   5. The interface evaluation method according to claim 1, wherein the vicinity of the interface is a portion in a predetermined range in a front-back direction with the interface as a boundary. 請求項1〜5いずれか1項に記載の界面評価方法において、前記砥粒として最大粒径が10μm以下の砥粒を採用したことを特徴とする界面評価方法。   The interface evaluation method according to claim 1, wherein an abrasive having a maximum particle size of 10 μm or less is employed as the abrasive. 請求項1〜6いずれか1項に記載の界面評価方法において、前記砥粒としてヤング率が300GPa以下の砥粒を採用したことを特徴とする界面評価方法。   The interface evaluation method according to claim 1, wherein abrasive grains having a Young's modulus of 300 GPa or less are employed as the abrasive grains. 請求項1〜7いずれか1項に記載の界面評価方法において、前記被験体に、液体に前記砥粒が混入された噴射材を圧搾空気と共に噴射することを特徴とする界面評価方法。   8. The interface evaluation method according to claim 1, wherein an injection material in which the abrasive grains are mixed in a liquid is injected together with compressed air onto the subject.
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CN108302531B (en) * 2018-01-04 2019-08-09 湘潭大学 Simulate the flame injection device and flame spraying method of thermal barrier coating service environment
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JP2020187083A (en) * 2019-05-17 2020-11-19 株式会社高速道路総合技術研究所 Aging deterioration evaluation method of existing resin material, and evaluation device for the same
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