JP2015013354A5 - - Google Patents

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Publication number
JP2015013354A5
JP2015013354A5 JP2013142507A JP2013142507A JP2015013354A5 JP 2015013354 A5 JP2015013354 A5 JP 2015013354A5 JP 2013142507 A JP2013142507 A JP 2013142507A JP 2013142507 A JP2013142507 A JP 2013142507A JP 2015013354 A5 JP2015013354 A5 JP 2015013354A5
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JP
Japan
Prior art keywords
workpiece
cutting edge
cutting
groove
blazed
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JP2013142507A
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English (en)
Japanese (ja)
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JP6173077B2 (ja
JP2015013354A (ja
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Priority to JP2013142507A priority Critical patent/JP6173077B2/ja
Priority claimed from JP2013142507A external-priority patent/JP6173077B2/ja
Publication of JP2015013354A publication Critical patent/JP2015013354A/ja
Publication of JP2015013354A5 publication Critical patent/JP2015013354A5/ja
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Publication of JP6173077B2 publication Critical patent/JP6173077B2/ja
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JP2013142507A 2013-07-08 2013-07-08 ブレーズ型回折格子の製造方法およびそのための型の製造方法 Active JP6173077B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013142507A JP6173077B2 (ja) 2013-07-08 2013-07-08 ブレーズ型回折格子の製造方法およびそのための型の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013142507A JP6173077B2 (ja) 2013-07-08 2013-07-08 ブレーズ型回折格子の製造方法およびそのための型の製造方法

Publications (3)

Publication Number Publication Date
JP2015013354A JP2015013354A (ja) 2015-01-22
JP2015013354A5 true JP2015013354A5 (zh) 2016-08-25
JP6173077B2 JP6173077B2 (ja) 2017-08-02

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ID=52435539

Family Applications (1)

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JP2013142507A Active JP6173077B2 (ja) 2013-07-08 2013-07-08 ブレーズ型回折格子の製造方法およびそのための型の製造方法

Country Status (1)

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JP (1) JP6173077B2 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6824090B2 (ja) * 2017-03-28 2021-02-03 センクシア株式会社 溝付板の製造方法
CN114527528B (zh) * 2022-02-09 2023-06-13 清华大学 闪耀光栅的加工方法及基于闪耀光栅的光学可变器件

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005279918A (ja) * 2004-03-04 2005-10-13 Seiko Epson Corp 微細構造素子の製造方法、この方法により製造された微細構造素子、空間光変調装置及びプロジェクタ
JP4587172B2 (ja) * 2005-04-01 2010-11-24 キヤノン株式会社 回折光学素子、回折光学素子の製造方法、及び回折光学素子成形用金型の製造方法
JP5010377B2 (ja) * 2007-07-20 2012-08-29 株式会社東芝 回折光学素子、回折光学素子成形用金型、および回折光学素子成形用金型の製造方法
JP2009025655A (ja) * 2007-07-20 2009-02-05 Toshiba Corp 回折光学素子、回折光学素子成形用金型、および回折光学素子成形用金型の製造方法
JP5731811B2 (ja) * 2010-12-15 2015-06-10 キヤノン株式会社 ブレーズ型回折格子の製造方法及びそのための型の製造方法
JP6032869B2 (ja) * 2011-03-10 2016-11-30 キヤノン株式会社 ブレーズ型回折格子

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