JP2014520052A - SiNWアレイ上垂直配向型CNTの無触媒合成 - Google Patents
SiNWアレイ上垂直配向型CNTの無触媒合成 Download PDFInfo
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Abstract
【解決手段】本発明は、単一電子装置に有用である超低ターンオン電界を有する、垂直配向型シリコンナノワイヤ(SiNW)−カーボンナノチューブ(CNT)アレイの新規の一次元直接ナノへテロ接合を開示する。さらに、本発明は、垂直配向型SiNW−CNTアレイの一次元直接ナノへテロ接合を合成するための無触媒化学蒸着(CVD)法を開示する。
【選択図】なし
Description
本発明の主な目的は、垂直配向型シリコンナノワイヤ−カーボンナノチューブ(SiNW−CNT)アレイの新規一次元ナノへテロ接合を提供することである。
したがって、本発明は、垂直配向型シリコンナノワイヤそれぞれの活性先端においてカーボンナノチューブ(CNT)を直接成長させるために、昇華された芳香族炭化水素を炭素前駆体として垂直配向型シリコンナノワイヤ(SiNW)と反応させることを含む、無触媒化学蒸着(CVD)プロセスによって得られたシリコンナノワイヤ−カーボンナノチューブ(SiNW−CNT)の一次元ナノへテロ接合アレイを提供する。
本発明は、容易に様々な改変および変更形態をとるが、その特定の態様が実施例および図表として示され、以下に詳しく説明される。しかしながら、開示された特定の形態に本発明を制限することを意図するものではなく、反対に、本発明は、添付の特許請求の範囲に定義される本発明の趣旨および範囲内にあるすべての改変、等価物、および変更例を含み得るということは理解されるべきである。
本発明の垂直配向型SiNW−CNTアレイは、以下のように用いることができる。
[実施例1]
<SiNW(シリコンナノワイヤ)の合成>
1x1cm2の、リンがドープされたn型のSi(100)ウエハー(0.001〜0.002Ω.cm、ウエハーネット社(Wafernet Inc.))を、アセトン、イソプロパノールおよび脱イオン(D.I)水(18.2MΩ.cm)を順次用い、各5分間超音波処理を行って洗浄した。Siウエハー上に元からあった酸化層を、沸騰ピラニア溶液(80℃)すなわち98%H2SO4:30%H2O2(体積比3:1)中で20分間処理することで除去し、さらにD.I水で洗浄し、Ar流により乾燥させた。
<ナノへテロ接合の調製>
SiNW−CNTアレイのナノへテロ接合を、1200℃まで達することができる自家製のCVD装置(区画を2つ有する)で合成した。主(反応)区画の端は、未反応の熱いガスをトラップする冷却復水器を通す排気装置に接続した。まず初めに、石英チューブ(内径34mm、長さ108mm)をエタノールで数回洗浄し、次に空気を吹き込んだ。続いて、不純物をすべて排出するため、石英チューブに、アルゴンの気流を標準状態で毎分100立方センチメートル(sccm)流した。この石英チューブを、2つの区画の電気炉内に水平に保持した。ナフタレンを炭素源の前駆体として用い、2つの電気炉のうち予熱区画に保持して、温度を300℃に維持し、ナフタレンの完全な昇華を確実に行った。次に、昇華された前駆体を、キャリヤガスとしてのアルゴン(Ar)によって、500sccmで、SiNWアレイ(実施例1で得られたようなもの)が950℃で加熱されている主(反応)区画へ流し入れた。前駆体区画が300℃に達したときに、反応区画の温度が950℃に達するようにプログラムされた。炉の加熱速度は20℃/分で維持され、Arの流速は、SiNW中の酸素量を最小限に抑えるために500sccmで維持された。反応を60分間行い、ナノチューブの直径が50〜100nmの範囲のCNTをSiNWアレイ上で成長させた。
EMDおよび化学エッチングによって合成されたSiNWアレイのSEM画像を図1(a、b)に示す。
)。CNT成長後のスペクトルにおいて、43%以下の炭素含量が示される。
高解像度(0.1eV)XPスペクトルを記録することで、未加工の試料およびヘテロ接合試料の化学状態を識別する。コア準位結合エネルギーは、表面帯電効果を補償するために、285.0eVにおけるC 1s中性炭素ピークを基準とした。
無加工SiNWアレイおよびSiNW−CNTアレイの電界電子放出測定は、超高真空下、平面ダイオード構成で行われる。
SiNWアレイおよびSiNW−CNTアレイのFE安定性測定は、30分にわたり、電界を0.89V/moverに保つことで行われる。図S1(S.I.)に示されるように、この期間中は、電流の低下または電流の顕著な変動はなかった。電子エミッタの高真空下であっても結果の再現性が高いのは、単一ナノワイヤとSiNWs用の基板との間に強いSi−Si共有結合があり、SiNW−CNTアレイの場合、ナノ接触に強いSi−C結合が形成されるからである。
CNTのSi/SiNWとのヘテロ接合形成を論じた報告があるが、たいていの場合は複数接点を有する。そのような場合、連続的な電子輸送は失われ、電子経路は複数のナノチューブ、ナノワイヤまたはその両方によって共有されることになる。本明細書において、電子電界放出特性増大のための簡単な化学蒸着法による、CNTとSiNWとの間の直接ナノへテロ接合の無触媒合成方法を初めて報告する。
Claims (9)
- 昇華性芳香族炭化水素を炭素前駆体として垂直配向型シリコンナノワイヤ(SiNW)と反応させ、垂直配向型シリコンナノワイヤそれぞれの活性先端においてカーボンナノチューブ(CNT)を成長させることを含む、SiNW−CNTの一次元直接ナノへテロ接合アレイを得るための無触媒化学蒸着(CVD)プロセス。
- 前記垂直配向型SiNWそれぞれの活性先端におけるカーボンナノチューブの直接成長は、
(a)予熱区画において、芳香族前駆体を150℃〜350℃の温度範囲で熱分解し、続いて、昇華された炭素を前記キャリヤガスの流れと共にCVDの前記主反応区画に運ぶこと、および
(b)流入してくる昇華した炭素を、900℃から960℃の温度範囲で、SiNWの先端と前記主反応区画において反応させ、SiNWアレイ上の完全なCNTの垂直配向を行うこと
を含む、請求項1に記載の無触媒プロセス。 - 前記垂直配向型SiNW−CNTの直接ナノへテロ接合アレイが形成される、請求項1及び2に記載の無触媒プロセス。
- 前記芳香族前駆体が、ナフタレンまたはアントラセンから選択される容易に昇華可能な炭素前駆体である、請求項1及び2に記載の無触媒プロセス。
- 垂直配向型カーボンナノチューブ(CNT)が多層CNT(MWNT)を含む、請求項1及び2に記載の無触媒プロセス。
- 垂直配向型CNTの直径が50〜100nmの範囲である、請求項1及び2に記載の無触媒プロセス。
- 垂直配向型シリコンナノワイヤおよび垂直配向型カーボンナノチューブを含む単一電子装置に有用である超低ターンオン電界を有する無触媒一次元ナノへテロ接合アレイであって、前記垂直配向型カーボンナノチューブは、垂直配向型シリコンナノワイヤそれぞれと直接接触している、無触媒一次元ナノへテロ接合アレイ。
- 垂直配向型カーボンナノチューブ(CNT)の直径が50〜100nmの範囲である、請求項7に記載の無触媒一次元ナノへテロ接合アレイ。
- 垂直配向型カーボンナノチューブ(CNT)が多層CNT(MWNT)を含む、請求項7に記載の無触媒一次元ナノへテロ接合アレイ。
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