JP2014510271A - ばね構造、共振器、共振器アレイおよびセンサ - Google Patents
ばね構造、共振器、共振器アレイおよびセンサ Download PDFInfo
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- JP2014510271A JP2014510271A JP2013555913A JP2013555913A JP2014510271A JP 2014510271 A JP2014510271 A JP 2014510271A JP 2013555913 A JP2013555913 A JP 2013555913A JP 2013555913 A JP2013555913 A JP 2013555913A JP 2014510271 A JP2014510271 A JP 2014510271A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/42—Devices characterised by the use of electric or magnetic means
- G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Abstract
【選択図】図5
Description
Claims (10)
- ばね構造(501)であって、少なくとも2つの質量体(Ma、Mb)の連結点に接続されたばね(Sh1、Sh2)間のループ(L、E)を介して、前記質量体(Ma、Mb)に接続された前記ばね(Sh1、Sh2)を用いて、逆相振動として第1の方向に連結した前記質量体(Ma、Mb)を有し、前記ループ(L)の長手方向の運動が、前記第1の方向に垂直に、または実質的に垂直に発生するように構成されるように、前記ループ(L)の前記連結点から基部のアンカー(A)に斜めのばね(Sl45、Sr45)を連結して、したがって、前記質量体(Ma、Mb)の逆相振動以外の逆相振動を減衰させることを特徴とするばね構造。
- 前記斜めのばね(Sl45、Sr45)は、前記ループ(L)に対して対称であることを特徴とする、請求項1に記載のばね構造。
- 前記斜めのばね(Sl45、Sr45)は、同一ばね定数を有することを特徴とする、請求項1または2に記載のばね構造。
- 前記斜めのばね(Sl45、Sr45)は、同一の化学組成および/または構造組成を有することを特徴とする、請求項1、2または3に記載のばね構造。
- 前記斜めのばね(Sl45、Sr45)は、長さ、幅、厚さの寸法の少なくとも1つが共通であることを特徴とする、請求項1〜4のうちいずれか一項に記載のばね構造。
- 二重差動ばね構造であって、逆相振動子として堅い接続部材Cと連結した、請求項1に記載のばね構造(901、902)を有する二重差動ばね構造。
- 共振器であって、請求項1〜6のうちいずれか一項に記載の少なくとも1つのばね構造を有することにより特徴づけられる共振器。
- 共振器アレイであって、請求項7に記載の少なくとも1つの共振器を有することにより特徴づけられる共振器アレイ。
- センサであって、請求項7または8に記載の少なくとも1つの共振器を有することにより特徴づけられるセンサ。
- センサシステムであって、請求項9に記載の少なくとも1つの共振器を有することにより特徴づけられるセンサシステム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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FI20115223 | 2011-03-04 | ||
FI20115223A FI124020B (fi) | 2011-03-04 | 2011-03-04 | Jousirakenne, resonaattori, resonaattorimatriisi ja anturi |
PCT/FI2012/050194 WO2012120190A2 (en) | 2011-03-04 | 2012-02-27 | Spring structure, resonator, resonator array and sensor |
Publications (2)
Publication Number | Publication Date |
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JP2014510271A true JP2014510271A (ja) | 2014-04-24 |
JP6027029B2 JP6027029B2 (ja) | 2016-11-16 |
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Application Number | Title | Priority Date | Filing Date |
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JP2013555913A Active JP6027029B2 (ja) | 2011-03-04 | 2012-02-27 | ばね構造、共振器、共振器アレイおよびセンサ |
Country Status (10)
Country | Link |
---|---|
US (1) | US9127943B2 (ja) |
EP (1) | EP2681511B1 (ja) |
JP (1) | JP6027029B2 (ja) |
KR (1) | KR101795364B1 (ja) |
CN (1) | CN103492836B (ja) |
FI (1) | FI124020B (ja) |
IL (1) | IL228048A (ja) |
SG (1) | SG192998A1 (ja) |
TW (1) | TWI554741B (ja) |
WO (1) | WO2012120190A2 (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017514123A (ja) * | 2014-05-07 | 2017-06-01 | 株式会社村田製作所 | 改良されたジャイロスコープ構造体及びジャイロスコープデバイス |
CN108204807A (zh) * | 2016-12-19 | 2018-06-26 | 美国亚德诺半导体公司 | 用于微机电系统(mems)装置的弯曲联接器 |
JP2018100966A (ja) * | 2016-12-19 | 2018-06-28 | アナログ ディヴァイスィズ インク | 同期化マスジャイロスコープ |
US10697774B2 (en) | 2016-12-19 | 2020-06-30 | Analog Devices, Inc. | Balanced runners synchronizing motion of masses in micromachined devices |
US10948294B2 (en) | 2018-04-05 | 2021-03-16 | Analog Devices, Inc. | MEMS gyroscopes with in-line springs and related systems and methods |
US11686581B2 (en) | 2020-06-08 | 2023-06-27 | Analog Devices, Inc. | Stress-relief MEMS gyroscope |
US11692825B2 (en) | 2020-06-08 | 2023-07-04 | Analog Devices, Inc. | Drive and sense stress relief apparatus |
US11698257B2 (en) | 2020-08-24 | 2023-07-11 | Analog Devices, Inc. | Isotropic attenuated motion gyroscope |
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US9372084B2 (en) * | 2012-04-04 | 2016-06-21 | Seiko Epson Corporation | Gyro sensor, electronic apparatus, and mobile unit |
JP6195051B2 (ja) * | 2013-03-04 | 2017-09-13 | セイコーエプソン株式会社 | ジャイロセンサー、電子機器、及び移動体 |
US9958271B2 (en) * | 2014-01-21 | 2018-05-01 | Invensense, Inc. | Configuration to reduce non-linear motion |
FI126071B (en) * | 2014-01-28 | 2016-06-15 | Murata Manufacturing Co | Improved gyroscope structure and gyroscope |
DE102014215038A1 (de) * | 2014-07-31 | 2016-02-04 | Robert Bosch Gmbh | Mikromechanischer Sensor und Verfahren zur Herstellung eines mikromechanischen Sensors |
KR101754634B1 (ko) * | 2015-05-12 | 2017-07-07 | 주식회사 신성씨앤티 | 2자유도 감지 모드를 갖는 멤스 자이로스코프 |
DE102015213455A1 (de) * | 2015-07-17 | 2017-01-19 | Robert Bosch Gmbh | OMM-Drehraten mit Antrieb ohne feststehende Elektroden |
TWI632345B (zh) | 2016-05-27 | 2018-08-11 | 日商村田製作所股份有限公司 | 振動的微機電陀螺儀之驅動振輻的持續性監控與相關方法 |
KR102052592B1 (ko) * | 2017-02-24 | 2019-12-06 | 한국기계연구원 | 고열전도 질화규소 소결체의 제조방법 |
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2011
- 2011-03-04 FI FI20115223A patent/FI124020B/fi active IP Right Grant
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2012
- 2012-02-27 CN CN201280011285.8A patent/CN103492836B/zh active Active
- 2012-02-27 JP JP2013555913A patent/JP6027029B2/ja active Active
- 2012-02-27 EP EP12755335.2A patent/EP2681511B1/en active Active
- 2012-02-27 SG SG2013065347A patent/SG192998A1/en unknown
- 2012-02-27 WO PCT/FI2012/050194 patent/WO2012120190A2/en active Application Filing
- 2012-02-27 KR KR1020137025785A patent/KR101795364B1/ko active IP Right Grant
- 2012-02-29 US US13/407,860 patent/US9127943B2/en active Active
- 2012-03-01 TW TW101106686A patent/TWI554741B/zh active
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- 2013-08-20 IL IL228048A patent/IL228048A/en active IP Right Grant
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Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2017514123A (ja) * | 2014-05-07 | 2017-06-01 | 株式会社村田製作所 | 改良されたジャイロスコープ構造体及びジャイロスコープデバイス |
US9829318B2 (en) | 2014-05-07 | 2017-11-28 | Murata Manufacturing Co., Ltd. | Gyroscope structure and gyroscope device |
CN108204807A (zh) * | 2016-12-19 | 2018-06-26 | 美国亚德诺半导体公司 | 用于微机电系统(mems)装置的弯曲联接器 |
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US10697774B2 (en) | 2016-12-19 | 2020-06-30 | Analog Devices, Inc. | Balanced runners synchronizing motion of masses in micromachined devices |
US10948294B2 (en) | 2018-04-05 | 2021-03-16 | Analog Devices, Inc. | MEMS gyroscopes with in-line springs and related systems and methods |
US11686581B2 (en) | 2020-06-08 | 2023-06-27 | Analog Devices, Inc. | Stress-relief MEMS gyroscope |
US11692825B2 (en) | 2020-06-08 | 2023-07-04 | Analog Devices, Inc. | Drive and sense stress relief apparatus |
US11698257B2 (en) | 2020-08-24 | 2023-07-11 | Analog Devices, Inc. | Isotropic attenuated motion gyroscope |
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Also Published As
Publication number | Publication date |
---|---|
SG192998A1 (en) | 2013-10-30 |
FI20115223L (fi) | 2012-09-05 |
US9127943B2 (en) | 2015-09-08 |
KR20140009434A (ko) | 2014-01-22 |
US20120222483A1 (en) | 2012-09-06 |
IL228048A (en) | 2017-09-28 |
KR101795364B1 (ko) | 2017-11-08 |
CN103492836A (zh) | 2014-01-01 |
CN103492836B (zh) | 2016-04-06 |
FI124020B (fi) | 2014-02-14 |
FI20115223A0 (fi) | 2011-03-04 |
TW201248121A (en) | 2012-12-01 |
JP6027029B2 (ja) | 2016-11-16 |
TWI554741B (zh) | 2016-10-21 |
EP2681511A4 (en) | 2014-09-10 |
WO2012120190A2 (en) | 2012-09-13 |
FI20115223A (fi) | 2012-09-05 |
EP2681511B1 (en) | 2017-07-26 |
WO2012120190A3 (en) | 2012-11-01 |
EP2681511A2 (en) | 2014-01-08 |
IL228048A0 (en) | 2013-09-30 |
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