FI20115223L - Jousirakenne, resonaattori, resonaattorimatriisi ja anturi - Google Patents

Jousirakenne, resonaattori, resonaattorimatriisi ja anturi Download PDF

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Publication number
FI20115223L
FI20115223L FI20115223A FI20115223A FI20115223L FI 20115223 L FI20115223 L FI 20115223L FI 20115223 A FI20115223 A FI 20115223A FI 20115223 A FI20115223 A FI 20115223A FI 20115223 L FI20115223 L FI 20115223L
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FI
Finland
Prior art keywords
resonator
sensor
spring structure
link
matrix
Prior art date
Application number
FI20115223A
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English (en)
Swedish (sv)
Other versions
FI20115223A (fi
FI20115223A0 (fi
FI124020B (fi
Inventor
Anssi Blomqvist
Jaakko Ruohio
Original Assignee
Vti Tech Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Tech Oy filed Critical Vti Tech Oy
Publication of FI20115223A0 publication Critical patent/FI20115223A0/fi
Priority to FI20115223A priority Critical patent/FI124020B/fi
Priority to SG2013065347A priority patent/SG192998A1/en
Priority to PCT/FI2012/050194 priority patent/WO2012120190A2/en
Priority to JP2013555913A priority patent/JP6027029B2/ja
Priority to EP12755335.2A priority patent/EP2681511B1/en
Priority to CN201280011285.8A priority patent/CN103492836B/zh
Priority to KR1020137025785A priority patent/KR101795364B1/ko
Priority to US13/407,860 priority patent/US9127943B2/en
Priority to TW101106686A priority patent/TWI554741B/zh
Publication of FI20115223A publication Critical patent/FI20115223A/fi
Publication of FI20115223L publication Critical patent/FI20115223L/fi
Priority to IL228048A priority patent/IL228048A/en
Application granted granted Critical
Publication of FI124020B publication Critical patent/FI124020B/fi

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)

Abstract

Keksinnössä esitetään jousirakenne (501), jossa on ainakin kaksi massaa (Ma, Mb) kytkettynä eräässä ensimmäisessä suunnassa vastakkaisvaiheisiksi värähtelijöiksi niihin (Ma, Mb) yhdistettyjen jousien (Sh1, Sh2) avulla, mainittujen jousien (Sh1, Sh2) väliin niiden kytkentäpisteisiin yhdistetyn lenkin (L, E) välityksellä, jolloin mainituista lenkin (L) kytkentäpisteistä on yhdistetty alustan ankkuriin (A) vinot jouset (Sl45, Sr45) siten, että lenkin (L) pitkittäissuuntainen liike on järjestetty tapahtuvaksi kohtisuorassa tai oleellisesti kohtisuorassa mainittua ensimmäistä suuntaa vastaan, siten muun kuin massojen (Ma, Mb) vastakkaisvaiheisen värähtelyn vaimentamiseksi. Keksinnössä esitetään myös jousirakenteen käyttö resonaattorissa ja/tai resonaattorimatriisissa sekä anturissa tai anturin käsittävässä systeemissä.
FI20115223A 2011-03-04 2011-03-04 Jousirakenne, resonaattori, resonaattorimatriisi ja anturi FI124020B (fi)

Priority Applications (10)

Application Number Priority Date Filing Date Title
FI20115223A FI124020B (fi) 2011-03-04 2011-03-04 Jousirakenne, resonaattori, resonaattorimatriisi ja anturi
PCT/FI2012/050194 WO2012120190A2 (en) 2011-03-04 2012-02-27 Spring structure, resonator, resonator array and sensor
SG2013065347A SG192998A1 (en) 2011-03-04 2012-02-27 Spring structure, resonator, resonator array and sensor
JP2013555913A JP6027029B2 (ja) 2011-03-04 2012-02-27 ばね構造、共振器、共振器アレイおよびセンサ
EP12755335.2A EP2681511B1 (en) 2011-03-04 2012-02-27 Spring structure, resonator, resonator array and sensor
CN201280011285.8A CN103492836B (zh) 2011-03-04 2012-02-27 弹簧结构、振荡器、振荡器阵列和传感器
KR1020137025785A KR101795364B1 (ko) 2011-03-04 2012-02-27 스프링 구조물, 공명기, 공명기 어레이 및 센서
US13/407,860 US9127943B2 (en) 2011-03-04 2012-02-29 Spring structure, resonator, resonator array and sensor
TW101106686A TWI554741B (zh) 2011-03-04 2012-03-01 彈簧結構、諧振器、諧振器陣列與感測器
IL228048A IL228048A (en) 2011-03-04 2013-08-20 Spring structure, resonator, resonator array and sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20115223 2011-03-04
FI20115223A FI124020B (fi) 2011-03-04 2011-03-04 Jousirakenne, resonaattori, resonaattorimatriisi ja anturi

Publications (4)

Publication Number Publication Date
FI20115223A0 FI20115223A0 (fi) 2011-03-04
FI20115223A FI20115223A (fi) 2012-09-05
FI20115223L true FI20115223L (fi) 2012-09-05
FI124020B FI124020B (fi) 2014-02-14

Family

ID=43806435

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20115223A FI124020B (fi) 2011-03-04 2011-03-04 Jousirakenne, resonaattori, resonaattorimatriisi ja anturi

Country Status (10)

Country Link
US (1) US9127943B2 (fi)
EP (1) EP2681511B1 (fi)
JP (1) JP6027029B2 (fi)
KR (1) KR101795364B1 (fi)
CN (1) CN103492836B (fi)
FI (1) FI124020B (fi)
IL (1) IL228048A (fi)
SG (1) SG192998A1 (fi)
TW (1) TWI554741B (fi)
WO (1) WO2012120190A2 (fi)

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JP6195051B2 (ja) * 2013-03-04 2017-09-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
US9958271B2 (en) 2014-01-21 2018-05-01 Invensense, Inc. Configuration to reduce non-linear motion
FI126071B (fi) * 2014-01-28 2016-06-15 Murata Manufacturing Co Parannettu gyroskooppirakenne ja gyroskooppi
FI126557B (fi) * 2014-05-07 2017-02-15 Murata Manufacturing Co Parannettu gyroskooppirakenne ja gyroskooppi
DE102014215038A1 (de) * 2014-07-31 2016-02-04 Robert Bosch Gmbh Mikromechanischer Sensor und Verfahren zur Herstellung eines mikromechanischen Sensors
KR101754634B1 (ko) * 2015-05-12 2017-07-07 주식회사 신성씨앤티 2자유도 감지 모드를 갖는 멤스 자이로스코프
DE102015213455A1 (de) * 2015-07-17 2017-01-19 Robert Bosch Gmbh OMM-Drehraten mit Antrieb ohne feststehende Elektroden
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DE102017130384B4 (de) * 2016-12-19 2022-03-31 Analog Devices, Inc. Gyroskop mit synchronisierter Masse
KR102052592B1 (ko) * 2017-02-24 2019-12-06 한국기계연구원 고열전도 질화규소 소결체의 제조방법
US10948294B2 (en) 2018-04-05 2021-03-16 Analog Devices, Inc. MEMS gyroscopes with in-line springs and related systems and methods
US11692825B2 (en) 2020-06-08 2023-07-04 Analog Devices, Inc. Drive and sense stress relief apparatus
US11686581B2 (en) 2020-06-08 2023-06-27 Analog Devices, Inc. Stress-relief MEMS gyroscope
US11698257B2 (en) 2020-08-24 2023-07-11 Analog Devices, Inc. Isotropic attenuated motion gyroscope

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Also Published As

Publication number Publication date
FI20115223A (fi) 2012-09-05
JP6027029B2 (ja) 2016-11-16
WO2012120190A2 (en) 2012-09-13
US20120222483A1 (en) 2012-09-06
TWI554741B (zh) 2016-10-21
CN103492836A (zh) 2014-01-01
JP2014510271A (ja) 2014-04-24
EP2681511B1 (en) 2017-07-26
EP2681511A2 (en) 2014-01-08
SG192998A1 (en) 2013-10-30
EP2681511A4 (en) 2014-09-10
FI20115223A0 (fi) 2011-03-04
IL228048A0 (en) 2013-09-30
FI124020B (fi) 2014-02-14
WO2012120190A3 (en) 2012-11-01
CN103492836B (zh) 2016-04-06
TW201248121A (en) 2012-12-01
US9127943B2 (en) 2015-09-08
KR101795364B1 (ko) 2017-11-08
IL228048A (en) 2017-09-28
KR20140009434A (ko) 2014-01-22

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